JP4292164B2 - Adsorption detection method and adsorption detection device - Google Patents

Adsorption detection method and adsorption detection device Download PDF

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JP4292164B2
JP4292164B2 JP2005034902A JP2005034902A JP4292164B2 JP 4292164 B2 JP4292164 B2 JP 4292164B2 JP 2005034902 A JP2005034902 A JP 2005034902A JP 2005034902 A JP2005034902 A JP 2005034902A JP 4292164 B2 JP4292164 B2 JP 4292164B2
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suction
flow rate
adsorption
workpiece
negative pressure
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祐二 高橋
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Koganei Corp
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本発明は、スポンジ、多孔質材など吸着前後で圧力差の少ないワークや、ICやLSIなどワークとしての電子部品を真空吸着して搬送する吸着搬送装置に用いられて、これらのワークの吸着および離脱を検出する吸着検出方法および吸着検出装置に関する。   The present invention is used in a suction conveyance device that vacuum-sucks and transports workpieces with a small pressure difference before and after suction, such as sponges and porous materials, and electronic parts such as ICs and LSIs. The present invention relates to a suction detection method and a suction detection device for detecting separation.

半導体集積回路が形成されたICやLSIなどの電子部品は、搬送装置を用いることによって検査ボードや実装基板上の所定の位置に搭載される。このような搬送装置としては、水平方向に移動自在の搬送ヘッドに上下動自在に吸着具を設け、搬送ヘッドを部品供給ステージと検査ボードとの間で移動させ、部品供給ステージと検査ボードの所定の位置において吸着具を上下動させるようにしたものが知られている。吸着具には、負圧源に接続されるとともにワークに接触する接触面において開口する着脱路が形成されており、部品供給ステージにおいては着脱路に負圧を供給するとともに吸着具をワークに接触させてワークを吸着するようにしている。   An electronic component such as an IC or LSI on which a semiconductor integrated circuit is formed is mounted at a predetermined position on an inspection board or a mounting substrate by using a transfer device. As such a transport apparatus, a suction tool is provided on a transport head that is movable in the horizontal direction so as to be movable up and down, and the transport head is moved between the component supply stage and the inspection board, so A device in which the suction tool is moved up and down at the position is known. The suction tool is formed with a detachable path that is connected to the negative pressure source and opens at the contact surface that contacts the workpiece. In the component supply stage, negative pressure is supplied to the detachable path and the suction tool is brought into contact with the workpiece. To attract the workpiece.

このような吸着搬送装置では、搬送中のワークの脱落を防止するために、ワークが吸着具に確実に吸着されたことを確認した後に搬送動作を行うようにしている。そのため、特許文献1に開示される吸着搬送装置では、着脱路内の圧力を検出する圧力センサを設け、吸着動作における着脱路内の負圧が吸着確認圧力以上増加したときにワークが吸着されたことを検出するようにしている。この従来技術においては吸着確認圧力を一定に設定しているのに対し、特許文献2に開示される吸着搬送装置では、負圧供給時に新たな吸着確認圧力が設定されるようにして吸着判定の検出精度を高めている。
特開2001−54886号公報 特開2004−202673号公報
In such a suction transfer device, in order to prevent the workpiece being transferred from dropping, the transfer operation is performed after confirming that the workpiece has been reliably sucked by the suction tool. Therefore, in the suction conveyance device disclosed in Patent Document 1, a pressure sensor for detecting the pressure in the attachment / detachment path is provided, and the workpiece is adsorbed when the negative pressure in the attachment / detachment path in the suction operation increases more than the suction confirmation pressure. I try to detect that. In this prior art, the suction confirmation pressure is set to be constant, whereas in the suction conveyance device disclosed in Patent Document 2, the suction judgment pressure is set so that a new suction confirmation pressure is set when negative pressure is supplied. Increases detection accuracy.
JP 2001-54886 A JP 2004-202673 A

圧力センサを用いて吸着具に対するワークの吸着とワークの離脱とを検出する場合には、微小なワークを吸着搬送するために着脱路の内径が非常に小さい吸着具を用いると、ワークの吸着前後での差圧が小さくなるので吸着確認圧力も小さく設定する必要があるので、供給圧力が僅かに変動しただけでも吸着確認圧力を越えてしまう可能性があり、ワークの吸着検出精度を低下させてしまう。このため、圧力センサを用いて吸着具に対するワークの吸着と離脱とを検出する場合には、上記特許文献に記載されるように圧力変化の検出精度を高めるようにして対応することになる。   When using a pressure sensor to detect workpiece suction and workpiece detachment, if a suction tool with a very small inner diameter of the attachment / detachment path is used to suck and transport a minute workpiece, Since the differential pressure at the point is small, it is necessary to set the suction confirmation pressure to a small value.Therefore, even if the supply pressure slightly changes, the suction confirmation pressure may be exceeded. End up. For this reason, when detecting the adsorption | suction and detachment | desorption of the workpiece | work with respect to an attraction | suction tool using a pressure sensor, it respond | corresponds by improving the detection accuracy of a pressure change as described in the said patent document.

一方、吸着具に対してワークが吸着されたときにも吸着具には負圧空気がワークと吸着具の先端面との間から漏入することになり、吸着時と未吸着時とにおける負圧空気の流量には差が発生する。この流量差を流量センサにより検出すると、着脱路の内径が非常に小さい吸着具を用いる場合であっても、圧力差よりも流量差が大きく表れるので、ワークの吸着と離脱の検出を行うことが可能であることが判明した。しかしながら、流量センサを用いて吸着具を流れる負圧空気の流量に基づいてワークの吸着と離脱との検出を行う場合には、流量に閾値を設けて流量が所定値となったときに流量センサからのオン信号によりワークの吸着を検出するようにすると、吸着具への負圧空気の供給を開始した段階でワークを未吸着であるにもかかわらず、流量が閾値を越えるので流量センサはオン信号を出力することになる。したがって、そのオン信号をキャンセルして次に流量センサがオン信号を出力したときにワークの吸着を判定する必要がある。   On the other hand, when the workpiece is adsorbed to the adsorbing tool, negative pressure air leaks into the adsorbing tool from between the workpiece and the tip surface of the adsorbing tool, and negative pressure is generated when the workpiece is adsorbed. There is a difference in the flow rate of compressed air. If this flow rate difference is detected by a flow rate sensor, even if an adsorption tool with a very small inner diameter of the attachment / detachment path is used, the flow rate difference appears larger than the pressure difference. It turned out to be possible. However, when detecting suction and detachment of a workpiece based on the flow rate of negative pressure air flowing through the suction tool using a flow rate sensor, a flow rate sensor is provided when the flow rate reaches a predetermined value by setting a threshold value for the flow rate. If the workpiece adsorption is detected by the ON signal from the sensor, the flow rate sensor is on because the flow rate exceeds the threshold even though the workpiece has not been adsorbed when the supply of negative pressure air to the adsorption tool is started. A signal is output. Therefore, it is necessary to determine whether or not the workpiece is attracted when the ON signal is canceled and the flow rate sensor outputs the ON signal next time.

このため、流量センサは微細な流量変化を検出することができるという特性があっても、吸着具に対するワークの吸着と離脱とを検出するために流量センサを使用することは困難であった。   For this reason, even if the flow rate sensor has a characteristic that it can detect a minute flow rate change, it is difficult to use the flow rate sensor to detect the adsorption and detachment of the work with respect to the suction tool.

本発明の目的は、吸着具の流路内を流れる流量に基づいて、ワークの吸着および離脱を確実に検出し得るようにすることにある。   An object of the present invention is to make it possible to reliably detect adsorption and detachment of a workpiece based on a flow rate flowing in a flow path of an adsorption tool.

本発明の吸着判定方法は、吸着具と負圧源とを連通させる脱着路内を流れる負圧空気の流量を検出する流量センサを用いて前記吸着具にワークが吸着されているか否かを検出する吸着検出方法であって、前記吸着具にワークが接触していない空吸い状態のもとで前記着脱路内を流れる負圧空気の流量を空吸い流量値とし、前記吸着具にワークが吸着された吸着状態のもとで前記着脱路内に流入する負圧空気の吸着時流入値と前記空吸い流量値との間の流量を吸着判定上限値とし、前記吸着具にワークが接触していない状態のもとで負圧空気を供給してから前記着脱路内を流れる負圧空気流量が前記吸着判定上限値を越えたことを検出した後に、前記脱着路内の負圧空気流量が前記吸着判定上限値以下となったときに前記吸着具に対するワークの吸着を判定することを特徴とする。
The adsorption determination method of the present invention detects whether or not a workpiece is adsorbed to the adsorbing tool using a flow rate sensor that detects a flow rate of negative pressure air flowing in a desorption path that communicates the adsorbing tool and a negative pressure source. In this suction detection method, the flow rate of negative pressure air flowing in the attachment / detachment path under the suction state where the workpiece is not in contact with the suction tool is set as a suction flow rate value, and the workpiece is sucked into the suction tool. The suction flow upper limit value is a flow rate between the inflow value of negative pressure air flowing into the attachment / detachment path under the suction state and the idle suction flow rate value, and the workpiece is in contact with the suction tool. the negative pressure air after negative pressure air flow through the release passage in the supplying is detected that exceeds the attraction determination limit under absence, negative pressure air flow rate of the desorption passage is the work for the sucker when it becomes less attraction determination limit And judging adsorption.

