JP4266654B2 - Membrane manufacturing apparatus and manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film manufacturing apparatus and a manufacturing method using a laser beam.
[0002]
[Prior art]
Conventionally, research and development for producing a superconductor film by a laser deposition method using an excimer such as KrF or ArF or a solid-state laser such as YAG has been actively conducted. Laser deposition has been recognized as a method for producing high-quality films, especially since the discovery of oxide high-temperature superconductors. In addition to oxide superconductors, multi-element oxide films such as ferroelectric films can be used. Has been applied to manufacturing.
[0003]
In the laser deposition method, a target having substantially the same composition as the film to be manufactured is irradiated with a laser beam to evaporate the target member, and a light-emitting plume generated as a result of evaporation is applied to the substrate facing the target to form a film on the substrate. Do. The laser deposition method has excellent features such as easy composition control and high-speed film formation.
[0004]
However, since the spread of the light-emitting plume in a high-density plasma state is narrow, there is a problem in manufacturing a device that requires a large film area, such as a superconducting microwave passive device. In view of this, it has been proposed to produce a high-quality and large-area film by employing means such as rotating the substrate, rotating the target, or scanning the laser beam on the target (for example, Patent Documents). 1 and 2).
[0005]
[Patent Document 1]
Japanese Patent Laid-Open No. 5-25615 [Patent Document 2]
JP-A-8-95865 [0006]
[Problems to be solved by the invention]
The larger the area of the film to be manufactured, the more difficult it is to form the film uniformly on the article. In addition, as the area of the film to be manufactured increases, it is necessary to concentrate the laser beam on the periphery of the target. Therefore, it becomes easier to form a groove in the part irradiated with the target intensively. There was a problem with the quality. In addition, when it is necessary to form a film on a three-dimensional article such as a package, there is a problem that a film having a strong directivity is difficult to enter a shadowed part and a film cannot be uniformly formed on a three-dimensional article. It was.
[0007]
Thus, a film manufacturing apparatus and a manufacturing method for forming a ferroelectric film, a superconductor film, and the like with high quality on a large-area substrate or a three-dimensional article have been desired.
[0008]
The objective of this invention is providing the manufacturing apparatus and manufacturing method of a film | membrane which can form a high quality film | membrane in the articles | goods of arbitrary shapes.
[0009]
[Means for Solving the Problems]
A film production apparatus according to the present invention includes a vacuum vessel, a laser device arranged outside the vacuum vessel, an article holder arranged inside the vacuum vessel, a target holder arranged inside the vacuum vessel, And a drive mechanism for driving the target holder so as to spiral the motion trajectory of the axis of the target holder while rotating the target holder.
[0010]
A film manufacturing method according to the present invention uses the above-described manufacturing apparatus , irradiates a target placed on the target holder with a laser beam from the outside of the vacuum container, and rotates a light emitting plume generated in the target within the vacuum container. A film is formed on the article to be applied to the article to be manufactured.
[0011]
According to the above configuration, the laser beam is irradiated to a wide range of the target, and a uniform film can be formed on the article at various angles to the article on which the light emission plume from the target rotates.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
[0013]
FIG. 1 is a diagram showing the principle of the present invention. A target 10 that rotates and swings in the vacuum container is irradiated with a laser beam 12 from outside the vacuum container, and a light emitting plume 14 generated in the target 10 is applied to a substrate (article) 16 that rotates in the vacuum container to form a film on the article. Form.
[0014]
The substrate 16 is supported by the substrate holder, and the substrate holder rotates as indicated by an arrow A. The target 10 is supported by the target holder, which rotates about its own axis as shown by arrow B and swings across the horizontal plane as shown by arrow C.
[0015]
FIG. 2 is a diagram showing the relationship between the target and the light emitting plume. In FIG. 2, reference numeral 18 denotes a horizontal plane, and the substrate 16 is arranged in parallel with the horizontal plane 18. 2A shows a case where the target 10 is at an angle with respect to the horizontal plane 18, FIG. 2B shows a case where the target 10 is parallel to the horizontal plane 18, and FIG. 10 shows a case where the angle 10 is at an angle opposite to (A) with respect to the horizontal plane 18.
[0016]
The central axis of the light emission plume 14 generated at the target 10 tends to be perpendicular to the surface of the target 10 without depending on the incident angle of the laser beam 12 to the target 10. Therefore, if the target 10 is swung, the direction of the light emitting plate 14 is constantly changed, and a state close to an omnidirectional light emitting plume can be created. This is a state close to a state where a normal resistance heating type or electron beam heating type vacuum deposition method and a sputtering method are mixed. In this way, the laser beam 12 is irradiated over a wide range of the target 10, and a uniform film is formed on an article having a large area at various angles on the substrate 16 on which the light emission plume 14 from the target 10 rotates. be able to.
