JP4328629B2 - 被覆研磨物品 - Google Patents

被覆研磨物品 Download PDF

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Publication number
JP4328629B2
JP4328629B2 JP2003585934A JP2003585934A JP4328629B2 JP 4328629 B2 JP4328629 B2 JP 4328629B2 JP 2003585934 A JP2003585934 A JP 2003585934A JP 2003585934 A JP2003585934 A JP 2003585934A JP 4328629 B2 JP4328629 B2 JP 4328629B2
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JP
Japan
Prior art keywords
layer
coated abrasive
backing
abrasive article
binder precursor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003585934A
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English (en)
Japanese (ja)
Other versions
JP2005523169A5 (enExample
JP2005523169A (ja
Inventor
グレゴリー・エイ・コーンル
エドワード・ジェイ・ウー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2005523169A publication Critical patent/JP2005523169A/ja
Publication of JP2005523169A5 publication Critical patent/JP2005523169A5/ja
Application granted granted Critical
Publication of JP4328629B2 publication Critical patent/JP4328629B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06—Polymers provided for in subclass C08G
    • C08F290/061—Polyesters; Polycarbonates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
JP2003585934A 2002-04-19 2003-03-07 被覆研磨物品 Expired - Fee Related JP4328629B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/125,938 US6773474B2 (en) 2002-04-19 2002-04-19 Coated abrasive article
PCT/US2003/007395 WO2003089194A1 (en) 2002-04-19 2003-03-07 Coated abrasive article

Publications (3)

Publication Number Publication Date
JP2005523169A JP2005523169A (ja) 2005-08-04
JP2005523169A5 JP2005523169A5 (enExample) 2006-04-27
JP4328629B2 true JP4328629B2 (ja) 2009-09-09

Family

ID=29248404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003585934A Expired - Fee Related JP4328629B2 (ja) 2002-04-19 2003-03-07 被覆研磨物品

Country Status (8)

Country Link
US (1) US6773474B2 (enExample)
EP (1) EP1497079B1 (enExample)
JP (1) JP4328629B2 (enExample)
AT (1) ATE396011T1 (enExample)
AU (1) AU2003220160A1 (enExample)
BR (1) BR0309072B1 (enExample)
DE (1) DE60321154D1 (enExample)
WO (1) WO2003089194A1 (enExample)

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US20060110600A1 (en) * 2004-11-19 2006-05-25 3M Innovative Properties Company Anisotropic conductive adhesive composition
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US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
DE102005040126A1 (de) * 2005-08-25 2007-03-01 Altana Electrical Insulation Gmbh Überzugsmasse
US7399330B2 (en) * 2005-10-18 2008-07-15 3M Innovative Properties Company Agglomerate abrasive grains and methods of making the same
US20070116961A1 (en) * 2005-11-23 2007-05-24 3M Innovative Properties Company Anisotropic conductive adhesive compositions
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
JP5401311B2 (ja) * 2006-07-14 2014-01-29 サンーゴバン アブレイシブズ，インコーポレイティド 裏当てなしの研磨物品
EP2044163B1 (en) * 2006-07-24 2012-04-25 3M Innovative Properties Company Electrically conductive pressure sensitive adhesives
US20080102720A1 (en) * 2006-10-30 2008-05-01 3M Innovative Properties Company Abrasive article and method of making and using the same
WO2008079708A1 (en) * 2006-12-20 2008-07-03 3M Innovative Properties Company Coated abrasive disc and method of making the same
US7947097B2 (en) * 2006-12-21 2011-05-24 Saint-Gobain Abrasives, Inc. Low corrosion abrasive articles and methods for forming same
WO2009020872A1 (en) * 2007-08-03 2009-02-12 Saint-Gobain Abrasives, Inc. Abrasive article with adhesion promoting layer
AU2010343085A1 (en) * 2009-12-29 2012-06-14 Saint-Gobain Abrasifs Method of cleaning a household surface
ES2661972T3 (es) 2010-07-02 2018-04-04 3M Innovative Properties Company Artículos abrasivos recubiertos
JP6382109B2 (ja) 2011-12-29 2018-08-29 スリーエム イノベイティブ プロパティズ カンパニー 被覆研磨材物品及びその製造方法
US9393673B2 (en) 2012-07-06 2016-07-19 3M Innovative Properties Company Coated abrasive article
US9873180B2 (en) * 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
WO2016060712A1 (en) 2014-10-17 2016-04-21 Applied Materials, Inc. Cmp pad construction with composite material properties using additive manufacturing processes
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10086498B2 (en) 2014-12-31 2018-10-02 Saint-Gobain Abrasives, Inc. Coated abrasives having a supersize layer including an active filler
US10618141B2 (en) 2015-10-30 2020-04-14 Applied Materials, Inc. Apparatus for forming a polishing article that has a desired zeta potential
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
JP6157578B2 (ja) * 2015-12-24 2017-07-05 スリーエム イノベイティブ プロパティズ カンパニー 研磨用構造体及びその製造方法
US11845885B2 (en) 2015-12-30 2023-12-19 3M Innovative Properties Company Dual stage structural bonding adhesive
JP6895441B2 (ja) 2015-12-30 2021-06-30 スリーエム イノベイティブ プロパティズ カンパニー 研磨物品及び関連する方法
WO2017117356A1 (en) * 2015-12-30 2017-07-06 3M Innovative Properties Company Abrasive article
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
EP3442748A1 (en) 2016-04-13 2019-02-20 3M Innovative Properties Company Abrasive article
WO2017180468A1 (en) 2016-04-13 2017-10-19 3M Innovative Properties Company Abrasive article
US20200331118A1 (en) 2016-04-13 2020-10-22 3M Innovative Properties Company Supersize composition, abrasive article and method of making an abrasive article
AU2017339958A1 (en) * 2016-10-05 2019-05-09 Ahf, Llc Coating compositions including diamond and either cationic curable resin systems or thiol-ene curable systems
SG11202000259RA (en) * 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
CN112654655A (zh) 2018-09-04 2021-04-13 应用材料公司 先进抛光垫配方
CN112126883B (zh) * 2020-08-20 2021-11-19 西安交通大学 一种尖角朝外的超平整叶尖切削涂层及其制备方法
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
EP4141036A1 (en) * 2021-08-27 2023-03-01 General Electric Company Binders comprising a monomer and an initiator for use in additive manufacturing
EP4594050A1 (en) 2022-09-29 2025-08-06 3M Innovative Properties Company Supersize coating composition, abrasive article, and method of making abrasive article

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Also Published As

Publication number Publication date
WO2003089194A1 (en) 2003-10-30
US6773474B2 (en) 2004-08-10
BR0309072B1 (pt) 2012-10-30
ATE396011T1 (de) 2008-06-15
EP1497079B1 (en) 2008-05-21
EP1497079A1 (en) 2005-01-19
JP2005523169A (ja) 2005-08-04
BR0309072A (pt) 2005-02-22
US20030200701A1 (en) 2003-10-30
DE60321154D1 (de) 2008-07-03
AU2003220160A1 (en) 2003-11-03

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