JP4185487B2

JP4185487B2 - Manufacturing method of steel floor for clean room

Info

Publication number: JP4185487B2
Application number: JP2004381012A
Authority: JP
Inventors: 韓顯壽; 陳建和
Original assignee: 高力熱處理工業股▲ふん▼有限公司
Priority date: 2004-05-14
Filing date: 2004-12-28
Publication date: 2008-11-26
Anticipated expiration: 2024-12-28
Also published as: KR100636861B1; TWI257446B; KR20050109026A; JP2005325676A; TW200521304A

Description

本発明は、スチール製フロアの製造方法に関し、特に鉄鋼材を用い、一貫加工により硬蝋付けおよび熱処理技術を結合してスチール製フロアを製造する方法に関するものであり、将来のクリーンルーム用フロアの高強度性の要求を満たすに好適な製造方法を提供するものである。 The present invention relates to a method for manufacturing a steel floor, and more particularly, to a method for manufacturing a steel floor by combining hard brazing and heat treatment techniques by integrated processing using steel materials. It is an object of the present invention to provide a production method suitable for satisfying the strength requirement.

近年、先端技術の進歩に伴い、優良な高品質の製造環境に対して、クリーンルーム（Clean Room）の観念および応用の広がりがなされている。クリーンルームは、特に半導体製造業界には既に不可欠な重要な施設であり、製品の品質、依頼性および歩留まりなどへ大きく影響している。現在、各工業国家のクリーンルームフロアは、ともにアルミニウム合金でダイカスト鋳造法または重力鋳造法により製造されており、アルミニウム合金の強度が弱いため、フロアへの負荷には一定の限度があり、負荷が設計値を超えるとフロアに割れが発生し、フロア上の設備の損失が生ずる。従来の典型的なアルミ鋳造フロアは、支持力で言えば、その単位面積６００ｍｍ^２のたり最大荷重２トンであり、最大２ｍｍの変形量が生じるため、第３、第４世代の半導体ウェハー工場の製造設備の要求を満足させる程度が限界である。しかしながら、半導体素子の発展のため、回路は益々密接になり、製造工程が益々精密化及び微小化され、半導体製造設備は精密化、自動化の発展につれ大型化する傾向があるため、第５、第６世代の半導体ウェハー工場におけるクリーンルームフロア荷重に対する要求は大幅に上昇しており、従来のアルミ鋳造フロアでは、その単位面積あたりの支持力が不足するため、第５、第６世代の半導体ウェハー工場が求める高荷重に耐えられなくなる。 In recent years, with the advancement of advanced technology, the concept and application of the Clean Room has been expanded to a high-quality manufacturing environment. The clean room is an important facility that is already indispensable particularly to the semiconductor manufacturing industry, and has a great influence on the quality, requestability, and yield of products. Currently, the clean room floors in each industrial country are both made of aluminum alloy by die casting or gravity casting, and the strength of the aluminum alloy is weak, so there is a certain limit on the load on the floor, and the load is designed. If the value is exceeded, the floor will crack and the equipment on the floor will be lost. The conventional typical aluminum cast floor has a maximum load of 2 tons per unit area of 600 mm ² in terms of supporting force, and a deformation of a maximum of 2 mm occurs, so that the third and fourth generation semiconductor wafer factories The extent to which the requirements of manufacturing equipment are satisfied is the limit. However, with the development of semiconductor devices, circuits are becoming more and more closely connected, manufacturing processes are becoming more precise and miniaturized, and semiconductor manufacturing facilities tend to become larger as precision and automation progress. The demand for clean room floor loads in 6th generation semiconductor wafer factories has risen significantly, and conventional aluminum cast floors have insufficient support per unit area, so the fifth and sixth generation semiconductor wafer factories Unable to withstand the required high loads.

