JP4253859B2 - Inkjet head - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to an ink jet head that ejects ink from nozzles by applying pressure to ink in an ink passage.
[0002]
[Prior art]
  2. Description of the Related Art Conventionally, as an ink jet head used in an ink jet recording apparatus, an actuator member that is formed so that a plurality of ink passages and a plurality of horizontal dummy passages are alternately positioned and applies ink to the ink in the ink passages to eject the ink And a nozzle plate in which a plurality of nozzles from which ink is ejected are formed in a line and joined to an end face of the actuator member by an adhesive.
[0003]
  By the way, in general, such an ink-jet head generally has a nozzle plate (for example, a synthetic resin plate such as polyimide or a flat plate made of a metal plate such as nickel), and then the entire joint surface on the nozzle plate side or the joint surface on the actuator member side. Apply an adhesive (such as a thermosetting epoxy adhesive or a two-part epoxy adhesive) to the whole, and then position both of them and apply pressure and heat treatment to bond the nozzle plate and actuator member. It is manufactured by bonding.
[0004]
  Specifically, for example, as shown in FIG. 4, a large number of ink grooves 102 and the like serving as ink passages are formed on the upper surface of the actuator substrate 101 cut out to the head size of the ink jet head, and a conductive layer is formed on the surface inside the ink grooves 102. After forming the electrode made of the above, an adhesive is applied to the upper surface of the actuator substrate 101 to adhere the cover plate 103 to form the actuator member 104. Thereafter, an adhesive is applied to one end surface side of the actuator member 104 (actuator substrate 101 and cover plate 103) or the nozzle plate 105 side to bond them, and the manifold member 106 is attached to the other end surface of the actuator member 104. Are bonded to form an inkjet head.
[0005]
[Problems to be solved by the invention]
  However, in such an ink jet head, when the actuator member 104 and the nozzle plate 105 are bonded to each other, bubbles 107 (air) are mixed between them, thereby reducing the area of the bonded portion. As a result, there exists a subject that adhesive force and adhesive force become inadequate.
[0006]
  The reason why such bubbles are generated is that (1) invisible fine bubbles mixed in the adhesive grow into bubbles due to thermal expansion at the time of heat curing, and are cured as they are (2) ) Moisture such as cutting fluid and polishing fluid used for cutting or polishing the end face of the joint surface between the actuator member 104 and the nozzle plate 105 is not sufficiently removed and remains on the adhesive surface. (3) When a two-component epoxy adhesive is used, fine bubbles are mixed when the main agent and the curing agent are agitated and mixed, and the nozzle plate 105 is fixed under pressure. Sometimes the cause is that the bubbles cannot be removed.
[0007]
  In particular, the bubble 107 existing between the actuator member 104 and the nozzle plate 105 is pressed near the center of the actuator member 104 so that the ink groove 102 functions as a bubble escape portion. Thus, the bubbles 107 can be discharged almost completely to the outside. However, in the vicinity of the left and right end portions, there is no bubble escape portion such as the ink groove 102 or the like formed in a planar shape. Therefore, the bubbles 107 are easily confined.
[0008]
  A similar problem exists in the adhesion between the actuator member 104 and the cover plate 103.
[0009]
  SUMMARY OF THE INVENTION An object of the present invention is to provide an ink jet head having improved adhesion and adhesion in the vicinity of both left and right end portions between an actuator member and a nozzle plate.
[0010]
[Means for Solving the Problems]
  In order to solve the above problems, the invention of claim 1Horizontal dummy passages on both sides of each ink passage To prepareMultiple ink passages and multiple horizontal dummy passagesAnd alternatelyAn actuator member that applies pressure to the ink in the ink passage and ejects the ink; and a nozzle plate joined to one end surface of the actuator member with an adhesive; and between the actuator member and the nozzle plate, An inkjet head in which a vertical dummy passage having one end communicating with each horizontal dummy passage and the other end opening to the outside is formed, and the actuator member andAboveThe plurality of ink passages between the nozzle platesAnd the side dummy passage andTo makeThe arrayofBoth ends in the direction of arrangementLocated in the aboveSaid communicating with the side dummy passageFrom the vertical dummy passageThe end of the actuator memberOne end is on the sideAboveA vertical empty passage that opens to the outside is formed. Here, when one end opens to the outside, not only when one end opens directly to the outside, but also when it opens indirectly by communicating with a passage having an end opening to the outside, for example. Including meaning.
