JP4301413B2 - Image processing method and apparatus for liquid coating material, and liquid coating apparatus - Google Patents

Description

  The present invention relates to an image processing method and apparatus for a liquid application for measuring the amount of the liquid application when a liquid such as various resins is applied to the non-through opening, and a liquid provided with the image processing apparatus. The present invention relates to a coating apparatus.

Conventionally, in the case where a liquid is applied to a flat surface 80 such as a substrate as shown in FIG. 15A, the liquid application 81 is measured using an imaging device (camera) 82 in order to measure the amount of the liquid application 81. As shown in the monitor image of FIG. 15B, a method of measuring the diameter of the liquid application 81 in an image obtained by image processing of the image signal of the imaging device 82 has been adopted. The following Patent Documents 1 to 3 disclose such a method or apparatus.
Japanese Patent No. 3410214 JP-A-9-323057 JP 2005-40690 A

  In the prior arts disclosed in Patent Documents 1 to 3, the volume is calculated based on the diameter of the liquid coating material, which is a droplet. Therefore, although there are many errors, measurement can be performed during the continuous operation of the liquid coating device, and feedback control is possible. . However, there is a problem in that the amount of coating cannot be measured for liquid application to a non-penetrating opening, that is, a recess, because measurement by changing the outer diameter is impossible. In such an example, as shown in FIGS. 16A and 16B, a chip-type electronic component 95 mounted in a concave portion (cavity) 91 of a substrate (or electronic component) 90 is made of a resin 92 as a filler. The case where it seals etc. can be considered.

  Furthermore, when a transparent liquid is applied, it is difficult to stably obtain a difference in brightness from an object such as a substrate, and the liquid to be measured may be limited.

On the other hand, in the case where a liquid is applied to a flat surface of a substrate or the like in the form of dots, a method of actually measuring the weight (mass) of the discharged liquid is proposed in the following Patent Document 4 to measure the amount of the liquid application. It was.
JP 2004-209429 A

  In the prior art of Patent Document 4, since the weight of the liquid application is directly measured using the measurement-dedicated stage, the volume of the liquid application, which is a parameter to be managed, is accurately determined, but a measurement-dedicated stage is required. There's a problem.

  In the present invention, in view of the above points, when a liquid such as a resin is applied in a non-penetrating opening and the amount of application is measured, an image of a liquid application that can be measured easily and with high accuracy and is highly versatile. It is an object of the present invention to provide a processing method and apparatus.

  Furthermore, another object of the present invention is to provide a liquid coating apparatus that is capable of quantitatively coating a liquid into a non-penetrating opening by feedback control by including the image processing apparatus for the liquid coating.

  Other objects and novel features of the present invention will be clarified in embodiments described later.

To achieve the object, an image processing method for a liquid application consistent with the present invention, as well as there use the imaging means, provided at a position surrounding relation to light incident on the periphery or the image pickup means image pickup means as a lighting means A liquid application image processing method for measuring the amount of the liquid application in the non-through opening of the object using only the ring-shaped illumination,
The ring-shaped image of the ring- shaped illumination reflected on the surface of the liquid application object is imaged by the imaging means, and the liquid application in the non-penetrating opening is measured according to the size of the imaged ring-shaped image of the ring- shaped illumination. It is characterized by measuring the amount of objects.
In the image processing method of the liquid application product, the correlation between the size of the ring-shaped image of the ring-shaped illumination and the liquid level of the liquid application product in the non-through opening is assumed to be a substantially linear function. You may measure the quantity of the liquid coating material in a through-opening part.

An image processing apparatus for a liquid application according to the present invention includes an imaging unit, an illumination unit including only ring-shaped illumination provided in a positional relationship around the imaging unit or surrounding incident light to the imaging unit , and the imaging unit. An image processing operation unit for processing an image signal captured in step (a), and an image processing apparatus for a liquid application product for measuring the amount of the liquid application product in the non-through opening of the object,
The ring-shaped image of the ring- shaped illumination reflected by the surface of the liquid application is captured by the imaging unit, and the size of the captured ring-shaped image of the ring- shaped illumination is calculated by the image processing calculation unit. Thus, the amount of the liquid application in the non-penetrating opening is measured.
In the liquid application image processing apparatus, there is a correlation between the size of the ring-shaped image of the ring-shaped illumination calculated by the image processing calculation unit and the liquid level of the liquid application material in the non-penetrating opening. It is characterized by measuring the amount of the liquid coating material in the non-through opening, assuming that it is a substantially linear function.