このようなクリーンルームに関する先行技術としては、例えば、下記の特許文献１（特開平９−４９３０６号）に開示された「クリーンルーム用フロア」が知られている。この特許文献１に開示されたクリーンルーム用フロアは、図６に示すように、クリーンルームのフロア面になるように、工場の床面上に立設する支柱の上端に敷設、支持され、廉価で、良好な清潔性があり且つ実用性が豊富なクリーンルーム用フロアとなっている。前記特許文献１に開示されたクリーンルーム用フロアの主な特徴は、普通スチール材角鋼よりなる板枠体（２）と、板枠体（２）の上面に敷設される普通スチール材板の主床面板（３）とによってフロアが必要とする強度を有する骨格肉部を構成し、そして、その主床面板（３）の上面に薄いシート状ステンレスの表面被覆板（４）を接合被覆し、完成した主床面板（３）と表面被覆板（４）は、実質上一体となるフロアであり、機能的な多層床面板構造であるとともに、必要に応じて、その多層床面上に換気孔（８）が貫通配設される構造である点にある。 As a prior art relating to such a clean room, for example, a “clean room floor” disclosed in the following Patent Document 1 (Japanese Patent Laid-Open No. 9-49306) is known. As shown in FIG. 6, the floor for the clean room disclosed in Patent Document 1 is laid and supported on the upper end of a column that is erected on the floor surface of the factory so as to be the floor surface of the clean room. It is a clean room floor with good cleanliness and practicality. The main features of the floor for a clean room disclosed in Patent Document 1 are a plate frame (2) made of normal steel square steel and a main floor of a normal steel plate laid on the upper surface of the plate frame (2). The face plate (3) constitutes a skeletal meat portion having the strength required by the floor, and a thin sheet-like stainless steel surface covering plate (4) is joined and coated on the upper surface of the main floor plate (3). The main floor plate (3) and the surface covering plate (4) are substantially integrated floors and have a functional multilayer floor plate structure, and if necessary, ventilation holes ( 8) is a structure in which it is disposed through.

また、下記の特許文献２（中華民国実用新案特許公告第４８４６４０号明細書）に開示された「合金鋼フロア構造の改良」が知られている。この特許文献２に開示された合金鋼フロア構造は、図７に示すように、主に上板（１２）、下板（１０）、表面材（１４）および固定バンド（１６）などより構成され、該上、下板（１２、１０）は合金鋼板であり、下板（１０）は突起を有する底面があり、底面周縁に沿って四つ隅に円弧状の底部枠（１１）が形成され、この底面上に複数の内凹のカップ面（１０２）が形成され、外縁面に複数のセメントを充填させるための開口（１１２）が設けられている。該下板（１０）と上板（１２）はポイント溶接方式で結合され、該表面材（１４）は上板（１２）の外表面に敷設され、また固定バンド（１６）で表面材（１４）が被覆された上、下板（１２、１０）の周縁に係止し、周辺を補修し整えるようになっている。そのうち、下板（１０）の底面上に設けられる各カップ面（１０２）は、幾つかの口径が徐々に縮まる斜め環面と一つの円弧面より構成されることによって、フロア強度を増加させる効果を達成する。 Further, “improved alloy steel floor structure” disclosed in the following Patent Document 2 (the specification of the Chinese utility model patent publication No. 484640) is known. The alloy steel floor structure disclosed in Patent Document 2 is mainly composed of an upper plate (12), a lower plate (10), a surface material (14), a fixed band (16) and the like as shown in FIG. The upper and lower plates (12, 10) are alloy steel plates, the lower plate (10) has a bottom surface having protrusions, and arc-shaped bottom frames (11) are formed at four corners along the periphery of the bottom surface. A plurality of indented cup surfaces (102) are formed on the bottom surface, and openings (112) for filling the outer edge surface with a plurality of cements are provided. The lower plate (10) and the upper plate (12) are joined by a point welding method, and the surface material (14) is laid on the outer surface of the upper plate (12), and the surface material (14 ) Is covered, and is engaged with the periphery of the lower plate (12, 10) to repair and arrange the periphery. Among them, each cup surface (102) provided on the bottom surface of the lower plate (10) has an effect of increasing the floor strength by being composed of an oblique ring surface and several circular arc surfaces whose diameters are gradually reduced. To achieve.

特開平９−４９３０６号公報Japanese Patent Laid-Open No. 9-49306 中華民国実用新案特許公告第４８４６４０号明細書Taiwan Utility Model Patent Publication No. 484640 Specification

しかしながら、上記特許文献２に開示された合金フロア構造は、低強度のフロアであり、その各点ごとの最大支持力で言えば約５００ｋｇ以下であるため、ＯＡオフィス又は工場内の廊下だけに使用可能であり、半導体製造設備などに用いるだけの強度がないという問題がある。 However, the alloy floor structure disclosed in Patent Document 2 is a low-strength floor, and the maximum support force for each point is about 500 kg or less, so it is used only for an OA office or a corridor in a factory. There is a problem that it is possible and is not strong enough to be used in semiconductor manufacturing facilities.

