JP4328729B2 - Method for processing a workpiece having a fine shape - Google Patents

Description

  The present invention relates to a method for processing a workpiece having a fine shape, and, for example, a mold material for forming a Fresnel lens or a diffractive optical element is provided with a number of fine lattice shapes such as a cross-sectional blazed shape, etc. It is related with the processing method processed with high precision by.

  In recent years, diffractive optical elements have attracted attention as the demand for higher performance and miniaturization of optical systems increases. In particular, since the blazed cross-section (sawtooth) diffraction grating is thin and has high diffraction efficiency, it is being used in various industrial fields. For example, a scanning optical system of a recording apparatus such as a laser beam printer, an optical disk reproducing apparatus, etc. Application to optical pickups is under consideration.

  Such a blazed diffraction grating is often used as a diffraction grating having a convex power, and in order to mass-produce this type of diffraction grating, a die obtained by cutting a blazed shape opposite to the diffraction grating. In general, molding is used. At that time, as a mold material, soft metal such as phosphor bronze, oxygen-free copper, brass, etc. is used when making a flat shape with a replica, and when molding with plastic or glass, flat, spherical, Regardless of the free-form surface, a die base material having a surface treated with nickel plating, copper plating or the like is used, and a surface treatment layer such as nickel plating or copper plating is cut. In the glass mold, a super hard material is used as a mold base material. In addition, cemented carbide or single crystal diamond is used as a tool for processing them.

Further, in such a blazed diffraction grating, a grating composed of a large number of fine elements is formed on a workpiece as shown in FIG. 6, for example, and the inclined surface of this grating is directed to the center. The angle of the inclined surface with respect to the base surface is an inclination angle, and the angle with respect to the axis of the inclined surface is an opening angle. Further, as shown in FIG. 6, the grating height 201 is constant, and the pitch of the grating is slightly increased from the central part toward the end part. For this reason, the inclination | tilt angle of a grating | lattice becomes large toward the edge part from the center part.
As the required accuracy required for such a grating height, for example, an error of ± 0.05 μm is allowed in order to obtain a diffraction efficiency close to 100% for a constant grating height of 1.5 μm. It has not been.

As a processing method capable of processing such a diffraction grating with high shape accuracy in a short time, for example, in Patent Document 1, one rotation mechanism that controls the angular posture of a cutting tool having a square tip, Two translation mechanisms that control the relative position of the workpiece and the tip of the cutting tool on a plane perpendicular to the rotation axis, and diffracting the cutting edge of the cutting tool while constantly rotating the cutting tool by fly-cutting Along with controlling the relative driving of the cutting tool and the workpiece such as the diffraction grating so as to match the inclined surface where the inclination angle of the grating or the like changes, the cutting tool is rotationally driven and controlled so that a large number of fine shapes, etc. A method of processing all the workpieces in the above has been proposed.
JP 2000-87921 A

  However, as in Patent Document 1, one rotation mechanism that controls the angular posture of a cutting tool having a square tip and the relative position between the workpiece and the cutting tool tip on a plane perpendicular to the rotation axis are controlled. In order to continue quantitative processing with shape accuracy in the range of ± 0.05 μm in processing that requires two translation mechanisms, it is not always satisfactory to have such a mechanism. I can't get it. In such a machining form, the tool tip position is accurately matched with the center position of the rotation axis that controls the angular attitude of the tool in a range of 0.01 μm, for example, or the tool tip position is accurately obtained in such a range. After that, unless machining is performed to correct the amount of movement corresponding to the desired position, the tip position of the tool randomly changes on the arc on the machining device depending on the angle of the rotary shaft, and the workpiece In contrast, the shape cannot be formed with a desired accuracy.

  Furthermore, in such a cutting process, the cutting tool is actually processed as the frequency at which the tool tip position must be exactly matched to the rotational axis center position that controls the angular attitude of the tool or it must be obtained accurately. Because it is a consumable that needs to be replaced regularly due to problems such as tool wear and chipping caused by friction with the object, etc., processing depends on the mounting or removal position at the time of tool replacement, or the dimensional individual difference of the tool itself The reproducibility of the relative position between the tool tip position and the workpiece on the apparatus cannot be maintained. Therefore, it is necessary to correct the relative position between the tool tip position on the machining device and the workpiece not only when the tool is first installed on the machining device but also every time the tool is replaced. In Patent Document 1 and the like, no consideration is given to such measures.