[0011]
  According to the first aspect of the present invention, between the actuator member and the nozzle plate, a vertical dummy passage having one end communicating with each horizontal dummy passage and the other end opened to the outside is formed, and a plurality of ink passages are formed.And the side dummy passage andTo makeThe arrayofBoth ends in the direction of arrangementLocated in the aboveSaid communicating with the side dummy passageFrom the vertical dummy passageThe end of the actuator memberOn the side, since a vertical empty passage having one end opened to the outside is formed, when the nozzle plate is joined to the one end surface of the actuator member with an adhesive, through the vertical dummy passage and the vertical empty passage, It is avoided that bubbles sandwiched between one end face of the actuator member and the nozzle plate are released and poor adhesion occurs. Further, since the vertical dummy passage and the vertical empty passage also function as the escape portion of the adhesive, it is possible to prevent the adhesive from protruding into the ink groove.
[0012]
  A second aspect of the invention is the ink jet head according to the first aspect, wherein the vertical empty passage is formed substantially parallel to the vertical dummy passage.
[0013]
  According to the invention of claim 2, the vertical empty passage is formed substantially in parallel with the vertical dummy passage, and when the vertical dummy passage adjacent to the ink groove is processed, it can be processed together. It is possible and does not require any special process for its processing.
[0014]
  According to a third aspect of the present invention, in the ink jet head according to the first or second aspect, a nozzle plate or an actuator member is formed on the surface of the actuator member or nozzle plate in which the vertical empty passage is formed with a vertical empty groove having one end opened to the outside. Are formed by bonding with an adhesive.
[0015]
  According to the invention of claim 3, a vertical empty groove having one end opened to the outside is formed on one surface of the actuator member or nozzle plate, and then the nozzle plate or actuator member is bonded to the surface with an adhesive. By doing so, a vertical empty passage is formed.
[0016]
  According to a fourth aspect of the present invention, in the ink jet head according to any one of the first to third aspects, the actuator member bonds the actuator substrate and the cover plate so that the ink passage and the lateral dummy passage are formed therebetween. It is formed by bonding with an agent, and the actuator substrateAboveThe plurality of ink passages between the cover platesAnd the side dummy passageTo makeBoth ends in the arrangement direction of the sequencesFrom the side dummy passage located atThe end of the actuator memberOne end is on the sideAboveA horizontal air passage that opens to the outside is formed.
[0017]
  According to the invention of claim 4, a plurality of ink passages are provided between the actuator substrate and the cover plate.And the side dummy passageTo makeBoth ends in the arrangement direction of the sequencesFrom the side dummy passage located atThe end of the actuator memberSince a laterally empty passage having one end opened to the outside is formed on the side, when the nozzle plate is joined to one end surface of the actuator substrate with an adhesive, the actuator is passed through the lateral dummy passage and the laterally empty passage. Air bubbles sandwiched between the one end surface of the substrate and the cover plate are escaped, thereby preventing poor adhesion. Further, the horizontal dummy passage and the horizontal empty passage function as an escape portion for the adhesive, so that the adhesive does not protrude into the ink groove.
[0018]
  According to a fifth aspect of the invention, in the ink jet head of the fourth aspect, the lateral empty passage is formed substantially parallel to the lateral dummy passage.
[0019]
  According to the invention of claim 5, the horizontal empty passage is formed substantially parallel to the horizontal dummy passage, and can be processed together when the horizontal dummy passage adjacent to the ink groove is processed. It is said.
[0020]
  According to a sixth aspect of the present invention, in the inkjet head according to the fourth or fifth aspect, the horizontal empty passage is formed on a surface of an actuator substrate or cover plate in which a horizontal empty groove having one end opened to the outside is formed. It is formed by bonding the substrates with an adhesive.
[0021]
  According to the invention of claim 6, a horizontal empty groove having one end opened to the outside is formed on one surface of the actuator substrate or cover plate, and then the cover plate or the actuator substrate is bonded to the surface with an adhesive. By doing so, a horizontal air passage is formed.
[0022]
  A seventh aspect of the invention is the ink jet head according to any one of the fourth to sixth aspects, wherein the cover plate and the nozzle plate are joined to each other, and an air passage having one end opened to the outside is formed therebetween. It is what. Here, the empty passage only needs to have one end opened to the outside in the meaning described above, and may be provided so as to extend along the nozzle row, or communicate with the vertical dummy passage or the vertical empty passage. It may be provided as follows.
