JP4333678B2 - Linear motion bearing and method for forming lubricating film on linear motion bearing - Google Patents

Description

  The present invention relates to a linear motion type bearing and a method for forming a lubrication film for the linear motion type bearing, and more particularly to a linear motion type bearing suitable for use in a vacuum environment, a clean environment, a corrosive environment, etc. where normal grease or oil cannot be used. About.

  As the above-mentioned environment, for example, a conveyance system disposed inside a semiconductor manufacturing apparatus can be cited. In such an environment, if grease is used as a lubricant for a linear motion bearing, the oil content of the grease evaporates. As a result, problems such as deterioration of the lubrication function and contamination of the use environment occur.

  In such a case, conventionally, mainly at least one of an axial rail, a raceway surface of a cylindrical moving body, a surface of a rolling element, a soft metal such as gold, silver, lead, and copper, carbon or two Coating with a solid lubricant such as molybdenum sulfide in a film form is performed.

  By the way, in the coating film made of the above-mentioned solid lubricant, although this coating film peels off little by little as the rolling element rolls and slides, the dust generation state becomes low level compared with the case of using grease, but it is particularly clean. This level is incompatible with the environment. In particular, the amount of dust generation increases under high load conditions.

  In addition, the applicant of the present application coats a component of a linear motion bearing with a solid lubricant in which a fluorine-based resin is mixed in a binder. You can reduce to the difference.

  However, even with this coating film, in a situation where a relatively large radial load is applied, dust generation due to abrasion is remarkably increased in addition to peeling and missing, and the dust generation life is shortened. Moreover, when the coating film is peeled off or missing as described above, the rolling action of the direct acting type bearing, the lubricating action at the sliding part is lowered, and it becomes easy to adhere, such as contact between metals, There is a problem in terms of life, such as accelerated wear of each component. Further, in an environment where corrosive gas exists, as described above, each component of the coating film peeling and missing portions is corroded.

  Accordingly, an object of the present invention is to reduce dust generation and improve lubricity in a direct acting bearing so that a long life can be achieved.

A first linear motion type bearing according to the present invention includes a shaft-shaped rail, a movable body slidably attached thereto, and is arranged between the rail and the movable body and rolls in accordance with their relative sliding motion. A linear motion type bearing comprising a plurality of circulated rolling elements, wherein a solid film is formed at least on the rolling and sliding portions of the components of the linear motion bearing. Curing of at least one of the following chemical formulas 81, 82, 83, and 84 with a mixture of the compound shown and a flowable fluorine-containing polymer that does not bind to the fluorine-containing polymer having an isocyanate functional group at the end, in a predetermined ratio by crosslinking reaction, at least provided with a binding of either the following chemical formula 71 and 72 and 73 and 74, the end with isocyanate functionality fluorine-containing polymer Solid film der the flowable fluorine-containing polymer is dispersed not if is, the flowable fluorine-containing polymer is characterized in that it does not have a functional group.

The second linear motion bearing of the present invention includes a shaft-shaped rail, a movable body slidably attached thereto, and is arranged between the rail and the movable body and rolls in accordance with their relative sliding motion. A linear motion type bearing comprising a plurality of rolling elements to be circulated, wherein a solid film is formed at least on the rolling and sliding portions of the components of the linear motion type bearing. Curing at least one of the above-mentioned chemical formulas 81, 82, 83, and 84 with a mixture of the compound shown and a flowable fluorine-containing polymer that is not bonded to a fluorine-containing polymer having an isocyanate functional group at the end in a predetermined ratio by crosslinking reaction, the solid was a monomer represented by the following chemical formula 91 provided with a binding of either at least the formula 71 and 72 and 73 and 74 as main structural units A is, the terminal Ri solid film der the flowable fluorine-containing polymer is dispersed without being combined with the isocyanate functional groups with a fluorine-containing polymer, wherein the flowable fluorine-containing polymer has no functional group It is characterized by that.

  The solid film has a three-dimensional network structure.