  SUMMARY OF THE INVENTION In view of the above problems, the present invention provides a rotating mechanism having a rotation shaft for controlling the tip rotation angle posture of a cutting tool having a square tip, and a workpiece and a cutting tool on a plane perpendicular to the rotation shaft. In a machining method using a machining apparatus equipped with two translation mechanisms for controlling the relative position of the tip, the relative position between the tool tip position and the workpiece is corrected by a simple method, thereby quantitatively high-precision fineness. It is an object of the present invention to provide a method for processing a workpiece having a fine shape that can be processed in shape.

The present invention provides a method for processing a workpiece having a fine shape configured as follows.
That is, the machining method of the present invention includes a rotation mechanism having a rotation shaft for controlling the tip rotation angle posture of a cutting tool having a square tip, and a workpiece and a cutting tool on a plane perpendicular to the rotation shaft. In a processing method of a workpiece having a fine shape such as a diffraction grating in which the inclination angle of the grating cross section is changed using a processing device including two translation mechanisms for controlling the relative position of the tip, the angle of the rotation axis Are assigned to a plurality of angles, and in each of the angular postures assigned to the plurality of angles, a first step of performing a trial machining aiming at the same plane by position control of the two translation mechanisms, and after the first step, The level difference between the planes actually generated in the processing for each rotation angle and posture is measured, and the true position between the tip position of the cutting tool and the center of the rotation axis that controls the tip rotation angle and posture of the cutting tool is determined from the step. of relative A second step of calculating the location, on the basis of the calculation result of the true relative position in the second step, the two translation mechanism in accordance with the rotation angle of the rotating shaft to control the tip rotation angle posture of the cutting tool And a third step of machining the workpiece by correcting the relative position between the tip position of the cutting tool and the workpiece.

  According to the present invention, one rotation mechanism having a rotation axis that controls the tip rotation angle posture of a cutting tool having a square tip, and the relative relationship between the workpiece and the cutting tool tip on a plane perpendicular to the rotation axis. In a machining method using a machining device equipped with two translational mechanisms that control the position, the relative position between the tool tip position and the work piece is corrected by a simple method to quantitatively form a highly accurate fine shape. It is possible to realize a processing method of a workpiece having a fine shape that can be performed.

  With the above configuration, the above-described problem of the present invention is achieved. As a result of intensive studies by the inventor, when the tool is installed in the processing apparatus, trial machining is performed to accurately determine the tool tip position. This is because a technique for performing stable high-precision machining by correcting the position by numerically controlling the machining apparatus using the result is found.

This will be described in more detail below.
FIG. 1 shows the positional relationship between the tool tip position and the rotation center position on a plane perpendicular to the rotation axis for controlling the angular posture of the angular cutting tool tip. Their positional relationship on a plane perpendicular to the rotation control axis is expressed by binary values such as a relative difference (Xo, Zo) in an orthogonal coordinate system as shown in FIG. 1A, and as shown in FIG. In addition, there are two possible cases of expressing with binary values such as relative difference (Lo, θo) in the rotating coordinate system.
Then, as shown in FIG. 2, the true relative position (Xo, Zo) in the orthogonal coordinates can be decomposed as follows.
Xo = X1 + Xe
Zo = Z1 + Ze (Formula 1)
Here, (X1, Z1) is an approximate value for the true value (Xo, Zo), and is a design value or a value obtained in advance by measurement as described later.
Further, (Xe, Ze) is an error between the approximate value and the true value, and the amount is an unknown number.
In this state, if the angle of the axis that controls the tilt angle of the tool tip is rotated by θ, the tool tip position actually moves by the following amounts (ΔX, ΔZ).
ΔZ = Zo × cos θ−Xo × sin θ
ΔX = Xo × sin θ + Zo × cos θ (Formula 2)
That is, if an accurate value (Xo, Zo) is known, any rotation angle can be obtained by correcting the machining program by the two translation mechanisms of the machining apparatus by an amount of (ΔX, ΔZ) according to the angle θ of the rotation axis. However, a desired shape can be formed with a level of accuracy of the translation mechanism of the processing apparatus.
However, if the value of (Xo, Zo) is not accurately known, only the amount corresponding to the approximate value (X1, Z1) out of the movement amount (ΔX, ΔZ) to be corrected is similarly corrected by the machining program. However, an error occurs in the tool tip position with respect to the intended position to be machined by the following amount (ΔXe, ΔZe) corresponding to the error (Xe, Ze) from the true value.
ΔZe = Ze × cos θ−Xe × sin θ
ΔXe = Xe × sin θ + Ze × cos θ
In the embodiment of the present invention, this error amount (ΔXe, ΔZe) is reduced as much as possible by trial processing described below.
In this trial machining, first, as shown in FIG. 3, the axes for controlling the inclination angle of the tool tip are allocated at a plurality of angles such as two or three, and the program is corrected by the previous calculation by two translation mechanisms in each posture. , Processing aimed at the same plane. Thereafter, a step between planes actually generated by machining for each angle and orientation on the test work 3 is measured, and an accurate position between the tool tip position and the axis center for controlling the lattice angle is calculated from the step. The step at this time can be measured with high accuracy in a range of the order of 1 nm, for example, by using an optical interferometer measuring machine.