[0017]
The target 10 in the vacuum vessel is irradiated with the laser beam 12 from the outside of the vacuum vessel while changing its angle in the range of 0 to 45 ° with respect to the horizontal plane 18 and rotating around its own axis. Thus, the light emitting plume 14 generated in the target 10 can be formed on the substrate 16 having an arbitrary shape by shaking the light emitting plume 14 at a wide angle. Therefore, a film having a three-dimensional shape can be formed such that the film can be formed in a place hidden by the shape of the article in the prior art.
[0018]
Since the angle between the laser beam 12 and the surface of the target 10 varies depending on the angle of the target 10 with respect to the horizontal plane 18, the laser irradiation area varies. When the laser energy density on the target 10 needs to be constant, the angle of the target 10 with respect to the horizontal plane 18 is synchronized with the position of the condenser lens of the laser device and / or the energy of the laser oscillator. That is, when the angle between the laser beam 12 and the surface of the target 10 is large, the laser spot becomes small and the average energy density becomes large. Therefore, the laser spot on the target 10 is changed by changing the position of the condenser lens of the laser device. Means are provided to soften the focus and / or reduce the energy from the laser oscillator. Such means can be realized by a microcomputer. For example, when the angle between the laser beam 12 and the normal line of the target 10 is θ, the laser spot is enlarged by 1 / cos θ times, that is, the average energy density is lower by cos θ times than when the angle is 0 °. The focus on the target 10 is strengthened by changing the position of the lens. Alternatively, the energy from the laser oscillator is increased to 1 / cos θ times.
[0019]
A high quality article is thus produced, preferably the article is used in a superconducting device.
[0020]
FIG. 3 is a view showing an example of the film production apparatus of the present invention. The film manufacturing apparatus 100 includes a vacuum container 20, a laser device 22 disposed outside the vacuum container 20, a substrate holder 24 disposed in the vacuum container 20, a target holder 26 disposed in the vacuum container 20, and a target. And a drive mechanism for rotating and swinging the holder 26. Furthermore, the film manufacturing apparatus 100 includes an oxygen gas introduction port 28 for introducing oxygen gas into the vacuum vessel 20, a vacuuming means 30 for evacuating the inside of the vacuum vessel 20, the substrate 16 and the substrate holder 24. And a lamp heater 32 that warms the lamp from behind.
[0021]
The laser device 22 includes a laser oscillator and a condenser lens, and generates the laser beam 12. The laser beam 12 is introduced into the vacuum container 20 from a laser beam introduction window provided on the side wall of the vacuum container 20. The substrate holder 24 supports the substrate 16 or other articles. The substrate holder 24 is rotated as indicated by arrow A. The target holder 26 supports the target 10. The target holder 26 is rotated about its own axis as indicated by the arrow B by the drive mechanism and swings relative to the horizontal plane as indicated by the arrow C. Further, the laser beam 12 is scanned along the surface of the target 10 by changing the position and angle of a lens or mirror provided in front of the laser device 22. Note that the swing of the target holder 26 includes a spiral motion described later.
[0022]
In the embodiment, the substrate 16 is a substrate having a large area, for example, and a superconducting film (for example, Y-Ba-Cu-O) is formed on the substrate 16. The substrate 16 can be made of a large area such as magnesium oxide and is suitable for film formation of Y-Ba-Cu-O. The substrate 16 is mounted on a substrate holder 24 made of stainless steel, and the substrate holder 24 is screwed to the substrate rotation shaft. Stop. The target 10 uses a Y-Ba-Cu-O sintered body, this target 10 is mounted on the target holder 26, a silver or copper tape is wound around the gap between the target 10 and the target holder 26, and the target 10 To fix. The rotating shaft of the target holder 26 is made of a material having a small thermal expansion. This is because a mechanical and thermal load is easily applied to the rotating shaft in order to avoid the use of lubricating oil in the vacuum vessel 20.