[0023]
  According to the seventh aspect of the present invention, the air bubbles sandwiched between the one end surface of the cover plate and the nozzle plate through the plurality of empty passages between the cover plate and the nozzle plate escape. Thus, poor adhesion is avoided. Further, the empty passage also functions as an adhesive escape portion, so that the adhesive does not protrude into the ink groove.
[0024]
  The invention according to claim 8 is the ink jet head according to any one of claims 1 to 7, wherein the actuator is made of a piezoelectric material that generates a pressure for ink ejection by applying a voltage. Electrodes are provided on both side surfaces of the horizontal dummy passage, and the electrodes of the horizontal dummy passage are led to the outside through the vertical dummy passage.
[0025]
  According to the eighth aspect of the invention, the electrode of the horizontal dummy passage that feeds power to drive the actuator (piezoelectric material) is led to the outside through the vertical dummy passage and connected to the power supply source.
[0026]
DETAILED DESCRIPTION OF THE INVENTION
  Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0027]
  FIG. 1 is an exploded perspective view of a main part of an ink jet head according to the present invention. As shown in FIG. 1, the ink jet head 1 is formed by bonding a pair of actuator substrates 2 and 2 with an adhesive with an intermediate plate 3 (cover plate) sandwiched between them. Actuator member 4 and a nozzle plate 5 joined to one end surface of the actuator member 4 with an adhesive. A manifold member 6 for supplying ink is joined to the other end surface of the actuator member 4.
[0028]
  As shown in FIG. 2, each actuator substrate 2 is formed by laminating piezoelectric material layers 2A and 2B made of a lead zirconate titanate (PZT) ceramic material via an adhesive layer 2C. The piezoelectric materials of the layers 2A and 2B are polarized in opposite directions (respectively in the thickness direction of the actuator substrate 2). The piezoelectric material layers 2A and 2B are two layers in the present embodiment, but may be three layers, four layers or more layers. The piezoelectric material may be zirconate titanate. In addition to lead acid (PZT) ceramic materials, lead titanate (PT) ceramic materials can also be used.
[0029]
  Further, on the upper surface 2a of the actuator substrate 2 on the side facing the intermediate plate 3, a plurality of ink grooves 11,... And lateral dummy grooves 12A,. Formed in parallel(Array)Has been. The side walls 13,... Located between the ink grooves 11,... And the lateral dummy grooves 12A,... Are polarized in parallel to the depth direction of the grooves and in opposite directions to each other. It is formed by.
[0030]
  The ink groove 11 is formed so that the depth gradually decreases toward the nozzle plate 5 in the vicinity of the front end surface 2b of the actuator substrate 2. However, the ink groove 11 has a predetermined depth from the rear to the rear end surface 2c. It is formed to have. On the other hand, the lateral dummy groove 12A is formed to have a predetermined depth from the front end surface 2b side to the vicinity of the rear end surface 2c side of the actuator substrate 2, and the rear end portion (near the rear end surface 2c side) of the horizontal dummy groove 12A. 3) is raised so as to be flush with the upper surface 2a of the actuator substrate 2 to close the lateral dummy groove 12A as shown in FIG.
[0031]
  Then, the actuator substrates 2 and 2 are joined to the upper and lower sides of the intermediate plate 3 via the adhesives 36 and 36 so that the ink grooves 11 and the lateral dummy grooves 12A and the like of the actuator substrate 2 are intermediate. The longitudinal opening is closed by the plate 3, thereby forming the ink passage 21,... And the lateral dummy passage 22 A,. That is, between each actuator substrate 2 and the intermediate plate 3, a plurality of ink passages 21,... And a plurality of horizontal dummy passages 22A,.Alternately arrangedAs a result, the actuator member 4 is formed which applies pressure to the ink in the ink passages 21,.
[0032]
  Further, a vertical dummy groove 12B having one end connected to the horizontal dummy groove 12A and the other end opened to the lower surface 12 side is formed on the tip surface 2b side of the actuator substrate 2 at a position corresponding to the horizontal dummy groove 12A. ing. In the vertical dummy groove 12B of the actuator substrate 2, the nozzle plate 5 is joined to the actuator member 4 via an adhesive 37 (see FIG. 2B), and the longitudinal opening is closed by the nozzle plate 5. Thus, the vertical dummy passage 22B is formed.
