JP4290379B2 - Irradiation type curing device - Google Patents

Description

【００３３】
エアーカーテンノズル１６のノズル部１６ａは、吹き出される空気が幕を形成するように一定方向に安定して空気を吹き出す構造であることが望ましく、吹き出される空気が拡散されることが無いような構造であることが望ましい。従って、ノズル部１６ａは小さな穴を多数配列したものよりも、スリット状の連続した開口部の構造であり、一定の厚みのあるスリットで断面は、図９（Ａ）に示した如く、可及的に平行であることが望ましい。図９（Ｂ）及び（Ｃ）に示した如くに断面が鋭利な角部を持つものは吹き出された空気が拡散する傾向となるのでエアーカーテンの形成には好適であるとはいえない。
【００３４】
入口チャンバ４、処理チャンバ３、出口チャンバ５が十分に機能を発揮するためには、搬送ベルト２２の下側や側面から不活性ガスが漏れたり外部の空気が各チャンバ内に侵入しない構造とすることが重要である。そのためには、搬送ベルト２２の下部及び側面が外部の大気から離隔される構造とさせることが必要である。本装置においては、平坦なガイドプレート２３の左右に一対の支持プレート２５をガイドプレート２３の上表面から所定の高さに設定して溝形状を構成し、搬送ベルト２２の下部はカバー２６によって被覆すると共に、全てのチャンバ４，３，５を互いに密接して配置させると共に支持プレート２５の支持表面２５ａ上に密着して装着している。従って、図１０（Ａ）及び（Ｂ）に示されるように、本装置は、被処理物体の出入り口以外には外部大気と実質的に連通する開口部を持たない全体的にトンネル状の構造を構成している。
【００３５】
更に、搬送ベルト２２の構造について説明すると、搬送ベルト２２が荒い編目を有するものであったり、表面に大きな凹凸があるものであると、搬送ベルト２２による外部大気中の空気の各チャンバへの持ち込み作用や各チャンバからの不活性ガスの持ちだし量が顕著となる場合がある。従って、搬送ベルト２２としては、可及的に平面が平滑なものを使用することが望ましい。１例として、平織りタイプのガラスクロスにフッ素樹脂を含侵焼成し織り目にフッ素樹脂が埋め込まれているようなベルト（例えば、本多産業製ＨＧＳ−Ｐ５１４）を使用することが望ましい。
【００３６】
以上、本発明の具体的実施の態様について詳細に説明したが、本発明はこれらの具体的実施の態様にのみ制限されるべきものではなく、本発明の技術的範囲を逸脱すること無しに種々の変形が可能であることは勿論である。
【００３７】
【発明の効果】
本発明によれば、不活性ガスの消費量を減少させることが可能である。更に、低純度の不活性ガスを使用することが可能であり、高純度の不活性ガスを別に用意することは特に必要ではない。更に、処理雰囲気を比較的一様な不活性ガスの濃度とさせることが可能である。更に、比較的構造が簡単であり且つ廉価な照射型化装置を提供することが可能である。
【図面の簡単な説明】
【図１】 本発明の１実施例に基いて構成した照射型硬化装置の全体的構成を示した概略斜視図。
【図２】 （Ａ）及び（Ｂ）は図１の装置における窒素ガス発生モジュール１０において使用されている中空糸膜の窒素分離原理を説明するために有用な各概略図。
【図３】 図１の装置における入口チャンバ４内に複数個の仕切板４１を設けた場合の１実施例を示した一部破断概略斜視図。
【図４】 入口チャンバ４の１実施例を示した概略断面図。
【図５】 （Ａ）及び（Ｂ）は入口チャンバ４の壁と仕切板４１との間に隙間が存在しない場合と存在する場合とのガスの流れの違いを説明するように有用な各概略図。
【図６】 （Ａ）及び（Ｂ）は仕切板４１の夫々別の実施例を示した各概略斜視図。
【図７】 （Ａ）及び（Ｂ）は、夫々、不活性ガス供給パイプ７の１実施例を示した概略斜視図及び概略断面図。
【図８】 （Ａ）乃至（Ｄ）は出口チャンバ５の出口側に形成したエアーカーテンの作用を説明するのに有用な各概略図。
【図９】 （Ａ）乃至（Ｃ）はエアーカーテンノズル１６のノズル部１６ａに形成されるエアー噴出用の開口の形状を説明するのに有用な各概略断面図。
【図１０】 （Ａ）及び（Ｂ）は、夫々、本装置の搬送機構と各チャンバとによって大略トンネル構造の搬送経路が画定されている状態を示した概略斜視図及び概略側面図。
【符号の説明】
１：照射型硬化装置
２：搬送機構
３：処理チャンバ
４：入口チャンバ
５：出口チャンバ
６：紫外線ランプ装置
７：不活性ガス供給パイプ
１０：窒素ガス発生モジュール
１５：エアーカーテンパイプ
１６：エアーカーテンノズル
２２：搬送ベルト（エンドレスベルト）
２３：ガイドプレート
２５：支持プレート
２６：カバー
４１：仕切板
４２：区画室[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an irradiation type curing apparatus that cures an object to be processed by irradiating an electromagnetic wave with a predetermined wavelength. More specifically, the present invention relates to curing of a coating or the like formed on a substrate by irradiating ultraviolet rays. The present invention relates to an irradiation type curing apparatus to be performed.