The method for forming a lubricating film of a linear motion bearing according to the present invention has no functional group in a solution obtained by diluting a fluorine-containing polymer having an isocyanate group as a functional group , which is a compound represented by the above chemical formula 61, in a solvent. A step of attaching a liquid film to at least the rolling and sliding portions of the components of the linear motion bearing using a solution containing a fluorine-containing polymer, and curing the attached liquid film to form a functional group And a step of curing the fluorine-containing polymer having an isocyanate functional group at the end of the network structure in which the fluorine-containing polymer not having a water content is dispersed while maintaining fluidity to form a solid film.

  In the present invention, since the molecules are closely packed and bonded to each other, separation and wear are less likely to occur during rolling and sliding contact between the components of the linear motion bearing. , Rolling and sliding resistance will be reduced.

  In particular, when the fluoropolymer is dispersed and added in a flowable state in the solid film, the flowable fluoropolymer oozes out of the solid film and contributes to the lubricating action.

  The aforementioned fluorine-containing polymer is a fluorine-containing polymer such as perfluoropolyether having no functional group.

  The direct acting bearing of the present invention uses a solid film that can suppress peeling, chipping, and wear and reduce rolling and sliding resistance as compared with conventional coating films. Can be improved, and can contribute to the improvement of operational stability and lifetime.

  Therefore, if the linear motion bearing of the present invention is used where high-precision processing is required, for example, in the semiconductor manufacturing process, it is difficult to inhibit the clean atmosphere, which can contribute to the improvement of the yield of semiconductor manufactured products.

  The details of the present invention will be described below based on the embodiment shown in FIGS. 1 to 8 show a linear motion ball bearing according to an embodiment of the present invention. FIG. 1 is a longitudinal sectional view, FIG. 2 is a transverse sectional view of FIG. 1, and FIG. FIG. 4 is a structural view schematically showing the structure of a solid film of a fluorine-containing polyurethane polymer compound formed on the direct acting bearing of FIG. 1, and FIG. 5 is a solid diagram of the fluorine-containing polyurethane polymer compound. FIG. 6 is a graph showing the result of property analysis in the state after curing of the solid film of the fluorine-containing polyurethane polymer compound, and FIG. 7 is the same linear motion type. FIG. 8 is a schematic diagram of a test apparatus used for measuring the dust generation amount of the bearing, and FIG. 8 is a graph showing test results relating to the torque life of the linear motion bearing.

  In the figure, A is a direct acting ball bearing, 1 is a rail made of a cylindrical shaft, 2 is a moving body made of a cylindrical member, 3 is a cage made of press, 4 is a ball, and 5 is a holding cylinder.

  The rail 1 is made of JIS standard SUS440C, and linear grooves 6 along the axial direction are provided over the entire length at six locations on the outer peripheral surface of the rail 1.

  The moving body 2 is also made of JIS standard SUS440C, and has six circumferentially axial positions in the inner circumferential surface of the inner circumferential surface of the load circulating ball train and the circumferentially opposed groove 6 of the rail 1 so as to face each other. Track grooves 91 and 92 for unloaded circulation ball rows are provided.

  The cage 3 is made of JIS standard SUS304 and has a cylindrical shape that is curved so as to be along a part of the inner peripheral surface of the moving body 2. Both end portions thereof are supported by the holding cylinder 5. Six horizontally long annular grooves 31 and 32 are provided symmetrically in the central region. The straight portion of the annular groove 31 is used for the load circulation ball row 41 because the bottom is penetrated and the bottom is absent. The annular groove 32 has a bottom and is used for the no-load circulation ball row 42.

  The two linear grooves 6 and 91 facing each other on the rail 1 side and the moving body 2 side as a pair constitute a total of six load ball transfer paths 12. The group of balls 4 existing in the ball transfer path 12 is located at the bottomless straight portion of the annular groove 31 of the cage 3. In addition, the groove 92 of the moving body 2 and the bottom portion of the annular groove 32 of the cage 3 are paired to constitute a total of six no-load ball circulation paths 13. Each of the six ball transfer paths 12 and each of the six ball circulation paths 13 adjacent to the six ball transfer paths 12 are connected in communication one by one, thereby constituting a ball circulation circuit. Therefore, the balls 4 are rolled and circulated between the ball transfer path 12 and the ball circulation path 13 in accordance with the relative axial sliding operation of the rail 1 and the moving body 2. .

