JP4191125B2 - Polarization conversion element and manufacturing method thereof - Google Patents

Polarization conversion element and manufacturing method thereof Download PDF

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JP4191125B2
JP4191125B2 JP2004309578A JP2004309578A JP4191125B2 JP 4191125 B2 JP4191125 B2 JP 4191125B2 JP 2004309578 A JP2004309578 A JP 2004309578A JP 2004309578 A JP2004309578 A JP 2004309578A JP 4191125 B2 JP4191125 B2 JP 4191125B2
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弘和 青島
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AGC Techno Glass Co Ltd
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この発明は、偏光変換素子およびその製造方法に関する。   The present invention relates to a polarization conversion element and a manufacturing method thereof.

ランダムな偏光の光を、偏光方向の揃った1種類の直線偏光に変換して出射する偏光変換素子としては、特許文献1:特開平7−294906号公報に記載されたものが知られている。図11(A)には、このような偏光変換素子の斜視図、図10(B)にはその平面図およびこの偏光変換素子における偏光変換を例示した。この偏光変換素子は、偏光分離膜11を有する線状の偏光ビームスプリッタ110と、反射膜12を有するプリズム120とを交互に貼り合わせたものである。また偏光分離素子の出射面の一部に選択位相差板として、λ/2位相差板(1/2波長位相差板)130を備えている。   As a polarization conversion element that converts random polarized light into one type of linearly polarized light having a uniform polarization direction and emits the same, one described in Patent Document 1: Japanese Patent Laid-Open No. 7-294906 is known. . FIG. 11A illustrates a perspective view of such a polarization conversion element, FIG. 10B illustrates a plan view of the polarization conversion element, and polarization conversion in the polarization conversion element. This polarization conversion element is obtained by alternately bonding a linear polarization beam splitter 110 having a polarization separation film 11 and a prism 120 having a reflection film 12. In addition, a λ / 2 phase difference plate (1/2 wavelength phase difference plate) 130 is provided as a selective phase difference plate on a part of the exit surface of the polarization beam splitting element.

この構成の偏光変換素子において、光入射面に入射したS偏光成分(偏光ベクトルが入射面に垂直な偏光、S波)とP偏光成分(偏光ベクトルが入射面内にある偏光、P波)とを含む入射光は、まず、偏光分離膜11によりS波とP波とに分離される。P波は、偏光分離膜11をそのまま透過し、λ/2位相差板130によってS波に変換されて出射する。またS波は偏光分離膜11によってほぼ直角に反射し、反射膜12によりさらに直角に反射し、出射する。従って、この偏光変換素子に入射したランダムな偏光方向を有する光は、すべてS波の光となって出射する。   In the polarization conversion element having this configuration, the S-polarized component incident on the light incident surface (polarized light whose polarization vector is perpendicular to the incident surface, S-wave) and the P-polarized component (polarized light whose polarization vector is in the incident surface, P-wave) First, the incident light including is separated into an S wave and a P wave by the polarization separation film 11. The P wave passes through the polarization separation film 11 as it is, is converted into an S wave by the λ / 2 phase difference plate 130, and is emitted. Further, the S wave is reflected at a substantially right angle by the polarization separation film 11, further reflected at a right angle by the reflection film 12 and emitted. Accordingly, all light having a random polarization direction incident on the polarization conversion element is emitted as S-wave light.

また、このような構造の偏光分離素子の製造方法については、特許文献2:特開平2−227901号、特許文献3:特開平10−39136号、および特許文献4:特開平10−90520号に記載されている。これらは偏光分離膜と反射膜の形成された透光性板材を積層接着した後、積層面に対し例えば45°の角度で切断してブロックを切り出し、光学研磨加工を行った後に、光出射面に部分的に位相差板を1本ずつ貼りつけるものである。
特開平7−294906号公報 特開平2−227901号公報 特開平10−39136号公報 特開平10−90520号公報
Also, with respect to a method of manufacturing a polarization separation element having such a structure, Patent Document 2: Japanese Patent Laid-Open No. 2-227901, Patent Document 3: Japanese Patent Laid-Open No. 10-39136, and Patent Document 4: Japanese Patent Laid-Open No. 10-90520. Are listed. After laminating and bonding a light-transmitting plate material on which a polarization separation film and a reflection film are formed, these are cut at an angle of, for example, 45 ° with respect to the laminated surface to cut out blocks, and after performing optical polishing, the light exit surface A part of the phase difference plate is attached to each other.
JP 7-294906 A JP-A-2-227901 JP 10-39136 A JP-A-10-90520

しかしながら、図10のような偏光分離素子においては、λ/2位相差板がむき出しになって光出射面に貼り付けられていることから、耐熱性、耐候性や耐久性などの面で改善すべき点があった。また素子本体には通常ガラスが用いられ、その出射面には反射防止膜が施され、この面に貼り付けられるポリカーボネートなどのプラスチックのλ/2位相差板は素子本体のガラス出射面との密着性がよくないという問題点があった。また液晶プロジェクタなどの投射型表示装置においては、高出力の光源の近くに偏光変換装置を配置して用いることから、耐熱性や耐久性のより優れた素子が強く望まれてきた。   However, in the polarization separation element as shown in FIG. 10, since the λ / 2 retardation plate is exposed and attached to the light emitting surface, it is improved in terms of heat resistance, weather resistance and durability. There was a point. Also, glass is usually used for the element body, and an antireflection film is applied to its emission surface. A plastic λ / 2 retardation plate attached to this surface is in close contact with the glass emission surface of the element body. There was a problem that it was not good. Further, in a projection type display device such as a liquid crystal projector, since a polarization conversion device is disposed near a high output light source, an element having higher heat resistance and durability has been strongly desired.

また偏光分離素子の製造において、光入射面と光出射面を研磨仕上げした後に偏光ビームスプリッタなどの光出射面にλ/2位相差板を1本ずつ貼り付ける工程を有するため、その生産性の点でも問題があった。   In addition, in the manufacture of the polarization separation element, since the light incident surface and the light output surface are polished and finished, a step of attaching one λ / 2 phase difference plate to the light output surface such as a polarizing beam splitter is provided. There was also a problem.

本発明は、従来技術における上述の課題を解決した偏光分離素子およびその製造方法を提供することを目的とするものである。   An object of the present invention is to provide a polarization separation element and a method for manufacturing the same, which solve the above-described problems in the prior art.

上記の課題を解決するため、本発明の偏光変換素子は、第1の主面を光入斜面、第2の主面を光出射面とす原出願に従ってる平板状の透光性基材中に、第1および第2の主面に対し傾斜して間隔をおいて交互に平行配置された第1の機能性光学膜と第2の機能性光学膜とを備え、第1の機能性光学膜は偏光分離膜であり、第2の機能性光学膜は第1の主面側から順に配置された反射膜と位相差板からなることを特徴とする。   In order to solve the above-mentioned problems, the polarization conversion element of the present invention is a flat translucent substrate according to the original application in which the first main surface is a light incident slope and the second main surface is a light exit surface. In addition, the first functional optical film includes a first functional optical film and a second functional optical film which are alternately arranged in parallel at an interval with respect to the first and second main surfaces. The film is a polarization separation film, and the second functional optical film is composed of a reflective film and a retardation plate arranged in this order from the first main surface side.

