JP4327225B2 - Method for approaching alignment position, alignment device for optical component, and method for manufacturing assembly of optical component - Google Patents

Description

  The present invention uses an optical component alignment method and apparatus, and an alignment method for aligning optical components (including so-called optical modules including a plurality of components in addition to a single component). The present invention relates to a method of manufacturing an assembly of optical components.

  In general, high accuracy is required for alignment between optical components.

  For example, the core diameter of a single mode optical fiber used for optical communication or the like is about 3 to 8 μmφ. On the other hand, the condensing spot size of the semiconductor laser, which is a light source, and the condensing lens is extremely small, such as several μmφ, and high precision is required for alignment of these optical components. Usually, when light from a semiconductor laser is optically coupled to a single mode optical fiber, the accuracy allowed to suppress the coupling loss to about −0.5 dB is about ± 1 μm in the direction perpendicular to the optical axis, The horizontal direction is about ± 10 μm, and the angle deviation is about ± 0.5 °.

  Further, for example, the same degree of accuracy is required in alignment between the semiconductor laser and the waveguide, and alignment between the optical fiber and the waveguide.

  Conventionally, alignment of an optical component is performed by detecting light emitted from the first optical component and introduced into the second optical component with a photodetector, and amplifying the output of the photodetector with an amplifying unit. This is done by adjusting the relative positions of the first optical component and the second optical component based on the output of the amplification means. Various alignment methods including the techniques exemplified below have been proposed. In any of the conventional alignment methods, a linear amplifier (linear amplifier) is used as the amplification means.

  In the conventional general alignment method, the tip of the optical fiber is scanned with the XYZ stage with respect to the focused spot of the semiconductor laser, and the position where the signal is stronger is sequentially tracked. As a method for realizing this in a short time, usually, a spiral scan is performed to detect a range in which a predetermined signal intensity is obtained, and after the detection of the range, a step-like two-dimensional scan called a hill-climbing method or 3 There is a method of finding the optimum point by dimensional scanning.

In Japanese Patent Publication No. 7-113694 (Patent Document 1 below), a piezo actuator that scans in a direction different by 90 ° is used to circularly move the tip of the optical fiber, and the optical axis deviation in the XY2 directions is detected by phase detection. Thus, an automatic optical axis aligning device that automatically aligns optical fibers is disclosed.
Japanese Patent Publication No.7-113694

  However, in the conventional technique using both spiral scanning and hill climbing, it takes about tens of seconds to detect a range in which a predetermined signal intensity can be obtained by spiral scanning. Each step of the above process is performed while judging increase / decrease of the signal, so that there is a problem that it takes about 40 seconds to several minutes for the search.

  In addition, the light intensity distribution does not always have an ideal gradient, and there may be a portion where the gradient of the light intensity distribution is locally reversed. For example, when light from a semiconductor laser is collected by a lens, the light intensity distribution is not an ideal Gaussian distribution due to distortion of the semiconductor laser beam, lens aberration, interference, etc. On the other hand, the actual light intensity distribution often varies locally. This tendency tends to occur particularly in a region with a low light intensity away from the condensing point. Therefore, in the method of chasing the strongest point of the signal as in the conventional method typified by mountain climbing, the peak point is not clearly determined, which causes the alignment time to be lengthened.

  Furthermore, in the conventional technology that uses both spiral scanning and hill climbing, a range in which a predetermined signal intensity can be obtained is detected using a signal obtained by amplifying the output of the photodetector with a linear amplifier. Since the range of the light intensity that can be monitored by the received signal is extremely limited, it takes a long time to detect the range in which the predetermined signal intensity can be obtained.

  In the prior art disclosed in Japanese Examined Patent Publication No. 7-11694, the output of the photodetector is phase-detected by using the drive signal of the piezo actuator as a reference signal to detect the optical axis deviation in the XY2 direction. Therefore, it takes time to scan the XY axes until obtaining a signal intensity level at which the phase can be detected by the lock-in amplifier. The prior art disclosed in Japanese Patent Publication No. 7-113694 merely aligns in the XY axis direction (in-plane direction orthogonal to the optical axis), and is positioned in the optical axis direction. It cannot contribute to the combination. Therefore, for example, when aligning a light source module composed of a semiconductor laser and a condenser lens and an optical fiber, it is impossible to quickly adjust the focal direction (Z axis).

  The present invention has been made in view of such circumstances, and an optical component alignment method and apparatus capable of quickly aligning optical components, and a set of optical components using the alignment method. It aims at providing the manufacturing method of a solid.

  As a result of the inventor's research, a one-dimensional light intensity distribution in the three-dimensional space has been conventionally required by sufficiently considering the three-dimensional light intensity distribution during alignment of optical components. It has been found that it contains extremely useful information that can be used for rapid alignment of optical components with minimal movement. In order to expand the three-dimensional space in which the light intensity can be monitored as a signal according to the distribution characteristics by sufficiently considering the three-dimensional light intensity distribution at the time of alignment of the optical component, light detection is performed. It has been found that it is optimal to use a logarithmic amplifier as an amplifying means for amplifying the output of the amplifier. If the three-dimensional space in which the light intensity can be monitored as a signal can be expanded, the alignment time can be significantly shortened compared to the conventional one even if combined with any conventional alignment technique, If both the use of a logarithmic amplifier and the acquisition and use of a one-dimensional light intensity distribution are adopted, the effects of both can be demonstrated synergistically, and the alignment time can be greatly reduced compared to the conventional case. There was found.

  The present invention has been made as a result of such inventor's research. Here, the following first to twenty-seventh aspects are presented as technical means for solving the above problems. The following tenth aspect corresponds to the invention according to claim 1, the following twentieth aspect corresponds to the invention according to claim 2, and the following twenty-fifth aspect corresponds to the invention according to claim 3, The following twenty-sixth aspect corresponds to the invention according to claim 4, and the following twenty-seventh aspect corresponds to the invention according to claim 5.

  In the optical component alignment method according to the first aspect, the light emitted from the first optical component and introduced into the second optical component is detected by a photodetector, and the output of the photodetector is amplified by an amplification means. In an optical component alignment method that amplifies and adjusts a relative position between the first optical component and the second optical component based on an output of the amplification means, the first optical component and the second optical component Based on the output of the amplifying means obtained according to the reciprocating scan while reciprocally scanning the second optical component relatively one-dimensionally and reciprocally with respect to one axis, A light intensity distribution obtaining step for obtaining a light intensity distribution, and a relative relationship between the first optical component and the second optical component based on the one-dimensional light intensity distribution obtained in the light intensity distribution obtaining step. A position adjustment stage for adjusting the correct position. .

  When one of the axes is an X axis, a Y axis, and a Z axis orthogonal to each other, a rotation axis around the X axis is Xθ, a rotation axis around the Y axis is Yθ, and a rotation axis around the Z axis is Zθ For example, any axis of X, Y, Z, Xθ, Yθ, and Zθ may be used. At this time, the Z axis may substantially coincide with the optical axis direction of the light emitted from the first optical component. Each of the first and second optical components may be a single component or a so-called optical module including a plurality of components. These points are the same for each aspect described later.

  Moreover, since the reference data increases as the repetition frequency of the reciprocating scanning increases, it contributes to shortening the alignment time and improving the alignment accuracy. For example, the repetition frequency of the reciprocating scanning is preferably 5 Hz or more, and preferably 30 Hz or more. When a piezo actuator is used as the actuator for reciprocating scanning, for example, a repetition frequency of 30 Hz to 240 Hz can be obtained. This also applies to each aspect described later.

  In the first aspect, the first optical component and the second optical component are relatively reciprocally scanned one-dimensionally with respect to one axis, and a one-dimensional light intensity distribution with respect to one axis is obtained. The relative positions of the first optical component and the second optical component are adjusted based on the light intensity distribution. In this way, unlike conventional technology, position adjustment is performed by collectively using a one-dimensional light intensity distribution, so unnecessary signal search operations can be reduced, and optical components can be quickly aligned. It can be carried out. In addition, since the position adjustment is performed by collectively using the one-dimensional light intensity distribution, the light intensity distribution is not an ideal Gaussian distribution, and the actual light intensity distribution is locally compared to the distribution. Even if it fluctuates, the influence can be greatly reduced.

  The optical component alignment method according to the second aspect is that, in the first aspect, the amplification means performs logarithmic amplification.

  According to the second aspect, since the output of the photodetector is logarithmically amplified, the three-dimensional space where the light intensity can be monitored as a signal can be greatly expanded. For example, it is possible to detect a change in signal intensity of 6 digits in real time without switching the gain. For example, with respect to a three-dimensional deviation between the focused spot and the incident point, each axis is compared with the case where a linear amplifier is used. Adjustments can be made while monitoring the signal intensity in a wide space of about 30 times the area and volume of about 3 times each. As described above, according to the second aspect, in addition to the use of the one-dimensional light intensity distribution, the space in which the one-dimensional light intensity distribution can be effectively obtained by using the logarithmic amplification together. Since it can be greatly enlarged, the alignment time can be further shortened due to the combined effect of both.

  An optical component alignment method according to a third aspect is the optical component alignment method according to the first aspect, wherein the amplification means performs logarithmic amplification before the relative position approaches the alignment position. After approaching the alignment position, the amplification means performs linear amplification.

  According to the third aspect, since the signal by logarithmic amplification is used before approaching the alignment position and the signal by linear amplification is used after approaching the alignment position, the same advantage as that of the second aspect is obtained. In addition, the alignment accuracy can be further improved by using together linear amplification that makes it easier to capture signal changes in a narrow range near the alignment position.

  In the optical component alignment method according to the fourth aspect, in any one of the first to third aspects, the position adjustment step includes an integral value of a predetermined range of light intensity from the one-dimensional light intensity distribution, or Obtaining an average value, and moving the center position of the reciprocating scan in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, so that the integral value or the average value is maximum. And stopping the movement in the predetermined direction at a position at or near the position. The predetermined direction for moving the center position of the reciprocating scan and the reciprocating scan direction may or may not coincide with each other.

  The fourth aspect exemplifies a specific method for utilizing a one-dimensional light intensity distribution. According to the fourth aspect, since the integrated value or average value of the light intensity is obtained from the one-dimensional light intensity distribution and used, the predetermined value can be obtained even if there is no alignment position within the reciprocating scan range. The relative position of the optical component with respect to the direction can be brought close to the alignment position. In addition, since the integrated value or the average value is used, the light intensity distribution is not an ideal Gaussian distribution, and even if the actual light intensity distribution fluctuates locally with respect to the distribution, the influence is greatly increased. Can be reduced.

  The optical component alignment method according to a fifth aspect is the optical component alignment method according to any one of the first to fourth aspects, wherein the position adjustment step includes a light intensity peak value or a predetermined ratio value width from the one-dimensional light intensity distribution. The center position of the reciprocating scan is moved in a predetermined direction, and the position at or near the position where the peak value is maximum, or the position at or near the position where the predetermined ratio value width is minimum. And stopping the movement in a predetermined direction. Here, the predetermined ratio value width is the width of the primary light intensity distribution waveform at a level that is lower than the peak value by the predetermined ratio. When 50% is adopted as the ratio, the predetermined ratio value width is a half width. The ratio is not limited to 50%, and an appropriate value such as 40% or 60% can be adopted. In the fifth aspect, the predetermined direction for moving the center position of the reciprocating scan and the direction of the reciprocating scan may or may not coincide with each other. For example, the predetermined direction may be a direction substantially coincident with the optical axis direction of the light emitted from the first optical component, or may be a direction substantially perpendicular to this direction.

  The fifth aspect exemplifies a specific method for utilizing a one-dimensional light intensity distribution. According to the fifth aspect, since the adjustment in the predetermined direction is performed by the peak value or the predetermined ratio value width, fine adjustment is performed when the relative position of the first and second optical components approaches the alignment position. This is particularly effective when done.

  In the optical component alignment method according to the sixth aspect, in any one of the first to fifth aspects, the light emitted from the first optical component is light condensed at a condensing point, The position adjusting step obtains an integrated value or average value or peak value of light intensity from the one-dimensional light intensity distribution, and substantially coincides with the optical axis direction of light emitted from the first optical component. In a state where the center position of the reciprocating scan is offset with respect to the alignment position in a second direction substantially perpendicular to the first direction, the integrated position or the center value is moved in the first direction. And stopping the movement in the first direction at a position where the average value or the peak value is minimum or a position in the vicinity thereof. In the sixth aspect, the reciprocating scanning direction may or may not coincide with the first direction or the second direction.

