JP4230826B2 - Laser processing method - Google Patents
Laser processing method Download PDFInfo
- Publication number
- JP4230826B2 JP4230826B2 JP2003165209A JP2003165209A JP4230826B2 JP 4230826 B2 JP4230826 B2 JP 4230826B2 JP 2003165209 A JP2003165209 A JP 2003165209A JP 2003165209 A JP2003165209 A JP 2003165209A JP 4230826 B2 JP4230826 B2 JP 4230826B2
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- JP
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- Prior art keywords
- processing method
- laser
- laser processing
- region
- modified region
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/14—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using wave energy, i.e. electromagnetic radiation, or particle radiation
- B29C65/16—Laser beams
- B29C65/1629—Laser beams characterised by the way of heating the interface
- B29C65/1635—Laser beams characterised by the way of heating the interface at least passing through one of the parts to be joined, i.e. laser transmission welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
- B23K26/24—Seam welding
- B23K26/244—Overlap seam welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/32—Bonding taking account of the properties of the material involved
- B23K26/324—Bonding taking account of the properties of the material involved involving non-metallic parts
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- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
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- B29C65/16—Laser beams
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- B29C65/1638—Laser beams characterised by the way of heating the interface at least passing through one of the parts to be joined, i.e. laser transmission welding focusing the laser beam on the interface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
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- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2995/00—Properties of moulding materials, reinforcements, fillers, preformed parts or moulds
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Description
【0001】
【発明の属する技術分野】
本発明は、光透過性を有する部材同士を接合するためのレーザ加工方法に関する。
【0002】
【従来の技術】
従来におけるこの種の技術は、例えば下記の特許文献1に開示されている。この特許文献1記載の接合方法は、光透過性部材と光吸収性部材とを重ね合わせ、光透過性部材側からレーザ光を照射して、このレーザ光を光吸収性部材に吸収させることで、両部材間の接触面近傍を溶融させて両部材を接合するものである。ところが、この接合方法では、光透過性を有する部材同士を接合することができない。
【0003】
このような問題を解決し得る技術として、下記の特許文献2,3には次のような技術が開示されている。すなわち、特許文献2記載の接着方法は、光透過性を有する2つの部材間に、レーザ光の吸収により接着作用が生じる接着剤を介在させ、一方の部材側から接着剤にレーザ光を照射して吸収させることで、両部材を接着する方法である。
