JP4226211B2 - X-ray inspection apparatus and recording medium - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an X-ray inspection apparatus that inspects the internal structure of a subject using X-rays.
[0002]
[Prior art]
The X-ray inspection apparatus obtains an X-ray image by transmitting X-rays irradiated from an X-ray tube through a subject. The material permeability of X-rays is determined by the type of material, the tube current necessary to generate X-rays, the value of tube voltage, and the like. Therefore, at the time of X-ray examination, in order to obtain an appropriate X-ray image, it is necessary to change the values of the tube voltage and the tube current depending on the type and thickness of the subject.
[0003]
However, since it is difficult for beginners to set the optimum tube voltage and tube current values according to the type of subject, the X-ray inspection apparatus can be handled only by some skilled persons. Furthermore, even a skilled person required a certain amount of time to set the optimum tube voltage and tube current values.
[0004]
[Problems to be solved by the invention]
As described above, in the conventional X-ray inspection apparatus, there are difficulties in simplicity of operation, time required for setting conditions, and the like.
[0005]
An object of the present invention is to perform imaging a plurality of times under different imaging conditions prior to the main imaging, and to display a list of a plurality of captured X-ray images, so that even a beginner can easily select optimal inspection conditions. Another object of the present invention is to provide an X-ray inspection apparatus that can be used, and a recording medium that stores a processing program for imaging a subject under an optimal imaging condition using a similar procedure.
[0006]
[Means for Solving the Problems]
The present invention will be described with reference to FIG. 1 showing an embodiment.
(1) The invention of claim 1 includes an X-ray tube 1 that generates X-rays when a tube voltage and a tube current are applied, an imaging device 3 that images X-rays transmitted through the subject 2, and the imaging device 3. The present invention is applied to an X-ray inspection apparatus having a display device 6 for displaying the obtained captured image. An input device 8 that inputs information about the subject 2 and a plurality of imaging conditions related to the subject determined based on the information input by the input device 8 are recorded in the database 11 in association with the subject. The above-described object is achieved by including the control device 5 that images each of the images under a plurality of imaging conditions recorded in the database 11 and displays a list of each of the captured X-ray images on the display device 6.
(2) The invention of claim 2 is the X-ray inspection apparatus according to claim 1, wherein the control device 5 causes the display device 6 to display a list of tube voltage and tube current values together with the X-ray image. And
(3) The invention of claim 3 is the X-ray inspection apparatus according to claim 1, wherein the imaging condition includes a tube voltage and a tube current, and the control device 5 sets the values of the tube voltage and the tube current as a set. The imaging condition is changed for each imaging, and each of the subjects 2 is imaged under a plurality of imaging conditions.
(4) The invention of claim 4 is the X-ray examination apparatus according to claim 3, wherein the control device 5 displays the type of the subject on the display device 6, and a plurality of types are selected according to the type of the selected subject. The imaging condition is set.
(5) The invention of claim 5 is the X-ray inspection apparatus according to any one of claims 1 to 4, wherein the control device 5 is one of a plurality of X-ray images displayed on the display device 6. And a main imaging unit for driving the imaging device 3 under the imaging condition of the X-ray image selected by the selection unit and storing the obtained imaging data as image data. To do.
(6) On the recording medium according to the invention of claim 6, a procedure for inputting information relating to the subject 2, and a procedure for imaging a plurality of images of the subject while changing the imaging conditions based on the inputted information And a procedure for displaying a list of captured images, a procedure for performing actual imaging based on the imaging conditions of an image selected from the displayed images, and a procedure for storing the captured images. A program to be executed is stored, and the above-described object is achieved by executing this program.
[0007]
In the section of the means for solving the above-described problem to explain the configuration of the present invention, the drawings of the embodiments are used to make the present invention easier to understand. However, the present invention is limited to the embodiments. It is not something.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of an X-ray inspection apparatus according to the present invention will be described below with reference to the drawings. First, a description will be given with reference to FIG.
The X-ray inspection apparatus 100 includes an X-ray tube 1 that generates X-rays, an X-ray tube controller 4 that controls tube voltage and tube current necessary for generating X-rays from the X-ray tube 1, and a subject 2. An image pickup device 3 for picking up X-rays transmitted through the image pickup device, a control device 5 having a CPU, converting image data picked up by the image pickup device 3 into image data and performing various controls, and a control device 5 A display device 6 for displaying the converted image data and an input device 8 for inputting a command to the control device 5 are provided. In the control device 5, a memory 9 that stores image data that has been actually captured, a buffer memory 10 that temporarily stores data such as image data and imaging conditions, and a tube voltage and a tube current for the type of the subject 2. And a database 11 in which a plurality of combinations are stored. Such an X-ray inspection apparatus 100 is used as follows.
