JP4195723B2 - Uniform wear polishing equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a polishing apparatus that can obtain the average wear of a polishing wheel even when the width of an object to be polished is very small or thin with respect to the polishing wheel and can always maintain a flat polishing surface. Specifically, the present invention is a polishing apparatus that polishes an object to be polished having a narrow tip such as a hard disk or a tip electronic component, and polishes such that the wear on the surface of the grinding wheel is averaged and made uniform. Relates to the device.
[0002]
[Prior art]
When it is necessary to polish the narrow end of an electronic component such as a hard disk, the surface of the grinding wheel is polished at the narrow end, so that it is slid in the width direction of the grinding wheel. The wear on the surface of the grindstone is averaged. However, in this case, the wear on the surface of the grinding wheel is not averaged well, and only the central part of the grinding wheel is worn, or more is worn near the end of the grinding wheel.
[0003]
This is because the surface used for polishing is more worn out of the surface of the polishing wheel, and the polishing becomes easier when the surface of the polishing wheel is rounded. In addition, when the object to be polished comes close to the end of the polishing grindstone so that it does not fall from the end of the polishing grindstone, it moves so as to return to the original position. In this case, only the center portion of the grinding wheel is worn, and in an extreme case, there is a risk that the grinding wheel having a sectional view as shown in FIG.
[0004]
[Problems to be solved by the invention]
When it is necessary to polish an object that is extremely thin compared to the width of the grinding wheel, the surface of the grinding wheel often wears unevenly. Will have to be replaced. Therefore, the present invention is an economically advantageous polishing that has an effect of uniform wear and a polishing wheel that can be used to the end in a polishing apparatus that polishes an object that is extremely thin compared to the width of the polishing wheel. An object is to provide an apparatus.
[0005]
[Means for Solving the Problems]
As a result of intensive studies to solve the above-described problems, the present invention provides a polishing apparatus that can polish the tip shape easily while at the same time providing uniform wear.
[0006]
That is, in a polishing apparatus having a rotating grindstone for polishing a very narrow workpiece , an X, Y-stage that can slide independently in the X direction and the Y direction, and the X of the X, Y-stage And a fixed stage that slides only in the Y direction. The X, Y-stage includes an X-stage that can reciprocate in the X direction. It is arranged on a stage, can slide in the Y direction with respect to the X-stage, and can slide only in the X direction with the X-stage with respect to the fixed stage, and the rotation spring or pneumatic means for adjusting Y- stage structure for receiving the shaft of the grinding wheel is mounted, the contact pressure to the workpiece of the grindstone, the grindstone the X- stage, only the X direction round trip more than the width of the approximation within the width Drive means for moving, have, the part of the X- stage on fixed stage base that extends in the Y-direction, one end being rotatably supported by the support shaft with respect to the X-direction A pair of inclined cams arranged at a predetermined interval, and fixed on the fixed stage so as to be sandwiched between the pair of inclined cams, A fixed roller that can come into contact with its inner surface when rotated, a pair of moving rollers that are provided on the Y-stage and outside the pair of inclined cams, and that can come into contact with the outer surfaces of the inclined cams the provided Rutotomoni by the movable roller I accompanied the reciprocating motion in the X direction of the X- stage presses the outer surface of the inclined cam, for pressing the fixing roller the inclined cam rotates ,in front The Y-stage is moved in the Y direction so that the rotating grindstone fixed to the Y-stage moves away from the object to be polished at the same time that the tip of the object to be removed is removed from the end of the width of the rotating grindstone. When the polishing object is placed on the rotating grindstone, the rotating grindstone moves in the Y direction so as to contact the tip of the object to be polished, and the object to be polished is returned to the end of the rotating grindstone . . As a result, even if the degree of wear is the same over the entire width of the grindstone, and the grindstone wears and the thickness of the grindstone changes, the object to be polished at the narrow tip can be similarly polished. It is a polishing device that can.