[0033]
  Further, a plurality of ink grooves 11Of the actuator member 4 further than the horizontal dummy grooves 12A and the vertical dummy grooves 12B located at both ends in the arrangement direction of the arrangement formed by the horizontal dummy grooves 12A.Are formed with the horizontal empty grooves 14A,... And the vertical empty grooves 14B,... Having the same shape as the horizontal dummy grooves 12A and the vertical dummy grooves 12B at equal pitch intervals in parallel with them. Thus, the vertical empty groove 14B has one end communicating with the horizontal empty groove 14A and the other end opened to the lower surface 2d of the actuator substrate 2. The horizontal empty grooves 14A,... And the vertical empty grooves 14B,... Of the actuator substrate 2 are closed in the longitudinal direction by the intermediate plate 3 and the nozzle plate 5 so that the horizontal dummy grooves 12A and the vertical empty grooves 14A,. Similarly to the dummy groove 12B, the horizontal empty passages 24A,... And the vertical empty passages 24B,.
[0034]
  Also, a plurality of lateral empty grooves 15 are formed on the surface of the intermediate plate 3 where the nozzle plate 5 is joined, extending along the nozzle row and having both ends opened to the outside. And the empty groove | channel 15, ... of the said intermediate | middle plate 3 becomes the empty channel | path 25 ... extended along a nozzle row | line | column, when a longitudinal direction opening part is obstruct | occluded with the nozzle plate 5. FIG.
[0035]
  Therefore, the intermediate plate 3 is joined to the actuator substrate 2 to form the horizontal dummy passages 22A,... And the horizontal empty passages 24A,. By joining, the vertical dummy passages 22B, one end of which opens to the atmosphere, and the vertical empty passages 24B,... And the empty passages 25 extending along the nozzle rows are formed. When each of these passages (grooves) joins the intermediate plate 3 to the actuator substrate 2 or the nozzle plate 5 to the actuator member 4, the air bubbles sandwiched between them or the joints between them To serve as a relief for the adhesive used for the.
[0036]
  In FIG. 1,Of the arrangement formed by the ink passage 21 (the plurality of ink grooves 11) and the horizontal dummy passage 22A (lateral dummy groove 12A), the horizontal dummy passage 22A located at both ends in the arrangement direction and the horizontal dummy passage 22A communicate with each other. The end side of the actuator member 4 further than the vertical dummy passage 22B (vertical dummy groove 12B)In addition,Horizontal passage 24A (Horizontal groove14A)WhenVertical air passage 24B (Vertical gap14B)Are provided in groups of three or four, but the number thereof is not particularly limited, and may be more than that or only one. That is, the ink grooves 11 at both ends areEnd side of actuator member 4More than the horizontal dummy groove 12A and the vertical dummy groove 12B adjacent to each otherEnd of actuator member 4Depending on the size of the side part, only the required number of setsThe horizontal empty groove 14A and the vertical empty groove 14BCan be provided. Horizontal groove14AAnd vertical groove14BCan be processed together by making them the same shape as the horizontal dummy grooves 12A and the vertical dummy grooves 12B. In addition, even if they do not have the same shape, as long as one end opens to the outside (atmosphere), they function as the escape portion described above.
[0037]
  Further, a conductive material such as Ni is formed on the ink groove 11 in the actuator substrate 2,..., The lateral dummy groove 12A,... And the rear end surface 2c (the side on which the lateral dummy groove 12A is closed). A conductive layer made of is formed by vapor deposition or plating.
[0038]
  Then, the conductive layer is removed from the front end surface 2b (surface to which the nozzle plate 5 is bonded) and the upper surface 2a of the actuator substrate 2, and the conductivity of each groove surface of the ink grooves 11,... And the lateral dummy grooves 12A,. The layers are made independent, and as shown in FIGS. 3A and 3B, electrodes 31 are formed on the groove surfaces of the ink grooves 11,. On the bottom surface of the horizontal dummy groove 12A, a first divided groove 32a is formed from the front end side to the rear end side by removing the conductive layer linearly by laser processing. The conductive layer on the inner surface of the horizontal dummy groove 12A is independent. These two electrodes 33 and 33 are used. In the vertical dummy groove 12B communicating with the horizontal dummy groove 12A, a second divided groove 32b connected to the first divided groove 32a is formed. Therefore, the electrodes 33, 33 provided on both side surfaces of each horizontal dummy groove 12A are led to the outside (on the lower surface 2d side of the actuator substrate 2) through the vertical dummy groove 12B.
