JP4312545B2 - Multilayer circuit board manufacturing method and circuit board material - Google Patents

Multilayer circuit board manufacturing method and circuit board material Download PDF

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JP4312545B2
JP4312545B2 JP2003287431A JP2003287431A JP4312545B2 JP 4312545 B2 JP4312545 B2 JP 4312545B2 JP 2003287431 A JP2003287431 A JP 2003287431A JP 2003287431 A JP2003287431 A JP 2003287431A JP 4312545 B2 JP4312545 B2 JP 4312545B2
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film
circuit board
bump
insulating resin
filler
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JP2005057107A (en
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田 仁 内
中 秀 明 田
村 良 一 吉
野 高 治 岡
間 史 朗 赤
森 正 晃 金
田 裕 賢 水
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Nippon Mektron KK
Nok Corp
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Nok Corp
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Description

本発明は、多層回路基板の製造技術に係り、とくに導電性バンプを用いて絶縁性樹脂層の表、裏各層間の導通を取る回路基板の製造法および回路基板用素材に関する。   The present invention relates to a technique for manufacturing a multilayer circuit board, and more particularly to a circuit board manufacturing method and a circuit board material that use conductive bumps to provide conduction between front and back layers of an insulating resin layer.

従来、高密度の多層基板を製造する場合は、次のような工程による。まず、パターニングされた下部基板上に絶縁性樹脂付き銅箔を接着する。次いで、下部基板のパターンに対応したマスクを用意し、このマスクを用いて銅箔に開口を形成する。そして、この開口を介してレーザーを照射するなどにより開口部分の絶縁性樹脂を取り除く。その後、絶縁性樹脂を除いた部分の表面に金属メッキを施すことで上下の導通部を形成し、さらに上部銅箔をパターニングする。これにより、多層回路基板とする。   Conventionally, when a high-density multilayer substrate is manufactured, the following process is performed. First, a copper foil with an insulating resin is bonded onto the patterned lower substrate. Next, a mask corresponding to the pattern of the lower substrate is prepared, and an opening is formed in the copper foil using this mask. Then, the insulating resin in the opening is removed by irradiating a laser through the opening. Thereafter, the upper and lower conductive portions are formed by performing metal plating on the surface of the portion excluding the insulating resin, and the upper copper foil is further patterned. Thus, a multilayer circuit board is obtained.

この多層回路基板の製造法に対するコストダウン策として、特許文献1および2に示すようなBit技術と呼ばれるものが開発されている。これは、表面に導電性バンプが形成された金属箔を用意し、この金属箔のバンプを絶縁性樹脂を介して別のパターン形成された金属箔に当接、接続することで導通部を形成し、さらに銅箔をパターニングして多層基板の回路とするものである。
特開平06−342977号公報 特開2001−111189号公報
As a cost reduction measure for the manufacturing method of this multilayer circuit board, what is called B 2 it technology as shown in Patent Documents 1 and 2 has been developed. This is done by preparing a metal foil with conductive bumps formed on the surface, and contacting the bumps of this metal foil with another patterned metal foil via an insulating resin to form a conductive part. Further, the copper foil is patterned to form a circuit of a multilayer substrate.
Japanese Patent Laid-Open No. 06-342977 JP 2001-1111189 A

導体層に形成されたバンプ上の導電性突起がフィルム状の絶縁性樹脂を貫通することにより対向する導体層との層間電気接合を行う回路基板の製造において、突起の絶縁性樹脂貫通性は、樹脂フィルムの機械的強度、突起の形状および機械的強度、ならびにプレス時の温度圧力などに左右される。   In the production of a circuit board in which conductive protrusions on the bumps formed on the conductor layer penetrate the film-like insulating resin to perform interlayer electrical bonding with the opposing conductor layer, the insulating resin penetration of the protrusions is It depends on the mechanical strength of the resin film, the shape and mechanical strength of the protrusions, and the temperature and pressure during pressing.