  The sixth aspect exemplifies a specific method of using the one-dimensional light intensity distribution. In particular, the light emitted from the first optical component is light condensed at the condensing point. In some cases, attention is paid to the light intensity distribution of the condensed light. As a result of the inventor's research, the integral value, the average value, or the peak value becomes minimum when moved in a direction substantially coincident with the optical axis direction while being offset in a direction substantially perpendicular to the optical axis direction. It was found that the position in that direction is closest to the alignment position. In the sixth aspect, the position in the moving direction is adjusted by skillfully utilizing this characteristic.

  The optical component alignment method according to a seventh aspect is the optical component alignment method according to any one of the first to fifth aspects, wherein the position adjustment step includes a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution. And the center position of the reciprocating scanning is moved in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, so that the peak value or the predetermined ratio value width is a predetermined value. And stopping the movement in the predetermined direction at a position at or near the position. The reciprocating scanning direction is preferably substantially perpendicular to the optical axis direction of the light emitted from the first optical component, but substantially coincides with the optical axis direction of the light emitted from the first optical component. The direction may be the other direction.

  For example, in the alignment between the waveguide and the optical fiber or the alignment between the waveguide and the semiconductor laser, the point where the emission end and the incident end coincide with each other is an ideal alignment position. When the incident end comes into contact, the end face of the component is damaged or the alignment is shifted. Therefore, it is necessary to stop the movement of the optical component in the optical axis direction when the gap between the emitting end and the incident end reaches a predetermined amount at the final stage of alignment. Conventionally, there is an example in which this gap is measured by optical means from the direction perpendicular to the optical axis, but if this gap is about several μm, the influence of interference, structural distortion in the direction perpendicular to the gap, etc. Measurement is not easy. On the other hand, as a result of the inventor's research, it was found that the peak value and the predetermined ratio value width are correlated with the gap. In the seventh aspect, by skillfully utilizing this correlation, the movement of the optical component in the optical axis direction is stopped when the gap reaches a predetermined amount. Therefore, according to the seventh aspect, the gap can be accurately set without using a special gap measuring means.

  An optical component alignment method according to an eighth aspect includes a first optical component that is disposed on a substantially straight line and has a plurality of portions that can emit light along optical axes that are parallel to each other, and a substantially straight line. About the 2nd optical component which has a plurality of parts which can be made to enter each, and is each emitted from two or more parts of a plurality of above-mentioned parts of the 1st optical component, and the above-mentioned of the 2nd optical component Lights introduced into two or more corresponding parts of the plurality of parts are detected by two or more photodetectors, respectively, and the outputs of the two or more photodetectors are respectively two or more amplification means In the optical component alignment method, the relative position between the first optical component and the second optical component is adjusted based on the outputs of the two or more amplification means. Relative to the second optical component In addition, based on the outputs of the two or more amplifying means obtained in accordance with the reciprocating scanning while reciprocatingly reciprocatingly scanning one axis one-dimensionally, one-dimensionally regarding the one axis for each of the outputs. Based on the light intensity distribution acquisition stage for obtaining a correct light intensity distribution and the one-dimensional light intensity distribution obtained in the light intensity distribution acquisition stage, there is a variation in the peak position of each one-dimensional light intensity distribution. A position adjustment step of adjusting a relative position between the first optical component and the second optical component so as to be smaller. Also in the eighth aspect, like the first aspect, the one axis is not limited.

  For example, when aligning a ribbon fiber and a waveguide device having a plurality of waveguide end portions arranged in a straight line on the end face, it is necessary to match the inclinations around the optical axes of the two. The present inventor has found that such adjustment of the inclination around the optical axis can also be performed by the technique as in the eighth aspect based on the one-dimensional light intensity distribution.

  According to a ninth aspect of the present invention, there is provided an optical component alignment method comprising: detecting light emitted from a first optical component and introduced into a second optical component with a photodetector; and outputting an output of the photodetector with an amplifying unit. In an optical component alignment method that amplifies and adjusts a relative position between the first optical component and the second optical component based on an output of the amplification unit, logarithmic amplification is performed on the amplification unit. It is something to make.

  According to the ninth aspect, since the output of the photodetector is logarithmically amplified, the three-dimensional space in which the light intensity can be monitored as a signal can be greatly expanded. Therefore, the time for searching for the region where the light intensity is sensed can be greatly shortened, and as a result, the alignment time can be shortened. Note that the ninth aspect is not limited to the combined use of the one-dimensional light intensity distribution, and various conventionally known methods (for example, the spiral scanning and hill climbing are used in combination). Technology and Japanese Patent Publication No. 7-11694) may be combined.

  In the optical component alignment method according to the tenth aspect, the light emitted from the first optical component and introduced into the second optical component is detected by a photodetector, and the output of the photodetector is amplified by an amplification means. In an optical component alignment method that amplifies and adjusts a relative position between the first optical component and the second optical component based on an output of the amplification means, the relative position is aligned. Before the position approaches, the amplification means performs logarithmic amplification, and after the relative position approaches the alignment position, the amplification means performs linear amplification.

  According to the tenth aspect, since the signal by logarithmic amplification is used before approaching the alignment position, and the signal by linear amplification is used after approaching the alignment position, the same advantage as the tenth aspect is obtained. In addition, the alignment accuracy can be further improved by using together linear amplification that makes it easier to capture signal changes in a narrow range near the alignment position.

  An optical component alignment device according to an eleventh aspect is an optical component alignment device that adjusts the relative positions of a first optical component and a second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component, and movement for changing the relative position between the first optical component and the second optical component And a control means for controlling the moving means to adjust the relative position based on the output of the amplifying means, and the first optical component and the second optical component relative to each other. Reciprocating scanning means for reciprocatingly reciprocally scanning one axis with respect to one axis, and the control means performs one-dimensional with respect to the one axis based on the output of the amplifying means obtained according to the reciprocating scanning. To obtain a typical light intensity distribution Based on the one-dimensional optical intensity distribution, so as to adjust the relative position between the first optical component and said second optical component, is intended to include, and means for controlling said moving means.

  An optical component alignment apparatus according to a twelfth aspect is the eleventh aspect, wherein the amplification means performs logarithmic amplification.

  In an optical component alignment device according to a thirteenth aspect, the amplifying means selectively performs one of logarithmic amplification and linear amplification in response to a selection signal, and the control means The amplification means causes the amplification means to perform logarithmic amplification before approaching the alignment position, and causes the amplification means to perform linear amplification after the relative position approaches the alignment position. The selection signal is given to the means.

  In the optical component aligning device according to a fourteenth aspect, in the eleventh to thirteenth aspects, the control means obtains an integral value or an average value of a predetermined range of light intensity from the one-dimensional light intensity distribution. And a position where the center position of the reciprocating scan moves in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, and the integrated value or the average value is maximized. Means for controlling the moving means so as to stop the movement in the predetermined direction at a position in the vicinity thereof.

  In an optical component alignment apparatus according to a fifteenth aspect, in any of the eleventh to fourteenth aspects, the control means obtains a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution. And a center position of the reciprocating scan moves in a predetermined direction, and the predetermined position is a position where the peak value is maximum or a position near the position or a position where the predetermined ratio value width is a minimum or a position near the position. And means for controlling the moving means so as to stop the movement in the direction.

  The alignment device for an optical component according to a sixteenth aspect is the control device according to any one of the eleventh to fifteenth aspects, wherein the light emitted from the first optical component is light collected at a condensing point. Means for obtaining an integrated value or average value or peak value of light intensity from the one-dimensional light intensity distribution, and a first direction substantially coincident with the optical axis direction of the light emitted from the first optical component. In a state where the center position of the reciprocating scan is offset with respect to the alignment position in a second direction substantially perpendicular to the center position, the center position moves in the first direction and the integrated value, the average value, or the peak And means for controlling the moving means so as to stop the movement in the first direction at a position where the value is minimum or a position in the vicinity thereof.

  In an optical component alignment apparatus according to a seventeenth aspect according to any one of the eleventh to fifteenth aspects, the control means obtains a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution. And the center position of the reciprocating scan moves in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, and the peak value or the predetermined ratio value width is a predetermined value. And a means for controlling the moving means so as to stop the movement in the predetermined direction at a position or a position in the vicinity thereof.

  An optical component alignment device according to an eighteenth aspect is arranged on a substantially straight line and a first optical component having a plurality of portions arranged on a substantially straight line and capable of emitting light along optical axes parallel to each other. In the aligning device for an optical component that adjusts the relative position with the second optical component having a plurality of portions into which light can be incident, two of the plurality of portions of the first optical component. Output of two or more photodetectors that respectively detect light respectively emitted from two or more parts and respectively introduced into two or more corresponding parts of the plurality of parts of the second optical component. Two or more amplifying means for amplifying each, a moving means for changing the relative position of the first optical component and the second optical component, and each output of the two or more amplifying means , I will adjust the relative position Control means for controlling the moving means, and reciprocating scanning means for reciprocally scanning the first optical component and the second optical component relatively one-dimensionally with respect to one axis. And the control means obtains a one-dimensional light intensity distribution with respect to the one axis for each output based on the outputs of the two or more amplification means obtained according to the reciprocating scanning, and Based on each one-dimensional light intensity distribution, the relative positions of the first optical component and the second optical component are set so that the variation in the peak position of each one-dimensional light intensity distribution is reduced. And means for controlling the moving means to adjust.

  An optical component alignment device according to a nineteenth aspect is an optical component alignment device that adjusts the relative positions of a first optical component and a second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component, and movement for changing the relative position between the first optical component and the second optical component And a control means for controlling the moving means so as to adjust the relative position based on the output of the amplifying means, and the amplifying means performs logarithmic amplification.

  The optical component aligning device according to the twentieth aspect is an optical component aligning device that adjusts the relative positions of the first optical component and the second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component, and movement for changing the relative position between the first optical component and the second optical component And a control means for controlling the moving means to adjust the relative position based on the output of the amplifying means, the amplifying means logarithmically amplifying and responsive to a selection signal One of the linear amplifications is selectively performed, and the control unit causes the amplification unit to perform logarithmic amplification before the relative position approaches the alignment position, and the relative position. After reaching the alignment position, linear amplification is applied to the amplification means. As causes and gives the selection signal to said amplifying means.

  The optical component alignment apparatus according to the eleventh to twentieth aspects is an example of an apparatus that realizes the optical component alignment method according to the first to tenth aspects, and is automatically performed by using a control unit. It is an example of the apparatus which performs alignment. However, the optical component alignment methods according to the first to tenth aspects can also be realized by an optical component alignment apparatus that leaves an operator to make decisions based on the output of the amplification means. The optical component alignment method according to the tenth aspect includes a case where the operator makes a decision based on the output of the amplification means. The following twenty-first to twenty-sixth aspects are examples of an optical component aligning device that leaves an operator the judgment based on the output of the amplification means.

  An optical component alignment device according to a twenty-first aspect is an optical component alignment device that adjusts the relative positions of a first optical component and a second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component, and according to the operation of the operator, the first optical component and the second optical component; A moving means for changing a relative position; a reciprocating scanning means for reciprocally reciprocally scanning the first optical component and the second optical component one-dimensionally with respect to one axis; and the reciprocating device. Based on the output of the amplification means obtained according to scanning, a means for obtaining a one-dimensional light intensity distribution with respect to the one axis and a presentation means for presenting the one-dimensional light intensity distribution to an operator are provided. Is.

  An optical component alignment apparatus according to a twenty-second aspect is the twenty-first aspect, wherein the amplification means performs logarithmic amplification.

  An optical component alignment apparatus according to a twenty-third aspect is the twenty-first aspect, wherein the amplification means selectively performs one of logarithmic amplification and linear amplification in accordance with the operation of the operator. .

  An optical component aligning device according to a twenty-fourth aspect is arranged on a substantially straight line and a first optical component having a plurality of portions arranged on a substantially straight line and capable of emitting light along optical axes parallel to each other. In the aligning device for an optical component that adjusts the relative position with the second optical component having a plurality of portions into which light can be incident, two of the plurality of portions of the first optical component. Output of two or more photodetectors that respectively detect light respectively emitted from two or more parts and respectively introduced into two or more corresponding parts of the plurality of parts of the second optical component. Two or more amplifying means for amplifying, a moving means for changing a relative position between the first optical component and the second optical component in accordance with an operation of the operator, and the first optical A component and the second optical component; Relatively, based on the output of the reciprocating scanning unit that reciprocally scans one axis in a one-dimensional manner and the two or more amplifying units obtained according to the reciprocating scanning, the one one for each output Means for obtaining a one-dimensional light intensity distribution with respect to the axis, and a presenting means for presenting each one-dimensional light intensity distribution to the operator.

