JP4339164B2 - Fine wire winding device - Google Patents

Description

  The present invention relates to a thin wire winding device, and more particularly, to a thin wire winding technique suitable for use as a bonding wire used for connecting a semiconductor product or the like.

  Bonding wires are used for the connection of semiconductor products, for example, large-scale integrated circuits such as LSI. In recent years, thin wires used as such bonding wires tend to have a smaller wire diameter, and if the tension is unstable during the connection of semiconductor products, the connection may be disturbed, so this is avoided. For this reason, it is manufactured by a thin wire winding device that winds with the tension reduced uniformly (see, for example, Patent Document 1).

As shown in FIG. 4, the conventional thin wire winding device is provided between a feeding body (bobbin) 2 around which the thin wire 1 is wound and a winding body 3 that winds the thin wire 1 fed out from the feeding body 2. And a dancer 4 that swings according to the feed amount of the thin wire 1, adjusts the feed amount of the feed body 2 according to the swing angle, and adjusts the tension state of the thin wire, and an annealing furnace 5. And a plurality of guide rollers 6a to 6d.
And the fine wire 1 drawn out from the feeding body 2 is annealed by passing through the annealing furnace 5 through the guide roller 6a, the dancer 4 and the guide roller 6b, and then passes through the guide rollers 6c and 6d, so that the fine wire 1 The tension of 1 is reduced so that it is wound around the winding body 2.

The dancer 4 is supported so as to be swingable about the fulcrum 4a, and is set so as to be balanced with the tension of the thin wire 1 fed out from the feeding body 2, and the swing angle varies depending on the feed amount of the thin wire 1. It is going to change. That is, when the feed amount of the thin wire 1 becomes a substantially set amount, the angle becomes a stable angle, for example, and when the feed amount of the thin wire 1 changes, the tension of the fine wire 1 with respect to the dancer 4 fluctuates accordingly. Since the swing angle of the dancer 4 is changed, the feed amount of the fine wire 1 fed out from the feed body 2 is controlled based on the changed swing angle of the dancer 4, so that the feed of the fine wire 1 is adjusted. Yes.
Therefore, the thin wire winding device detects a change in tension based on a change in the feed amount of the thin wire 1 wound around the feeding body 2, and the thin wire 1 is wound on the winding body regardless of the tension variation. As a result of being wound around 3, a desired length and a desired tension can be obtained.
JP 2002-282929 A

By the way, in the above-mentioned conventional thin wire winding device, when the thin wire 2 fed out from the feeding body 2 is a gold wire when the thin wire 1 is fed out from the feeding body 2, the gold wires are easily metal-bonded, The fine wire 1 may not be fed out from the feeding body 2 in some cases, and when the feeding of the thin wire 1 is unstable, or the thin wire 1 wound around the feeding body 2 in advance in the wire drawing step Although it has been wound up, it has been pulled up with high tension because of its high pulling force from the die, and sometimes a large amount of winding tightening has occurred. However, when the feeding amount of the feeding body 2 is adjusted in accordance with the feeding state from the feeding body 2, the thin wire 1 is tightened. Good due to changes in force, etc. When the thin wire 1 is fed out, the feeding amount of the feeding body 2 changes abruptly, and the dancer 4 and the thin wire 1 move up and down greatly, and the thin wire 1 may come off from the guide roller or the like. There was a problem.
In addition, as described above, the influence of the guide roller wire wrinkles caused by the vertical movement of the dancer 4 and the fine wire 1 is large, and there is a problem that the fine wire 1 is defective.

  The present invention has been made in view of such circumstances, preventing the dancer from shaking excessively, preventing the fine wire from coming off the guide roller, and preventing the gold wire from being defective, An object of the present invention is to provide a thin wire winding device that can wind well.