[0007]
One of the major form is pre Symbol X, Y- stage and the fixed stage, which features a Rukoto placed on the position-adjustable positioning stage in X and Y directions, the narrow tip It is easy to adjust the part of the object to be polished to the polishing position of the abrasive. Other forms, the surface of the pair of movable roller and the fixed roller, that is covered with resilient material is characterized by, when abuts on the cam, the distribution of force on the moving roller, is in softer , The adjustment is made smoother . In yet another embodiment, the pair of inclined cams are symmetrical, and are formed wide from one end side to the other end side that are pivotally supported by the fixed stage base, and contact the fixed roller. The inclination of the inner surface is gentler than the inclination of the outer surface contacting the pair of moving rollers. Thereby, the movement of the Y- stage by the inclined cam, that is, the movement of the rotating grindstone can be made smoother.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the polishing apparatus of the present invention will be described in detail with reference to FIGS.
The apparatus of the present invention is a polishing apparatus provided with a rotating grindstone (3) for polishing a very narrow workpiece (2) as shown in the figure. For example, in order to accurately form the end surface (16, 17, 18; see FIGS. 1 and 4) of a glass hard disk substrate for an electronic storage device, the tip of the glass disk (2) is polished. It is convenient to use the polishing apparatus of the present invention. In FIG. 1, the object to be polished (2) is divided into three end faces (16, 17, 18) in FIG. 1, and each surface is polished. In FIG. Such three end faces are abbreviated.
[0009]
In the conventional polishing apparatus, as shown in FIG. 3A, when a very narrow object to be polished (2) is brought into contact with the rotating polishing grindstone (3) and polished, it is shown in a sectional view of FIG. 3B. In this way, the central portion is recessed and must be changed without using the entire grindstone. On the other hand, in the polishing apparatus of the present invention, as shown in FIGS. 4A and 4B, the rotary polishing grindstone (3) reciprocates with respect to the object to be polished (2). This is a polishing system in which the surface of a grinding wheel that is always worn becomes flat and the grinding wheel wears, that is, wears uniformly, as shown in a cross-sectional view.
[0010]
According to the present invention, the rotating grindstone (3) is placed on an X, Y-stage that can slide independently in the X-direction and the Y-direction. The X, Y-stage is a spring (indicated by 6 in FIG. 1) for adjusting the contact pressure to the object to be polished (2) by the rotating grindstone (3) always upward (FIGS. 1, 2). On the surface). Instead of the spring (6), pneumatic means can also be used. In the polishing apparatus of the present invention, the reciprocating sliding motion is performed within the approximate width (2a) equal to or greater than the width (d) of the rotating grindstone (3) only in the X-direction. The drive means for that purpose may be a mechanism comprising a lever, wheels, etc., driven by a motor and moved by reciprocating motion.
[0011]
In the rotating grindstone (3), the contact pressure to the object to be polished (2) is considered to be the whole stage up by the spring or air pressure shown in (6) of FIG. And pulling. The tension imparts a contact pressure between the rotating grindstone (3) and the workpiece (2) to polish. Since the polishing apparatus (1) of the present invention is for polishing a very narrow workpiece (2), this contact pressure may be very small.
[0012]
It is necessary to average the wear of the abrasive (3) by reciprocating the very narrow object (2) on the rotating grindstone (3) left and right. For this purpose, first, motor means (not shown) for reciprocating the rotating grindstone (3) are provided to the left and right at intervals of the width d of the abrasive (3). Since the rotating grindstone is mounted on the X and Y-stages that can be slid independently in the X-direction and the Y-direction, the positional relationship can be freely set with respect to the object to be polished.
[0013]
As for the reciprocating motion, the reciprocating motion of only the width d of the polishing grindstone (3) wears only the central portion of the polishing grindstone as in the conventional polishing apparatus. In order to make the wear uniform, it is necessary to polish using the entire width of the polishing wheel (3) uniformly. For that purpose, it is important to slide to the end of the grinding wheel. That is, the reciprocating motion is performed with an approximate width (d + α = 2a: see FIGS. 1 and 5) equal to or larger than the width of the rotating grindstone.