上記問題点に鑑み、本発明の主な目的は、一貫加工および熱処理プロセスにより、より高い強度を有するクリーンルーム用スチール製フロアの製造方法を提供することにある。また、本発明の他の目的は、より軽量なクリーンルーム用スチール製フロアを実現することができるクリーンルーム用スチール製フロアの製造方法を提供することにある。 In view of the above problems, a main object of the present invention is to provide a method for manufacturing a steel floor for a clean room having higher strength by integrated processing and heat treatment process. Another object of the present invention is to provide a method for manufacturing a clean room steel floor that can realize a lighter steel floor for a clean room.

上述目的及びその他の目的を達成する為、本発明のスチール製フロアの製造方法は、少なくとも
鋼材素材を所定サイズの枠条及び固定サイズの蓋板にカットする工程と、
枠条毎に複数の嵌合溝を打ち抜きし、また蓋板の対角の位置に複数の通気孔を開ける加工工程と、
複数枚の枠条をグラファイトブラケット板上に縦横方向に配列組み立てし、枠条の嵌合溝同士を上下挿接することによりフレーム構造とし、またそのフレーム構造上に蓋板を敷設する組み立て工程と、
組み立てたフレームの蓋板上に重りを負荷し、そして第一熱処理炉内に挿入し応力を除去する第一熱処理工程と、
第一熱処理が完了したフレームに対し変形量を補正した後に、このフレームの枠条同士の継ぎ手にソールダーを付けるソールダー付け工程と、
ソールダー付けが完了したフレームをグラファイトブラケット板上に置き、また蓋板上に重りを負荷し、そして連続炉に挿入するとともに溶接する工程とを含むことを特徴とする。 In order to achieve the above object and other objects, the method for manufacturing a steel floor according to the present invention includes a step of cutting at least a steel material into a frame of a predetermined size and a cover plate of a fixed size,
A process of punching a plurality of fitting grooves for each frame and opening a plurality of vent holes at diagonal positions of the lid plate;
An assembly process of arranging and assembling a plurality of frame strips in the vertical and horizontal directions on the graphite bracket plate, making a frame structure by vertically inserting and fitting the fitting grooves of the frame strip, and laying a lid plate on the frame structure;
A first heat treatment step of loading a weight on the cover plate of the assembled frame and inserting the weight into a first heat treatment furnace to remove the stress;
After correcting the amount of deformation with respect to the frame for which the first heat treatment has been completed, a soldering step of attaching a solder to the joint between the frames of the frame;
And placing the frame on which the soldering has been completed on the graphite bracket plate, loading a weight on the lid plate, and inserting and welding to a continuous furnace.

本発明にかかるスチール製フロアのプロセスによれば、溶接する前に既に第一熱処理を先行に行っており、枠条と枠条の間並びにおける枠条と蓋板の間の応力を除去することより、材料特性を完全に機能させるので、溶接した後の安定性がより良好となり、構造が更に強固となる。単位面積あたりの支持力で言えば、本発明のスチール製フロア６００ｍｍ^２の支持力は、従来の典型的なアルミ鋳造フロアの６００ｍｍ^２あたりの最大支持力２トンより大きく、同じ荷重で言えば、本発明のスチール製フロアの重量は従来のアルミ鋳造フロアより軽量になる。 According to the process of the steel floor according to the present invention, the first heat treatment has already been performed prior to welding, and by removing the stress between the frame and the cover plate in the alignment between the frame and the frame, Since the material properties are fully functioning, the stability after welding becomes better and the structure becomes stronger. In terms of the supporting force per unit area, the supporting force of the steel floor 600 mm ^{2 according} to the present invention is larger than the maximum supporting force of 2 tons per 600 mm ² of the conventional typical aluminum cast floor. The weight of the steel floor of the present invention is lighter than the conventional aluminum cast floor.

また本発明にかかるスチール製フロアのプロセスによれば、第二熱処理を含むので、鉄鋼材の機械特性を大幅に上昇させ、よって、従来の典型的なアルミ鋳造フロアにおける負荷が設計値を超える際に生じる破裂し易い欠点を改善でき、本発明によるスチール製フロアにおいて、負荷が設計値を超える時にも、先に変形の前兆があるので即時に破裂が発生することはなく、事前にその危険を避けることができる。 In addition, the steel floor process according to the present invention includes the second heat treatment, so that the mechanical properties of the steel material are greatly increased, and therefore when the load on the conventional aluminum cast floor exceeds the design value. In the steel floor according to the present invention, even when the load exceeds the design value, there is a sign of deformation in advance, so there is no immediate rupture. Can be avoided.

