JP4288696B2 - Surface treatment apparatus and surface treatment method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a surface treatment apparatus and a surface treatment method for treating the surface of an object to be treated (also referred to as a workpiece) by performing plasma discharge under atmospheric pressure or a pressure near atmospheric pressure.
[0002]
[Prior art]
There has been proposed an apparatus for performing a surface treatment on an object to be processed using plasma discharge under atmospheric pressure or a pressure near atmospheric pressure. The advantage of surface treatment by plasma discharge under atmospheric pressure or near atmospheric pressure is that equipment for formation and control in a low-pressure atmosphere is unnecessary, and it is easy to achieve large-area treatment and reduce manufacturing costs. That is.
Such a surface treatment apparatus using plasma generates plasma generated under a pressure near atmospheric pressure between a pair of electrodes (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
JP-A-8-327959 (first page, FIG. 1)
[0004]
[Problems to be solved by the invention]
However, such a conventional surface treatment apparatus has the following problems.
In a conventional surface treatment apparatus, a line-shaped discharge unit is scanned with respect to a large substrate placed on a stage. Alternatively, a large substrate is placed on the table, and the table and the large substrate are moved relative to the discharge unit. The surface treatment apparatus having such a structure performs surface treatment by supplying high-frequency AC power to the electrodes, but has a problem that the high-frequency impedance changes during operation. In addition, the time constant of the high-frequency circuit changes due to wear of parts in the operating portion, and there is a high possibility that the high-frequency impedance will deteriorate over time, resulting in loss of high-frequency motion.
Accordingly, the present invention solves the above-described problems, and even a target object such as a large substrate can perform uniform surface treatment on the entire surface of the target object, minimizing the loss of high-frequency power. An object of the present invention is to provide a surface treatment apparatus and a surface treatment method that can be performed with good stability over time.
[0005]
[Means for Solving the Problems]
The surface treatment apparatus according to the present invention includes a high-frequency AC power source, a flat plate-like application-side electrode portion to which AC power is applied from the high-frequency AC power source, and a ground-side electrode disposed in parallel to the application-side electrode portion. And an object to be treated for surface treatment are moved between the application side electrode part and the earth side electrode part, and are generated between the application side electrode part and the earth side electrode part. An object to be processed for exposing the excited active species in the plasma discharge region to the surface of the object to be processed, and the ground side electrode part faces the application side electrode part and A counter electrode part that forms a plasma discharge region, and is formed continuously with respect to the counter electrode part, A high-frequency AC power path forming unit that forms a path of high-frequency AC power that reaches the ground of the AC power source connected to the application-side electrode unit The counter electrode part of the ground side electrode part and the high frequency AC power path forming part have a shape surrounding the application side electrode part and pass through the object to be processed A closed circuit of the high-frequency AC power by having a rectangular cross section when viewed in the passing direction And Operates at or near atmospheric pressure Configured It is characterized by that.
[0006]
According to such a configuration, the plate-like shape Application side The electrode unit is supplied with AC power from a high-frequency AC power source. Earth side The electrode part Application side It is arranged to face the electrode portion in parallel.
The target object moving unit moves the target object for surface treatment, Application side Electrode part and Earth side Pass between electrodes. And the object moving part is Application side Electrode part and Earth side Excited active species in the plasma discharge region generated between the electrode portions are exposed to the surface of the object to be processed.
this Earth side The electrode part has a counter electrode part and a high-frequency AC power path forming part. The counter electrode is Application side A plasma discharge region is formed facing the electrode part. The high-frequency AC power path forming unit is continuously formed with respect to the opposing power unit, Application side From the electrode Earth side A path of high-frequency AC power that reaches the ground of the AC power supply through the electrode portion is formed.