In order to achieve the above object, the present invention proposes the following means.
The invention according to claim 1 is arranged on a winding path between a feeding body around which a thin wire is wound and a winding body that winds up the thin wire, and the feeding body according to a change in a feeding amount of the thin wire. In the fine wire winding device provided with the dancer that maintains the tension state of the fine wire by adjusting the amount of the fine wire fed, the amount of the fine wire fed changes between the dancer and the winding body. According to the present invention, there is provided a sag absorbing means for absorbing a sag generated in the fine wire and maintaining a tension state of the fine wire.
As a result, even when the amount of thin wire fed changes greatly, the slack absorbing means absorbs slack in the thin wire, so that the dancer and the thin wire can be prevented from swinging.
The invention according to claim 2 is the thin wire winding device according to claim 1, wherein a plurality of the slack absorbing means are provided.
As a result, when a plurality of slack absorbing means are provided, it is possible to more effectively absorb the shake with respect to the dancer, and to more stably perform the shake absorbing function.
According to a third aspect of the present invention, in the fine wire winding device according to the first or second aspect, the slack absorbing means is configured such that a roller for guiding the thin wire rotates at the tip of an arm supported so as to be swingable around a fulcrum. It is characterized by comprising a single pendulum provided freely.
Thereby, the slack absorbing means can be realized with a simple configuration, and the fine wire can be wound up well.
According to a fourth aspect of the present invention, in the fine wire winding device according to the third aspect, the sag absorbing means is provided with a urging member that urges the roller in a direction to absorb the slack of the thin line. It is characterized by.
As a result, since the roller is biased by a biasing member such as a spring, the vibration cycle of the roller can be shortened, and the responsiveness of the slack absorbing means can be improved. It is possible to cope with the above, and it is possible to increase the reliability as the sag absorbing means and to further enhance the effect.

  According to the present invention, it is possible to prevent the dancer from shaking excessively, prevent the fine wire from coming off the guide roller, or prevent the gold wire from being defective, and wind the fine wire well.

Embodiments of the present invention will be described below with reference to the drawings. 1 and 2 are views showing a gold wire winding device according to a first embodiment of the present invention. FIG. 1 is an overall view showing the gold wire winding device, and FIG. 2 shows a slack absorbing means. It is expansion explanatory drawing of the principal part.
A gold wire winding device 10 shown in FIG. 1 is a device for manufacturing a gold wire (fine wire) as a bonding wire used for wiring of a semiconductor product, for example, and is a bobbin as a feeding body around which the gold wire 11 is wound. 12, a bobbin 13 as a winding body for winding the gold wire 11 fed out from the bobbin 12, a dancer 14 provided on a winding path between the bobbin 12 and the bobbin 13, an annealing furnace 15, a plurality of Sheaves 16a to 16d as guide rollers are provided.

  The dancer 14 performs a so-called tension detection function, and includes an arm 14b that is swingably supported around a fulcrum 14a, and a roller 14c that is rotatably supported at the tip of the arm 14b. The gold wire 11 fed on the roller 14c is guided on the roller 14c. The dancer 14 swings due to the tension of the gold wire 11 that changes in accordance with the feed amount (feed amount per unit time) of the gold wire 11 fed from the bobbin 12.

The dancer 14 is provided with an angle detector (not shown). The angle detector detects an angle when the dancer 14 swings according to the fluctuation of the tension of the gold wire 11, and based on the angle. By controlling the rotation speed of the bobbin 12, the feeding amount of the gold wire 11 fed out from the bobbin 12 is adjusted. The angle detector is configured by using a magnetic hysteresis or a tilt angle sensor.
That is, when the gold wire 11 is not properly fed out from the bobbin 12 due to a metal bond between the gold wires 11 or a winding force of the gold wire 11 with respect to the bobbin 12 is large, the tension of the gold wire 11 increases. The dancer 14 is displaced upward, the angle detector detects the swing angle of the dancer 14, the rotational speed of the bobbin 12 is increased so that the swing angle of the dancer 14 is within a predetermined range, and the gold The tension state of the wire 11 is adjusted.
When the tension is reduced by increasing the feeding amount of the gold wire 11, the dancer 14 is displaced downward accordingly, and the swing angle of the dancer 14 is decreased, and when the predetermined swing angle is reached, the angle detection is performed. The container adjusts the bobbin 12 so that the rotation speed of the bobbin 12 is low so that the gold wire 11 does not sag , and is provided between the sheave 16b and the sheave 16c in this embodiment.
The sheaves 16a to 16d are rotatably supported on a winding path between the bobbin 12 and the bobbin 13, respectively.

Further, as shown in FIG. 1, the wire winding device 10 is provided with a sag absorbing means 20 on the winding path.
As shown in FIG. 2, the sag absorbing means 20 includes a fulcrum 21 attached to the apparatus main body, an arm 22 provided rotatably with respect to the fulcrum 21, and a roller provided at an end of the arm 22. 23, an arm 27 arranged in a direction orthogonal to the arm 22 and supported rotatably with respect to the fulcrum 21, and a counterweight 24 provided at an end of the arm 27.
The arm 22 is disposed so as to be gradually displaced upward from the fulcrum 21 toward the roller 23, and the arm 27 is gradually moved from the fulcrum 21 toward the counterweight 24. It is inclined and arranged so as to face.
Further, the arm 22 and the arm 27 are connected at the fulcrum 21, and the angle formed between the arm 22 and the arm 27 is kept constant.
Further, the slack absorbing means 20 is disposed so that the roller 23 is positioned slightly above the fulcrum 21 as shown in FIG. The counterweight 24 is arranged so as to be positioned slightly above the bottom dead center.