更に、本発明にかかるスチール製フロアの工場の一貫加工および熱処理プロセスによれば、溶接および熱処理が同時に完成でき、従来の一般的の加工方法のように鋼材加工が完了してから熱処理を行う場合より、プロセスが簡単で、生産効率が高く、コストが減少できる。 Furthermore, according to the integrated processing and heat treatment process of the steel floor factory according to the present invention, welding and heat treatment can be completed at the same time, and when the steel material processing is completed as in the conventional general processing method, the heat treatment is performed. Therefore, the process is simple, the production efficiency is high, and the cost can be reduced.

次に、実施例を参照して本発明の技術的特徴をさらに説明する。以下に説明する実施例は好適なものを例示するだけであって、本発明をこれに限定することを意図するものではない。以下、図面を参照した本発明の詳細な説明によって当業者であれば最良の理解が可能となろう。 Next, the technical features of the present invention will be further described with reference to examples. The examples described below are merely illustrative of the preferred ones and are not intended to limit the invention thereto. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A detailed understanding of the present invention with reference to the drawings will provide the best understanding to those skilled in the art.

先ず、図１ないし図４を参照しながら本発明のクリーンルーム用スチール製フロアの製造方法を説明する。本発明にかかるクリーンルーム用スチール製フロア１００は、将来のクリーンルームの高強度性の要求に応じて、例えば、炭素鋼あるいは合金鋼などの鉄鋼材で作製され、本発明の製造方法によれば、その第１の実施例は、以下のような工程を含む。 First, the manufacturing method of the steel floor for clean rooms of this invention is demonstrated, referring FIG. 1 thru | or FIG. The steel floor 100 for a clean room according to the present invention is made of a steel material such as carbon steel or alloy steel, for example, according to the future demand for high strength of the clean room. According to the manufacturing method of the present invention, The first embodiment includes the following steps.

カット工程：鋼材、例えば、ＳＡＥ４１３０合金鋼あるいは他の炭素鋼材などを用意し、この鋼材素材を所定サイズの枠条１１にカットし、また、例えばＳ４５Ｃ炭素鋼材を用意し、この鋼材素材を固定サイズの蓋板２０にカットする（図１、図４の工程一参照）。 Cutting process: Prepare steel material such as SAE4130 alloy steel or other carbon steel material, cut this steel material into frame 11 of a predetermined size, and prepare S45C carbon steel material, for example, and fix this steel material size The cover plate 20 is cut (see step 1 in FIGS. 1 and 4).

加工工程：枠条１１毎に複数の嵌合溝１２を打ち抜きし、これらの嵌合溝１２が縁端に近接するにつれピッチが益々小さくなり、また蓋板２０の対角の位置に複数の必要な通気孔２１を開け、集塵のときの空気の流れを有利にさせる（図１、図４の工程一参照）。Processing step: A plurality of fitting grooves 12 are punched for each frame 11, and the pitch becomes smaller as these fitting grooves 12 approach the edge, and a plurality of positions are required at diagonal positions of the cover plate 20. The air vent 21 is opened to favor the air flow during dust collection (see step 1 in FIGS. 1 and 4).

組み立て工程：複数枚の枠条１１をグラファイトブラケット板３０上に縦横方向に配列して組み立てし、枠条１１の嵌合溝１２同士を上下に挿接することによりフレーム１０として示す構造とし、またそのフレーム１０の構造上に蓋板２０を敷設する（図１、図４の工程二、工程三参照）。 Assembling process: A plurality of frame strips 11 are arranged in a vertical and horizontal direction on the graphite bracket plate 30 and assembled, and the fitting grooves 12 of the frame strips 11 are vertically inserted and contacted to form a structure shown as a frame 10. A cover plate 20 is laid on the structure of the frame 10 (see step 2 and step 3 in FIGS. 1 and 4).

第一熱処理工程：組み立てたフレーム１０の蓋板２０上に複数のアルミナ板４０を敷設し、またこのアルミナ板４０上のフレーム１０に近接する隅部分にそれぞれ重り４１を負荷し、そして第一熱処理炉５０内に挿入して第一熱処理を行う（図１、図４の工程四参照）。本発明によれば、この第一熱処理の温度は約４４０℃であり、この温度の雰囲気内に約１２５分間保持し、また一定の冷却時間が経ってから炉から取り出し、枠条１１と枠条１１の間並びに枠条１１と蓋板２０の間の応力を除去する。 First heat treatment step: A plurality of alumina plates 40 are laid on the cover plate 20 of the assembled frame 10, and weights 41 are respectively loaded on corner portions of the alumina plate 40 adjacent to the frame 10, and the first heat treatment is performed. It inserts in the furnace 50 and performs 1st heat processing (refer the process 4 of FIG. 1, FIG. 4). According to the present invention, the temperature of the first heat treatment is about 440 ° C., held in the atmosphere at this temperature for about 125 minutes, and taken out of the furnace after a certain cooling time, and the frame 11 and the frame 11 and the stress between the frame 11 and the cover plate 20 are removed.

