JP4185000B2 - Manufacturing method of steel plate for magnetic shield inside TV CRT - Google Patents
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本発明は、カラーTVブラウン管内部にあって電子線の通路の外周から覆うように配置される磁気シールド部品の素材、即ち、TVブラウン管内部磁気シールド用鋼板の製造方法に関するものである。 The present invention relates to a material for a magnetic shield component disposed inside a color TV cathode ray tube so as to cover from the outer periphery of an electron beam passage, that is, a method for manufacturing a steel plate for an internal magnetic shield of a TV cathode ray tube.
カラーTVブラウン管の基本構成は、電子銃と電子ビームを映像に変える螢光面から成り立ちさらには、電子ビームが地磁気により偏向されることを防ぐ磁気シールド部品が側面を覆っている。この磁気シールド部品は、インナーシールド部品またはインナーマグネティックシールド部品とも称される。これらの部品を、TVブラウン管内部磁気シールドと本発明では呼ぶ。 The basic configuration of a color TV CRT consists of an electron gun and a fluorescent surface that converts an electron beam into an image. Further, a magnetic shield component that prevents the electron beam from being deflected by geomagnetism covers the side. This magnetic shield component is also referred to as an inner shield component or an inner magnetic shield component. In the present invention, these parts are called TV CRT internal magnetic shields.
TVブラウン管内部磁気シールド用鋼板の板厚は通常0.1−0.4mmであり、この薄鋼板コイルは電気または加工メーカーでプレス成形された後、黒化処理されてから、ブラウン管内部に組み込まれ、封着処理と呼ばれる400−500℃程度でのフリットガラスの溶融によるブラウン管封着などが実施される。地磁気をシールドするために、カラーブラウン管外部に巻かれた所謂、消磁コイルに交流通電して消磁処理を行い、磁気シールド内部の地磁気を減少させる方法が採用されることが一般的である。 The thickness of the steel plate for the magnetic shield inside a TV CRT is usually 0.1-0.4mm, and this thin steel plate coil is press-formed by an electric or processing manufacturer and then blackened before being incorporated into the CRT. A cathode ray tube sealing by frit glass melting at about 400-500 ° C., called a sealing process, is performed. In order to shield the geomagnetism, a so-called demagnetization coil wound around the outside of the color cathode ray tube is subjected to a demagnetization process by applying an alternating current to reduce the geomagnetism inside the magnetic shield.
プレス加工については、後述の黒化処理が省略される場合は、絞り成形ではなく折り曲げ成形によって鋼板に歪みが導入されることが避けられる。しかし、本発明で対象とする黒化処理が前提となる場合は、絞り加工が実施されることが多い。本発明は、この絞り加工と黒化処理を前提条件とする。従来は、TiやBなどを含まない通常の低炭素鋼板または極低炭素板が使用されており、絞り変形でのしわや破れ(とくに、磁気シールドでの圧延方向と45°の角度をなすコーナ部近傍で多かった)、また、黒化処理での黒化膜の密着性に問題が多かった。 As for the press working, when the blackening process described later is omitted, it is possible to avoid introducing strain into the steel sheet by bending rather than drawing. However, when the blackening process that is the subject of the present invention is a prerequisite, the drawing process is often performed. The present invention presupposes this drawing process and blackening process. Conventionally, ordinary low-carbon steel plates or ultra-low carbon plates that do not contain Ti, B, etc. are used, and wrinkles and tears due to squeeze deformation (particularly corners that form an angle of 45 ° with the rolling direction of the magnetic shield) In addition, there were many problems in the adhesion of the blackened film in the blackening treatment.
黒化処理とは、鋼板表面の酸化処理(電子線反射を防止するFe3O4膜の形成)である。温度はFe3O4が形成されやすい温度600℃前後の例えば580℃程度で3−30分均熱が通常の熱処理条件である。雰囲気は、N2、H2、Ar、COなどの非酸化性ガスに酸化性ガスのH2O、O2、CO2などを混合したものが使用される。この黒化処理の熱により、酸化と同時に鋼板の歪みの回復も行われプレス加工による磁性劣化が開放される。 The blackening treatment is an oxidation treatment on the surface of the steel sheet (formation of an Fe 3 O 4 film that prevents electron beam reflection). The temperature is such that Fe 3 O 4 is easily formed, for example, around 580 ° C., for example, about 580 ° C., and 3-30 minutes soaking is a normal heat treatment condition. As the atmosphere, a mixture of non-oxidizing gas such as N 2 , H 2 , Ar, CO and the like with oxidizing gas such as H 2 O, O 2 , CO 2 is used. The heat of this blackening treatment also recovers the distortion of the steel sheet at the same time as the oxidation, and releases the magnetic deterioration due to the press working.
