JP4328629B2 - 被覆研磨物品 - Google Patents

被覆研磨物品 Download PDF

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Publication number
JP4328629B2
JP4328629B2 JP2003585934A JP2003585934A JP4328629B2 JP 4328629 B2 JP4328629 B2 JP 4328629B2 JP 2003585934 A JP2003585934 A JP 2003585934A JP 2003585934 A JP2003585934 A JP 2003585934A JP 4328629 B2 JP4328629 B2 JP 4328629B2
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JP
Japan
Prior art keywords
layer
coated abrasive
backing
abrasive article
binder precursor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003585934A
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English (en)
Japanese (ja)
Other versions
JP2005523169A (ja
JP2005523169A5 (enExample
Inventor
グレゴリー・エイ・コーンル
エドワード・ジェイ・ウー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2005523169A publication Critical patent/JP2005523169A/ja
Publication of JP2005523169A5 publication Critical patent/JP2005523169A5/ja
Application granted granted Critical
Publication of JP4328629B2 publication Critical patent/JP4328629B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
    • B24D3/342—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent
    • B24D3/344—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties incorporated in the bonding agent the bonding agent being organic
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
    • C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
    • C08F290/06—Polymers provided for in subclass C08G
    • C08F290/061—Polyesters; Polycarbonates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
JP2003585934A 2002-04-19 2003-03-07 被覆研磨物品 Expired - Fee Related JP4328629B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/125,938 US6773474B2 (en) 2002-04-19 2002-04-19 Coated abrasive article
PCT/US2003/007395 WO2003089194A1 (en) 2002-04-19 2003-03-07 Coated abrasive article

Publications (3)

Publication Number Publication Date
JP2005523169A JP2005523169A (ja) 2005-08-04
JP2005523169A5 JP2005523169A5 (enExample) 2006-04-27
JP4328629B2 true JP4328629B2 (ja) 2009-09-09

Family

ID=29248404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003585934A Expired - Fee Related JP4328629B2 (ja) 2002-04-19 2003-03-07 被覆研磨物品

Country Status (8)

Country Link
US (1) US6773474B2 (enExample)
EP (1) EP1497079B1 (enExample)
JP (1) JP4328629B2 (enExample)
AT (1) ATE396011T1 (enExample)
AU (1) AU2003220160A1 (enExample)
BR (1) BR0309072B1 (enExample)
DE (1) DE60321154D1 (enExample)
WO (1) WO2003089194A1 (enExample)