ソールダー付け工程：第一熱処理が完了したフレーム１０に対し変形量を補正した後に、このフレーム１０の枠条１１同士の継ぎ手にソールダー、例えばＣ−６９８銅ペーストなどを塗る（図２、図４の工程五参照）。 Soldering step: After correcting the deformation amount of the frame 10 for which the first heat treatment has been completed, a solder, for example, C-698 copper paste or the like is applied to the joint between the frame strips 11 of the frame 10 (see FIGS. 2 and 4). Step 5).

溶接工程：ソールダー付けが完了したフレーム１０をグラファイトブラケット板３０上に置き、並びに蓋板２０表面上に複数のアルミナ板４０を敷設し、またこのアルミナ板４０上のフレーム１０に近接する隅部分にそれぞれ重り４１を負荷し、そしてこれを連続炉６０に挿入させるとともに溶接する（図２、図４の工程六参照）。本発明によれば、該連続炉６０はフレーム１０の進行方向に応じて、温度が約８００℃の予熱区、温度が約９００℃〜１２００℃の範囲内の高温区および冷却区（図示せず）を含み、該連続炉６０の伝送速度は約２００ｍｍ／分の速度で前進し、途中、該フレームが高温区を通過する際に約３分〜１５分の間停留し、最後にやや速い伝送速度で冷却区を通過し炉から出て、スチール製フロア１００のプロセスを完成する（図３、図４の工程七参照）。本発明によれば、複数回の実験で測定された好ましい測定値は、下表のようである。 Welding process: The frame 10 that has been soldered is placed on the graphite bracket plate 30, and a plurality of alumina plates 40 are laid on the surface of the lid plate 20. Each of the weights 41 is loaded and inserted into the continuous furnace 60 and welded (see step 6 in FIGS. 2 and 4). According to the present invention, the continuous furnace 60 has a preheating zone having a temperature of about 800 ° C., a high temperature zone having a temperature in the range of about 900 ° C. to 1200 ° C., and a cooling zone (not shown) according to the traveling direction of the frame 10. ), The transmission speed of the continuous furnace 60 is advanced at a speed of about 200 mm / min, and the frame is stopped for about 3 to 15 minutes when passing through the high temperature zone, and finally the transmission speed is slightly higher. Pass through the cooling zone at a speed and exit the furnace to complete the process of the steel floor 100 (see step 7 in FIGS. 3 and 4). According to the present invention, preferable measurement values measured in a plurality of experiments are as shown in the following table.

また、次に、図５は本発明にかかるスチール製フロア１００'の製造方法の第２の実施例であり、前記実施例１とは、前記方法によりフレーム１０'を溶接した後に蓋板２０'と一体に溶接される点が異なる。本発明の製造方法によれば、第２の実施例は少なくとも以下のような工程を含む（本実施例は基本的に前記実施例と同じであるので、別途図示は省略する。）。 FIG. 5 shows a second embodiment of the method of manufacturing the steel floor 100 ′ according to the present invention. The first embodiment is different from the first embodiment in that the cover plate 20 ′ is welded to the frame 10 ′ by the above method. The difference is that it is welded together. According to the manufacturing method of the present invention, the second embodiment includes at least the following steps (this embodiment is basically the same as the above embodiment, and is not shown separately).

カット工程：鋼材、例えば、ＳＡＥ４１３０合金鋼あるいは他の炭素鋼材などを用意し、この鋼材素材を所定サイズの枠条１１にカットし、また、例えばＳ４５Ｃ炭素鋼材を用意し、この鋼材素材を固定サイズの蓋板２０にカットする（図1、図４の工程一参照）。 Cutting process: Prepare steel material such as SAE4130 alloy steel or other carbon steel material, cut this steel material into frame 11 of a predetermined size, and prepare S45C carbon steel material, for example, and fix this steel material size (See step 1 in FIGS. 1 and 4).