【0004】
また、特許文献3記載の加工方法は、光透過性を有する2つの部材間に固形状無機物を介在させ、一方の部材側から固形状無機物にレーザ光を照射して吸収させることで、両部材間の接触面近傍を溶融させて両部材を溶着する方法である。
【0005】
【特許文献1】
特公昭62−49850号公報
【特許文献2】
特公平5−42336号公報
【特許文献3】
特開2001−232687号公報
【0006】
【発明が解決しようとする課題】
しかしながら、上述した特許文献2,3記載の技術にあっては、接合すべき2つの部材間に、更に光吸収性部材(接着剤や固形状無機物)を介在させる必要があり、手間が掛かるという問題がある。
【0007】
そこで、本発明は、このような事情に鑑みてなされたものであり、光透過性を有する部材同士を効率良く接合することのできるレーザ加工方法を提供することを目的とする。
【0008】
【課題を解決するための手段】
上記目的を達成するために、本発明に係るレーザ加工方法は、光透過性を有する第1の部材と第2の部材とを接合するレーザ加工方法であって、互いに接触する第1の部材及び第2の部材の内側部分内に集光点を合わせて第1のレーザ光を照射し、内側部分内において多光子吸収を発生させて内側部分に第1のレーザ光を吸収させて、第1の部材から第2の部材に渡る改質領域を内側部分内に形成することで、第1の部材と第2の部材とを接合することを特徴とする。
【0009】
また、本発明に係るレーザ加工方法は、光透過性を有する第1の部材と第2の部材とを接合するレーザ加工方法であって、互いに接触する第1の部材及び第2の部材の内側部分内に集光点を合わせて第1のレーザ光を照射し、内側部分に第1のレーザ光を吸収させて、第1の部材から第2の部材に渡る改質領域を内側部分内に形成することで、第1の部材と第2の部材とを接合することを特徴とする。
【0010】
これらのレーザ加工方法においては、互いに接触する第1の部材及び第2の部材の内側部分内に集光点を合わせて第1のレーザ光を照射する。このとき、第1のレーザ光の集光点における強度が所定の閾値を超えると、当該内側部分内において多光子吸収又はそれと同等の光吸収が発生する。このような光吸収を利用して、第1の部材から第2の部材に渡る改質領域を内側部分内に形成することで、第1の部材と第2の部材とを接合することができる。このレーザ加工方法によれば、従来のように接合すべき2つの部材間に光吸収性部材を介在させる必要がないため、光透過性を有する部材同士の効率良い接合が可能となる。
【0011】
ここで、多光子吸収という現象について簡単に説明する。材料の吸収のバンドギャップEGよりも光子のエネルギーhνが小さいと光学的に透明となる。よって、材料に吸収が生じる条件はhν>EGである。しかし、光学的に透明であっても、レーザ光の強度を非常に大きくするとnhν>EGの条件(n=2,3,4,・・・)で材料に吸収が生じる。この現象を多光子吸収という。従って、第1のレーザ光に対して光透過性を有する部材であっても、第1のレーザ光の集光点近傍で多光子吸収を発生させて改質領域を形成することができる。そして、このような第1のレーザ光の照射によって、第1の部材及び第2の部材の内側部分以外の部分が溶融等の損傷を受けることは殆どない。
【0012】
なお、内側部分とは、第1の部材と第2の部材との接触面から第1の部材内部の所定深さまでの部分と、当該接触面から第2の部材内部の所定深さまでの部分とを合わせた部分を意味する。また、改質領域とは、多光子吸収又はそれと同等の光吸収によって第1及び第2の部材の何らかの性質が変化した領域を意味する。一例として、熱可塑性樹脂からなる部材の場合、改質領域として、一旦溶融して再固化した領域や、炭化した領域等が形成される。また、ガラスからなる部材の場合、改質領域として、微小クラックが集合した領域等が形成される。
【0013】
また、第1の部材と第2の部材との接触面に集光点を合わせて第1のレーザ光を照射すれば、第1の部材から第2の部材に渡る改質領域を効率良く形成することができる。
【0014】
また、内側部分内において第1の部材から第2の部材に集光点を移動させながら第1のレーザ光を照射すれば、第1の部材と第2の部材との接合をより強いものとすることができる。
【0015】
また、接合の強度を向上させる観点から、第1の部材と第2の部材との接合予定ラインに沿って改質領域を連続させて形成してもよいし、或いは、接合の効率を向上させる観点から、第1の部材と第2の部材との接合予定ラインに沿って改質領域を断続的に複数形成してもよい。
【0016】
また、改質領域を内側部分内に形成した後、改質領域に第2のレーザ光を照射して吸収させることが好ましい。これにより、第1の部材から第2の部材に渡る改質領域の範囲を拡大させて、第1の部材と第2の部材との接合の強度をより一層向上させることができる。
【0017】
また、第2のレーザ光のエネルギー密度は、第1のレーザ光のエネルギー密度より低いことが好ましい。これにより、第2のレーザ光の照射において、第1の部材及び第2の部材の内側部分以外の部分が溶融等の損傷を受けるのを防止することができる。
【0018】
なお、第1の部材及び第2の部材は、可視光線領域から赤外線領域までの波長の光に対して光透過性を有する材料からなる場合がある。
【0019】
【発明の実施の形態】
以下、本発明に係るレーザ加工方法の好適な実施形態について、図面を参照して詳細に説明する。なお、図面の説明において同一又は相当部分には同一符号を付し、重複する説明を省略する。
【0020】
[第1実施形態]