  By the way, the cross section of the groove 6 of the rail 1 and the groove 91 of the moving body 2 is formed in a circulator arc shape, but may be a gothic arch shape. In this case, the cross sections of the grooves are each formed in a V shape, and the ball 4 is supported in four-point contact by a pair of grooves 6 and 91 facing each other. The two slopes of each of the grooves 6 and 91 are each formed with a gently curved surface. In addition, the circumscribed circle diameter of the balls 4 group when the balls 4 are applied to the grooves 6 of the rail 1 and the inscribed circle diameter of the balls 4 groups when the balls 4 are applied to the grooves 91 of the moving body 2 respectively. The ball 4 is supported in a four-point contact manner by the pair of grooves 6 and 91 by adjusting the difference between them and applying a predetermined preload.

  The rail 1, the moving body 2 and the ball 4 described above are formed of a corrosion resistant material. As this corrosion-resistant material, for example, in addition to martensitic stainless steel such as the above-mentioned JIS standard SUS440C, for example, a metal material obtained by subjecting a precipitation hardening type stainless steel such as JIS standard SUS630 to an appropriate hardening heat treatment. In light load applications, for example, austenitic stainless steel such as JIS standard SUS304 may be used.

  In addition, as a corrosion-resistant material regarding the rail 1, the moving body 2, and the ball 4, a ceramic material can be used in addition to a metal material. As this ceramic material, silicon nitride (Si 3 N 4) using yttria (Y 2 O 3) and alumina (Al 2 O 3) as a sintering aid, and aluminum nitride (AlN), titanium oxide (TiO 2), and spinel (MgAl 2 O 4) as appropriate. ), Alumina (Al2O3), silicon carbide (SiC), zirconia (ZrO2), aluminum nitride (AlN), or the like can be used. The retainer 3 is preferably made of brass, titanium, or the like in addition to JIS standard SUS304, but may be made of a synthetic resin material. Examples of the synthetic resin material include fluorine-based resins such as polytetrafluoroethylene (hereinafter abbreviated as PTFE) and ethylenetetrafluoroethylene (ETFE), polyetheretherketone (PEEK), polyphenylene sulfide (PPS), and polyether. Engineering plastics such as Sulphone (PES) and nylon 46 can also be used. Reinforcing fibers such as glass fibers may be added to these resins.

  A solid film 16 of a fluorine-containing polyurethane polymer compound is formed on the rolling and sliding portions of each component of these linear motion ball bearings A. However, in the drawing, the solid film 16 is illustrated as being formed only on the ball 4, but on the surface or outer surface of the groove 6 of the rail 1, the groove 91 of the moving body 2, and the annular groove 32 of the cage 3 Is also formed.

  The solid film 16 of a fluorine-containing polyurethane polymer compound has a unit represented by a general formula (-XF2X-O-) (X is an integer of 1 to 4) as a main structural unit, and all of them are cured with an average molecular weight of several million or more. It has a three-dimensional network structure in which molecules are bonded by reaction. The three-dimensional network structure is an expression in terms of chemical structure, and the cross-section of the film is not a network, but a homogeneous structure in which molecules are connected in a continuous manner like a network. It means that As such a polymer, the chemical structure can be changed by using a fluorine-containing polymer with a functional group having an isocyanate terminal at the end as shown in the following chemical formula 1. As the above-mentioned fluorine-containing polymer having an isocyanate-terminated functional group, a derivative of perfluoropolyether (PFPE), specifically, for example, a product name Fomblin Z derivative (FONBLIN Z DISOC, etc.) of Montecatini is preferably used. .