  An optical component alignment device according to a twenty-fifth aspect is an optical component alignment device that adjusts the relative positions of a first optical component and a second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component; presentation means for presenting information based on the output of the amplifying means to the operator; and depending on the operation of the operator And a moving means for changing a relative position between the first optical component and the second optical component, and the amplifying means performs logarithmic amplification.

  An optical component alignment apparatus according to a twenty-sixth aspect is an optical component alignment apparatus that adjusts the relative positions of a first optical component and a second optical component, and is emitted from the first optical component. Amplifying means for amplifying the output of the photodetector for detecting the light introduced into the second optical component, and according to the operation of the operator, the first optical component and the second optical component; Moving means for changing the relative position; and presenting means for presenting information based on the output of the amplifying means to an operator, wherein the amplifying means performs logarithmic amplification and linear amplification according to the operation of the operator. One of them is selectively performed.

  An optical component assembly manufacturing method according to a twenty-seventh aspect is a method for manufacturing an assembly of a first optical component and a second optical component, wherein the optical component alignment method according to the tenth aspect is used. And a step of adjusting a relative position between the first optical component and the second optical component.

  ADVANTAGE OF THE INVENTION According to this invention, the alignment method of an optical component which can perform alignment of an optical component rapidly, its apparatus, and the manufacturing method of the assembly of an optical component using the alignment method can be provided. .

  Hereinafter, an optical component alignment method and apparatus according to the present invention, and an optical component assembly manufacturing method will be described with reference to the drawings.

  [First Embodiment]

  FIG. 1 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component aligning device according to a first embodiment of the present invention.

  This assembling apparatus includes a light source module (corresponding to a first optical component) 3 having a semiconductor laser 1 and a condenser lens 2, and an end face 4a of a single-core optical fiber 4 (corresponding to a second optical component). After aligning, the laser welding machine 5 connects the two to form a semiconductor laser module for assembling a semiconductor laser module that couples the light of the semiconductor laser 1 to an optical fiber. Of the elements described later, elements other than the laser welding machine 5 and the laser welding machine control function of the controller 17 described below constitute the optical component alignment apparatus according to the present embodiment.

  The assembly apparatus shown in FIG. 1 includes a base 6, a stage 7 for the light source module 3 as a moving mechanism mounted on the base 6, and a moving mechanism mounted on the base 6 in addition to the laser welder 5. A stage 8 for the optical fiber 4, a piezo actuator 9 as a reciprocating scanning mechanism that is mounted on the stage 7 and reciprocally scans the stage 7 with respect to one axis of the light source module 31, and a light source for the stage 7. A position detector 10 such as an electrostatic sensor or a differential transformer for detecting the position of the module 3, an amplifier circuit 11 for amplifying a detection signal from the position detector 10, a piezo drive unit 12 for driving the piezo actuator 9, A light source driving circuit 13 for emitting the semiconductor laser 1 of the light source module 3, a stage driving unit 14 for driving the stages 7 and 8, and an end 4a A control configured to control the entire apparatus configured using a photodetector 15 such as a photodiode that detects light introduced into the optical fiber 4, an amplification unit 16 that amplifies the output of the photodetector 15, and a personal computer, for example. Part 17.

  The light source module 3 is mounted on the piezo actuator 9 via a holder 18. A portion of the optical fiber 4 on the end 4a side is mounted on the stage 8 via a holder 19 having a V-groove or the like. Thereby, the light source module 3 and the end part 4a of the optical fiber 4 are opposed to each other. A ring-shaped connecting member 20 for connecting the optical fiber 4 and the light source module 3 after alignment is provided at the end 4a side of the optical fiber 4.

  For convenience of explanation, as shown in FIG. 1, an X axis, a Y axis, and a Z axis that are orthogonal to each other are defined. The Z direction substantially coincides with the optical axis direction of the light source module 3 and the end 4 a of the optical fiber 4. In addition, + (plus) on the arrow side of each axis in FIG. 1 and − (minus) on the opposite side are assumed. The same applies to the description of each embodiment described later.

  The stage 7 has a function of independently moving the piezo actuator 9 (and thus the light source module 3) on the X axis, the Y axis, and the Z axis. In this embodiment, the stage 7 is an initial stage at the start of alignment. It is only used when setting the position of the lens, and is kept fixed when aligning. Therefore, in the following description, the stage 7 is integrated with the base 6. Needless to say, the stage 7 may be used together with or in place of the stage 8 during alignment.

  In the present embodiment, the piezo actuator 9 is driven by a piezo drive signal composed of a sine wave analog voltage signal output from the piezo drive unit 12 in response to a command from the control unit 17, and the light source module 3 is moved to the stage 7. (And therefore the base 6) is repeatedly reciprocated (reciprocated scanning) in the X-axis direction. As a reciprocating scanning mechanism, a voice coil motor, an electromagnetic plunger, a linear motion stage, or the like may be used instead of the piezo actuator 9.

  The position of the light source module 3 with respect to the stage 7 (the amount of displacement of the piezo actuator 9) is detected by the position detector 10, and the detection signal is amplified by the amplifier circuit 11 and then input to the controller 17. In addition, since the piezo actuator 9 incorporating the position detector 10 is commercially available, it can be used, for example. Further, since the drive signal for driving the piezo actuator 9 corresponds to the displacement amount of the piezo actuator 9, the drive signal itself may be used as the position detection signal without using the position detector 10.

  The semiconductor laser 1 of the light source module 3 is caused to emit light with a constant amount of light by the current supplied from the light source driving circuit 13, and a minute light spot is formed at the focal position of the condenser lens 2. As the light source module 3 is reciprocated by the piezo actuator 9, this light spot is also reciprocated. A position where the focal position and the end 4a of the optical fiber 4 coincide with each other is an alignment position.

  The stage 8 has a function of moving the optical fiber 4 (specifically, the incident end 4a side portion of the optical fiber 4) independently on the X axis, the Y axis, and the Z axis, and the X axis stage 8x, the Y axis stage 8y and the Z-axis stage 8z are combined. However, illustration of the stages 8x to 8z of each axis is omitted. In the present embodiment, this stage 8 is used as a position adjusting mechanism during alignment.

  The light detector 15 is disposed at the output end of the optical fiber 4a, detects the intensity of the laser light incident on the optical fiber 4 from the light source module 3, and the output signal thereof is amplified by the amplifying unit 16 and is converted into a light intensity signal by the control unit 17. Sent to.

  In the present embodiment, the amplifying unit 16 is configured to selectively perform one of logarithmic amplification and linear amplification in response to an amplification mode selection signal from the control unit 17. An example of the configuration of the amplifying unit 16 is shown in FIG. FIG. 2 is a schematic block diagram illustrating an example of the configuration of the amplification unit 16. In the example illustrated in FIG. 2, the amplification unit 16 includes a logarithmic amplifier 21, a linear amplifier 22, and switches 23 and 24 that switch these according to an amplification mode selection signal. The amplifying unit 16 may be configured to always perform logarithmic amplification, and in that case, it may be configured only by the logarithmic amplifier 21 as shown in FIG. Usually, the logarithmic amplifier includes a function of changing the amplification degree. Therefore, the amplification degree may be switched by the amplification mode selection signal.

  The logarithmic amplifier 21 has logarithmic amplification characteristics with respect to the input. As the logarithmic amplifier 21, for example, an amplifier that outputs a voltage of -10V to + 10V with respect to a 6-digit current change from 1 nA to 1 mA can be used. In this case, since the sensitivity of the photodiode (PD) used as the normal photodetector 15 is about 0.5 A / W, the voltage output from −10 V to +10 V corresponds to 2 nW to 2 mW in terms of the optical input power of the PD. . On the other hand, the linear amplifier 22 can easily detect a current change in a narrow range as compared with the logarithmic amplifier 21, but can only detect a current change of 2 to 3 digits, for example. Therefore, by using such a logarithmic amplifier 21, it is possible to detect a change in the signal intensity of 6 digits in real time without switching the gain, and the focused spot (focal position) and the incident point (end 4a of the optical fiber 4). As compared with the case where the linear amplifier 22 is always used, the signal intensity is monitored in a wide space that is more than three times the area on each axis and about 30 times the volume. Adjustments can be made while.

Here, with reference to FIG. 4 thru | or FIG. 7, intensity distribution of the light (light condensed by the condensing lens 2) radiate | emitted from the light source module 3 is demonstrated. 4 and 6 are light intensity distribution diagrams schematically showing the light intensity distribution in a plane parallel to the XZ plane (or YZ plane) and including the focal position. This light intensity distribution is substantially rotationally symmetric about a straight line passing through the focal position and parallel to the Z axis. 4 and 6 are logarithmic display assuming that the light intensity of the collected beam spreads from the focal position in a Gaussian distribution, and the light intensity at the focal position is assumed to be 1 (= 10 ⁰ ). And is filled with isointensity lines for each digit. FIG. 5 is a diagram showing the light intensity at each position in the Z direction on each of the lines O, P, Q, and R parallel to the Z axis that are shifted from each other in the X direction (or Y direction) in the plane of FIG. is there. FIG. 7 shows the light at each X-direction (Y-direction) position on each line H, I, J, K parallel to the X-axis (or Y-axis) shifted in the Z-direction from each other in FIG. It is a figure which shows intensity | strength.

As can be seen from FIGS. 4 to 7, the beam is focused three-dimensionally very small at the focal point of the light source, resulting in a very high light intensity, but abruptly attenuated toward the front, rear and outside the XY axis. To do. When the linear amplifier 22 is always used as in the prior art, the range of signal intensity that can be observed at one time is, for example, 2 to 3 digits, and in FIGS. 4 and 6, only a range of 2 to 3 isointensity lines at a time. I can't observe. On the other hand, when the logarithmic amplifier 21 is used, for example, a range from the center point (condensing position) in FIGS. 4 and 6 to the outermost isointensity line (10 ⁻⁶ isointensity line) is observed simultaneously. It becomes possible.

  Next, the alignment operation of the apparatus shown in FIG. 1 will be described with reference to FIG. FIG. 8 is a diagram showing the movement of the optical fiber 4 and its end (tip) 4a in each adjustment stage together with the light intensity distribution as shown in FIGS. In FIG. 8, the origin (center) of the X axis, the Y axis, and the Z axis is used as a condensing point for easy understanding.

  Regarding the initial position setting when starting the alignment operation, the mechanical setting error of the distal end portion 4a of the optical fiber 4 with respect to the condensing point of the light source module 3 is about ± 250 μm on the Z axis and ± 200 μm on the X axis and Y axis. The case where it is within the range will be described.

  In this case, the position of the distal end portion 4a of the optical fiber 4 is a position shifted about −1000 μm (distant from the light source module 3) on the Z axis and about −250 μm on the XY axis in advance with respect to the expected condensing point ( This position is a set position, and the actual position deviates from the set position by the set error).

  When the alignment operation is started, the control unit 17 gives a command to the piezo drive unit 12 to drive the piezo actuator 9 via the piezo drive unit 12, so that the light source module 3 and its focused spot are moved in the X-axis direction. For example, reciprocal scanning is performed with a sine waveform having a predetermined amplitude of 30 Hz and an amplitude of 100 μm to 300 μm, and the semiconductor laser 1 of the light source module 3 is caused to emit light at a predetermined current value via the light source driving circuit 13. The intensity of the light emitted from the optical fiber 4 is detected by the photodetector 15, the output thereof is amplified by the amplification unit 16, and the output of the amplification unit 16 is supplied to the control unit 17. The control unit 17 gives an amplification mode selection signal to the amplification unit 16 and causes the amplification unit 16 to perform logarithmic amplification. In the present embodiment, logarithmic amplification is continuously performed by the amplifying unit 16 except when fine adjustment as described later is performed. On the other hand, a position detection signal obtained from the position detector 10 via the amplifier circuit 11 is supplied to the control unit 17. The control unit 17 performs A / D conversion on the position detection signal from the amplification circuit 11 and the output (amplified light intensity signal) from the amplification unit 16 and captures each as data, thereby performing all the reciprocal scanning in the X-axis direction. A light intensity distribution over the amplitude is sequentially obtained, for example, every half cycle of reciprocating scanning.