図1に示すように、レーザ加工装置1は、光透過性を有する第1の部材2と第2の部材3とを接合するための装置であり、3軸方向に移動可能なステージ4を有している。このステージ4上には、その上面と対面するように押圧板6がエアシリンダ7を介して取り付けられており、第1及び第2の部材2,3がサンプル台8上に載置された状態で設置される。なお、第1及び第2の部材2,3は、透明PET(ポリエチレンテレフタレート)からなる厚さ約5mmのシート状部材である。また、押圧板6は、透明アクリルや透明ポリカーボネート等、光透過性を有する材料により形成されている。
【0021】
この押圧板6の上方には、レーザ光源11,12を収容するヘッド13が設置されている。レーザ光源11は、QSW−YAG・DPSSLであり、周波数500Hz,波長1064nmでパルスレーザ光(第1のレーザ光)L1を出射する。このレーザ光源11の前方には、レーザ光L1を下方に反射するミラー14が設置されている。このミラー14により下方に反射されたレーザ光L1は、その光路上に設置された集光レンズ16によって集光され、押圧板6を透過してサンプル台8上の第1及び第2の部材2,3に照射される。これにより、レーザ光L1は、集光点P1においてビーム径2μm,エネルギー密度23.9MW/cm2となる。
【0022】
また、レーザ光源12は、CW出力レーザダイオードであり、波長808nmのCWレーザ光(第2のレーザ光)L2を出射する。このレーザ光源12には、レーザ光L2を導光するのシングルファイバ(コア径600μm)17の一端側が接続されている。このシングルファイバ17により導光されたレーザ光L2は、シングルファイバ17の他端側に設置された集光レンズ18によって集光され、押圧板6を透過してサンプル台8上の第1及び第2の部材2,3に照射される。これにより、レーザ光L2は、集光点P2においてビーム径200μm,エネルギー密度5.3kW/cm2となる。
【0023】
以上のように構成されたレーザ加工装置1を用いて、第1実施形態のレーザ加工方法では、次のようにして第1の部材2と第2の部材3とを接合する。なお、図2に示すように、第1の部材2と第2の部材3との接触面21内に接合開始点22及び接合終了点23を設定し、接合開始点22と接合終了点23とを結ぶ直線を接合予定ライン24とする。また、接触面21と直交する方向をZ軸方向、接合予定ライン24に沿った方向をY軸方向、これらに直交する方向をX軸方向とする。
【0024】
まず、第1の部材2上に第2の部材3を重ね合わせてサンプル台8上に載置し、このサンプル台8をステージ4上に設置する。続いて、エアシリンダ7により押圧板6を下降させ、押圧板6とサンプル台8とで第1及び第2の部材2,3を挟み込み、第1及び第2の部材2,3とを所定の圧力(例えば0.2Mpa)で圧接させる。
【0025】
この状態で、パルスレーザ光L1の集光点P1を接合開始点22に合わせる。そして、レーザ光源11からレーザ光L1を出射させると共に、接合予定ライン24に沿って接合終了点23まで集光点P1を移動させる。この集光点P1の移動は、ヘッド13に対してステージ4を10mm/sの速度でY軸方向に移動させることで行われる。
【0026】
このレーザ光L1の照射によって、図3に示すように、第1の部材2及び第2の部材3の内側部分26内において多光子吸収が発生し、図4に示すように、第1の部材2から第2の部材3に渡る改質領域27が、内側部分26内において接合予定ライン24に沿って連続した状態で形成される。このように、第1の部材2と第2の部材3との接触面21に集光点P1を合わせてレーザ光L1を照射すると、第1の部材2から第2の部材3に渡る改質領域27を一度のレーザ光L1の走査で効率良く形成することが可能となる。
【0027】
この改質領域27は、図3に示すように、第1の部材2から第2の部材3に渡って形成された溶融領域27aと、Z軸方向に延びた断面形状で溶融領域27aの周囲に形成された変質領域27bとを有している。ここで、溶融領域27aは、各部材2,3が一旦溶融して再固化した領域であり、変質領域27bは、各部材2,3が炭化した領域であるものと考えられる。従って、第1の部材2と第2の部材3とは、主に、溶融領域27aによって融着された状態となり、互いに接合される。なお、改質領域27のZ軸方向における幅は約3mmであり、X軸方向における幅は約100μmであった。
【0028】
続いて、CWレーザ光L2の集光点P2を接合開始点22に合わせる。そして、レーザ光源12からレーザ光L2を出射させると共に、接合予定ライン24に沿って接合終了点23まで集光点P2を移動させる。この集光点P2の移動は、ヘッド13に対してステージ4を0.5mm/sの速度でY軸方向に移動させることで行われる。なお、第1及び第2の部材2,3は、改質領域27によって既に接合されているため、第1及び第2の部材2,3に対して押圧板6により圧力をかけなくてもよい。
【0029】
このレーザ光L2の照射においては、図5に示すように、レーザ光L2が改質領域27によって吸収され、改質領域27が加熱されることになる。これにより、X軸方向における改質領域27の両側には、第1の部材2から第2の部材3に渡る新たな改質領域28が形成される。この改質領域28は、主に、一旦溶融して再固化した領域(すなわち、溶融領域)である。従って、第1の部材2と第2の部材3とは、改質領域27に加え改質領域28によっても融着された状態となり、両部材2,3同士の接合はより一層強いものとなる。なお、改質領域28のX軸方向における幅は2〜3mmであった。
【0030】
以上のように、第1実施形態のレーザ加工方法によれば、レーザ光L1,L2に対して光透過性を有する部材2,3同士の接合であっても、従来のように両部材2,3間に光吸収性部材を介在させる必要がないため、第1の部材2と第2の部材3とを効率良く接合することができる。しかも、第1の部材2及び第2の部材3の内側部分26内に改質領域27,28を形成しているため、発塵やガスの発生等を抑制することができる。