[0009]
The X-ray tube controller 4 applies a tube voltage and a tube current to the X-ray tube 1 to irradiate the subject with X-rays. The tube voltage and tube current of the X-ray tube 1 controlled by the X-ray tube controller 4 have optimum values depending on the type, thickness, shape, etc. of the object to be inspected, such as metal, semiconductor, and resin. Therefore, the operator inputs these values to the X-ray tube controller 4 via the control device 5 by the input device 8. Moreover, the control apparatus 5 is provided with the database 11 (refer FIG. 2) which stored the some combination which makes a tube voltage and a tube current 1 set. As shown in FIG. 2, the database 11 stores a plurality of combinations of tube voltage and tube current according to the type and thickness of the subject. Therefore, when the operator inputs the type and thickness of the subject from the input device 8, the control device 5 automatically detects these combinations and sequentially inputs them to the X-ray tube controller 4, and images each combination. To do. Regarding the input of the type of the subject, for example, the list of the types of the subject can be displayed on the display device 6, and the operator can select using the input device 8 or can be selected using the touch panel 7. The touch panel 7 is attached to the display surface of the display device 6.
[0010]
X-rays emitted from the X-ray tube 1 pass through the subject 2 and are imaged by an imaging device 3 arranged at a predetermined distance from the X-ray tube 1. As will be described in detail below, when the automatic setting mode is selected, the subject 2 is imaged a plurality of times using the tube voltage and tube current stored in the database 11 of the control device 5.
[0011]
Imaging data of the subject 2 imaged by the imaging device 3 is sent to the control device 5 connected to the imaging device 3 and converted into image data. The image data is stored in the buffer memory 10 provided in the control device 5 together with the tube voltage and tube current data used at the time of imaging.
[0012]
The image data converted by the control device 5 is displayed as an X-ray image on the display device 6 connected to the control device 5. When the automatic setting mode is selected, the display device 6 displays a list of images obtained by imaging a predetermined number of times. As shown in FIG. 3, when the imaging is performed nine times, nine images from P1 to P9 are displayed as a list.
[0013]
When selecting the automatic setting mode, the operator selects an image that seems to be optimal from images that are captured and displayed under different conditions by using the input device 8 such as a keyboard or a mouse, or selects the image using the touch panel 7. The selected image data is associated with the tube voltage and tube current data obtained by imaging. When one image is selected, the control device 5 reads out the corresponding tube voltage and tube current from the buffer memory 10 and controls the X-ray tube controller 4 to control the X-ray tube controller 4 with the tube voltage and tube current optimum for imaging. The specimen 2 is imaged. That is, the main imaging is performed under the condition that an optimal image can be obtained.
[0014]
FIG. 4 and FIG. 5 are flowcharts showing the above processing procedure, and are realized as a program executed by the CPU of the control device 5 of FIG. Hereinafter, description will be given according to this flowchart. When a power switch (not shown) is turned on, a program for executing the flowcharts of FIGS. 4 and 5 is started, and an initial screen is displayed on the display device 6 (step S1). On the initial screen, a display for selecting whether to automatically or manually set the tube voltage and tube current (hereinafter, these values are referred to as a set of condition values or a set of imaging conditions) is performed. The determination as to whether or not this automatic setting is made is made in step S2. If it determines with automatic setting, it will progress to step S3. If it is determined that the setting is not automatic, the process proceeds to step S11. For example, since an expert who is accustomed to handling the X-ray inspection apparatus selects manual setting without selecting automatic setting, a set of condition values can be input in step S11.
[0015]
In step S3, it is determined whether the type of subject has been specified. As described above, the types of subjects are displayed in a list on the display device 6, and the operator selects one of them. If it is determined that the type of subject has been specified, the process proceeds to step S4. If the type of subject has not been specified, the process waits in step S3. In step S4, it is determined whether the operator has input conditions necessary for imaging such as the thickness of the subject and the imaging magnification. If entered, the process proceeds to step S5. If it is not input, the process waits in step S4.
[0016]
In step S5, an initial value for performing repetitive processing is set. The repetition process is performed N times (N is a natural number) a predetermined number of times. The value of N can be freely changed by setting. Further, the variable i for performing the repetitive processing is the number of times of imaging as it is. As shown in step S5, when i = 1, this is the first imaging.
[0017]
In step S6, a set of condition values determined in accordance with the type of subject specified in step S3 and the thickness of the subject inputted in step S4, and a set of condition values inputted in step S4. The subject is imaged under conditions Yi including various conditions of imaging magnification. If it is determined in step S2 that the automatic setting is made, the condition value for one set of tube voltage and tube current is read out from the database 11 by the control device 5, so that it is not necessary for the operator to input it. Imaging data captured by the imaging device 3 is sent to the control device 5 and converted into image data. This image data is also accompanied by data of the imaging condition Yi at that time. These image data and imaging conditions Yi are stored in the buffer memory 10 in the control device 5. When the image data and the imaging condition Yi are stored in the buffer memory 10, the process proceeds to step S7.