[0002]
[Prior art]
Techniques for irradiating ultraviolet rays to cure the coating are known. In the UV curing technology, free radical formula materials are most often used. However, when the free radical UV curing reaction is performed in the air, the curing reaction is inhibited by oxygen in the air. This is known (so-called “oxygen inhibition”). In order to cope with such oxygen inhibition, it is only necessary to remove oxygen from the atmosphere in which the curing reaction is performed. However, one prior art for this purpose uses an inert gas such as nitrogen as the atmosphere in which the curing reaction is performed. It is to be filled with. An example of such a conventional technique is an ultraviolet curing device described in US Pat. No. 6,223,453.
[0003]
In the ultraviolet curing apparatus described in the above U.S. patent, a configuration is provided in which a pair of nozzle assemblies are provided on the inlet side and the outlet side of a curing chamber having an ultraviolet irradiation mechanism to fill the curing chamber with an inert gas. Have. Although this prior art apparatus is extremely effective in removing oxygen inhibition, a transport web for transporting an object to be treated such as a coating always moves in a certain direction, and a pair of nozzle assemblies Are disposed on the inlet side and outlet side of the curing chamber, so that a part of the inert gas such as nitrogen supplied from each nozzle is not supplied into the curing chamber but released into the atmosphere. It becomes. Therefore, there is a problem that the consumption of the inert gas tends to be relatively large.
[0004]
[Problems to be solved by the invention]
The present invention has been made in view of the above points, and it is an object of the present invention to provide an irradiation type curing apparatus that can eliminate the disadvantages of the prior art as described above and reduce the consumption of inert gas. And
[0005]
Another object of the present invention is to provide an irradiation type curing apparatus capable of using a low purity inert gas.
[0006]
Still another object of the present invention is to provide an irradiation type curing apparatus capable of making the treatment atmosphere have a relatively uniform inert gas concentration.
[0007]
Still another object of the present invention is to provide an irradiation type curing apparatus that is relatively simple in structure and inexpensive.
[0008]
[Means for Solving the Problems]
According to the present invention,
Conveying means for conveying an object to be processed along a predetermined path;
A processing chamber positioned above the predetermined path and having a lower portion at least partially opened to irradiate the object to be processed with an electromagnetic wave having a predetermined wavelength to perform a curing process;
An inlet chamber located above the predetermined path and adjacent to the inlet side of the processing chamber and having at least a partially open bottom;
An inert gas supply means for supplying an inert gas to at least one of the inlet chamber or the processing chamber;
There is provided an irradiation type curing apparatus characterized by comprising:
[0009]
Preferably, the irradiation type curing device is positioned above the predetermined path and adjacent to the outlet side of the processing chamber so that an inert gas flowing out of the processing chamber can flow in. An outlet chamber with at least a partially open bottom,
have. In one embodiment, an air curtain nozzle is disposed in the outlet chamber, and the air curtain nozzle extends across the predetermined path and flows from the processing chamber into the outlet chamber. An air curtain is formed that tends to trap the inert gas within the outlet chamber.
[0010]
Preferably, a plurality of partition plates are disposed in the inlet chamber and are spaced apart from each other and extend across the predetermined path. More preferably, a communication space is provided so that gas can flow between at least a pair of adjacent compartments among the plurality of compartments defined by the plurality of partition plates. In one embodiment, the communication space is a gap between the partition plate and the upper wall of the inlet chamber. On the other hand, in another embodiment, the communication space is at least one perforation formed in the partition plate.
[0011]
Preferably, the conveying means is
An endless belt stretched between a pair of rollers,
A pair of support surfaces disposed on both sides of the endless belt and positioned at a predetermined height from the conveying surface of the endless belt;
The processing chamber and the outlet chamber are supported on the pair of support surfaces.