Also, the swing angle of the shaft for controlling the tilt angle of the tool tip at this time is desirably three types. Then, between the two step values ΔZ1 and ΔZ2 obtained by trial machining with three kinds of swing angles of θ0, θ1, and θ2, and the unknown (Xe, Ze), the following equation is obtained from the geometrical relationship of FIG. It holds.
ΔZ0 = Ze × cos θ0−Xe × sin θ0
ΔZ1 = Ze × cos θ1−Xe × sin θ1
ΔZ2 = Ze × cos θ2−Xe × sin θ2 (Formula 3)
However, if the difference between the values of X1 and Z1, which is an approximate value between the tool tip position and the axial center position that controls the inclination angle of the tool, is extremely large from the above formula, an error (ΔXe, Since the effectiveness rate with ΔZe) is small, the calculation of the larger value can be omitted, and the two types of swing angles can be obtained relatively accurately.
Further, specific swing angles of the three types of angles are the minimum angle θ0, the maximum angle θ1 and the intermediate angle θ2 (= (θ0 + θ1) / 2) is desirable.

Next, an embodiment of the present invention relating to the calculation of approximate values (X1, Z1) of the positional relationship between the tool tip position and the axis center that controls the inclination angle of the angle will be described.
First, a flat plate-like processed product having a parallelism of about 0.001 mm (hereinafter referred to as a flat plate workpiece) is prepared, and the thickness zt is measured with a vertical length measuring device or the like.
Next, as shown in FIG. 4 (a), the flat work is mounted and fixed on a processing machine, a cutter mark is attached to the upper surface or the lower face of the flat work, and the shaft for controlling the inclination angle is further rotated 180 degrees. A cutter mark is attached to the surface opposite to the tip of the workpiece at the position of the relative movement distance zm between the flat workpiece and the tool tip position using the translation mechanism of the machining apparatus.

Next, the tool tip position in the lateral direction of each cutter mark is measured with a microscope or the like from the end face of the flat work and their positions (xa, xb) are obtained. Further, the cutting depth at the tool tip position is measured from each cutter mark with an optical interferometer or the like, and the depths (za, zb) are obtained. From these measured values, the distance (X1, Z1) between the tool tip position and the axis center for controlling the inclination angle of the angle is calculated by the following equation.
X1 = | xa−xb | / 2
Z1 = | (zt-za-zb) -zm | / 2 (formula 4)
Note that the cutter mark surface may be attached to the left and right surfaces or the front and rear surfaces of the plane as shown in FIG.

In addition, when the distance (X1, Z1) between the tool tip position and the axis center that controls the tilt angle of the tool angle is assumed to be relatively small, the axis that controls the tilt angle while observing the tool tip position with a microscope. The distance (X1, Z1) may be calculated by measuring the moving distance of the tool tip position before and after rotating the tool 180 degrees.
Alternatively, when there is a record of the previous machining by the same setup mechanism and the approximate value is known in advance, it may be used as the value of (X1, Z1) as it is. The distance (X1, Z1) between the tool tip position thus obtained and the axis center that controls the inclination angle of the tool is corrected by the program, and the above-described trial machining is performed.

  In the embodiment of the present invention, after performing the above-described trial processing, the step between the planes actually generated in the processing for each rotation angle posture assigned at each of the plurality of angles is measured, and the step To calculate the exact position between the tip position of the tool and the center of the rotation axis that controls the tip rotation angle and posture of the tool, and using this calculated result, the rotation shaft that controls the tip rotation angle and posture of the tool The position of the two translation mechanisms is controlled in accordance with the rotation angle of the tool to correct the relative position between the tip position of the tool and the workpiece, thereby processing the workpiece.