そして、樹脂フィルムが機械的強度の大きなものであると、突起が貫通し難い場合がある。例えば、ポリイミドフィルムのような機械的強度に優れた樹脂フィルムを、突起頂部が平坦でその平面形状が円形であり、大きさが100μm程度の突起で貫通しようとする場合、フィルム厚みが25μm程度であると、1回のプレスで数百個ほど配置された突起の全てを貫通させることは技術的にかなりの困難を伴う。   And when a resin film is a thing with big mechanical strength, a protrusion may be difficult to penetrate. For example, when a resin film having excellent mechanical strength such as a polyimide film is to be penetrated by a protrusion having a flat top portion and a circular planar shape and a size of about 100 μm, the film thickness is about 25 μm. In some cases, it is technically difficult to penetrate all of several hundreds of protrusions arranged in one press.

その対策として、被貫通部の樹脂を削り取ったりする機械的操作や、ドライエッチングなどにより樹脂を分解除去してバンプ頂部を露出させる手法、あるいは樹脂にレーザー加工やNCドリルなどで貫通部分を開口し、バンプの貫通性を向上させるなどの補修作業が行われている。   As countermeasures, mechanical operations such as scraping off the resin in the through-hole part, methods of disassembling and removing the resin by dry etching, etc., or exposing the bump tops, or opening the through part by laser processing or NC drill, etc. Repair work such as improving the penetrability of bumps has been carried out.

しかしながら、これらの方法では、バンプ自身も削り取られたり、絶縁性樹脂が目減りしたりする問題や、バンプの研磨屑や研磨剤の残留などによる、回路基板への異物混入を避けることが困難である。また、かなり手間が掛かって処理時間が長くなるとか、精密な位置合わせ技術を必要とするなどの不具合がある。   However, with these methods, it is difficult to avoid contamination of the circuit board due to problems such as the bump itself being scraped off or loss of the insulating resin, and residual bumps or abrasives from the bump. . In addition, there are problems such as considerable time and processing time and the need for precise alignment technology.

本発明は上述の点を考慮してなされたもので、補修工程とか、精密な位置合わせを伴う前処理工程を極力避けるため、簡便にバンプの樹脂貫通性を向上させ得る回路基板の製造法およびその方法に使用する回路基板用素材を提供することを目的とする。   The present invention has been made in consideration of the above points, and in order to avoid a repair process or a pretreatment process with precise alignment as much as possible, a method for manufacturing a circuit board that can easily improve resin penetration of bumps and It aims at providing the raw material for circuit boards used for the method.

上記目的達成のため、本発明では、
請求項1記載の、
回路基板に設けられた層間接続用バンプ上に絶縁性樹脂製のフィルムを重ねて、前記バンプを前記フィルムに当接、押圧することにより、前記バンプが前記フィルムを貫通して他の層に接続するようにした回路基板の製造法において、
前記前処理が、前記フィルム表面に機械的加工によって傷を付け、
前記バンプを前記フィルムに当接させて押圧することにより、前記フィルムに亀裂進展をもたらす形状の亀裂生起部分を形成する
ことを特徴とする回路基板の製造法、
請求項2記載の、
回路基板に設けられた層間接続用バンプ上に絶縁性樹脂製のフィルムを重ねて、前記バンプを前記フィルムに当接、押圧することにより、前記バンプが前記フィルムを貫通して他の層に接続するようにした回路基板の製造法において、
前記絶縁性樹脂と化学的に結合せず層間剥離を生じるフィラーを添加してなるフィラー添加フィルムを用意し、
前記フィルムに替えて、前記フィラー添加フィルムを用いて
前記バンプを前記フィラー添加フィルムに当接させて押圧することにより、前記フィラー添加フィルムに亀裂進展をもたらす形状の亀裂生起部分を形成する
ことを特徴とする回路基板の製造法、
および請求項3記載の、
多層回路基板を形成するために、回路基板に形成された層間接続用バンプが貫通する絶縁性樹脂フィルムであって、
絶縁性樹脂と化学的に結合せず層間剥離を生じるフィラーを添加してなる絶縁性樹脂フィルム、
を提供する。
In order to achieve the above object, in the present invention,
Claim 1
A film made of an insulating resin is layered on an interlayer connection bump provided on a circuit board, and the bump touches the film and presses it, so that the bump penetrates the film and connects to another layer. In the method of manufacturing a circuit board,
The pretreatment scratches the film surface by mechanical processing;
A method of manufacturing a circuit board, characterized by forming a crack occurrence portion having a shape that causes crack growth in the film by pressing the bump against the film;
Claim 2
A film made of an insulating resin is layered on an interlayer connection bump provided on a circuit board, and the bump touches the film and presses it, so that the bump penetrates the film and connects to another layer. In the method of manufacturing a circuit board,
Prepare a filler-added film by adding a filler that does not chemically bond with the insulating resin and causes delamination,
Instead of the film, using the filler-added film
A method of manufacturing a circuit board, characterized by forming a crack occurrence portion having a shape that causes crack growth in the filler-added film by pressing the bump against the filler-added film ;
And claim 3,
In order to form a multilayer circuit board, an insulating resin film through which an interlayer connection bump formed on the circuit board passes,
An insulating resin film formed by adding a filler that does not chemically bond to the insulating resin and causes delamination;
I will provide a.

