JP2000042916A - Grinding device for uniform abrasion - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent ununiformed abrasion of an abrasive material surface and the early replacement of the abrasive material, in grinding a material to be ground having width extremely narrower than that of the abrasive material. SOLUTION: A rotating grinding wheel 3 is placed on X and Y stages 7 and 5, and a spring 6 for adjusting the contact pressure of the grinding wheel 3 to a material 2 to be ground is equipped. Moreover a fixed roller 20 is journaled at a given interval between two tilted cams 22 and 23, and furthermore two movable rollers 21 are journaled movably in reciprocative slide to a position on the outer sides of two tilted cams, within an approximate width wider than the width of the rotating grinding wheel in only the X direction. Following the reciprocative movement of the X stage, the respective movable rollers press the outer sides of the cams to rotate the cams to press the fixed roller, and the X stage is pressed downward to slightly move the rotating grinding wheel downward to remove the tip of the material to be ground from the end part of the grinding wheel width. In placing the tip of the material to be ground onto the grinding wheel again, the above tip is easily returned to be placed onto the end part of the grinding wheel to repeat the same degree abrasion over the whole width of the grinding wheel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a polishing method, wherein
The present invention relates to a polishing apparatus capable of obtaining abrasion of a polishing grindstone on average even when the polishing grindstone is very small or thin, and capable of always holding a flat polishing surface. More specifically, the present invention relates to a polishing apparatus for polishing an object to be polished at a narrow tip such as a hard disk or a tip electronic component. Related to the device.

[0002]

2. Description of the Related Art When it is necessary to grind a narrow end of an electronic component such as a hard disk, the surface of a grinding wheel is
In order to be polished at the narrow end, the polishing wheel is slid in the width direction of the polishing wheel, and the wear on the surface of the polishing wheel is averaged. However, then, the wear on the surface of the grinding wheel is not well averaged and only the central portion of the grinding wheel is worn, or more near the end of the grinding wheel.

[0003] This is because the surface used for polishing is more worn out of the surface of the grinding wheel, and the more the surface of the grinding wheel is rounded, the easier the polishing becomes. It is. Also, in order to prevent the narrow object to be polished from falling from the end of the polishing whetstone, when the object to be polished comes close to the end of the polishing whetstone, a sliding motion is performed so as to return to the original position. In this case, only the central portion of the grinding wheel is worn, and in extreme cases, the grinding wheel may have a sectional view as shown in FIG. 3B.

[0004]

When an object to be polished must be polished extremely thin compared to the width of the lapping stone,
Often the surface of the grinding wheel is worn unevenly,
Then, even though all of the grinding wheels are not used, they have to be replaced a little earlier. Accordingly, the present invention provides a polishing apparatus for polishing an object to be polished which is extremely thin in comparison with the width of the polishing wheel, has an action of uniform abrasion, and can use the polishing wheel to the end, and is economically advantageous polishing. It is intended to provide a device.

[0005]

According to the present invention, as a result of intensive studies to solve the above-mentioned problems, a polishing apparatus capable of uniformly polishing and easily polishing a tip shape as a result of the following is provided. Provided by a simple configuration.

That is, in a polishing apparatus having a rotating grindstone for polishing a very narrow object to be polished, the rotating grindstone is
X, Y- that can slide independently in the X-direction and Y-direction
Mounted on the stage; the X, Y-stage is provided with a spring or a pneumatic means for adjusting the contact pressure of the rotating grindstone to the object to be polished, and within an approximate width not less than the width of the rotating grindstone only in the X-direction. An X-stage comprising a driving means for reciprocating sliding movement, sliding only in the Y direction with respect to the Y-stage below, and sliding only in the X direction with respect to the fixed stage;
A Y-stage that slides only in the Y-direction with respect to the X-stage; and a fixed roller that is supported between two inclined cams and that is supported at a predetermined interval; At the position outside the two inclined cams, two moving rollers mounted on and supported by an X-stage and supported in a reciprocating sliding motion within an approximate width not less than the width of the rotary grindstone only in the X-direction are provided.
With the reciprocation of the X-stage, each moving roller presses the outside of the cam, and further, the cam rotates, presses the fixed roller, presses the X-stage downward, and the rotating grindstone moves downward. A little, the tip of the object to be polished comes off from the end of the width of the grindstone, and at the same time the grindstone moves down, and conversely, when the object to be polished rests on the grindstone, It is returned and mounted, and the degree of wear is the same over the entire width of the grindstone, and even if the grindstone is worn and the thickness of the grindstone changes, the object to be polished at the narrow end portion is similarly polished. It is a polishing apparatus that can perform.