[0012]
Preferably, the inert gas supply means includes a nitrogen gas supply means and a nitrogen gas supply pipe communicating with the nitrogen gas supply means. In one embodiment, the nitrogen gas supply means includes at least one nitrogen gas generation module that separates nitrogen gas from air.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
An irradiation type curing apparatus 1 constructed according to one embodiment of the present invention is shown in a perspective view in FIG. The main curing apparatus 1 generally includes a transport mechanism 2 that transports an object to be processed 12 (see FIG. 5) along a predetermined path, a processing chamber 3, an inlet chamber 4, and an outlet chamber mounted on the transport mechanism 2. 5.
[0014]
The transport mechanism 2 includes a pair of rollers 21 and 21 and an endless belt (transport belt) 22 spanned between the pair of rollers, and at least one of the pair of rollers has a predetermined direction. The endless belt 22 is rotated in a predetermined direction. The upper surface of the endless belt 22 forms a conveying surface. In the embodiment shown in FIG. 1, the direction indicated by the arrow A is the conveying direction of the endless belt 22. Accordingly, the object to be processed is placed on the transport surface near the right end of the endless belt 22 and is transported substantially from right to left as indicated by the arrow A. The transport mechanism 2 further includes a flat guide plate 23 that guides the back surface of the upper portion of the endless belt 22 in order to keep the transport surface of the endless belt 22 in a horizontal state. Further, as shown in FIG. 3, the transport mechanism 2 includes a pair of guide frames 24, 24 that fixedly support the guide plate 23 and rotatably support the pair of rollers 21. A long support plate 25 is fixed to the upper portion of the plate. The upper surface of each support plate 25 provides a support surface 25a on which the processing chamber 3, the inlet chamber 4, and the outlet chamber 5 can be placed. As will be described in detail later, these support surfaces 25 a are set to a predetermined height from the conveying surface of the endless belt 22. Further, as shown in FIG. 1, support frames 24 and 24 are covered by a cover 26.
[0015]
In the illustrated example, the processing chamber 3 is an ultraviolet curing processing chamber that irradiates an object to be processed such as a coating placed on the endless belt 22 and transports it to cure the coating. Accordingly, an ultraviolet lamp device 6 is attached to the processing chamber 3. In the illustrated example, the processing chamber 3 has a generally rectangular box shape, and an ultraviolet lamp device 6 is mounted on the upper wall of the processing chamber 3, while the lower portion thereof is open. As best shown in FIG. 3, the ends on either side of the processing chamber 3 are in contact with the corresponding support surface 25a, so that the sides of the processing chamber 3 are sealed with the support surface 25a.
[0016]
An inlet chamber 4 is disposed adjacent to the inlet side of the processing chamber 3 (that is, the upstream side with respect to the transport direction A). The inlet chamber 4 is also a substantially rectangular box shape, and its bottom is opened. Yes. An inert gas supply pipe 7 is attached to the inlet chamber 4, and an inert gas such as nitrogen is supplied from the outside into the inlet chamber 4 through the inert gas supply pipe 7. In the illustrated example shown in FIG. 3, the inert gas supply pipe 7 extends in the inlet chamber 4 in a direction crossing the conveying direction A. As shown in FIG. A large number of ejection holes 7a are formed in the portion extending into the inlet chamber 4 substantially downward. Further, in the preferred embodiment shown in FIGS. 1 and 3, the inert gas supply pipe 7 extends through the inlet chamber 4 and is located in the vicinity of the processing chamber 3, but may be separated if desired. In this embodiment, the inert gas supply pipe 7 can be located in the processing chamber 3, and a separate inert gas supply pipe can be located in both the processing chamber 3 and the inlet chamber 4. Is possible. In the illustrated example shown in FIG. 7, the case where the ejection holes 7a are arranged in two rows is shown, but this may be less or more than two rows, and the length of the pipe It can also be in the form of one or more continuous slits extending along the axis.
