JP4311656B2 - Heater sealing terminal structure and heater using the same - Google Patents

Description

  The present invention relates to a heater sealing terminal structure and a heater using the same, and more particularly to a heater in which a heating element is housed in a silica glass member and the sealing terminal structure thereof.

The inventors of the present application have already proposed a heater in which a heating element is enclosed in a glass tube in Patent Document 1 (JP 2000-228271 A) and Patent Document 2 (JP 2000-21890 A).
First, the outline of the heater described in Patent Document 1 will be described with reference to FIGS. 8 is a side view of the heater, and FIG. 9 is a perspective view of the sealing terminal portion (sealing terminal structure) used in FIG.

The heater 21 shown in FIG. 8 includes a carbon wire heating element 22, a U-shaped small-diameter silica glass tube 23 containing both ends of the carbon wire heating element 22, and the small-diameter silica glass. A wire carbon material A compressed and housed in both ends 23a and 23b of the tube 23, and a large-diameter silica glass tube 24 which houses the small-diameter silica glass tube 23 and is closed at one end and opened at the other end. The sealing terminal portion 30 includes connecting wires 32 a and 32 b connected to the carbon wire heating element 22 attached to the open end of the large-diameter silica glass tube 24.
The small-diameter silica glass tube 23 is fixed to the inside of the large-diameter silica glass tube 24 via a fixing portion 25 at the top.

Further, the structure of the sealing terminal portion 30 will be described with reference to FIG. 9. The glass tube 31 constituting the sealing terminal portion 30 is integrated with the large-diameter silica glass tube 24 by fusion or welding. The glass tube 31 to be converted is composed of a silica glass portion 31a, a graded seal portion 31b, and a tungsten (W) glass portion 31c from the side fused to the large-diameter silica glass tube 24.
The connection wires 32a and 32b made of tungsten (W) connected to the wire carbon material compressed and accommodated in the small-diameter silica glass tube 23 are pinched with the pinch seal portion 31d of the tungsten (W) glass portion 31c. Is done.

That is, the pinch seal portion 31d is formed of tungsten (W) glass having a thermal expansion coefficient close to that of tungsten (W) constituting the connection line, and the fused side with the large-diameter silica glass tube 24 is formed of silica glass. ing.
In this way, the pinch seal portion 31d is formed of tungsten (W) glass having a thermal expansion coefficient close to that of tungsten (W) constituting the connection line, so that the glass portion accompanying the thermal expansion at high temperature of the connection lines 32a and 32b. Damage to the (pinch seal portion 31d) is prevented.

Next, an outline of the heater described in Patent Document 2 will be described with reference to FIG. FIG. 10 is a schematic side view of the heater.
In FIG. 10, the heater 40 has a semi-doughnut-shaped silica glass container 41, and a silica glass tube 42 is vertically connected to the lower part thereof. The silica glass container 41 includes a container body and a lid member, and a groove 44 for arranging the carbon wire heating element 43 is formed in the container body. At both ends of the groove 44, terminal recesses 45 for arranging the terminal device are provided.

  And in the said terminal recess 45 and the silica glass tube 42, the 1st terminal device 47 for connecting the carbon wire heat generating body 43 and the several wire-like carbon terminal wire 46, several wire-like carbon terminal wire 46 and a second terminal device 49 for connecting a metal terminal line (internal connection line) 48, a metal terminal line 48 inside the silica glass tube 42, and a metal terminal line (external connection line) 50 on the power source side. A third terminal device 51 for connecting the two is provided.

The third terminal device 51 is for connecting the internal connection line 48 disposed inside the silica glass tube 42 and the external connection line 50 on the power source side. The inner connection line 48 is a molybdenum rod, and one end of the molybdenum rod is connected to the second terminal device 49 and the other end is connected to the molybdenum foil 52. Therefore, the molybdenum rod (internal connection line 48) is indirectly connected to the carbon wire heating element 43.
A silica glass cap 53 is connected to the lower end portion of the silica glass tube 42, and the molybdenum rod (inner connection line 48) is drawn through the cap 53. From the bottom side of the molybdenum foil 52, two external connection lines 50 are drawn to the outside.

  And the pinch seal part 53a is formed so that the whole molybdenum foil 52 may be wrapped. The pinch seal portion 53a blocks the molybdenum foil 52 from the inside of the silica glass tube 42 and the atmosphere. The pinch seal portion 53a is formed by heat-softening and pinching (pinching) the tip portion of the silica cap 53 for sealing.