  The acquisition of the one-dimensional light intensity distribution according to the reciprocating scanning in the X-axis direction by the piezo actuator 9 is successively continued until a time point to be described later.

  In such a state, first, the position adjustment in the Y-axis direction is performed as shown in FIG. At this stage, the control unit 17 calculates, for each one-dimensional light intensity distribution obtained sequentially as described above, an integrated value or an average value of light intensity within a predetermined range from the light intensity distribution. Then, the control unit 17 scans the Y-axis stage 8y in the plus direction via the stage driving unit 14 while monitoring the integral value or average value of a predetermined range of light intensity obtained from each one-dimensional light intensity distribution. Then, a position where the integrated value or average value is maximized (corresponding to a substantially central position in the Y-axis direction) is obtained, and the Y-axis stage 8y is stopped. At this time, in order to obtain the position where the integral value or the average value becomes the maximum, as shown in FIG. 8A, after going too far in the positive direction, return to the position where the integral value or the average value becomes the maximum and stop. become. It can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 that the position where the integrated value or the average value becomes maximum corresponds to the substantially central position in the Y-axis direction. Note that the Y-axis stage 8y may be stopped not at the position where the integrated value or the average value is maximized, but at a position in the vicinity thereof. This is because readjustment is performed in the Y-axis direction in final adjustment described later with reference to FIG.

  Next, as shown in FIG. 8B, position adjustment in the X-axis direction is performed. Also at this stage, the control unit 17 calculates, for each one-dimensional light intensity distribution sequentially obtained as described above, an integrated value or an average value of a predetermined range of light intensity from the light intensity distribution. Then, the control unit 17 scans the X-axis stage 8x in the plus direction via the stage driving unit 14 while monitoring the integrated value or average value of a predetermined range of light intensity obtained from each one-dimensional light intensity distribution. Then, a position where the integral value or average value is maximized (corresponding to a substantially central position in the X-axis direction) is obtained, and the X-axis stage 8x is stopped. At this time, in order to obtain the position where the integral value or the average value becomes maximum, as shown in FIG. 8B, after going too far in the plus direction, return to the position where the integral value or average value becomes the maximum and stop. become. It can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 that the position where the integrated value or the average value is maximum corresponds to the substantially central position in the X-axis direction. Note that the X-axis stage 8x may be stopped not at the position where the integrated value or the average value is maximized, but at a position in the vicinity thereof. This is because readjustment is performed in the X-axis direction in final adjustment described later with reference to FIG.

  Next, as shown in FIG. 8C, position adjustment in the Z-axis direction is performed. That is, the control unit 17 first offsets the Y-axis stage 8y through the stage driving unit 14 in the plus direction or the minus direction by about several tens of μm. This can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 when the Z-axis stage 8z is scanned in the plus direction, as shown in FIG. This is because the integrated value, average value, and peak value of the light intensity obtained from each one-dimensional light intensity distribution sequentially obtained as described above are minimized. After the offset of the Y-axis stage 8y, the control unit 17 calculates an integrated value, an average value, or a peak value of the light intensity from the light intensity distribution for each one-dimensional light intensity distribution sequentially obtained as described above. . The control unit 17 scans the Z-axis stage 8z in the plus direction via the stage drive unit 14 while monitoring the integrated value, average value, or peak value of the light intensity obtained from each one-dimensional light intensity distribution, It is confirmed that the integrated value, the average value, or the peak value decreases and starts increasing again after showing the minimum value. Then, the Z-axis stage 8z is stopped by returning to the position where it becomes the minimum value. Note that the Z-axis stage 8z may be stopped not at a position where the integral value, average value, or peak value is minimized, but at a position in the vicinity thereof. This is because readjustment is performed in the Z-axis direction in the final adjustment described later with reference to FIG.

  With the above operation, the end portion 4a of the optical fiber 4 is in a state of approaching the alignment position (the position of the condensing point).

  Thereafter, as shown in FIG. 8D, final adjustment is performed. In this final adjustment, readjustment in the Y-axis direction, readjustment in the Z-axis direction, and readjustment in the X-axis direction are sequentially performed. In order to further increase the alignment accuracy, it is preferable to perform readjustment in the Z-axis direction as described above, but readjustment in the Z-axis direction may be omitted.

  First, in the readjustment in the Y-axis direction, the control unit 17 determines, for each one-dimensional light intensity distribution sequentially obtained as described above, the peak value or the half value width (other ratios) of the light intensity distribution. The predetermined ratio value width may be calculated in accordance with (this point is the same hereinafter). Then, the control unit 17 scans the Y-axis stage 8y via the stage drive unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the Y-axis stage 8y is stopped. It can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 that the position where the peak value is maximized or the position where the half-value width is minimized corresponds to the center position in the Y-axis direction. be able to.

  In the subsequent readjustment in the Z-axis direction, the control unit 17 calculates the peak value or the half-value width of the light intensity from the light intensity distribution for each one-dimensional light intensity distribution obtained sequentially as described above. Then, the control unit 17 scans the Z-axis stage 8z through the stage driving unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the Z-axis stage 8z is stopped. It can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 that the position where the peak value is maximized and the position where the half width is minimized correspond to the center position in the Z-axis direction. be able to. As already described, this readjustment in the Z-axis direction may be omitted.

  In the subsequent readjustment in the X-axis direction, the control unit 17 stops the supply of the drive signal by the sine wave to the piezo actuator 9 to the piezo drive unit 12 and stops the reciprocating scanning of the piezo actuator 9 in the X-axis direction. . Thereafter, the control unit 17 scans the X-axis stage 8x via the stage drive unit 14 or sweeps the DC voltage to the piezo actuator 9 via the piezo drive unit 12 to scan in the X-axis direction. The position where the signal obtained from the amplifying unit 16 becomes maximum is obtained, and the position is set to that position, and the alignment operation is finished.

  In the operation described above, the control unit 17 has caused the amplification unit 16 to perform logarithmic amplification until the end. However, the control unit 17 may cause the amplification unit 16 to perform linear amplification in the final stage described with reference to FIG. Thus, by switching the amplification mode of the amplification unit 16 to linear amplification after the end 4a of the optical fiber 4 approaches the alignment position, the resolution of peak point detection and the like can be further increased, and as a result, submicron level. It is possible to align with higher accuracy.

  In the apparatus shown in FIG. 1, when alignment is completed, the ring-shaped connecting member 20 is moved leftward in FIG. 1, and the ferrule between the connecting member 20 and the light source module 3 and between the connecting member 20 and the optical fiber 4 is moved. Are spot-welded by a pulse laser from the laser welding machine 5, respectively.

  In this embodiment, after adjusting the Y axis and the X axis, the Y axis is offset by about several tens of μm, and the Z axis is adjusted. This is because the focal position can be detected more quickly when the detection target includes a non-signal area having an overwhelmingly large space, rather than the detection target itself. In the case of performing such a method, it is preferable to use a logarithmic amplifier 21 having the ability to observe in real time a wide light amount change of, for example, 6 digits, as in the present embodiment.

  In the present embodiment, as described above, the light source module 3 is reciprocally scanned one-dimensionally in the X-axis direction by the piezoelectric actuator 9 to obtain a one-dimensional light intensity distribution related to the X-axis. Based on the above, the position of the optical fiber 4 is adjusted. In this way, unlike conventional technology, position adjustment is performed by collectively using a one-dimensional light intensity distribution, so unnecessary signal search operations can be reduced, and optical components can be quickly aligned. It can be carried out. In addition, since the position adjustment is performed by collectively using the integrated value or average value of the one-dimensional light intensity distribution or the waveform itself, the light intensity distribution is not an ideal Gaussian distribution. Even if the actual light intensity distribution fluctuates locally, the influence can be greatly reduced. Furthermore, in the present embodiment, the output of the photodetector 15 is logarithmically amplified, so that the three-dimensional space in which the light intensity can be monitored as a signal can be greatly expanded. For the three-dimensional deviation of 4a, adjustment is advanced while monitoring the signal intensity in a wide space that is more than three times the area on each axis and about 30 times the volume compared to the case of using a linear amplifier. be able to. As described above, according to the present embodiment, in addition to the use of the one-dimensional light intensity distribution, the logarithmic amplification is used in combination to greatly increase the space in which the one-dimensional light intensity distribution can be effectively obtained. Therefore, the alignment time can be further shortened due to the combined effects of the two.

  The inventor actually manufactured an apparatus similar to the apparatus according to the present embodiment and aligned the light source module 3 and the optical fiber 4. As a result, alignment was performed in a very short time of about 5 seconds. It was confirmed that it ended.

  In the present embodiment, alignment control is performed using three axes of X, Y, and Z as alignment axes. However, the effectiveness of the present invention is apparent even in alignment including Xθ, Yθ, and Zθ. is there. For example, when alignment including Xθ and Yθ is further performed in this embodiment, the detection system is less likely to lose sight because the dynamic range of the detection system is large due to the adoption of logarithmic amplification even when the stage is moved. Further, regarding the angular movement of the Xθ axis, if the deviation of the beam spot position or detection point position due to the angular movement is within the amplitude of the piezo actuator 9, it is possible to capture the change in intensity distribution due to the angular movement. The center angle can also be adjusted by obtaining the optimum angle of optical coupling.

  [Second Embodiment]

  FIG. 9 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component aligning device according to the second embodiment of the present invention. 9, elements that are the same as or correspond to elements in FIG. 1 are given the same reference numerals, and redundant descriptions thereof are omitted.

  The apparatus shown in FIG. 9 is basically different from the apparatus shown in FIG. 1 described above. In the apparatus shown in FIG. 1, the control unit 17 realizes automatic alignment control, whereas the apparatus shown in FIG. The apparatus is configured as an apparatus that entrusts the operator with the determination based on the output of the amplification unit 16.

  In the apparatus shown in FIG. 9, the control unit 17 is removed, and instead, an operation unit 31 for an operator to give various commands, and a control unit 32 that controls each unit of the device as instructed from the operation unit 31. The oscilloscope 33 is provided.

  The control unit 32 causes the piezo drive unit 12 to drive the piezo actuator 9 in accordance with a command given from the operator via the operation unit 31. The control unit 32 causes the light source driving circuit 13 to emit the semiconductor laser 1 in accordance with a command given from the operator via the operation unit 31. The control unit 32 supplies an amplification mode selection signal to the amplification unit 16 in accordance with a command given from the operator via the operation unit 31. The control unit 32 moves the stages 7 and 8 through the stage driving unit 14 in accordance with a command given from the operator through the operation unit 31.

  The oscilloscope 33 receives a signal obtained by amplifying the position signal from the position detector 10 by the amplifier circuit 11 as a trigger signal, and displays the output signal of the amplifying unit 16 as a time waveform. When the light source module 3 is reciprocally scanned in the X-axis direction by the piezo actuator 9, the position of the light source module 3 with respect to the stage 7 (the amount of displacement of the piezo actuator 9) and the time have a corresponding relationship. The time waveform of the output signal of the amplifying unit 16 displayed by the oscilloscope 33 indicates a one-dimensional light intensity distribution according to reciprocal scanning in the X-axis direction by the piezoelectric actuator 9. Thus, in this Embodiment, the oscilloscope 33 comprises the presentation part shown to an operator by displaying a one-dimensional light intensity distribution. However, as a presentation unit that presents a one-dimensional light intensity distribution to the operator, for example, an image display unit such as a CRT, a position signal from the amplification circuit 11 and an output from the amplification unit 16 are captured, and the X-axis direction You may use the signal processing part which displays the light intensity distribution over the full amplitude of a reciprocating scan directly on an image display part for every half cycle of a reciprocating scan, for example. Needless to say, instead of using the position signal from the amplifier circuit 11 as a trigger signal, a piezoelectric drive signal may be used as the trigger signal.

  Using the apparatus shown in FIG. 9, the operator adjusts the stage 8 by operating the operation unit 31 while observing the waveform (one-dimensional light intensity distribution) displayed on the oscilloscope 33. The light source module 3 and the optical fiber 4 can be aligned by realizing an alignment method according to the alignment method realized by the apparatus according to the first embodiment. However, since the operator makes a judgment by looking at the waveform, an alignment method as described below can be adopted.

  A specific example of the alignment method using the apparatus shown in FIG. 9 will be described.