近年、民生用TVの大型化・ワイド化に伴って電子線の走行距離並びに走査距離が長くなり、地磁気により振られる電子線の移動量が増え、色ムラの原因となっている。また、パソコンが急激に伸びているが、静止画像であること近距離で画面をみられることの理由で、高精度の電子線の着地特性が求められている。これらの理由で、電子線着地のドリフトを少なくする内部磁気シールド用鋼板が求められている。シールド性能としては保磁力が小さいほうが優れ、例えていえば、3.0 Oe(エルステッド)以下が望ましい。 In recent years, with the increase in the size and widening of consumer TVs, the traveling distance and scanning distance of electron beams have become longer, and the amount of movement of electron beams shaken by geomagnetism has increased, causing color unevenness. Also, although personal computers are growing rapidly, high-precision electron beam landing characteristics are required because they are still images and the screen can be viewed at a short distance. For these reasons, there is a need for a steel sheet for internal magnetic shielding that reduces the drift of electron beam landing. As the shielding performance, the smaller the coercive force, the better. For example, 3.0 Oe (Oersted) or less is desirable.
従来の技術としては、特許文献1が知られている。この方法は、オープンコイル焼鈍により脱炭を行うもので、従来の絞り加工を折り曲げ加工に変更した点で注目されるが、二回の冷間圧延が必要なことなど製造工程が複雑過ぎてコスト高の問題があった。また、特許文献2には、B、Ti、Nbなどを含有する内部磁気シールド用鋼板が提案されている。しかしながら、この方法は黒化処理を前提としない工程を採用するもので、黒化膜形成についての知見や技術がなくまた、絞り加工性にも難点があった。
本発明は上記の課題、即ち、加工性と黒化膜を改善し、さらに電子線着地のドリフトも少なくするため保磁力を小さくした内部磁気シールド用鋼板の製造方法を提供するものである。 The present invention provides a method for producing a steel sheet for an internal magnetic shield with a reduced coercive force in order to improve the above-described problems, that is, workability and blackened film, and further reduce drift of electron beam landing.
(1) プレス加工により成形された後、表面に黒化処理を施して製造されるカラーTVブラウン管内部磁気シールド用鋼板の製造方法であって、質量%でC≦0.005%、Si≦0.05%、Mn≦0.5%、P≦0.03%、S≦0.02%、Al:0.02−0.10%、N≦0.004%、Nb:0.005−0.03%、Ti:0.01−0.04%、B:0.0001−0.0010%、Cu:0.03−0.3%、残部Feおよび不可避的成分を含有する熱延板を酸洗後、冷延して0.1−0.4mmとし、次いで再結晶焼鈍を実施し、調質圧延を圧下率2%以下で行い、表面粗度Raを0.4μm以上とすることを特徴とするTVブラウン管内部磁気シールド用鋼板の製造方法。
(2) 冷延と焼鈍の間に、2.5g/m2以下のNiめっきを施すことを特徴とする上記(1)項に記載のTVブラウン管内部磁気シールド用鋼板の製造方法。
(1) A method for producing a steel plate for an internal magnetic shield of a color TV Braun tube, which is produced by press forming and then blackened on the surface, wherein C ≦ 0.005% by mass and Si ≦ 0. 0.05%, Mn ≦ 0.5%, P ≦ 0.03%, S ≦ 0.02%, Al: 0.02-0.10%, N ≦ 0.004%, Nb: 0.005-0 A hot rolled sheet containing 0.03%, Ti: 0.01-0.04%, B: 0.0001-0.0010%, Cu: 0.03-0.3%, the balance Fe and inevitable components. After pickling, it is cold rolled to 0.1-0.4 mm, then recrystallized annealing, temper rolling is performed at a reduction rate of 2% or less, and the surface roughness Ra is set to 0.4 μm or more. A method of manufacturing a steel plate for magnetic shielding inside a TV cathode ray tube.
(2) The method for manufacturing a steel plate for a TV Braun tube internal magnetic shield as described in the above item (1), wherein Ni plating of 2.5 g / m 2 or less is performed between cold rolling and annealing.