本発明は上述のように、樹脂フィルムに亀裂を生じさせ易い形状とした縁部をもつバンプを用いてプレスすることにより、バンプが樹脂フィルムを貫通して層間接合を行う回路基板の製造における際の貫通性を、格段に向上させることができる。   The present invention, as described above, is used in the manufacture of a circuit board in which bumps penetrate through a resin film and perform interlayer bonding by pressing using bumps having edges that are shaped to easily cause cracks in the resin film. The penetrability can be significantly improved.

本発明では、バンプが如何に樹脂フィルムを貫通し易くするかが重要であり、貫通するためにはバンプを当接することにより樹脂フィルムに亀裂を生じさせ、それを進展させることである。そのための実施の形態を、工程の進行順序に従って図1ないし図4により説明する。   In the present invention, it is important how the bumps easily penetrate the resin film. In order to penetrate, the resin film is caused to crack by abutting the bumps, and the crack is developed. An embodiment for this will be described with reference to FIGS.

これら図1ないし図4においては、基板1上に導体層2が配され、導体層2上には層間接合バンプ3が設けられている。この層間接合バンプ3の上に絶縁性樹脂フィルム4およびクッション材5が重ねられて、基板1ないしクッション材5をプレス鏡板6a,6bにより挟んでプレスする。   1 to 4, a conductor layer 2 is disposed on a substrate 1, and an interlayer bonding bump 3 is provided on the conductor layer 2. The insulating resin film 4 and the cushion material 5 are overlaid on the interlayer bonding bumps 3, and the substrate 1 or the cushion material 5 is sandwiched and pressed between the press end plates 6a and 6b.

図1は、プレス直前の状態を示しており、バンプ3が樹脂フィルム4のみを貫通するように、間にクッション材5を入れた上で、鏡板6a,6bで挟み込んだ状態である。   FIG. 1 shows a state immediately before pressing, in which a cushion material 5 is inserted between the bumps 3 so as to penetrate only the resin film 4 and sandwiched between end plates 6a and 6b.

図2は、図1の次の状態を示しており、プレスにより樹脂フィルム4における、バンプ3の頂面が当接した部分が図示上方に向かって湾曲変形し、バンプ3の頂部の縁における樹脂フィルム4の表面に応力集中部Aが発生している。   FIG. 2 shows the next state of FIG. 1, where the portion of the resin film 4 where the top surface of the bump 3 abuts is curved and deformed upward in the drawing, and the resin at the top edge of the bump 3 is pressed. A stress concentration portion A is generated on the surface of the film 4.

図3は、この応力集中により、樹脂フィルム4の表面に亀裂が発生した状態を示している。   FIG. 3 shows a state in which cracks are generated on the surface of the resin film 4 due to the stress concentration.