[0017]
As shown in FIG. 1, according to the present invention, another inlet chamber 4 is disposed adjacent to the inlet side of the processing chamber 3, and at least one of the processing chamber 3 and the inlet chamber 4 is externally supplied with nitrogen. An inert gas such as a gas is supplied. With such a configuration, the atmosphere in the processing chamber 3 can be maintained in a state filled with an inert gas such as nitrogen gas, and the inert gas purity of the atmosphere is maintained in a substantially uniform state. Is done. Therefore, it is ensured that the curing process of the object to be processed by ultraviolet irradiation is performed stably and uniformly. The main functions of the inlet chamber 4 are as follows. (1) Air that adheres to the surface of the object to be processed and the endless belt 22 while the object to be processed is conveyed below the inlet chamber 4 is inert in the inlet chamber 4. And (2) preventing the purity of the inert gas in the processing chamber 3 from being changed due to external atmospheric turbulence or the like. In the preferred embodiment shown in FIG. 1, another outlet chamber 5 is disposed adjacent to the outlet side of the processing chamber 3. The outlet chamber 5 is also a substantially rectangular box, and the lower part is opened. The main function of the outlet chamber 5 is to keep the inert gas flowing out of the processing chamber 3 from flowing in and to prevent the purity of the inert gas in the processing chamber 3 from changing. That is, the inlet chamber 4 and the outlet chamber 5 are disposed before and after the processing chamber 3 and perform a damper action so that the purity of the inert gas in the processing chamber 3 is maintained constant. Therefore, when the inlet chamber 4 and the outlet chamber 5 are provided before and after the processing chamber 3 in this manner, the consumption of the inert gas is reduced by about 1/2, compared to the configuration of the prior art in which they are not provided. It can be reduced to about 5 to 1/10.
[0018]
If the length of the inlet chamber 4 in the transport direction is too short, outside air (such as a wind generated when a person passes near the apparatus or a wind from an air conditioner) enters the inlet chamber 4 and enters the chamber. The purity of the inert gas is changed, and therefore the purity of the inert gas in the processing chamber 3 may be affected. If the length of the inlet chamber 4 is too short, the passing time of the object to be processed is short. In addition, the air adhering to the surface of the object to be processed or the surface of the conveyor belt is not sufficiently replaced with the inert gas in the inlet chamber, so that the purity of the inert gas in the processing chamber 4 decreases or fluctuates. Will do. If the conveyance speed is very low, the height of the inlet opening of the inlet chamber 4 (that is, the lower end of the front end wall of the inlet chamber 4 and the conveying surface of the conveying belt 22) can be prevented in order to prevent the influence of the disturbance of the outside air. When the distance between the two is about 3 cm, the length of the inlet chamber 4 can be about 50 cm. However, if the supply amount of the inert gas is increased, the length of the inlet chamber 4 can be made shorter than this. Depending on the supply amount of the inert gas, the length can be set to about half this length. Is possible. However, a certain amount of time is required to replace the air adhering to the surface of the object to be treated with the inert gas, and if the time is not longer than 0.7 seconds, sufficient replacement is performed. There is no possibility. Therefore, for example, when the conveyance speed is 60 m / min, it is appropriate to set the length of the inlet chamber 4 to about 0.7 m to 1 m. It should be noted that the length of the inlet chamber 4 needs to be changed depending on the maximum speed of the conveyor belt 22, and the time for the object to be processed to pass through the inlet chamber 4 is 0.7 seconds or more. It is preferable to set so as to be.
[0019]
In the embodiment shown in FIG. 1, an inert gas supply pipe 7 communicates with the inlet chamber 4, and nitrogen gas is supplied into the inlet chamber 4 as an inert gas. The inert gas supplied into the inlet chamber 4 flows out through the inlet opening of the inlet chamber 4, but the conveyor belt 22 moves in the direction indicated by the arrow A. The outflow of the inert gas from the opening tends to be prevented. Accordingly, a larger portion of the inert gas supplied into the inlet chamber 4 tends to flow out through the outlet side opening of the inlet chamber 4 and flow into the processing chamber 3. Although not shown in FIG. 1, it is also possible to supply the inert gas supply pipe 7 with high-purity nitrogen gas from a gas cylinder that stores high-purity nitrogen gas. In the embodiment shown in FIG. 1, the inert gas supply pipe 7 is connected to the outlet side of a plurality (four in the illustrated example) of nitrogen gas generation modules 10 via a flow meter 8 and a flow control valve 9. ing. Compressed air 11 is supplied to the inlet side of the nitrogen gas generation module 10 from an air compressor (not shown). This nitrogen gas generation module 10 has a function capable of separating nitrogen from compressed air, and mainly passes oxygen in the air and does not allow nitrogen to pass through the cylindrical portion of the nitrogen gas generation module 10. It has a function.
[0020]
The principle of separating nitrogen from air by the nitrogen gas generation module 10 is based on the fact that the dissolution and diffusion (penetration) speed of molecules into the synthetic resin varies depending on the type of substance (molecule). 2 (A) and (B). That is, when pressurized air is sent from the inlet side of a hollow fiber made of a specific synthetic resin, gas (such as oxygen and nitrogen in the air) dissolves and diffuses (penetrates) in the resin of the hollow fiber. However, since the permeation rate of nitrogen molecules is slower than the permeation rate of oxygen molecules, oxygen permeates outside the hollow fiber, and air with a high nitrogen concentration comes out from the outlet side of the hollow fiber.