[0007]
As a result, the path through which high-frequency AC power flows is Application side The electrode portion can be surely formed in a constant state. For this reason, even if it is the surface of a to-be-processed object like a large sized substrate, uniform surface treatment can be performed over the whole surface. Moreover, since the loss of high frequency AC power can be minimized, the required high frequency AC power can be kept to a minimum. Therefore, the capacity of the high-frequency AC power supply can be reduced. The processing capability of the surface treatment apparatus is good with little change over time over a long period of time.
[0008]
According to such a configuration, Earth side The counter electrode part of the electrode part and the high frequency AC power path forming part are Application side It has a shape surrounding the periphery of the electrode part. The counter electrode part and the high-frequency AC power path forming part have a rectangular cross section when viewed in the passing direction through which the object to be processed passes, thereby forming a closed circuit of the high-frequency AC power.
This Application side Electrode part and Earth side The object to be processed is passed between the counter electrode portions of the electrode portion.
In the above configuration, Earth side It is desirable that a matching box for impedance matching is disposed on the upper portion of the electrode portion.
According to such a configuration, the matching box is Earth side Since it is above the electrode portion, the length of the supply path of the high-frequency AC power can be minimized, and a surface treatment apparatus with good power stability with little power loss can be provided. In addition, it is resistant to fluctuations in high-frequency AC power.
[0009]
In the above configuration, Application side The electrode part preferably has a gas introduction part for introducing a gas for performing a predetermined treatment on the surface of the object to be processed into the plasma discharge region.
According to such a configuration, Application side A gas for performing a predetermined treatment can be reliably introduced into the plasma discharge region through the gas introduction part of the electrode part.
[0010]
In the above configuration, the object moving unit is configured to hold and convey the object to be processed. Earth side A first roller disposed upstream of the electrode portion; Earth side It is desirable to have the 2nd roller arrange | positioned in the downstream of an electrode part.
According to such a configuration, the object moving unit holds and conveys the object to be processed. Earth side A first roller disposed upstream of the electrode portion; Earth side It has the 2nd roller arrange | positioned in the downstream of an electrode part. These first and second rollers are Earth side Because it is located upstream and downstream of the electrode part, Earth side It is not arranged in the electrode part. From this, even if there is wear of parts of the first roller and the second roller which are the operating parts, Earth side The path of the high-frequency AC power constituted by the electrode portions can always be kept constant. Therefore, wear of parts in the operating part does not change the time constant of the high-frequency AC circuit, and does not change over time.
Moreover, due to the presence of the first roller and the second roller of the workpiece moving portion, Application side The distance from the electrode part can be kept constant.
[0011]
The surface treatment method of the present invention is a flat plate to which AC power is applied from a high-frequency AC power source. Applied The application-side electrode unit and the ground side are moved by moving a target object for surface treatment between the side electrode unit and the ground-side electrode unit disposed in parallel to the application-side electrode unit. An object to be processed moving between the electrode parts, and an excited active species of the plasma discharge region generated between the application side electrode part and the earth side electrode part with respect to the surface of the object to be processed to pass through A surface treatment step for exposing the ground-side electrode unit, wherein in the surface treatment step, the AC power of the high-frequency AC power source faces the application-side electrode unit to form the plasma discharge region. Counter electrode part of A high-frequency AC power path forming unit that is continuously formed with respect to the counter electrode unit Through the path of the high-frequency alternating current power to the ground of the high-frequency alternating current power source, and forming a closed circuit of the high-frequency alternating current power so that the high-frequency alternating current path is constant, A surface treatment is performed on the surface of the object to be treated under pressure.
[0012]
According to such a structure, in the to-be-processed object movement step, a plate-like shape to which AC power is applied from the high-frequency AC power source. Application side An electrode part; Application side Arranged parallel to the electrode section Earth side The object to be processed is moved between the electrode portions. As a result, the workpiece is Application side Electrode part and Earth side It passes between the electrode parts.
In the surface treatment step, the surface of the workpiece to be passed Application side Electrode part and Earth side Excited species in the plasma discharge region generated between the electrode portions are exposed.