Further, the X, Y-stage and the fixed stage are further mounted on a position adjusting stage capable of adjusting the position, and the object to be polished at the narrow end is adjusted to the polishing position of the abrasive. To facilitate. Further, it is preferable that the surface of the moving roller is covered with an elastic material, so that the force distribution to the moving roller is made softer and the above-mentioned adjustment becomes smoother when hitting the cam. is there. Then, the shape of the two cams becomes wider toward the tip, whereby the outer surface of the cam has a strong inclination and the inner surface thereof has a gentle inclination, and the movement of the stage, that is, the movement of the rotary grindstone, is controlled by the cam. It can be done more smoothly.

[0008]

FIG. 1 shows an embodiment of a polishing apparatus according to the present invention.
This will be described in detail with reference to FIGS. The apparatus of the present invention is a polishing apparatus provided with a rotary grindstone (3) for polishing a very narrow object to be polished (2) as shown in the figure. For example, an end surface (1) of a glass hard disk substrate for an electronic storage device is used.
6, 17, 18: In order to accurately form the tip of the glass disk (2), it is convenient to use the polishing apparatus of the present invention in order to accurately form the glass disc (2). The object to be polished
In (2), in FIG. 1, the end face is divided into three (16, 17, 18), and each face is polished. In FIG. 2 and other figures, such three end faces of the object to be polished are Has been abbreviated.

In a conventional polishing apparatus, as shown in FIG. 3A, when a very narrow object to be polished (2) is brought into contact with a rotary polishing wheel (3) and polished, a cross section of FIG. As shown in the figure, the center part is dented, without using all the whetstones,
I have to change it. On the other hand, in the polishing apparatus of the present invention, as shown in FIGS.
The rotary grinding wheel (3) reciprocates with respect to (2), and
This is a polishing method in which the surface of the constantly worn abrasive grindstone becomes flat and the grindstone wears, that is, wears uniformly, in a cross section as shown in the sectional view B of FIG.

According to the present invention, the rotary grindstone (3) is mounted on an X, Y-stage which can slide independently in the X-direction and the Y-direction. The X, Y-stage is such that the rotary grindstone (3) is always upwardly directed (shown by 6 in FIG. 1) for adjusting the contact pressure on the work (2). (On the surface). Instead of the spring (6), pneumatic means can also be used. In the polishing apparatus of the present invention, the rotating grindstone is provided only in the X-direction.
The reciprocating sliding motion is performed within the approximate width (2a) not less than the width (d) of (3). The driving means for that purpose may be a mechanism that is driven by a motor and includes a lever, wheels, and the like that move in a reciprocating motion.

The contact pressure of the rotating grindstone (3) on the workpiece (2) is raised by the spring or air pressure shown in (6) of FIG. (Thinking above). The tension applies a contact pressure between the rotary grindstone (3) and the object (2) to be polished, and polishing is performed. Since the polishing apparatus (1) of the present invention is for polishing a very narrow object (2) to be polished, the contact pressure may be very small.

A very narrow object to be polished (2) must be reciprocated right and left on the rotating grindstone (3) to equalize the wear of the abrasive (3). First of all,
The grindstone (3) is moved to the left and right at an interval of the width d of the abrasive (3).
Is provided with a motor means (not shown) for reciprocating.
The rotary grindstone is mounted on an X, Y-stage that can slide independently in the X-direction and the Y-direction, so that the positional relationship can be set freely with respect to the workpiece.