本発明においては、偏光変換素子を構成する上で、平板状の透光性基材が光入射面を形成する第1の主面と光出射面を形成する第2の主面とは互いにほぼ平行であることが好ましく、また第1の機能性光学膜および第2の機能性光学膜はほぼ等間隔に配置されていることが好ましく、さらに第1の機能性光学膜および第2の機能性光学膜が主面とのなす角はほぼ45°であることが好ましい。   In the present invention, in constituting the polarization conversion element, the first main surface on which the flat translucent substrate forms the light incident surface and the second main surface on which the light output surface is formed are substantially the same. Preferably, the first functional optical film and the second functional optical film are preferably arranged at substantially equal intervals, and further the first functional optical film and the second functional The angle formed by the optical film with the main surface is preferably approximately 45 °.

本発明において、例えば位相差板として1/4波長(λ/4)位相差板を反射膜に隣接させて用いることにより、偏光変換素子の光入射面にランダム偏光を入射し、偏光分離膜を透過したP波を出射させ、また他方で偏光分離膜を反射したS波は、反射膜に隣接した位相差板を透過させた後に反射膜で反射させ再び位相差板を透過させることにより、P波に変換して出射させることができる。   In the present invention, for example, a quarter wavelength (λ / 4) phase difference plate is used as a phase difference plate adjacent to the reflection film, so that random polarized light is incident on the light incident surface of the polarization conversion element, and a polarization separation film is provided. The S wave that has been transmitted through the P wave and reflected from the polarization separation film on the other side is transmitted through the phase difference plate adjacent to the reflection film, then reflected by the reflection film, and transmitted through the phase difference plate again. It can be converted into a wave and emitted.

本発明に用いるこのような位相差板として、ポリカーボネート系フィルムやポリアクリレート系フィルムなどを2軸延伸したプラスチックフィルムを用いることができる。   As such a retardation plate used in the present invention, a plastic film obtained by biaxially stretching a polycarbonate film or a polyacrylate film can be used.

本発明の偏光変換素子によれば、位相差板がむき出しではなく、複数の透光性部材の接合部に偏光分離膜に隣接して挟み込まれて接着され配置されているので、位相差板として2軸延伸プラスチックフィルムが用いられた場合でも、ブラスチックフィルムの位相差板が熱によって変形したりはがれたりするのを避けることができる。このため耐熱性や耐候性などについて、従来に比べ大幅な向上が得られる。なお、本発明に用いる耐熱性の2軸延伸プラスチックフィルムとしては、ポリアクリレート系フィルムが特に優れていることがわかった。また本発明の偏光分離素子における接着面には、各種光学接着剤を用いることができる。   According to the polarization conversion element of the present invention, the retardation plate is not exposed, and is disposed adjacent to the polarization separation film and bonded to the joint portion of the plurality of translucent members. Even when a biaxially stretched plastic film is used, the retardation film of the plastic film can be prevented from being deformed or peeled off by heat. For this reason, the heat resistance, weather resistance, and the like can be greatly improved as compared to the conventional case. In addition, it turned out that a polyacrylate type film is especially excellent as a heat-resistant biaxially stretched plastic film used for this invention. Various optical adhesives can be used for the adhesive surface in the polarization separation element of the present invention.

本発明の偏光変換素子においては、光の反射損失を低減するために、光入射面や光出射面に反射防止膜を設けることができる。ここで用いる反射防止膜としては、例えばTiOとSiOとを5層程度交互に蒸着し積層した積層膜を用いることができる。本発明の偏光変換素子においては、従来の偏光変換素子が光出射面に配置していた位相差板を素子の内部に設けるようにしたので、光出射面には位相差板を設ける必要がない。このため本発明の偏光変換素子においては、位相差板に煩わされることなく、密着性の良好な反射防止膜を光入射面や光出射面に設けることができる。 In the polarization conversion element of the present invention, an antireflection film can be provided on the light incident surface and the light emitting surface in order to reduce the reflection loss of light. As the antireflection film used here, for example, a laminated film in which about 5 layers of TiO 2 and SiO 2 are alternately deposited and laminated can be used. In the polarization conversion element of the present invention, the phase difference plate that the conventional polarization conversion element is arranged on the light exit surface is provided inside the element, so that it is not necessary to provide the phase difference plate on the light exit surface. . For this reason, in the polarization conversion element of the present invention, an antireflection film having good adhesion can be provided on the light incident surface and the light emitting surface without bothering the retardation plate.

このようにして、本発明により耐熱性の優れた偏光変換素子が得られ、例えば100℃程度の高温度で長時間使用する液晶プロジェクタに用いた場合にも、劣化が少ないという利点を有する偏光変換素子が製造可能となった。   In this way, a polarization conversion element having excellent heat resistance can be obtained by the present invention. For example, the polarization conversion element has an advantage that the deterioration is small even when used in a liquid crystal projector used at a high temperature of about 100 ° C. for a long time. The device can be manufactured.

本発明の偏光変換素子の製造方法は、平行な2面を有する第1の透光性板材の一方の面に偏光分離膜を形成する偏光分離膜形成工程と、平行な2面を有する第2の透光性板材の一方の面に反射膜を形成する反射膜形成工程と、偏光分離膜の形成された前記第1の透光性板材と、位相差板と、反射膜の形成された前記第2の透光性板材とを、前記位相差板が前記反射膜に隣接するように順次積層し接着して積層体を形成する積層接着工程と、この積層体を積層面に対し所定の角度で切断加工し、互いに平行な光入射面と光出射面とを有する偏光変換素子ブロックを形成する偏光変換素子ブロック形成工程と、偏光変換素子ブロックの前記光入射面と前記光出射面とを光学的に研磨する光学研磨工程とを備えたことを特徴とする。   The method for manufacturing a polarization conversion element of the present invention includes a polarization separation film forming step of forming a polarization separation film on one surface of a first light-transmissive plate member having two parallel surfaces, and a second method having two parallel surfaces. A reflective film forming step of forming a reflective film on one surface of the translucent plate material, the first light transmissive plate material on which the polarization separation film is formed, the retardation plate, and the reflective film formed on the surface. A lamination bonding step of sequentially laminating and adhering a second translucent plate material so that the retardation plate is adjacent to the reflective film to form a laminated body, and the laminated body at a predetermined angle with respect to the laminated surface A polarization conversion element block forming step of forming a polarization conversion element block having a light incident surface and a light output surface parallel to each other, and optically connecting the light incident surface and the light output surface of the polarization conversion element block. And an optical polishing step for performing polishing.