【0031】
また、CWレーザ光L2のエネルギー密度は、パルスレーザ光L1のエネルギー密度より低くとも、改質領域27近傍で第1及び第2の部材2,3が溶融する程度に改質領域27を加熱させ得るエネルギー密度であればよい。そのため、各部材2,3の外側表面等、内側部分26以外の部分がCWレーザ光L2の照射によって溶融等の損傷を受けるのを防止することができる。
【0032】
なお、パルスレーザ光L1の照射により形成された改質領域27だけでも、第1の部材2と第2の部材3とを接合することが可能であるため、その接合の強度で十分であれば、CWレーザ光L2の照射による改質領域28の形成を行わなくてもよい。つまり、接合の強度と接合の効率とを比較考量し、改質領域27の補強となる改質領域28の形成を行うか否かを適宜決定すればよい。
【0033】
そして、CWレーザ光L2の照射による改質領域28の形成を行わない場合であっても、上述したように接合予定ライン24に沿って改質領域27を連続させて形成すれば、例えば、接合予定ライン24に沿って改質領域27を断続的に形成した場合に比べ、第1の部材2と第2の部材3との接合の強度を向上させることができる。
【0034】
[第2実施形態]
第2実施形態のレーザ加工方法では、上述したレーザ加工装置1を用いて、次のようにして第1の部材2と第2の部材3とを接合する。なお、第2実施形態においても、図2に示すように、接触面21内に接合開始点22及び接合終了点23を設定し、接合開始点22と接合終了点23とを結ぶ直線を接合予定ライン24とする。また、接触面21と直交する方向をZ軸方向、接合予定ライン24に沿った方向をY軸方向、これらに直交する方向をX軸方向とする。
【0035】
まず、第1の部材2上に第2の部材3を重ね合わせてサンプル台8上に載置し、このサンプル台8をステージ4上に設置する。続いて、エアシリンダ7により押圧板6を下降させ、押圧板6とサンプル台8とで第1及び第2の部材2,3を挟み込み、第1及び第2の部材2,3とを所定の圧力(例えば0.2Mpa)で接触させる。
【0036】
この状態で、図6に示すように、Z軸方向に沿って接合開始点22から第1の部材2内部に所定距離(例えば2.5mm)入った始点S1にパルスレーザ光L1の集光点P1を合わせる。そして、レーザ光源11からレーザ光L1を出射させると共に、Z軸方向に沿って接合開始点22から第2の部材3内部に所定距離(例えば2.5mm)入った終点F1まで集光点P1を移動させ、集光点P1が終点F1に到達した時点でレーザ光L1の出射を停止させる。この集光点P1の移動は、ヘッド13に対してステージ4を1mm/sの速度でZ軸方向に移動させることで行われる。
【0037】
このレーザ光L1の照射によって、第1及び第2の部材2,3の内側部分26内において多光子吸収が発生し、第1の部材2から第2の部材3に渡ってZ軸方向に延在する棒状の改質領域31が内側部分26内に形成される。
【0038】
続いて、図7に示すように、Y軸方向に沿って始点S1から接合終了点23側に所定距離(例えば1mm)離れた始点S2に集光点P1を合わせる。そして、レーザ光源11からレーザ光L1を出射させると共に、Y軸方向に沿って終点F1から接合終了点23側に所定距離(例えば1mm)離れた終点F2まで集光点P1を移動させ、集光点P1が終点F2に到達した時点でレーザ光L1の出射を停止させる。
【0039】
以降、このようなレーザ光L1の照射をn回繰り返し、内側部分26内において、接合予定ライン24に沿ってn個の改質領域31を断続的に形成する。これらの改質領域31は、図6に示すように、第1の部材2から第2の部材3に渡って形成された溶融領域31aと、Z軸方向に延びた断面形状で溶融領域31aの周囲に形成された変質領域31bとを有している。ここで、溶融領域31aは、各部材2,3が一旦溶融して再固化した領域であり、変質領域31bは、各部材2,3が炭化した領域であるものと考えられる。従って、第1の部材2と第2の部材3とは、主に、溶融領域31aによって断続的に融着された状態となり、互いに接合される。なお、改質領域31のZ軸方向における幅は約8mmであり、X軸方向における幅は約100μmであった。
【0040】
続いて、CWレーザ光L2の集光点P2を接合開始点22に合わせる。そして、レーザ光源12からレーザ光L2を出射させると共に、接合予定ライン24に沿って接合終了点23まで集光点P2を移動させる。このとき、レーザ光L2の発振をON/OFFさせて、接合予定ライン24に沿って並んだn個の改質領域31に対して選択的にレーザ光L2を照射する。なお、第1及び第2の部材2,3は、改質領域31によって既に接合されているため、第1及び第2の部材2,3に対して押圧板6により圧力をかけなくてもよい。
【0041】
このレーザ光L2の照射においては、図8に示すように、レーザ光L2が改質領域31によって吸収され、改質領域31が加熱されることになる。これにより、棒状の各改質領域31には、第1の部材2から第2の部材3に渡る鍔状の新たな改質領域32が形成される。この改質領域32は、主に、一旦溶融して再固化した領域(すなわち、溶融領域)である。従って、第1の部材2と第2の部材3とは、改質領域31に加え改質領域32によっても融着された状態となり、両部材2,3同士の接合はより一層強いものとなる。なお、改質領域32のX軸方向における幅は約3mmであった。また、図9に示すように、各改質領域31に形成された改質領域32は互いに接続され、改質領域31,32は、接合予定ライン24に沿って連続した状態となった。