A liquid application apparatus according to the present invention includes a dispenser for applying a liquid in a non-through opening of an object;
A dispense controller for controlling the liquid discharge amount of the dispenser;
An imaging unit; a ring-shaped illumination unit provided in a positional relationship around the imaging unit or surrounding incident light to the imaging unit; and an image processing calculation unit that processes an image signal captured by the imaging unit. Then, the image of the ring-shaped illumination reflected by the surface of the liquid application material in the non-penetrating opening is captured by the imaging unit, and the size of the captured image of the ring-shaped illumination is calculated by the image processing calculation unit A liquid application image processing apparatus for measuring the amount of the liquid application object in the non-through opening ,
A measured value of the amount of the liquid application is fed back to the dispense controller, and the amount of the liquid application is controlled within a desired range.

  In the liquid application apparatus, a next object in the application stage is measured by measuring the amount of the liquid application applied to the object in a stage different from the application stage for applying the liquid to the object by the dispenser. It is good also as a structure which feeds back a measured value for the liquid application to a thing.

  In the liquid application apparatus, an amount of liquid application applied to the object is measured at an application stage for applying liquid to the object by the dispenser, and liquid application to the object at the application stage is performed. Therefore, a configuration may be adopted in which the measurement value is fed back.

  The inventor illuminates with a ring-shaped illumination provided around the imaging means or in a positional relationship surrounding incident light to the imaging means, and images the liquid application in the non-penetrating opening of the object with the imaging means. Sometimes, there is a certain relationship between the diameter of the ring-shaped illumination image reflected on the surface of the liquid application and the height from the predetermined reference surface of the object to the surface of the liquid application. I found this experimentally. Therefore, according to the image processing method and apparatus for a liquid application according to the present invention, if the shape of the non-through opening (bottom area, depth to the bottom, etc.) is known by using the above relationship, From the height of the surface of the liquid application applied in the non-through opening, the amount of the liquid application can be measured easily and with high accuracy without providing a special measurement stage. Further, there is no need for a difference in brightness between the object and the liquid application, and it may be a transparent liquid or the like. The range of liquids that can be measured is wide and versatile.

  In addition, according to the liquid application apparatus according to the present invention, by providing the image processing apparatus for the liquid application, the amount of the liquid application applied by the dispenser is measured and fed back, and the liquid application amount is controlled with high accuracy. Stabilization can be achieved.

  Hereinafter, as the best mode for carrying out the present invention, an embodiment of an image processing method and apparatus for a liquid coating material and a liquid coating apparatus will be described with reference to the drawings.

  An embodiment of an image processing method for a liquid application according to the present invention will be described with reference to FIGS. In FIG. 1, an imaging device 1 as an imaging unit is a CCD camera or the like, and a ring-shaped illumination 2 is arranged around the imaging device 1 (or a positional relationship surrounding incident light to the imaging device 1). The ring-shaped illumination 2 is, for example, one in which a large number of light emitting diodes 3 are arranged and fixed in an annular shape on the lower surface side of the case 4. Therefore, it emits light in an annular shape as a whole. An image processing calculation unit 5 as an image processing calculation unit processes an image signal picked up by the imaging apparatus 1, and a monitor 6 as a display unit displays a processing result of the image calculation processing unit.

  The upper surface 11 of the target object 10 such as a substrate is a flat surface, and a recess 12 is formed as a non-through opening. Here, the bottom surface has a flat circular surface, and the circular surface serving as the opening has a larger diameter than the circular surface of the bottom surface.

  A liquid such as a resin is applied to the recess 12 by a liquid application device. In this case, if the liquid coating 20 applied in the recess 12 is an appropriate amount, the entire bottom surface of the recess 12 is covered with the liquid coating 20 having an appropriate thickness as shown in FIG. 10 is set so as not to be higher than the upper surface 11. Here, the height of the surface of the liquid application 20 with respect to the upper surface 11 of the object 10 is defined as a liquid level height (depth) d.

  Table 1 below shows the preparation of five-stage samples with extremely small, slightly small, standard, slightly large, and excessive liquid application, and the liquid level height d with respect to the upper surface 11 was measured with a laser displacement meter. Is.

  In Table 1 above, “−” indicates that the liquid level height d is lower than the upper surface 11. AVE represents the average value of the first to fifth samples, MAX represents the maximum value, MIN represents the minimum value, and R represents variation (maximum value-minimum value). However, the diameter of the recess 12 is about 2.4 mm, and the coated surface looks at the center.