また本発明の偏光変換素子の製造方法は、平行な2面を有する第1の透光性板材の一方の面に偏光分離膜を形成する工程と、この平行な2面を有する前記透光性部材のもう一方の面に反射膜を形成する工程と、偏光分離膜および反射膜の形成された前記第1の透光性板材と、位相差板と、偏光分離膜も反射膜も形成していない第2の透光性板材とを、この位相差板の板面が前記反射膜に隣接するように順次積層し接着して積層体を形成する積層接着工程と、この積層体を積層面に対し所定の角度で切断加工し、互いに平行な光入射面と光出射面とを有する偏光変換素子ブロックを形成する偏光変換素子ブロック形成工程と、この偏光変換素子ブロックの前記光入射面と前記光出射面とを光学的に研磨する光学研磨工程とを備えたものであってもよい。   The method for producing a polarization conversion element of the present invention includes a step of forming a polarization separation film on one surface of a first light-transmitting plate having two parallel surfaces, and the light-transmitting property having the two parallel surfaces. Forming a reflection film on the other surface of the member; the first light-transmitting plate material on which the polarization separation film and the reflection film are formed; a phase difference plate; and both the polarization separation film and the reflection film are formed. A non-transparent second light-transmitting plate material is laminated and bonded so that the plate surface of the retardation plate is adjacent to the reflective film to form a laminate, and the laminate is used as a laminate surface. A polarization conversion element block forming step of forming a polarization conversion element block having a light incident surface and a light exit surface parallel to each other by cutting at a predetermined angle, and the light incident surface and the light of the polarization conversion element block And an optical polishing step for optically polishing the exit surface. Good.

上記本発明の偏光変換素子の製造方法においては、偏光分離膜と反射膜が形成された第1と第2の透光性板を交互に積層する際に、偏光分離膜と反射膜が形成された第1と第2の透光性板を交互に積層する際に、反射膜にλ/4位相差板を接着し、これを第1と第2の透光性板の間に挟み込むようにすればよい。このため、従来のように偏光変換素子ブロックを形成し光出射面を研磨加工した後にλ/2位相差板を1枚ずつ貼り付けるという手間のかかる工程が不要となり、従来に比べて大幅な生産性向上が得られる。   In the method for manufacturing a polarization conversion element of the present invention, the polarization separation film and the reflection film are formed when the first and second light-transmitting plates on which the polarization separation film and the reflection film are formed are alternately laminated. When alternately laminating the first and second translucent plates, a λ / 4 retardation plate is bonded to the reflective film, and this is sandwiched between the first and second translucent plates. Good. This eliminates the time-consuming process of pasting the λ / 2 retardation plates one by one after forming the polarization conversion element block and polishing the light exit surface as in the prior art, which is significantly more productive than in the past. Improvement is obtained.

本発明の偏光変換素子の製造方法においては、上記積層接着工程が、複数の第1の透光性板材と複数の第2の透光性板材と位相差板とを光硬化性接着層を介して積層し、光照射により接着する光照射接着工程を備えているものであってもよい。このように、光硬化性接着材を用い、光照射によって接着する工程を用いることにより、偏光変換素子の製造の生産性及び信頼性を高めることができる。   In the method for manufacturing a polarization conversion element of the present invention, the laminate bonding step includes a plurality of first light-transmitting plate materials, a plurality of second light-transmitting plate materials, and a phase difference plate via a photocurable adhesive layer. It may be provided with a light irradiation adhesion step of laminating and adhering by light irradiation. Thus, the productivity and reliability of manufacture of a polarization conversion element can be improved by using a photo-curing adhesive and using a step of bonding by light irradiation.

この光照射接着工程は、光照射接着工程が、第1の透光性板材、位相差板および第2の透光性板材を光硬化性接着層を介して積層する工程と、光を照射して光硬化性接着層を硬化させる工程とを順次繰り返すものであってもよい。   In this light irradiation bonding step, the light irradiation bonding step includes a step of laminating the first light-transmitting plate material, the phase difference plate, and the second light-transmitting plate material through the light-curable bonding layer, and light irradiation. Then, the step of curing the photocurable adhesive layer may be sequentially repeated.

また、この光照射接着工程は、光照射接着工程が、第1の透光性板材、位相差板および第2の透光性板材を光硬化性接着層を介して順次積層して積層体を形成する工程と、積層体を形成した後に光を照射して光硬化性接着層を硬化させる工程を備えたものであってもよい。   Further, in this light irradiation bonding step, the light irradiation bonding step is performed by sequentially laminating the first light-transmitting plate material, the phase difference plate, and the second light-transmitting plate material through the photocurable bonding layer. It may be provided with a step of forming and a step of curing the photocurable adhesive layer by irradiating light after forming the laminate.

この光照射接着工程は、第1および第2の透光性板材の互いに平行な面に対し、角度をなす方向から光の照射を行って光硬化を行うことが好ましい。こうすることによって光が接着層に効率よく照射され、短い照射時間で確実な接着を行なうことができる。   In this light irradiation adhesion step, it is preferable to perform light curing by irradiating light from a direction forming an angle with respect to parallel surfaces of the first and second translucent plates. By doing so, light is efficiently irradiated to the adhesive layer, and reliable bonding can be performed in a short irradiation time.

本発明の偏光変換素子は、位相差板が素子表面に露出していないため、従来の偏光変換素子に比べ、耐熱性、耐候性、耐久性の著しく優れたものが得られる。このため、本発明によれば、偏光変換素子に光源からの強い光線にさらされるなどして温度上昇があっても、安定してその機能を保つことが可能である。   In the polarization conversion element of the present invention, since the retardation plate is not exposed on the surface of the element, a material having remarkably superior heat resistance, weather resistance, and durability can be obtained as compared with the conventional polarization conversion element. For this reason, according to the present invention, even when the polarization conversion element is exposed to a strong light beam from the light source and the temperature rises, the function can be stably maintained.

また本発明の偏光変換素子の製造方法によれば、位相差板は透光性板材を積層する工程で透光性部材の層の間に挟み込めばよく、偏光変換素子ブロックの光出射面の研磨後に各出射面に位相差板を貼るという従来の工程を必要としないので、従来に比べて製造工程が大幅に短縮できる。   According to the method for manufacturing a polarization conversion element of the present invention, the retardation plate may be sandwiched between the layers of the light transmissive member in the step of laminating the light transmissive plates, and the light exit surface of the polarization conversion element block Since the conventional process of attaching a retardation plate to each exit surface after polishing is not required, the manufacturing process can be greatly shortened compared to the conventional process.

以下に本発明の実施の形態を図面に従い詳細に説明する。   Embodiments of the present invention will be described below in detail with reference to the drawings.

(実施の形態1)偏光変換素子1
図1(A)は本発明の一実施形態の偏光変換素子の模式的斜視図、また図1(B)はその平面図である。
(Embodiment 1) Polarization conversion element 1
FIG. 1A is a schematic perspective view of a polarization conversion element according to an embodiment of the present invention, and FIG. 1B is a plan view thereof.

図1(A)および(B)において、偏光変換素子100はランダムな偏光光束を偏光方向が一方向に揃った光束に変換して出射する作用を持つ直方体形状の素子であり、断面がほぼ平行四辺形の柱状の第1の透光性部材101と第2の透光性部材102が交互に接合されて形成されている。この偏光変換素子100の一方の面を光入射面100aとし、これとほぼ平行な他方の面を光出射面100bとしている。   1A and 1B, a polarization conversion element 100 is a rectangular parallelepiped element having an action of converting a random polarized light beam into a light beam whose polarization direction is aligned in one direction and emitting it, and has a substantially parallel cross section. A quadrangular columnar first translucent member 101 and a second translucent member 102 are alternately joined. One surface of the polarization conversion element 100 is a light incident surface 100a, and the other surface substantially parallel to the light incident surface 100a is a light emitting surface 100b.