本発明の吸着検出方法は、前記吸着具に対する負圧空気の供給を停止した状態または正圧空気を供給した状態のもとで負圧空気流量が前記吸着時流入値よりも少ない流量の離脱判定下限値以下となったときにワークの前記吸着具からの離脱を判定することを特徴とする。
In the adsorption detection method of the present invention, in the state where the supply of the negative pressure air to the adsorber is stopped or the state where the positive pressure air is supplied, the determination of separation of the flow rate in which the negative pressure air flow rate is smaller than the inflow value at the time of adsorption. It is characterized in that it determines whether the workpiece is detached from the suction tool when the lower limit value is reached.

本発明の吸着検出方法は、前記空吸い状態における前記脱着路における前記空吸い流量値から、吸着前後での変化量よりも小さい値の吸着判定補正値を差し引いて前記吸着判定上限値を補正することを特徴とする。
Adsorption detection method of the present invention, from the air sucking flow rate value in the desorption path in the air sucking state, to correct the attraction determination upper limit by subtracting the attraction determination correction value smaller than the change amount before and after adsorption It is characterized by that.

本発明の吸着検出装置は、吸着具にワークが吸着されているか否かを検出する吸着検出装置であって、前記吸着具と負圧源とを連通させる脱着路内を流れる負圧空気の流量を検出する流量センサと、前記吸着具にワークが接触していない空吸い状態のもとで前記着脱路内を流れる負圧空気の空吸い流量値と、前記吸着具にワークが吸着された吸着状態のもとで前記着脱路内を流れる負圧空気の吸着時流入値と、前記空吸い流量値と前記吸着時流入値との間の吸着判定上限値とを記憶するメモリと、前記吸着具に前記脱着路を介して前記負圧源からの負圧空気を、前記吸着具にワークが接触していない状態のもとで供してから前記脱着路内の負圧空気流量が前記吸着判定上限値を越えた後前記負圧空気流量が前記吸着判定上限値以下となったときに前記吸着具に対するワークの吸着を判定する吸着検出手段とを有することを特徴とする。
The adsorption detection device of the present invention is an adsorption detection device that detects whether or not a workpiece is adsorbed to the adsorbing tool, and a flow rate of negative pressure air flowing in a desorption path that connects the adsorbing tool and a negative pressure source. A flow rate sensor for detecting the suction pressure, a suction flow value of negative pressure air flowing in the attachment / detachment path under a suction state in which the work is not in contact with the suction tool, and a suction by which the work is sucked by the suction tool A memory for storing an inflow value of negative pressure air flowing in the attachment / detachment path under a state, and an adsorption determination upper limit value between the idle suction flow rate value and the inflow value at the time of adsorption; wherein the negative pressure air from the negative pressure source through a desorption passage, the negative pressure air flow rate of the desorption passage after subjected fed under a state where the workpiece the suction member is not in contact with the adsorption after exceeding the judging upper limit, the negative pressure air flow I than the attraction determination upper limit And having a suction detecting means for determining the adsorption of the workpiece relative to the sucker when the.

本発明の吸着検出装置は、前記メモリが前記吸着時流入値よりも少ない流量の離脱判定下限値を記憶しており、前記吸着検出手段は負圧空気流量が前記離脱判定下限値以下となったときにワークの前記吸着具からの離脱を判定することを特徴とする。
In the adsorption detection device of the present invention, the memory stores a lower limit value for determination of separation of the flow rate smaller than the inflow value at the time of adsorption, and the adsorption detection means has a negative pressure air flow rate equal to or lower than the lower limit value for determination of separation . Sometimes it is determined that the workpiece is detached from the suction tool.

本発明の吸着検出装置は、前記吸着検出手段が、前記空吸い状態における前記脱着路における前記空吸い流量値から、吸着前後での変化量よりも小さい値の吸着判定補正値を差し引いて前記吸着判定上限値を補正することを特徴とする。
Adsorption detecting apparatus of the present invention, the suction detecting means, from the air sucking flow rate value in the desorption path in the air sucking state, the suction by subtracting the attraction determination correction value smaller than the change amount before and after adsorption The determination upper limit value is corrected.

本発明によれば、吸着具に負圧空気を供給した状態のもとで吸着具にワークが吸着したときにワークと吸着具の先端面との間から漏入する空気の流量の上限値を予め設定しておき、吸着具にワークが接触していない空吸い状態のもとで吸着具に負圧空気を供給したときに負圧空気の流量が上記上限値を越えたことを流量センサが検出した後に、負圧空気の流量が上記上限値以下となったときに吸着具にワークが吸着したと判定するようにしたので、流量センサを用いて吸着具に対するワークの吸着を確実に検出することができる。   According to the present invention, the upper limit value of the flow rate of air leaking from between the workpiece and the tip end surface of the suction tool when the work is sucked by the suction tool in a state where negative pressure air is supplied to the suction tool. The flow sensor indicates that the flow rate of negative pressure air has exceeded the upper limit when negative pressure air is supplied to the suction tool in the idle suction state where the workpiece is not in contact with the suction tool. After detection, when the flow rate of negative pressure air becomes equal to or lower than the above upper limit value, it is determined that the workpiece is adsorbed to the adsorber, so the adsorbing of the workpiece to the adsorber is reliably detected using the flow sensor. be able to.

本発明によれば、吸着具に対して負圧空気を供給していた状態から供給を停止した状態に切り換えたときに吸着具内に流入する空気の流量の下限値を予め設定しておき、吸着具に対する負圧空気の供給を停止した状態のもとで負圧空気の流量が前記下限値以下となったことを流量センサが検出したときにワークの吸着具からの離脱を判定するようにしたので、流量センサを用いて搬送終了後の吸着具からのワークの離脱を確実に検出することができる。   According to the present invention, the lower limit value of the flow rate of the air flowing into the adsorber when the supply is switched from the state where the negative pressure air is supplied to the adsorber to the stopped state is set in advance. When the flow rate sensor detects that the flow rate of negative pressure air is below the lower limit under the condition that the supply of negative pressure air to the suction tool is stopped, the separation of the workpiece from the suction tool is determined. Therefore, it is possible to reliably detect separation of the workpiece from the suction tool after completion of conveyance using the flow rate sensor.

本発明によれば、ワークの搬送途中でワークが吸着具から脱落したときには、負圧空気の供給時に負圧空気の流量が上限値を越えたことを流量センサによって検出することができるので、搬送中における意図しないワークWの脱落を検出することができる。   According to the present invention, when the workpiece falls off from the suction tool during the conveyance of the workpiece, the flow rate sensor can detect that the flow rate of the negative pressure air has exceeded the upper limit value when the negative pressure air is supplied. It is possible to detect an unintended drop of the workpiece W inside.

本発明によれば、空吸い状態における空吸い流量値から所定の吸着判定値を差し引いて上限値を補正するようにしたので、共通の負圧源から複数の分岐流路を介して複数の吸着具に負圧空気を供給するようにし、いずれかの吸着具におけるワークの吸着または離脱によって他の吸着具における流量が影響を受ける場合のように、吸着具に対する流量変化が発生する場合でも、ワークWの吸着を確実に検出することができる。   According to the present invention, the upper limit value is corrected by subtracting a predetermined adsorption determination value from the idle suction flow value in the idle suction state, so that a plurality of adsorptions can be performed from a common negative pressure source via a plurality of branch channels. Even if the flow rate of the suction tool is affected by the suction or detachment of the work piece in one of the suction tools, the negative pressure air is supplied to the tool. W adsorption can be reliably detected.

以下、本発明の実施の形態を図面に基づいて詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図1(A)〜(E)は、本発明の一実施の形態である吸着検出装置を有する吸着搬送装置によりワークを吸着搬送する搬送手順を示す説明図であり、図2は図1に示す吸着搬送装置の概略を示すブロック図である。吸着搬送装置11は部品供給ステージ12の上に配置されたICなどの電子部品をワークWとして、これを吸着具13により吸着して実装基板14に搬送するために用いられる。   1 (A) to 1 (E) are explanatory views showing a transport procedure for sucking and transporting a workpiece by a suction transport device having a suction detection device according to an embodiment of the present invention, and FIG. 2 is shown in FIG. It is a block diagram which shows the outline of a suction conveyance apparatus. The suction conveyance device 11 is used for picking up an electronic component such as an IC disposed on the component supply stage 12 as a workpiece W and sucking it by the suction tool 13 and transporting it to the mounting substrate 14.