[0039]
  Furthermore, a third divided groove 32c connected to the second divided groove 32b is formed on the lower surface 2d of the actuator substrate 2 along the groove direction of the lateral dummy groove 12A from the front end to the vicinity of the rear end. A fourth divided groove 32d is formed on the rear end side of the groove 32c so as to be orthogonal to the plurality of third divided grooves 32c.
[0040]
  A plurality of drive electrodes 34 made of a conductive layer are formed in parallel on the lower surface 2d of the actuator substrate 2 by the third and fourth divided grooves 32c and 32d. Each drive electrode 34 is electrically connected to the electrode 33 on one wall surface of the horizontal dummy groove 12A and the electrode 33 on the other wall surface of the adjacent horizontal dummy groove 12A across the ink groove 11 via the vertical dummy groove 12B. It is in the state that was done. Further, a common ground electrode 35 is formed on the outer periphery of the drive electrode 34 row surrounded by the fourth divided groove 32d and the third divided groove 32c, and the common ground electrode 35 is formed on the rear end face 2c of the actuator substrate 2. Are connected to the electrodes 31 in all the ink grooves 11 through the conductive layer. Then, a pair of side walls 13 and 13 sandwiching the ink groove 11 and a pair of electrodes 31 and 33 formed on both side surfaces of the pair of side walls 13 and 13 are taken as a set, and a drive voltage is applied to the electrodes 33 and 33 outside the pair of side walls 13 and 13. Is applied, while the electrodes 31 and 31 inside the ink groove 11 between the pair of side walls 13 and 13 are grounded to generate an electric field perpendicular to the polarization direction of the piezoelectric material inside the side walls. The processed side walls 13 and 13 are deformed in a direction in which the volume of the ink groove 11 changes.
[0041]
  In addition, a wiring member, that is, a flexible printed circuit board 41 is connected to the lower surface 2d of the actuator substrate 2 on which the drive electrode 34 is formed. On the flexible printed circuit board 41, a substrate side drive electrode 42 and a substrate side ground electrode 43 are formed corresponding to the drive electrode 34 and the common ground electrode 35. The substrate side drive electrode 42 is connected to a drive control unit (not shown), and applies a drive voltage output from the drive control unit to each electrode 33 via the drive electrode 34 based on print data. . A flexible printed circuit board 41 having electrodes 42 and 43 on which solder layers are formed in advance is prepared, and the actuators 43 and 35 of the flexible printed circuit board 41 and the electrodes 34 and 35 of the actuator substrate 2 are matched. After the flexible printed circuit board 41 is brought into contact with the substrate 2, it is assembled as an ink jet head by soldering.
[0042]
  As described above, when the actuator substrate 2 is pressed and bonded to the intermediate plate 3 or when the nozzle plate 5 is pressed and bonded to the actuator member 4, both the plates 3 and 5 are pressed, so that The bubbles sandwiched between them are pushed out and escaped through the dummy passages 22A and 22B at the position corresponding to the center, and escaped through the empty passages 24A and 24B at the positions corresponding to the left and right ends (no ink grooves 11), respectively. To be discharged. Further, at the position where the intermediate plate 3 and the nozzle plate 5 correspond, air bubbles escape through the empty passage 25. Therefore, the necessary area required for adhesion is ensured, and their adhesion and adhesion are enhanced, so that poor adhesion is avoided. In these positions, the adhesive area is large and the amount of adhesive is also increased, but the adhesives 36 and 37 are prevented from flowing into the air passages 24A, 24B and 25 and into the ink groove 11.
[0043]
  Thereby, since there are almost no air bubbles in the adhesives 36 and 37, the actuator substrate 2 and the plates 3 and 5 are bonded with an adhesive force (bonding area) according to the design specification. In addition, the adhesives 36 and 37 that are pushed by the bubbles and escape to the ink passage 21 are also reduced, and the ink groove 11 (ink passage 21) has a small volume change amount due to the entrance of the adhesives 36 and 37. It will exhibit the injection characteristics as specified.
[0044]
  In the above description, an embodiment of the present invention has been described. However, the present invention is not limited thereto, and various modifications can be made as described below.