光入射面100aおよび光出射面100bに対して所定の角度をなす第1の透光性部材101と第2の透光性部材102の接着面には、反射膜12とこの反射膜に隣接してλ/4位相差板131が配置された接着面と、偏光分離膜11が形成された接着面とが、図1(A)に示されたように交互に配列されている。   On the bonding surface of the first translucent member 101 and the second translucent member 102 that form a predetermined angle with respect to the light incident surface 100a and the light emitting surface 100b, the reflective film 12 is adjacent to the reflective film. The adhesive surface on which the λ / 4 retardation film 131 is arranged and the adhesive surface on which the polarization separation film 11 is formed are alternately arranged as shown in FIG.

第1の透光性部材101および第2の透光性部材102には、磨きガラスやフロートガラスなどの板ガラスを用いることができる。これらの透光性部材はガラス以外の透光性材料、例えばアクリル樹脂やポリカーボネ−ト樹脂などの透光性樹脂を用いることもできる。   As the first light-transmissive member 101 and the second light-transmissive member 102, plate glass such as polished glass or float glass can be used. These translucent members may be made of translucent materials other than glass, for example, translucent resins such as acrylic resins and polycarbonate resins.

偏光分離膜11は、S波とP波のうちP波を選択的に透過し他方が選択的に反射する性質を有する膜であって、例えば誘電体多層膜を積層することによって形成される。   The polarization separation film 11 is a film having a property of selectively transmitting a P wave of the S wave and the P wave and selectively reflecting the other, and is formed, for example, by laminating a dielectric multilayer film.

反射膜12としては、例えばアルミニウム膜のような反射膜を用いることができるが、誘電体多層膜を積層し、偏光分離膜11で反射された直線偏光成分のみを選択的に反射し、他の直線偏光成分は反射しないように構成することによって、反射による損失のより少ない反射膜が形成できる。   As the reflection film 12, for example, a reflection film such as an aluminum film can be used. However, a dielectric multilayer film is stacked, and only the linearly polarized light component reflected by the polarization separation film 11 is selectively reflected. By configuring so that the linearly polarized light component is not reflected, a reflective film with less loss due to reflection can be formed.

図2は本実施形態の偏光変換素子100の一部を模式的平面図で示し、この偏光変換素子100に入射したランダムな偏光の光が一方向の偏光に変換されて出射する様子を模式的に示したものである。ランダム偏光(S+P)の入射光は、偏光変換素子100の光入射面100aから偏光分離膜11に向けて入射し、透光性部材101内を通過して偏光分離膜11にてランダム偏光の成分中のP波が透過しS波が反射する。偏光分離膜11を透過したP波は、透光性部材102内を進んで光出射面100bから出射する。他方で偏光分離膜11を反射したS波は、透光性部材101内を進み、λ/4位相差板131を経て反射膜12にて反射され、再びλ/4位相差板131を経てP波に変換され光出射面100bから出射する。こうして偏光変換素子に入射した光は、いずれもP波となって偏光変換素子の光出射面から出射する。   FIG. 2 is a schematic plan view showing a part of the polarization conversion element 100 of the present embodiment, and schematically shows how randomly polarized light incident on the polarization conversion element 100 is converted into unidirectional polarized light and emitted. It is shown in. Incident light of random polarization (S + P) enters the polarization separation film 11 from the light incident surface 100 a of the polarization conversion element 100, passes through the translucent member 101, and is a component of random polarization at the polarization separation film 11. Inside P wave is transmitted and S wave is reflected. The P wave that has passed through the polarization separation film 11 travels through the translucent member 102 and exits from the light exit surface 100b. On the other hand, the S wave reflected from the polarization separation film 11 travels through the translucent member 101, is reflected by the reflection film 12 through the λ / 4 retardation plate 131, and again passes through the λ / 4 retardation plate 131 to P It is converted into a wave and emitted from the light exit surface 100b. The light incident on the polarization conversion element in this way is emitted as a P wave from the light exit surface of the polarization conversion element.

本実施形態の偏光変換素子の構成において、接着のための接着剤層20を適宜設けることができる。   In the configuration of the polarization conversion element of the present embodiment, an adhesive layer 20 for adhesion can be appropriately provided.

(実施の形態2)偏光変換素子の製造方法1
図3は、本発明の偏光変換素子の製造方法の一実施形態における工程の流れ図である。図3において、第1の透光性板材101aに対し、工程603にて偏光分離膜を形成し、また第2の透光性板材102aに対し、工程604にて反射膜を形成する。これらの工程を経た第1の透光性板材と第2の透光性板材の間に、λ/4位相差板131を挟んで工程605にて積層・接着し、工程606にて硬化して積層体607を形成する。なお工程605と工程606とは一体化されていてもよい。次にこの積層体607を、工程608にてその積層面に対し所定の角度で切断し、偏光変換素子ブロック609を得る。続いてこの偏光変換素子ブロック609の光入射面および光出射面となる部分を工程610にて光学研磨して偏光分離素子100を得る。
(Embodiment 2) Method 1 for manufacturing a polarization conversion element
FIG. 3 is a flowchart of steps in an embodiment of the method for manufacturing a polarization conversion element of the present invention. In FIG. 3, a polarization separation film is formed on the first translucent plate material 101a in step 603, and a reflective film is formed on the second translucent plate material 102a in step 604. Between the first light-transmitting plate material and the second light-transmitting plate material that have undergone these steps, the λ / 4 retardation plate 131 is sandwiched and bonded in step 605, and cured in step 606. A stacked body 607 is formed. Note that step 605 and step 606 may be integrated. Next, the laminated body 607 is cut at a predetermined angle with respect to the laminated surface in Step 608 to obtain a polarization conversion element block 609. Subsequently, the portions that become the light incident surface and light output surface of the polarization conversion element block 609 are optically polished in Step 610 to obtain the polarization separation element 100.

光学研磨を終えた偏光分離素子100の光入射面や光出射面には、光の反射損失を低減するための反射防止膜として、TiOとSiOとを交互に蒸着し積層した5層の積層膜を設ける。 As the antireflection film for reducing the reflection loss of light, five layers of TiO 2 and SiO 2 are alternately deposited and laminated on the light incident surface and the light emitting surface of the polarization separating element 100 after the optical polishing. A laminated film is provided.

本発明の偏光変換素子においては、位相差板は素子の内部に設けられており、光出射面にはポリマーフィルムなどの位相差板を設けていない。このため位相差板の部分での反射防止膜の剥離の問題に煩わされることがない。また反射防止膜の形成時の偏光分離素子100の温度として、従来は光出射面に貼り付けられた位相差板を保護するために、70〜80℃程度に留めておかなけれはならなかったのに対し、本発明では100℃程度まで昇温が可能となり、密着性の良好な反射防止膜を形成することができる。   In the polarization conversion element of the present invention, the retardation plate is provided inside the element, and a retardation plate such as a polymer film is not provided on the light exit surface. For this reason, the problem of peeling of the antireflection film at the portion of the phase difference plate is not bothered. In addition, the temperature of the polarization separation element 100 during the formation of the antireflection film must conventionally be kept at about 70 to 80 ° C. in order to protect the retardation plate attached to the light emitting surface. On the other hand, in the present invention, the temperature can be raised to about 100 ° C., and an antireflection film with good adhesion can be formed.