[0023]
The inside of the vacuum vessel 20 can be kept in a vacuum state by a high vacuum exhaust system. Further, necessary oxygen gas is introduced from the oxygen gas inlet 28, and the pressure is adjusted while the vacuum gauge, the oxygen flow meter, and the vacuum valve are interlocked. The laser beam 12 is introduced from the laser beam introduction window on the side wall of the vacuum vessel 20. The angle between the laser beam 12 and the target 10 in a position parallel to the horizontal plane 18 is 45 ° or 30 °. As the laser, an excimer such as KrF or ArF or a solid-state laser such as YAG is used. Along with the rotation and swing of the target 10, the laser beam 12 can be scanned by changing the position and angle of the lens and mirror, and as the film formation on the substrate 16 proceeds in this way, the surface of the target 10 is entirely Is uniformly cut.
[0024]
By applying the laser beam 12 to the target 10, the light emission plume 14 from the target 10 is shaken at a wide angle. That is, atoms, molecules, ions, excitons, etc. from the target 10 evaporate over a wide range, reach the substrate 16 in a high temperature state while repeatedly colliding with oxygen gas, and deposit on the substrate 16. As a result, a film having a large area can be manufactured with high quality without locally irradiating the target 10 with a laser beam and forming a groove.
[0025]
FIG. 4 is a view showing another example of the film production apparatus of the present invention. The film manufacturing apparatus 100 of this example has substantially the same configuration as the film manufacturing apparatus 100 of FIG. In the example of FIG. 4, a superconducting film (for example, Y—Ba—Cu—O) is formed on a three-dimensional substrate 16. The three-dimensional substrate 16 is fixed to the substrate holder 24 with, for example, screws. The other parts are the same as in FIG. Since the light emitting plume 14 reaches the substrate 16 at various angles, even if the substrate 16 has a complicated three-dimensional shape, a film is formed almost uniformly on the surface thereof.
[0026]
FIG. 5 is a diagram illustrating an example of the operation of the target holder 26. The target holder 26 rotates in the direction of arrow B around its own axis 26a and swings in the direction of arrow C. Preferably, the fulcrum of the oscillating motion is located at or near the center of the target 10.
[0027]
FIG. 6 is a diagram illustrating another example of the operation of the target holder. The target is at the top and the substrate is at the bottom. The target holder 26 rotates in the direction of arrow B around its own axis 26a and swings in the direction of arrow D. This oscillating motion is not merely oscillating in the vertical plane, but oscillating in the rotating vertical plane, and is a spiral motion. Preferably, the fulcrum of the spiral motion is located at or near the center of the target 10. As shown in FIGS. 5 and 6, the angle of the surface of the target 10 is changed by setting the fulcrum of the swing or spiral motion of the target holder 26 to be on the axis 26 a at or near the center of the target 10. The center of the target 10 does not move. If the fulcrum of the swing or spiral motion of the target holder 26 is at a position away from the target 10, the target 10 greatly shakes its head, and it becomes difficult to match the laser beam 12 to the target 10.
[0028]
FIG. 7 is a view showing another example of the film manufacturing apparatus of the present invention. The film manufacturing apparatus 100 of this example is configured in the same manner as the film manufacturing apparatus of FIG. 3, but the drive mechanism of the target holder 26 is shown. Further, FIG. 7 shows a laser beam introduction window 34 on the side wall of the vacuum vessel 20. Although the lamp heater 32 is not shown, it is provided similarly to the example of FIG.
[0029]
The drive mechanism of the target holder 26 includes a first motor 36 arranged outside the vacuum vessel 22, a stage 38 arranged inside the vacuum vessel 22 and rotated by the first motor 36, and attached to the stage 38. Second motor 40 and first and second drive members 42, 44 driven by second motor 40 and connected to target holder 26.
[0030]
The output shaft 36A of the first motor 36 is fixed to the stage 38. The second motor 40 is attached to the stage 38 by a support member 46. The first drive member 42 is slidably attached to the stage 38 and is connected to the stage 38 by a bellows 48. The bellows 48 maintains the posture of the first drive member 42 and buffers the sudden movement of the first drive member 42. One end of the first drive member 42 is threaded and engages with a gear 50 attached to the output shaft of the second motor 40. Therefore, the rotation of the second motor 40 is converted into a reciprocating motion of the first drive member 42 in the direction of arrow E. The other end of the first drive member 42 has a pin, and this pin is inserted into the elongated hole of the second drive member 44.
[0031]
The target holder 26 is formed in a hemispherical shape and is supported by a hemispherical holder guide 52. The center portion of the holder guide 52 is a space, and the second drive member 44 is coupled to the target holder 26 through this space. Accordingly, the rotation of the first motor 36 is transmitted to the target holder 26 via the stage 38 and the first and second driving members 42 and 44, and the target holder 26 is rotated. The rotation of the second motor 40 is transmitted to the target holder 26 via the first and second drive members 42 and 44, and the target holder 26 is swung. In this way, the target 10 can be rotated and swung. In this case, the target holder 26 performs a spiral motion.