  In this way, the inner connection line (molybdenum bar) 48 and the power supply side outer connection line 50 are connected via the molybdenum foil 52, and the tip of the silica cap 53 is heated by the molybdenum foil 52. By softening and pinching, the difference in thermal expansion between the metal and the glass is absorbed, and damage to the cap 53 (pinch seal portion 53a) is prevented.

JP 2000-228271 A JP 2000-21890 A

By the way, in the sealing terminal structure shown by patent document 1, the glass tube 31 which comprises the sealing terminal part 30 is the silica glass part 31a, the graded (Graded) seal | sticker part 31b, tungsten (W) glass. The unit 31c is configured.
Therefore, in order to absorb and relieve distortion due to the difference in thermal expansion coefficient between the silica glass portion 31a and the tungsten (W) glass portion 31c, the thickness of the glass tube 31 must be formed thinner.

  However, reducing the thickness of the glass tube 31 has a technical problem in that, on the one hand, the mechanical strength is weak against external force, the glass tube 31 is easily damaged, and care must be taken for its handling. Further, the manufacturing of the glass tube 31 requires skill, and there is a technical problem that it is not particularly suitable for mass production of low-cost products. In particular, it was not suitable for mass production by automation.

In the sealing terminal structure disclosed in Patent Document 2, the tip of the silica cap 53 is heated and softened, and the molybdenum foil 52 is pinched (pinched) and sealed. .
However, since the molybdenum foil 52 and the silica glass (cap 53) are directly sealed, the difference in thermal expansion that can be absorbed is small, and therefore there is a technical problem that the allowable temperature range is small. In addition, since the inner connection line and the outer connection line are connected via a foil (molybdenum foil), the current allowed for the terminal must be reduced, and there is a technical problem that the heater power is limited. It was.

The inventors of the present invention have been made to solve these problems, have higher mechanical strength, are easy to handle, are easy to manufacture, have a wide allowable temperature range, and have a high allowable current. We have conducted extensive research on the large heater sealing terminal structure.
In this research, in order to increase the allowable temperature range and increase the allowable current, not the method of directly sealing the molybdenum foil and the silica glass (cap) as shown in Patent Document 2, but as shown in Patent Document 1. A method for directly sealing a connecting wire and a glass member (glass tube) has been studied, and a new sealed terminal structure that has not existed before has been invented.

  The present invention has been made in order to solve the above-described technical problems, has higher mechanical strength, is convenient to handle, can easily form a sealing terminal portion, and is allowed. It is an object of the present invention to provide a sealed terminal structure capable of increasing the temperature range and increasing the allowable current, and a heater using the same.

The sealing terminal structure of the heater according to the present invention made to solve the above technical problem is a heater sealing terminal structure in which a heating element is housed in a silica glass member, and supplies power to the heating element. A connection line, a thermal expansion inclined portion having a coefficient of thermal expansion that changes in the radial direction of the connection line, formed by laminating a plurality of glasses having different thermal expansion coefficients on the outer peripheral surface of the connection line, and the silica glass member A sealing member made of silica glass that fuses one end and fuses the other end to the outer peripheral surface of the thermal expansion inclined portion, and the thickness of the thermal expansion inclined portion is the axis of the connection line The connecting wire is attached to the silica glass member via a thermal expansion inclined portion and a sealing member .

In this way, a plurality of glasses having different thermal expansion coefficients are laminated and formed on the outer peripheral surface of the connection line, and provided with a thermal expansion inclined portion whose coefficient of thermal expansion changes in the radial direction of the connection line, Since it is attached to the glass member via a thermal expansion inclined portion, it is necessary to use a glass tube having a silica glass portion, a graded seal portion, and a tungsten (W) glass portion in the length direction as in the conventional case. The heater can be easily manufactured and mass-produced.
Moreover, since a plurality of glasses having different thermal expansion coefficients are laminated and formed on the outer peripheral surface of the connection line, the silica glass part, graded seal part, tungsten (W) in the axial direction of the connection line as in the past. Compared to the sealed terminal portion provided with the glass portion, the mechanical strength is increased and the handling is convenient. Since a foil (molybdenum foil) is not used as in the prior art, the allowable temperature range can be increased and the allowable current can be increased.

  Here, the sealing glass is provided with a sealing member made of silica glass that has one end fused to the silica glass member and the other end fused to the outer peripheral surface of the thermal expansion inclined portion. It is desirable to be attached to the silica glass member via a part and a sealing member.