For the reciprocating motion, the width d of the grinding wheel (3)
With only the reciprocating movement, only the central portion of the polishing grindstone is worn as in the conventional polishing apparatus. In order to make the wear uniform, it is necessary to perform polishing by using the entire width of the grinding wheel (3) uniformly. For that purpose, it is important to slide to the end of the grinding wheel. That is, the reciprocating motion is performed with an approximate width (d + α = 2a: see FIGS. 1 and 5) which is equal to or larger than the width of the rotary grindstone.

That is, the rotating grindstone (3) is rotated about its rotation axis (4), and the structure receiving the axis is, as shown in FIG.
-Placed on stage (5). And Y-stage
(5) 4 on the rail (7 ') of the X-stage (7)
With the Y-direction guide (12) that slides in two Y-directions, it slides only in the Y-direction, and for the fixed stage (8), with the guide (13) that slides in the X-direction, only in the X-direction. To slide.

With respect to the Y-stage (5), the X-stage (7), which slides only in the Y-direction, by four Y-direction guides (12) which slide in the Y-direction, further slides in the X-direction. Moveable, X-direction guide (15), position adjustment stage (9)
Placed on That is, the X-stage (7) is connected to the rail (7 ') on which the X-stage is mounted and the position adjustment stage (10).
Structure (7 ") having a structure (7") slidable in the direction
The lower part thereof extends to a fixed stage base (24), on which a pair of deformable cams (22) and (23) is mounted and connected by a support shaft (25) therefor.

The Y-stage (5) on which the rotary grindstone (3) is mounted is connected to an X-stage (7) by means of a left-right reciprocating motion drive means (not shown), and reciprocates left and right in the X direction. When the movement is given, the whetstone (3) reciprocates in the X direction with the X-stage through the four guides (12) and moves over the width of the grindstone (3) (2a = d + α). Therefore, the object to be polished (2) moves on the grindstone (3) over its width, and as a result, the grindstone (3) is uniformly worn over the entire width.

The fixed roller (20) located between the two inclined cams (22) and (23) is connected to the aforementioned fixed stage (8) by a support shaft in the figure. Further, as shown in the lower part of FIG. 1, the fixed stage (8) extends downward (considering on the plane of FIGS. 1 and 2) and slides in the Y direction only in the Y direction (14). (Not shown), it is coupled on the position adjustment stage (9). Two moving rollers are located outside the two inclined cams (22) and (23).
(21) is provided. The moving roller (21) is a Y-stage.
It is placed on (5), and reciprocates in the approximate width not less than the width (d) of the rotary grindstone only in the X-direction with the reciprocating movement of the Y-stage (5).

Therefore, the mechanism shown at the bottom of the figure; the mechanism comprising the rollers (20), (21) and (21) and the pair of cams (22) and (23) allows the Y-stage (5) to reciprocate. Accordingly, the outer moving rollers (21) and (21)
(22) Pressing the outside of (23), the cam (22) (2)
3) is rotated, and finally, the fixed roller (20) is pressed downward (see FIG. 5). The Y-stage (5) is pushed down (on the surface in FIGS. 1 and 2) via the fixed roller (20), the fixed stage (8), and the X-direction guide (13), and then the rotating grindstone (3) Is slightly displaced downward. At this time,
This is when the tip of the object to be polished (2) deviates from the end of the width of the rotary grindstone (3). That is, the tip of the object to be polished (2) is a rotating grindstone.
At the same time, the rotating grindstone (3) shifts downward and secures safety, and when the workpiece (2) is mounted on the rotating grindstone (3), Since the rotating grindstone (3) rises from below the object to be polished (2) (on the surface in FIGS. 1 and 2), it is easily and softly returned to the end of the grindstone (3). Therefore, the tip of the object to be polished (2) moves at a constant speed on the grindstone (3), and the tip of the object to be polished (2) is also soft at the end. Are averaged out, as shown in FIG. 4, resulting in a flat wear surface. Therefore, the grinding wheel (3) can be used until it is completely worn.

