JP4301077B2 - Pressure sensor - Google Patents

Pressure sensor Download PDF

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JP4301077B2
JP4301077B2 JP2004145767A JP2004145767A JP4301077B2 JP 4301077 B2 JP4301077 B2 JP 4301077B2 JP 2004145767 A JP2004145767 A JP 2004145767A JP 2004145767 A JP2004145767 A JP 2004145767A JP 4301077 B2 JP4301077 B2 JP 4301077B2
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pressure
rubber
pressure sensor
elastic body
dust
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JP2005326320A (en
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俊明 神永
勝彦 菊池
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Hitachi Ltd
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本発明は、内燃機関各部の圧力を測定用する半導体を用いた圧力センサに関するもので、特に圧力導入孔が煤塵などで塞がれることを防止構造に関する。   The present invention relates to a pressure sensor using a semiconductor for measuring the pressure of each part of an internal combustion engine, and more particularly to a structure for preventing a pressure introduction hole from being blocked by dust or the like.

ディーゼルエンジンは最近排気ガス規制、特にNOx(窒素酸化物)の低減が厳しくなり、そのために燃焼温度を下げる必要がある。このため、EGR(Exhaust Gas
Recirculation)の還流量を増加させ、これに伴ってカーボン等の粒子状物質が多量インテーク側に出てくる。一般的にはEGRの流量測定用として圧力センサを使用している。
Diesel engines have recently become stricter in exhaust gas regulations, especially NOx (nitrogen oxide) reduction, and therefore, it is necessary to lower the combustion temperature. For this reason, EGR (Exhaust Gas
The amount of recirculation is increased, and a large amount of particulate matter such as carbon comes out to the intake side. In general, a pressure sensor is used for EGR flow measurement.

また排気ガス中のカーボン等の粒子状物質低減には、DPF(Diesel Particle Filter:ディーゼルパーティクルフィルター)方法が現時点最も有効であり、フィルターの目詰り検知用として、圧力センサが使用されている。   Further, the DPF (Diesel Particle Filter) method is currently most effective for reducing particulate matter such as carbon in the exhaust gas, and a pressure sensor is used for detecting filter clogging.

いずれの圧力センサ取り付け環境は、多量のカーボン等の粒子状物質にさらされる環境にある。   Any pressure sensor is installed in an environment where it is exposed to a large amount of particulate matter such as carbon.

従来の圧力センサは、図1に示すようにインテークマニホールド又はEGR還流通路1に半導体圧力センサ2が取付けられる。この時通常の圧力センサの圧力導入孔3は、内径の大小はあるが何れも防護壁は設けられていないため、時間の差はあるが、通路1の壁面4に堆積した煤塵5は壁面を伝わり、堆積して行き遂には導入孔を塞いでしまう欠点があった。特に、最近はEGRの経路にクーラー機構を設け、還流させる排気ガスの温度を下げるため、湿った煤塵となり、壁面に塵埃が付着しやすく、付着した煤塵が壁面を伝わって圧力センサの圧力導入孔を塞ぎ易い。圧力導入孔が塞がると、圧力を圧力センサへ正確に伝える事ができず、圧力センサが正しい圧力信号をエンジン制御用コントロールユニットへ伝達することが出来ず、エンジン制御等に悪影響を及ぼす問題がある。   In the conventional pressure sensor, a semiconductor pressure sensor 2 is attached to an intake manifold or an EGR return passage 1 as shown in FIG. At this time, the pressure introducing hole 3 of the normal pressure sensor has a large inner diameter but no protective wall is provided. Therefore, although there is a time difference, the dust 5 deposited on the wall surface 4 of the passage 1 does not cover the wall surface. There was a drawback that it was transmitted and deposited, and eventually closed the introduction hole. In particular, a cooler mechanism has recently been installed in the EGR path to lower the temperature of the exhaust gas to be recirculated, so that it becomes moist soot and easily adheres to the wall surface. It is easy to block. If the pressure introduction hole is blocked, the pressure cannot be accurately transmitted to the pressure sensor, and the pressure sensor cannot transmit the correct pressure signal to the engine control control unit, which has a problem that adversely affects engine control and the like. .