  In addition, it is desirable that the thickness of the thermal expansion inclined portion changes corresponding to the thickness of the sealing member in the axial direction of the connection line. Thus, in the axial direction of the connecting line, the thickness of the thermal expansion inclined portion changes corresponding to the thickness of the sealing member, so that distortion due to thermal expansion can be further alleviated.

In addition, when the thickness of the thermal expansion inclined portion is less than 0.2 times the thickness of the sealing member and more than 1 time, the strain due to thermal expansion cannot be absorbed and may be damaged. It is not preferable.
Therefore, it is desirable that the thickness of the thermal expansion inclined portion is 0.2 to 1 times the thickness of the sealing member.

Further, the connection line is made of tungsten, and the thermal expansion inclined portion has a tungsten glass layer formed on the outer peripheral surface of the connection line, and a thermal expansion coefficient of 8 to 20 laminated on the tungsten glass layer. It is desirable to consist of a glass layer that is × 10 ⁻⁷ / ° C. (0 to 300 ° C.).
Furthermore, it is desirable that the heating element is a carbon wire heating element.

  The heater according to the present invention made to solve the above technical problem is a heater using the sealing terminal structure, wherein the heating element is a carbon wire heating element, and the carbon wire heating element is in a silica glass member. And a connecting wire for supplying electric power to the carbon wire heating element, wherein the end portion of the carbon wire heating element is held by a wire carbon member filled in the silica glass tube part. It is characterized by being held by a member.

  As described above, according to the present invention, the mechanical strength is stronger, the handling is convenient, the sealing terminal portion can be easily formed, the allowable temperature range is increased, and the allowable current is increased. A sealed terminal structure that can be enlarged and a heater using the same can be obtained.

  Below, 1st embodiment concerning this invention is described based on FIG. 1 thru | or FIG. Here, FIG. 1 is a cross-sectional view showing an embodiment of a heater having connecting wires at both ends according to the present invention, FIG. 2 is an enlarged cross-sectional view showing the sealing terminal structure of FIG. 1, and FIG. 4 is a plan view showing a carbon wire, FIG. 5 is a cross-sectional view showing a connection state between a carbon wire heating element and a connection line, and FIG. 6 is a cross-sectional view of FIG. . 2 and 3, since the left and right end portions of the heater have the same shape, only one end portion is illustrated, and the description of one end portion is used as the description of both end portions.

  A heater 1 shown in FIG. 1 includes a carbon wire heating element 2, a large-diameter silica glass tube 3 that accommodates the carbon wire heating element 2 and open at both ends, and the large-diameter silica glass tube 3. Small-diameter silica glass tubes 4a and 4b housed in both ends 3a and 3b of the glass, wire carbon material A compressed and housed inside the small-diameter silica glass tubes 4a and 4b, and the large-diameter silica glass tube 3 The sealing terminal portions 10a and 10b are sealed and closed.

  The sealing terminal portions 10a and 10b include connecting wires 6a and 6b for supplying power to the carbon wire heating element 2, thermal expansion inclined portions 7a and 7b formed on the outer peripheral surfaces of the connecting wires 6a and 6b, One end portion is fused to both end portions 3a and 3b of the silica glass tube 3 having a diameter, and the other end portion is fused to the outer peripheral surface of the thermal expansion inclined portions 7a and 7b formed on the outer periphery of the connecting wires 6a and 6b. Sealing members 5a and 5b made of cylindrical silica glass to be worn are provided.

The connecting wires 6a and 6b are made of Mo (molybdenum) or W (tungsten) rods and have a diameter of 1 mm to 3 mm. The diameters of the connecting wires 6a and 6b can be appropriately selected according to need. However, if the diameter is too small, there is a tendency to have a large electric resistance, and if the diameter is too large, the terminal itself. Tend to be larger.
The connecting wires 6a and 6b are pointed at their tips so that they can be easily connected to the wire carbon material A compressed and accommodated in the small diameter silica glass tubes 4a and 4b.

Further, as shown in FIGS. 2 and 3, a tungsten glass layer 7a1 is formed on the outer peripheral surfaces of the connecting wires 6a and 6b. Further, for example, a thermal expansion coefficient is 8 × 10 ⁻⁷ on the tungsten glass layer 7a1. A 96% silicate glass layer 7a2 of / ° C. (0 to 300 ° C.) is laminated and formed. That is, the thermal expansion inclined portions 7a and 7b are formed so that the thermal expansion coefficient decreases in the radial direction of the connecting lines 6a and 6b.
As shown in FIG. 3, the sealing member 5a is a cylindrical body in which a small diameter portion 5a1, a large diameter portion 5a3, and a rising portion 5a2 connecting the small diameter portion 5a1 and the large diameter portion 5a3 are formed. It is.
And the inner peripheral surface of the said small diameter part 5a1 is melt | fused by the outer peripheral surface of the said 96% silicate glass layer 7a2, and the end surface of the large diameter part 5a3 is on the end surface of the both ends 3a of the said large diameter silica glass tube 3. Fused.