In the surface treatment step, the AC power of the high-frequency AC power source is Application side Form a plasma discharge area facing the electrode Earth side The high-frequency alternating current power is closed so that the high-frequency alternating current path is constant through the counter electrode portion of the electrode section and the high-frequency alternating current power supply path formation section through the high-frequency alternating current power supply path to the ground. Forming circuit And subjecting the surface of the object to be treated to a surface treatment under atmospheric pressure or pressure near atmospheric pressure. It is like that.
[0013]
As a result, the path through which the high-frequency AC power flows has no movable parts and the path length is short. For this reason, the path through which high-frequency AC power flows is Application side The electrode portion can be surely formed in a constant state. For this reason, even if it is the surface of a to-be-processed object like a large sized substrate, uniform surface treatment can be performed over the whole surface. Moreover, since the loss of high frequency AC power can be minimized, the required high frequency AC power can be kept to a minimum. Therefore, the capacity of the high-frequency AC power supply can be reduced.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of the invention will be described with reference to the drawings.
FIG. 1 shows a preferred embodiment of the surface treatment apparatus of the present invention.
The surface treatment apparatus 10 shown in FIG. 1 is also called a so-called parallel plate type atmospheric pressure plasma surface treatment apparatus.
The surface treatment apparatus 10 is an apparatus that can perform surface treatment on the surface of the object to be processed while moving the object to be processed using plasma discharge under atmospheric pressure or a pressure near atmospheric pressure.
[0015]
The surface treatment used in the embodiment of the present invention includes surface modification such as ashing, etching, hydrophilic treatment, water repellent treatment, film formation, and cleaning. The ashing process is, for example, a process for removing organic substances on the glass. The etching process is, for example, a film removal process on the glass. The hydrophilic treatment is, for example, a treatment for forming a hydrophilic film on the surface of glass or a surface activation treatment. The water repellent treatment is a treatment for forming a water repellent film on the surface of glass, for example.
The kind of plasma generated in the surface treatment apparatus 10 is glow discharge plasma generated under atmospheric pressure or a pressure near atmospheric pressure. This glow discharge plasma is generated with the occurrence of glow discharge in the plasma generating gas.
[0016]
A surface treatment apparatus 10 shown in FIG. 1 includes a high-frequency AC power source 11, a flat plate-like anode electrode part 13, a cathode electrode part 15, and an object moving part 20.
The anode electrode portion 13 and the cathode electrode portion 15 form a so-called parallel plate type plasma generator. The anode electrode part 13 can be called an application side electrode part or a first electrode part. The cathode electrode part 15 can also be called an earth side electrode part or a second electrode part.
Thus, the surface treatment apparatus 10 has a pair of anode electrode part 13 and cathode electrode part 15 and constitutes a so-called direct discharge type plasma discharge means.
[0017]
The surface treatment apparatus 10 shown in FIG. 1 performs surface treatment not only on the surface 31 of the small object 30 but also on the surface 31 of the object 30 such as a large substrate. Is something that can be done.
The large object 30 is, for example, a large substrate of a large liquid crystal display device, and a dimension example is a large substrate having a vertical and horizontal length of, for example, 1.5 m or more. A surface treatment apparatus 10 shown in FIG. 1 is an apparatus that can uniformly and stably use high-frequency AC power and can always treat the surface 31 of the object 30 by stable glow discharge.
[0018]
The high-frequency AC power supply 11 is a power supply for supplying high-frequency AC power to the anode electrode unit 13 side. The high-frequency AC power supply 11 matches the impedance of the anode electrode part 13 and the cathode electrode part 15 by a matching box 33. The matching box 33 is disposed above the cathode electrode portion 15.
The high-frequency AC power supply 11 is electrically connected to the anode electrode portion 13, and the high-frequency AC power supply 11 is electrically connected to the ground 35 on the matching box 33 side.
[0019]
Next, the anode electrode unit 13 will be described.
The anode electrode portion 13 is made of a material that can serve as an electrode, for example, aluminum, copper, stainless steel, titanium, tungsten, or the like.