[0014]
That is, the rotating grindstone (3) is rotated by its rotating shaft (4), and the structure receiving the shaft is placed on the Y-stage (5) as shown in the figure. The Y-stage (5) is slid only in the Y direction by four Y-direction guides (12) sliding in the Y direction on the rail (7 ') of the X-stage (7), and The fixed stage (8) slides only in the X direction by the guide (13) sliding in the X direction.
[0015]
With respect to the Y-stage (5), the X-stage (7) sliding only in the Y direction can be further slid in the X direction by the four Y-direction guides (12) sliding in the Y direction. The X-direction guide (15) is placed on the position adjustment stage (9). That is, the X-stage (7) has a structure (7 ") slidable in the X direction on the rail (7 ') on which the Y -stage (5) is placed and the position adjustment stage ( 9 ). The lower portion of (7 ") extends to the fixed stage base (24), and a pair of deformation cams (22) and (23) are mounted thereon, and are coupled by a support shaft (25) therefor.
[0016]
The Y-stage (5) on which the rotating grindstone (3) is placed is coupled to the X-stage (7) with a left-right reciprocating motion driving means (not shown), and is given a reciprocating motion in the X direction to the left and right. Then, it reciprocates left and right in the X direction with the X-stage via the four guides (12) and moves over the width of the grindstone (3) (2a = d + α). Therefore, the object to be polished (2) moves over the width of the grindstone (3) over the width, and as a result, the grindstone (3) is evenly worn over the entire width.
[0017]
In the drawing, the fixed roller (20) positioned between the two inclined cams (22) and (23) is coupled to the above-described fixed stage (8) by a support shaft. Further, as shown in the lower part of FIG. 1, the fixed stage (8) extends downward (considering on the plane of FIGS. 1 and 2) and slides in the Y direction only (14). It is coupled on the position adjustment stage (9) via (not shown). Then, two moving rollers (21) are provided at positions outside the two inclined cams (22) and (23). The moving roller (21) is placed on the Y-stage (5), and is moved by reciprocating movement of the Y-stage (5), and an approximate width equal to or larger than the width (d) of the rotating grindstone only in the X-direction. Reciprocating sliding motion within.
[0018]
Accordingly, the mechanism shown in the lower part of the figure; the mechanism composed of the rollers (20), (21), (21) and the pair of cams (22), (23), the outer side of the Y-stage (5) is reciprocated. The moving rollers (21) and (21) respectively press the outer sides of the cams (22) and (23), and the cams (22) and (23) are rotated. Finally, the fixed rollers (20) are moved downward. (See FIG. 5). When the Y-stage (5) is pushed downward (on the surface of FIGS. 1 and 2) through the fixed roller (20), the fixed stage (8), and the X direction guide (13), the rotating grindstone (3) Is slightly shifted downward. At this time, the tip of the object to be polished (2) is detached from the end of the width of the rotating grindstone (3). That is, the tip of the object to be polished (2) is detached from the rotating grindstone (3), and at the same time, the rotating grindstone (3) is shifted downward to ensure safety. (3) On the contrary, since the rotating grindstone (3) rises from the bottom of the workpiece (2) (on the surface of FIGS. 1 and 2), the end of the grindstone (3) can be easily Easily returned and mounted on the part. Accordingly, the tip of the object to be polished (2) advances on the grindstone (3) at the same speed, and the tip of the object to be polished (2) is also softened at the end, so that the tip of the object to be polished (2) comes off. The wear is averaged, as shown in FIG. 4, resulting in a flat wear surface. Therefore, it can be used until the grindstone (3) is completely worn out.
[0019]
As described above, the X-stage (7) can be slid in the X direction in the drawing and the Y-stage (5) is in the Y direction, as described above, with respect to the position adjustment stages (9) and (10). The rotary grindstone (3) can be arbitrarily positioned in the X and Y directions on the plane of FIG. 1 by this position adjusting stage (9) (10). By rotating '), the stage (11) can be slid in the X direction, and the rotating grindstone is adjusted to an arbitrary position with respect to the workpiece (2).