Next, an example of a method for forming the solid film 16 of the aforementioned fluorine-containing polyurethane polymer compound will be described.
(A) A solution for obtaining a solid film 16 of a fluorine-containing polyurethane polymer compound is prepared, and the rail 1, the moving body 2, the cage 3 and the ball 4 are individually provided in the prepared lubricating oil. Rolling of the rail 1, the moving body 2, the cage 3, and the ball 4 by immersing or rotating the completed linear motion ball bearing A assembled in a lubricating oil several times, A liquid film is attached to the sliding part (attachment treatment). The solution prepared here is a fluorine-containing polymer having a functional group whose end is isocyanate [FONBLIN Z DISOC], and the concentration of the fluorine-containing polymer is reduced to 1 mass% with a diluting solvent (fluorine solvent SV90D). It shall be diluted.
(B) The whole linear motion ball bearing A to which the liquid film is adhered is heated at 40 to 50 ° C. for about 1 minute to remove the solvent contained in the liquid film (drying treatment). At this time, it remains a liquid film and has fluidity.
(C) Then, it heats, for example at 100-200 degreeC for 20 hours (curing process). As a result, the solid film 16 of the fluorine-containing polyurethane polymer compound is obtained through a curing reaction by changing the chemical structure of the liquid film. By the way, in this curing treatment, the terminal isocyanate (NCO) disappears by the four kinds of curing reactions shown in the following chemical formulas 2 to 5 for each of the functionalized fluorine-containing polymers present in the liquid film. When the fluorine-containing polymers with functional groups are bonded to each other, a three-dimensional network structure is formed. Bonding is performed by a curing reaction as shown in Chemical Formulas 2 and 3, linearly cross-linking as schematically shown in FIG. 4A, and by a curing reaction as shown in Chemical Formulas 4 and 5, as shown in FIG. As schematically shown in (b), crosslinking is performed in a three-dimensional direction.

  In this way, the solid film 16 of the fluoropolyurethane polymer compound can be formed in a suitable film thickness on the parts that are in contact with each other in the components of the direct acting ball bearing A. Note that (a) and (b) may be repeated several times as necessary. Finally, the film thickness of the solid film 16 of the fluorine-containing polyurethane polymer compound is, for example, 0. It can set suitably in the range of 1-3 micrometers.

  Here, the state prepared by concentrating and drying the solution prepared in (a) (the state having fluidity) and the state prepared by attaching the solution prepared in (a) to a sample such as a stainless steel plate and curing the I will explain the properties.

  The former is analyzed by the FT-IR method (Fourier transform-infrared spectroscopy, liquid film method). As shown in the graph of FIG. 5, the result shows that NH (3300 cm −1), N═C═O (2279 cm −1), NHC═O (1712 cm −1, 1546 cm −1), in addition to the fluorine-based peak, Peaks such as benzene (1600 cm @ -1) are observed, and it can be confirmed that a benzene ring, NHC.dbd.O bond, and isocyanate are present as functional groups. Here, the cases of the thin film and the thick film are examined, but the analysis can be performed regardless of the film thickness. The latter is analyzed by the FT-IR method (Fourier transform-infrared spectroscopy, high sensitivity reflection method). As a result, as shown in the graph of FIG. 6, the peak of the benzene ring and NHC═O bond is seen, but the peak of isocyanate is not seen. That is, based on these results, changes in the chemical structure of the functional group due to the curing reaction shown in Chemical Formulas 2 to 5 are confirmed.

  The above-described solid film 16 of the fluorine-containing polyurethane polymer compound has a three-dimensional network structure, is densely coated on the object to be coated, and has self-lubricating properties. Thus, it is possible to suppress dust generation such as wear and separation associated with rolling and sliding operations, and to avoid direct contact between the components of the direct acting bearing.