Furthermore, the entire thickness t3 of the thermal expansion inclined portion 7a (tungsten glass layer 7a1 and the 96% silicate glass layer 7a2 (more specifically, Vycor (registered trademark) manufactured by Corning)) is smaller than the small diameter portion 5a1. The thickness t1 (wall thickness) is 0.2 to 1 times.
When the thickness t3 of the thermal expansion inclined portion 7a is less than 0.2 times the thickness t1 of the sealing member 5a (small diameter portion 5a1) and exceeds 1 time, strain due to thermal expansion cannot be absorbed. This is not desirable because it may be damaged.

The sealing terminal portions 10a and 10b are manufactured as follows.
First, the outer peripheral surfaces forming the thermal expansion inclined portions 7a and 7b of the molybdenum connecting wires 6a and 6b are oxidized. In this oxidation treatment, the connecting wires 6a and 6b are heated with an oxyhydrogen burner, and solid sodium nitrite is brought into contact with and adhered to only the outer peripheral surfaces of the connecting wires 6a and 6b. Further, the outer peripheral surfaces of the connecting wires 6a and 6b are heated by a burner to promote oxidation of the outer peripheral surface. Thus, a thick oxide layer is formed on the outer peripheral surfaces of the connection lines 6a and 6b.

  Subsequently, cylindrical molybdenum glass is prepared, and the inner diameter thereof is processed to be slightly larger than the outer diameter of the connecting wires 6a and 6b, and is cut into a predetermined length. Then, the cut cylindrical molybdenum glass is attached to the outer peripheral surface on which the oxide film of the connection lines 6a and 6b is formed, so that the thickness of the molybdenum glass layers 7a1 and 7b1 is about 0.5 mm. Bake.

  Further, the cylindrical 96% silicate glass is prepared, and the inner diameter thereof is processed so as to be slightly larger than the outer diameter of the molybdenum glass layers 7a1 and 7b1, and cut into a predetermined length. Then, the cut cylindrical 96% silicate glass is attached to the outer peripheral surfaces of the molybdenum glass layers 7a1 and 7b1, and the thickness of the 96% silicate glass layers 7a2 and 7b2 is about 0.5 mm. Bake.

  Subsequently, the sealing terminal portions 10a and 10b are completed by fusing the inner peripheral surfaces of the small diameter portions of the sealing members 5a and 5b to the outer peripheral surfaces of the 96% silicate glass layers 7a2 and 7b2. At this time, the thickness of the small-diameter portion is about 1.5 to 3.0 mm.

  Further, as the carbon wire heating element 2, for example, a wire knitted into a wire shape by using a plurality of fiber bundles in which a plurality of carbon fibers are bundled as shown in FIG. 4 is used. The carbon wire heating element 2 is embedded in a compressed state between a plurality of wire carbon materials A compressed and accommodated in small-diameter silica glass tubes 4a and 4b as shown in FIGS.

Specific examples of the carbon wire heating element 2 include a carbon fiber having a diameter of 5 to 15 μm, for example, a fiber bundle in which about 1000 to 3000 carbon fibers having a diameter of 7 μm are bundled, and about 10 to 2. A carbon wire such as a 5 mm braid or a braided braid is used.
In the above case, the wire braiding span is about 2 to 5 mm, and the surface fluff due to the carbon fiber is about 0.5 to 1.5 mm. In addition, the said fluff is what a part of what the carbon fiber was cut | disconnected as shown to the code | symbol a of FIG. 3 protruded from the outer peripheral surface of the carbon wire.

The wire carbon material A is the same as the carbon wire heating element 2 or the same constituent material is used in that the wire carbon material A is in the form of a braid or braid formed by knitting a plurality of fiber bundles in which at least carbon fibers are bundled.
In addition, the same constituent material means that the carbon fiber diameter, the number of bundled carbon fibers, the number of bundles of bundled fiber bundles, the knitting method, the knitted span length, the fluff length, and the material are the same. .