Since the gold wire winding device 10 of this embodiment is configured as described above, its operation will be described next.
In FIG. 1, when the gold wire 11 is drawn from the bobbin 12, the drawn gold wire 11 passes through the sheave 16a, the dancer 14, the sheave 16b, the annealing furnace 15, the sheave 16c, the slack absorbing means 20, and the sheave 16d. The bobbin 13 is wound up. In this case, although not shown, the gold wire 11 that has passed through the annealing furnace 15 is wound around the bobbin 13 after a desired coating is applied by a coating means (not shown) provided downstream thereof. It will be.

At the time of winding by the bobbin 13, if the feed amount changes according to the fluctuation of the tension of the gold wire 11 fed from the bobbin 12, the swing angle of the dancer 14 changes accordingly, and based on the swing angle. The rotation speed of the bobbin 12 is adjusted.
For example, if the amount of feeding of the gold wire 11 is small, the dancer 14 swings so as to be lifted upward with the fulcrum 14a as the center, so that the swing angle of the dancer 14 is detected by an angle detector (not shown), A bobbin motor (not shown) rotates at a high speed, whereby the amount of feeding of the gold wire 11 increases, whereby the tension of the gold wire 11 passing through the winding path is adjusted.

On the other hand, if the feeding amount of the gold wire 11 is large, the tension of the gold wire 11 with respect to the dancer 14 becomes small, and the dancer 14 swings downward about the fulcrum 14a. As a result of the detection, the feeding speed of the bobbin 12 is reduced, thereby reducing the feeding amount of the gold wire 11 and adjusting the tension of the gold wire 11 passing through the winding path.
As a result, the gold wire 11 having a desired tension and a desired length can be wound around the bobbin 13 as a result.

On the other hand, since the surface of the gold wire 11 is active without being oxidized, it may be easily metal-bonded to each other, and may not be satisfactorily drawn from the bobbin 12, and when the gold wire 11 is wound around the bobbin 12. The bobbin 12 may be wound with a large tightening force and may not be fed out from the bobbin 12 satisfactorily.
In such a case, the dancer 14 swings upward by increasing the tension of the gold wire 11 due to the metal bond between the gold wires 11 or the tightening force.
Thus, once the dancer 14 suddenly swings upward, the bobbin 12 rotates at a high speed depending on the swing angle of the dancer 14, and the amount of feeding of the gold wire 11 increases rapidly. When the metal bond or the like is released, the gold wire 11 sags on the winding path , and the dancer 14 tends to swing significantly downward.
In particular, when the bobbin 12 rotates at a high speed, when the metal bond between the gold wires 11 is released or when the winding force of the gold wire 11 is reduced, the gold wire 11 is fed out well. Therefore, the feeding amount of the bobbin 12 becomes large, and the dancer 14 and the gold wire 11 move up and down greatly.

However, in this embodiment, the slack absorbing unit 20 is provided between the dancer 14 and the bobbin 13 in the winding path, the sag by extension amount from the bobbin 12 of the gold wire 11 is rapidly increased, slack absorbing unit 20 is displaced in accordance with the slack of the gold wire 11 and can absorb the slack of the gold wire 11, so that the dancer 14 is remarkably greatly swung downward due to a sudden increase in the feeding amount of the gold wire 11. It can be prevented from moving.
That is, when the sag occurs in the gold wire 11 due to an increase in the feeding amount of the gold wire 11, the counterweight 24 of the sag absorbing means 20 shown in FIG. Is displaced downward to absorb the slack generated in the gold wire 11.
That is, when a desired tension is generated in the gold wire 11, the counterweight 24 is located above the bottom dead center. Therefore, when a slack occurs in the gold wire 12, the counterweight 24 is While displacing toward the bottom dead center, the roller 23 is displaced downward via the arm 27 and the arm 22 connected to the arm 27 to prevent the sag in the gold wire 11, so that the dancer 14 suddenly To prevent downward displacement.

Furthermore, when the feeding amount of the gold wire 11 is small, the roller 23 is displaced upward to weaken the tension generated in the gold wire 11 and prevent the dancer 14 from being displaced upward.
In this way, the sagging prevention means 20 adjusts the tension of the gold wire 11 by swinging the roller 23 and the counterweight 24 around the fulcrum 21, and prevents the dancer 14 from being suddenly displaced. It has a simple pendulum structure.