The anode electrode portion 13 is a flat electrode, and is supported by the matching box 33 by the support portion 37. The support unit 37 is electrically connected to the high frequency AC power supply 11.
As with the anode electrode portion 13, the support portion 37 is preferably made of a material through which a high-frequency alternating current flows efficiently, and has a large surface area.
[0020]
FIG. 2 is a side view of the surface treatment apparatus 10 shown in FIG.
As shown in FIGS. 1 and 2, the anode electrode part 13 has a gas introduction part 38. The gas introduction part 38 is connected to a gas storage part 39. The gas storage unit 39 stores a mixed gas for performing a predetermined surface treatment on the surface 31 of the workpiece 30. The gas type stored in the gas storage unit 39 is selected and stored according to the type of surface treatment for treating the surface 31.
As this gas type, it is possible to prepare a plurality of types of gases and mix and flow these gases. Examples of the surface treatment include ashing, etching, cleaning, surface modification, and film formation. The surface modification is hydrophilic treatment or water repellency treatment.
[0021]
For example, when the hydrophilic treatment is performed on the surface 31, He is used as an inert gas (carrier gas), and O is used as a reaction gas (treatment gas). ₂ Is used. When the surface 31 is subjected to water repellency treatment, He is used as the inert gas and CF as the reactive gas. ₄ Is used.
However, the present invention is not limited to this, and depending on the type of surface treatment, He, Ar or N as an inert gas. ₂ , Ne, Xe, O ₂ , CF ₄ , C ₂ F ₆ Etc. Moreover, you may mix a liquid material in an inert gas (decane etc.).
In any case, the gas storage unit 39 stores a mixed gas of an inert gas (carrier gas) and a processing gas (reactive gas). The mixed gas stored in the gas storage unit 39 is supplied along the arrow D into the plasma discharge region 44 formed between the anode electrode unit 13 and the surface 31 of the workpiece 30 through the gas introduction unit 38. can do.
[0022]
Next, the cathode electrode unit 15 shown in FIGS. 1 and 2 will be described.
The cathode electrode unit 15 includes a counter electrode unit 40 and a high-frequency AC power path forming unit 41.
The cathode electrode portion 15 is made of a material that can be an electrode similarly to the anode electrode portion 13 described above.
[0023]
The counter electrode part 40 of the cathode electrode part 15 in FIGS. 1 and 2 is a part facing the anode electrode part 13 in parallel. The high-frequency AC power path forming unit 41 is made of the same material as that of the anode electrode unit 13. It is formed continuously with respect to the counter electrode part 40. The high-frequency AC power path forming unit 41 has an upper part 45 and a side part 46 as shown in FIG. The side portions 46 and 46 are formed continuously with respect to both end portions 47 and 47 of the counter electrode portion 40. The upper portions 45 and 45 are formed continuously with respect to the side portions 46 and 46. The upper part 45 is electrically connected to the ground 35 of the matching box 33.
[0024]
The cathode electrode unit 15 includes a high-frequency AC power path forming unit 41 and a counter electrode unit 40, but is perpendicular to a passing direction (also referred to as a conveyance direction) T of the workpiece 30 as shown in FIG. It has a substantially cross-sectional rectangular shape with respect to this surface. The cathode electrode portion 15 has a space 51 inside. This space 51 has a rectangular cross section as viewed in FIG.
As shown in FIG. 1, the cathode electrode portion 15 has an inlet 54 for the object to be processed and an outlet 55 for the object to be processed.
[0025]
Next, the structure of the workpiece moving unit 20 shown in FIG. 1 will be described.
The workpiece moving unit 20 includes two first rollers 60 and 61 and two second rollers 63 and 64.