  By the way, as another embodiment of the present invention, the solid film 16 of the fluorine-containing polyurethane polymer compound described in the above-described embodiment includes a fluorine-containing material such as fluoropolyether in a three-dimensional network structure in which the molecules are urethane-bonded. A structure in which a polymer is dispersed and added so as to be flowable. In this case, specifically, in the adhesion treatment of (a) in the formation method described above, the prepared solution is a fluorine-containing polymer having an isocyanate functional group at its end [for example, the trade name Fonbrin Z derivative (FONBLIN Z DISOC etc. )] And a fluorine-containing polymer having no functional group as a fluorine-containing compound [for example, trade name Fomblin Z derivative (FONBLIN Z-60 etc.)] may be mixed at a predetermined ratio. For this reason, in the curing process (c), the fluorine-containing polymer having no functional group is not bonded to the fluorine-containing polymer having a functional group, so that it can flow inside the solid film 16 of the fluorine-containing polyurethane polymer compound. The lubricating action is exhibited by oozing out from the solid film 16 of the fluorine-containing polyurethane polymer compound.

  Then, the dust generation life in the atmospheric environment and the torque life in the vacuum environment of the solid film 16 of the above-mentioned fluorine-containing polyurethane polymer compound are examined, and will be described. Here, a total of five examples, reference examples 1 to 3 and comparative examples are listed.

  In Examples and Reference Examples 1 to 3, a solid film of a fluorine-containing polyurethane polymer compound is formed on the entire surface of the rail, the moving body, the cage, and the ball, and the film thickness is set to 1 μm.

  The solid film of the fluorine-containing polyurethane polymer compound of Reference Example 1 is obtained by using only a fluorine-containing polymer having a functional group whose end is isocyanate [FONBLIN Z DISOC].

  The solid film of the fluorine-containing polyurethane polymer compound of Reference Example 2 has a functional group having a terminal hydroxyl group (—OH) with respect to a fluorine-containing polymer having an isocyanate functional group [FONBLIN Z DISOC]. It is obtained by adding a fluorine-containing polymer with a group [FONBLIN Z DOL].

  The solid film of the fluorine-containing polyurethane polymer compound of the example is different from the fluorine-containing polymer [FOMBLIN Z DISOC] having a functional group having an isocyanate terminal at the terminal with respect to the fluorine-containing polymer without a functional group [FOMBLIN Z derivative (FONBLIN Z-60)] is added.

  The solid film of the fluorine-containing polyurethane polymer compound of Reference Example 3 is a fluorine-containing fluorine-containing polymer having a terminal hydroxyl group compared to a fluorine-containing polymer having a terminal isocyanate functional group [FONBLIN Z DISOC]. It is obtained by adding a polymer [fomblin Z derivative (FONBLIN Z DOL)] and a fluorine-containing polymer having no functional group [fomblin Z derivative (FONBLIN Z-60)].

  In the comparative example, a coating film is formed on the entire surface of the rail, the moving body, the cage, and the ball. This coating film is obtained by dispersing and mixing polytetrafluoroethylene (PTFE) in a binder made of a thermosetting synthetic resin (polyimide), and has a film thickness of 1 μm. This coating film has a structure in which a relatively hard and dense thermosetting synthetic resin is in a sea state, and heterogeneous polytetrafluoroethylene is scattered in an island shape, and the bond between the two becomes weak. Yes.

  The test uses the apparatus shown in FIG. In the figure, 60 is a test direct acting ball bearing, 61 is a rail, 62 is a case, 63 is a particle monitor, 64 is a load weight, and M1 and M2 are motors for driving the load weight.

  The test conditions are as follows.

・ Reciprocating speed: 20-30mm / s
・ Load: Radial load (25N, 50N, 100N)
・ Stroke: 100mm
・ Atmosphere: Air, inside clean bench (Class 10)
Vacuum (2.6 x 10-4 Pa or less)
-Environmental temperature: Room temperature-Measurement conditions: Number of dust particles having a particle diameter of 0.1 μm or more The linear motion ball bearing used in the test is model number SESDM10ST5 manufactured by Koyo Seiko Co., Ltd.