  Corresponding to the measured value of the liquid level height d in Table 1, the image reflected by the surface of the liquid application 20 of the ring-shaped illumination 2 captured by the imaging device 1 (hereinafter referred to as a reflected image) and its diameter are: It is as FIG. 2 (the reflected image is reflected as a white circle). When the liquid application amount is extremely small, the actual measurement is 239.2 μm and the reflected image has a diameter of 1.55 mm, whereas the reflection of the ring-shaped illumination 2 increases as the liquid application amount increases slightly, standard, slightly more, and excessively. When the diameter of the image is large and excessive, the actual measurement is −13.4 μm, and the diameter of the reflected image is 1.98 mm.

  FIG. 3 is a graph in which the measured value of the liquid level height d is plotted on the horizontal axis, and the diameter of the reflected image of the ring-shaped illumination 2 is plotted on the vertical axis. The correlation with the image diameter is a substantially linear curve. In particular, the periphery of the liquid level height of −125 μm, which is the standard specification of the product, can be seen almost completely as a linear function, and it has been proved that a correlation is established.

  FIG. 4 shows five levels of liquid application amount when the liquid is applied to the recess 12 of FIG. 1 until the liquid application amount is (A) extremely small, (B) slightly small, (C) standard, (D) slightly large, and (E) excessive. It is a three-dimensional graph of the coating surface (liquid level) which measured the sample of (2) with the three-dimensional measuring device. It can be seen that the periphery of the coating surface rises due to surface tension, and that the lower the liquid level (the smaller the coating amount), the smaller the flat portion at the center of the coating surface. The numbers described in the lower part of the graph of FIG. 4 are the range of the planar region read from the two-dimensional graph of the coated surface cross section in five stages of the minimum to the excessive, similarly measured with a three-dimensional measuring instrument, for example, (A) In the extremely small graph, the range of horizontal positions 900 to 1750 μm is a planar region, so the length dimension of the planar region is 1750−900 = 850 μm. Similarly, (B) is slightly less than 1000 μm, and (C) 1150 μm is standard. , (D) 1350 μm is slightly more.

  FIG. 5 is a graph showing the relationship between the reflected image diameter (mm) of the ring-shaped illumination 2 and the length dimension (μm) of the flat portion of the coated surface measured in FIG. 4, and the correlation is also in the form of a linear function. You can see that it is removed.

  From the above events, the reflected image of the ring-shaped illumination 2 is captured by the imaging device 1, and the diameter size of the reflected image of the ring-shaped illumination 2 is calculated by image processing by the image processing calculation unit 5 from the captured image signal. The liquid level height d of the liquid application 20 with reference to the upper surface 11 of the object 10 can be measured using the correlation shown by the linear function of FIG. 3 or FIG. If the shape of the concave portion 2 (bottom area, depth to the bottom surface, etc.) is known in advance, the application amount of the liquid application 20 can be detected and measured from the liquid level height d. The calculation for obtaining the liquid level height d from the diameter of the reflected image and further obtaining the coating amount can be performed by a controller (not shown).

  According to this embodiment, the following effects can be obtained.

(1) An image of the ring-shaped illumination reflected on the surface of the liquid application 20 is picked up by the imaging device 1 and the amount of the liquid application 20 in the recess 12 is measured according to the size of the image of the imaged ring-shaped illumination 2 As can be seen from the correlations in FIGS. 3 and 5, highly accurate measurement is possible. In addition, a special imaging stage is not required and measurement is easy.

(2) Since the difference in brightness and color between the planar object 10 such as the substrate and the liquid is not used, it can be applied to various liquid applications and is highly versatile.

  FIG. 6 shows a first embodiment of the image processing method for a liquid coating material according to the present invention, in which a CCD camera 30 is used as an imaging means, and a zoom lens 31 of 70 times is mounted. An optical fiber ring illumination 32 is integrally provided around the camera 30, and the diameter between the fiber centers is 26 mm.

  The substrate 40 having the recess 41 is positioned and held on the XY table 45 by a mechanical clamp (or vacuum suction). The opening of the recess 41 has a diameter of 2.4 mm and a depth of 0.85 mm. The distance from the reference of the camera 30 to the upper surface of the substrate 40 (Work Distance) was 35 mm. The liquid applied to the recess 41 is an epoxy resin.