[0032]
A heat radiation preventing plate 54 is disposed immediately above the stage 38 to prevent the second motor 40 from being overheated. Further, the second motor 40 is connected to an electric device 58 outside the vacuum vessel 20 by a wiring 56. The second motor 40 is periodically reversibly rotated so that the wiring 56 is not entangled. However, if a suitable power supply device is provided, the second motor 40 can be rotated in one direction.
[0033]
FIG. 8 is a view showing another example of the film production apparatus of the present invention. The film manufacturing apparatus 100 of this example is configured similarly to the film manufacturing apparatus of FIG. The drive mechanism of the target holder 26 includes a first motor 36 arranged outside the vacuum vessel 22, a stage 38 arranged inside the vacuum vessel 22 and rotated by the first motor 36, and attached to the stage 38. And a drive member 43 that is driven by the second motor 40 and connected to the target holder 26.
[0034]
The output shaft 36A of the first motor 36 is fixed to the stage 38. A support shaft 60 that is coaxial with the output shaft 36 </ b> A and fixed to the stage 38 is fixed to the target holder 26 via a bellows 62. The support shaft 60 transmits the rotation of the first motor 36 to the target holder 26, and the bellows 62 supports the target holder 26 while allowing the target holder 26 to swing. A guide 64 is provided to surround the support shaft 60 and the bellows 62 to prevent the bellows 62 from moving excessively.
[0035]
The second motor 40 is attached to the stage 38 by a support member 46. The drive member 43 is slidably attached to the stage 38 and is connected to the stage 38 by a bellows 48. The bellows 48 cushions the rapid movement of the first drive member 42. One end of the drive member 43 is threaded and engages with a gear 50 attached to the output shaft of the second motor 40. Therefore, the rotation of the second motor 40 is converted into a reciprocating motion of the first drive member 42 in the direction of arrow E. The other end of the drive member 43 is fixed to the target holder 26 by a bellows 66. Accordingly, the rotation of the first motor 36 is transmitted to the target holder 26 through the stage 38, the support shaft 60, and the bellows 62, and the target holder 26 is rotated. The rotation of the second motor 40 is transmitted to the target holder 26 through the driving member 43 and the bellows 66, and the target holder 26 is swung. In this way, the target 10 can be rotated and swung. In this case, the target holder 26 performs a spiral motion.
[0036]
FIG. 9 is a view showing a modification of the drive mechanism of FIG. In the example of FIG. 9, the first motor 36, the stage 38, the support shaft 60, and the bellows 62 are used as in the example of FIG. Further, in the example of FIG. 9, the second motor 40, the drive member 43, and the bellows 66 are used as in the example of FIG. 8. In the example of FIG. 8, one set of the second motor 40, the drive member 43, and the bellows 66 are used. However, in the example of FIG. 9, four sets of the second motor 40 and the drive are used. The member 43 and the bellows 66 are used.
[0037]
FIG. 9 shows the arrangement of the four drive members 43 with respect to the support shaft 60 among the four sets of the second motor 40, the drive member 43, and the bellows 66. The four drive members 43 are arranged at equal intervals around the support shaft 60 and are driven in synchronization with each other by the associated second motor 40. For example, regarding the two drive members 43 on both sides of the support shaft 60, when one drive member 43 moves forward, the other drive member 43 moves backward. The other two drive members 43 are also moved in synchronization therewith. Thus, the posture of the target holder 26 can be further stabilized by using the plurality of driving members 43.
[0038]
Finally, the film forming method will be further described. First, the substrate 16 and the target 10 are introduced into the vacuum container 20 and evacuated. When the inside of the vacuum vessel 20 is in a high vacuum state, cooling water is allowed to flow. Next, electric power is introduced into the lamp heater 32 to heat the substrate 16 to a temperature of 700 ° C., for example. Here, it is desirable to raise the temperature while rotating the substrate holder 24. The moving mechanism of the target holder 26 is also the same. Recognizing that the substrate temperature has reached 700 ° C. with a pyrometer, oxygen gas is introduced and the pressure is adjusted to 240 mTorr. When the substrate temperature and the gas pressure become constant for a while, the laser is oscillated from the laser oscillator and applied from the laser introduction window of the vacuum vessel 20 toward the target 10. The target 10 is scanned with the laser beam 12 on the target 10 while changing the angle with respect to the horizontal plane 18 within a range of, for example, 0 to 30 °, and rotating and swinging around the vertical axis. I do. Thereafter, oxygen gas is introduced at 200 Torr and cooled.