一般に、樹脂フィルム4は、コーターで処理されるため、その表面は平坦である。ただし、破壊力学でよく知られているように、応力集中部Aに亀裂があるとき、その部分での応力拡大係数がある値以上であれば、亀裂の進展が破壊的に進行する。応力拡大係数は、亀裂の形状に大きく依存し、亀裂端部が鋭角であるほどその値は大きくなる。   In general, since the resin film 4 is processed by a coater, the surface thereof is flat. However, as is well known in fracture mechanics, when a stress concentration portion A has a crack, if the stress intensity factor at that portion is greater than a certain value, the crack progresses destructively. The stress intensity factor greatly depends on the shape of the crack, and the value of the stress intensity factor increases as the crack edge becomes acute.

したがって、図3のように、この樹脂表面を予め鋭角な亀裂端部を形成するような表面形状にしておけば、バンプ3の樹脂貫通性を著しく向上させることができる。   Therefore, as shown in FIG. 3, if the surface of the resin is formed in advance so as to form an acute crack end, the resin penetration of the bump 3 can be remarkably improved.

この表面形状は、とくにバンプ3と直接接触する面を含んでいれば、樹脂表面の全面にあっても構わない。そのため、前処理としての樹脂表面形状の変更工程は位置精度に捕われず、面単位の加工を施すだけでよい。   This surface shape may be on the entire surface of the resin as long as it includes a surface that directly contacts the bump 3. Therefore, the resin surface shape changing step as the pretreatment is not caught by the position accuracy, and it is only necessary to process the surface unit.

図4は、亀裂を発生し易くするためのバンプ3の頂面構造を示したものである。この図4に示すように、バンプ頂部の縁を鋭角に仕上げておけば、そこが亀裂進展の起点となり、やはり貫通性を向上させることができる。   FIG. 4 shows the top structure of the bump 3 for facilitating the generation of cracks. As shown in FIG. 4, if the edge of the bump top is finished at an acute angle, this becomes the starting point of crack propagation, and the penetrability can also be improved.

別の方法として、樹脂フィルム4に、鋭利な角を持ち樹脂フィルム4と化学的に結合しないフィラーを添加し、図2の応力集中部Aでのフィラーと樹脂フィルム4との界面剥離を起点として、亀裂を生ぜしめ破断部Bを形成させることにより、貫通性を向上させることができる。   As another method, a filler that has a sharp corner and is not chemically bonded to the resin film 4 is added to the resin film 4, and the interface peeling between the filler and the resin film 4 at the stress concentration portion A in FIG. The penetration can be improved by forming cracks by forming cracks B.

なお、樹脂フィルム4に熱可塑性の樹脂を用いることにより、貫通後、バンプの密集配置により亀裂が伝播するような場合でも、対向する導体層との樹脂のTg以上の温度での熱圧着により、予め付けられていた傷などは樹脂自身の流動により埋め込まれ、絶縁層としての樹脂に瑕疵は生じない。   In addition, by using a thermoplastic resin for the resin film 4, even when cracks propagate due to the dense arrangement of bumps after penetration, by thermocompression bonding at a temperature equal to or higher than the Tg of the resin with the opposing conductor layer, The scratches or the like attached in advance are embedded by the flow of the resin itself, and no wrinkles are generated in the resin as the insulating layer.

(樹脂フィルムに亀裂を発生させ易くするための前処理例)
亀裂が発生し易くするためには、樹脂フィルム4の表面に予め鋭利な端面を持つ表面形状を形成することが効果的であり、その例として、
(1) 研磨剤、研磨紙などで機械的に傷を付ける、
(2) 鋭利な刃物によってフィルム4を破断しない程度の深さまで切り込みを入れる、
(3) グラビア加工などを施しかつ加熱加圧したロールなどで、樹脂フィルム4をロールプレスすることで表面にロールの凹凸を転写させ、鋭利な端面を持つ表面状態を形成する、
等が挙げられる。
(Example of pretreatment to facilitate cracking of resin film)
In order to facilitate the generation of cracks, it is effective to form a surface shape having a sharp end face on the surface of the resin film 4 in advance.
(1) Mechanically scratch with abrasives, abrasive paper, etc.
(2) Make a cut with a sharp blade to a depth that will not break the film 4.
(3) Roll presses the resin film 4 with a roll that has been subjected to gravure processing, etc., and heated and pressed to transfer the unevenness of the roll to the surface, forming a surface state with a sharp end face.
Etc.