[0020]
Further, as shown in FIG. 5, the pair of cams (22, 23) has a shape that becomes wider toward the tip and is symmetrical, and a fixed roller (20) is sandwiched between them. Each of the moving rollers (21) is outside the cams (22, 23).
[0021]
Next, even if the degree of wear is the same over the entire width of the grindstone (3), and the whetstone (3) is worn and the thickness of the grindstone (3) changes, the tip of the narrow width is the same. Part of the object to be polished (2) can be polished. That is, in FIG. 5, when the grindstone (3) is worn and the rollers (21), (20), (21) are in positions indicated by 21 ″, 20 ″, 21 ″, the cams (22), (23) At positions far from the shaft (25), the rollers (21) and (21) press the cams (22) and (23). It cannot be pressed. Therefore, in order to contact and press the roller (20) at the same movement distance as the positions (21), (20) and (21), the width of the cam must be widened. Therefore, as shown in the drawing, the shapes (22) and (23) of the two cams become wider as the tip ends. Further, the outer surfaces of the cams (22) and (23) are greatly inclined and the inner surfaces thereof are gently inclined. The cams (22) and (23) move the Y-stage (5), that is, the rotating grindstone (3). The movement is made smoother.
[0022]
In other words, a fixed roller (20) that moves only in the Y-direction is provided between two inclined cams (22, 23) that are pivotally supported at a predetermined interval, and further outside the two inclined cams (22, 23). Furthermore, each is provided with a moving roller (21, 21). Then, for example, when the rotating grindstone (3) moves to the right by a (see FIG. 5) from the center point, and the left roller (21) moves to the position (21 ′) as shown in FIG. When the roller (21) presses the left cam (22), and conversely moves to the left by a, the right roller (21) presses the right cam (23) and presses the roller (20). Since it touches and presses, if it moves 2a in both, it will reverse. That is, the distance moves by 2a = d + α. Thus, the polishing can be continued within a range slightly deviated from the grindstone width d. That is, the roller (21) presses the outside of the cams (22) and (23), the cam (22) rotates to the right, and the cam (23) rotates to the left, and the central fixed roller (20) is moved. When pressed at the inner edge, the Y-stage (5) moves downward in the figure via the fixed roller (20) and tends to move away from the workpiece (2). That is, in the reciprocating motion, the two moving rollers (21) and the two cams (22) and (23) move the center fixed roller (20) at the left and right reciprocating ends, that is, every time the distance moves by d + α. Pushing down a little causes the grindstone (3) to move away from the object to be polished (2).
[0023]
That is, the fixed roller (20) can be moved only in the Y-direction by being sandwiched between the cams (22) and (23) pivotally supported at the point (25), and therefore moves downward in the figure. Then, the entire X-stage moves downward, and eventually the rotating grindstone (3) tends to move away from the object to be polished (2). Accordingly, the rotating grindstone (3) moves away from the object to be polished (2) at the same time as the rotating grindstone (3) moves away from the object to be polished (2) against the tension of the spring (6).
[0024]
Next, the stage (5) is reversed and the workpiece (2) is moved so as to be placed on the rotating grindstone (3). At that time, the stage, that is, the rotating grindstone (3) is moved. It moves in the opposite direction to the above movement, moves up in the figure, contacts the object to be polished (2), and places it. That is, even if the tip of the object to be polished (2) is detached from the end of the width of the rotating grindstone (3), it is easily returned to the end of the grindstone (3) and the abrasive (3) is worn away. , Even if the thickness changes, i.e. the whole stage moves in the Y-direction; this relationship; i.e. between the two inclined cams (22, 23), the fixed roller (20) and the outside of the cam Since the relationship of the moving roller 21 is not changed, the reciprocating motion can be repeated in the same manner.