特開2002−181651号公報には圧力センサのセンサチップの汚れ防止構造が示されている。この構造はセンサチップのセンシング部に汚れが付着しないようにした構造であるが、圧力導入孔の入り口部に煤塵などが付着し、導入孔を塞いでしまう問題に対する配慮がなされていない。   Japanese Patent Application Laid-Open No. 2002-181651 discloses a structure for preventing contamination of a sensor chip of a pressure sensor. This structure is such that dirt does not adhere to the sensing part of the sensor chip, but no consideration is given to the problem that dust or the like adheres to the inlet part of the pressure introduction hole and blocks the introduction hole.

特開2002−181651号公報JP 2002-181651 A

本発明の目的は、圧力導入孔入り口付近に煤塵が堆積することによって、圧力導入孔が塞がれることを防止した圧力センサを提供することにある。 An object of the present invention is to provide a pressure sensor that prevents the pressure introduction hole from being blocked by the accumulation of dust near the pressure introduction hole entrance .

上記目的は、圧力導入孔を形成するハウジングと、前記圧力導入孔を介して導入した被測定媒体の圧力変化を電気信号に変換する半導体とを備えた圧力センサにおいて、孔が形成されたゴム状弾性体を備え、前記圧力導入孔に、先端部が前記ハウジングから突き出すように前記ゴム状弾性体が設置され、前記ゴム状弾性体の孔の内面となる部分に、煤塵の流入を抑制するための防護壁が複数個形成され、前記ゴム状弾性体の前記先端部及び前記防護壁にスリットが設けられ、前記ゴム状弾性体の孔を介して前記半導体に圧力が導入されるように構成されたことを特徴とする圧力センサによって達成される。The object is to provide a rubber sensor in which a hole is formed in a pressure sensor including a housing for forming a pressure introduction hole and a semiconductor for converting a pressure change of a medium to be measured introduced through the pressure introduction hole into an electric signal. An elastic body is provided, and the rubber-like elastic body is installed in the pressure introducing hole so that a tip portion protrudes from the housing, and the inflow of dust is suppressed in a portion which becomes an inner surface of the hole of the rubber-like elastic body A plurality of protective walls are formed, a slit is provided in the tip of the rubber-like elastic body and the protective wall, and pressure is introduced into the semiconductor through a hole in the rubber-like elastic body. This is achieved by a pressure sensor characterized in that.

本発明によれば、圧力センサの圧力導入孔付近に堆積する煤塵などの物質により圧力導入孔を塞ぐ不具合を防止することが可能となる。例えば、ディーゼルエンジンなどへ使用した場合の高汚染環境条件下でも、圧力導入孔が煤塵で塞がれることなく、エンジン制御に悪影響を及ぼすことがなくなり、信頼性を向上できる。

According to the present invention, that Do is possible to prevent a problem blocking the pressure introduction hole with a material such as dust deposited on the vicinity of the pressure introducing hole of the pressure sensor. For example, even under highly polluted environmental conditions when used in a diesel engine or the like, the pressure introduction hole is not blocked by soot, and the engine control is not adversely affected and the reliability can be improved.

以下、本発明の一実施形態について、図面に従って説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

図2は本発明の一実施例である半導体圧力センサをインテークマニホールドなどの通路へ装着した場合の断面図である。   FIG. 2 is a cross-sectional view when a semiconductor pressure sensor according to an embodiment of the present invention is mounted in a passage such as an intake manifold.

圧力センサは、ハウジング10に設けられた圧力導入孔3を介して、測定媒体の圧力を半導体ひずみゲージを搭載したセンサチップ11に圧力が伝達される。センサチップは保護のためゲル上物質12で保護されている。センサチップはケース13に搭載されケースに設けたターミナル14にワイヤボンディング15で接続され電源の供給,信号の出力を行う。ターミナル14はハウジング10にインサートモールドされたコネクタ端子16にプロジェクション部17で溶接により接続している。ケース13はエポキシ樹脂18を注型することにより固定されるとともに、このエポキシ樹脂18は圧力リークを防止する。コネクタ部19はコネクタ端子16とともに外部の電源供給・信号出力用ハーネスと接される。   In the pressure sensor, the pressure of the measurement medium is transmitted to the sensor chip 11 equipped with a semiconductor strain gauge through the pressure introduction hole 3 provided in the housing 10. The sensor chip is protected with a substance 12 on the gel for protection. The sensor chip is mounted on the case 13 and connected to a terminal 14 provided on the case by wire bonding 15 to supply power and output signals. The terminal 14 is connected to a connector terminal 16 insert-molded in the housing 10 by welding at a projection portion 17. The case 13 is fixed by casting an epoxy resin 18, and the epoxy resin 18 prevents pressure leakage. The connector portion 19 is connected to an external power supply / signal output harness together with the connector terminal 16.