  FIG. 7 is a second embodiment of the image processing method for a liquid coating material according to the present invention. A CCD camera 30 (CV-035C made by KEYENCE) is used as an imaging means, and a lens 31 (CA-LH25 made by KEYENCE) is attached. It is. An LED ring-shaped illumination 32 (low-angle type, CA-DLR7 manufactured by KEYENCE, Inc.) is provided at a position below the camera 30 so as to surround incident light to the camera, and the diameter between the LED centers is 56 mm.

  The substrate 40 having the recess 41 is positioned and held on the XY table 45 by a mechanical clamp (or vacuum suction). The opening of the recess 41 has a diameter of 2.4 mm and a depth of 0.85 mm. The distance from the reference of the camera 30 to the upper surface of the substrate 40 (Work Distance) was 25 mm, and the distance from the upper surface of the substrate 40 to the ring-shaped illumination 32 was 5 to 20. The liquid applied to the recess 41 is an epoxy resin.

  In the first and second embodiments, the liquid is applied to the concave portion 41 of the substrate 40 as the target. However, the target is not limited to the substrate, and a member in which the concave portion 47 is formed on the upper surface as shown in FIG. A component with a lead frame in which 46 is fixed to the lead frame 48 may be used as an object to be applied. The opening of the recess 47 is, for example, 2.4 mm in diameter and 0.85 mm in depth.

  FIG. 9 shows a mechanism for supporting the camera 30 and the ring-shaped illumination 32 and the substrate 40 shown in the embodiments of FIGS. When the substrate 40 is positioned and held by the XY table 45, the camera 30 and the ring-shaped illumination 32 arranged in a fixed positional relationship with the camera 30 are fixed to the apparatus base 50. That is, the camera 30 and the ring-shaped illumination 32 are supported at a predetermined height via the support column 51, the horizontal shaft 52, the vertical shaft 53, and the mounting member 54 that are erected and fixed to the apparatus base 50. The required distance (Work Distance) is secured.

  FIGS. 10A and 10B are a front view and a side sectional view of an embodiment of a liquid coating apparatus (dispensing apparatus) provided with the above-described image processing apparatus for a liquid coating material, and FIG. 11 is a perspective view. 12 is a schematic configuration diagram of the liquid coating apparatus.

  As shown in FIGS. 10 and 11, the liquid coating apparatus is provided with a substrate loader 60, a dispensing unit 61, an operation panel 62, and a substrate unloader 63 on an apparatus frame 55, and the dispensing unit 61 is attached to the substrate by a dispenser. The substrate loader 60 supplies the substrate to the dispensing unit 61, and the substrate unloader 63 discharges the substrate after the liquid is applied by the dispensing unit 61.

  The basic of the liquid coating apparatus is a combination of a substrate transport system, an imaging device, and a dispenser, and the substrate transport system has at least one stage. In the example of FIG. 12, the substrate transport system 70 has three stages, a preheating stage S1, a coating stage S2, and a cooling stage S3.

  When the substrate 40 before liquid application needs to be preheated, the preheating stage S1 has a role of increasing the temperature of the substrate 40 by a preheating means such as a heater and increasing fluidity in liquid application at the application stage S2.

  The structure of the dispenser 71 that performs liquid application on the substrate 40 of the application stage S2 is well known. For example, a needle (nozzle) is connected to the lower end of a syringe containing liquid, and an appropriate amount of liquid is pushed out by the syringe. Thus, the liquid is discharged from the tip of the needle. The liquid discharge amount, that is, the liquid application amount is controlled by a dispense controller 72 to which a dispenser 71 is connected. In the application stage S2, a liquid (droplet) is applied to the substrate 40 at one place or a plurality of places.

  The cooling stage S3 has a function of lowering the temperature of the substrate 40 raised in the coating stage S2 and solidifying and stabilizing the applied liquid.

  The imaging device 1 and the ring-shaped illumination 2 are provided on the coating stage S2 or the cooling stage S3 depending on the application. In addition, an image processing calculation unit 5 that processes an image signal captured by the imaging apparatus 1 and a monitor 6 that displays the processing result are provided. Further, a controller 75 is provided that receives the processing result of the image processing calculation unit 5 (that is, the diameter of the reflection image of the ring-shaped illumination), calculates the liquid discharge amount measured from the imaging result, and feedback-controls the dispense controller 72. ing. The controller 75 also performs various controls of the entire apparatus.