図4は図3に示した本実施形態の工程の一部である板材の準備、積層・接着および硬化の様子を模式的に示した図である。図4には、図3で示された工程流れ図の一部である板材の準備、積層・接着および硬化の様子を模式的に示した。図4(A)に示したように、反射膜12を形成した第2の透光性板材102a、λ/4位相差板131、および偏光分離膜11を形成した第1の透光性板材101aを、それぞれ複数枚準備し、同図(B)に示したようにこの順序に積層し、反射膜12とλ/4位相差板131とが隣接するようにして接着し、続いて同図(C)に示したように、紫外(UV)光を照射して硬化させる。こうして位相差板を反射膜に隣接させて設けた偏光変換素子が製造できる。   FIG. 4 is a view schematically showing the state of preparation, lamination / adhesion and curing of a plate material which is a part of the process of the present embodiment shown in FIG. FIG. 4 schematically shows the state of preparation, lamination / adhesion and curing of a plate material which is a part of the process flowchart shown in FIG. As shown in FIG. 4A, the second light transmissive plate material 102a on which the reflective film 12 is formed, the λ / 4 phase difference plate 131, and the first light transmissive plate material 101a on which the polarization separation film 11 is formed. A plurality of each are prepared, stacked in this order as shown in FIG. 4B, and bonded so that the reflective film 12 and the λ / 4 retardation plate 131 are adjacent to each other, and then ( As shown in C), it is cured by irradiation with ultraviolet (UV) light. Thus, a polarization conversion element provided with the retardation plate adjacent to the reflective film can be manufactured.

図5は上記本発明の偏光変換素子の製造方法における積層体の切断工程を模式的に示したものである。積層体は図5(A)に示すように積層面に対し所定の角度、例えば45°で切断し、図5(B)に示すようにさらに端部を揃えるなどして偏光変換素子ブロック809を得る。   FIG. 5 schematically shows a laminate cutting step in the method for producing a polarization conversion element of the present invention. The laminated body is cut at a predetermined angle, for example, 45 ° with respect to the laminated surface as shown in FIG. 5A, and the polarization conversion element block 809 is formed by further aligning the ends as shown in FIG. 5B. obtain.

(実施の形態3)偏光変換素子の製造方法2
図6は、本発明の偏光変換素子の製造方法の他の実施形態における工程の流れ図である。図6において、第1の透光性板材101aの一方の面に工程903にて偏光分離膜を形成し、工程904にて第1の透光性板材101aのもう一方の面に反射膜を形成する。この工程を経た第1の透光性板材101aとこれらの膜のいずれをも形成していない第2の透光性板材102aとの間に、λ/4位相差板131を挟んで工程905にて積層・接着し、工程906にて硬化して積層体907を形成する。なお工程905と工程906とは一体化されていてもよい。
(Embodiment 3) Method 2 for manufacturing a polarization conversion element
FIG. 6 is a flowchart of steps in another embodiment of the method for manufacturing a polarization conversion element of the present invention. In FIG. 6, a polarization separation film is formed on one surface of the first light transmissive plate 101a in step 903, and a reflection film is formed on the other surface of the first light transmissive plate 101a in step 904. To do. In Step 905, the λ / 4 retardation plate 131 is sandwiched between the first light transmissive plate 101 a that has undergone this step and the second light transmissive plate 102 a that is not formed with any of these films. Are laminated and bonded, and cured in step 906 to form a laminate 907. Note that step 905 and step 906 may be integrated.

この積層体907を、工程908にてその積層面に対し所定の角度で切断し、偏光変換素子ブロック909を得る。続いて工程910にて、この偏光変換素子ブロック909の光入射面および光出射面となる部分を光学研磨して偏光変換素子100を得る。   In step 908, the laminated body 907 is cut at a predetermined angle with respect to the laminated surface to obtain a polarization conversion element block 909. Subsequently, in Step 910, the polarization conversion element 100 is obtained by optically polishing the light incident surface and the light exit surface of the polarization conversion element block 909.

光学研磨を終えた偏光変換素子100の光入射面や光出射面には、光の反射損失を低減するための反射防止膜として、TiOとSiOとを交互に蒸着し積層した5層の積層膜を設ける。 As the antireflection film for reducing the reflection loss of light, five layers of TiO 2 and SiO 2 are alternately deposited and laminated on the light incident surface and the light emitting surface of the polarization conversion element 100 after the optical polishing. A laminated film is provided.

図7には、図6で示された工程流れ図の一部である板材の準備、積層・接着および硬化の様子を模式的に示した。図7(A)に示したように、偏光分離膜および反射膜のいずれをも形成していない第2の透光性板材102a、偏光分離膜11および反射膜12を形成した第1の透光性板材101a、λ/4位相差板131を、それぞれ複数枚準備し、同図(B)に示したように積層し接着し、続いて同図(C)に示したように、紫外光を照射して硬化させる。   FIG. 7 schematically shows the state of preparation, lamination / adhesion, and curing of a plate material which is a part of the process flowchart shown in FIG. As shown in FIG. 7A, the first light-transmitting plate having the second light-transmitting plate material 102a, the polarization separating film 11 and the reflecting film 12 on which neither the polarization separating film nor the reflecting film is formed. A plurality of each of the insulating plate material 101a and the λ / 4 phase difference plate 131 are prepared, laminated and bonded as shown in FIG. 5B, and subsequently, ultraviolet light is applied as shown in FIG. Irradiate to cure.

(実施の形態4)偏光変換素子の製造における光硬化方法
図8は本実施の形態の偏光変換素子の製造方法における紫外光を用いた光硬化工程の上記とは別の実施形態を示したものである。図8(A)〜(C)において、まず第2の透光性板材102aと第1の透光性板材101aとを接着し、紫外光を照射して硬化、次にこれに位相差板131と第2の透光性板材102aとを接着し再び紫外光を照射して硬化、これにさらに第1の透光性板材101aを接着し紫外光を照射して硬化する、というように、接着と硬化を順次繰り返して積層体を形成する。
(Embodiment 4) Photocuring method in production of polarization converting element FIG. 8 shows another embodiment of the photocuring process using ultraviolet light in the manufacturing method of the polarization converting element of this embodiment. It is. 8A to 8C, first, the second light-transmitting plate material 102a and the first light-transmitting plate material 101a are bonded, irradiated with ultraviolet light and cured, and then the phase difference plate 131 is applied thereto. And the second translucent plate material 102a are adhered and cured by irradiating ultraviolet light again, and further, the first translucent plate material 101a is further adhered and cured by irradiating ultraviolet light. And curing are sequentially repeated to form a laminate.