本発明は加工性と黒化膜を改善し、さらに電子線着地のドリフトも少なくするため保磁力を小さくした内部磁気シールド材用鋼板の製造方法を提供するものである。 The present invention provides a method for producing a steel sheet for an internal magnetic shield material having a reduced coercive force in order to improve workability and blackening film, and also to reduce drift of electron beam landing.
本発明は以下の3つの知見から構成される。1つは絞り加工性を改善するために、B元素を活用すると同時に鋼板表面粗度を制御すること。二点目に、黒化膜の安定化のために元素Ti、Nb、Cuを同時活用すること。さらには、拡散Ni−Fe層を利用すること。三点目は、保磁力を改善するために極低炭素とし、調質圧延の圧下率制限をすることである。これらを組み合わせることにより、絞り加工、黒化膜および磁気特性の課題を一挙に解決することができる。
以下、本発明の制限理由について述べる。
The present invention is composed of the following three findings. One is to control the steel sheet surface roughness at the same time as using B element to improve the drawability. Second, the elements Ti, Nb, and Cu should be used at the same time to stabilize the blackened film. Furthermore, use a diffusion Ni-Fe layer. The third point is to limit the rolling reduction of temper rolling by using extremely low carbon in order to improve the coercive force. By combining these, the problems of drawing, blackening film, and magnetic properties can be solved at once.
Hereinafter, the reasons for limitation of the present invention will be described.
C量は、0.005%以下に制限する。C量が増えると、再結晶後の結晶粒径が小さくなって保磁力が劣化する。この限界が、0.005%である。
Si量は、0.05%以下とする。Siは内部酸化層を部分的に形成しやすく、黒化膜の形成が不安定となる。この限界が、0.05%である。
Mn量は、0.5%以下とする。Mnも鋼板硬度を高めて、鋼板のハンドリング時の折れ疵などの防止に有効であるが、あまり多くなると添加コストの問題があるので0.5%以下とする。
P量は、0.03%以下とする。Pも鋼板硬度を高めるのに有効であるが、0.03%を越えるとプレス加工時の絞り変形により割れることがある(とくに冬場などの低温で)ので避けなければならない。
Al量は、0.02−0.10%とする。Alは、Nを固定して時効を防止するのに有効で、その有効な範囲は0.02%以上、0.10%以下である。
S量は、0.02%以下に制限する。Sは少ないほうが保磁力が改善され、0.02%以下が必要である。
N量は、0.004%以下に制限する。Nは少ないほうが、保磁力が改善され、0.004% 以下が必要である。
The amount of C is limited to 0.005% or less. As the amount of C increases, the crystal grain size after recrystallization decreases and the coercive force deteriorates. This limit is 0.005%.
The amount of Si is 0.05% or less. Si easily forms a part of the internal oxide layer, and the formation of the blackened film becomes unstable. This limit is 0.05%.
The amount of Mn is 0.5% or less. Mn also increases the hardness of the steel sheet and is effective in preventing creases during handling of the steel sheet, but if it is too much, there is a problem of the addition cost, so it is 0.5% or less.
The amount of P is 0.03% or less. P is also effective in increasing the hardness of the steel sheet, but if it exceeds 0.03%, it must be avoided because it may be cracked by drawing deformation during press working (particularly at low temperatures such as in winter).
The amount of Al is 0.02-0.10%. Al is effective for fixing N and preventing aging, and its effective range is 0.02% or more and 0.10% or less.
The amount of S is limited to 0.02% or less. The smaller the S, the better the coercive force, and 0.02% or less is necessary.
N amount is limited to 0.004% or less. The smaller N, the better the coercive force, and 0.004% or less is necessary.