吸着搬送装置11は水平方向に移動自在の搬送ヘッド15を有しており、搬送ヘッド15は電動モータを駆動することにより部品供給ステージ12と実装基板14との間を水平移動するようになっている。搬送ヘッド15には空気圧シリンダ16が固定されており、この空気圧シリンダ16には上下方向に往復動自在にピストンロッド17が装着されている。空気圧シリンダ16には電磁弁18を介して正圧源19が接続されており、電磁弁18に通電がなされると正圧源19から供給される圧縮空気によりピストンロッド17は図中下方側に前進し、電磁弁18への通電が絶たれるとピストンロッド17は後退限位置に保持されるようになっている。   The suction conveyance device 11 has a conveyance head 15 that is movable in the horizontal direction, and the conveyance head 15 moves horizontally between the component supply stage 12 and the mounting substrate 14 by driving an electric motor. Yes. A pneumatic cylinder 16 is fixed to the transport head 15, and a piston rod 17 is attached to the pneumatic cylinder 16 so as to reciprocate in the vertical direction. A positive pressure source 19 is connected to the pneumatic cylinder 16 via an electromagnetic valve 18. When the solenoid valve 18 is energized, the compressed air supplied from the positive pressure source 19 causes the piston rod 17 to move downward in the figure. When the solenoid valve 18 is de-energized by moving forward, the piston rod 17 is held at the retreat limit position.

ピストンロッド17の先端には内部に空気流路20が形成された吸着具13が取り付けられている。この空気流路20は吸着具13の先端に設けられたワークWとの接触面21に開口しており、その開口部は真空吸引口22となっている。また、空気流路20には真空供給弁23を介して負圧源24に接続されるとともに真空破壊弁25を介して正圧源26に接続された連通流路27が接続されており、空気流路20と連通流路27とにより着脱路28が構成されている。   At the tip of the piston rod 17, an adsorber 13 having an air channel 20 formed therein is attached. The air flow path 20 is open to a contact surface 21 with the workpiece W provided at the tip of the suction tool 13, and the opening is a vacuum suction port 22. The air flow path 20 is connected to a negative pressure source 24 via a vacuum supply valve 23 and to a communication flow path 27 connected to a positive pressure source 26 via a vacuum breaker valve 25. The flow path 20 and the communication flow path 27 constitute a detachable path 28.

真空供給弁23はソレノイド23aにより流路を開閉する開閉弁であり、ソレノイド23aに通電がなされると着脱路28を負圧源24に連通させる開位置に作動し、ソレノイド23aへの通電が絶たれると着脱路28を閉じる閉位置に作動するようになっている。同様に、真空破壊弁25はソレノイド25aにより流路を開閉する開閉弁であり、ソレノイド25aに通電がなされると着脱路28を正圧源26に連通させる開位置に作動し、ソレノイド25aへの通電が絶たれると着脱路28を閉じる閉位置に作動するようになっている。真空破壊弁25には圧縮空気の流量を調整するための可変しぼり29が設けられている。   The vacuum supply valve 23 is an open / close valve that opens and closes the flow path by the solenoid 23a. When the solenoid 23a is energized, the vacuum supply valve 23 is operated to an open position that allows the attachment / detachment path 28 to communicate with the negative pressure source 24, and the solenoid 23a is de-energized. If it is, it will operate to the closed position which closes attachment / detachment path 28. Similarly, the vacuum breaker valve 25 is an open / close valve that opens and closes the flow path by a solenoid 25a. When the solenoid 25a is energized, the vacuum breaker valve 25 operates to an open position that allows the attachment / detachment path 28 to communicate with the positive pressure source 26. When energization is cut off, it operates in a closed position for closing the attachment / detachment path 28. The vacuum breaker valve 25 is provided with a variable throttle 29 for adjusting the flow rate of the compressed air.

この吸着搬送装置11には、制御プログラム、演算式およびマップデータなどが格納されるROMや一時的にデータを格納するRAMなどのメモリと各種制御信号を演算する図示しないマイクロプロセッサとを有する装置コントローラ30が設けられている。装置コントローラ30には、電磁弁18や各弁23,25のソレノイド23a,25aおよび搬送ヘッド15を駆動する電動モータが接続されており、これらの部材の動作は装置コントローラ30により制御されている。   The suction conveyance device 11 includes a device controller having a memory such as a ROM for storing a control program, arithmetic expressions, map data, and a RAM for temporarily storing data, and a microprocessor (not shown) for calculating various control signals. 30 is provided. The device controller 30 is connected to the electromagnetic valve 18, solenoids 23 a and 25 a of the valves 23 and 25, and an electric motor that drives the transport head 15, and the operation of these members is controlled by the device controller 30.

着脱路28には、外部から着脱路28内に流れ込む単位時間当たりの空気の流量L(l/min)を検出するための流量センサ31が接続されている。この流量センサ31は通信ケーブル32を介してセンサコントローラ33に電気的に接続され、流量センサ31により検出された流量Lに対応する電圧値がセンサコントローラ33に検出信号として伝達されるようになっており、センサコントローラ33は吸着検出手段を構成している。   A flow rate sensor 31 for detecting a flow rate L (l / min) of air per unit time flowing into the attachment / detachment passage 28 from the outside is connected to the attachment / detachment passage 28. The flow rate sensor 31 is electrically connected to the sensor controller 33 via the communication cable 32, and a voltage value corresponding to the flow rate L detected by the flow rate sensor 31 is transmitted to the sensor controller 33 as a detection signal. The sensor controller 33 constitutes a suction detection means.

図3は吸着具13にワークが吸着されて搬送される際に流量センサ31により検出される着脱路内の流量変化の一例を示すタイムチャートである。ワークを吸着する際には、まず真空供給弁23を作動させて脱着路28に負圧源24からの負圧空気を供給すると、吸着具13の真空吸引口22から空気流路20内に流入する負圧空気の流量は図3においてA点からB点、C点を経てD点にまで流量が上昇する。D点は吸着具13にワークが吸着されていない空吸い状態のもとで吸着具13内を流れる空吸い流量値Lを示す。G点はワークが吸着具13に吸着された状態のもとでワークと吸着具13の接触面21との間から吸着具13内に流入する所定の空気流量、つまり吸入時流量値であって、F点は吸着具13にワークが吸着された状態を判定するための吸着判定上限値LONを示す。C点は吸着判定上限値LON対して所定のヒステリシス幅Hを加えた値であり、センサコントローラ33の内部のフラグを1にセットするための上限値LONHを示す。B点は後述する吸着レンジの離脱判定下限値LOFFを示す。I点は離脱判定下限値LOFFから所定のヒステリシス幅Hを差し引いた下限値LOFFHであり、ワークが吸着具13に吸着された状態のもとで真空供給弁23を閉じて吸着具13に対する負圧供給を停止することにより吸着具13内に流入する所定の空気流量であって、吸着具13からワークが離脱した状態を判定するための下限値LOFFHを示す。なお、ヒステリシス幅Hをゼロにして、吸着判定上限値LONと上限値LONHとを同一の値とし、離脱判定下限値LOFFと下限値LOFFHとを同一の値としても良い。図3に示されるように、上記吸着判定上限値L ON は、吸込流量値LPと上記吸入時流量値との間の値であり、上記離脱判定下限値L OFF は、上記吸入時流量値よりも少ない流量である。
FIG. 3 is a time chart showing an example of a change in the flow rate in the attachment / detachment path detected by the flow rate sensor 31 when the workpiece is sucked and conveyed by the suction tool 13. When adsorbing a workpiece, first, when the vacuum supply valve 23 is operated to supply the negative pressure air from the negative pressure source 24 to the desorption path 28, it flows into the air flow path 20 from the vacuum suction port 22 of the suction tool 13. In FIG. 3, the flow rate of the negative pressure air increases from point A to point D through point B and point C. Point D shows the empty sucking flow rate value L p flowing through the suction device 13 under air sucking state workpiece suction device 13 is not adsorbed. Point G is a predetermined air flow rate that flows into the suction tool 13 from between the workpiece and the contact surface 21 of the suction tool 13 in a state where the work is sucked by the suction tool 13 , that is, a flow rate value at the time of suction. , F indicates the suction determination upper limit L ON for determining the state in which the workpiece is sucked by the suction tool 13. Point C is a value obtained by adding a predetermined hysteresis width H to the suction determination upper limit value L ON , and indicates an upper limit value L ONH for setting the internal flag of the sensor controller 33 to 1. Point B indicates a lowering determination lower limit L OFF of the suction range described later. Point I is a lower limit value L OFFH obtained by subtracting a predetermined hysteresis width H from the detachment determination lower limit value L OFF , and the vacuum supply valve 23 is closed with the workpiece adsorbed to the adsorbing tool 13 to the adsorbing tool 13. This is a predetermined air flow rate that flows into the suction tool 13 by stopping the negative pressure supply, and indicates a lower limit value L OFFH for determining a state in which the workpiece is detached from the suction tool 13. Note that the hysteresis width H may be zero, the suction determination upper limit value L ON and the upper limit value L ONH may be the same value, and the separation determination lower limit value L OFF and the lower limit value L OFFH may be the same value. As shown in FIG. 3, the adsorption determination upper limit value L ON is a value between the suction flow rate value LP and the suction flow rate value, and the separation determination lower limit value L OFF is greater than the suction flow rate value. The flow rate is small.