こうすることによって効率よくしかも確実に接着層を硬化することができる。UV光は透光性板材に対し垂直な方向から照射し、光硬化を行なう。このとき、透光性板材の板面に平行な方向から照射すると硬化する時間が短縮できて効率よく接着層の硬化を行なうことができる。   By doing so, the adhesive layer can be cured efficiently and reliably. UV light is irradiated from a direction perpendicular to the translucent plate material to perform photocuring. At this time, if it irradiates from the direction parallel to the plate | board surface of a translucent board | plate material, the time to harden | cure can be shortened and an adhesive layer can be hardened efficiently.

(実施の形態5)偏光変換素子の評価
まず、上記実施の形態2によって作製された偏光変換素子の反射防止膜の密着性を評価した。評価方法は、反射防止膜の形成された上記偏光変換素子の出射面に事務用セロハン粘着テープを貼り付け、その一端から引き剥がしたときの状態を調べるものである。その結果、反射防止膜の剥がれは全くなかった。比較のために、従来型の光出射面にポリマーフィルムの位相差板を設けた偏光変換素子の場合について同様の評価を行った結果、位相差板上の反射防止膜が剥がれて粘着テープ側に転写することが確認された。
(Embodiment 5) Evaluation of Polarization Conversion Element First, the adhesion of the antireflection film of the polarization conversion element produced according to Embodiment 2 was evaluated. The evaluation method is to examine the state when the cellophane adhesive tape for office use is attached to the exit surface of the polarization conversion element on which the antireflection film is formed and peeled off from one end thereof. As a result, there was no peeling of the antireflection film. For comparison, as a result of performing the same evaluation for the case of a polarization conversion element in which a polymer film retardation plate is provided on a conventional light exit surface, the antireflection film on the retardation plate is peeled off and is exposed to the adhesive tape side. It was confirmed that it was transferred.

次に上記実施の形態2によって作製された反射防止膜つきの偏光変換素子を120℃の恒温槽で1000時間保持した後、および150℃の環境で200時間保持した後、目視によって評価を行った。その結果、どちらの場合にも偏光変換素子には変化が認められなかった。従来型の光出射面にポリマーフィルムの位相差板を設けた偏光変換素子の場合について同様の評価を行ったところ、どちらの場合も位相差板に変色とうねりが生じていることが見出された。   Next, the polarization conversion element with the antireflection film produced according to Embodiment 2 was evaluated by visual observation after being held in a thermostatic bath at 120 ° C. for 1000 hours and after being held in a 150 ° C. environment for 200 hours. As a result, no change was observed in the polarization conversion element in either case. A similar evaluation was performed for a polarization conversion element having a polymer film retardation plate on the conventional light exit surface, and in both cases it was found that the retardation plate had discoloration and waviness. It was.

このことから、本発明の偏光変換素子は、従来のものに比べ、反射防止膜の剥離などによる劣化が小さいこと、そして耐熱性に優れることがわかった。   From this, it was found that the polarization conversion element of the present invention is less deteriorated due to peeling off of the antireflection film and superior in heat resistance as compared with the conventional one.

(実施の形態6)表示装置への適用
図9は本発明の偏光変換素子を投射型表示装置に適用した場合の一実施形態を示したものである。図9において、光源60から発した光は、第1および第2のレンズ系31、32を経て、偏光変換素子1にて一方向の偏光に効率よく変換され、全反射ミラー41で反射されて色分解フィルタ42、43、44に導かれてR(赤)G(緑)B(青)の3色の光に分解される。色分解フィルタ42を透過したR光は、全反射ミラー46を経て液晶装置51で変調されてダイクロイックプリズム36のR部に入射する。また色分解フィルタ42で反射したG、B光は、色分解フィルタ43でさらにG光とB光とに分けられる。このうちG光は液晶装置52で変調されてダイクロイックプリズム36のG部に入射する。またB光は全反射ミラー44、45を経て液晶装置53で変調されてダイクロイックプリズム36のB部に入射する。液晶装置でそれぞれに変調されたR、GおよびB光は、ダイクロックプリズム36で合成されてカラー映像が形成され、この映像が投射光学系37により、投射面70に投射される。
(Embodiment 6) Application to Display Device FIG. 9 shows an embodiment in which the polarization conversion element of the present invention is applied to a projection display device. In FIG. 9, the light emitted from the light source 60 passes through the first and second lens systems 31 and 32, is efficiently converted into polarized light in one direction by the polarization conversion element 1, and is reflected by the total reflection mirror 41. The light is guided to the color separation filters 42, 43, and 44 and separated into light of three colors of R (red), G (green), and B (blue). The R light transmitted through the color separation filter 42 is modulated by the liquid crystal device 51 through the total reflection mirror 46 and is incident on the R portion of the dichroic prism 36. The G and B lights reflected by the color separation filter 42 are further divided by the color separation filter 43 into G light and B light. Of these, the G light is modulated by the liquid crystal device 52 and enters the G portion of the dichroic prism 36. The B light is modulated by the liquid crystal device 53 through the total reflection mirrors 44 and 45 and is incident on the B portion of the dichroic prism 36. The R, G, and B lights respectively modulated by the liquid crystal device are combined by the dichroic prism 36 to form a color image, and this image is projected onto the projection surface 70 by the projection optical system 37.

このようにして本発明の偏光変換素子を投射型表示装置に適用すれば、むだなく光の変換が行えるので光の利用効率を高めることができ、スクリーン上に投射される映像を明るくすることができる。しかも本発明の偏光変換素子は位相差板が透光性部材に貼りつけられているのではなく、透光性部材の間に挟まれた構成であり、素子表面に露出したものではないため、強い光源にさらされて温度上昇がある場合でも、耐熱性を具備し安定してその機能を保つことができる。より具体的には、従来の素子表面に位相差板を貼り付けたものでは、長時間の使用により、位相差板の変色・うねりを生じ、着色による透過率低下、正確な位相変換ができなくなることによる有効光線の減少によって投射像が暗くなる問題があったが、本発明の偏光変換素子を使用した場合には、位相差板の劣化に起因するこれらの問題を生じないため、初期の投射照度を長時間維持できる。   Thus, if the polarization conversion element of the present invention is applied to a projection display device, light conversion can be performed without difficulty, so that the light use efficiency can be improved and the image projected on the screen can be brightened. it can. Moreover, the polarization conversion element of the present invention is not a phase difference plate attached to the translucent member, but is sandwiched between the translucent members, and is not exposed on the element surface. Even when the temperature rises due to exposure to a strong light source, it has heat resistance and can stably maintain its function. More specifically, in the case where a retardation plate is pasted on the surface of a conventional element, discoloration / swell of the retardation plate is caused by long-term use, and transmittance reduction due to coloring and accurate phase conversion cannot be performed. However, when the polarization conversion element of the present invention is used, these problems caused by the deterioration of the retardation plate do not occur. Illuminance can be maintained for a long time.

本発明の偏光変換素子は上記実施形態のほか、例えば上述のように前面型ではなく背面投射型の投射表示装置、カラーではなくモノクロ画像を投射するモノクロ投射型表示装置など、さまざまな投射表示装置に適用することができる。   In addition to the above-described embodiment, the polarization conversion element of the present invention includes various projection display devices such as a rear projection type projection display device instead of a front projection type as described above, and a monochrome projection display device that projects a monochrome image instead of a color. Can be applied to.