As described above, the X-stage (7) can slide in the vertical direction in the figure with respect to the position adjusting stages (9) and (10) by the sliding grooves shown in the figure, and the Y-stage (5) Can slide in the horizontal direction, but the rotating wheel (3)
(9) and (10) can be arbitrarily aligned in the X and Y directions on the plane of FIG.
By rotating 1 ′), the stage (11) can slide in the X direction, and the rotating grindstone is adjusted to an arbitrary position with respect to the workpiece (2).

Further, as shown in FIG. 5, the pair of cams (22, 23) has a wider shape toward the tip and is symmetrical, and a fixed roller (20) is sandwiched between them. In addition, there are moving rollers (21) outside each of the cams (22, 23).

Next, the degree of wear is made uniform over the entire width of the grindstone (3). Further, even if the grindstone (3) is worn and the thickness of the grindstone (3) is changed, the width is similarly changed. Workpiece with narrow tip
(2) can be polished. That is, in FIG.
The whetstone (3) is worn and the rollers (21), (20) and (21)
Is at the position indicated by 21 ″, 20 ″, 21 ″
(22) At a position far from the axis (25) of (23), the roller (2)
1) and (21) press the cams (22) and (23). Then
Roller must be moved a long distance from the position where there is no wear
(20 ") and cannot be pressed.
(21) At the same moving distance as the positions of (20) and (21),
To contact and press (20), the width of the cam must be widened. Therefore, as shown, the shape of the two cams
(22) and (23) become wider toward the tip. Further, the outer surfaces of the cams (22) and (23) are steeply inclined and the inner surfaces thereof are moderately inclined, and the cams (22) and (23) move the Y-stage (5), that is, the rotating grindstone (3). Exercise is made smoother.

That is, a fixed roller (20) that moves only in the Y-direction is provided between two inclined cams (22, 23) that are pivotally supported at a predetermined interval.
Outside of 3), a moving roller (21, 21) is further provided. Then, for example, the rotating grindstone (3) is moved from the center point by a
When the left roller (21) moves to the position (21 ') as shown in FIG. 5, the roller (21) presses the left cam (22). On the contrary, when the right roller (21) moves leftward by a, the right roller (21) presses the right cam (23) and contacts and presses the roller (20). I do. That is, 2a
= D + α. Thus, polishing can be continued within a range slightly out of the grindstone width d. That is, the roller (21) presses the outside of the cams (22) and (23), the cam (22) rotates clockwise and the cam (23) rotates counterclockwise, and the central fixed roller (20) is rotated. Pressing on the inner edge,
Via the fixed roller (20), the Y-stage (5) moves downward in the figure and tends to move away from the work (2).
That is, in the reciprocating motion, the two moving rollers (21) and the two cams (22) and (23) are at the left and right reciprocating ends, that is, d +
Every time it moves a distance of α, the central fixed roller (20) is slightly pushed down, causing the grindstone (3) to move away from the work (2). In the reverse movement, there is an opposite movement.

That is, the cam (22) pivotally supported at the point (25)
Since the fixed roller (20) can be moved only in the Y-direction by being sandwiched between (23) and (23), it moves downward in the figure. Then, the entire X-stage moves downward, and eventually, the rotary grindstone (3) tends to move away from the workpiece (2). Accordingly, the rotating grindstone (3) comes off the workpiece (2) at the same time as the rotating grindstone is opposed to the tension of the spring (6).
(3) moves in a direction away from the workpiece (2).

Next, the stage (5) reversely moves, and the object (2) to be polished moves so as to be mounted on the rotating grindstone (3). 3) moves in the reverse of the above-described movement, moves upward in the figure, and
Touch (2) and place it. That is, even if the tip of the object to be polished (2) is displaced from the end of the width of the rotating grindstone (3), it is easily returned and mounted on the end of the grindstone (3), and the abrasive (3) is worn. , Even if the thickness changes, i.e., the entire stage moves in the Y-direction;
Since the relationship between the fixed roller (20) and the moving roller (21) outside the cam does not change between (2, 23), the reciprocating motion can be repeated similarly.