  The controller 75 compares the preset optimum range (optimum value) of the liquid application amount with the measured value of the liquid application amount obtained from the processing result of the image processing calculation unit 5 (the diameter of the reflected image of the ring illumination). Then, feedback control is performed so that one or both of the liquid discharge pressure and the discharge time of the dispenser 71 are increased or decreased via the dispense controller 72 so that the liquid application amount falls within the optimum range.

  When the application stage S2 has a function as an XY table that moves in two horizontal directions, front, rear, left, and right within a horizontal plane, the dispenser 71 only needs to operate in the Z direction (up and down direction). However, the dispenser 71 needs to have a function of moving in the X-Y-Z direction (orthogonal three-axis directions) when it has a function of positioning and holding the substrate 40 but does not have a function as an XY table. In this case, the imaging device 1 and the ring-shaped illumination 2 are also held by the coating head that holds the dispenser 71 and can be moved in the XY directions.

  Several methods of the feedback control can be considered, and three methods will be exemplified below.

(1) Method of Basic Operation Flow 1 in FIG. 13 The liquid application applied to the representative point a of the substrate 40 at the application stage S2 is measured by the method of Example 1 or 2 at the cooling stage S3 to confirm the application amount, This is a method of applying feedback to the dispense controller 72 using image confirmation data. Since the application operation and the measurement operation are performed in parallel (in parallel), it can be used when priority is given to throughput. In the step of image confirmation data processing of FIG. 13, the image confirmation data is averaged for a plurality of substrates, and the averaged numerical value increase / decrease judgment and the increase / decrease ratio are calculated, and the calculated result numerical value is used for feedback. Control is in progress.

(2) Method of Basic Operation Flow 2 in FIG. 14 The liquid coating applied to the representative point a of the substrate 40 at the coating stage S2 is measured by the method of Example 1 or 2 on the coating stage S2 to confirm the coating amount. In this method, feedback is applied to the dispense controller 72 using the image confirmation data, and coating is performed sequentially on the subsequent coating points. Since the application operation and the measurement operation are serial, the throughput is disadvantageous. However, since feedback is applied immediately after measurement, it is used when priority is given to accuracy. In the step of image confirmation data processing of FIG. 14, the image confirmation data is averaged for a plurality of substrates, the increase / decrease determination of the averaged numerical value and the increase / decrease ratio are calculated, and the calculated result numerical value is used for feedback. Control is in progress.

(3) Method for Performing Image Confirmation Process for All Application Points in Basic Operation Flow 2 of FIG. 14 The liquid application applied to the substrate 40 at the application stage S2 is also measured by the method of Example 1 or 2 at the application stage S2. Then, the application amount is confirmed, and feedback is applied to the dispense controller 72 using the image confirmation data to apply the liquid again to the next application point of the substrate. Thereafter, this operation is repeated. In this case, the throughput is disadvantageous, but it is used when higher accuracy is required.

  Although the embodiments and examples of the present invention have been described above, it is obvious to those skilled in the art that the present invention is not limited thereto and various modifications and changes can be made within the scope of the claims. I will.

  In the present invention, a mounted product such as a chip-type electronic component mounted on the bottom surface of a non-penetrating opening of an object such as a substrate or an electronic component is filled with a liquid (resin etc.) serving as a filler (non-penetrating opening). Therefore, it can be suitably used in the case of sealing (so that the resin does not rise and the mounted product is not exposed).