【0042】
以上のように、第2実施形態のレーザ加工方法によれば、第1実施形態のレーザ加工方法と同様、レーザ光L1,L2に対して光透過性を有する第1の部材2と第2の部材3とを効率良く接合することができる。
【0043】
また、各改質領域31の形成に際しては、内側部分26内において第1の部材2から第2の部材3に集光点P1を移動させながらパルスレーザ光L1を照射している。これにより、改質領域31においては、変質領域31bだけでなく溶融領域31aも集光点P1の移動方向に沿って延びた形状となる。従って、第1の部材2と第2の部材3との接合をより強いものとすることができる。
【0044】
しかも、接合予定ライン24に沿って各改質領域31を互いに離間させて断続的に形成しているため、例えば、接合予定ライン24に沿って各改質領域31を隣接させて形成した場合に比べ、第1の部材2と第2の部材3との接合の効率を向上させることができる。
【0045】
なお、パルスレーザ光L1の照射により形成された改質領域31だけでも、第1の部材2と第2の部材3とを接合することが可能であるため、その接合の強度で十部であれば、CWレーザ光L2の照射による改質領域32の形成を行わなくてもよい。つまり、第1実施形態のレーザ加工方法と同様に、接合の強度と接合の効率とを比較考量し、改質領域31の補強となる改質領域32の形成を行うか否かを適宜決定すればよい。
【0046】
本発明は、上述した第1及び第2実施形態に限定されるものではない。例えば、上記各実施形態は、PETからなる部材同士を接合する場合であったが、本発明はこれに限定されず、アクリル、ポリカーボネート、塩化ビニル等の熱可塑性樹脂やガラス等、可視光線領域から赤外線領域までの波長の光に対して光透過性を有する他の材料からなる部材同士の接合にも適用可能である。しかも、本発明は、互いに異種材料からなる部材同士の接合にも適用可能である。
【0047】
なお、本発明における第1のレーザ光の照射条件は、多光子吸収又はそれと同等の光吸収を発生させるものであればよいが、改質領域を形成するための第1のレーザ光の集光点におけるエネルギー密度は次の通りである。すなわち、第1及び第2の部材がアクリルの場合は152kW/cm2、ポリカーボネートの場合は46kW/cm2、塩化ビニルの場合は15kW/cm2、PETの場合は25kW/cm2で改質領域が形成される。このとき、第1のレーザ光の他の条件については、レーザ光源:QSW−YAG・DPSSL(2倍波),波長:532nm,パルス幅:4ns,集光点におけるビーム径:15μm,1点に対する照射時間:10sであった。
【0048】
また、第1実施形態は、第1の部材2と第2の部材3との接触面21にパルスレーザ光L1の集光点P1を合わせる場合であったが、第1の部材2から第2の部材3に渡る改質領域27を形成することができれば、集光点P1が接触面21から外れても構わない。更に、上記各実施形態は、接合予定ライン24が直線の場合であったが、接合予定ライン24は曲線であってもよいし、また、例えば格子状に設定するというように複数本設定してもよい。
【0049】
そして、本発明は、次のような種々の用途に適用可能である。例えば、マイクロ液体チップにおいて、重ね合わされた2枚のアクリル板のうち、一方のアクリル板の接触面側に溝が形成されている場合に、当該溝の縁に沿って微小な幅(例えば100μm)で改質領域を形成し、2枚のアクリル板を接合することができる。さらに、化粧品等の梱包用パッケージに使用される透明PETフィルム同士を接着材を用いずに接合することができる。
【0050】
【発明の効果】
以上説明したように、本発明に係るレーザ加工方法によれば、光透過性を有する部材同士を効率良く接合することができる。
【図面の簡単な説明】
【図1】本発明に係るレーザ加工方法を実施するためのレーザ加工装置の一例を示す図である。
【図2】本発明に係るレーザ加工方法における第1及び第2の部材の一例を示す図である。
【図3】図2に示す第1及び第2の部材のA−A線に沿った部分断面図であって、第1実施形態におけるパルスレーザ光照射中の様子を示す図である。
【図4】図2に示す第1及び第2の部材のB−B線に沿った断面図であって、第1実施形態におけるパルスレーザ光照射後の様子を示す図である。
【図5】図2に示す第1及び第2の部材のA−A線に沿った部分断面図であって、第1実施形態におけるCWレーザ光照射中の様子を示す図である。
【図6】図2に示す第1及び第2の部材のA−A線に沿った部分断面図であって、第2実施形態におけるパルスレーザ光照射中の様子を示す図である。
【図7】図2に示す第1及び第2の部材のB−B線に沿った断面図であって、第2実施形態におけるパルスレーザ光照射後の様子を示す図である。
【図8】図2に示す第1及び第2の部材のA−A線に沿った部分断面図であって、第2実施形態におけるCWレーザ光照射中の様子を示す図である。
【図9】図2に示す第1及び第2の部材のB−B線に沿った断面図であって、第2実施形態におけるCWレーザ光照射後の様子を示す図である。
【符号の説明】
2…第1の部材、3…第2の部材、21…接触面、24…接合予定ライン、26…内側部分、27,28,31,32…改質領域、27a,31a…溶融領域(改質領域)、27b,31b…変質領域(改質領域)、L1…パルスレーザ光(第1のレーザ光)、L2…CWレーザ光(第2のレーザ光)、P1,P2…集光点。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a laser processing method for joining members having optical transparency.