  (i) In the dust generation life test, the atmosphere is air, the environmental temperature is room temperature, and the radial load is 100N. In the dust generation life test, the time until the time when the total amount of dust generation is 1000 / 0.1 cf or more is measured 10 times continuously and converted to the movement distance. Measurements are made at 10 minute intervals. The concentration of the fomblin Z derivative (FONBLIN Z DISOC) in Reference Example 1 is 1 mass%, and in Reference Example 2, the concentration of the base fomblin Z derivative (FONBLIN Z DISOC) is 1 mass%, and the fomblin Z derivative added ( The concentration of FONBLIN Z DOL) is 0.25 mass%, and in the examples, the concentration of the base fomblin Z derivative (FONBLIN Z DISOC) is 1 mass%, and the concentration of the added fomblin Z derivative (FONBLIN Z-60) is 0. .25 mass%, Reference Example 3 shows that the concentration of the base fomblin Z derivative (FONBLIN Z DISOC) is 1 mass%, and the fomblin Z derivative (FONBLIN Z DOL) and the fomblin Z derivative (FONBLIN Z-60) are added. The total concentration is 0.25 mass%.

  As a result, it was 10 km in the comparative example, 15 km in the reference example 1, 30 km in the reference example 2, 60 km in the example, and 58 km in the reference example 3, and the examples, reference example 3, reference example 2, reference example in the order of long life. 1 is a comparative example. That is, a solid film of a fluorine-containing polyurethane polymer compound obtained by using only a fomblin Z derivative (FONBLIN Z DISOC) as in Reference Example 1 is superior to the comparative example, but the base as in Reference Examples 2 and 3 is used. Fluorine-containing polyurethane polymer obtained by adding the fomblin Z derivative having a functional group in the side chain to the fomblin Z derivative (FONBLIN Z DISOC) or the fomblin Z derivative having no functional group in the examples. The solid film of the compound is even better than Reference Example 1.

  That is, in the solid film 16 of the fluorine-containing polyurethane polymer compound of Examples and Reference Example 1, Reference Example 2, and Reference Example 3, it is a homogeneous film tightly packed with a three-dimensional network structure. At the time of rolling and sliding between the components of the ball bearing A, peeling and wear are less likely to occur.

  By the way, in Example and Reference Example 3, when the radial load is 50 N, the dusting life is 100 km and 95 km, respectively, and when 25 N, the dusting life is greatly improved to 300 km and 295 km, respectively. . Reference examples 2 and 1 also improve at the same ratios as in the case of Example and Reference Example 3. On the other hand, in the comparative example, when the radial load is 50 N, the dusting life is improved to 20 km, but is considerably lower than that in the example.

  From the above results, it was found that it is preferable to add some kind of lubricating oil as the solid film 16 of the fluorine-containing polyurethane polymer compound rather than using only the fomblin Z derivative (FONBLIN Z DISOC). As for the lubricating oil to be added, it was found from the above results that a fomblin Z derivative having no functional group is most preferable.

  Therefore, the amount added will be examined. The concentration of the base fomblin Z derivative (FONBLIN Z DISOC) is 1 mass%, and the concentration of the fomblin Z derivative (FONBLIN Z-60) to be added is 0.25 mass% and 0.5 mass%. A load of 100 N) was examined. As a result, 0.25 mass% is 60 km, 0.5 mass% is 40 km, and 0.25 mass% is considered appropriate. However, with regard to the amount of addition, the upper and lower limits are provided with a margin of 1% by mass of the base fomblin Z derivative (FONBLIN Z DISOC), and the amount of fomblin Z derivative (FONBLIN Z-60) to be added. The concentration can be in the range of 0.1 to 0.75 mass%. Moreover, the density | concentration of the fomblin Z derivative | guide_body (FONBLIN Z DISOC) used as a base can be made into the range of 1-10 mass%. In this case, when the concentration of the base fomblin Z derivative (FONBLIN Z DISOC) is, for example, the upper limit of 5 mass%, the concentration of the fomblin Z derivative (FONBLIN Z-60) to be added is also 0.5-2. It is preferable to set both ratios to be always constant within a range of 5 mass%. However, the life of dust generation tends to decrease as the concentration of the base increases.