本発明の偏光変換素子は、位相差板が素子表面に露出していないため、従来の偏光変換素子に比べ、耐熱性、耐候性、耐久性の著しく優れたものが得られる。このため、本発明によれば、偏光変換素子に光源からの強い光線にさらされるなどして温度上昇があっても、安定してその機能を保つことが可能である。また本発明の偏光変換素子の製造方法によれば、位相差板は透光性板材を積層する工程で透光性部材の層の間に挟み込めばよく、偏光変換素子ブロックの光出射面の研磨後に各出射面に位相差板を貼るという従来の工程を必要としないので、従来に比べて製造工程が大幅に短縮できる。   In the polarization conversion element of the present invention, since the retardation plate is not exposed on the surface of the element, a material having remarkably superior heat resistance, weather resistance, and durability can be obtained as compared with the conventional polarization conversion element. For this reason, according to the present invention, even when the polarization conversion element is exposed to a strong light beam from the light source and the temperature rises, the function can be stably maintained. According to the method for manufacturing a polarization conversion element of the present invention, the retardation plate may be sandwiched between the layers of the light transmissive member in the step of laminating the light transmissive plates, and the light exit surface of the polarization conversion element block Since the conventional process of attaching a retardation plate to each exit surface after polishing is not required, the manufacturing process can be greatly shortened compared to the conventional process.

(A)は本発明の一実施形態の偏光変換素子の模式的斜視図、(B)はその平面図である。(A) is a typical perspective view of the polarization conversion element of one embodiment of the present invention, and (B) is the top view. 本発明の一実施形態の偏光変換素子の一部を模式的平面図で示し、この偏光変換素子に入射したランダムな偏光の光が一方向の偏光に変換されて出射する様子を模式的に示したものである。A part of polarization conversion element of one embodiment of the present invention is shown by a schematic plan view, and a state in which light of random polarization incident on the polarization conversion element is converted into polarized light in one direction and emitted is schematically shown. It is a thing. 本発明の偏光変換素子の製造方法の一実施形態における工程の流れ図である。It is a flowchart of the process in one Embodiment of the manufacturing method of the polarization conversion element of this invention. 本発明の偏光変換素子の製造方法の一実施形態における工程の一部である板材の準備、積層・接着および硬化を模式的に示した図である。It is the figure which showed typically the preparation of the board | plate material which is a part of process in one Embodiment of the manufacturing method of the polarization conversion element of this invention, lamination | stacking / adhesion | attachment, and hardening. (A)は上記本発明の偏光変換素子の製造方法における積層体の切断工程の一実施形態を模式的に示したものであり、(B)は切断された偏光変換素子ブロックを模式的に示したものである。(A) shows typically one Embodiment of the cutting process of the laminated body in the manufacturing method of the polarization conversion element of the said invention, (B) shows the cut | disconnected polarization conversion element block typically. It is a thing. 本発明の偏光変換素子の製造方法の他の一実施形態における工程の流れ図である。It is a flowchart of the process in other one Embodiment of the manufacturing method of the polarization conversion element of this invention. 本発明の偏光変換素子の製造方法の他の一実施形態における板材の準備、積層・接着および硬化の状況を模式的に示した図である。It is the figure which showed typically the condition of preparation of a board | plate material, lamination | stacking / adhesion | attachment, and hardening in other one Embodiment of the manufacturing method of the polarization conversion element of this invention. 本発明の偏光変換素子の製造方法における紫外光を用いた光硬化工程の一実施形態を示したものである。1 shows one embodiment of a photocuring step using ultraviolet light in the method for producing a polarization conversion element of the present invention. 本発明の偏光変換素子を投射型表示装置に適用した場合の一実施形態を模式的に示した図である。It is the figure which showed typically one Embodiment at the time of applying the polarization conversion element of this invention to a projection type display apparatus. (A)は従来技術による偏光変換素子の斜視図であり、(B)はその平面図およびこの偏光変換素子における光の偏光変換の様子を示す図である。(A) is a perspective view of the polarization conversion element by a prior art, (B) is the top view and the figure which shows the mode of the polarization conversion of the light in this polarization conversion element.

符号の説明Explanation of symbols

11……偏光分離膜、12……反射膜、20……接着層、31……第1のレンズ系、32……第2のレンズ系、36……ダイクロックプリズム、37……投射光学系、41,45,46……全反射ミラー、42,43,44……色分解フィルタ、51,52,53……液晶表示装置、60……光源、70……投射面、100……偏光変換素子、100a……光入射面、100b……光出射面、101a……第1の透光性板材、101……第1の透光性部材、102……第2の透光性部材、102a……第2の透光性板材、131……λ/4位相差板、603,903……偏光分離膜形成工程、604.904……反射膜形成工程、605,905……積層・接着工程、606,906……硬化工程、607,907……積層体、608,908……切断工程、609,909……偏光変換素子ブロック、610,910……光学研磨工程。 DESCRIPTION OF SYMBOLS 11 ... Polarization separation film, 12 ... Reflection film, 20 ... Adhesive layer, 31 ... 1st lens system, 32 ... 2nd lens system, 36 ... Dichroic prism, 37 ... Projection optical system , 41, 45, 46 ... Total reflection mirror, 42, 43, 44 ... Color separation filter, 51, 52, 53 ... Liquid crystal display device, 60 ... Light source, 70 ... Projection surface, 100 ... Polarization conversion Element 100a... Light incident surface 100b... Light exit surface 101a... First light transmissive plate material 101... First light transmissive member 102. …… Second translucent plate material 131 λ / 4 retardation plate 603, 903 Polarization separation film formation step 604.904 Reflection film formation step 605 905 Lamination / adhesion step , 606, 906 ... curing step, 607, 907 ... laminate, 608, 908 ... cutting step, 609,909 ...... polarization converter block, 610,910 ...... optical polishing step.

Claims (13)