センサコントローラ33にはマイクロプロセッサとともにROMやRAMなどのメモリが設けられており、これらのメモリには上限値LONや上限値LONHおよび下限値LOFFや下限値LOFFHが格納されており、流量センサ31からの検出信号に基づいて吸着具13に対するワークの吸着と離脱などを判定する。ただし、装置コントローラ30のメモリ内に上限値LONや上限値LONHおよび下限値LOFFや下限値LOFFHのデータを格納するようにし、流量センサ31からの信号を直接装置コントローラ30に送るようにしても良く、その場合には装置コントローラ30は吸着検出手段を構成することになる。 The sensor controller 33 is provided with a memory such as a ROM and a RAM together with a microprocessor, and the upper limit value L ON , the upper limit value L ONH, the lower limit value L OFF and the lower limit value L OFFH are stored in these memories. Based on the detection signal from the flow sensor 31, it is determined whether the workpiece is attracted or detached from the suction tool 13. However, the data of the upper limit value L ON , the upper limit value L ONH, the lower limit value L OFF, and the lower limit value L OFFH are stored in the memory of the device controller 30, and the signal from the flow sensor 31 is sent directly to the device controller 30. In this case, the apparatus controller 30 constitutes a suction detection unit.

ワークを吸着搬送する際には、まず、空吸い状態のもとで吸着具13に負圧空気を供給すると、図3においてA点から下限値LOFFおよび上限値LONHを通過してD点まで負圧空気の流量が上昇する。上限値LONHを通過すると、センサコントローラ33の内部のフラグが1にセットされることになるが、このフラグF=1を前提として、吸着具13をワークに接近させてワークが吸着具13に接触することによりF点で示すように流量センサ31により負圧流量が上限値LON以下となったときにワークが吸着具13に吸着されたと判定する。吸着が判定された後に搬送ヘッド15を移動させることによりワークは吸着具13により吸着保持された状態で搬送位置まで搬送され、搬送過程では吸着具13内に流入する負圧空気はG点とH点の間の流量となる。 When the workpiece is sucked and conveyed, first, when negative pressure air is supplied to the suction tool 13 in the idle suction state, the point D passes from the point A to the lower limit value L OFF and the upper limit value L ONH in FIG. The flow rate of negative pressure air rises. When the upper limit value L ONH is passed, the internal flag of the sensor controller 33 is set to 1. On the premise of this flag F = 1, the suction tool 13 is brought close to the work and the work is brought to the suction tool 13. determining a work when a negative pressure flow is equal to or less than the upper limit value L oN by the flow rate sensor 31 as indicated by the point F is attracted to the suction device 13 by contact. By moving the transport head 15 after the suction is determined, the work is transported to the transport position while being sucked and held by the suction tool 13, and the negative pressure air flowing into the suction tool 13 is transferred to the G point and the H in the transport process. The flow rate between points.

搬送が終了して、真空供給弁23により脱着路28に対する負圧空気の供給を停止すると、図3においてH点からJ点に向けて吸着具13内に流入する負圧空気の流量は徐々に低下し、流量センサ31からの検出信号が下限値LOFFHまで低下したときにワークの離脱が判定される。 When the conveyance is finished and the supply of the negative pressure air to the desorption path 28 is stopped by the vacuum supply valve 23, the flow rate of the negative pressure air flowing into the adsorber 13 from the point H to the point J in FIG. When the detection signal from the flow sensor 31 decreases to the lower limit L OFFH, it is determined that the workpiece is detached.

次に、図1を参照して吸着搬送装置11により部品供給ステージ12上のワークWを実装基板14上に搬送するための手順について説明する。まず、図1(A)に示すように、ピストンロッド17が後退移動した状態で搬送ヘッド15が部品供給ステージ12上まで移動する。次いで、空気圧シリンダ16に圧縮空気を供給して、図1(B)に示すようにピストンロッド17を降下させるとともに、真空供給弁23を開いて着脱路28に負圧を供給し、接触面21がワークWに接触したときにワークWが負圧により吸着具13に吸着されるようにする。   Next, a procedure for conveying the workpiece W on the component supply stage 12 onto the mounting substrate 14 by the suction conveyance device 11 will be described with reference to FIG. First, as shown in FIG. 1A, the transport head 15 moves up onto the component supply stage 12 with the piston rod 17 moving backward. Next, compressed air is supplied to the pneumatic cylinder 16 to lower the piston rod 17 as shown in FIG. 1 (B), and the vacuum supply valve 23 is opened to supply negative pressure to the attachment / detachment path 28, and the contact surface 21. When the workpiece W comes into contact with the workpiece W, the workpiece W is attracted to the suction tool 13 by a negative pressure.

ワークW吸着後、図1(C)に示すように、空気圧シリンダ16のピストンロッド17が後退移動した後に、搬送ヘッド15が実装基板14に向けて水平移動する。図1(D)に示すように、搬送ヘッド15が実装基板14上のワーク搭載位置まで移動すると、ピストンロッド17が前進移動してワークWが実装基板14上に配置される。ワークWを実装基板14上に配置する際には、真空吸引口22に対する負圧の供給を停止するとともに真空破壊弁25を開いて正圧空気を供給すると、負圧状態が急速に破壊されワークWを確実かつ迅速に離脱させることができる。ワークWの離脱が完了した後、図1(E)に示すように、ピストンロッド17を上昇移動させたところで一連のワークWの搬送手順が終了し、搬送ヘッド15は次のワークWを搬送すべく再び部品供給ステージ12に向けて移動する。   After the workpiece W is attracted, as shown in FIG. 1C, after the piston rod 17 of the pneumatic cylinder 16 moves backward, the transport head 15 moves horizontally toward the mounting substrate 14. As shown in FIG. 1D, when the transport head 15 moves to the workpiece mounting position on the mounting substrate 14, the piston rod 17 moves forward and the workpiece W is disposed on the mounting substrate 14. When the workpiece W is placed on the mounting substrate 14, when the supply of negative pressure to the vacuum suction port 22 is stopped and the vacuum break valve 25 is opened to supply positive pressure air, the negative pressure state is rapidly broken and the workpiece is W can be reliably and quickly separated. After the separation of the workpiece W is completed, as shown in FIG. 1E, when the piston rod 17 is moved upward, the series of workpiece W conveyance procedures is completed, and the conveyance head 15 conveys the next workpiece W. It moves again toward the component supply stage 12 as much as possible.

図1(A)に示すように、搬送ヘッド15を部品供給ステージ12上まで移動させている間は、真空供給弁23と真空破壊弁25は共に閉じられており、流量LはJ点からA点に示されるようにほぼゼロとなっている。次いで、図1(B)に示すように、ピストンロッド17を降下させるとともに真空供給弁23を開いて着脱路28に負圧を供給すると、着脱路28内には次第に外気が取り込まれて流量Lが空吸い流量値Lまで増加する(A点〜D点間)。 As shown in FIG. 1A, the vacuum supply valve 23 and the vacuum breaker valve 25 are both closed while the transfer head 15 is moved to the part supply stage 12, and the flow rate L is determined from the point J to the point A. As indicated by the dot, it is almost zero. Next, as shown in FIG. 1B, when the piston rod 17 is lowered and the vacuum supply valve 23 is opened to supply negative pressure to the attachment / detachment passage 28, outside air is gradually taken into the attachment / detachment passage 28 and the flow rate L is increased. There is increased until air sucking flow rate value L P (between point A ~D point).