[0045]
  (1) In the above embodiment, the nozzle plate is joined to the actuator substrate in which the vertical groove is formed to form the vertical empty passage, but conversely, the vertical empty groove is formed in the nozzle plate. In addition, it is possible to form a vertical air passage by joining an actuator substrate to the nozzle plate. In this case, since the nozzle plate is usually formed of a synthetic resin material (for example, polyimide resin or polyether sulfone resin), laser means (TEA-CO₂, Excima, etc.), and a laser with a short pulse width (specifically, a pulse width of 1 ms or less) from the viewpoint of improving the adhesion and adhesion by reducing the bulge around the processed portion. It is desirable to process with the laser means which outputs.
[0046]
  In addition, it is also possible to form vertical empty grooves that face each other on both the actuator substrate and the nozzle plate, and to join the actuator substrate and the nozzle plate to form a vertical empty passage. In this case, the shape of the vertical groove provided in the actuator substrate and the nozzle plate can be changed, for example, the vertical empty groove on the nozzle plate side can be narrowed, and the vertical empty groove on the actuator substrate side can be increased.
[0047]
  Further, it is needless to say that the same thing can be applied between the actuator member and the intermediate plate (cover plate) and between the intermediate plate and the nozzle plate.
[0048]
  (2) Although the above embodiment has been described as applied to an ink jet head in which two actuator substrates 2 and 2 are joined on both upper and lower sides of one intermediate plate 3 (cover plate), Any inkjet head having a nozzle plate bonded to the end face by an adhesive can be applied. That is, even for an ink jet head in which one actuator substrate is bonded to one cover plate, or an ink jet head having a structure having three or more actuator substrates 1 by alternately bonding cover plates and actuator substrates. Piezoelectric element type that can be applied and uses the piezoelectric element that has the property of mechanical deformation (stretching / shrinking) when the voltage described above is applied, and ejects the ink stored in the ink groove. In addition, for example, a so-called bubble jet type inkjet head that instantaneously applies heat generated by a heating resistor (zirconium boride, etc.) to ink, causes film boiling, and ejects ink using the volume expansion of the boiling bubbles. It can also be applied to.
[0049]
  (3) In the embodiment, the air passages 24A and 24B have a shape having straight side surfaces, but the shape is not limited thereto, and various shapes can be used as the shape of the air passage. it can. For example, it may be an empty passage having a curved side surface or a corrugated side surface.
[0050]
【The invention's effect】
  The present invention is implemented in the form as described above, and has the following effects.
[0051]
  According to the first aspect of the present invention, a vertical dummy passage having one end communicating with each horizontal dummy passage and the other end opening to the outside is formed between the actuator member and the nozzle plate, and a plurality of ink passages are formed.And the horizontal dummy passage, the actuator member is further on the end side than the vertical dummy passage communicating with the horizontal dummy passage located at both ends in the arrangement direction.Since one end portion forms a vertical empty passage that opens to the outside, when the nozzle plate is joined to one end surface of the actuator member with an adhesive, one end surface of the actuator member passes through the vertical dummy passage and the vertical empty passage. Air bubbles between the nozzle plate and the nozzle plateMissTherefore, it is possible to avoid a decrease in the adhesive force and the adhesive force. Further, since the vertical dummy passage and the vertical empty passage function also as the escape portion of the adhesive, it is advantageous in preventing the adhesive from protruding into the ink groove.
[0052]
  In the invention of claim 2, since the vertical empty passage is formed substantially parallel to the vertical dummy passage, it can be processed together when processing the vertical dummy passage adjacent to the ink groove. No special process is required for processing.
[0053]
  According to the invention of claim 3, a vertical empty groove having one end opened to the outside is formed on one surface of the actuator member or nozzle plate, and then the nozzle plate or actuator member is bonded to the surface with an adhesive. Since the vertical empty passage is formed, the vertical empty passage can be easily formed.
[0054]
  In the invention of claim 4, in joining the actuator substrate and the cover plate, air bubbles sandwiched between the one end surface of the actuator substrate and the cover plate are released through the lateral dummy passage and the lateral passage. Similarly to the first aspect of the invention, it is possible to avoid a decrease in the adhesive force and the adhesion force, and the horizontal dummy passage and the horizontal empty passage also function as an escape portion of the adhesive, thereby forming an ink groove. It is also possible to prevent the adhesive from sticking out.
[0055]
  In the invention of claim 5, since the horizontal empty passage is formed substantially parallel to the horizontal dummy passage, it can be processed together when the horizontal dummy passage adjacent to the ink groove is processed. is there.