[0002]
[Prior art]
This type of conventional technique is disclosed in, for example,
[0003]
As technologies that can solve such problems, the following technologies are disclosed in
[0004]
In addition, the processing method described in
[0005]
[Patent Document 1]
Japanese Patent Publication No. 62-49850 [Patent Document 2]
Japanese Patent Publication No. 5-42336 [Patent Document 3]
Japanese Patent Application Laid-Open No. 2001-232687
[Problems to be solved by the invention]
However, in the techniques described in
[0007]
Then, this invention is made | formed in view of such a situation, and it aims at providing the laser processing method which can join the member which has a light transmittance efficiently.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, a laser processing method according to the present invention is a laser processing method for joining a first member having light transparency and a second member, wherein the first member is in contact with each other, and The first member is irradiated with the first laser beam with the focusing point in the inner portion of the second member, multiphoton absorption is generated in the inner portion, and the first laser beam is absorbed in the inner portion . A modified region extending from the member to the second member is formed in the inner portion, whereby the first member and the second member are joined.
[0009]
Further, the laser processing method according to the present invention is a laser processing method for joining the first member and the second member having optical transparency, and is inside the first member and the second member that are in contact with each other. The first laser beam is irradiated with the focusing point in the part, the first laser beam is absorbed in the inner part, and the modified region extending from the first member to the second member is in the inner part. By forming, the first member and the second member are joined.
[0010]
In these laser processing methods, the first laser beam is irradiated with the focusing point in the inner part of the first member and the second member that are in contact with each other. At this time, if the intensity of the first laser beam at the condensing point exceeds a predetermined threshold value, multiphoton absorption or equivalent light absorption occurs in the inner portion. Using such light absorption, the first member and the second member can be joined by forming a modified region in the inner portion from the first member to the second member. . According to this laser processing method, since there is no need to interpose a light absorbing member between two members to be joined as in the conventional case, it is possible to efficiently join members having optical transparency.
[0011]
Here, the phenomenon of multiphoton absorption will be briefly described. If the photon energy hν is smaller than the absorption band gap E G of the material, the material becomes optically transparent. Therefore, a condition under which absorption occurs in the material is hv> E G. However, it is optically transparent, increasing the intensity of the laser beam very Nhnyu> of E G condition (n = 2,3,4, ···) the intensity of laser light becomes very high. This phenomenon is called multiphoton absorption. Therefore, even if the member has optical transparency with respect to the first laser beam, the modified region can be formed by generating multiphoton absorption near the condensing point of the first laser beam. Then, the irradiation of the first laser light hardly damages the parts other than the inner parts of the first member and the second member such as melting.
[0012]
The inner portion is a portion from the contact surface between the first member and the second member to a predetermined depth inside the first member, and a portion from the contact surface to a predetermined depth inside the second member. Means the combined part. Further, the modified region means a region where some property of the first and second members is changed by multiphoton absorption or light absorption equivalent thereto. As an example, in the case of a member made of a thermoplastic resin, a region once melted and re-solidified, a carbonized region, or the like is formed as the modified region. In the case of a member made of glass, a region where microcracks are gathered is formed as a modified region.
[0013]
In addition, if the first laser beam is irradiated with the focal point aligned with the contact surface between the first member and the second member, a modified region extending from the first member to the second member is efficiently formed. can do.
[0014]
Further, if the first laser beam is irradiated while moving the condensing point from the first member to the second member in the inner part, the bonding between the first member and the second member is stronger. can do.
[0015]
Further, from the viewpoint of improving the bonding strength, the modified region may be formed continuously along the planned bonding line between the first member and the second member, or the bonding efficiency is improved. From the viewpoint, a plurality of modified regions may be intermittently formed along a planned joining line between the first member and the second member.
[0016]
In addition, it is preferable that after the modified region is formed in the inner portion, the modified region is irradiated with the second laser beam to be absorbed. Thereby, the range of the modification | reformation area | region ranging from a 1st member to a 2nd member can be expanded, and the intensity | strength of joining of a 1st member and a 2nd member can be improved further.