[0021]
Therefore, while compressed air passes through the nitrogen gas generation module 10, oxygen in the air is removed and a gas with a high nitrogen concentration is obtained. As such a nitrogen gas generation module 10, a commercially available one can be used, for example, a hollow fiber membrane module SEPAREL (trade name) manufactured by Dainippon Ink & Chemicals, Inc. can be used. When such a nitrogen gas generation module 10 is used, since air is used as a nitrogen gas supply source, it is not necessary to prepare high-purity nitrogen gas, which is extremely advantageous in terms of running cost. It is. The purity of the nitrogen gas generated by the nitrogen gas generation module 10 is relatively low, but in the present invention, the inlet chamber 4 is disposed adjacent to the processing chamber 3 so that it is supplied. Even if the purity of the nitrogen gas is relatively low, the purity of the nitrogen gas in the processing atmosphere defined by the processing chamber 3 can be maintained at a desired level and constant.
[0022]
Various embodiments of the inlet chamber 4 of the present invention will now be described with reference to FIGS. In the embodiment shown in FIG. 3, the inlet chamber 4 is formed in a box shape from a flat upper wall 4a, a front end wall 4b, a rear end wall 4c, and a pair of left and right side walls 4d and 4e. . The rear end wall 4c includes a processing chamber 3 (the upper wall 3a, the front end wall 3b, the rear end wall 3c (not shown), and a pair of left and right side walls 3d and 3e (not shown) as in the case of the inlet chamber 4. It is also possible to be a part of the front end wall 3b). Then, tabs 4f and 4f are provided to extend outward from lower ends of the pair of left and right side walls 4d and 4e, and these tabs 4f and 4f are placed on the corresponding support surface 25a. . Therefore, the inlet chamber 4 basically forms an internal cavity. In the embodiment shown in FIG. 4, a plurality of partition plates 41 are provided so as to be separated from each other in the internal cavity of the inlet chamber 4 and arranged perpendicular to the transport direction of the transport belt 22. Therefore, the internal cavity of the inlet chamber 4 is divided into a plurality of compartments 42 by the plurality of partition plates 41. Further, an inert gas supply pipe 7 is positioned in the vicinity of the processing chamber 3 and extends in the inlet chamber 4 in parallel with the partition plate 41.
[0023]
The plurality of partition plates 41 are intended to prevent the gas in the inlet chamber 4 from freely moving in the front-rear direction in the chamber. For example, the gas in the chamber can be transferred to the conveyor belt 22 or above. To prevent the object from being moved by being moved by the object to be processed. In order to perform a stable curing process, it is desirable to maintain the purity of the inert gas in the processing chamber 3 constant. In this case, when the partition plate 41 does not exist in the inlet chamber 4, the inlet The gas in the chamber 4 moves freely, so that an inert gas having a low purity near the inlet of the inlet chamber 4 that is easily affected by outside air moves to the vicinity of the processing chamber 3 to move the inert gas in the processing chamber 3. May reduce purity. The purpose of disposing the partition plate 41 in the inlet chamber 4 is to cope with such a situation, and the partition plate 41 prevents the movement of the gas in the inlet chamber 4 as much as possible. To increase the friction between the inert gas in the chamber and the air adhering to the object to be processed and the conveyor belt 22, and to promote the replacement of the adhering air and the inert gas in the chamber, The purity of the inert gas in the processing chamber 3 is maintained stably.
[0024]
The inert (nitrogen) gas supplied from the inert gas supply pipe 7 to the vicinity of the processing chamber 3 in the inlet chamber 4 sequentially passes through a plurality of partition plates 41 provided in the chamber and enters the inlet. It reaches the inlet opening of the chamber 4 and is finally discharged into the atmosphere from the inlet opening. The inert gas in the compartment 42 defined by the partition plate 41 close to the inlet opening of the inlet chamber 4 easily mixes with the outside air, so that the purity of the inert gas decreases. On the other hand, the inert gas gradually decreases as the inert gas supply pipe 7 is approached. The purity of the active gas is increased, and the purity fluctuation is also reduced. Therefore, it is desirable to arrange the partition plate 41 so as to be as perpendicular as possible to the conveyance direction of the conveyance belt 22.