The first rollers 60 and 61 are rotationally driven by, for example, motors 65 and 66, respectively. As a result, the workpiece 30 is moved along the passing direction T so as to be sandwiched. When the object 30 moves in the passage direction T, the object 30 passes through the plasma discharge region 44 formed between the anode electrode part 13 and the counter electrode part 40 of the cathode electrode part 15. The workpiece 30 that has passed is guided so as to be sandwiched between the second rollers 63 and 64.
[0026]
The workpiece moving unit 20 stabilizes the position of the workpiece 30 in the Z direction (vertical direction) and has the ability to send the workpiece 30 in the passing direction T at a predetermined speed.
The first rollers 60 and 61 are arranged on the upstream side in the passing direction T of the cathode electrode portion 15. The second rollers 63 and 64 are located on the downstream side in the passing direction T of the cathode electrode portion 15.
[0027]
By doing so, the first rollers 60 and 61 and the second rollers 63 and 64 are outside the space 51 of the cathode electrode portion 15. Moreover, even if the workpiece 30 is fed and the first rollers 60 and 61 and the second rollers 63 and 64 are worn, the powder generated by the wear enters between the cathode electrode portion 15 and the anode electrode portion 13. prevent. Moreover, even if the first rollers 60 and 61 and the second rollers 63 and 64 are worn, the powder generated by the wear does not affect the path of the high-frequency AC power in the cathode electrode portion 15 and the anode electrode portion 13.
[0028]
Next, an example of the surface treatment method shown in FIG. 4 will be described with reference to FIG.
In the object moving step ST1 shown in FIG. 4, the motors 65, 65 shown in FIG. 1 are operated, whereby the first rollers 60, 61 of the object moving part 20 pass the object 30 in the passing direction T. Move along. Thus, the workpiece 30 passes between the anode electrode portion 13 and the counter electrode portion 40 of the cathode electrode portion 15.
[0029]
In the surface treatment step ST2 shown in FIG. 4, reactive active species are generated in the plasma discharge region 44 generated between the anode electrode part 13 and the counter electrode part 40 of the cathode electrode part 15. This excited active species is exposed to the surface 31 of the workpiece 30 that passes therethrough.
As a result, the excited active species of the discharge gas in the plasma discharge region 44 is exposed to the surface 31 of the object 30 to be treated, and thus, for example, the surface 31 is subjected to water repellent treatment. In this way, a predetermined surface treatment is continuously performed on the surface 31 of the workpiece 30 passing along the passage direction T in the plasma discharge region 44.
[0030]
Since the object 30 is configured to continuously pass through the plasma discharge region 44 along the passage direction T, surface treatment can be continuously performed even with a large area, that is, a large object.
When surface treatment is performed by plasma discharge as described above, in the surface treatment step ST2, the AC power supplied from the high-frequency AC power source 11 shown in FIGS. 1 and 2 to the anode electrode unit 13 is the following high-frequency AC power. It will pass the route.
[0031]
As shown in FIG. 3, the AC power of the high-frequency AC power supply 11 is supplied to the anode electrode unit 13 through the matching box 33 and the support unit 37. This AC power flows to the plasma discharge region 44 through the anode electrode portion 13. Then, the AC power returns from the plasma discharge region 44 to the ground 35 of the high-frequency AC power source 11 through the counter electrode unit 40 and the high-frequency AC power path forming unit 41 shown in FIG.
At this time, the path of the high-frequency AC power is the anode electrode section 13, the counter electrode section 40, and the high-frequency AC power path forming section 41 as described above. Since this path is always fixed, it does not change at all. Therefore, a stable plasma discharge region 44 can be secured.
Further, by arranging the matching box 33 as close as possible to the plasma discharge region 44, it is possible to reduce the power loss and increase the power ratio flowing into the plasma discharge region 44.
[0032]
The plasma discharge region (also referred to as plasma space) 44 obtained by these is transferred to the object 30 to be processed, such as a glass substrate, and uniform surface treatment can be performed on the entire surface 31.
The plasma discharge region 44 is supplied with the mixed gas from the gas storage unit 39 along the arrow D through the gas introduction unit 38.