  Moreover, the number of the wire carbon materials A accommodated in the small diameter silica glass tubes 4 a and 4 b is preferably accommodated more than the number of the carbon wire heating elements 2. More preferably, the number of the carbon wire heating elements 2 that is five times or more the number of the carbon wire heating elements 2 is accommodated as the wire carbon material A. More specifically, for example, when the number of the carbon wire heating elements 2 is one, the number of the wire carbon materials A is 14, or when the number of the carbon wire heating elements 2 is two, the number of the wire carbon materials A is 12, such as five times or more. The number is preferably used as the wire carbon material A.

As described above, the carbon wire heating element 2 and the wire carbon material A exemplified as a braided or braided shape having a diameter of about 2 mm using about 9 bundles of about 1000 to 3000 carbon fibers having a diameter of 7 μm. The electric resistance of the carbon wire, such as woven into the wire, is about 10 to 30 Ω / 1 m · 1 at room temperature and 5 to 15 Ω / 1 m · 1 at 1000 ° C.
The electric resistance when the five carbon wires are bundled is about 2 to 6 Ω / 1 m · 1 at room temperature and 1 to 3 Ω / 1 m · 1 at 1000 ° C.

Accordingly, when the carbon carbon material A is compressed and accommodated as five carbon wires in the small-diameter silica glass tubes 4a and 4b, as described above, approximately 2 to 6Ω / 1 m · 1 at 1000 ° C. at room temperature. 1 to 3Ω / 1 m · 1 and the electrical resistance is reduced to 1/5 (1 / number).
As a result, the heat generated by the wire carbon material A can be extremely reduced compared to the heat generated by the carbon wire heating element 2.

  In addition, since the wire carbon material A is interposed between the carbon wire heating element 2 and connection wires 6a and 6b described later, heat of the carbon wire heating element 2 is prevented from being transmitted to the connection wires 6a and 6b as much as possible. And the high temperature deterioration of the sealing terminal portions 10a and 10b can be prevented. That is, the wire carbon material A functions as a heat insulating material and can prevent high temperature deterioration of the sealing terminal portions 10a and 10b.

  Here, the length of the wire carbon material A is set to 40 mm or more, more preferably 45 mm or more. Generally, when the heater temperature is 1200 ° C. and the length of the wire carbon material A is 35 mm, the temperature of the sealing terminal portions 10a and 10b is about 250 ° C. When the temperature of the sealing terminal portions 10a and 10b exceeds 270 ° C., there is a possibility that the sealing terminal portions 10a and 10b may crack due to a difference in thermal expansion. It is necessary to set it to 40 mm or more, more preferably 45 mm or more.

  In addition, since the connecting wires 6a and 6b are accommodated in a pressure contact state between the wire carbon materials A, the carbon component of the wire carbon A has a reducing action, and suppresses an increase in oxidation of the connecting wires 6a and 6b. it can. As a result, it is possible to prevent the occurrence of sparks due to the oxidation of the connection lines 6a and 6b. In addition, since the carbon wire heating element 2 and the connecting wires 6a and 6b are attached to the portion where the wire carbon material A is compressed and stored, the connection is not loosened even if the carbon wire heating element 2 is heated to a high temperature. Good electrical connection is maintained.

In the embodiment, the case where two layers of the tungsten glass layer and the 96% silicate glass layer are formed as the thermal expansion inclined portions 7a and 7b is shown, but the present invention is limited to the case of two layers. Instead, it may be formed of two or more layers.
For example, as shown by reference numeral 8a in FIG. 7, a glass (preferably boron) is formed of a tungsten glass layer on the connection line side and a thermal expansion coefficient of 21 to 34 × 10 ⁻⁷ / ° C. (0 to 300 ° C.) on the intermediate layer. A glass layer having a thermal expansion coefficient of 8 to 20 × 10 ⁻⁷ / ° C. (0 to 300 ° C.) may be formed on the side of the sealing member.

  Further, the thickness of the thermal expansion inclined portion 8a does not have to be constant in the axial direction of the connection lines 6a and 6b, and may vary. For example, as shown in FIG. 7, since the rising portion 5a2 is thick, the thickness of the thermal expansion inclined portion 8a may be increased according to the thickness. As described above, by changing the thickness of the thermal expansion inclined portion 8a in accordance with the thickness of the sealing member 5a in the axial direction of the connection lines 6a and 6b, distortion due to thermal expansion can be further alleviated. it can.