加工工程：枠条１１毎に複数の嵌合溝１２を打ち抜きし、これらの嵌合溝１２が縁端に近接するに連れピッチが益々小さくなり、また蓋板２０の対角の位置に複数の必要な通気孔２１を開け、集塵のときの空気の流れを有利にさせる（図1、図４の工程一参照）。Processing step: A plurality of fitting grooves 12 are punched for each frame 11, and the pitch is gradually reduced as these fitting grooves 12 approach the edge, and a plurality of fitting grooves 12 are arranged at diagonal positions on the cover plate 20. Necessary ventilation holes 21 are opened to favor the air flow during dust collection (see step 1 in FIGS. 1 and 4).

組み立て工程：複数枚の枠条１１をグラファイトブラケット板３０上に縦横方向に配列組み立てし、枠条１１の嵌合溝１２同士を上下挿接することによりフレーム１０に示す構造になる（図1、図４の工程二参照）。 Assembly process: A plurality of frame strips 11 are arranged and assembled on the graphite bracket plate 30 in the vertical and horizontal directions, and the fitting grooves 12 of the frame strips 11 are vertically inserted and connected to each other to form a structure shown in the frame 10 (FIGS. 1 and 2). 4 step 2).

第一熱処理工程：組み立てたフレーム１０上に複数のアルミナ板４０を敷設し、またこのアルミナ板４０上のフレーム１０に近接する隅部分にそれぞれ重り４１を負荷し、そして第一熱処理炉５０内に挿入し第一熱処理し（図1、図４の工程四参照）、枠条１１と枠条１１の間の応力を除去させる（その熱処理の温度および時間などの各種条件は前記実施例１と同じであるため、説明は省略する。）。First heat treatment step: A plurality of alumina plates 40 are laid on the assembled frame 10, and weights 41 are respectively loaded on corner portions adjacent to the frame 10 on the alumina plate 40, and the first heat treatment furnace 50 is loaded. Inserted and first heat treated (see step 4 in FIGS. 1 and 4) to remove stress between the frame 11 and the frame 11 (various conditions such as temperature and time of the heat treatment are the same as in the first embodiment) Therefore, the description is omitted.)

ソールダー付け工程：第一熱処理が完了したフレーム１０に対し変形量を補正した後に、この枠条１１同士の継ぎ手にソールダー、例えばＣ−６９８銅ペーストなどを塗る（図２、図４の工程五参照）。 Soldering step: After correcting the deformation amount of the frame 10 for which the first heat treatment has been completed, a solder such as C-698 copper paste is applied to the joint between the frames 11 (see step 5 in FIGS. 2 and 4). ).

溶接工程：ソールダー付けが完了したフレーム１０をグラファイトブラケット板３０上に置き、並びにフレーム１０の表面上に複数のアルミナ板４０を敷設し、並びにフレーム１０に近接する隅部分にそれぞれ重り４１を負荷し、そしてこれを連続炉６０に挿入させるとともに溶接する（図２、図４の工程六参照）（その溶接の温度および時間などの条件要素は前記実施例１と同じであるため、説明は省略する。）。 Welding process: The frame 10 on which the soldering has been completed is placed on the graphite bracket plate 30, a plurality of alumina plates 40 are laid on the surface of the frame 10, and weights 41 are respectively loaded on the corners close to the frame 10. Then, this is inserted into the continuous furnace 60 and welded (see step 6 in FIGS. 2 and 4) (conditional elements such as the temperature and time of the welding are the same as those in the first embodiment, and the description thereof is omitted. .)

第二溶接工程：溶接したフレーム１０'と蓋板２０'をアルゴン溶接などで一体に溶接する（図５参照）。 Second welding step: The welded frame 10 ′ and lid plate 20 ′ are integrally welded by argon welding or the like (see FIG. 5).