空吸い流量値Lを維持した状態(D点〜E点間)で接触面21がワークWに接触すると負圧によりワークWが吸着具13に吸着され、真空吸引口22が塞がれることによって着脱路28内に取り込まれる流量Lが急激に減少するが(E点〜G点間)、ワークWと真空吸引口22との間に形成される隙間から外気が流入するので漏れ分を考慮した流量に相当するG点に達するとそのまま平衡状態に移行する。搬送ヘッド15の移動中(図1(C)参照)においては、流量Lはほぼ一定となっており(G点〜H点間)、搬送ヘッド15が実装基板14の定位置に移動した後(図1(D)参照)、真空供給弁23を閉じることによって、流量Lが減少するとともに(H点〜J点間)、ワークWが吸着具13から離脱する。 Check Sucking flow rate value L P workpiece by negative pressure when the contact surface 21 contacts the workpiece W in the state of maintaining (between point D ~E point) W is sucked by the suction tool 13, the vacuum suction port 22 is closed As a result, the flow rate L taken into the attachment / detachment path 28 decreases rapidly (between points E and G), but since the outside air flows in through the gap formed between the workpiece W and the vacuum suction port 22, the amount of leakage is taken into consideration. When the point G corresponding to the flow rate is reached, the state shifts to the equilibrium state as it is. While the transport head 15 is moving (see FIG. 1C), the flow rate L is substantially constant (between points G and H), and after the transport head 15 has moved to a fixed position on the mounting substrate 14 ( By closing the vacuum supply valve 23, the flow rate L decreases (between the H point and the J point), and the work W is detached from the suction tool 13.

真空破壊弁25を開いて圧縮空気を供給すると着脱路28内の空気が逆流するので外部から着脱路28内に流れ込む流量Lが急速に減少する(H点〜J点間)。図1(E)に示すように、ワークWの離脱が完了した後、搬送ヘッド15を再び部品供給ステージ12に移動させる間は、真空供給弁23と真空破壊弁25は共に閉じられており、流量Lはほぼゼロとなっている(J点〜A点間)。   When the vacuum break valve 25 is opened and compressed air is supplied, the air in the attachment / detachment path 28 flows backward, so that the flow rate L flowing into the attachment / detachment path 28 from the outside rapidly decreases (between points H and J). As shown in FIG. 1E, the vacuum supply valve 23 and the vacuum breaker valve 25 are both closed while the transfer head 15 is moved again to the component supply stage 12 after the workpiece W has been detached. The flow rate L is almost zero (between points J and A).

図3において上限値LONと下限値LOFFの間の流量値は、吸着具13にワークが吸着されている状態の吸着レンジであり、吸着レンジの上限値LONとしてはワークWを吸着しているときの流量G〜Hより大きな値が設定され、最小値LOFFとしては流量G〜Hより小さな値が設定されるが、これらの値は予め実験などに基づいて決定される。 In FIG. 3, the flow rate value between the upper limit value L ON and the lower limit value L OFF is the suction range in a state where the work is sucked by the suction tool 13, and the work W is sucked as the upper limit value L ON of the suction range. A value larger than the flow rates G to H is set, and a value smaller than the flow rates G to H is set as the minimum value L OFF , but these values are determined in advance based on experiments or the like.

センサコントローラ33は、装置コントローラ30からの指令を受けてワークWの吸着および離脱判定を行い、ワークWの吸着を判定したときには吸着検出信号を出力つまりON状態とし、ワークWの離脱を判定したときには吸着検出信号の出力を停止つまりOFF状態とするようになっている。   The sensor controller 33 receives an instruction from the device controller 30 and performs suction / detachment determination of the workpiece W. When the suction of the workpiece W is determined, the sensor controller 33 outputs a suction detection signal, that is, an ON state. The output of the suction detection signal is stopped, that is, turned off.

図4はワークの吸着および離脱検出のアルゴリズムを示すフローチャートである。図4に示すルーティンはセンサコントローラ33により所定の間隔で繰り返し実行される。   FIG. 4 is a flowchart showing an algorithm for workpiece adsorption and separation detection. The routine shown in FIG. 4 is repeatedly executed by the sensor controller 33 at predetermined intervals.

次に、図4に示すルーティンを図3に示すタイムチャートに関連付けて説明すると、まず、ステップS1において、流量センサ31を用いて現在の流量Lを検出するとともに、ステップS2において、吸着検出信号を読み取る。吸着検出信号はセンサコントローラ33から装置コントローラ30へ出力されるとともに、センサコントローラ33の内部信号(フラグ)として用いられる。続く、ステップS3において、吸着検出信号がOFF状態と判定されるとステップS4に進み、ON状態と判定されるとステップS10に進む。たとえば、ワークWの搬送を終えた搬送ヘッド15が実装基板14から部品供給ステージ12に移動する間(J点〜A点間)や負圧の供給開始から吸着直後(A点〜F点間)では吸着検出信号がOFF状態となっており、ステップS4に進むことになる。他方、後述する方法によりワークWの吸着が判定されている間(F点〜I点間)では吸着検出信号がON状態となっており、ステップS10に進むことになる。   Next, the routine shown in FIG. 4 will be described in relation to the time chart shown in FIG. 3. First, in step S1, the flow rate sensor 31 is used to detect the current flow rate L, and in step S2, an adsorption detection signal is output. read. The suction detection signal is output from the sensor controller 33 to the apparatus controller 30 and used as an internal signal (flag) of the sensor controller 33. In step S3, if the suction detection signal is determined to be in the OFF state, the process proceeds to step S4. If it is determined to be in the ON state, the process proceeds to step S10. For example, while the transport head 15 that has finished transporting the workpiece W moves from the mounting substrate 14 to the component supply stage 12 (between points J and A), or immediately after the supply of negative pressure starts (between points A and F). Then, the suction detection signal is in the OFF state, and the process proceeds to step S4. On the other hand, while the suction of the workpiece W is determined by the method described later (between points F and I), the suction detection signal is in the ON state, and the process proceeds to step S10.

ステップS4では、現在の流量Lと上限値LONHとの比較が行われ、流量Lが上限値LONH以上と判定されるとステップS5に進んでフラグFが設定される(F=1)。一方、流量Lが上限値LONH未満と判定されるとともに続くステップS6において下限値LOFFH以上と判定されたとき、即ち流量Lが吸着レンジの範囲内に含まれているものと判定されたときにはステップS7に進む。ステップS7ではフラグ設定信号に基づいてフラグFが設定されている(F=1)か否かの判定が行われ、フラグFが設定されている(F=1)と判定された場合にのみ吸着検出信号が出力されるようになっている(ステップS8)。その他、ステップS6において流量Lが下限値LOFFH未満であると判定されたときには、フラグFの設定は解除状態(F=0)のまま保持されることになる(ステップS9)。 In step S4, the current flow rate L is compared with the upper limit value L ONH. If it is determined that the flow rate L is equal to or higher than the upper limit value L ONH , the process proceeds to step S5 and the flag F is set (F = 1). On the other hand, when it is determined that the flow rate L is less than the upper limit value L ONH and it is determined that the flow rate L is greater than or equal to the lower limit value L OFFH in the subsequent step S6, that is, when it is determined that the flow rate L is included in the suction range. Proceed to step S7. In step S7, it is determined whether or not the flag F is set (F = 1) based on the flag setting signal, and the suction is performed only when it is determined that the flag F is set (F = 1). A detection signal is output (step S8). In addition, when it is determined in step S6 that the flow rate L is less than the lower limit L OFFH , the setting of the flag F is held in the released state (F = 0) (step S9).

例えば、空吸い流量値Lに到達しているときなど流量Lが上限値LONH以上となっているとき(C点〜F点間)には、ステップS5に進んでフラグFが設定される(F=1)ことになる。他方、流量LがLOFFH以上LON未満であるとき(B点〜C点間およびF点〜I点間)には、ステップS7に進み、フラグFが設定されているとき(F点〜I点間)のみ吸着検出信号が出力されるようになっている(ステップS8)。その他、搬送ヘッド15が部品供給ステージ12に引き返す間(I点〜A点間)や負圧供給直後(A点〜B点間)においては、流量Lが下限値LOFF未満であることから、フラグFの設定は解除状態(F=0)のまま保持されることになる(ステップS9)。 For example, the (inter point C ~F point) when the flow rate L is in the upper limit value L ONH or the like while reaches the air sucking flow rate value L P, the flag F is set the routine proceeds to step S5 (F = 1). On the other hand, when the flow rate L is less than L OFFH than L ON to (between B H point -C H point and between point F ~I point), the process proceeds to step S7, when the flag F is set (F point The suction detection signal is output only between the points ~ I) (step S8). In addition, since the flow rate L is less than the lower limit L OFF during the time when the transport head 15 returns to the component supply stage 12 (between point I and point A) or immediately after negative pressure supply (between points A and B), The setting of the flag F is held in the released state (F = 0) (step S9).