Also in this case, the thickness t3 of the thermal expansion inclined portion 8a is formed to be 0.2 to 1 times the thickness t1 of the small diameter portion 5a1 of the sealing member 5a, and similarly, the thickness of the thermal expansion inclined portion 8a. The length t4 is desirably formed such that the rising of the sealing member 5a is 0.2 to 1 times the wall thickness t2 of the portion 5a2.
That is, in the axial direction of the connecting line 6a, the thickness of the thermal expansion inclined portion 8a changes corresponding to the change in the thickness of the sealing member 5a, and the thickness of the thermal expansion inclined portion 8a is the thickness of the sealing member. It is desirable that the thickness is 5 to 1 times the wall thickness of 5a.
In the drawing, the thickness of the thermal expansion inclined portion and the thickness of the small diameter portion of the sealing member are schematically shown, and are not necessarily the thicknesses (thicknesses) t1, t2, t3, and t4. It is not shown to satisfy the relationship.

Moreover, in the said embodiment, although demonstrated taking the case of the rod-shaped (tubular) heater as an example, it is applicable also to a flat heater.
Furthermore, in the said embodiment, although the thermal expansion inclination part was formed in the connection line and the case where a sealing member was attached to this thermal expansion inclination part was demonstrated, the silica by which the heat generating body is accommodated in the said thermal expansion inclination part A glass member may be attached.

  As described above, the heater according to the present invention can be applied to heaters used in all fields, particularly preferably to general industrial heaters.

FIG. 1 is a cross-sectional view showing an embodiment of a heater having connecting wires at both ends according to the present invention. FIG. 2 is an enlarged cross-sectional view showing the sealed terminal structure of FIG. FIG. 3 is a cross-sectional view showing the sealing terminal of FIG. FIG. 4 is a plan view showing the carbon wire. FIG. 5 is a cross-sectional view showing a connection state between the carbon wire heating element and the connection line. 6 is a cross-sectional view of FIG. It is sectional drawing which shows the modification of the sealing terminal of FIG. FIG. 8 is a side view showing a conventional heater. FIG. 9 is an enlarged perspective view of the sealing terminal portion of FIG. FIG. 10 is a side view showing another conventional sealed terminal structure.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Heater 2 Carbon wire heating element 3 Large diameter silica glass tube 3a End part of large diameter silica glass tube 3b End part of large diameter silica glass tube 4a, 4b Small diameter silica glass tube 5a, 5b Sealing member 5a1 Small diameter Part 5a2 Rising part 5a3 Large diameter part 6a, 6b Connection line 7a, 7b Thermal expansion inclined part 7a1 Tungsten glass layer 7a2 96% silicate glass layer 8a Thermal expansion inclined part 10a, 10b Sealing terminal part A Wire carbon material a Fluff

Claims (5)

In the sealing terminal structure of the heater in which the heating element is housed in the silica glass member,
A connection line for supplying power to the heating element;
A thermal expansion slope portion in which a thermal expansion coefficient changes in the radial direction of the connection line, formed by laminating a plurality of glasses having different thermal expansion coefficients on the outer peripheral surface of the connection line,
A sealing member made of silica glass, with one end fused to the silica glass member and the other end fused to the outer peripheral surface of the thermal expansion inclined portion;
The thickness of the thermal expansion inclined portion changes corresponding to the thickness of the sealing member in the axial direction of the connection line,
The connecting terminal is attached to the silica glass member via a thermal expansion inclined portion and a sealing member, and a sealing terminal structure for a heater. The thickness of the said thermal expansion inclination part is 0.2-1 times the thickness of a sealing member, The sealing terminal structure of the heater described in Claim 1 characterized by the above-mentioned. The connecting wire is made of tungsten;
And the said thermal expansion inclination part is a tungsten glass layer formed in the outer peripheral surface of the said connection line, and the thermal expansion coefficient laminated | stacked on the said tungsten glass layer is 8-20 * 10 < ^-7 > / degreeC (0-300). The heater sealing terminal structure according to claim 1, wherein the sealing terminal structure of the heater is a glass layer having a temperature of ° C. The heater sealing terminal structure according to any one of claims 1 to 3 , wherein the heating element is a carbon wire heating element. In the heater using the sealed terminal structure according to any one of claims 1 to 4 ,
The heating element is a carbon wire heating element,
While the carbon wire heating element is housed in a silica glass member, the end of the carbon wire heating element is held by a wire carbon member filled inside the silica glass tube part,
And the connecting wire which supplies electric power to a carbon wire heat generating body is hold | maintained at the said wire carbon member, The heater characterized by the above-mentioned.

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