In this case, according to the polishing apparatus of the present invention,
The moving roller (21) (21) and the fixed roller (20)
The surface is an elastic material. The elastic material is particularly preferably rubber. Therefore, in the reciprocating movement of the stages (5) and (7) to the left and right, the moving rollers (21) and (21) on the surface of the elastic material respectively abut against and press the outer surfaces of the cams (22) and (23).
Further, the fixed roller (20) on the surface of the elastic member is also pressed by the inner surfaces of both the cams (22) and (23).

At this time, since the surface of each roller is made of an elastic material, it moves a little slower against the pressing, but when it reverses and returns, the speed of return due to the elastic material surface becomes slower, Slightly late, as the grinding wheel (3) moves up,
After the object to be polished (2) returns to the position above the grinding wheel (3),
Since the rotating grindstone (3) rises upward, the object to be polished (2) at the narrow end portion is easily mounted on the rotating grindstone (3) again, and polishing is continued. In the polishing apparatus of the present invention, the repetition of such reciprocating motion causes the polishing wheel
On (3), the object (2) is reciprocated right and left,
Abrasion of the averaged grinding wheel occurs and polishing continues.

That is, the specific arrangement of the fixed roller (20), the moving rollers (21) (21), and the cams (22) (23) on the surface of the elastic material is the X, Y-stage (5) (7). ) X-
Direction and reciprocating motion are controlled within a certain approximate width, and at the same time, the grinding wheel (3) is uniformly worn even at the end where the workpiece (2) comes off from above the rotating grinding wheel (3), Furthermore, its thickness
Even if (h) is changed, at the same interval, that is, the fixed roller (20), the moving rollers (21), (21) and the cam on the elastic material surface
Since the specific arrangement relations of (22) and (23) do not change, the same reciprocating motion can be performed within a certain width.

That is, even if the tip of the object to be polished (2) comes off from the end of the width of the rotary grindstone (3), it is easily returned and mounted on the end of the grindstone (3), and the abrasive (3) Is worn and the thickness (h) is changed, the object to be polished (2) at the narrow tip is polished,
The reciprocating movement can be continued as well.

The positions of the X and Y stages in the X direction are fixed by fixed rollers (20) and cams (22) and (2).
The sliding movement of the rotating grindstone (3) in the Y-direction is adjusted by the abutment according to (3), and as the grindstone is slid in the X-direction, the object to be polished at the narrow tip is polished. Are also worn uniformly on the entire surface of the grinding wheel.

In the polishing apparatus of the present invention having the above-described structure, the end of the rotary grindstone (3) does not wear strongly, and the wear of the polishing grindstone is made uniform in the width direction. The shape of the two cams is wider toward the tip, so that the outer surface of the cam is strongly inclined and the inner surface thereof is moderately inclined, and the movement of the stage, that is, the movement of the rotary grindstone, is further reduced by the cam. Be smoothed.

Further, by using three sets of the polishing apparatus of the present invention, for example, three end faces (16), (17), and (18) of the disk end of the hard disk (2) are simultaneously (see FIGS. 1 and 4A). Polishing treatment can be performed. That is, three end faces (16, 1
7, 18: see FIG. 4), the end face of the hard disk can be finished at once by attaching the polishing apparatus of the present invention as described above.

[0032]

The polishing apparatus for uniform wear of the present invention has the following technical effects by the configuration shown in the drawing. (1) X that can slide independently in the X-direction and the Y-direction,
Using the Y-stage, the sliding width in the X-direction is
(d) When the tip of the object to be polished is restricted within the approximate width of (2a) or more and the end of the width of the rotating grindstone is displaced, it is easily returned and mounted on the end of the grindstone, and the polishing grindstone is removed. Even if the thickness is changed due to abrasion, the object to be polished at the narrow end portion can be polished at the same interval.