[0017]
The energy density of the second laser light is preferably lower than the energy density of the first laser light. Thereby, in the irradiation of the second laser beam, it is possible to prevent the first member and the portion other than the inner portion of the second member from being damaged such as melting.
[0018]
Note that the first member and the second member may be made of a material having light transmittance with respect to light having a wavelength from the visible light region to the infrared region.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of a laser processing method according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same or corresponding parts are denoted by the same reference numerals, and redundant description is omitted.
[0020]
[First Embodiment]
As shown in FIG. 1, a
[0021]
A
[0022]
The
[0023]
Using the
[0024]
First, the
[0025]
In this state, the condensing point P1 of the pulse laser beam L1 is aligned with the joining
[0026]
The irradiation with the laser light L1 causes multiphoton absorption in the
[0027]
As shown in FIG. 3, the modified
[0028]
Subsequently, the condensing point P <b> 2 of the CW laser beam L <b> 2 is aligned with the joining
[0029]
In the irradiation with the laser beam L2, as shown in FIG. 5, the laser beam L2 is absorbed by the modified
[0030]
As described above, according to the laser processing method of the first embodiment, even if the
[0031]
Further, even if the energy density of the CW laser beam L2 is lower than the energy density of the pulse laser beam L1, the modified
[0032]
Note that the
[0033]
Even if the modified
[0034]
[Second Embodiment]
In the laser processing method of the second embodiment, the
[0035]
First, the
[0036]
In this state, as shown in FIG. 6, the condensing point of the pulsed laser light L1 from the joining
[0037]
The irradiation with the laser light L1 causes multiphoton absorption in the
[0038]
Subsequently, as shown in FIG. 7, the condensing point P1 is aligned with the start point S2 that is a predetermined distance (for example, 1 mm) away from the start point S1 toward the joining
[0039]
Thereafter, such irradiation with the laser beam L1 is repeated n times, and n modified
[0040]
Subsequently, the condensing point P <b> 2 of the CW laser beam L <b> 2 is aligned with the joining
[0041]
In the irradiation with the laser beam L2, as shown in FIG. 8, the laser beam L2 is absorbed by the modified
[0042]
As described above, according to the laser processing method of the second embodiment, similarly to the laser processing method of the first embodiment, the
[0043]
Further, when each modified
[0044]
In addition, since the modified
[0045]
Note that the
[0046]
The present invention is not limited to the first and second embodiments described above. For example, although each said embodiment was a case where the members which consist of PET were joined, this invention is not limited to this, From visible light regions, such as thermoplastic resins, such as an acryl, polycarbonate, vinyl chloride, glass, etc. The present invention can also be applied to the joining of members made of other materials having optical transparency to light having a wavelength up to the infrared region. Moreover, the present invention can also be applied to joining members made of different materials.
[0047]
Note that the irradiation condition of the first laser beam in the present invention is not limited as long as it generates multi-photon absorption or equivalent light absorption, but the first laser beam is focused to form the modified region. The energy density at the points is as follows. That, 152kW / cm 2 when the first and second members of the acrylic, 46kW / cm 2 in the case of polycarbonate, modified region at 25 kW / cm 2 in the case of 15 kW / cm 2, PET in the case of vinyl chloride Is formed. At this time, the other conditions of the first laser beam are as follows: laser light source: QSW-YAG · DPSSL (double wave), wavelength: 532 nm, pulse width: 4 ns, beam diameter at the focal point: 15 μm, for one point Irradiation time: 10 s.
[0048]
Moreover, although 1st Embodiment was a case where the condensing point P1 of pulsed laser beam L1 was match | combined with the
[0049]
And this invention is applicable to the following various uses. For example, in the micro liquid chip, when a groove is formed on the contact surface side of one of the two acrylic plates overlaid, a small width (for example, 100 μm) along the edge of the groove Thus, the modified region can be formed and two acrylic plates can be joined. Furthermore, transparent PET films used for packaging packages such as cosmetics can be joined without using an adhesive.
[0050]
【The invention's effect】
As described above, according to the laser processing method according to the present invention, members having optical transparency can be efficiently joined.
[Brief description of the drawings]
FIG. 1 is a diagram showing an example of a laser processing apparatus for carrying out a laser processing method according to the present invention.
FIG. 2 is a diagram showing an example of first and second members in a laser processing method according to the present invention.
FIG. 3 is a partial cross-sectional view taken along line AA of the first and second members shown in FIG. 2, and shows a state during pulse laser light irradiation in the first embodiment.
4 is a cross-sectional view taken along the line BB of the first and second members shown in FIG. 2, and shows a state after the pulse laser light irradiation in the first embodiment. FIG.
5 is a partial cross-sectional view taken along line AA of the first and second members shown in FIG. 2, and shows a state during CW laser light irradiation in the first embodiment. FIG.
6 is a partial cross-sectional view taken along line AA of the first and second members shown in FIG. 2, and shows a state during pulse laser light irradiation in the second embodiment. FIG.