[0025]
In this case, according to the polishing apparatus of the present invention, the surfaces of the moving rollers (21) and (21) and the fixed roller (20) are made of an elastic material. The elastic material is particularly rubber. For this purpose, in the reciprocating movement of the stages (5) and (7) to the left and right, the moving rollers (21) and (21) on the surface of the elastic material respectively hit the outer surfaces of the cams (22) and (23) and press them. Furthermore, the fixed roller (20) on the surface of the elastic material is also pressed by the inner surfaces of both cams (22) and (23).
[0026]
At this time, because the surface of each roller is an elastic material, the roller moves a little slower than the pressure, but when reversing and returning, the returning speed for the elastic material surface is slow, a little slow, Since the rotating grindstone (3) moves upward, the rotating grindstone (3) rises upward after the workpiece (2) returns to the position above the rotating grindstone (3). The object to be polished (2) at the narrow tip is placed again on the rotating grindstone (3), and polishing is continued. In the polishing apparatus of the present invention, by repeating such reciprocating motion, the object to be polished (2) is reciprocated left and right on the polishing grindstone (3), and the average grindstone wear occurs. Polishing is continued.
[0027]
That is, the specific arrangement of the fixed roller (20), the moving rollers (21), (21) and the cams (22), (23) on the surface of the elastic material is X, X of the Y-stages (5), (7). -The movement in the direction and reciprocation are restricted within a certain approximate width, and at the same time, the grindstone (3) is evenly worn even at the end where the workpiece (2) comes off the rotating grindstone (3). Furthermore, even if the thickness (h) is changed, the specific intervals of the fixed roller (20), the moving rollers (21), (21), and the cams (22), (23) on the elastic material surface are the same. Since the positional relationship does not change, the same reciprocating motion can be performed within a certain width.
[0028]
That is, even if the tip of the object to be polished (2) is detached from the end of the width of the rotating grindstone (3), it is easily returned and placed on the end of the grindstone (3), and the abrasive (3) is worn away. Thus, even if the thickness (h) changes, the object (2) having a narrow tip can be polished and the reciprocating motion can be continued in the same manner.
[0029]
The position of the X, Y-stage in the X-direction is such that the fixed roller (20) fixed to the X- and Y-stages slides in the Y-direction of the rotating grindstone (3) by the abutment by the cams (22) and (23). As the grindstone slides in the X-direction, the entire surface of the grindstone is evenly worn even if the object to be polished at the narrow end is polished.
[0030]
In the polishing apparatus of the present invention configured as described above, the end portion of the rotating grindstone (3) is not worn strongly, and the wear of the grindstone is made uniform in the width direction.
The shape of the two cams becomes wider toward the tip, so that the inclination of the outer surface of the cam is severe and the inclination of the inner surface thereof is moderated, and the cam makes the movement of the stage, that is, the movement of the rotating grindstone more Smoothed.
[0031]
Further, using the three sets of the polishing apparatus of the present invention, for example, three end faces (16), (17), (18) (see FIGS. 1, 4A) of the disk end of the hard disk (2) are simultaneously polished. be able to. That is, when the polishing apparatus of the present invention is attached to each of the three end faces (16, 17, 18: see FIG. 4), the hard disk end face can be finished at a time.
[0032]
【The invention's effect】
The polishing apparatus for uniform wear of the present invention has the following technical effects by the configuration as shown in the figure.
(1) The X- and Y-stages that can be slid independently in the X-direction and the Y-direction regulate the sliding width in the X-direction within an approximate width (2a) that is greater than or equal to the width (d) of the rotating wheel. And even if the tip of the workpiece is detached from the end of the width of the rotating grindstone, it is easily returned and placed on the end of the grindstone. The object to be polished at the narrow end can be polished.
[0033]
(2) Positioning of the rotating grindstone and the workpiece can be easily performed.
(3) The speed at which the roller whose surface is covered with the elastic material is returned is slow, and the object to be polished at the narrow end is easily placed on the rotating grindstone.
(4) The shapes of the two cams become wider toward the tip, so that the inclination of the outer surface of the cam is severe and the inclination of the inner surface thereof is moderated. Exercise is smoother.
[Brief description of the drawings]
FIG. 1 is a front view of a polishing apparatus of the present invention.