  By using the above processing method according to the embodiment of the present invention, the plastic is directly cut, or the mold is cut and molded, for example, a scanning optical system of a recording apparatus such as a laser beam printer, A stable supply of a focus fluctuation suppressing lens (such as a Fresnel lens or a diffractive optical element) that can be used in an optical disk reproducing apparatus or a scouter optical system can be realized.

Examples of the present invention will be described below.
In the embodiment of the present invention, the diffraction grating of the lens 108 using the diffractive optical element in the fθ lens 100 of the scanning line optical system of the laser beam printer recording apparatus as shown in FIG. A molding piece was processed as a workpiece. FIG. 6 shows a configuration of a molding piece having the diffraction grating. FIG. 7 shows the appearance of a 5-axis control CNC machine tool (hereinafter simply referred to as a machine tool) used for machining the diffraction grating in the molding piece, and FIG. 8 shows an example of the machining state.

In FIG. 6, 1 is a molding piece, and 2 is a diffraction grating shape in the molding piece 1.
The optical surface dimension of the molding piece 1 is 230 × 8 mm, the grating section height 201 of the diffraction grating shape 2 is a constant 1.5 μm, and the allowable error is ± 0.05 μm. Further, since the grating cross-section pitch 202 is a triangular blazed shape having a width of 15 to 800 μm, the diffraction grating tilt angle 203 is 0.1 to 5.7 °, and the angle increases as the diffraction grating ring 204 moves outward. It is getting bigger.

Next, the configuration of the machine tool used in this embodiment will be described with reference to FIG.
Reference numeral 14 denotes a base of the machine tool, and vibration absorbing means 16 are attached to the four corners of the base 14, and the machine tool is installed on the floor via these vibration absorbing means 16. A surface plate is attached to the center of the upper surface of the base 14, and a pair of columns are fixed on the base 14 with the surface plate sandwiched therebetween, and the top beams 18A and 18B are connected to the upper ends of the pair of columns. Are connected together to form a strong portal structure.
A work table on which the forming piece 1 as a work is fixed is mounted on an x-axis slider 20 slidable in a first direction (X-axis direction) along the surface plate, and is an axis perpendicular to the surface plate. It is possible to turn around (C axis). The x-axis slider 20 is mounted on a y-axis slider that can slide along a surface plate in a second direction (Y-axis direction) orthogonal to the first direction. A table turning means 22 for turning the work table about the C axis is interposed between the work table and the X axis slider 20, and an x having a linear motor is provided between the X axis slider 20 and the y axis slider. An axis slider driving means 24 is interposed, and a Y axis slider driving means 26 having a linear motor is interposed between the Y axis slider and the surface plate.
Below the top beams 18A and 18B, an elevating beam that can be raised and lowered along an axial direction (Z-axis direction) perpendicular to the surface plate is disposed, and both ends thereof are connected via beam driving means having a linear motor 28. Are held by a pair of columns.

A tool head capable of turning about an axis parallel to the first direction (about the B axis) is attached to the elevating beam via the head turning means 30, and a spindle driving means 32 incorporated in the tool head. A cutter base having a single cutting edge chip provided on the outer peripheral surface is replaceably attached to the spindle, and the diffraction grating 2 of the work piece forming piece 1 is fly-cut into a predetermined shape.
Here, the operation of the table turning means 22, the x-axis slider driving means 24, the y-axis slider driving means 26, the beam driving means, the head turning means 30, and the spindle driving means 32 is controlled by the control device 36. In the device 36, in addition to data from the cutting data input means for inputting the moving locus of the cutting edge tip, vibration information from the vibration sensor incorporated in the base 14 and spindle driving means from the overload detection means 32 overload information and the like are input.

  The tool tip angle is approximately 90 °, which is attached to the machining apparatus of FIG. 7, and the state before machining is as shown in FIG. 9 with the B axis such that the bottom surface of the tool is horizontal with the X slide axis. The machine is set with the angle θ = 0 °. At this time, the cutter mark of the tool is placed on the flat test work, the cutter mark is observed with a measuring machine of an optical interferometer, and the B-axis control angle is set so that the inclination angle of the cutter mark becomes 0 °. Was adjusted to a position where θ = 0 °. Here, the relative position in the XY slider direction between the tool blade edge position and the B-axis center position is (Xo, Zo).