  As can be understood from the light intensity distribution described with reference to FIGS. 4 to 7, the position in the Z-axis direction of the end 4a of the optical fiber 4 coincides with the position in the Z-axis direction of the condensing point. Since the change in the signal intensity becomes large with respect to the deviation in the Y-axis direction and adjustment becomes difficult, the position in the Z-axis direction is, for example, a position that is previously shifted from the Z-axis direction position of the condensing point by about several hundred μm. It is desirable to start adjustment from

  The operator gives a command via the operation unit 31 to drive the piezo actuator 9 to reciprocately scan the light source module 3 and its condensing spot in the X-axis direction with a sine waveform having a frequency of 30 Hz and an amplitude of 100 μm to 300 μm, for example. Further, the semiconductor laser 1 of the light source module 3 is caused to emit light at a predetermined current value. Further, the operator gives a command via the operation unit 31 to cause the amplification unit 16 to perform logarithmic amplification. On the oscilloscope 33, a waveform indicating the light intensity distribution over the entire amplitude of the reciprocating scan in the X-axis direction is sequentially updated and displayed, for example, every half cycle of the reciprocating scan.

  In this state, the operator first adjusts the X-axis stage 8x by operating the operation unit 31, finds the maximum value of the waveform of the oscilloscope 33, and moves the Y-axis stage 8y so that the signal becomes larger. adjust. If a noticeable peak is found in the waveform observed by the oscilloscope 33, the operator operates the operation unit 31 and adjusts the X-axis stage 8x so that the peak comes to the center of the screen. If the peak of the X axis deviates from the reciprocating scanning range of the piezo actuator 9 in the X axis direction, the waveform is observed with an inclination, so that the peak can be easily obtained by adjusting the X axis stage 8x in the direction of higher inclination. Can be found. When the peak enters the reciprocating scanning range, the operator adjusts the X-axis stage 8x by operating the operation unit 31 so that the peak comes to the center of the screen.

  Next, the Z-axis stage 8z is adjusted and the position where the signal becomes large is confirmed. When the peak position is confirmed, the Z axis is further moved in the same direction, and when the signal decreases unilaterally, the peak position is returned and the Y axis stage 8y is adjusted to obtain the position where the signal is maximized. .

  If the signal decreases once when moving in the Z-axis direction, and the signal starts to increase again when the Z-axis is moved in the same direction after confirming the position where the signal is minimized, the second peak Check the position. After confirming the second peak position, the Z-axis stage 8y is returned to the position where the previous signal is minimized, and the Y-axis stage 8y is adjusted to obtain the position where the signal is maximized.

  With this series of operations, the X, Y, and Z adjustment positions are determined. However, if more accurate alignment is required, the X, Y, and Z axes may be adjusted again. At this time, it is preferable that the operator operates the operation unit 31 to cause the amplification unit 16 to perform linear amplification. When the amplification unit 16 does not perform linear amplification, the amplification unit 16 may be configured by only the logarithmic amplifier 21 as shown in FIG.

  When the above adjustment is completed, the operator operates the operation unit 31 to stop the reciprocating scanning by the piezoelectric actuator 9 and applies a DC voltage to the piezoelectric actuator 9. The operator adjusts the DC voltage by operating the operation unit 31 so as to maximize the level while observing the signal level of the amplification unit 16 displayed on the oscilloscope 33, and ends the alignment. Note that the X-axis stage 8x may be adjusted instead of applying or adjusting the DC voltage.

  In the present embodiment, alignment is performed with an operator interposed, but as described above, the operator repeatedly reciprocates the light source module 3 one-dimensionally in the X-axis direction by the piezo actuator 9, and X Based on the one-dimensional light intensity distribution with respect to the axis, the position of the optical fiber 4 can be adjusted. Therefore, according to the present embodiment, the alignment time can be remarkably reduced as compared with the conventional technique in which the alignment is performed with the operator interposed therebetween, and the operator requires little skill.

  As the stages 7 and 8, manually operated stages (for example, a stage whose operator can adjust the position by operating an adjusting screw or the like) may be used. In this case, the stage driving unit 14 is not necessary. .

  Similarly to the case of the third embodiment described later, in the apparatus according to the present embodiment, the scanning direction of the reciprocating scanning by the piezo actuator 9 may be changed to the Z-axis direction.

  [Third Embodiment]

  An optical component assembling apparatus having an optical component alignment apparatus according to a third embodiment of the present embodiment will be described.

  The apparatus according to the present embodiment is a modification of the apparatus shown in FIG. 1 described above. That is, in the apparatus according to the present embodiment, the scanning direction of the reciprocating scanning by the piezo actuator 9 is changed to the Z-axis direction instead of the X-axis direction, and the alignment operation is changed accordingly. Therefore, also in the description of this embodiment, reference is made to FIG. 1, and description overlapping with the description of the apparatus shown in FIG. 1 is omitted.

  The alignment operation of the apparatus according to this embodiment will be described.

  Regarding the initial position setting when starting the alignment operation, the mechanical setting error of the distal end portion 4a of the optical fiber 4 with respect to the condensing point of the light source module 3 is about ± 250 μm on the Z axis and ± 200 μm on the X axis and Y axis. The case where it is within the range will be described.

  In this case, the position of the distal end portion 4a of the fiber 4 is shifted from the expected condensing point by about −1000 μm on the Z axis (distant from the light source module 3) and about −150 μm on the XY axes (this The position is a set position, and the actual position deviates from the set position by the set error).

  When the alignment operation is started, the control unit 17 gives a command to the piezo drive unit 12 to drive the piezo actuator 9 via the piezo drive unit 12, and the light source module 3 and its condensing spot are moved in the Z-axis direction. For example, reciprocal scanning is performed with a sine waveform having a predetermined amplitude of 30 Hz and an amplitude of 100 μm to 300 μm, and the semiconductor laser 1 of the light source module 3 is caused to emit light at a predetermined current value via the light source driving circuit 13. The intensity of the light emitted from the optical fiber 4 is detected by the photodetector 15, the output thereof is amplified by the amplification unit 16, and the output of the amplification unit 16 is supplied to the control unit 17. The control unit 17 gives an amplification mode selection signal to the amplification unit 16 and causes the amplification unit 16 to perform logarithmic amplification. In the present embodiment, logarithmic amplification is continuously performed by the amplifying unit 16 except when fine adjustment as described later is performed. On the other hand, a position detection signal obtained from the position detector 10 via the amplifier circuit 11 is supplied to the control unit 17. The control unit 17 performs A / D conversion on the position detection signal from the amplification circuit 11 and the output (amplified light intensity signal) from the amplification unit 16 and captures each as data, thereby performing all the reciprocal scanning in the Z-axis direction. A light intensity distribution over the amplitude is sequentially obtained, for example, every half cycle of reciprocating scanning.

  The acquisition of the one-dimensional light intensity distribution according to the Z-axis direction reciprocating scanning by the piezo actuator 9 is continuously continued until a time point to be described later.

  In such a state, first, position adjustment in the X-axis direction is performed. At this stage, the control unit 17 calculates, for each one-dimensional light intensity distribution obtained sequentially as described above, an integrated value or an average value of light intensity within a predetermined range from the light intensity distribution. Then, the control unit 17 scans the X-axis stage 8x in the plus direction via the stage driving unit 14 while monitoring the integrated value or average value of a predetermined range of light intensity obtained from each one-dimensional light intensity distribution. Then, a position where the integral value or average value is maximized (corresponding to a substantially central position in the X-axis direction) is obtained, and the X-axis stage 8x is stopped. It can be understood from the light intensity distribution described with reference to FIGS. 4 to 7 that the position where the integrated value or the average value is maximum corresponds to the substantially central position in the X-axis direction. When readjustment is performed later in the X-axis direction as necessary, the X-axis stage 8x may be stopped not at the position where the integrated value or the average value is maximized, but at a position in the vicinity thereof.

  Next, position adjustment in the Z-axis direction is performed. At this stage, the control unit 17 calculates an integrated value, an average value, or a peak value of the light intensity from the light intensity distribution for each one-dimensional light intensity distribution sequentially obtained as described above. The control unit 17 scans the Z-axis stage 8z in the plus direction via the stage drive unit 14 while monitoring the integrated value, average value, or peak value of the light intensity obtained from each one-dimensional light intensity distribution, It is confirmed that the integrated value, the average value, or the peak value decreases and starts increasing again after showing the minimum value. Then, the Z-axis stage 8z is stopped by returning to the position where it becomes the minimum value. Note that the Z-axis stage 8z may be stopped not at a position where the integral value, average value, or peak value is minimized, but at a position in the vicinity thereof. This is because the readjustment is performed later in the Z-axis direction.

  Next, position adjustment in the Y-axis direction is performed. At this stage, the control unit 17 obtains a peak value or a half-value width of light intensity from the light intensity distribution (even with a predetermined ratio value width based on other ratios) for each one-dimensional light intensity distribution sequentially obtained as described above. This point is the same in the following). Then, the control unit 17 scans the Y-axis stage 8y via the stage drive unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the Y-axis stage 8y is stopped.

  Thereafter, the position in the Z-axis direction is readjusted. At this stage, the control unit 17 discriminates the shape of each one-dimensional light intensity distribution obtained sequentially as described above, scans the Z-axis stage 8z in the direction in which the light intensity signal increases, and The Z-axis stage 8z is moved to a position where the peak position is approximately the center of the amplitude of reciprocating scanning in the Z-axis direction from the typical light intensity distribution and stopped.

  Finally, the control unit 17 stops supplying the sine wave drive signal to the piezo actuator 9 and scans the Z-axis stage 8z or sweeps the DC voltage of the piezo actuator 9 to obtain a signal obtained from the amplification unit 16. The position where the maximum value is obtained is obtained, and the centering operation is completed in the state of the position.

  For example, in the case of performing highly accurate alignment at the submicron level, the control unit 17 moves the amplification unit 16 from the logarithmic amplification mode to a straight line after the initial adjustment in the X-axis direction and the adjustment in the Y-axis direction are completed. Switching to the amplification mode can further increase the resolution of peak point detection. In addition, when more complete alignment is performed, fine adjustment in the X-axis direction and fine adjustment in the Y-axis direction may be performed a plurality of times.

  The fine adjustment in the X-axis direction is performed as follows, for example. For each one-dimensional light intensity distribution obtained sequentially as described above, the control unit 17 calculates a peak value or a half value width of the light intensity from the light intensity distribution. Then, the control unit 17 scans the X-axis stage 8x via the stage driving unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the X-axis stage 8x is stopped. The fine adjustment in the Y-axis direction can be performed in the same manner as the fine adjustment in the X-axis direction.

  Also in this embodiment, the same advantages as those in the first embodiment can be obtained.

  [Fourth Embodiment]

  FIG. 10 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component aligning device according to the fourth embodiment of the present invention. 10, elements that are the same as or correspond to those in FIG. 1 are given the same reference numerals, and redundant descriptions thereof are omitted.

  The apparatus shown in FIG. 10 is different from the apparatus shown in FIG. 1 in the following points.

  The apparatus shown in FIG. 10 aligns the light source module 41 in place of the light source module 3 in FIG. 1 and the single-polarized polarization-maintaining optical fiber 43 in place of the optical fiber 4 in FIG. By connecting them together, the semiconductor laser module is configured to assemble a semiconductor laser module that couples the light of the semiconductor laser 1 to the optical fiber 43.

  In addition to the semiconductor laser 1 and the condenser lens 2, the light source module 41 has a polarizer 42 whose polarization direction is adjusted. The light source module 41 is mounted on the piezo actuator 9 via the holder 18. In the present embodiment, the piezo actuator 9 is configured to reciprocately scan the light source module 41 with respect to the stage 7 in the Z-axis direction. Although not shown in the drawing, the semiconductor laser 1 and the polarizer 42 of the light source module 41 are driven by the stage drive unit 14 under the control of the control unit 17 and are driven in the Zθ direction (that is, the rotation direction around the Z axis). To) a rotating stage (not shown) that rotates at least 180 °. Here, this rotary stage is called a Zθ rotary stage. The polarization-maintaining optical fiber 43 is mounted on the stage 8 via the holder 19.

  Next, the alignment operation of the apparatus shown in FIG. 10 will be described.

  Regarding the initial position setting when starting the alignment operation, the mechanical setting error of the distal end portion 43a of the optical fiber 43 with respect to the condensing point of the light source module 41 is about ± 250 μm on the Z axis, and ± 200 μm on the X axis and the Y axis. The case where it is within the range will be described.