このように、流量LがLOFFH以上LON未満の場合であってもフラグFの設定が解除されている場合(F=0)には吸着検出信号は出力されないので、例えば、流量Lが空吸い流量値Lに至るまでの間(A点〜D点間)に吸着レンジ内を通過する(B点〜C点間)ことがあっても、ワークWの吸着が誤って検出されることがない。一方、流量Lが一旦上限値LONH以上(C点〜F点間)となってフラグFが設定された後、吸着具13にワークWが吸着されることにより流量Lが下がり、流量LがLOFFH以上LON未満となった場合(F点〜I点間)には、ステップS8に進み吸着検出信号が出力されることになる。 As described above, even when the flow rate L is equal to or higher than L OFFH and lower than L ON , the suction detection signal is not output when the setting of the flag F is canceled (F = 0). even if until reaching the smoke flow rate value L P passes through the suction-range to (between point a ~D point) (between point B ~C point), the adsorption of the workpiece W is detected erroneously There is no. On the other hand, after the flow rate L is once higher than the upper limit value L ONH (between points C and F) and the flag F is set, the work flow W is attracted to the suction tool 13, and the flow rate L is reduced. If L OFFH or more and less than L ON (between point F and point I), the process proceeds to step S8, and an adsorption detection signal is output.

ステップS10では現在の流量Lと上限値LONとの比較が行われ、流量Lが上限値LON未満と判定されるとともに続くステップS11において流量Lが下限値LOFFH以下と判定されたときにはステップS12に進んで吸着検出信号の出力が停止されるとともに、ステップS13においてフラグFの設定が解除される(F=0)。一方、ステップS10において流量Lが上限値LON未満と判定されステップS11において下限値LOFFH以上と判定されたときには、吸着検出信号をON状態のままフラグFを設定状態のまま維持し終了することになる。 Comparison with the step S10 the current flow L and the upper limit value L ON is performed, step when the flow rate L is less than or equal to the lower limit value L OFFH in step S11 that follows with the flow rate L is determined to less than the upper limit value L ON In S12, the output of the suction detection signal is stopped and the setting of the flag F is canceled in Step S13 (F = 0). On the other hand, if it is determined in step S10 that the flow rate L is less than the upper limit value L ON and it is determined in step S11 that it is greater than or equal to the lower limit value L OFFH, the flag F is maintained in the set state while the suction detection signal is ON, and the process ends. become.

例えば、ワークWの吸着搬送中(G点〜H点間)ではステップS11からルーティンを抜けることにより吸着検出信号はON状態のまま維持されるが、ワークWが実装基板14上の定位置に搬送され負圧の供給が停止されると流量Lが下限値LOFFH以下となるので、ステップS11からステップS12に進み、吸着検出信号がOFF状態つまり吸着検出信号の出力が停止されるとともに、フラグFの設定が解除される(ステップS13)。これにより、ワークWの離脱を確実に検出することができるとともに、次のワークWを搬送するために搬送ヘッド15が部品供給ステージ12に移動し負圧の供給を開始して流量Lが上限値LONH以上となるまでの間(J点〜C点間)で、ワークWの吸着が誤って検出されることがない。なお、ステップS14において吸着検出信号の出力が停止された後のフラグFは設定された状態(F=1)で保持される(ステップS15)。 For example, while the workpiece W is being sucked and transported (between points G and H), the suction detection signal is maintained in the ON state by exiting the routine from step S11, but the workpiece W is transported to a fixed position on the mounting substrate 14. When the supply of negative pressure is stopped, the flow rate L becomes equal to or lower than the lower limit L OFFH , so the process proceeds from step S11 to step S12, the suction detection signal is OFF, that is, the output of the suction detection signal is stopped, and the flag F Is canceled (step S13). Thereby, the separation of the workpiece W can be reliably detected, and the conveyance head 15 moves to the component supply stage 12 to convey the next workpiece W and starts supplying negative pressure, so that the flow rate L is the upper limit value. The adsorption of the workpiece W is not erroneously detected until it becomes L ONH or more (between points J and C). The flag F after the output of the suction detection signal is stopped in step S14 is held in the set state (F = 1) (step S15).

他方、ステップS10において、流量Lが上限値LON以上と判定されるとステップS14に進んで吸着検出信号の出力を停止する。たとえば、ワークWの搬送中にワークWが吸着具13から脱落した場合には吸着具13が空吸い状態となって流量Lが吸着レンジの上限値LONを越えてしまうことになるが、この場合にはステップ14に進んで吸着検出信号の出力が停止される。このように、搬送ヘッド15が定位置に到達し負圧の供給が停止される前に、吸着検出信号の出力が停止された場合にはワークWが意図しない位置で脱落したものと判定するようにしているので、定位置におけるワークWの離脱と搬送中におけるワークWの脱落とを判別して検出することができる。 On the other hand, in step S10, stops the output of the suction detection signal advances the flow rate L is determined that more than the upper limit value L ON in step S14. For example, when the workpiece W falls off from the suction tool 13 during the transfer of the workpiece W, the suction tool 13 is in the idle suction state, and the flow rate L exceeds the upper limit value L ON of the suction range. In that case, the routine proceeds to step 14 where the output of the adsorption detection signal is stopped. As described above, when the output of the suction detection signal is stopped before the conveyance head 15 reaches the fixed position and the supply of the negative pressure is stopped, it is determined that the workpiece W has dropped at an unintended position. Therefore, the separation of the workpiece W at the fixed position and the removal of the workpiece W during the conveyance can be determined and detected.

図4に示すルーティンはセンサコントローラ33により所定の間隔で繰り返し実行され、図中Aで示すように、エンドに至ると再びスタートから実行される。   The routine shown in FIG. 4 is repeatedly executed at predetermined intervals by the sensor controller 33, and is again executed from the start when reaching the end, as indicated by A in the figure.

図5は本発明の他の実施の形態である吸着検出装置が装着された吸着搬送装置を示す説明図である。この吸着搬送装置35は、複数の吸着具13が共通の負圧源24に接続されており、一度の搬送移動で複数のワークWを吸着搬送することができる。なお、図5において、図2に示される部材と共通する部材には同一の符号を付して重複した説明を省略する。   FIG. 5 is an explanatory view showing a suction conveyance device equipped with a suction detection device according to another embodiment of the present invention. In the suction conveyance device 35, a plurality of suction tools 13 are connected to a common negative pressure source 24, and a plurality of workpieces W can be sucked and conveyed by a single conveyance movement. In FIG. 5, members that are the same as those shown in FIG. 2 are assigned the same reference numerals, and redundant descriptions are omitted.

搬送ヘッド15には、共通の負圧源24に接続される連通流路27aと、その連通流路27aから分岐する4つの空気流路20とが形成された吸着ユニット36が固定されており、空気流路20と連通流路27aとにより着脱路28aが構成されている。この吸着ユニット36には、空気流路20のそれぞれの開口部に対応させて吸着具13が接続されており、更にそれぞれの空気流路20には外部から空気流路20内に流れ込む流量Lを検出する流量センサ31が取り付けられている。また、空気流路20のそれぞれには装置コントローラ30からの制御信号を受信して流路を開閉する開閉弁37が取り付けられており、開閉弁37が開かれた空気流路20内には外気が取り込まれ流量Lが発生するようになっている。このように共通の負圧源24から複数の空気流路20を介して複数の吸着具13に負圧空気を供給するようにすると、いずれかの吸着具13におけるワークの吸着または離脱によって他の吸着具13における流量が影響を受けて吸着具に対する流量変化が発生することがある。そこで、上限値LONを空吸い流量値Lから所定の吸着判定補正値ΔLを差し引いて上限値LONを補正するようにしている。
An adsorption unit 36 in which a communication channel 27a connected to a common negative pressure source 24 and four air channels 20 branched from the communication channel 27a are formed is fixed to the transport head 15. The air flow path 20 and the communication flow path 27a constitute a detachable path 28a. The adsorption unit 13 is connected to the adsorption unit 36 so as to correspond to each opening of the air flow path 20, and each air flow path 20 has a flow rate L flowing into the air flow path 20 from the outside. A flow sensor 31 for detection is attached. Each of the air flow paths 20 is provided with an open / close valve 37 that receives a control signal from the device controller 30 and opens / closes the flow path, and outside air is opened in the air flow path 20 in which the open / close valve 37 is opened. Is taken in and a flow rate L is generated. When negative pressure air is supplied from the common negative pressure source 24 to the plurality of suction tools 13 through the plurality of air flow paths 20 in this way, the other suction or detachment of the workpiece in any of the suction tools 13 causes another A flow rate change with respect to the suction tool may occur due to the influence of the flow rate in the suction tool 13. Therefore, and corrects the upper limit value L ON the upper limit value L ON from the air sucking flow value L P by subtracting the predetermined adsorption determination correction value [Delta] L.

吸着判定補正値ΔLとしてはワークWの吸着前後での変化量よりも小さい値が設定されるが、この値も予め実験などに基づいて決定される。吸着搬送装置35の作動時には、吸着判定補正値ΔLは装置コントローラ30からセンサコントローラ33に送られる信号により自動的に設定するようにしても良く、センサコントローラ33に設けられた図示しないキーやダイヤルを操作することにより設定および変更することもできる。
The suction determination correction value ΔL is set to a value smaller than the amount of change before and after the workpiece W is sucked. This value is also determined in advance based on experiments or the like. During the operation of the suction conveyance device 35, the suction determination correction value ΔL may be automatically set by a signal sent from the device controller 30 to the sensor controller 33, and a key or dial (not shown) provided on the sensor controller 33 may be set. It can also be set and changed by operation.