FIG. 2 is a partial cross-sectional side view of the polishing apparatus of the present invention.
FIG. 3 is a schematic explanatory view showing a state of a conventional polishing apparatus for polishing an object (2) having a narrow width. A shows a state of polishing, and B shows a cross section of the abrasive material worn by polishing.
FIG. 4 schematically illustrates a polishing operation for polishing a narrow object (2) with the polishing apparatus of the present invention. A shows a state of polishing according to the present invention, and B shows a cross section of an abrasive material worn by polishing.
FIG. 5 is a view for explaining the operation of a fixed roller (20), a moving roller (21), and cams (22, 23) sandwiching the fixed roller (20) in the polishing apparatus of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Polishing apparatus 2 Narrow to-be-polished object 3 Rotary grindstone 4 Rotary grindstone rotating shaft 5 Y-stage 6 Spring 7 X-stage 8 Fixed stage 9, 10, 11 Position adjustment stage 12 Y-direction sliding guide 13 X-direction sliding Moving guide 14 Y-direction sliding guide 15 X-direction sliding guides 16, 17, 18 Three end surfaces 20 to be formed with a hard disk 20 Fixed roller (moves only in the Y direction)
21 Moving roller (moving only in the X direction)
22, 23 Deformation cam 24 Fixed stage base (coupled to X-stage by 7 ")
25 Cam rotating shaft 33 Surface 41 worn by a conventional polishing apparatus Polishing surface of a grindstone

Claims (4)

In a polishing apparatus having a rotating grindstone for polishing a very narrow workpiece,
X and Y-stages that can slide independently in the X and Y directions, and one end that is exposed in the Y direction at a substantially central portion in the X direction of the X and Y stages, and that can slide only in the Y direction With a stage,
The X, Y-stage is
An X-stage capable of reciprocating in the X direction,
Arranged on the X-stage, slidable in the Y direction with respect to the X-stage, and slidable only in the X direction with the X-stage with respect to the fixed stage; A Y-stage on which a structure for receiving the shaft of the rotating grindstone is placed;
Spring or pneumatic means for adjusting the contact pressure to the workpiece of the grinding wheel,
Wherein X- stage, drive means for forward Fukuun moving only in the grindstone width or more approximate the width of the X-direction,
Have
One end side is rotatably supported by a support shaft on a fixed stage base obtained by extending a part of the X-stage in the Y direction, and has an inner surface and an outer surface inclined with respect to the X direction. A pair of inclined cams arranged at predetermined intervals;
A fixed roller that is fixed on the fixed stage so as to be sandwiched between the pair of inclined cams, and that can come into contact with an inner surface thereof when the inclined cam rotates ;
A pair of moving rollers on the Y-stage and provided on the outside of the pair of inclined cams and capable of contacting the outer surface of the inclined cams ;
The equipped Rutotomoni,
Pressing the outer surface of the movable roller I accompanied the reciprocating motion in the X direction of the X- stage the inclined cam, by pressing the fixing roller the inclined cam rotates, the width of the grinding wheel The Y-stage is moved in the Y direction so that the rotating grindstone fixed to the Y-stage is separated from the object to be polished at the same time that the tip of the object is removed from the end of
When the object to be polished is placed on the rotating grindstone, the rotating grindstone moves in the Y direction so as to contact the tip of the object to be polished, and the object to be polished is returned to the end of the rotating grindstone. Polishing equipment. Before Symbol X, Y- stage and the fixed stage, claim 1 Symbol placement of the polishing apparatus is characterized in that is placed on the position-adjustable positioning stage in X and Y directions. The surface of the pair of movable roller and the fixed roller, a polishing apparatus according to claim 1 or 2 characterized in that it is covered with an elastic material. The pair of inclined cams are symmetrical, and are formed to be wide from one end side to the other end side that are pivotally supported by the fixed stage base.
The polishing apparatus according to any one of claims 1 to 3, wherein an inclination of an inner surface that contacts the fixed roller is gentler than an inclination of an outer surface that contacts the pair of moving rollers .

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