  In this case, the position of the distal end portion 43a of the fiber 43 is a position (previously shifted by about −300 μm on the Z axis (distant from the light source module 43) and about −150 μm on each of the XY axes with respect to the expected condensing point. The position is a set position, and the actual position deviates from the set position by the set error).

  When the alignment operation is started, the control unit 17 gives a command to the piezo drive unit 12 to drive the piezo actuator 9 via the piezo drive unit 12, and the light source module 41 and its condensing spot are moved in the Z-axis direction. For example, reciprocal scanning is performed with a sine waveform having a frequency of 30 Hz and an amplitude of 300 μm, and the semiconductor laser 1 of the light source module 41 is caused to emit light at a predetermined current value via the light source driving circuit 13. The intensity of the light emitted from the optical fiber 43 is detected by the photodetector 15, the output thereof is amplified by the amplification unit 16, and the output of the amplification unit 16 is supplied to the control unit 17. The control unit 17 gives an amplification mode selection signal to the amplification unit 16 and causes the amplification unit 16 to perform logarithmic amplification. In the present embodiment, the amplifying unit 16 is made to perform logarithmic amplification continuously. On the other hand, a position detection signal obtained from the position detector 10 via the amplifier circuit 11 is supplied to the control unit 17. The control unit 17 performs A / D conversion on the position detection signal from the amplification circuit 11 and the output (amplified light intensity signal) from the amplification unit 16 and captures each as data, thereby performing all the reciprocal scanning in the Z-axis direction. A light intensity distribution over the amplitude is sequentially obtained, for example, every half cycle of reciprocating scanning.

  The acquisition of the one-dimensional light intensity distribution according to the Z-axis direction reciprocating scanning by the piezo actuator 9 is continuously continued until a time point to be described later.

  In such a state, first, the position adjustment in the Zθ direction is performed. That is, the control unit 17 rotates the Zθ rotating stage within a range of 180 ° while monitoring each one-dimensional light intensity distribution sequentially obtained as described above, and is a position where the optical signal intensity is substantially maximized. Return to fix.

  Next, position adjustment in the X-axis direction is performed. At this stage, the control unit 17 obtains a peak value or a half-value width of light intensity from the light intensity distribution (even with a predetermined ratio value width based on other ratios) for each one-dimensional light intensity distribution sequentially obtained as described above. This point is the same in the following). Then, the control unit 17 scans the X-axis stage 8x via the stage driving unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the X-axis stage 8x is stopped.

  Next, position adjustment in the Y-axis direction is performed. At this stage, the control unit 17 obtains a peak value or a half-value width of light intensity from the light intensity distribution (even with a predetermined ratio value width based on other ratios) for each one-dimensional light intensity distribution sequentially obtained as described above. This point is the same in the following). Then, the control unit 17 scans the Y-axis stage 8y via the stage drive unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the Y-axis stage 8y is stopped.

  Next, position adjustment in the Z-axis direction is performed. At this stage, the control unit 17 discriminates the shape of each one-dimensional light intensity distribution obtained sequentially as described above, scans the Z-axis stage 8z in the direction in which the light intensity signal increases, and The Z-axis stage 8z is moved to a position where the peak position is approximately the center of the amplitude of reciprocating scanning in the Z-axis direction from the typical light intensity distribution and stopped.

  Thereafter, the position in the Zθ direction is readjusted. That is, the control unit 17 rotates the Zθ rotation stage within a range of 180 ° while monitoring each one-dimensional light intensity distribution obtained sequentially as described above, so that the optical signal waveform is maximized. Go back and fix.

  Finally, the control unit 17 stops supplying the sine wave drive signal to the piezo actuator 9 and scans the Z-axis stage 8z or sweeps the DC voltage of the piezo actuator 9 to obtain a signal obtained from the amplification unit 16. The position where the maximum value is obtained is obtained, and the centering operation is completed in the state of the position.

  In order to perform alignment with higher accuracy, the control unit 17 switches the amplification unit 16 from the logarithmic amplification mode to the linear amplification mode after the initial adjustment in the X-axis direction and the adjustment in the Y-axis direction are completed. As a result, the resolution of peak point detection can be further increased. In addition, when more complete alignment is performed, fine adjustment in the X-axis direction and fine adjustment in the Y-axis direction may be performed a plurality of times.

  The fine adjustment in the X-axis direction is performed as follows, for example. For each one-dimensional light intensity distribution obtained sequentially as described above, the control unit 17 calculates a peak value or a half value width of the light intensity from the light intensity distribution. Then, the control unit 17 scans the X-axis stage 8x via the stage driving unit 14 while monitoring the peak value or half-value width of the light intensity obtained from each one-dimensional light intensity distribution, and the peak value is The maximum position or the position where the half width is minimum is obtained, and the X-axis stage 8x is stopped. The fine adjustment in the Y-axis direction can be performed in the same manner as the fine adjustment in the X-axis direction.

  In the apparatus shown in FIG. 10, when alignment is completed, the ring-shaped connecting member 20 is moved leftward in FIG. 10, and the ferrule between the connecting member 20 and the light source module 41 and between the connecting member 20 and the optical fiber 43 is moved. Are spot-welded by a pulse laser from the laser welding machine 5, respectively.

  Also in this embodiment, the same advantages as those in the first embodiment can be obtained.

  As a modification of the present embodiment, a detachable quarter-wave plate is inserted in the subsequent stage of the polarizer 42 of the light source module 41, and X and Y are inserted in the same manner as in the third embodiment with this inserted. , After adjusting the Z axis, the quarter wave plate may be removed and the light source module 41 may be rotated by the Zθ rotation stage to align the polarization direction with the polarization-maintaining optical fiber 43.

  [Fifth Embodiment]

  FIG. 11 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component aligning device according to the fifth embodiment of the present invention. 11, elements that are the same as or correspond to those in FIG. 1 are given the same reference numerals, and redundant descriptions thereof are omitted.

  The apparatus shown in FIG. 11 is different from the apparatus shown in FIG. 1 in the following points.

  The apparatus shown in FIG. 11 includes an incident end face of the waveguide 51a of the waveguide device 51 of the light detection module 54 in place of the light source module 3 in FIG. 1, and a single-core optical fiber 55 in place of the optical fiber 4 in FIG. After the alignment, the assembly device is configured to connect the two by the bonding machine 59.

  The light detection module 54 includes a waveguide device 51 having a waveguide 51a, a photodiode 53 as a photodetector, and a lens 52 that collects light emitted from the emission end face of the waveguide 51a on the photodiode 53. The photodiode 53 detects light incident from the incident end face of the waveguide 51a. The light intensity signal that is the output of the photodiode 53 is amplified by the amplifier 16 and then supplied to the controller 17. The light detection module 54 is mounted on the piezo actuator 9. In the present embodiment, the piezo actuator 9 reciprocally scans the light detection module 54 with respect to the stage 7 in the X-axis direction.

  The optical fiber 55 is mounted on the stage 8 via the holder 19. A light source module 56 having a semiconductor laser 57 and a condensing lens 58 is disposed at the incident end of the optical fiber 55, and the semiconductor laser 57 of the light source module 56 emits light with a constant light amount by a current supplied from the light source driving circuit 13. Be made. Light from the semiconductor laser 57 of the light source module 56 enters the optical fiber 55 from the incident end of the optical fiber 55 through the condenser lens 58 and is emitted from the outgoing end of the optical fiber 55. As shown in FIG. 11, the exit end of the optical fiber 55 faces the entrance end of the waveguide 51 a of the waveguide device 51.

Here, with reference to FIG. 12 to FIG. 15, the intensity distribution of light emitted from the emission end (light emitting point) of the optical fiber 55 will be described. 12 and 14 are light intensity distribution diagrams schematically showing the light intensity distribution in a plane parallel to the XZ plane (or YZ plane) and including the focal position. This light intensity distribution is rotationally symmetric about a straight line passing through the light emitting point and parallel to the Z axis. FIG. 12 and FIG. 14 are logarithmic displays on the assumption that the light intensity emitted from the light emitting point spreads in a Gaussian distribution from the light emitting point position, and the light intensity at the light emitting point position is 1 (= 10 ⁰ ). And is filled with isointensity lines for each digit. FIG. 13 shows the light intensity at each position in the Z direction on each line O ′, P ′, Q ′, R ′ parallel to the Z axis shifted from each other in the X direction (or Y direction) in the plane of FIG. FIG. FIG. 15 shows each X direction (Y direction) on each line H ′, I ′, J ′, K ′ parallel to the X axis (or Y axis) shifted in the Z direction in the plane of FIG. It is a figure which shows the light intensity in a position.

As can be seen from FIG. 12 to FIG. 15, it attenuates rapidly as the distance from the light emitting point increases. When the linear amplifier 22 is always used as in the prior art, the range of signal intensity that can be observed at one time is, for example, 2 to 3 digits, and in FIGS. 12 and 15, only a range of 2 to 3 isointensity lines at a time. I can't observe. On the other hand, when the logarithmic amplifier 21 is used, for example, a range from the light emission point of FIGS. 12 and 13 to the outermost isointensity line (10 ⁻⁶ isointensity line) can be observed simultaneously. . Also in this embodiment, the amplifying unit 16 has the same configuration as that of the first embodiment, and has a logarithmic amplifier 22.

  Next, the alignment operation of the apparatus shown in FIG. 11 will be described.

  Regarding the initial position setting when starting the alignment operation, the mechanical setting error of the output end of the optical fiber 55 is about ± 250 μm with respect to a predetermined setting position on the Z axis, and about ± 100 μm on the X axis and the Y axis. Will be described.

  In this case, the position of the output end of the optical fiber 55 is a position shifted from the incident end of the waveguide 51a by about 1500 μm on the Z axis (distant from the incident end of the waveguide 51a) and about −150 μm on the XY axis. (This position is a set position, and the actual position deviates from the set position by the set error.) The alignment operation starts.

  When the alignment operation is started, the control unit 17 gives a command to the piezo drive unit 12 to drive the piezo actuator 9 via the piezo drive unit 12 to move the light detection module 54 including the waveguide 51a in the X-axis direction. For example, the semiconductor laser 57 of the light source module 56 is caused to emit light at a predetermined current value via the light source driving circuit 13 through reciprocal scanning with a sine waveform having a frequency of 30 Hz and an amplitude of about 100 μm. The intensity of the light introduced into the waveguide 51 a is detected by the photodiode 53, the output thereof is amplified by the amplification unit 16, and the output of the amplification unit 16 is supplied to the control unit 17. The control unit 17 gives an amplification mode selection signal to the amplification unit 16 and causes the amplification unit 16 to perform logarithmic amplification. In the present embodiment, the amplifying unit 16 is made to perform logarithmic amplification continuously. On the other hand, a position detection signal obtained from the position detector 10 via the amplifier circuit 11 is supplied to the control unit 17. The control unit 17 performs A / D conversion on the position detection signal from the amplification circuit 11 and the output (amplified light intensity signal) from the amplification unit 16 and captures each as data, thereby performing all the reciprocal scanning in the X-axis direction. A light intensity distribution over the amplitude is sequentially obtained, for example, every half cycle of reciprocating scanning.

  The acquisition of the one-dimensional light intensity distribution according to the reciprocating scanning in the X-axis direction by the piezo actuator 9 is successively continued until a time point to be described later.

  In such a state, first, position adjustment in the X-axis direction is performed. At this stage, the control unit 17 calculates, for each one-dimensional light intensity distribution obtained sequentially as described above, an integrated value or an average value of light intensity within a predetermined range from the light intensity distribution. Then, the control unit 17 scans the X-axis stage 8x in the plus direction via the stage driving unit 14 while monitoring the integrated value or average value of a predetermined range of light intensity obtained from each one-dimensional light intensity distribution. Then, a position where the integral value or average value is maximized (corresponding to a substantially central position in the X-axis direction) is obtained, and the X-axis stage 8x is stopped. It can be understood from the light intensity distribution described with reference to FIGS. 12 to 15 that the position where the integrated value or the average value is maximum corresponds to the substantially central position in the Y-axis direction.