そして、バンプ3の頂部の縁を鋭角にするには、
(1) ポンチなどにより刻印を施す、
(2) エッチングなどにより粗化処理を行う、
(3) 電気メッキにより端部への電着集中現象を利用して縁に局所的にメッキを成長させ、鋭角な縁を形成する。更に貫通性を増大するために、Niメッキなどを利用して端部の機械的強度を増す、
等が挙げられる。
And to make the top edge of the bump 3 an acute angle,
(1) Mark with a punch, etc.
(2) Roughening by etching, etc.
(3) Electroplating is used to grow plating locally on the edges using the phenomenon of electrodeposition concentration on the edges to form sharp edges. In order to further increase the penetrability, Ni plating is used to increase the mechanical strength of the end,
Etc.

樹脂に破断の起点となる層間剥離を生じさせるフィラーとしては、
(1) タルク、アルミナなどの無機化合物、
(2) PTFEなどの離形性に優れた有機化合物、
(3) フィラー形状としては、板状、糸状、針状であることが望ましく、その大きさは数μm以下であることが望ましい、
等が挙げられる。
As a filler that causes delamination as a starting point of rupture in resin,
(1) Inorganic compounds such as talc and alumina,
(2) Organic compounds with excellent releasability such as PTFE,
(3) The filler shape is preferably plate-like, thread-like, or needle-like, and its size is preferably several μm or less.
Etc.

(実施例)
以下に示す材料(i)ないし(iii)を用意し、室温にて貫通プレスを行い、本発明の効果を確認した。
(i) 被貫通材としての絶縁性樹脂:
カプトン50H(商品名;樹脂厚み12.5μm)
(ii) 貫通材としてのバンプ:
φ100μm、高さ100μmの無酸素銅で形成されたバンプ
(iii) クッション材:
厚さ2mmのシリコンゴムマット
貫通条件:30mm角の試料を5tプレスにて加圧
絶縁性樹脂を購入状態のままプレスを行った場合の貫通率は、5%であった。
(Example)
The following materials (i) to (iii) were prepared, and through-pressing was performed at room temperature to confirm the effect of the present invention.
(i) Insulating resin as the material to be penetrated:
Kapton 50H (trade name; resin thickness 12.5μm)
(ii) Bump as penetrating material:
Bumps made of oxygen-free copper with φ100μm and height of 100μm
(iii) Cushion material:
Silicon rubber mat having a thickness of 2 mm Penetration conditions: 30 mm square sample was pressed with a 5-t press. Penetration rate was 5% when the insulating resin was pressed while purchased.

これに対し、購入状態の絶縁性樹脂表面を1200番の紙やすりによって、樹脂フィルム4の表面を5〜6回、軽く触れる程度に縦横にこすり、樹脂フィルム4の表面に薄く傷が付く程度に傷を付けた。   On the other hand, the surface of the insulating resin in the purchased state is rubbed vertically and horizontally to the extent that the surface of the resin film 4 is lightly touched 5 to 6 times with a # 1200 sandpaper so that the surface of the resin film 4 is thinly scratched. I scratched it.

この樹脂フィルム4を用いて、同じプレス条件にて貫通プレスを行った場合の貫通率は、45%であった。このように、表面に傷を付けた樹脂フィルム4を用いてバンプ3の貫通テストを行った結果、貫通率が格段に向上した。   When this resin film 4 was used for penetration pressing under the same pressing conditions, the penetration rate was 45%. Thus, as a result of conducting the penetration test of the bump 3 using the resin film 4 having a scratched surface, the penetration rate was remarkably improved.

そして、貫通性を向上させるために行われる技術は、比較的実施が容易であり、工業的に実現し易く、また、その効果も大きい。   And the technique performed in order to improve penetrability is comparatively easy to implement, it is easy to implement industrially, and the effect is also great.