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US6979713B2 (en) * 2002-11-25 2005-12-27 3M Innovative Properties Company Curable compositions and abrasive articles therefrom
US7169199B2 (en) * 2002-11-25 2007-01-30 3M Innovative Properties Company Curable emulsions and abrasive articles therefrom
US20060110600A1 (en) * 2004-11-19 2006-05-25 3M Innovative Properties Company Anisotropic conductive adhesive composition
US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
DE102005040126A1 (de) * 2005-08-25 2007-03-01 Altana Electrical Insulation Gmbh Überzugsmasse
US7399330B2 (en) * 2005-10-18 2008-07-15 3M Innovative Properties Company Agglomerate abrasive grains and methods of making the same
US20070116961A1 (en) * 2005-11-23 2007-05-24 3M Innovative Properties Company Anisotropic conductive adhesive compositions
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
CN102990530B (zh) * 2006-07-14 2016-02-10 圣戈本磨料股份有限公司 无背衬研磨制品
EP2044163B1 (en) * 2006-07-24 2012-04-25 3M Innovative Properties Company Electrically conductive pressure sensitive adhesives
US20080102720A1 (en) * 2006-10-30 2008-05-01 3M Innovative Properties Company Abrasive article and method of making and using the same
JP5020333B2 (ja) * 2006-12-20 2012-09-05 スリーエム イノベイティブ プロパティズ カンパニー コーティングされた研磨材ディスク及びその作製方法
CN101939140B (zh) * 2006-12-21 2012-11-28 圣戈本磨料股份有限公司 低腐蚀磨料制品及其制备方法
BRPI0814774A2 (pt) * 2007-08-03 2015-03-03 Saint Gobain Abrasives Inc Artigo abrasivo com camada promotora de aderência
JP2013514159A (ja) * 2009-12-29 2013-04-25 サンーゴバン アブレイシブズ，インコーポレイティド 家庭用品表面の清掃方法
BR112013000098A2 (pt) 2010-07-02 2016-05-17 3M Innovative Properties Co artigos abrasivos revestidos
CN104039508B (zh) 2011-12-29 2017-12-12 3M创新有限公司 带涂层磨料制品及其制备方法
CN104428105A (zh) 2012-07-06 2015-03-18 3M创新有限公司 带涂层磨料制品
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US9776361B2 (en) 2014-10-17 2017-10-03 Applied Materials, Inc. Polishing articles and integrated system and methods for manufacturing chemical mechanical polishing articles
CN107078048B (zh) 2014-10-17 2021-08-13 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
US10086498B2 (en) 2014-12-31 2018-10-02 Saint-Gobain Abrasives, Inc. Coated abrasives having a supersize layer including an active filler
KR20230169424A (ko) 2015-10-30 2023-12-15 어플라이드 머티어리얼스, 인코포레이티드 원하는 제타 전위를 가진 연마 제품을 형성하는 장치 및 방법
US10593574B2 (en) 2015-11-06 2020-03-17 Applied Materials, Inc. Techniques for combining CMP process tracking data with 3D printed CMP consumables
JP6157578B2 (ja) * 2015-12-24 2017-07-05 スリーエム イノベイティブ プロパティズ カンパニー 研磨用構造体及びその製造方法
US10688625B2 (en) 2015-12-30 2020-06-23 3M Innovative Properties Company Abrasive article
EP3397711B1 (en) 2015-12-30 2023-02-15 3M Innovative Properties Company Dual stage structural bonding adhesive
US10759023B2 (en) 2015-12-30 2020-09-01 3M Innovative Properties Company Abrasive articles and related methods
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
WO2017180205A1 (en) 2016-04-13 2017-10-19 3M Innovative Properties Company Abrasive article
WO2017180468A1 (en) 2016-04-13 2017-10-19 3M Innovative Properties Company Abrasive article
EP3442749B1 (en) 2016-04-13 2021-10-27 3M Innovative Properties Company Abrasive article and method of making an abrasive article
EP3523376B1 (en) * 2016-10-05 2022-04-20 AFI Licensing LLC Coating compositions including diamond and either cationic curable resin systems or thiol-ene curable systems
US20200130133A1 (en) * 2017-07-11 2020-04-30 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
US11471999B2 (en) 2017-07-26 2022-10-18 Applied Materials, Inc. Integrated abrasive polishing pads and manufacturing methods
WO2019032286A1 (en) 2017-08-07 2019-02-14 Applied Materials, Inc. ABRASIVE DISTRIBUTION POLISHING PADS AND METHODS OF MAKING SAME
CN112654655A (zh) 2018-09-04 2021-04-13 应用材料公司 先进抛光垫配方
CN112126883B (zh) * 2020-08-20 2021-11-19 西安交通大学 一种尖角朝外的超平整叶尖切削涂层及其制备方法
US11878389B2 (en) 2021-02-10 2024-01-23 Applied Materials, Inc. Structures formed using an additive manufacturing process for regenerating surface texture in situ
EP4141036A1 (en) * 2021-08-27 2023-03-01 General Electric Company Binders comprising a monomer and an initiator for use in additive manufacturing
WO2024069578A1 (en) 2022-09-29 2024-04-04 3M Innovative Properties Company Supersize coating composition, abrasive article, and method of making abrasive article

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Also Published As

Publication number Publication date
DE60321154D1 (de) 2008-07-03
WO2003089194A1 (en) 2003-10-30
ATE396011T1 (de) 2008-06-15
BR0309072A (pt) 2005-02-22
EP1497079A1 (en) 2005-01-19
EP1497079B1 (en) 2008-05-21
JP2005523169A (ja) 2005-08-04
US20030200701A1 (en) 2003-10-30
US6773474B2 (en) 2004-08-10
AU2003220160A1 (en) 2003-11-03
BR0309072B1 (pt) 2012-10-30

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