Nb量は、0.005−0.03%とする。Nbは炭窒化物を析出させ、セメンタイト(Fe3C)の形成を抑制して、黒化膜の密着性を改善する。この効果は、0.005%以上で現れるが、0.03%超では効果が飽和し添加コストも上昇するので、0.03%以下とする。なお、黒化膜の密着性にはセメンタイトの析出が効いており、セメンタイトを核として酸化したヘマタイト(Fe2O3)が富化した酸化膜は密着性が劣化し、逆にマグネタイト(Fe3O4)が主体な酸化層は密着性が優れていることが分かった。この密着性の評価は、鋼板を振動させて白い紙の上に落ちた黒化膜の粉をカウントすることで評価されるものである。ただし、簡易的にはテープ剥離試験で代用されることが多い。
Ti量は、0.01−0.04%とする。Tiも炭窒化物を析出させ、セメンタイト(Fe3C)の形成を抑制して、黒化膜の密着性を改善する。この効果は、0.01%以上で現れるが、0.04%超では効果が飽和し添加コストも上昇するので、0.04%以下とする。
B量は、0.0001−0.0010%とする。Bは結晶粒界を強化して、プレスでの割れを防止する。B量は、0.0001%未満では効果がなく、0.0010%超では効果が飽和するため0.0001−0.0010%を範囲とする。
Cu量は、0.03−0.3%とする。Cuも黒化膜の密着性を改善する。Cu量が0.03%未満では密着性が不足なため、0.03%以上が必要である。また、多すぎると添加コストの問題があるので、0.3%以下とする。
その他の不純物として、Sn、Ni、Crなどは合計量で0.2%以下であれば問題はない。
The Nb content is 0.005-0.03%. Nb precipitates carbonitride, suppresses the formation of cementite (Fe 3 C), and improves the adhesion of the blackened film. This effect appears at 0.005% or more, but if it exceeds 0.03%, the effect is saturated and the addition cost increases, so the content is made 0.03% or less. In addition, precipitation of cementite is effective for the adhesion of the blackened film. The adhesion of the oxide film enriched with hematite (Fe 2 O 3 ) oxidized with cementite as a nucleus deteriorates, and conversely, the magnetite (Fe 3 It was found that the oxide layer mainly composed of O 4 ) has excellent adhesion. This evaluation of adhesion is evaluated by counting the blackened film powder that has fallen on the white paper by vibrating the steel plate. However, for simplicity, the tape peeling test is often used instead.
The amount of Ti is 0.01-0.04%. Ti also precipitates carbonitride, suppresses the formation of cementite (Fe 3 C), and improves the adhesion of the blackened film. This effect appears at 0.01% or more. However, if it exceeds 0.04%, the effect is saturated and the addition cost increases, so the content is made 0.04% or less.
The B content is 0.0001-0.0010%. B strengthens the grain boundaries and prevents cracking in the press. If the amount of B is less than 0.0001%, there is no effect, and if it exceeds 0.0010%, the effect is saturated, so 0.0001-0.0010% is made the range.
The amount of Cu is 0.03-0.3%. Cu also improves the adhesion of the blackened film. If the amount of Cu is less than 0.03%, the adhesion is insufficient, so 0.03% or more is necessary. Moreover, since there exists a problem of addition cost when there is too much, it is 0.3% or less.
As other impurities, there is no problem as long as the total amount of Sn, Ni, Cr, etc. is 0.2% or less.
製造工程の製鋼、熱延などは通常実施されている方法で行う。熱延板以降の処理工程として、酸洗後、冷延を行う。次いで、再結晶焼鈍を実施する。焼鈍温度は再結晶する温度680℃以上とする。なお、焼鈍は箱焼鈍でも連続焼鈍でも可能である。焼鈍雰囲気は通常のN2であって、脱炭などの必要はない。続く、調質圧延は、形状矯正や鋼板表面粗度の調整を目的として実施する。鋼板形状がフラットで、粗度も再結晶焼鈍前の冷延段階で調整してあれば、調質圧延を省くことが可能である。鋼板の表面粗度は中心線平均粗さRaで0.4μm以上とする。0.4μm未満では、プレス成形時にかき疵などが出やすく、また絞り破断が発生するので避けなければならない。調質圧延の圧下率は、2%以下とする。調質圧延の圧下率が増加すると、保磁力が劣化する。その限界が2%である。 Steelmaking, hot rolling, and the like in the production process are performed by methods that are usually performed. As a processing step after hot rolling, cold rolling is performed after pickling. Next, recrystallization annealing is performed. The annealing temperature is 680 ° C. or higher for recrystallization. The annealing can be performed by box annealing or continuous annealing. The annealing atmosphere is normal N 2 and there is no need for decarburization. The subsequent temper rolling is performed for the purpose of shape correction and adjustment of the steel sheet surface roughness. If the steel plate shape is flat and the roughness is adjusted at the cold rolling stage before recrystallization annealing, temper rolling can be omitted. The surface roughness of the steel sheet is 0.4 μm or more in terms of centerline average roughness Ra. If it is less than 0.4 μm, scratches or the like are likely to occur during press molding, and drawing breakage occurs. The rolling reduction of temper rolling is 2% or less. When the rolling reduction of temper rolling increases, the coercive force deteriorates. The limit is 2%.