図6は図1に示す搬送手順に従って図5に示す吸着搬送装置によりワークを搬送したときに流量センサにより検出される空気流路内の流量変化を示すタイムチャートの一例である。   FIG. 6 is an example of a time chart showing the flow rate change in the air flow path detected by the flow rate sensor when the workpiece is conveyed by the suction conveyance device shown in FIG. 5 according to the conveyance procedure shown in FIG.

図5に示す吸着搬送装置35にあっては、搬送移動させたいワークWの数に対応させて開閉弁37を開閉し空気流路20内に負圧を供給する必要があるが、一部の開閉弁37の開閉操作によって外部に連通する流路面積が変化してしまうので、空気流路20のそれぞれに流れ込む流量Lが変化してしまう。例えば、いずれか1つの開閉弁37しか開いていない場合には、図中一点鎖線で示すように、その開閉弁37が開かれている空気流路20内を流れる流量Lは多くなる。これに対し、複数の開閉弁37が開いていると複数の吸着具13を介して着脱路28a内に外気が流入してしまうため、空吸い流量値Lは図中実線で示すD点やE点に相当する流量までしか上昇しない。この場合、ワークWを吸着させることができる流量Lは、一点鎖線で示したように流量が多い場合における上限値LON 以上に到達しないので、吸着準備を行うことができない。つまり図4に示すフローチャートにおいてはフラグFを設定することができず、ワークWの吸着を検出することができない。 In the suction conveyance device 35 shown in FIG. 5, it is necessary to open and close the open / close valve 37 and supply negative pressure into the air flow path 20 in accordance with the number of workpieces W to be conveyed and moved. Since the channel area communicating with the outside is changed by the opening / closing operation of the opening / closing valve 37, the flow rate L flowing into each of the air channels 20 is changed. For example, when only one of the on-off valves 37 is open, the flow rate L flowing through the air flow path 20 in which the on-off valve 37 is open increases as shown by the one-dot chain line in the figure. In contrast, since the plurality of the on-off valve 37 is opened outside air into a plurality of suckers 13 in release passage 28a through the ends up flowing, air sucking flow rate value L P is Ya D point shown by the solid line in FIG It rises only to the flow rate corresponding to point E. In this case, the flow rate L at which the workpiece W can be adsorbed does not reach the upper limit value L ON * when the flow rate is large as indicated by the alternate long and short dash line, and therefore preparation for adsorption cannot be performed. That is, in the flowchart shown in FIG. 4, the flag F cannot be set, and the suction of the workpiece W cannot be detected.

このような場合には、装置コントローラ30からセンサコントローラ33に補正信号つまり基準流量検出信号を送信することによって、新たな上限値LONおよび上限値LONHを設定するようにしている。すなわち、センサコントローラ33が基準流量検出信号を受信すると(X点)、受信時の流量Lを基準流量Lとして検出するとともに、新たな上限値LONとして基準流量Lから吸着判定補正値ΔLを差し引いた値を設定するようになっており、上限値LONにヒステリシス幅Hを加えて上限値LONHが設定され、更に、基準流量検出信号を受信した時点(X点)でフラグFが設定される(F=1)ようになっている。基準流量検出信号は、ワークWに対して吸着具13が接近したとき、即ちワークWの吸着直前に出力される。
In such a case, a new upper limit value L ON and upper limit value L ONH are set by transmitting a correction signal, that is, a reference flow rate detection signal from the device controller 30 to the sensor controller 33. That is, when the sensor controller 33 receives a reference flow rate detection signal (X point), and detects the flow rate L as reference flow rate L S during reception, the reference flow rate L S from the adsorption determination correction value ΔL as a new upper limit value L ON Is set, the hysteresis width H is added to the upper limit value L ON to set the upper limit value L ONH , and the flag F is set when the reference flow rate detection signal is received (point X). It is set (F = 1). The reference flow rate detection signal is output when the suction tool 13 approaches the work W, that is, immediately before the work W is sucked.

このように基準流量検出信号をセンサコントローラ33が受信して新たな吸着レンジの上限値LON、上限値LONHおよびフラグFを設定した後は、フラグFが設定された状態のもとで流量Lが上限値LON以下となったときにワークWの吸着を判定するようになっている。例えば、負圧の供給直後からワークWの吸着直前までの間(A点〜X点間)においては、フラグFの設定が解除されている(F=0)ので、吸着検出信号がON状態となることはない。そして、基準流量検出信号受信後(X点)ではフラグFが設定される(F=1)ことから、流量Lが基準流量Lsから吸着判定補正値ΔLを引いた値より下がると吸着検出信号が出力される。
After the sensor controller 33 receives the reference flow rate detection signal and sets the upper limit value L ON , the upper limit value L ONH and the flag F of the new suction range, the flow rate is set under the state where the flag F is set. The suction of the workpiece W is determined when L becomes equal to or less than the upper limit value L ON . For example, since the setting of the flag F is canceled (F = 0) immediately after the negative pressure is supplied and immediately before the workpiece W is sucked (between points A and X), the suction detection signal is in the ON state. Never become. Since the flag F is set after receiving the reference flow rate detection signal (point X) (F = 1), the suction detection signal is generated when the flow rate L falls below the value obtained by subtracting the suction determination correction value ΔL from the reference flow rate Ls. Is output.

次いで、フラグFが設定された状態(F=1)で流量Lが下限値LOFFH以下となったときにワークWの離脱が判定されるとともにフラグFの設定が解除され、更に、フラグFの設定が解除されたとき(F=0)には上限値LONHが到達不可値Lに設定されるようになっている。このように、基準流量検出信号を受信するまでは上限値LONHを到達不可値Lに維持することにより、ワークWの搬送終了後に内径の異なる他の吸着具13に交換した場合や他の開閉弁37を開閉操作して流量Lが増加することがあった場合に、ワークWの吸着を誤って検出することがない。また、ワークWの吸着直前に基準流量Lを読み込み、上限値LONを設定するようにしているので、他の開閉弁37の開閉操作の影響を最小にして吸着検出を行うことができる。 Next, when the flow rate L becomes lower than the lower limit value L OFFH with the flag F set (F = 1), it is determined that the workpiece W has been detached, and the setting of the flag F is released. When the setting is released (F = 0), the upper limit value L ONH is set to the unreachable value L U. As described above, the upper limit value L ONH is maintained at the unreachable value L U until the reference flow rate detection signal is received. When the on-off valve 37 is opened / closed to increase the flow rate L, the suction of the workpiece W is not erroneously detected. Further, reads the reference flow L S immediately before the adsorption of the work W, since the to set the upper limit value L ON, the effect of opening and closing the other on-off valve 37 can be performed adsorbed detection with minimal.

この到達不可値Lとしては吸着具13の交換により着脱路28の流路面積が変わるなど種々の条件が変化した場合でも着脱路28内の流量Lが到達できない程度の高い値が設定される。 As the unreachable value L U , a high value is set such that the flow rate L in the attachment / detachment path 28 cannot reach even when various conditions such as the flow path area of the attachment / detachment path 28 change due to the replacement of the suction tool 13. .

本発明は前記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることはいうまでもない。たとえば、前記実施の形態においては、部品供給ステージ12から実装基板14へワークWを搬送する場合に適用されているが、実装基板14に換えて検査ボードにワークWを搬送する場合など他の用途に適用してもよい。実装基板14上のワークW搭載位置において、ワークWをその自重により自然落下させるようにしても良く、この場合には正圧源26、真空破壊弁25、および可変しぼり29の接続を省略することができる。また、空気圧シリンダ16は電動シリンダでも良い。更に、ワークWは電子部品に限らず、スポンジや多孔質材の場合にも好適である。   It goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention. For example, in the above-described embodiment, the present invention is applied when the workpiece W is transferred from the component supply stage 12 to the mounting board 14, but other uses such as when the workpiece W is transferred to the inspection board instead of the mounting board 14. You may apply to. The work W may be naturally dropped by its own weight at the work W mounting position on the mounting substrate 14, and in this case, the connection of the positive pressure source 26, the vacuum breaker valve 25, and the variable throttle 29 is omitted. Can do. The pneumatic cylinder 16 may be an electric cylinder. Furthermore, the workpiece W is not limited to an electronic component, and is suitable for a sponge or a porous material.