  (ii) In the torque life test, the atmosphere is vacuum, the environmental temperature is room temperature, and the radial loads are 25N and 50N. Here, the example and the comparative example are examined. As shown in the graph of FIG. 8, in the example, it is cut off at 50 km, but the torque is reduced to 0.01 to 0.02 N · m at a radial load of 25 N and 0.02 to 0.03 N · m at a radial load of 50 N. However, in the comparative example, the torque is 0.02 to 0.03 N · m at a radial load of 25 N, and the torque is 0.04 to 0.05 N · m at a radial load of 50 N. As described above, the torque of the example can be considerably reduced to about ½ that of the comparative example.

  As described above, the torque life was significantly better than that of the comparative example. In other words, since the added component does not bind to the base component, the added component has fluidity, and thereby exerts a lubricating action, which has an effect on torque reduction. Conceivable.

In addition, this invention is not limited only to the said Example, Various application and deformation | transformation can be considered.
(1) Other types of linear motion ball bearings described in the above embodiment, for example, as shown in FIGS. 9 and 10, a so-called linear motor provided with a saddle type moving body 2 straddling a rectangular rail 1. The present invention can also be applied to a linear motion bearing such as a motion guide. Moreover, as shown in FIG. 11, this invention is applicable also to the type which is not provided with a rolling element. Also in these cases, the formation position of the solid film 16 may be at least a rolling part or a sliding part.
(2) In the above embodiment, for the curing process (c), the energy of electromagnetic waves (light) such as ultraviolet rays, infrared rays, γ rays, and electron beams can be used instead of heating.
(3) In the said Example, you may abbreviate | omit the drying process of (b).
(4) In the above embodiment, the solid film 16 of the fluorine-containing polyurethane polymer compound is formed on all of the rail 1, the moving body 2, the cage 3, and the ball 4. However, the rail 1, the moving body 2, and the cage 3 or only the ball 4 can be formed.
(5) In the above embodiment, the solid film 16 of the fluorine-containing polyurethane polymer compound is also formed on the outer surface to be coated, but the groove 6 of the rail 1, the groove 91 of the moving body 2, and the annular shape of the cage 3 It can be formed only in the groove 32. In this case, unnecessary portions may be masked and each single unit may be immersed in the solution prepared in the above (a) and cured as appropriate before assembling as a direct acting bearing. However, if the solid film 16 is also formed on the outer surface, the corrosion prevention effect is enhanced even when used in a corrosion-resistant environment, and it is not necessary to perform a separate corrosion prevention treatment.

1 is a longitudinal sectional view of a direct acting ball bearing according to an embodiment of the present invention. Cross-sectional view of FIG. Rail cross section FIG. 1 is a structural diagram schematically showing the structure of a solid film of a fluorine-containing polyurethane polymer compound formed on the direct acting bearing of FIG. The graph which shows the property analysis result in the state before hardening of the solid film of a fluorine-containing polyurethane polymer compound The graph which shows the property analysis result in the state after hardening of the solid film of a fluorine-containing polyurethane polymer compound Schematic diagram of the test equipment used to measure the amount of dust generated by the linear motion bearing Graph showing test results on torque life of the linear motion bearing The perspective view of the linear motion guide concerning the other Example of this invention. Cross-sectional view of FIG. Cross-sectional view of a linear guide according to still another embodiment of the present invention.