[0033]
Thus, the anode electrode part 13 and the cathode electrode part 15 form a closed circuit so that the path of the high-frequency AC power is constant. For this reason, the high frequency characteristic impedance can be kept constant. As shown in FIG. 2, the cathode electrode portion 15 has a substantially “K” -shaped structure of katakana characters. By having this structure, a closed circuit of high-frequency AC power can be configured.
[0034]
For example, a plating process can be performed on the surfaces of the anode electrode portion 13 and the cathode electrode portion 15 in order to prevent oxidation and prevent changes with time. As this plating, for example, metal plating having conductivity such as gold plating or gold plating can be employed.
The thickness of the plating can be set according to the frequency of a high-frequency AC power supply (also referred to as RF power supply). The frequency of the high frequency AC power supply is, for example, 13.56 MHz. The plating thickness should be greater than the “skin depth” according to the frequency.
[0035]
The to-be-processed object moving part 20 shown in FIG. 1 can send the large to-be-processed object 30 to the passage direction T stably, without bending.
The object 30 is a large substrate of a large liquid crystal display device, for example, and is a glass substrate. This large substrate is, for example, a substrate having a vertical and horizontal length of 1.5 m or more.
[0036]
The surface treatment apparatus 10 according to the present invention is a so-called parallel plate type atmospheric pressure plasma surface treatment apparatus, which uses a high-frequency power efficiently, for example, always a stable glow discharge on the surface of a large object 30. Can be surface-treated.
The surface treatment apparatus 10 of the present invention can perform surface treatment on the surface 31 of the object 30 while always maintaining the high-frequency AC power path in a constant state. Therefore, loss of the high-frequency AC power necessary for plasma discharge can be prevented and minimized, and can be reduced to, for example, about 1/3 to 1/10 of the high-frequency AC power compared to the conventional case.
[0037]
In a conventional surface treatment apparatus, for example, a method is employed in which an object to be treated is mounted on a table and the discharge unit is scanned. In this case, there is a problem that the AC power of the high-frequency AC power flows in a direction in which it flows easily due to contamination on the surface of the table, and the impedance changes during operation.
However, in the embodiment of the present invention, as shown in FIG. 1, the table 30 is not used for moving the object to be processed 30, and the roller for carrying is completely removed from the discharge regions of the cathode electrode portion 15 and the anode electrode portion 13. Is located outside. This prevents the time constant of the high-frequency AC power circuit from changing due to the phenomenon of component wear in the operating part such as a roller even if there is a roller.
[0038]
The anode electrode portion 13 shown in FIGS. 1 and 2 is a so-called line-shaped gun. The workpiece 30 passes through the gap between the anode electrode portion 13 and the counter electrode portion 40 of the cathode electrode portion 15. As described above, the gas introduction part 38 is provided at substantially the center of the anode electrode part 13. Therefore, the mixed gas can be reliably supplied to the substantially center of the plasma discharge region 44 from the central gas introducing portion 38.
[0039]
In the embodiment of the present invention, not only a small substrate and a medium substrate, but also a surface treatment of an object to be processed such as a large substrate, a uniform surface treatment can be performed over the entire surface. Since the loss of the high-frequency AC power can be minimized, the capacity of the high-frequency AC power supply 11 to be mounted can be reduced. The surface treatment apparatus 10 is less likely to change with time and stability in the process is improved.
In the manufacturing process of a semiconductor device or a display device, various surface treatments are indispensable for the surface of the object to be processed. In an atmospheric pressure plasma surface treatment apparatus that does not use vacuum, ashing, etching, cleaning, thin film formation, and other surface modifications can be reliably performed on the surface of an object to be processed such as a large substrate.
According to such a configuration, since the matching box is above the cathode electrode part, the length of the supply path of the high-frequency AC power can be minimized, and a surface treatment apparatus with low power loss and good temporal stability can be provided. . In addition, it is resistant to fluctuations in high-frequency AC power.