[0025]
Details of the configuration of the inlet chamber 4 shown in FIG. 3 are shown enlarged in FIG. As shown in FIG. 4, the vertical distance H between the lower end of the front end wall 4b of the inlet chamber 4 and the surface of the conveyor belt 22 defines the height of the inlet opening, which height H is the supporting surface. It is defined by the set position of 25a. In the embodiment shown in FIG. 4, a plurality of partition plates 41 are arranged in the inlet chamber 4 at a constant pitch interval S. The pitch interval S should be appropriately determined according to the length and size of the inlet chamber 4. As an example, the internal cavity of the inlet chamber 4 is divided into at least ten compartments 42, and each compartment is separated. It is desirable to set 42 so that the width (pitch interval S) is smaller than its height. In short, these partition plates 41 have a pitch interval so that the gas in the compartment 42 defined by the partition plates 41 is not moved as much as possible by the disturbance of the outside air or the movement of the object to be processed and the conveyor belt 22. It is desirable to set S. As an example, in the case of the inlet chamber 4 having a length of 1 m and a height of 95 mm, the pitch interval S of the partition plates 41 may be set in a range of 20 to 50 mm.
[0026]
Further, as shown in FIG. 4, a gap G is set between the upper end of each partition plate 41 and the upper wall 4 a of the inlet chamber 4, and thus is defined by a plurality of partition plates 41. The plurality of compartments 42 are in communication with each other through the gap G. As described above, it is not preferable that the gas freely move in the inlet chamber 4. However, in order to speed up the start-up at the start of operation of the apparatus or to ensure stable operation, an inert gas supply is required. It is necessary for the inert gas supplied from the pipe 7 to be quickly filled into all the compartments 42 in the inlet chamber 4. In the case where such a gap G does not exist, at the initial stage of start-up at the start of operation, air remains in each compartment 42, so that the time during which the purity of the inert gas rises becomes long, and therefore the operation start period is long. On the other hand, since the remaining air flows out irregularly, problems such as unstable purity of the inert gas may occur. Further, when processing the three-dimensional object 12 placed on the conveyor belt 22, when the gap G is not provided as shown in FIG. Since there is no escape space for the gas inside, the gas present on the front surface of the object to be processed 12 is pushed in the transport direction due to the piston effect caused by the movement of the object to be processed 12 indicated by the arrow. This may adversely affect the stability of the purity of the inert gas in the inlet chamber 4. On the other hand, as shown in FIG. 5B, when there is a gap G, the gas in each compartment 42 can escape (move) into the compartments 42 before and after that, The gas in front of the object to be processed 12 can enter the corresponding compartment 42, so that the amount of gas pushed in the transport direction is remarkably reduced and almost negligible.
[0027]
If such a gap G is too large, the effect of providing the partition plate 41 is reduced. On the other hand, if the gap G is too small, various effects due to the gap G are reduced. Therefore, in order to ensure an appropriate effect of the gap G, it is necessary to determine the size of the gap G from the pitch interval S of the partition plates 41 and the height of each partition plate 41. As an example, the gap G is preferably set in a range of 20 to 80% of the interval S of the partition plate 41 and 5 to 50% of the height of the partition plate 41.
[0028]
FIGS. 6A and 6B show another embodiment of the partition plate 41. The partition plate 41 shown in FIG. 6A has a plurality of perforations 41a, while the partition plate 41 shown in FIG. 6B has many holes of predetermined shapes 41b and 41c in a metal plate. It is drilled as a whole. When the partition plate 41 according to these embodiments is used, the gap G can be omitted, but in that case, the opening ratio is set to be equal to that when the gap G is provided. It is desirable to do. Moreover, it is also possible to provide these perforations 41a, 41b, and 41c together with the gap G. In this case, the gap G can be made relatively small.
[0029]
In the above description, a plurality of partition plates 41 are provided in the inlet chamber 4, but it is needless to say that similar partition plates 41 can be provided in the outlet chamber 5. . That is, basically, the outlet chamber 5 can have the same configuration as the inlet chamber 4.
[0030]
Referring again to FIG. 1, the air curtain pipe 15 is inserted into the outlet chamber 5 at the outlet side of the outlet chamber 5, and communicates with the air curtain nozzle 16 disposed in the outlet chamber 5. Yes. The air curtain pipe 15 communicates with the blower 17 via a pressure adjustment damper 18. The air curtain nozzle 16 blows air in the vicinity of the outlet opening of the outlet chamber 5 to form an air film (air curtain), and tends to prevent the inert gas in the outlet chamber 5 from flowing out to the outside. Contributes to reducing the consumption of inert gas. By appropriately setting the amount of air blown from the air curtain nozzle 16 according to the conveying speed of the conveying belt 22, the purity of the inert gas in the processing chamber 3 can be maintained more constant.