本発明によれば、前記の方法で作製されたスチール製フロア１００、１００'は、そのフレーム１０、１０'の構造が四つの辺に近接する周縁枠条１１に、両隣接のピッチが内部のものより小さい、即ち、四つの隅と辺でその構造を強化し、また、該プロセス中には、溶接する前に既に第一熱処理を先行に行われており、枠条１１と枠条１１の間並びにおける枠条１１と蓋板２０の間の応力を除去することより、材料の特性を完全に機能させるので、溶接した後の安定性がより好適で、構造が更に強固であり、その単位面積あたりの支持力で言えば、６００ｍｍ^２あたりでは２〜４トン以上の支持力が負荷でき、変形量２ｍｍ以下であって、将来のクリーンルーム用フロアの負荷に対する高い要求に十分適合し、従来の典型的なアルミ鋳造フロアの６００ｍｍ^２あたりの最大支持力２トンより大きい、同じ荷重で言えば、本発明のスチール製フロア１００の重量は従来の典型的なアルミ鋳造フロアよりさらに軽くなる。 According to the present invention, the steel floors 100, 100 ′ produced by the above-described method have the frame 10, 10 ′ having a structure in which the structure of the frames 10, 10 ′ is close to the four sides, and the pitch between the two adjacent sides is the inside. The structure is strengthened at the four corners and sides, and during the process, the first heat treatment has already been carried out prior to welding. By removing the stress between the frame 11 and the cover plate 20 in the interlining, the characteristics of the material are fully functioned, so that the stability after welding is more suitable, the structure is more robust, and the unit Speaking of the supporting force per area, a supporting force of ² to 4 tons or more can be loaded per 600 mm ² , the deformation amount is 2 mm or less, and it is well suited to the high demands on the future clean room floor load. Typical aluminum casting flow Greater than the maximum bearing capacity per 600 mm ² 2 tons in terms of the same load, the weight of the steel floor 100 of the present invention further lighter than traditional typical aluminum casting floor.

本発明によれば、スチール製フロア１００、１００'のプロセスでは、第二熱処理を含むので、鉄鋼材の機械特性を大幅に上昇させ、負荷が設計値を超える時に先に変形の前兆があるので即時に破裂が発生することはなく、事前にその危険を避けることができる。また、本発明のスチール製フロア１００、１００'の工場の一貫加工および熱処理プロセスでは、溶接および熱処理が同時に完了でき、従来の一般加工のように鋼材加工が完了してから熱処理を行う場合より、本発明のプロセスによる場合のほうが簡単で、生産効率が高く、コストを低減することができる。以上のように、本発明のクリーンルーム用スチール製フロアの製造方法は、新規性、進歩性かつ産業上の利用可能性を有する発明である。 According to the present invention, the process of the steel floor 100, 100 ′ includes the second heat treatment, so that the mechanical properties of the steel material are greatly increased, and there is a precursor of deformation when the load exceeds the design value. There is no immediate burst and the danger can be avoided in advance. Moreover, in the integrated processing and heat treatment process of the steel floor 100, 100 ′ of the present invention, welding and heat treatment can be completed at the same time, compared to the case where the heat treatment is performed after the steel material processing is completed as in the conventional general processing, The process according to the present invention is simpler, has higher production efficiency, and can reduce costs. As described above, the method for manufacturing a steel floor for a clean room according to the present invention is an invention having novelty, inventive step and industrial applicability.

本発明の範囲は上記した説明に限らず特許請求の範囲によって示され、特許請求の範囲と均等の意味および範囲内でのすべての変更が含まれることはいうまでもない。 The scope of the present invention is not limited to the above description but is defined by the scope of the claims, and needless to say, all modifications within the scope and meaning equivalent to the scope of the claims are included.

図１は本発明に係るクリーンルーム用スチール製フロアの製造方法を示す説明図である。（工程一〜工程四）FIG. 1 is an explanatory view showing a method for producing a steel floor for a clean room according to the present invention. (Step 1 to Step 4) 図２は、図１に引き続く本発明に係るクリーンルーム用スチール製フロアの製造方法を示す説明図である。（工程五、工程六）FIG. 2 is an explanatory view showing a method for manufacturing a steel floor for a clean room according to the present invention subsequent to FIG. (Process 5 and Process 6) 図３は、図２に引き続く本発明に係るクリーンルーム用スチール製フロアの製造方法を示す説明図である。（工程七）FIG. 3 is an explanatory view showing a method for manufacturing a steel floor for a clean room according to the present invention following FIG. (Process 7) 図４は、本発明に係るクリーンルーム用スチール製フロアの製造方法のプロセスを示すプロセスチャートである。FIG. 4 is a process chart showing a process of a method for manufacturing a steel floor for a clean room according to the present invention. 図５は、本発明に係るクリーンルーム用スチール製フロアの製造方法のもう一つの実施形態を説明するための説明図である。FIG. 5 is an explanatory diagram for explaining another embodiment of the method for manufacturing a steel floor for a clean room according to the present invention. 図６は、従来のクリーンルーム用フロアの構成を示す図である。FIG. 6 is a diagram showing a configuration of a conventional clean room floor. 図７は、従来の合金鋼フロア構造を示す図である。FIG. 7 is a view showing a conventional alloy steel floor structure.