As shown in FIG. 10, the processing of the forming piece 1 is controlled so that the inclination angle (inclination angle 203 shown in FIG. 6) in the grating having the diffraction grating 2 coincides with the B-axis angle θ = Bn. Then, if the relative position in the XZ slider direction between the tool edge position and the B-axis center position at that time is (Xn, Zn), the previous θ = 0 ° due to the influence of the swing angle θ = Bn of the B-axis The relative movement amount (ΔX, ΔZ) from the position is expressed by the following equation, and is uniquely determined by (Xo, Zo) by (Equation 2).
ΔX = Xn−Xo
ΔZ = Zn-Zo
In the machining method of this example, the relative distance (Xo, Zo) between the tool tip and the B-axis center position, which varies depending on the assembly error of tool hire and individual differences in the tool dimensions, was accurately obtained for each tool change. After that, the machining program (in the direction of offset by the two translation mechanisms of the machining apparatus (here, the X slider on the workpiece 1 side and the Z slider on the tool side) with respect to the movement amount (ΔX, ΔZ) depending on the value ( Correct by numerical control). Here, in order to obtain the relative distance (X1, Z1) between the approximate tip of the tool edge and the B-axis center position, both planes of the flat work are horizontal with the Z-slider direction of the processing apparatus as shown in FIG. 4B. To hold on the worktable. In addition, when the thickness of the flat workpiece was measured with a vertical length measuring instrument before that, it was xt = 10.012 [mm].

Next, a specific processing procedure in the present embodiment will be described below.
First, a cutter mark was attached to the right plane of the flat work with the B-axis being θ = −90 °.
Next, with the B-axis inverted by θ = + 90 ° and simultaneously moving the X slider by xm = 101.000 [mm], a cutter mark is attached to the left plane of the flat work, and the position and depth of the cutter mark are determined. Was measured.
Here, the position of the cutter mark from the upper surface end of the flat work is measured by a microscope. When θ = −90 °, za = 5.32 mm, and when θ = + 90 °, zb = 5.44 mm. The depth from the plane portion was measured by optical interferometer, and when θ = −90 °, xa = 0.052 mm, and when θ = + 90 °, xb = 0.073 mm.

Here, the following change formula with respect to the configuration of the processing apparatus (Formula 4) holds.
Z1 = | za−zb | / 2
X1 = | (xt−xa−xb) −xm | / 2 (formula 4 ′)
As a result, the calculation result of Z1 = 0.06, X1 = 45.5565 is obtained, and this is inverted by 90 ° on the machining apparatus, and the coordinates of the tool tip position from the B-axis center position in consideration of the sign in the machine control coordinate system Obtained X1 = −0.06 [mm] and Z1 = −45.5565 [mm].
Next, in order to obtain an error (Xe, Ze) between the tool blade tip and the true relative distance (Xo, Zo) between the B-axis center position, the test work 3 is parallel to the work table plane (XY slider plane). The trial machining as shown in FIG. 3 is performed.
Since the B-axis swing angle in the main processing of the workpiece is θ = [0.1 to 5.7 °], three types of swing angles θ0 = 1 °, θ1 = 3 °, and θ2 = 5 ° between them. Machining was performed by correcting the movement amounts of the X and Z sliders for each swing angle with the machining program (numerical control) from the previous (X1, Z1) values so as to be in the same plane. The machining conditions at this time are such that the rotational speed r of the spindle 33 is 100 [rps] so that the cusp height (surface roughness) with a square shape (≈90 °) tool in plane machining is 0.02 [μm] or less. ], The feed speed f in the X-slider direction was set to 0.02 [mm / sec] (<0.00002 [mm] / tan (5 °) × 100 [rps]).

  After the trial machining, the test workpiece was removed from the machining apparatus, and the steps ΔZ1 and ΔZ2 for each swing angle as shown in FIG. 3 were measured with an optical interferometer. The measured values were ΔZ1 = 0.068 [μm] and ΔZ2 = 0.127 [μm]. By substituting this into (Equation 3) and solving the error (Xe, Ze) from the true value, Xe = 0.00220, Ze = 0.00728, and a more accurate value (Xo) from (Equation 1). , Zo) was calculated as Xo = −0.05780 [mm] and Zo = −45.55492 [mm].