[0031]
As shown in FIG. 8A, when the conveyor belt 22 is moving and no air curtain is present, the inert gas in the outlet chamber 5 is taken out to the outside by the conveyor belt 22 or the object to be processed. Air enters the outlet chamber 5 from the outside. On the other hand, as shown in FIG. 8B, when air is ejected from the air curtain nozzle 16 while the conveyor belt 22 is stationary, the ejected air collides with the conveyor belt 22 or the object to be processed. It is divided into front and rear, mixed with the inert gas in the outlet chamber 5 to reduce the purity of the inert gas, and part of it flows toward the processing chamber 3 to reduce the purity of the inert gas in the processing chamber 3. . Further, as shown in FIG. 8C, air is ejected from the air curtain nozzle 16 while the transport belt 22 is moving, but when the amount of ejection is small, the inert gas in the outlet chamber 5 is reduced. It is carried outside by the conveyor belt 22 or the object to be processed. In this case, the amount of gas in all the chambers of the apparatus is reduced, and external air enters the inlet chamber 4 to compensate for the amount, and flows to the outlet chamber 5 through the processing chamber 3. For this reason, the purity of the inert gas in the processing chamber 3 is lowered. Further, as shown in FIG. 8D, when the amount of air ejected from the air curtain nozzle 16 is appropriately set so as to match the conveying speed of the conveying belt 22, the inside of the outlet chamber 5 The inflow of the inert gas to the outside tends to be prevented, and it is possible to prevent the air from the air curtain nozzle 16 and the air from the outside from entering the processing chamber 3 as much as possible. An example of the optimum set value of the air pressure in the air curtain nozzle 16 with respect to the conveying speed of the conveying belt 22 is shown in Table 1 below. The amount of nitrogen gas to be used and the amount of air in the air curtain vary depending on the width of the transport belt, the height of the object entrance / exit, the transport speed of the transport belt, the residual oxygen concentration in the processing chamber 3, and the like.
[0032]
[Table 1]

[0033]
The nozzle portion 16a of the air curtain nozzle 16 is preferably structured to blow out air stably in a certain direction so that the blown air forms a curtain, so that the blown air is not diffused. A structure is desirable. Therefore, the nozzle portion 16a has a slit-like continuous opening structure rather than a large number of small holes arranged, and the cross section of the slit having a certain thickness is as possible as shown in FIG. Are preferably parallel. As shown in FIGS. 9B and 9C, those having sharp corners are not suitable for forming an air curtain because the blown air tends to diffuse.
[0034]
In order for the inlet chamber 4, the processing chamber 3, and the outlet chamber 5 to fully function, a structure in which inert gas does not leak from the lower side or side surface of the conveyor belt 22 or external air does not enter each chamber is adopted. This is very important. For that purpose, it is necessary to make it the structure where the lower part and side surface of the conveyance belt 22 are separated from the external atmosphere. In this apparatus, a pair of support plates 25 are set on the left and right sides of a flat guide plate 23 at a predetermined height from the upper surface of the guide plate 23 to form a groove shape, and the lower part of the conveyor belt 22 is covered with a cover 26. At the same time, all the chambers 4, 3, 5 are arranged in close contact with each other and mounted in close contact with the support surface 25 a of the support plate 25. Accordingly, as shown in FIGS. 10A and 10B, the present apparatus has a generally tunnel-like structure that has no opening that is substantially in communication with the external atmosphere other than the entrance and exit of the object to be processed. It is composed.
[0035]
Further, the structure of the conveyor belt 22 will be described. If the conveyor belt 22 has rough stitches or has large irregularities on the surface, air in the outside atmosphere is brought into each chamber by the conveyor belt 22. There are cases where the action and the amount of inert gas taken out from each chamber become significant. Therefore, it is desirable to use a conveyor belt 22 that is as smooth as possible. As an example, it is desirable to use a belt (for example, HGS-P514, manufactured by Honda Sangyo Co., Ltd.) in which a fluororesin is impregnated and fired in a plain weave type glass cloth and the weave is embedded in the weave.
[0036]
Although specific embodiments of the present invention have been described in detail above, the present invention should not be limited to these specific embodiments, and various modifications can be made without departing from the technical scope of the present invention. Of course, it is possible to modify this.
[0037]
【The invention's effect】
According to the present invention, it is possible to reduce the consumption of inert gas. Further, it is possible to use a low purity inert gas, and it is not particularly necessary to prepare a high purity inert gas separately. Furthermore, it is possible to make the treatment atmosphere have a relatively uniform inert gas concentration. Furthermore, it is possible to provide an irradiation type apparatus that is relatively simple in structure and inexpensive.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view showing the overall configuration of an irradiation type curing apparatus configured according to one embodiment of the present invention.