It is the block diagram which made one part the front cross section which shows embodiment of the image processing method and apparatus of the liquid coating material which concerns on this invention. In the said embodiment, it is explanatory drawing which shows the correlation with the liquid level height of the liquid coating material in a recessed part, and the diameter of the reflected image of ring-shaped illumination. In the said embodiment, it is a graph which shows that the correlation with the liquid level height of the liquid application material in a recessed part and the diameter of the reflected image of ring-shaped illumination is a linear function almost completely. In the embodiment, the relationship between the application amount of the liquid application and the length dimension of the flat portion of the application surface (liquid surface), (A) is the minimum application amount, (B) is slightly less, (C ) Is a standard, (D) is a little more, and (E) is a three-dimensional graph of the coated surface when there is too much. In the said embodiment, it is a graph which shows that the correlation with the diameter of the reflected image of ring-shaped illumination and the length dimension of the plane part of the application surface of a liquid coating material is a substantially linear function. It is the front view which made a part the cross section which shows Example 1 of the image processing method of the liquid coating material which concerns on this invention. It is the front view which made a part the cross section which shows Example 2 of the image processing method of the liquid coating material which concerns on this invention. It is a front sectional view showing another example of the object. It is a front view which shows the mechanism which supports the camera, ring-shaped illumination, and board | substrate which were shown in Example 1,2. BRIEF DESCRIPTION OF THE DRAWINGS It is the whole external appearance of embodiment of the liquid coating device which concerns on this invention, Comprising: (A) is a front view, (B) is a sectional side view. It is the same perspective view. It is a block diagram of embodiment of the said liquid application apparatus. It is a flowchart which shows the basic operation | movement flow 1 in embodiment of the said liquid application apparatus. It is a flowchart which shows the basic operation | movement flow 2 in embodiment of the said liquid application apparatus. It is a conventional method for measuring the amount of liquid applied when a liquid is applied in the form of dots on a plane such as a substrate, where (A) is a front view and (B) is a front view showing an example of a monitor image. This is a case where a chip-type electronic component mounted in a recess (cavity) of a substrate (or electronic component) is sealed with a resin serving as a filler, wherein (A) is a plan view and (B) is a front sectional view. is there.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Imaging device 2,32 Ring-shaped illumination 3 Light emitting diode 4 Case 5 Image processing calculating part 6 Monitor 10 Target object 11 Upper surface 12, 41, 47 Recessed part 20 Liquid coating material 30 Camera 40 Board | substrate 45 XY table 46 Member 50 Device base Base 51 Post 54 Mounting member 60 Substrate loader 61 Dispense section 62 Operation panel 63 Substrate unloader 70 Substrate transport system 71 Dispenser 72 Dispense controller 75 Controller S1 Preheating stage S2 Coating stage S3 Cooling stage

Claims (7)

Together are use the imaging means, only ring-shaped illumination provided at a position surrounding relation to light incident on the periphery or the image pickup means image pickup means is used as illumination means, the liquid coated in the non-through openings of the object An image processing method for a liquid coating material for measuring an amount,
The ring-shaped image of the ring- shaped illumination reflected on the surface of the liquid application object is imaged by the imaging means, and the liquid application in the non-penetrating opening is measured according to the size of the imaged ring-shaped image of the ring- shaped illumination. An image processing method for a liquid coating product, comprising measuring the amount of the product. Assuming that the correlation between the size of the ring-shaped image of the ring-shaped illumination and the liquid level of the liquid coating in the non-through opening is a substantially linear function, the amount of the liquid coating in the non-through opening is The image processing method for a liquid coating product according to claim 1 to be measured. An imaging means, an illumination means only for ring illumination provided in a positional relationship surrounding the incident light to the imaging means, or an image processing calculation means for processing an image signal imaged by the imaging means A liquid application image processing apparatus for measuring the amount of the liquid application in the non-through opening of the object,
The ring-shaped image of the ring- shaped illumination reflected by the surface of the liquid application is captured by the imaging unit, and the size of the captured ring-shaped image of the ring- shaped illumination is calculated by the image processing calculation unit. Accordingly, the liquid processing product image processing apparatus is characterized in that the amount of the liquid coating material in the non-through opening is measured. Assuming that the correlation between the size of the ring-shaped image of the ring-shaped illumination calculated by the image processing calculation means and the liquid level of the liquid application in the non-through opening is a substantially linear function, the non-through 4. The image processing apparatus for a liquid application according to claim 3, wherein the amount of the liquid application in the opening is measured. A dispenser for applying a liquid in a non-through opening of an object;
A dispense controller for controlling the liquid discharge amount of the dispenser;
An imaging unit; a ring-shaped illumination unit provided in a positional relationship around the imaging unit or surrounding incident light to the imaging unit; and an image processing calculation unit that processes an image signal captured by the imaging unit. Then, the image of the ring-shaped illumination reflected by the surface of the liquid application material in the non-penetrating opening is captured by the imaging unit, and the size of the captured image of the ring-shaped illumination is calculated by the image processing calculation unit A liquid application image processing apparatus for measuring the amount of the liquid application object in the non-through opening ,
A liquid coating apparatus that feeds back a measured value of the amount of the liquid coating material to the dispense controller to control the amount of the liquid coating material within a desired range. In a stage different from the application stage where the liquid is applied to the object by the dispenser, the amount of the liquid application applied to the object is measured, and the liquid application to the next object in the application stage is performed. The liquid coating apparatus according to claim 5 , wherein a measured value is fed back for the purpose. In the application stage for applying liquid to the object by the dispenser, the amount of the liquid application applied to the object is measured, and the measurement value is fed back for liquid application to the object at the application stage. The liquid coating apparatus according to claim 5, wherein