第1の主面を光入斜面、第2の主面を光出射面とする平板状の透光性基材中に、前記第1および第2の主面に対し傾斜して間隔をおいて交互に平行配置された第1の機能性光学膜と第2の機能性光学膜とを備え、前記第1の機能性光学膜は偏光分離膜であり、前記第2の機能性光学膜は前記第1の主面側から順に配置された反射膜と反射膜の光出射面側に隣接して設けられた位相差板からなり、
前記偏光分離膜と前記反射膜と前記位相差板とが第1の主面に対して同一の方向に傾斜した状態で配置されることを特徴とする偏光変換素子。
In a flat translucent base material having the first main surface as a light incident slope and the second main surface as a light exit surface, the first main surface is inclined with respect to the first and second main surfaces and spaced apart from each other. The first functional optical film includes a first functional optical film and a second functional optical film alternately arranged in parallel. The first functional optical film is a polarization separation film, and the second functional optical film is the A reflection film disposed in order from the first main surface side and a retardation plate provided adjacent to the light emission surface side of the reflection film ;
Polarization conversion element characterized Rukoto arranged in a state where said polarization splitting film and the reflecting film and the retardation plate is inclined in the same direction with respect to the first major surface.
前記位相差板が、1/4波長位相差板であることを特徴とする請求項1記載の偏光変換素子。   The polarization conversion element according to claim 1, wherein the retardation plate is a ¼ wavelength retardation plate. 前記位相差板が、2軸延伸プラスチックフィルムであることを特徴とする請求項1または2記載の偏光変換素子。   The polarization conversion element according to claim 1, wherein the retardation plate is a biaxially stretched plastic film. 前記2軸延伸プラスチックフィルムが、ポリアクリレートフィルムであることを特徴とする請求項3記載の偏光変換素子。   The polarization conversion element according to claim 3, wherein the biaxially stretched plastic film is a polyacrylate film. 光出射面に反射防止膜が被着されていることを特徴とする請求項1〜4のいずれか1項記載の偏光変換素子。   The polarization conversion element according to claim 1, wherein an antireflection film is attached to the light emitting surface. 映像プロジェクタに組込んで用いることを特徴とする請求項1〜5のいずれか1項記載の偏光変換素子。   The polarization conversion element according to claim 1, wherein the polarization conversion element is used by being incorporated in a video projector. 平行な2面を有する第1の透光性板材の一方の面に偏光分離膜を形成する偏光分離膜形成工程と、平行な2面を有する第2の透光性板材の一方の面に反射膜を形成する反射膜形成工程と、偏光分離膜の形成された前記第1の透光性板材と、位相差板と、反射膜の形成された前記第2の透光性板材とを、前記位相差板が前記反射膜に隣接するように順次積層し接着して積層体を形成するする積層接着工程と、前記積層体を積層面に対し所定の角度で切断加工し、互いに平行な光入射面と光出射面とを有し、かつ前記偏光分離膜と前記反射膜と前記位相差板とが前記光入射面に対して同一の方向に傾斜した状態で配置される偏光変換素子ブロックを形成する偏光変換素子ブロック形成工程と、前記偏光変換素子ブロックの前記光入射面と前記光出射面とを光学的に研磨する光学研磨工程とを備えたことを特徴とする偏光変換素子の製造方法。 A polarization separation film forming step of forming a polarization separation film on one surface of the first light transmissive plate having two parallel surfaces, and reflection on one surface of the second light transmissive plate having two parallel surfaces A reflective film forming step for forming a film; the first light-transmitting plate material on which a polarization separation film is formed; a phase difference plate; and the second light-transmitting plate material on which a reflective film is formed. A laminating and bonding process in which a phase difference plate is sequentially laminated and bonded so as to be adjacent to the reflective film to form a laminated body, and the laminated body is cut at a predetermined angle with respect to a laminated surface, and light incident parallel to each other forming a surface and have a the light emitting surface, and the polarization separation film and the reflective film and the polarization conversion element block where a phase difference plate Ru are arranged in a state of being inclined in the same direction relative to the light incident surface A polarization conversion element block forming step, and the light incident surface and the light output of the polarization conversion element block. Method of manufacturing a polarizing conversion element characterized in that an optical polishing step of polishing the surface optically. 平行な2面を有する第1の透光性板材の一方の面に偏光分離膜を形成する工程と、前記平行な2面を有する前記透光性部材のもう一方の面に反射膜を形成する工程と、偏光分離膜および反射膜の形成された前記第1の透光性板材と、位相差板と、偏光分離膜および反射膜のいずれをも形成していない第2の透光性板材とを、前記位相差板の板面が前記反射膜に隣接するように順次積層し接着して積層体を形成する積層接着工程と、前記積層体を積層面に対し所定の角度で切断加工し、互いに平行な光入射面と光出射面とを有し、かつ前記偏光分離膜と前記反射膜と前記位相差板とが前記光入射面に対して同一の方向に傾斜した状態で配置される偏光変換素子ブロックを形成する偏光変換素子ブロック形成工程と、前記偏光変換素子ブロックの前記光入射面と前記光出射面とを光学的に研磨する光学研磨工程とを備えたことを特徴とする偏光変換素子の製造方法。 Forming a polarization separation film on one surface of the first translucent plate having two parallel surfaces; and forming a reflection film on the other surface of the translucent member having the two parallel surfaces. A step, the first light-transmitting plate material on which the polarization separation film and the reflection film are formed, the phase difference plate, and the second light-transmitting plate material on which neither the polarization separation film nor the reflection film is formed A laminating and bonding step of forming a laminate by sequentially laminating and adhering so that the plate surface of the retardation plate is adjacent to the reflective film, and cutting the laminate at a predetermined angle with respect to the laminate surface, It has a parallel light incident surface and light exit surface each other, and the polarization of said polarization separation film and the reflective film and the retardation plate is Ru are arranged in a state of being inclined in the same direction relative to the light incident surface A polarization conversion element block forming step of forming a conversion element block; and Method of manufacturing a polarizing conversion element characterized in that an optical polishing step of polishing the serial light incident surface and a said light emitting surface optically. 前記位相差板が1/4波長位相差板であることを特徴とする請求項7または8記載の偏光変換素子の製造方法。   The method for manufacturing a polarization conversion element according to claim 7 or 8, wherein the retardation plate is a quarter-wave retardation plate. 前記積層接着工程が、複数の第1の透光性板材と複数の第2の透光性板材と複数の位相差板とを、光硬化性接着層を介して積層し、光照射により硬化する光照射接着工程を備えていることを特徴とする請求項7または8記載の偏光変換素子の製造方法。   In the laminating and bonding step, a plurality of first translucent plates, a plurality of second translucent plates and a plurality of retardation plates are laminated via a photocurable adhesive layer, and cured by light irradiation. 9. The method of manufacturing a polarization conversion element according to claim 7, further comprising a light irradiation adhesion step. 前記光照射接着工程が、前記第1の透光性板材、前記位相差板および第2の透光性板材を光硬化性接着層を介して積層する工程と、光を照射して前記光硬化性接着層を硬化させる工程とを順次繰り返すものであることを特徴とする請求項7または8記載の偏光変換素子の製造方法。   The light irradiation bonding step includes a step of laminating the first light-transmitting plate material, the phase difference plate, and the second light-transmitting plate material through a light-curable adhesive layer, and the light curing by light irradiation. The method for manufacturing a polarization conversion element according to claim 7 or 8, wherein the step of curing the adhesive layer is sequentially repeated. 前記光照射接着工程が、前記第1の透光性板材、前記位相差板および前記第2の透光性板材を光硬化性接着層を介して順次積層して積層体を形成する工程と、前記積層体を形成した後に光を照射して前記光硬化性接着層を硬化させ工程を備えたものであることを特徴とする請求項7または8記載の偏光変換素子の製造方法。   The light irradiation adhesion step is a step of sequentially laminating the first translucent plate material, the retardation plate, and the second translucent plate material via a photocurable adhesive layer; and 9. The method of manufacturing a polarization conversion element according to claim 7, further comprising a step of curing the photocurable adhesive layer by irradiating light after forming the laminate. 前記積層接着工程が、前記第1および第2の透光性板材の互いに平行な面に対し、角度をなす方向から光の照射を行って光硬化を行うことを特徴とする請求項10〜12のいずれか1項記載の偏光変換素子の製造方法。   The said lamination | stacking adhesion process irradiates light from the direction which makes an angle with respect to the mutually parallel surface of the said 1st and 2nd translucent board | plate material, and performs photocuring. The manufacturing method of the polarization converting element of any one of these.
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