[0040]
The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the claims.
A part of each configuration of the above embodiment can be omitted, or can be arbitrarily combined so as to be different from the above.
In the embodiment of the present invention, various types of objects to be processed can be adopted depending on the processing purpose. For example, the object to be processed may be an electronic component such as a packaged IC, a silicon substrate, a large glass substrate or a plastic plate used in a liquid crystal display device (LCD) as described above.
[Brief description of the drawings]
FIG. 1 is a view showing a preferred embodiment of a surface treatment apparatus of the present invention.
2 is a side view showing a cathode electrode portion, an anode electrode portion, and the like along the line AA in FIG. 1. FIG.
FIG. 3 is a diagram showing an example of a path of high-frequency AC power.
FIG. 4 is a diagram showing an example of a surface treatment method of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Surface treatment apparatus, 11 ... High frequency alternating current power supply, 13 ... Anode electrode part, 15 ... Cathode electrode part, 20 ... To-be-processed object moving part, 30 ... To-be-processed object, 31 ... Surface of the object to be processed, 33 ... Matching box, 38 ... Gas introduction part, 39 ... Gas storage part, 40 ... Counter electrode part of cathode electrode part, 41 ... High frequency AC power path forming unit, 44 ... plasma discharge region, T ... passing direction

Claims (5)

High frequency AC power supply,
A plate-like application-side electrode portion to which AC power is applied from the high-frequency AC power source;
An earth-side electrode portion disposed to face the application-side electrode portion in parallel;
Plasma generated between the application-side electrode portion and the ground-side electrode portion by moving the object to be processed for surface treatment between the application-side electrode portion and the ground-side electrode portion A target object moving unit for exposing the excited active species in the discharge region to the surface of the target object;
With
The ground side electrode part is
A counter electrode part that forms the plasma discharge region facing the application side electrode part;
A high-frequency AC power path forming unit that is formed continuously with respect to the counter electrode unit, and that forms a path of high-frequency AC power that reaches the ground of the AC power source connected to the application-side electrode unit ;
Have
The counter electrode part and the high-frequency AC power path forming part of the ground-side electrode part have a shape surrounding the application-side electrode part, and are rectangular when viewed in the passing direction through which the object to be processed passes. by having a cross-section, said has become a closed circuit of high-frequency AC power, a surface treatment apparatus is characterized in that a configuration which runs under pressure or near atmospheric.   The surface treatment apparatus according to claim 1, wherein a matching box for impedance matching is disposed above the ground side electrode portion.   The said application side electrode part has a gas introduction part for introduce | transducing the gas for performing a predetermined process to the said surface of the said to-be-processed object to the said plasma discharge area | region. The surface treatment apparatus described in 1.   The workpiece moving unit includes a first roller disposed on the upstream side of the ground side electrode unit for holding and transporting the workpiece, and a first roller disposed on the downstream side of the ground side electrode unit. The surface treatment apparatus according to claim 2, further comprising two rollers. An object to be treated for surface treatment between a flat plate-like application-side electrode portion to which AC power is applied from a high-frequency AC power source and a ground-side electrode portion disposed to face the application-side electrode portion in parallel. A workpiece moving step for passing between the application side electrode part and the ground side electrode part by moving
A surface treatment step for exposing the excited active species in the plasma discharge region generated between the application-side electrode portion and the earth-side electrode portion to the surface of the object to be processed passing therethrough,
In the surface treatment step, AC power of the high-frequency AC power supply is continuous with the counter electrode portion of the ground side electrode portion that forms the plasma discharge region facing the application side electrode portion and the counter electrode portion. The high-frequency AC power is closed so that the high-frequency AC power path is constant through the high-frequency AC power path forming section formed through the path of the high-frequency AC power supply to the ground of the high-frequency AC power supply. A surface treatment method characterized by forming a circuit and performing a surface treatment on the surface of the object to be treated under atmospheric pressure or a pressure near atmospheric pressure.

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