(2) The positioning between the rotary grindstone and the object to be polished can be easily performed. (3) The speed of return is reduced due to the roller whose surface is covered with the elastic material, and the object to be polished at the narrow end is easily mounted again on the rotating grindstone. (4) The shape of the two cams becomes wider toward the tip, so that the outer surface of the cam has a steep inclination and the inner surface thereof has a gentle inclination, and the cam moves the stage, that is, rotates the grinding wheel. Exercise is smoother.

[Brief description of the drawings]

FIG. 1 is a front view of a polishing apparatus according to the present invention.

FIG. 2 is a partial cross-sectional side view of the polishing apparatus of the present invention.

FIG. 3 is a schematic explanatory view showing a state of a conventional polishing apparatus for polishing a narrow object to be polished (2). A shows the state of polishing,
B shows a cross section of the abrasive material worn by polishing.

FIG. 4 schematically illustrates a polishing operation for polishing a narrow object to be polished (2) with the polishing apparatus of the present invention. A shows the state of polishing according to the present invention, and B shows the cross section of the abrasive material worn by polishing.

FIG. 5 is a diagram illustrating the operation of a fixed roller (20), a moving roller (21), and cams (22, 23) sandwiching the fixed roller (20) and the moving roller (21) in the polishing apparatus of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Polishing apparatus 2 Narrow object to be polished 3 Rotating grindstone 4 Rotary axis of rotating grindstone 5 Y-stage 6 Spring 7 X-stage 8 Fixed stage 9, 10, 11 Position adjustment stage 12 Y direction sliding guide 13 X direction sliding Moving guide 14 Y direction sliding guide 15 X direction sliding guide 16, 17, 18 Three end faces on which hard disks should be formed 20 Fixed roller (moves only in Y direction) 21 Moving roller (moves only in X direction) 22, 23 Deformation cam 24 Fixed stage base (coupled to X-stage by 7 ") 25 Cam rotation axis 33 Surface worn by conventional polishing equipment 41 Grinding surface of grinding stone

Claims (4)

[Claims] 1. A polishing apparatus having a rotary grindstone for polishing a very narrow object to be polished, wherein the rotary grindstone can slide independently in an X-direction and a Y-direction. The X, Y-stage is provided with a spring or a pneumatic means for adjusting the contact pressure of the rotating grindstone on the object to be polished, and is approximated to the width of the rotating grindstone only in the X-direction. A driving means for reciprocating sliding movement within the width, an X-stage that slides only in the Y-direction with respect to the Y-stage below, and slides only in the X-direction with respect to the fixed stage; Having a Y-stage that slides only in the Y-direction with respect to the stage; further comprising a stationary roller, which is pivotally supported at a predetermined distance and is located between two inclined cams; Placed on the X-stage at a position outside the cam, In addition, two moving rollers that reciprocate in a reciprocating sliding motion within the approximate width of the rotating grindstone only in the X-direction are provided. With the reciprocating motion of the X-stage, each moving roller moves outside the cam. Press
Further, the cam rotates, presses the fixed roller, presses the X-stage downward, the rotating grindstone is slightly displaced downward, and the tip of the object to be polished from the end of the width of the rotating grindstone, Simultaneously, the rotating grindstone is displaced downward, and when the object to be polished is placed on the rotating grindstone, it is easily returned and placed at the end of the grindstone, making the degree of wear uniform over the entire width of the grindstone, and,
The polishing apparatus according to the above-mentioned, wherein even if the whetstone is worn and the thickness of the whetstone changes, the object to be polished at the narrow end can be polished similarly. 2. The polishing apparatus according to claim 1, wherein the X, Y-stage and the fixed stage are further mounted on a position adjustment stage capable of position adjustment. 3. The two moving and fixed rollers are surface covered with a resilient material, the speed at which it hits the cam, is pressed and returns due to the resilient material surface when returning. 2. The polishing apparatus according to claim 1, wherein the object to be polished at the narrow end portion is easily mounted again on the rotary grindstone. 4. The shape of the two cams is wider toward the tip, so that the outer surface of the cam has a strong inclination and the inner surface has a gentle inclination, and the cam moves or rotates the stage by the cam. 3. The polishing apparatus according to claim 1, wherein the movement of the whetstone is made smoother.