再結晶焼鈍前ではあるが、Niめっき(両面)をすることが可能である。Niめっき量は、2.5g/m2(片面当たり)以下とする。Niめっきの条件は、通常のめっき条件でよいが電気めっきのほうが無電解めっきより生産性は良い。このNiめっきは、焼鈍前に実施されるので、再結晶焼鈍後はNi単独層はなく全てFe−Ni拡散層となっているが、この拡散層はプレス成形でも剥がれないで、次の黒化処理での黒化膜の密着性を改善する。Niめっきを実施しないでも、所定の黒化膜密着性は得られるが、黒化処理炉の雰囲気ガスの不安定性などがある場合は、このNiめっきが有効である。Niめっき量が2.5g/m2(片面当たり)超では、焼鈍後に鋼板最表層にNi単独層が残り黒化処理でも鉄酸化膜が薄くなるので避ける。
以下、実施例について説明する。
Although it is before recrystallization annealing, Ni plating (both sides) can be performed. The amount of Ni plating is 2.5 g / m 2 (per one side) or less. Ni plating conditions may be normal plating conditions, but electroplating is more productive than electroless plating. Since this Ni plating is performed before annealing, there is no Ni single layer after recrystallization annealing, and all the layers are Fe-Ni diffusion layers. Improves adhesion of blackened film during processing. Even if Ni plating is not performed, predetermined black film adhesion can be obtained, but this Ni plating is effective when there is instability of atmospheric gas in the blackening furnace. If the Ni plating amount exceeds 2.5 g / m 2 (per one side), the Ni single layer remains on the outermost surface layer of the steel sheet after annealing, and the iron oxide film becomes thin even in the blackening treatment.
Examples will be described below.
表1に示す種々の成分のインゴットを真空溶解・鋳造し、1200℃で加熱して2.1mm厚の熱延板に熱間圧延した。これを酸洗し、冷延した。この冷延板0.15mm厚を脱脂してから97%N2+3%H2雰囲気の連続焼鈍で、760℃で均熱30秒の熱処理した。次いで、調質圧延の圧下率を0.5%とし、鋼板表面粗度Raを0.8μmとなし、保磁力を直流磁化単板測定装置により試料55mm角の圧延方向に20 Oe(エルステッド)最大磁化をかけて測定した。次いで、580℃で15分均熱の焼鈍を露点20℃で5%H2を含む窒素雰囲気中で黒化処理を実施した。黒化膜の密着性は、テープ剥離試験で調べた。黒化膜がほとんど剥がれるものを×、一部剥がれるものを△、剥がれないものを〇と評価した。
表1に示すように、本発明範囲のC量、S量とN量で保磁力が3.0 Oe以下のものが得られ、また本発明範囲のSi量、Nb量、Ti量とCu量にあって、黒化膜の密着性に優れたものが得られた。
Ingots of various components shown in Table 1 were vacuum melted and cast, heated at 1200 ° C., and hot rolled into 2.1 mm thick hot rolled sheets. This was pickled and cold-rolled. This cold-rolled sheet having a thickness of 0.15 mm was degreased and then heat-treated at 760 ° C. for 30 seconds by continuous annealing in an atmosphere of 97% N 2 + 3% H 2 . Next, the rolling reduction of temper rolling is 0.5%, the steel sheet surface roughness Ra is 0.8 μm, and the coercive force is 20 Oe (Oersted) maximum in the rolling direction of the sample 55 mm square using a DC magnet single plate measuring device. Measured with magnetization. Next, a blackening treatment was performed in a nitrogen atmosphere containing 5% H 2 at a dew point of 20 ° C. after annealing at 580 ° C. for 15 minutes. The adhesion of the blackened film was examined by a tape peeling test. A case where the blackened film was almost peeled off was evaluated as x, a case where the blackened film was partially peeled was evaluated as Δ, and a case where the blackened film was not peeled off was evaluated as ◯.
As shown in Table 1, a C amount, S amount and N amount within the range of the present invention and a coercive force of 3.0 Oe or less are obtained, and a Si amount, Nb amount, Ti amount and Cu amount within the range of the present invention are obtained. Thus, an excellent black film adhesion was obtained.