本実施例では、圧力導入孔へ設置した煤塵流入防護壁20をゴム状弾性体を使用し別体としている。まず、先端部の防護壁21を通路へ突き出す構造とすることで、圧力導入孔内へ壁面を伝わってくる煤塵の流入を防止する。この時、この防護壁21の材料をゴム状弾性体(例えばシリコーンゴム,フッ素ゴム,フロロシリコーンゴムなど)で製作することによって、通路の圧力媒体の流速が変化したときにこの防護壁21が振動し、防護壁
21に煤塵が付着した場合でも振り落とす効果がある。この時に、この防護壁が振動しやすい様にスリット部22を設けておくとさらに効果がある。
In the present embodiment, the dust inflow protective wall 20 installed in the pressure introducing hole is separated from the rubber elastic body. First, by adopting a structure in which the protective wall 21 at the distal end protrudes into the passage, the inflow of dust that travels through the wall surface into the pressure introduction hole is prevented. At this time, the material of the protective wall 21 is made of a rubber-like elastic body (for example, silicone rubber, fluorine rubber, fluorosilicone rubber, etc.), so that the protective wall 21 vibrates when the flow velocity of the pressure medium in the passage changes. In addition, even if dust adheres to the protective wall 21, there is an effect of shaking off. At this time, it is more effective to provide the slit portion 22 so that the protective wall easily vibrates.

さらに、圧力導入孔内面となる部分に防護壁23を設け内部への煤塵の流入を抑制する。この防護壁23は下向きにすることで、煤塵が付着しても落下しやすい形状としている。この防護壁23は、防護壁21部と同様に、ゴム状弾性体で本防護壁を製作した場合に、圧力測定媒体の流速変化による圧力変化に伴い振動し、この防護壁へ付着した煤塵を落下させる。さら防護壁21と同様にスリット部を設けることにより防護壁を振動しやすくし、付着した煤塵の落下させる効果を向上させる。圧力導入孔3内部に防護壁23を複数個所設けることにより、さらに内部へ進入する煤塵を抑制させる効果がある。   Further, a protective wall 23 is provided on the inner surface of the pressure introducing hole to suppress the inflow of dust. The protective wall 23 is directed downward so that it is easy to fall even if dust adheres. This protective wall 23 vibrates with the pressure change caused by the change in the flow velocity of the pressure measuring medium when the main protective wall is made of a rubber-like elastic body, as in the case of the protective wall 21 part. Drop it. Further, by providing a slit portion in the same manner as the protective wall 21, the protective wall is easily vibrated, and the effect of dropping the attached dust is improved. Providing a plurality of protective walls 23 inside the pressure introduction hole 3 has an effect of further suppressing dust entering the inside.

煤塵流入防護壁20には過挿入防止用の鍔部24と落下防止用の鍔部25を設置し、圧力センサ圧力導入孔へ設置する。   The dust inflow protective wall 20 is provided with a flange portion 24 for preventing excessive insertion and a flange portion 25 for preventing dropping, and is installed in the pressure sensor pressure introduction hole.

図3は、本発明の一実施例である図2の圧力センサ圧力導入孔へ設置した煤塵流入防護壁20のみを抜き出した図である。   FIG. 3 is a view showing only the dust inflow protection wall 20 installed in the pressure sensor pressure introduction hole of FIG. 2 which is an embodiment of the present invention.