また、樹脂に熱可塑性樹脂を用いた場合には、フィルムに傷を付けた場合でも、Tg以上での熱圧着により自己溶着して傷が消滅するから、完成した回路基板の絶縁層として欠陥の原因とはならない。   In addition, when a thermoplastic resin is used as the resin, even if the film is scratched, the scratch disappears by self-bonding by thermocompression bonding at Tg or higher, so that the insulating layer of the completed circuit board has a defect. It does not cause.

貫通プレス開始時点の模式図。The schematic diagram at the time of a penetration press start time. 貫通プレス中の模式図。Schematic diagram during penetration press. フィルム表面に傷をつけた場合の貫通の様子を示す図。The figure which shows the mode of penetration at the time of scratching the film surface. バンプ頂部の縁に鋭角な部分を形成した場合の貫通の様子を示す図。The figure which shows the mode of penetration at the time of forming an acute angle part in the edge of a bump top part.

符号の説明Explanation of symbols

1 基板
2 導体層
3 層間接合バンプ
4 絶縁性樹脂フィルム
5 クッション材
6 プレス鏡板
A 応力集中部
B 破断個所
DESCRIPTION OF SYMBOLS 1 Board | substrate 2 Conductor layer 3 Interlaminar bonding bump 4 Insulating resin film 5 Cushion material 6 Press end plate A Stress concentration part B Breaking part

Claims (3)

回路基板に設けられた層間接続用バンプ上に絶縁性樹脂製のフィルムを重ねて、前記バンプを前記フィルムに当接、押圧することにより、前記バンプが前記フィルムを貫通して他の層に接続するようにした回路基板の製造法において、
前記前処理が、前記フィルム表面に機械的加工によって傷を付け、
前記バンプを前記フィルムに当接させて押圧することにより、前記フィルムに亀裂進展をもたらす形状の亀裂生起部分を形成する
ことを特徴とする回路基板の製造法。
A film made of an insulating resin is layered on an interlayer connection bump provided on a circuit board, and the bump touches the film and presses it, so that the bump penetrates the film and connects to another layer. In the method of manufacturing a circuit board,
The pretreatment scratches the film surface by mechanical processing;
A method of manufacturing a circuit board, comprising forming a crack occurrence portion having a shape that causes crack growth in the film by pressing the bump against the film .
回路基板に設けられた層間接続用バンプ上に絶縁性樹脂製のフィルムを重ねて、前記バンプを前記フィルムに当接、押圧することにより、前記バンプが前記フィルムを貫通して他の層に接続するようにした回路基板の製造法において、
前記絶縁性樹脂と化学的に結合せず層間剥離を生じるフィラーを添加してなるフィラー添加フィルムを用意し、
前記フィルムに替えて、前記フィラー添加フィルムを用いて
前記バンプを前記フィラー添加フィルムに当接させて押圧することにより、前記フィラー添加フィルムに亀裂進展をもたらす形状の亀裂生起部分を形成する
ことを特徴とする回路基板の製造法。
A film made of an insulating resin is layered on an interlayer connection bump provided on a circuit board, and the bump touches the film and presses it, so that the bump penetrates the film and connects to another layer. In the method of manufacturing a circuit board,
Prepare a filler-added film by adding a filler that does not chemically bond with the insulating resin and causes delamination,
Instead of the film, using the filler-added film
A method of manufacturing a circuit board, comprising forming a crack occurrence portion having a shape that causes crack propagation in the filler-added film by pressing the bump against the filler-added film .
多層回路基板を形成するために、回路基板に形成された層間接続用バンプが貫通する絶縁性樹脂フィルムであって、
絶縁性樹脂と化学的に結合せず層間剥離を生じるフィラーを添加してなる絶縁性樹脂フィルム。
In order to form a multilayer circuit board, an insulating resin film through which an interlayer connection bump formed on the circuit board passes,
An insulating resin film obtained by adding a filler that does not chemically bond to an insulating resin and causes delamination.
JP2003287431A 2003-08-06 2003-08-06 Multilayer circuit board manufacturing method and circuit board material Expired - Fee Related JP4312545B2 (en)

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JP4312545B2 true JP4312545B2 (en) 2009-08-12

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