7 is a cross-sectional view taken along line BB of the first and second members shown in FIG. 2, and shows a state after pulse laser light irradiation in the second embodiment. FIG.
FIG. 8 is a partial cross-sectional view taken along line AA of the first and second members shown in FIG. 2, and shows a state during CW laser light irradiation in the second embodiment.
9 is a cross-sectional view taken along the line BB of the first and second members shown in FIG. 2 and shows a state after CW laser light irradiation in the second embodiment. FIG.
[Explanation of symbols]
2 ... 1st member, 3 ... 2nd member, 21 ... Contact surface, 24 ... Joining line, 26 ... Inner part, 27, 28, 31, 32 ... Modified region, 27a, 31a ... Melting region Quality region), 27b, 31b ... altered region (modified region), L1 ... pulse laser beam (first laser beam), L2 ... CW laser beam (second laser beam), P1, P2 ... condensing point.
Claims (9)
互いに接触する前記第1の部材及び前記第2の部材の内側部分内に集光点を合わせて第1のレーザ光を照射し、前記内側部分内において多光子吸収を発生させて前記内側部分に前記第1のレーザ光を吸収させて、前記第1の部材から前記第2の部材に渡る改質領域を前記内側部分内に形成することで、前記第1の部材と前記第2の部材とを接合することを特徴とするレーザ加工方法。A laser processing method for joining a first member having light transmittance and a second member,
The first member and the second member that are in contact with each other are irradiated with the first laser light with the focusing point aligned in the inner part of the second member, and multiphoton absorption is generated in the inner part to cause the inner part to By absorbing the first laser beam and forming a modified region in the inner part from the first member to the second member, the first member and the second member The laser processing method characterized by joining.
互いに接触する前記第1の部材及び前記第2の部材の内側部分内に集光点を合わせて第1のレーザ光を照射し、前記内側部分に前記第1のレーザ光を吸収させて、前記第1の部材から前記第2の部材に渡る改質領域を前記内側部分内に形成することで、前記第1の部材と前記第2の部材とを接合することを特徴とするレーザ加工方法。A laser processing method for joining a first member having light transmittance and a second member,
The first member and the second member that are in contact with each other are irradiated with the first laser light with the focusing point in the inner part of the second member, the inner part is absorbed with the first laser light, A laser processing method comprising joining the first member and the second member by forming a modified region extending from the first member to the second member in the inner portion.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10137527B2 (en) | 2014-01-17 | 2018-11-27 | Imra America, Inc. | Laser-based modification of transparent materials |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USRE44290E1 (en) * | 2005-09-21 | 2013-06-11 | Orient Chemical Industries, Ltd. | Laser-welded article |
US20110200802A1 (en) * | 2010-02-16 | 2011-08-18 | Shenping Li | Laser Welding of Polymeric Materials |
WO2011115243A1 (en) | 2010-03-16 | 2011-09-22 | アイシン精機株式会社 | Pulse laser device, transparent member welding method, and transparent member welding device |
JP2012250465A (en) * | 2011-06-03 | 2012-12-20 | Seiko Instruments Inc | Thermal head, printer including the same, and method for manufacturing the same |
DE102011081554A1 (en) * | 2011-08-25 | 2013-02-28 | Lpkf Laser & Electronics Ag | Method and apparatus for laser welding two joining partners made of plastic |
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Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2574013B2 (en) * | 1988-11-07 | 1997-01-22 | 帝人株式会社 | Optical processing of molded products such as polycarbonate |
JP2555167B2 (en) * | 1988-11-07 | 1996-11-20 | 工業技術院長 | Optical processing of amorphous plastic moldings |
JP2574009B2 (en) * | 1988-09-05 | 1997-01-22 | 工業技術院長 | Surface modification method for plastic molded products |
JP2810151B2 (en) * | 1989-10-07 | 1998-10-15 | ホーヤ株式会社 | Laser marking method |
JPH07185846A (en) * | 1993-12-28 | 1995-07-25 | Sodick Co Ltd | Formation of marker of thermoplastic high polymer molded goods |
JP2001232687A (en) * | 2000-02-22 | 2001-08-28 | Japan Science & Technology Corp | Forming process for thermoplastic resin member by laser |
JP2001334578A (en) * | 2000-05-26 | 2001-12-04 | Matsushita Electric Works Ltd | Method for welding resin by laser |
JP3810623B2 (en) * | 2000-08-28 | 2006-08-16 | 独立行政法人科学技術振興機構 | Method of bonding resin film for packaging by laser |
US20020108938A1 (en) * | 2001-02-09 | 2002-08-15 | Patel Rajesh S. | Method of laser controlled material processing |
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US10137527B2 (en) | 2014-01-17 | 2018-11-27 | Imra America, Inc. | Laser-based modification of transparent materials |
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