[0056]
  According to the sixth aspect of the present invention, a horizontal empty groove having one end opened to the outside is formed on one surface of the actuator substrate or the cover plate, and then the cover plate or the actuator substrate is bonded to the surface with an adhesive. Since the horizontal air passage is formed, the horizontal air passage can be easily formed.
[0057]
  According to a seventh aspect of the present invention, the air bubbles sandwiched between one end surface of the cover plate and the nozzle plate are escaped through the plurality of empty passages located between the cover plate and the nozzle plate. As a result, it is more advantageous to prevent a decrease in the adhesive force and the adhesive force in joining the cover plate and the nozzle plate.
[0058]
  In the invention of claim 8, since the electrode of the horizontal dummy passage provided for driving the actuator (piezoelectric material) is led to the outside through the vertical dummy passage, the vertical dummy passage is effectively used, The electrodes of the horizontal dummy passage can be easily connected.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view of a main part of an ink jet head according to the present invention.
FIGS. 2A and 2B are a transverse sectional view and a longitudinal sectional view of an actuator member, respectively.
FIG. 3A is a view showing a relationship between an actuator substrate located on the upper side and a printed board, and FIG. 3B is a view of the actuator substrate of FIG.
FIG. 4 shows a conventional example and is an explanatory view showing a state in which a cover plate, a nozzle plate and a manifold member are bonded to an actuator substrate.
[Explanation of symbols]
    1 Inkjet head
    2 Actuator board
    2A Piezoelectric material layer
    2B Piezoelectric material layer
    3 Intermediate plate (cover plate)
    4 Actuator member
    5 Nozzle plate
    5a Nozzle hole
    6 Manifold member
    11 Ink groove
    12A Horizontal dummy groove
    12B Vertical dummy groove
    13 Side wall
    14A Horizontal empty groove
    14B Vertical empty groove
    15 Air Groove
    21 Ink passage
    22A Horizontal dummy passage
    22B Vertical dummy passage
    24A sideways passage
    24B Vertical empty passage
    25 Air passage
    31 electrodes
    33 electrodes
    34 Drive electrode
    36 Adhesive

Claims (8)

An actuator member that alternately arranges a plurality of ink passages and a plurality of horizontal dummy passages so as to have a horizontal dummy passage on both sides of each ink passage, and applies pressure to the ink in the ink passage to eject the ink; and A nozzle plate joined to one end surface of the actuator member with an adhesive, and a vertical portion in which one end portion communicates with each lateral dummy passage and the other end portion opens to the outside between the actuator member and the nozzle plate. An inkjet head having a dummy passage formed therein,
The longitudinal dummy passage communicating with the lateral dummy passage which is located at both ends in the direction of the arrangement of the A and the plurality of ink passages and transverse dummy passage and said sequence formed between the actuator member and the nozzle plate ink jet head, characterized by further on the end side of the actuator member, is formed with Tatesora passage having one end open to the outside than.   The inkjet head according to claim 1, wherein the vertical empty passage is formed substantially parallel to the vertical dummy passage.   The vertical air passage is formed by joining the nozzle plate or the actuator member with an adhesive to the surface of the actuator member or nozzle plate having a vertical air groove having one end opened to the outside. The inkjet head according to claim 1 or 2. The actuator member is formed by joining an actuator substrate and a cover plate with an adhesive so that an ink passage and a lateral dummy passage are formed between them.
The transverse dummy passage further said actuator member than that located at both ends in the direction of the arrangement of the array formed by the said transverse dummy passage and said plurality of ink passages A between the cover plate and the actuator substrate The inkjet head according to any one of claims 1 to 3, wherein a laterally empty passage having one end portion opened to the outside is formed on the end portion side.   The inkjet head according to claim 4, wherein the horizontal empty passage is formed substantially parallel to the horizontal dummy passage.   The laterally empty passage is formed by joining the cover plate or the actuator substrate with an adhesive to the surface of the actuator substrate or the cover plate in which one end portion is opened to the outside. The inkjet head according to claim 4 or 5.   The ink jet head according to any one of claims 4 to 6, wherein an air passage having one end opened to the outside is formed between the cover plate and the nozzle plate. The actuator is made of a piezoelectric material that generates a pressure for ink ejection by applying a voltage,
Each ink passage and each horizontal dummy passage is provided with electrodes on both sides,
The ink jet head according to claim 1, wherein the electrode of the horizontal dummy passage is led to the outside through the vertical dummy passage.

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