2A and 2B are schematic views useful for explaining the principle of nitrogen separation of a hollow fiber membrane used in the nitrogen gas generation module 10 in the apparatus of FIG.
3 is a partially broken schematic perspective view showing one embodiment in the case where a plurality of partition plates 41 are provided in the inlet chamber 4 in the apparatus of FIG.
4 is a schematic cross-sectional view showing an embodiment of the inlet chamber 4. FIG.
FIGS. 5A and 5B are schematic views useful for explaining the difference in gas flow between the case where there is no gap and the case where there is no gap between the wall of the inlet chamber 4 and the partition plate 41. FIGS. Figure.
6A and 6B are schematic perspective views showing different embodiments of the partition plate 41, respectively.
7A and 7B are a schematic perspective view and a schematic cross-sectional view showing an embodiment of an inert gas supply pipe 7, respectively.
8A to 8D are schematic views useful for explaining the operation of an air curtain formed on the outlet side of the outlet chamber 5. FIG.
FIGS. 9A to 9C are schematic cross-sectional views useful for explaining the shape of an air ejection opening formed in the nozzle portion 16a of the air curtain nozzle 16. FIGS.
FIGS. 10A and 10B are a schematic perspective view and a schematic side view showing a state where a transfer path of a generally tunnel structure is defined by a transfer mechanism and each chamber of the apparatus, respectively.
[Explanation of symbols]
1: Irradiation type curing device
2: Transport mechanism
3: Processing chamber
4: Inlet chamber
5: Outlet chamber
6: UV lamp device
7: Inert gas supply pipe
10: Nitrogen gas generation module
15: Air curtain pipe
16: Air curtain nozzle
22: Conveyor belt (endless belt)
23: Guide plate
25: Support plate
26: Cover
41: Partition plate
42: compartment

Claims (9)

In irradiation type curing equipment,
Conveying means for conveying an object to be processed along a predetermined path;
A processing chamber positioned above the predetermined path and having a lower portion at least partially opened to irradiate the object to be processed with an electromagnetic wave having a predetermined wavelength to perform a curing process;
An inlet chamber located above the predetermined path and adjacent to the inlet side of the processing chamber and having at least a partially open bottom;
An inert gas supply means for supplying an inert gas to at least one of the inlet chamber or the processing chamber;
And a plurality of partition plates spaced apart from each other and extending across the predetermined path are disposed in the inlet chamber to define a plurality of compartments. Each compartment is set to have a width (pitch interval between a plurality of partition plates) smaller than its height , and the length of the inlet chamber is set so that the object to be processed is transported by the transport means. The irradiation type curing apparatus is characterized in that it is set so that a time of passing through the nozzle is 0.7 seconds or more. In claim 1, further comprising:
An outlet chamber located above the predetermined path and adjacent to the outlet side of the processing chamber and at least partially opened at a lower portion so that an inert gas flowing out of the processing chamber can flow in ,
Irradiation type curing apparatus characterized by comprising:   3. The air curtain nozzle according to claim 2, wherein an air curtain nozzle is disposed in the outlet chamber, and the air curtain nozzle extends across the predetermined path and flows into the outlet chamber from the processing chamber. An irradiation-type curing device, characterized in that an air curtain is formed which tends to trap active gas in the outlet chamber.   4. The communication device according to claim 1, wherein gas can flow between at least a pair of adjacent compartments among the plurality of compartments defined by the plurality of partition plates. 5. An irradiation-type curing device characterized in that a space is provided.   The irradiation type curing apparatus according to claim 4, wherein the communication space is a gap between the partition plate and an upper wall of the inlet chamber.   5. The irradiation type curing apparatus according to claim 4, wherein the communication space is at least one perforation formed in the partition plate. In any one of Claims 1 thru | or 6, the said conveyance means is
An endless belt stretched between a pair of rollers,
A pair of support surfaces disposed on both sides of the endless belt and positioned at a predetermined height from the conveying surface of the endless belt;
An irradiation type curing apparatus, wherein the processing chamber and the outlet chamber are supported on the pair of support surfaces.   8. The inert gas supply means according to any one of claims 1 to 7, comprising a nitrogen gas supply means and a nitrogen gas supply pipe communicating with the nitrogen gas supply means. An irradiation type curing apparatus.   9. The irradiation type curing apparatus according to claim 8, wherein the nitrogen gas supply means includes at least one nitrogen gas generation module that separates nitrogen gas from air.

Images