In order to confirm the reliability of this value, the test work is mounted again on the processing device, the same trial processing is performed using (Xo, Zo) obtained from the previous test result, and the level difference is measured by the optical interferometer. As a result, ΔZ1 = 0.018 [μm] and ΔZ2 = −0.005 [μm], and it was confirmed that the machining accuracy with an allowable error of ± 0.05 μm was sufficiently satisfied.
Next, when the diffraction grating 2 of the LBP toric lens molding piece 1 shown in FIG. 6 was processed, high-precision processing such that the grating height in about 2500 grating rings was within ± 0.05 μm was realized. We were able to.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the positional relationship of the tool front-end | tip position and rotation center position in the plane perpendicular | vertical to the rotating shaft which controls the angle attitude | position of the square-shaped cutting tool front end explaining embodiment of this invention, (a) is orthogonal The figure which expressed the relative difference in a coordinate system with the binary of (Xo, Zo), (b) is the figure which expressed the relative difference in the rotating coordinate system with the binary of (Lo, θo). The figure which shows transition of the rotating shaft center and tool front-end | tip position by the rotating mechanism explaining embodiment of this invention. The figure explaining the trial process in embodiment of this invention. The figure explaining the example of a detection of the rough rotation center and tool front-end | tip position in embodiment of this invention. The figure which shows the structure of the shaping | molding piece with the diffraction grating of the lens using the diffractive optical element in the f (theta) lens of the scanning line optical system of the laser beam printer recording device in the Example of this invention. The applied processing shape in the Example of this invention. 1 is a schematic view of a processing apparatus used in an embodiment of the present invention. The figure which shows the processing state in the Example of this invention. The figure which shows the state of swing angle | corner (theta) = 0 of the rotating shaft in the Example of this invention. Sectional drawing of the processing state of the diffraction grating in the Example of this invention (rotation angle of rotating shaft (theta) = Bn).

Explanation of symbols

1: Workpiece (molding piece)
2: Diffraction grating shape 3: Test work (for trial machining)
4: Flat work (for approximate position calculation)
5: Square cutting tool

Claims (5)

One rotation mechanism having a rotation axis for controlling the tip rotation angle posture of the cutting tool having a square tip,
Using a processing device comprising two translation mechanisms for controlling the relative position of the workpiece and the cutting tool tip on a plane perpendicular to the rotation axis,
In a processing method of a workpiece having a fine shape such as a diffraction grating in which the inclination angle of the grating section changes,
A first step of allocating the angle of the rotation axis to a plurality of angles, and performing a trial machining aiming at the same plane by position control of the two translation mechanisms in each of the angle postures allocated to the plurality of angles;
Rotation that measures the step between the planes actually generated in the processing for each rotation angle and posture after the first step, and controls the tip position of the cutting tool and the tip rotation angle and posture of the cutting tool from the step. A second step of calculating a true relative position with respect to the center of the axis;
Based on the calculation result of the true relative position in the second step, the positions of the two translation mechanisms are controlled according to the rotation angle of the rotary shaft that controls the tip rotation angle posture of the cutting tool, and the cutting tool Correcting the relative position between the tip position of the workpiece and the workpiece, a third step of machining the workpiece;
A method for processing a workpiece having a fine shape, characterized by comprising:   The plurality of allocated angles are a minimum rotation angle, a maximum rotation angle, and an intermediate angle between the minimum and maximum rotation angles of a rotary shaft that controls a tip rotation angle posture of the cutting tool with respect to a changing inclination angle of the workpiece. The method for processing a workpiece having a fine shape according to claim 1, wherein the angle is three kinds.   The first step of performing the trial machining is to attach a cutter mark to the flat trial workpiece before and after rotating the rotary shaft that controls the tip rotation angle posture of the cutting tool by 180 degrees. The position between the cutter marks is calculated, and based on these calculation results, the position of the approximate tool tip position and the axis center of the rotation axis that controls the tip rotation angle posture of the cutting tool is obtained, and trial machining is thereby performed. The method for processing a workpiece having a fine shape according to claim 1, comprising a process to be performed.   The first step of performing the trial machining is to calculate the moving distance of the cutting tool tip before and after rotating the rotary shaft for controlling the tip rotation angle posture of the cutting tool with a microscope, And calculating a position of an approximate tool tip position and an axis center of a rotating shaft for controlling a tip rotation angle posture of the cutting tool based on the calculation result of the cutting tool, thereby performing a trial machining. Item 2. A method for processing a workpiece having the fine shape according to Item 1.   The first step of performing the trial machining is to determine the position of the approximate tool tip position and the axis center of the rotation axis that controls the tip rotation angle posture of the cutting tool based on the results of machining before tool replacement, The method for processing a workpiece having a fine shape according to claim 1, further comprising a process of performing trial processing.

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