[0039]
The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention can be applied to a dielectric film, a magnetic film, or a combination thereof instead of the superconducting film.
[0040]
The film produced by using the production apparatus or production method of the present invention can be applied to various articles such as superconducting filters, high-frequency devices such as transmission paths and delay lines, capacitors, and inductors. In particular, it is effective for a semi-coaxial filter or package having a three-dimensional shape.
[0041]
As described above, the present invention has a target holder that can swing without requiring an electrical wiring to the target, and the energy transmitted from the laser beam makes the light emitting plume substantially perpendicular to the target surface. By generating, the following features are derived.
[0042]
(Supplementary note 1) A vacuum vessel, a laser device arranged outside the vacuum vessel, an article holder arranged inside the vacuum vessel, a target holder arranged inside the vacuum vessel, and rotating the target holder An apparatus for manufacturing a film, comprising: a drive mechanism for swinging.
[0043]
(Supplementary Note 2) The drive mechanism is driven by a first motor, a stage rotated by the first motor, a second motor attached to the stage, and a second motor, The film manufacturing apparatus according to claim 1, further comprising a driving member to be driven.
[0044]
(Appendix 3) Forming a film on an article by irradiating a target that rotates and swings in the vacuum container with a laser beam from outside the vacuum container, and hitting a light emitting plume generated in the target against the article rotating in the vacuum container A method for producing a film characterized by the following.
[0045]
(Additional remark 4) The said target rock | fluctuates from the position parallel to the said article | item, The manufacturing method of the film | membrane of Additional remark 3 characterized by the above-mentioned.
[0046]
(Additional remark 5) The manufacturing method of the film | membrane of Additional remark 3 characterized by controlling the energy density of the laser beam irradiated to the said target according to the position of the said target.
[0047]
(Additional remark 6) The manufacturing method of the film | membrane of Additional remark 3 characterized by scanning a laser beam along the surface of a target.
[0048]
(Additional remark 7) The manufacturing method of the film | membrane of Additional remark 3 characterized by forming the film | membrane in the article | item by applying the said light emission plume to the said article | item spirally.
[0049]
【The invention's effect】
As described above, according to the present invention, a high-quality film can be formed on a large-area substrate or a three-dimensional article, which greatly contributes to the practical use of various devices.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating the principle of the present invention.
FIG. 2 is a diagram illustrating a relationship between a target and a light emitting plume.
FIG. 3 is a view showing an example of a film production apparatus of the present invention.
FIG. 4 is a diagram showing an example of a film production apparatus of the present invention.
FIG. 5 is a diagram showing an example of the operation of the target holder.
FIG. 6 is a diagram showing another example of the operation of the target holder.
FIG. 7 is a view showing another example of the film production apparatus of the present invention.
FIG. 8 is a view showing another example of the film production apparatus of the present invention.
9 is a view showing a modification of the drive mechanism of the membrane manufacturing apparatus of FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Target 12 ... Laser beam 14 ... Light emission plume 16 ... Substrate 20 ... Vacuum container 22 ... Laser apparatus 24 ... Substrate holder 26 ... Target holder 36 ... First motor 38 ... Stage 40 ... Second motor 42 ... Drive member 43 ... Drive member 44 ... Drive member 52 ... Holder guide

Claims (5)

A vacuum vessel;
A laser device which is arranged outside the vacuum chamber,
And an article holder disposed in the vacuum container,
A target holder disposed in the vacuum container,
An apparatus for manufacturing a film, comprising: a drive mechanism that rotates the target holder so as to make the motion trajectory of the axis of the target holder spiral .   The driving mechanism includes a first motor, a stage rotated by the first motor, a second motor attached to the stage, and a driving member driven by the second motor to drive the target holder. The film manufacturing apparatus according to claim 1, comprising: The said 1st motor is connected to the said target holder via the 1st bellows, and the said drive member moves to the rotating shaft direction of the said 1st motor, The Claim 1 characterized by the above-mentioned. Membrane manufacturing equipment. Using the film production apparatus according to claim 1, wherein the laser beam is irradiated from the vacuum chamber outside of the placed target target holder, a light emitting plume generated in the target A method for producing a film, comprising applying a film to an article rotating in the vacuum container and forming the film on the article. The film manufacturing method according to claim 4 , wherein an energy density of a laser beam irradiated to the target is controlled according to a position of the target.

Images