(A)〜(E)は、本発明の一実施の形態である吸着検出装置が装着された吸着搬送装置によりワークを吸着搬送する搬送手順を示す説明図ある。(A)-(E) is explanatory drawing which shows the conveyance procedure which carries out adsorption conveyance of the workpiece | work by the adsorption conveyance apparatus with which the adsorption | suction detection apparatus which is one embodiment of this invention was mounted | worn. 図1に示す吸着搬送装置の概略を示すブロック図である。It is a block diagram which shows the outline of the adsorption conveyance apparatus shown in FIG. 図1に示す搬送手順を実行したときに流量センサにより検出される着脱路内の流量変化を示すタイムチャートである。It is a time chart which shows the flow volume change in the attachment / detachment path detected by a flow sensor when the conveyance procedure shown in FIG. 1 is performed. ワークの吸着検出方法を示すフローチャートである。It is a flowchart which shows the adsorption | suction detection method of a workpiece | work. 本発明の他の実施の形態である吸着検出装置が装着された吸着搬送装置を示す説明図である。It is explanatory drawing which shows the adsorption | suction conveyance apparatus with which the adsorption | suction detection apparatus which is other embodiment of this invention was mounted | worn. 図1に示す搬送手順に従って図5に示す吸着搬送装置によりワークを搬送したときに流量センサにより検出される空気流路内の流量変化を示すタイムチャートの一例である。It is an example of the time chart which shows the flow volume change in the air flow path detected by a flow sensor when a workpiece | work is conveyed by the adsorption conveyance apparatus shown in FIG. 5 according to the conveyance procedure shown in FIG.

符号の説明Explanation of symbols

11 吸着搬送装置
12 部品供給ステージ
13 吸着具
14 実装基板
15 搬送ヘッド
16 空気圧シリンダ
17 ピストンロッド
18 電磁弁
19 正圧源
20 空気流路
21 接触面
22 真空吸引口
23 真空供給弁
23a ソレノイド
24 負圧源
25 真空破壊弁
25a ソレノイド
26 正圧源
27 連通流路
27a 連通流路
28 着脱路
28a 着脱路
29 可変しぼり
30 装置コントローラ
31 流量センサ
32 通信ケーブル
33 センサコントローラ
34 通信ケーブル
35 吸着搬送装置
36 吸着ユニット
37 開閉弁
DESCRIPTION OF SYMBOLS 11 Adsorption conveyance apparatus 12 Component supply stage 13 Adsorption tool 14 Mounting board 15 Conveyance head 16 Pneumatic cylinder 17 Piston rod 18 Electromagnetic valve 19 Positive pressure source 20 Air flow path 21 Contact surface 22 Vacuum suction port 23 Vacuum supply valve 23a Solenoid 24 Negative pressure Source 25 Vacuum break valve 25a Solenoid 26 Positive pressure source 27 Communication flow path 27a Communication flow path 28 Detachment path 28a Detachment path 29 Variable throttle 30 Device controller 31 Flow rate sensor 32 Communication cable 33 Sensor controller 34 Communication cable 35 Adsorption transport device 36 Adsorption unit 37 On-off valve

Claims (6)

吸着具と負圧源とを連通させる脱着路内を流れる負圧空気の流量を検出する流量センサを用いて前記吸着具にワークが吸着されているか否かを検出する吸着検出方法であって、
前記吸着具にワークが接触していない空吸い状態のもとで前記着脱路内を流れる負圧空気の流量を空吸い流量値とし、前記吸着具にワークが吸着された吸着状態のもとで前記着脱路内に流入する負圧空気の吸着時流入値と前記空吸い流量値との間の流量を吸着判定上限値とし、前記吸着具にワークが接触していない状態のもとで負圧空気を供給してから前記着脱路内を流れる負圧空気流量が前記吸着判定上限値を越えたことを検出した後に、
前記脱着路内の負圧空気流量が前記吸着判定上限値以下となったときに前記吸着具に対するワークの吸着を判定することを特徴とする吸着検出方法。
An adsorption detection method for detecting whether or not a workpiece is adsorbed to the adsorbent using a flow rate sensor that detects a flow rate of negative pressure air flowing in a desorption path that communicates the adsorber with a negative pressure source ,
The flow rate of the negative pressure air flowing in the attachment / detachment path under the suction state where the workpiece is not in contact with the suction tool is defined as a suction flow rate value, and the workpiece is sucked to the suction tool. The flow rate between the inflow value during suction of the negative pressure air flowing into the attachment / detachment path and the idle suction flow rate value is set as the suction determination upper limit value, and the negative pressure is obtained in a state where the workpiece is not in contact with the suction tool. After detecting that the negative pressure air flow rate flowing through the attachment / detachment path after supplying air has exceeded the adsorption determination upper limit value,
An adsorption detection method, comprising: determining adsorption of a workpiece with respect to the adsorption tool when a negative pressure air flow rate in the desorption path is equal to or less than the adsorption determination upper limit value .
請求項1記載の吸着検出方法において、前記吸着具に対する負圧空気の供給を停止した状態または正圧空気を供給した状態のもとで負圧空気流量が前記吸着時流入値よりも少ない流量の離脱判定下限値以下となったときにワークの前記吸着具からの離脱を判定することを特徴とする吸着検出方法。 2. The adsorption detection method according to claim 1, wherein the negative pressure air flow rate is smaller than the inflow value at the time of adsorption in a state where supply of negative pressure air to the adsorber is stopped or in a state where positive pressure air is supplied . A suction detection method, comprising: determining whether a workpiece is detached from the suction tool when a separation determination lower limit value is reached. 請求項1または2記載の吸着検出方法において、前記空吸い状態における前記脱着路における前記空吸い流量値から、吸着前後での変化量よりも小さい値の吸着判定補正値を差し引いて前記吸着判定上限値を補正することを特徴とする吸着検出方法。 In the adsorption detection method according to claim 1 or 2, wherein, from the air sucking flow rate value in the desorption path in the air sucking state, the attraction determination upper limit minus the attraction determination correction value smaller than the change amount before and after adsorption A suction detection method, wherein the value is corrected. 吸着具にワークが吸着されているか否かを検出する吸着検出装置であって、
前記吸着具と負圧源とを連通させる脱着路内を流れる負圧空気の流量を検出する流量センサと、
前記吸着具にワークが接触していない空吸い状態のもとで前記着脱路内を流れる負圧空気の空吸い流量値と、前記吸着具にワークが吸着された吸着状態のもとで前記着脱路内を流れる負圧空気の吸着時流入値と、前記空吸い流量値と前記吸着時流入値との間の吸着判定上限値とを記憶するメモリと、
前記吸着具に前記脱着路を介して前記負圧源からの負圧空気を、前記吸着具にワークが接触していない状態のもとで供してから前記脱着路内の負圧空気流量が前記吸着判定上限値を越えた後前記負圧空気流量が前記吸着判定上限値以下となったときに前記吸着具に対するワークの吸着を判定する吸着検出手段とを有することを特徴とする吸着検出装置。
An adsorption detection device that detects whether or not a workpiece is adsorbed by an adsorption tool,
A flow rate sensor for detecting a flow rate of negative pressure air flowing in a desorption path for communicating the adsorber and a negative pressure source;
The vacuum suction flow value of negative pressure air flowing in the attachment / detachment path under the suction state in which the workpiece is not in contact with the suction tool, and the attachment / detachment under the suction state in which the workpiece is sucked by the suction tool A memory that stores an inflow value during suction of negative-pressure air flowing in the road, and an adsorption determination upper limit value between the idle suction flow rate value and the inflow value during adsorption;
Negative pressure air and negative pressure air flow rate of the desorption path from the subjected feed under conditions which do not contact the workpiece to the suction device is from the desorption passage the negative pressure source through the suction device after There beyond the attraction determination upper limit, and having a suction detecting means for determining the adsorption of the workpiece relative to the sucker when the negative pressure air flow rate is equal to or less than the attraction determination upper limit Adsorption detection device.
請求項記載の吸着検出装置において、前記メモリは前記吸着時流入値よりも少ない流量の離脱判定下限値を記憶しており、前記吸着検出手段は負圧空気流量が前記離脱判定下限値以下となったときにワークの前記吸着具からの離脱を判定することを特徴とする吸着検出装置。 5. The adsorption detection device according to claim 4 , wherein the memory stores a lower determination lower limit value of the flow rate that is smaller than the inflow value during adsorption, and the adsorption detection means has a negative pressure air flow rate equal to or lower than the lower determination determination value. A suction detection apparatus for determining whether the workpiece is detached from the suction tool. 請求項または記載の吸着検出装置において、前記吸着検出手段は、前記空吸い状態における前記脱着路における前記空吸い流量値から、吸着前後での変化量よりも小さい値の吸着判定補正値を差し引いて前記吸着判定上限値を補正することを特徴とする吸着検出装置。
In the adsorption detecting apparatus according to claim 4 or 5, wherein said suction detecting means from said air sucking flow rate value in the desorption path in the air sucking state, the attraction determination correction value smaller than the change amount before and after adsorption A suction detection device that corrects the suction determination upper limit value by subtraction.
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