  Next, position adjustment in the Y-axis direction is performed. At this stage, the control unit 17 calculates, for each one-dimensional light intensity distribution obtained sequentially as described above, an integrated value or an average value of light intensity within a predetermined range from the light intensity distribution. Then, the control unit 17 scans the Y-axis stage 8y in the plus direction via the stage driving unit 14 while monitoring the integral value or average value of a predetermined range of light intensity obtained from each one-dimensional light intensity distribution. Then, a position where the integrated value or average value is maximized (corresponding to a substantially central position in the Y-axis direction) is obtained, and the Y-axis stage 8y is stopped. It can be understood from the light intensity distribution described with reference to FIGS. 12 to 15 that the position where the integrated value or the average value is maximum corresponds to the substantially central position in the X-axis direction.

  Next, the control unit 17 moves the Z-axis stage 8z by about 1000 μm in the direction in which the optical fiber 55 and the waveguide 51a are brought closer. At this time, if the one-dimensional light intensity distribution shows a trapezoidal shape, the control unit 17 moves the X-axis stage 8x to a position where the trapezoidal waveform is approximately the center of the amplitude of the reciprocating scanning in the X-axis direction by the piezo actuator 9. If the waveform is not trapezoidal but asymmetrical, the X-axis stage 8x is scanned in the direction of higher signal level, and the trapezoidal waveform is approximately at the center of the amplitude of reciprocating scanning in the X-axis direction by the piezo actuator 9. The X-axis stage 8x is moved to the position.

  Next, the control unit 17 adjusts the position in the Y-axis direction again while monitoring the integrated value or average value of the one-dimensional light intensity distribution, and the Y-axis stage 8y until the position where the integrated value or average value becomes maximum. Move.

  Next, the controller 17 gradually brings the fiber 55 closer to the waveguide 51a with the Z-axis stage 8z. Then, in the one-dimensional light intensity distribution, as shown in FIG. 16, the peak intensity of the signal gradually increases and the width (half width) of the waveform is reduced. The gap length between the output end of the fiber 55 and the incident end of the waveguide 51a and the waveform width (half-value width) have a certain relationship as illustrated in FIG. At that time, the movement of the Z-axis stage 8z is stopped.

  Thereafter, the control unit 17 stops the supply of the drive signal by the sine wave to the piezo actuator 9 and scans the X-axis stage 8x or sweeps the DC voltage of the piezo actuator 9 so that the signal obtained from the amplification unit 16 is the maximum. Find the position to become, and make it the state of that position.

  Next, the control unit 17 moves the Z-axis stage 8z by a predetermined distance so as to abut the emission end of the fiber 55 against the incident end of the waveguide 51a.

  Thereafter, the control unit 17 fixes the emission end of the fiber 55 and the incident end of the waveguide 51a by soldering or an adhesive using the bonding machine 59. Thereby, the assembly is completed.

  Note that the alignment of the waveguide end face of the waveguide device and the semiconductor laser chip is also possible by the method of the present embodiment. However, in this case, when the control unit 17 determines the gap length between the waveguide end face and the semiconductor laser chip, the controller 17 stops the supply of the drive signal by the sine wave to the piezoelectric actuator 9 and scans the X-axis stage 8x. A position where the signal obtained from the amplification unit 16 is maximized by sweeping the DC voltage of the piezo actuator 9 is obtained, and the position is set, and the two are not abutted.

  In the present embodiment, the scanning direction of the reciprocating scanning by the piezo actuator 9 is the X-axis direction, but the scanning direction may be, for example, the Y-axis direction.

  [Sixth Embodiment]

  FIG. 18 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component aligning device according to a sixth embodiment of the present invention. FIG. 19 is a schematic perspective view schematically showing a main part in FIG. FIG. 20 is a diagram schematically showing the principle of alignment relating to the tilt of the apparatus shown in FIG. 18 and 19, the same or corresponding elements as those in FIG. 1 are denoted by the same reference numerals, and redundant description thereof is omitted.

  The apparatus shown in FIG. 18 differs from the apparatus shown in FIG. 1 in the following points.

  The apparatus shown in FIG. 18 aligns a waveguide device 61 in place of the light source module 3 in FIG. 1 and a ribbon optical fiber 62 in place of the optical fiber 4 in FIG. It is configured as an assembly device.

  In the waveguide device 61, as shown in FIG. 19, one waveguide (referred to as “pre-branch waveguide” for convenience of explanation) is referred to as a plurality of waveguides (for convenience of explanation, “post-branch waveguide”). .)) Has a branched waveguide 64 having a branched structure. As shown in FIGS. 19 and 20, the end faces of the plurality of post-branch waveguides of the branch waveguide 64 are arranged at a predetermined pitch on the straight line L <b> 1 and can emit light along optical axes parallel to each other. It has become.

  The waveguide device 61 is mounted on the piezo actuator 9. One end of an optical fiber 65 is coupled to the end face of the pre-branch waveguide of the waveguide device 61, and a light source module 68 having a semiconductor laser 66 and a condenser lens 67 is disposed on the other end of the optical fiber 65. The 68 semiconductor lasers 66 are made to emit light with a constant light amount by the current supplied from the light source driving circuit 13. Light from the semiconductor laser 66 enters the pre-branch waveguide of the branch waveguide 64 via the condenser lens 57 and the optical fiber 65 and exits from the plurality of post-branch waveguides of the branch waveguide 64, respectively.

  The ribbon optical fiber 62 has a plurality of core optical fibers 69 as shown in FIG. As shown in FIGS. 19 and 20, the one end surfaces of the plurality of core optical fibers 69 are arranged on the straight line L2 at the same pitch as the predetermined pitch, and can respectively enter the light along the optical axes parallel to each other. It has become. One side portion of the ribbon optical fiber 62 is mounted on the stage 8 by the holder 19. One end faces of the plurality of core optical fibers 69 are opposed to end faces of the plurality of post-branch waveguides of the branch waveguide 64 of the waveguide device 61, respectively.

  Photodetectors 15A and 15B are disposed at the other ends of the two core optical fibers 69 on both sides of the ribbon optical fiber 62, respectively. The light emitted from the end faces of the two post-branch waveguides on both sides of the branch waveguide 64 of the waveguide device 61 passes through the two core optical fibers 69 on both sides of the ribbon optical fiber 62, and the photodetector 15A. , 15B, respectively. The outputs of the photodetectors 15A and 15B are supplied to the control unit 17 after being amplified by the amplification units 16A and 16B, respectively. Each amplifier 16A, 16B has the same configuration as the amplifier 16 in FIG.

  In the present embodiment, the stage 8 has a Zθ rotation axis adjusting mechanism in addition to the X, Y, and Z axes. That is, the stage 8 is a composite of the X-axis stage 8x, the Y-axis stage 8y, the Z-axis stage 8z, and the Zθ rotation stage 8zθ. However, the stages 8x to 8z and 8zθ for each axis are not shown.

  Next, the alignment operation of the apparatus shown in FIG. 18 will be described.

  When the alignment operation is started, the control unit 17 gives a command to the piezo drive unit 12 to drive the piezo actuator 9 via the piezo drive unit 12, thereby causing the waveguide device 61 to have a frequency of about 30 Hz, for example, in the X-axis direction. The semiconductor laser 66 of the light source module 68 is caused to emit light at a predetermined current value via the light source driving circuit 13 by reciprocating scanning with a sine waveform having a predetermined amplitude of about 100 μm to 300 μm (± 50 to 150 μm). Thereby, the intensity of each light introduced into the two core optical fibers 69 on both sides of the ribbon optical fiber 62 is detected by the photodetectors 15A and 15B, respectively, and their outputs are respectively detected by the amplifying units 16A and 16B. Amplified, and the outputs of the amplification units 16A and 16B are supplied to the control unit 17. The control unit 17 gives an amplification mode selection signal to the amplification units 16A and 16B, and causes the amplification units 16A and 16B to perform logarithmic amplification. In the present embodiment, the amplifying unit 16 is made to perform logarithmic amplification continuously. On the other hand, a position detection signal obtained from the position detector 10 via the amplifier circuit 11 is supplied to the control unit 17. The controller 17 performs A / D conversion on the position detection signal from the amplifier circuit 11 and the outputs (amplified light intensity signals) from the amplifiers 16A and 16B, respectively, and takes them in as data, thereby reciprocating in the X-axis direction. A one-dimensional light intensity distribution over the entire scanning amplitude is sequentially obtained for each of the detectors 15A and 15B, for example, every half cycle of the reciprocating scanning. The one corresponding to the photodetector 15A is called channel A (CH A), and the one corresponding to the photodetector 15B is called channel B (CH B).

  The acquisition of the one-dimensional light intensity distribution according to the reciprocating scanning in the X-axis direction by the piezo actuator 9 is successively continued until a time point to be described later.

  In such a state, first, the controller 17 adjusts the Z-axis stage 8z to bring the ribbon fiber 62 closer to the waveguide device 61 within a mechanically safe range.

  At this time, when the left and right ends of the waveguide device 61 and the ribbon fiber 62 are within about ± 50 μm on the X axis, 1 of each of the channels CH A and CH B obtained corresponding to the photodetectors 15A and 15B, respectively. The dimensional light intensity distribution is as shown in FIG.

  At this time, if the straight line L1 of the waveguide device 61 and the straight line L2 of the ribbon fiber 62 are inclined, the peak position (the position of the peak in the X-axis direction) in the one-dimensional light intensity distribution is shifted from each other. It will vary. The control unit 17 calculates the peak positions of the two one-dimensional light intensity distributions, and adjusts the angle by the Zθ rotation stage 8zθ so that there is almost no variation between the two.

  According to the present invention, the peak position of the one-dimensional light intensity distribution is caused by the piezoelectric actuator 9 when the amplitude of the reciprocating scanning in the X-axis direction by the piezoelectric actuator 9 is small or the mechanical setting error of parts is large. Even when the amplitude does not fall within the range of the amplitude of the reciprocating scan in the X-axis direction, the peak position is shifted to either of the amplitudes of the reciprocating scan from the slope of the bottom of the waveform of the obtained one-dimensional light intensity distribution. Therefore, the control unit 17 can easily adjust the angle by adjusting the Zθ-axis stage 8zθ and the X-axis stage 8x in the direction in which the peak appears based on the determination result.

  Next, the control unit 17 scans the Y-axis stage 8y, obtains the Y-axis position where the peak intensity of the one-dimensional light intensity distribution of each channel is maximized, and stops at this position. At this time, if the position on the Y-axis where the maximum signal is obtained in the left and right channels is shifted, the intermediate position is set, or the two peak intensities are adjusted to be the same.

  After the adjustment of the Y-axis is completed, the control unit 17 scans the Z-axis stage 8z, brings the ribbon fiber closer to the waveguide, and stops the movement of the stage at a predetermined distance. At this time, the distance between the waveguide device 61 and the tip of the ribbon fiber 62 can be known from the half-value width obtained from the one-dimensional light intensity distribution, in the same manner as already described with reference to FIGS. .

  Next, the control unit 17 stops supplying the sine wave drive signal to the piezo actuator 9 and scans the X-axis stage 8x or sweeps the DC voltage of the piezo actuator 9 from one of the amplification units 16A and 16B. The position where the obtained signal is maximized is obtained, and the state at that position is obtained. Thereafter, the Z-axis stage 8z is moved by a predetermined distance, and the ribbon optical fiber 62 is abutted against the waveguide device 61 or set to the minimum distance.

  Thereafter, the control unit 17 fixes the end of the ribbon optical fiber 62 and the end of the waveguide device 61 with an adhesive or the like using the bonding machine 63. Thereby, the assembly is completed.

  In the example described above, the light intensity is detected for the two core optical fibers 69 on both sides of the plurality of core optical fibers 69 of the ribbon optical fiber 62. However, any number of cores of two or more The optical intensity may be detected for the optical fiber 69, or the optical intensity may be detected for each of the core optical fibers 69, even if the ribbon optical fiber 62 is multi-core such as 16 to 32.

  [Seventh Embodiment]

  FIG. 21 is a schematic configuration diagram schematically showing a high-frequency characteristic measuring apparatus having an optical component alignment apparatus according to the seventh embodiment of the present invention. In FIG. 21, elements that are the same as or correspond to those in FIG. 1 are given the same reference numerals, and redundant descriptions thereof are omitted.

  The apparatus shown in FIG. 21 is different from the apparatus shown in FIG. 1 in the following points.

  The apparatus shown in FIG. 21 is configured as a high-frequency characteristic measuring apparatus that measures high-frequency characteristics of a high-speed photodiode as a photodetector.