[0018]
In step S <b> 7, a list of images captured so far is displayed on the display device 6. As shown in FIG. 6, if imaging is performed i times, i images from P1 to Pi are displayed in a list. In the lower column of each image, as shown in FIG. 7, the values of the tube voltage and the tube current are displayed. After displaying a list of images captured so far, the process proceeds to step S8.
[0019]
In step S8, 1 is added to the variable i for performing repetitive processing. If the process of step S8 is completed, the process proceeds to step S9. In step S9, it is determined whether or not the number of times of imaging has been performed a predetermined number N times. If imaging is performed a predetermined number of times, the process proceeds to step S10. If it has not been performed a predetermined number of times, the process proceeds from step S6 to step S9 by repeatedly changing a set of condition values of the tube voltage and tube current until the predetermined number of times is reached, and then proceeds to step S10. At this time, a set of condition values is changed by reading out a combination necessary for imaging from the database 11 described above.
[0020]
In step S10, it is determined whether there is an optimum image among the images Pi from the images P1 displayed as a list on the display device 6 based on the input of the operator. That is, when an image that the operator thinks is optimal is selected using the input device 8 such as a keyboard or a mouse, or is selected using the touch panel 7, step S10 is affirmed and the process proceeds to step S12. If step S10 is negative, the process proceeds to step S11, and a set of condition values for tube voltage and tube current is manually input. For example, as shown in FIG. 3, a condition manual setting button 12 is displayed on the display device 6, and when this button 12 is selected with a mouse, the screen is switched to a condition manual setting screen and the process proceeds to step S11. As a manual condition setting method, there is a method in which one of the tube voltage and tube current is fixed and the other value is changed, or both values are changed and input. As shown in FIG. 7 described above, since the imaging condition Yi is displayed together with the image Pi on the display device 6, the operator can capture an image Pi that seems to be close to an optimal one from the displayed images. A set of condition values can be input with reference to the condition Yi. Therefore, the burden on the operator is considerably reduced as compared with the case where the condition value is input from the beginning.
[0021]
In step S12, the main imaging is performed based on the set of condition values when the selected image is captured or the set of condition values input in step S11. The imaging condition of the selected image is read from the buffer memory 10 by the control device 5. When the process proceeds from step S10 to step S12, the main imaging is automatically performed by selecting the optimum image. When proceeding from step S11 to step S12, actual imaging is performed by operating an imaging instruction button (not shown) (for example, displayed on the display device 6). The image data captured in step S12 is temporarily stored in the buffer memory 10. If the image data is stored in the buffer memory 10, the process proceeds to step S13.
[0022]
In step S <b> 13, the image obtained by the main imaging is displayed on the display device 6 on the full screen.
If the captured image is displayed on the full screen, the process proceeds to step S14. In step S14, it is determined whether or not the displayed image is acceptable. That is, if an OK button (not shown) (for example, displayed on the display device 6) is operated, step S14 is affirmed and the process proceeds to step S15. When the operator inputs the condition value himself, the captured image may not be clear, so an operation of a re-imaging button (not shown) (for example, displayed on the display device 6) is provided and imaging is performed again. That is, when the re-imaging button is operated, step S14 is denied, and the process proceeds to step S11 to change a set of condition values, and then proceeds to step S12 to perform imaging again.
[0023]
In step S <b> 15, the captured image data is read from the buffer memory 10 and stored in the memory 9 in the control device 5. When the storage is completed, the inspection ends.
[0024]
The operation of the X-ray inspection apparatus according to this embodiment is summarized as follows. When the automatic setting mode is selected, when the type and thickness of the subject 2 are input from the display screen, the combination conditions of the tube voltage and the tube current stored in advance as the database 11 as shown in FIG. 2 are changed. However, the subject 2 is imaged a plurality of times. Each of the plurality of pieces of imaging data is displayed as a list on the display device 6. When the operator selects one of the clearest images from the list display, the main imaging is performed under the imaging conditions when the image is acquired. Therefore, even a beginner can acquire an image similar to an expert in a short time. Although it is difficult for an expert to set imaging conditions for a subject to be handled for the first time, according to this embodiment, operability is improved.
Note that the database 11 in FIG. 2 is created by previously collecting and determining image data for various subjects.