Therefore, according to this embodiment, when the gold wire 11 is wound around the bobbin 12 in an unstable state, the sag absorbing means 20 can be Since the slack of the gold wire 11 can be absorbed by following the movement of the gold wire 11, it is possible not only to prevent the gold wire 11 from coming off the guide roller as in the prior art, but also to the gold wire 11. It is possible to prevent the occurrence of defects.
As a result, a sudden increase in the feeding of the gold wire 11 can be suppressed, and the gold wire 11 can be continuously fed in a stable state in the winding path. Winding can be stably and satisfactorily performed with tension, and the reliability as a gold wire winding device can be increased accordingly.

  The slack absorbing means 20 is composed of a simple pendulum in which a roller 23 for guiding the gold wire 11 is provided at the tip of an arm 22 supported so as to be rotatable about a fulcrum 21. Can be realized.

FIG. 3 shows a gold wire winding device according to a second embodiment of the present invention.
In this embodiment, the difference from the first embodiment is that a biasing member 26 for biasing the sag absorbing means 20 in the direction of absorbing the sag of the gold wire 11 in the winding path is provided. is there.
That is, the urging member 26 includes, for example, a coil spring interposed between the roller 23 and a fixing member provided above the roller 23.
This urging member 26 urges the roller 23 downward, and when the feeding amount of the gold wire 11 is large, the roller 23 is displaced downward to prevent sagging of the gold wire 11. Both of them prevent the dancer 14 from being suddenly displaced downward due to the slack in the gold wire 11.
As described above, since the roller 23 is urged by the urging member 26, when the feeding amount of the gold wire 11 is increased, the roller 23 is instantaneously displaced downward, so that the feeding amount of the gold wire 11 is rapidly increased. Even in this case, the slack of the gold wire 11 can be absorbed well, and the dancer 14 can be reliably prevented from being greatly displaced.

That is, according to this embodiment, when the feeding amount of the gold wire 11 is excessively increased by the urging member 26, the responsiveness of the sag absorbing means 20 can be improved, so that the excessive feeding amount of the gold wire 11 is increased. It is possible to reliably cope with the rapid increase in the sag , increase the reliability of the sag absorbing means 20, and enhance the effect.

In the above embodiment, an example is shown in which only one sag absorbing means is provided, but more may be provided. In this case, if a plurality of slack absorbing means are provided, the vibration absorption for the dancer can be performed more effectively, and the vibration absorption function can be performed more stably.
In the present embodiment, the urging member 26 is configured by a coil spring, but is not limited thereto as long as it urges the roller 23 downward.
Furthermore, although the example which used the gold wire as the gold wire was shown, it is needless to say that the present invention can be applied to other materials such as copper (Cu), aluminum (Al) and the like.

1 is an overall view showing a gold wire winding device according to a first embodiment of the present invention. It is expansion explanatory drawing of the principal part which shows the slack absorption means in a gold wire winding apparatus. It is a figure which shows the gold wire winding apparatus which concerns on 2nd Embodiment of this invention, Comprising: It is an expansion explanatory view of the principal part of a slack absorption means. It is explanatory drawing which shows the conventional gold wire winding apparatus.

Explanation of symbols

10 Gold wire winding device 11 Gold wire 12 Feeding body (bobbin)
13 Winding body (bobbin)
14 Dancer 20 Deflection Means 21 Supporting Point 22 Arm 23 Roller 26 Biasing Member

Claims (4)

It is arranged on the winding path between the feeding body around which the thin wire is wound and the winding body that winds up the thin wire, and the feeding body adjusts the feeding amount of the thin wire according to the change in the feeding amount of the thin wire. In the thin wire winding device provided with a dancer that maintains the tensile state of the thin wire by
Between the dancer and the winding body, there is provided a sag absorbing means for absorbing a sag generated in the fine line due to a change in a feeding amount of the fine line and maintaining a tension state of the fine line. A fine wire winding device. 2. The thin wire winding device according to claim 1, wherein a plurality of the slack absorbing means are provided. In the thin wire winding device according to claim 1 or 2,
The slack absorbing means comprises a single pendulum in which a roller for guiding a thin wire is rotatably provided at the tip of an arm supported so as to be swingable around a fulcrum. . In the thin wire winding device according to claim 3,
The slack absorbing means is provided with a biasing member that biases the roller in a direction to absorb slack of the thin wire.

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