0.0010%C、0.04%Si、0.20%Mn、0.01%P、0.011%S、0.05%Al、0.002%N、0.07%Cuを含む連続鋳造成分のスラブを鋳造し、1100℃で加熱して2.8mm厚の熱延コイルに熱間圧延した。これを酸洗し、冷延して0.12mm厚とした。この冷延板を脱脂してから、両面Niめっきを付着量1.0g/m2(片面当たり)としてから、窒素ガス雰囲気の連続焼鈍で740℃の均熱温度で時間を1分の熱処理を行った。次いで、調質圧延を表2に示す圧下率で実施した。この鋼板を実施例1と同様にして保磁力を測定した。
表2から明らかなように、調質圧延の圧下率が本発明範囲で優れた保磁力が得られた。
Continuous containing 0.0010% C, 0.04% Si, 0.20% Mn, 0.01% P, 0.011% S, 0.05% Al, 0.002% N, 0.07% Cu The cast component slab was cast, heated at 1100 ° C., and hot rolled into a 2.8 mm thick hot rolled coil. This was pickled and cold rolled to a thickness of 0.12 mm. After degreasing the cold-rolled sheet, double-sided Ni plating was applied to 1.0 g / m 2 (per one side), and then heat treatment was performed for 1 minute at a soaking temperature of 740 ° C. by continuous annealing in a nitrogen gas atmosphere. went. Next, temper rolling was performed at the rolling reduction shown in Table 2. The coercive force of this steel plate was measured in the same manner as in Example 1.
As is clear from Table 2, a coercive force with a temper rolling reduction ratio within the range of the present invention was obtained.
0.0041%C、0.01%Si、0.20%Mn、0.02%P、0.005%S、0.03%Al、0.004%N、0.04%Cu、0.05%Sn、0.05%Niを含む連続鋳造成分のスラブを鋳造し、1200℃で加熱して1.8mm厚の熱延コイルに熱間圧延した。これを酸洗し、冷延して0.30mm厚とした。この冷延板を脱脂してから、表3に示すように両面Niめっきを付着量0−5.0g/m2(片面当たり)に変更してから、窒素ガス雰囲気の連続焼鈍で740℃の均熱温度で時間を1分の熱処理を行った。次いで、調質圧延を圧下率0.3%で実施した。次いで、620℃で15分均熱の焼鈍をCO+CO2雰囲気中、分圧比PCO2/PCO=2.4として黒化処理を実施した。黒化膜の密着性は、実施例1と同様のテープ剥離試験および振動試験で調べた。振動試験は10mm角試片を50回/秒、0.5mmストロークで5時間振動させ白い紙の上に落ちた粉をカウントした。また、黒化膜厚を鋼板断面のSEM組織で観察した。 0.0041% C, 0.01% Si, 0.20% Mn, 0.02% P, 0.005% S, 0.03% Al, 0.004% N, 0.04% Cu,. A continuous casting component slab containing 05% Sn and 0.05% Ni was cast, heated at 1200 ° C., and hot rolled into a 1.8 mm thick hot rolled coil. This was pickled and cold-rolled to a thickness of 0.30 mm. After degreasing the cold-rolled sheet, as shown in Table 3, the double-sided Ni plating was changed to an adhesion amount of 0-5.0 g / m 2 (per one side), and then continuously annealed in a nitrogen gas atmosphere at 740 ° C. Heat treatment was performed for 1 minute at a soaking temperature. Next, temper rolling was performed at a rolling reduction of 0.3%. Next, a blackening treatment was performed by annealing at 620 ° C. for 15 minutes in a CO + CO 2 atmosphere with a partial pressure ratio PCO 2 /PCO=2.4. The adhesion of the blackened film was examined by the same tape peeling test and vibration test as in Example 1. In the vibration test, 10 mm square specimens were vibrated at a stroke of 50 mm / second and 0.5 mm for 5 hours, and the number of powders falling on white paper was counted. Moreover, the blackened film thickness was observed by the SEM structure of the steel plate cross section.
表3に示すように、Niめっき量が2.5g/m2を越えると黒化膜厚が2.5μm以下と薄くなって、電子線の反射防止に問題があるとされる膜厚となり問題であった。また、Niめっきなしに比較して、Niめっきをすれば、テープ剥離では有意差が認められないが、より詳細に密着性を判別できる振動試験によりその効果が認められた。 As shown in Table 3, when the Ni plating amount exceeds 2.5 g / m 2 , the blackened film thickness becomes as thin as 2.5 μm or less, resulting in a film thickness that is considered to have a problem in preventing the reflection of electron beams. Met. In addition, when Ni plating was performed compared with the case without Ni plating, no significant difference was observed in the tape peeling, but the effect was recognized by a vibration test capable of discriminating adhesion in more detail.
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