  In the apparatus shown in FIG. 21, instead of the optical fiber 4 in FIG. 1, a photodiode 71 as a measurement target is mounted on the stage 8 via a holder 72. The photodiode 71 faces the light source module 3. In the apparatus shown in FIG. 21, a bias T73, a signal generator 74, a branch circuit 75, and a spectrum analyzer 76 are provided in place of the laser welding machine 5 and the photodetector 15.

  The photodiode 71 detects the intensity of the laser beam incident from the light source module 3. The output of the photodiode 71 is branched into two by the branch circuit 75, and one of the branched outputs is amplified by the amplifier 16 and sent to the controller 17. The other output branched by the branch circuit 75 is sent to the spectrum analyzer 76, and its frequency characteristics are measured by the spectrum analyzer or the like. The semiconductor laser 1 of the light source module 3 is modulated by a signal generator 74 through a bias T73.

  In the apparatus shown in FIG. 21, the photodiode 71 is aligned with the condensing point of the light source module 3 by the alignment operation similar to the alignment operation of the apparatus shown in FIG. 1 described above.

    Normally, the light receiving area of the photodiode 71 is several tens of μm, which is larger than the condensing spot of the light source module 3, and there is also a sensitivity unevenness within the light receiving area, so that the peak point of the one-dimensional light intensity distribution is There may be cases where it cannot be determined clearly. In such a case, the center of the full width at half maximum and the center of gravity position may be matched with respect to the maximum value of the signal, and the center with reference to the guard ring position provided on the light receiving surface of the photodiode 71 (see FIG. 22). A method of obtaining the position may be used.

  When the alignment is completed, the control unit 17 controls the signal generator 74 to sweep the oscillation frequency, and measures the frequency characteristic of the photodiode 71 using the spectrum analyzer 76 or the like.

  Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments.

  For example, a modification similar to that obtained by modifying the apparatus shown in FIG. 1 to obtain the apparatus shown in FIG. 9 is applied to the apparatus shown in FIG. 10, the apparatus shown in FIG. 11, the apparatus shown in FIG. 18, and the apparatus shown in FIG. It is also possible to configure a device that applies to each of them and leaves it to the operator's judgment or the like corresponding to these devices. When such a modification is applied to the apparatus shown in FIG. 18, one oscilloscope may be provided for each of the amplifiers 16A and 16B, but a two-phenomenon oscilloscope is preferably used.

1 is a schematic configuration diagram schematically showing an optical component assembling apparatus having an optical component alignment device according to a first embodiment of the present invention. It is a schematic block diagram which shows an example of a structure of an amplification part. It is a schematic block diagram which shows the other example of a structure of an amplification part. It is a figure which shows light intensity distribution typically. It is a figure which shows the light intensity on each line in the paper surface of FIG. It is another figure which shows light intensity distribution typically. It is a figure which shows the light intensity on each line in the paper surface of FIG. It is a figure which shows the mode of the movement of the optical fiber in each adjustment stage with light intensity distribution. It is a schematic block diagram which shows typically the assembly apparatus of the optical component which has the alignment apparatus of the optical component by the 2nd Embodiment of this invention. It is a schematic block diagram which shows typically the assembly apparatus of the optical component which has the alignment apparatus of the optical component by the 4th Embodiment of this invention. It is a schematic block diagram which shows typically the assembly apparatus of the optical component which has the alignment apparatus of the optical component by the 5th Embodiment of this invention. It is another figure which shows light intensity distribution typically. It is a figure which shows the light intensity on each line in the paper surface of FIG. It is another figure which shows light intensity distribution typically. It is a figure which shows the light intensity on each line in the paper surface of FIG. It is a figure which shows the mode of a change of one-dimensional light intensity distribution. It is a figure which shows the relationship between a gap and a half value width. It is a schematic block diagram which shows typically the assembly apparatus of the optical component which has the alignment apparatus of the optical component by the 6th Embodiment of this invention. It is a schematic perspective view which shows typically the principal part in FIG. It is a figure which shows typically the principle of the alignment regarding the inclination of the apparatus shown in FIG. It is a schematic block diagram which shows typically the high frequency characteristic measuring apparatus which has the alignment apparatus of the optical component by the 7th Embodiment of this invention. It is a figure which shows the influence of a guard ring.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor laser 2 Condensing lens 3 Light source module 4 Optical fiber 5 Laser welding machine 7, 8 Stage 9 Piezo actuator 10 Position detector 11 Amplifying circuit 16 Amplifying part 17 Control part

Claims (15)

The light emitted from the first optical component and introduced into the second optical component is detected by a photodetector, the output of the photodetector is amplified by amplification means, and based on the output of the amplification means, In adjusting the relative position between the first optical component and the second optical component to be the alignment position, the method of bringing the relative position closer to the alignment position;
Based on the output of the amplifying means obtained according to the reciprocating scan while relatively reciprocally scanning the first optical component and the second optical component one-dimensionally with respect to one axis. A light intensity distribution obtaining step for obtaining a one-dimensional light intensity distribution with respect to one axis;
Obtaining an integrated value or an average value of a predetermined range of light intensity from the one-dimensional light intensity distribution;
The center position of the reciprocating scan is moved in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, and the integrated value or the average value is at or near the position where the integrated value or the average value is maximum. Stopping the movement in the predetermined direction at a position;
The method of approaching the alignment position characterized by comprising. After the step of stopping the movement in the predetermined direction, the first optical component and the second optical component are relatively reciprocally scanned one-dimensionally with respect to the one axis, A second light intensity distribution acquisition step for obtaining a one-dimensional light intensity distribution with respect to the one axis based on the output of the amplification means obtained according to the reciprocating scanning;
Obtaining a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution obtained in the second light intensity distribution acquisition stage;
The center position of the reciprocating scan is moved in a predetermined direction substantially perpendicular to the optical axis direction, and the movement in the predetermined direction is stopped at the position where the peak value is maximum or the predetermined ratio value width is minimum. And the stage
The method of approaching the alignment position of Claim 1 characterized by the above-mentioned. After the step of stopping the movement in the predetermined direction, the first optical component and the second optical component are relatively reciprocally scanned one-dimensionally with respect to the one axis, A second light intensity distribution acquisition step for obtaining a one-dimensional light intensity distribution with respect to the one axis based on the output of the amplification means obtained according to the reciprocating scanning;
Obtaining a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution obtained in the second light intensity distribution acquisition stage;
The center position of the reciprocating scan is moved in a direction substantially coincident with the optical axis direction, and the position where the peak value is maximized or the position where the predetermined ratio value width is minimized is substantially coincident with the optical axis direction. Stopping the movement in the direction,
The method of approaching the alignment position of Claim 1 characterized by the above-mentioned. The light emitted from the first optical component is light collected at a condensing point,
After the step of stopping the movement in the predetermined direction, the first optical component and the second optical component are relatively reciprocally scanned one-dimensionally with respect to the one axis, A second light intensity distribution acquisition step for obtaining a one-dimensional light intensity distribution with respect to the one axis based on the output of the amplification means obtained according to reciprocating scanning;
Obtaining an integrated value or an average value or a peak value of light intensity from the one-dimensional light intensity distribution obtained in the second light intensity distribution obtaining step;
With the center position of the reciprocating scan being offset from the alignment position in a direction substantially perpendicular to the optical axis direction, the center position is moved in a direction substantially coincident with the optical axis direction, and the integrated value or the Stopping the movement in the direction substantially coincident with the optical axis direction at a position where the average value or the peak value is minimum;
The method of approaching the alignment position of Claim 1 characterized by the above-mentioned. After the step of stopping the movement in the predetermined direction, the first optical component and the second optical component are relatively reciprocally scanned one-dimensionally with respect to the one axis, A second light intensity distribution acquisition step for obtaining a one-dimensional light intensity distribution with respect to the one axis based on the output of the amplification means obtained according to the reciprocating scanning;
Obtaining a predetermined ratio value width of light intensity from the one-dimensional light intensity distribution obtained in the second light intensity distribution acquisition stage;
The center position of the reciprocating scan is moved in a direction substantially coinciding with the optical axis direction so that the predetermined ratio value width is a predetermined amount of gap between the first optical component and the second optical component. Stopping the movement in the direction substantially corresponding to the optical axis direction at a position corresponding to a predetermined value;
The first optical component and the second optical component are relatively moved in a direction substantially coinciding with the optical axis direction, and the first optical component and the second optical component are brought into contact with each other. Stages,
The method of approaching the alignment position of Claim 1 characterized by the above-mentioned. 6. The method according to claim 1, wherein the amplification means performs logarithmic amplification. Before the relative position approaches the alignment position, the amplification means performs logarithmic amplification, and after the relative position approaches the alignment position, the amplification means performs linear amplification. The method of approaching the alignment position according to any one of claims 1 to 5. In the aligning device for an optical component that adjusts the relative position between the first optical component and the second optical component,
Amplifying means for amplifying the output of a photodetector for detecting the light emitted from the first optical component and introduced into the second optical component;
Moving means for changing a relative position between the first optical component and the second optical component;
Reciprocating scanning means for reciprocally scanning the first optical component and the second optical component relatively one-dimensionally and reciprocally with respect to one axis;
Means for obtaining a one-dimensional light intensity distribution with respect to the one axis based on the output of the amplification means obtained according to the reciprocating scanning;
Means for obtaining an integrated value or an average value of a predetermined range of light intensity from the one-dimensional light intensity distribution;
The center position of the reciprocating scan is moved in a predetermined direction substantially perpendicular to the optical axis direction of the light emitted from the first optical component, and the position where the integrated value or the average value becomes the maximum or in the vicinity thereof. Means for controlling the moving means to stop movement in the predetermined direction at a position;
An optical component alignment apparatus comprising: Means for obtaining a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution obtained after the moving means is controlled by the means for controlling the moving means;
After the moving means is controlled by the means for controlling the moving means, the center position of the reciprocating scan moves in a predetermined direction substantially perpendicular to the optical axis direction, and the peak value is maximized or Means for controlling the moving means to stop the movement in the predetermined direction at a position where the predetermined ratio value width is minimum;
The optical component aligning device according to claim 8, comprising: Means for obtaining a peak value of light intensity or a predetermined ratio value width from the one-dimensional light intensity distribution obtained after the moving means is controlled by the means for controlling the moving means;
After the moving means is controlled by the means for controlling the moving means, the center position of the reciprocating scanning moves in a direction substantially coincident with the optical axis direction, and the position where the peak value becomes maximum or the Means for controlling the moving means to stop the movement in the direction substantially coincident with the optical axis direction at a position where the predetermined ratio value width is minimum;
The optical component aligning device according to claim 8, comprising: The light emitted from the first optical component is light collected at a condensing point,
Means for obtaining an integrated value or average value or peak value of light intensity from the one-dimensional light intensity distribution obtained after the moving means is controlled by the means for controlling the moving means;
After the moving means is controlled by the means for controlling the moving means, the center position of the reciprocating scan is offset from the alignment position in a direction substantially perpendicular to the optical axis direction. Moving in a direction substantially coincident with the optical axis direction and stopping the movement in the direction substantially coincident with the optical axis direction at a position where the integrated value or the average value or the peak value is minimum. Means for controlling the moving means;
The optical component aligning device according to claim 8, comprising: Means for obtaining a predetermined ratio value width of light intensity from the one-dimensional light intensity distribution obtained after the moving means is controlled by the means for controlling the moving means;
The center position of the reciprocating scan moves in a direction substantially coincident with the optical axis direction, and the predetermined ratio value width corresponds to a predetermined amount of gap between the first optical component and the second optical component. Means for controlling the moving means so as to stop the movement in the direction substantially coincident with the optical axis direction at a position to be a predetermined value.
The optical component aligning device according to claim 8, comprising: The optical component aligning device according to claim 8, wherein the amplifying unit performs logarithmic amplification. The amplifying means selectively performs one of logarithmic amplification and linear amplification in response to a selection signal,
Before the relative position approaches the alignment position, the amplification means performs logarithmic amplification, and after the relative position approaches the alignment position, linear amplification is performed on the amplification means. The optical component aligning device according to claim 8, further comprising means for giving the selection signal to the amplification means. A method of manufacturing an assembly of a first optical component and a second optical component, wherein the first optical component and the second optical component are assembled using the method of approaching an alignment position according to any one of claims 1 to 7. A method of manufacturing an assembly of optical components, comprising a step of adjusting a relative position with respect to a second optical component.

Images