図3の上部は煤塵流入防護壁20を上から見た図である。中部は縦断面図、下部はしたから見た図である。圧力導入孔3は上または下からみると防護壁23のスリット部によって分割された形状となっている。   The upper part of FIG. 3 is a view of the dust inflow protection wall 20 as viewed from above. The middle part is a longitudinal sectional view, and the lower part is a view as seen from the top. The pressure introducing hole 3 has a shape divided by the slit portion of the protective wall 23 when viewed from above or below.

本発明は、内燃機関用半導体圧力センサの煤塵による圧力導入孔が煤塵などで塞がれることを防止することを目的としているが、圧力測定媒体に煤塵などが含まれる環境下で使用される圧力センサの圧力導入孔構造へも適用可能であると考える。   An object of the present invention is to prevent pressure introduction holes due to dust of a semiconductor pressure sensor for an internal combustion engine from being blocked by dust, but pressure used in an environment where dust is contained in a pressure measurement medium. It can be applied to the pressure introduction hole structure of the sensor.

従来圧力センサの圧力導入孔部断面図。Sectional drawing of the pressure introduction hole part of the conventional pressure sensor. 本発明の煤塵防護壁を設けた圧力センサの断面図。Sectional drawing of the pressure sensor which provided the dust protection wall of this invention. 図2の煤塵防護壁のみを抜き出した断面図と上下から見た図。FIG. 3 is a cross-sectional view of only the dust protection wall in FIG. 2 and a view from above and below.

符号の説明Explanation of symbols

1…通路、2…圧力センサ、3…圧力導入孔、4…壁面、5…煤塵、23…防護壁。   DESCRIPTION OF SYMBOLS 1 ... Passage | path, 2 ... Pressure sensor, 3 ... Pressure introduction hole, 4 ... Wall surface, 5 ... Dust, 23 ... Protective wall.

Claims (2)

圧力導入孔を形成するハウジングと、
前記圧力導入孔介して導入した被測定媒体の圧力変化を電気信号に変換する半導体とを備えた圧力センサにおいて、
孔が形成されたゴム状弾性体を備え、
前記圧力導入孔に、先端部が前記ハウジングから突き出すように前記ゴム状弾性体が設置され、
前記ゴム状弾性体の孔の内面となる部分に、煤塵の流入を抑制するための防護壁が複数個形成され、
前記ゴム状弾性体の前記先端部及び前記防護壁にスリットが設けられ、
前記ゴム状弾性体の孔を介して前記半導体に圧力が導入されるように構成されたことを特徴とする圧力センサ。
A housing forming a pressure introducing hole;
In the pressure sensor having a semiconductor for converting a pressure change of the medium to be measured introduced via the pressure introduction hole into an electric signal,
It has a rubbery elastic body with holes,
The rubber-like elastic body is installed in the pressure introducing hole so that the tip portion protrudes from the housing,
A plurality of protective walls for suppressing the inflow of dust are formed on the inner surface of the hole of the rubber-like elastic body,
A slit is provided in the tip portion of the rubber-like elastic body and the protective wall,
A pressure sensor configured to introduce pressure into the semiconductor through a hole of the rubber-like elastic body .
請求項1において、
前記ゴム状弾性体が、シリコーンゴム,フッ素ゴム、又は、フロロシリコーンゴムで製作されたことを特徴とする圧力センサ。
In claim 1,
A pressure sensor, wherein the rubber-like elastic body is made of silicone rubber, fluorine rubber, or fluorosilicone rubber .
JP2004145767A 2004-05-17 2004-05-17 Pressure sensor Expired - Fee Related JP4301077B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4985572B2 (en) * 2008-07-10 2012-07-25 株式会社デンソー Pressure sensor
JP2009002962A (en) * 2008-08-29 2009-01-08 Mitsubishi Electric Corp Pressure sensor and inspecting method of pressure sensor
JP5008746B2 (en) * 2010-05-13 2012-08-22 三菱電機株式会社 Pressure sensor
KR101370863B1 (en) 2012-05-25 2014-03-25 주식회사 유라테크 Map sensor for motor vehicle
JP2015064293A (en) * 2013-09-25 2015-04-09 株式会社デンソー Pressure sensor
CN111174946B (en) * 2020-01-06 2021-09-21 福州福光百特自动化设备有限公司 Pressure instrument with anti-seismic performance

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