[0025]
A feature of the present invention is that a plurality of different images are acquired under different imaging conditions, and the plurality of images are displayed in a list on a display device. Therefore, the present invention is not limited to the above embodiment, and can be realized in various forms. For example, although a set of tube voltage and tube current is used as the imaging condition, a plurality of images may be obtained by changing the imaging magnification and other conditions. The imaging condition may be changed by inputting only the type or thickness of the subject.
[0026]
The program shown in FIGS. 4 and 5, that is, a procedure for inputting information about the subject, a procedure for taking a plurality of images of the subject while changing the imaging conditions based on the inputted information, and imaging A program that executes a procedure for displaying a list of images, a procedure for performing actual imaging based on the imaging conditions of an image selected from the images displayed in the list, and a procedure for storing the captured images on a computer is floppy. It can also be provided by being stored in a recording medium such as a disk (registered trademark) or a CD-ROM. Alternatively, the program can be provided using a communication line such as the Internet.
[0027]
【The invention's effect】
As described above in detail, the present invention has the following effects.
(1) According to the first and sixth aspects of the invention, the subject is imaged a plurality of times under a plurality of imaging conditions determined based on the input subject information, and the plurality of X-ray images are displayed on the display device. By displaying the list, it is possible to easily confirm a plurality of X-ray images captured under different conditions and to easily set condition values necessary for imaging. Further, according to the inventions of claims 5 and 6, since the main imaging is performed by selecting one of a plurality of X-ray images displayed in a list, the operability is improved.
(2) According to the invention of claim 2, by displaying a list of a set of condition values of the tube voltage and the tube current together with the captured X-ray image, there is no optimal image among the displayed images. In this case, it is possible to easily manually input a set of condition values.
(3) According to the invention of claim 3, the imaging condition with the tube voltage and the tube current set as one set is changed for each imaging, and the subject is imaged a plurality of times under a plurality of imaging conditions. It is possible to save the trouble of changing and inputting the condition value.
(4) According to the invention of claim 4, the subject can be easily specified by displaying the type of the subject on the display device.
[Brief description of the drawings]
FIG. 1 is a block diagram of an X-ray inspection apparatus showing an embodiment of the present invention. FIG. 2 is a diagram showing a database storing a plurality of combinations of tube voltage and tube current. FIG. 4 is a flowchart showing an imaging procedure by the X-ray inspection apparatus according to the present invention. FIG. 5 is a flowchart showing an imaging procedure by the X-ray inspection apparatus according to the present invention. FIG. 6 is a diagram showing a list of X-ray images after i times of imaging. FIG. 7 is a diagram showing tube voltage and tube current values used for imaging together with the X-ray images.
DESCRIPTION OF SYMBOLS 1 ... X-ray tube, 2 ... Subject, 3 ... Imaging device, 4 ... X-ray tube controller, 5 ... Control device, 6 ... Display device, 7 ... Touch panel, 8 ... Input device, 9 ... Memory, 10 ... Buffer memory , 11 ... Database, 12 ... Condition manual setting button, 100 ... X-ray inspection apparatus

Claims (6)

An X-ray tube that generates X-rays when a tube voltage and a tube current are applied, an imaging device that captures X-rays that have passed through a subject, and a display device that displays a captured image obtained by the imaging device In X-ray inspection equipment,
An input device for inputting information about the subject;
A recording apparatus that records a plurality of imaging conditions related to the subject determined based on the information input by the input device in association with the subject;
A control device that images the subject under the plurality of imaging conditions recorded in the recording unit, and displays a list of X-ray images obtained by the plurality of imaging operations on the display device; X-ray inspection apparatus characterized by this. The X-ray inspection apparatus according to claim 1,
The control device causes the display device to display a list of the tube voltage and the tube current values together with the X-ray image. The X-ray inspection apparatus according to claim 1,
The imaging condition includes the tube voltage and the tube current, and the control device changes an imaging condition for each set of the tube voltage and the value of the tube current for each imaging, and the target condition is changed under a plurality of imaging conditions. An X-ray examination apparatus characterized by imaging each specimen. The X-ray inspection apparatus according to claim 3,
The X-ray examination apparatus, wherein the control device displays a type of a subject on the display device, and sets the plurality of imaging conditions according to the selected type of the subject. In the X-ray inspection apparatus according to any one of claims 1 to 4,
The control device includes a selection unit that selects any one of a plurality of X-ray images displayed on the display device;
An X-ray inspection apparatus comprising: a main imaging unit that drives the imaging device under an imaging condition of an X-ray image selected by the selection unit, and stores the obtained imaging data as image data. A procedure for entering information about the subject;
A procedure for capturing an image of a subject multiple times while changing imaging conditions based on the input information;
A procedure for displaying a list of captured images,
A procedure of performing main imaging based on imaging conditions of an image selected from the images displayed in the list;
A recording medium storing a program for executing a procedure for storing a captured image on a computer.

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