Explanation of symbols

A Direct-acting ball bearing 1 Rail 2 Moving body 3 Cage 4 Ball 6 Axis groove 91 Moving body groove 31 Cage annular groove 12 Ball transfer path 13 Ball circulation path 16 Fluorine-containing polyurethane polymer compound solid film

Claims (7)

Linear motion comprising a shaft-shaped rail, a movable body slidably attached thereto, and a plurality of rolling elements that are arranged between the rail and the movable body and are circulated in association with their relative sliding motion Type bearings,
A solid film is formed at least on the rolling and sliding parts of the components of the linear motion bearing,
The solid film is a mixture of a compound represented by the following chemical formula 21 and a flowable fluorine-containing polymer that does not bind to a fluorine-containing polymer having an isocyanate functional group at the end, at least in the following chemical formulas 41 and 42: and by crosslinking with any of the curing reaction of 43 and 44, provided with a binding of either at least the following chemical formulas 31 and 32 and 33 and 34, the terminal does not bind with the isocyanate functional groups with a fluorine-containing polymer flow solid film der the fluorine-containing polymer is dispersed as possible is, the flowable fluorine-containing polymer has no functional group, direct-acting bearings, characterized in that.

Linear motion comprising a shaft-shaped rail, a movable body slidably attached thereto, and a plurality of rolling elements that are arranged between the rail and the movable body and are circulated in association with their relative sliding motion Type bearings,
A solid film is formed at least on the rolling and sliding parts of the components of the linear motion bearing,
The solid film is a mixture of a compound represented by the chemical formula 21 and a flowable fluorine-containing polymer that is not bonded to a fluorine-containing polymer having an isocyanate functional group at a predetermined ratio, and at least the chemical formulas 41 and 42 described above. and by crosslinking with any of the curing reaction of 43 and 44, a solid film a monomer represented by the following chemical formula 51 provided with a binding of either at least the formula 31 and 32 and 33 and 34 as main structural units there are, the ends Ri solid film der the flowable fluorine-containing polymer is dispersed without being combined with the isocyanate functional groups with a fluorine-containing polymer, wherein the flowable fluorine-containing polymer has no functional group, This is a direct acting type bearing.

The linear motion bearing according to claim 1, wherein the rail and the moving body are made of metal. A linear motion bearing comprising a shaft-like rail and a movable body slidably attached thereto,
A solid film is formed on at least the sliding part of the components of the linear motion bearing,
The solid film is a mixture of a compound represented by the chemical formula 21 and a flowable fluorine-containing polymer that is not bonded to a fluorine-containing polymer having an isocyanate functional group at a predetermined ratio, and at least the chemical formulas 41 and 42 described above. And at least a bond of any one of the above chemical formulas 31 and 32, 33 and 34, and the terminal does not bind to a fluorine-containing polymer having an isocyanate functional group. solid film der the fluorine-containing polymer is dispersed as possible is, the flowable fluorine-containing polymer has no functional group, direct-acting bearings, characterized in that. A linear motion bearing comprising a shaft-like rail and a movable body slidably attached thereto,
A solid film is formed on at least the sliding part of the components of the linear motion bearing,
The solid film is a mixture of a compound represented by the chemical formula 21 and a flowable fluorine-containing polymer that is not bonded to a fluorine-containing polymer having an isocyanate functional group at a predetermined ratio, and at least the chemical formulas 41 and 42 described above. And a solid film having at least a bond of any one of the above chemical formulas 31 and 32 and 33 and 34 and having a unit represented by the above chemical formula 51 as a main structural unit. there are, the ends Ri solid film der the flowable fluorine-containing polymer is dispersed without being combined with the isocyanate functional groups with a fluorine-containing polymer, wherein the flowable fluorine-containing polymer has no functional group, This is a direct acting type bearing. The solid film has a three-dimensional network structure, direct-acting bearing according to any one of claims 1 to 5. Using a solution obtained by diluting a fluorine-containing polymer having an isocyanate group as a functional group , which is a compound represented by the chemical formula 21, in a solvent, a solution obtained by adding a fluorine-containing polymer having no functional group, A step of attaching a liquid film to at least rolling and sliding portions of the components of the mold bearing;
The adhering liquid film is cured to cure the fluorine-containing polymer having an isocyanate functional group at the end of the network structure in which the fluorine-containing polymer having no functional group is dispersed while having fluidity, and a solid film Forming a step;
A method of forming a lubricating film for a direct acting bearing, comprising:

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