Explanation of symbols

１００本発明のスチール製フロア
１０フレーム
１１枠条
１２嵌合溝
２０蓋板
２１通気孔
３０グラファイトブラケット板
４０アルミナ板
４１重り
５０熱処理炉
６０連続炉 100 Steel floor 10 of the present invention Frame 11 Frame 12 Fitting groove 20 Lid plate 21 Vent hole 30 Graphite bracket plate 40 Alumina plate 41 Weight 50 Heat treatment furnace 60 Continuous furnace

Claims

In a method for manufacturing a steel floor for a clean room composed of a frame composed of a plurality of frames intersecting each other in the horizontal direction and the vertical direction, and a cover plate arranged on the frame,
A cutting step of cutting at least a steel material into a frame of a predetermined size and a fixed-size lid,
A process of punching a plurality of fitting grooves for each frame and opening a plurality of vent holes at diagonal positions of the lid plate;
An assembly process of arranging and assembling a plurality of frame strips in the vertical and horizontal directions on the graphite bracket plate, making a frame structure by vertically inserting and fitting the fitting grooves of the frame strip, and laying a lid plate on the frame structure;
A first heat treatment step of loading a weight on the cover plate of the assembled frame and inserting the weight into a first heat treatment furnace to remove the stress;
After correcting the amount of deformation with respect to the frame for which the first heat treatment has been completed, a soldering step of attaching a solder to the joint between the frames of the frame;
A method for producing a steel floor for a clean room, comprising the steps of: placing the frame on which the soldering has been completed on a graphite bracket plate; loading a weight on the lid plate; and inserting and welding to a continuous furnace. .

In a method for manufacturing a steel floor for a clean room composed of a frame composed of a plurality of frames intersecting each other in the horizontal direction and the vertical direction, and a cover plate arranged on the frame,
Cutting at least a steel material into a frame of a predetermined size and a cover plate of a fixed size;
A process of punching a plurality of fitting grooves for each frame and opening a plurality of vent holes at diagonal positions of the lid plate;
Assembling a plurality of frame strips on the graphite bracket plate in the vertical and horizontal directions, and assembling the frame structure by vertically inserting and fitting the fitting grooves of the frame strips;
A first heat treatment step of loading a weight on the assembled frame and inserting the weight into a first heat treatment furnace to remove the stress;
After correcting the amount of deformation with respect to the frame for which the first heat treatment has been completed, a soldering step of attaching a solder to the joint between the frames,
Placing the frame on which the soldering has been completed on the graphite bracket plate, loading a weight on the frame, and inserting and welding to a continuous furnace;
A method for manufacturing a steel floor for a clean room, comprising a second welding step of welding the welded frame and the cover plate together.

3. The method for manufacturing a steel floor for a clean room according to claim 1, wherein the structure of the frame is such that a pitch adjacent to four sides of the frame is smaller than that of the inside.

The method of manufacturing a clean room steel floor according to claim 1 or 2, wherein the frame is made of SAE4130 alloy steel or another carbon steel material, and the cover plate is made of S45C carbon steel material.

The method for manufacturing a steel floor for a clean room according to claim 4, wherein the temperature of the first heat treatment furnace is approximately 440 ° C.

The method of manufacturing a steel floor for a clean room according to claim 4, wherein the processing time of the first heat treatment furnace is about 125 minutes.

The said continuous furnace contains the preheating zone, the high temperature zone, and the cooling zone according to the advancing direction of a flame | frame, The manufacturing method of the steel floor for clean rooms of Claim 1 or 2 characterized by the above-mentioned.

The method of manufacturing a steel floor for a clean room according to claim 7, wherein the frame passes through the preheat zone and the high temperature zone at a speed of approximately 200 mm / min.

8. The method of manufacturing a clean room steel floor according to claim 7, wherein the frame passes through the cooling zone at a speed of approximately 350 mm / min.

The method of manufacturing a steel floor for a clean room according to claim 7, wherein the temperature of the preheating zone is approximately 800 ° C.

The method of manufacturing a steel floor for a clean room according to claim 7, wherein the temperature of the high temperature zone is in a range of 900 ° C to 1200 ° C.

The method for manufacturing a steel floor for a clean room according to claim 11, wherein the frame is stopped for a predetermined time when passing through the high temperature section.

The method for producing a steel floor for a clean room according to claim 12, wherein the stop for the predetermined time is 3 to 15 minutes.

The method for producing a steel floor for a clean room according to claim 2, wherein the second welding step welds the frame and the cover plate integrally by argon welding.