JP4178304B2 - Heater holding structure and heat treatment furnace using the same - Google Patents

Heater holding structure and heat treatment furnace using the same Download PDF

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Publication number
JP4178304B2
JP4178304B2 JP03433999A JP3433999A JP4178304B2 JP 4178304 B2 JP4178304 B2 JP 4178304B2 JP 03433999 A JP03433999 A JP 03433999A JP 3433999 A JP3433999 A JP 3433999A JP 4178304 B2 JP4178304 B2 JP 4178304B2
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Japan
Prior art keywords
heater
heater holding
pin
heat treatment
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP03433999A
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Japanese (ja)
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JP2000234873A (en
Inventor
賀弘 後藤
俊樹 肴倉
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Filing date
Publication date
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Priority to JP03433999A priority Critical patent/JP4178304B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は熱処理炉に関し、特にセラミック焼成炉等に用いられる高温用ヒータのヒータ保持構造に関する。
【0002】
【従来の技術】
従来より、セラミック用のバッチ式焼成炉には、熱源として棒状のセラミックヒータが用いられている。この棒状のセラミックヒータを垂直に設置する場合には、焼成炉の炉天井に設けられたヒータ挿入口からセラミックヒータを懸架して用いていた。
【0003】
図7のように、従来のヒータ保持構造20は、炉天井24のヒータ挿入口24aにセラミックヒータ21の外径より大きい内径を有するヒータ保持管23を設けている。一方、セラミックヒータ21の端部近傍に貫通孔21aを形成し、この貫通孔21aに金属製の割ピン22を通している。セラミックヒータ21の懸架については、セラミックヒータ21をヒータ保持管23を介してヒータ挿入口24aから炉内へ挿入し、その際、セラミックヒータ21の貫通孔21aに挿入された割ピン22をヒータ保持管23の上面に掛止させてセラミックヒータ21を懸架する。また、セラミックヒータ21の貫通孔21aに挿入した割ピン22が抜けないように突出している割ピン22の先端部を折り曲げて固定している。
【0004】
【発明が解決しようとする課題】
しかしながら、従来のヒータ保持構造には次のような問題点があった。
1.ヒータに挿入する割ピンが金属であるため、ヒータの保持側の端部にプラス極とマイナス極の両極が位置するスパイラルヒータでは割ピンを介してショートしてしまう。
【0005】
2.折り曲げた割ピンの先端部が周囲に接触して漏電の恐れがある。
【0006】
3.ヒータ端部が高温になるため、特に金属製の割ピンでは材質劣化が著しく寿命が短い。
【0007】
4.割ピンの先端部を折り曲げるため、曲折箇所が脆性破壊を起こしやすい。
【0008】
本発明の目的は、漏電やショートの恐れがなく、高温に曝されても材質の劣化が少なく寿命が長いヒータの保持構造を提供することにある。
【0009】
【課題を解決するための手段】
本発明は上記のような目的に鑑みてなされたものである。第1の発明のヒータ保持構造は、熱処理炉の炉天井から略鉛直下方向にヒータを保持するヒータ保持構造であって、一方の端部近傍に貫通孔が形成された棒状のヒータと、前記ヒータの貫通孔に挿入され、前記ヒータの外径より大きい長さを有するヒータ保持ピンと、前記炉天井に設けられたヒータ挿入口を覆うように設置され、内部に前記ヒータを挿入して前記ヒータ保持ピンを掛止するヒータ保持管と、ピン脱落防止具とからなり、前記ヒータを前記ヒータ保持管に挿入するとともに、ヒータの貫通孔に挿入された前記ヒータ保持ピンを前記ヒータ保持管の上面に掛止して、前記ヒータを前記炉天井から懸架し、かつ前記ヒータ保持ピンおよびヒータ保持管の外側にピン脱落防止具を被せることを特徴とする。
【0010】
このような構成にすることにより、ヒータ保持ピンに耐熱性、絶縁性に優れたセラミック等を使用することができる。すなわち、ヒータ保持管の上面でヒータ保持ピンの掛止を行うとともに、その外側からピン脱落防止具を被せるので、ヒータ保護管に掛止部を設けなくても、ヒータ保持ピンのヒータからの脱落を防止することができる。したがって、折り曲げることが不可能な金属以外の材質を使用することができる。さらに、ヒータ保持ピンを変形させる必要がないため、繰り返し使用することができる。
【0011】
さらに、第2の発明の熱処理炉は、炉天井と、炉壁と、炉床とで構成された熱処理空間を有し、請求項1から請求項3のいずれかに記載のヒータ保持構造を用いてヒータを前記熱処理空間内に挿入、保持していることを特徴とする。
【0012】
このような構成にすることによって、ヒータ保持構造の寿命が長く、ショートや漏電の危険性のない熱処理炉とすることができる。
【0013】
【発明の実施の形態】
以下、本発明の実施の形態について説明する。
図1は本発明の参考となるヒータ保持構造を示す概略断面図、図2は本発明の参考となるヒータ保持構造を示す分解斜視図、図3は本発明の参考となるヒータ保持管の掛止部を示す斜視図、図4は本発明のヒータ保持構造を示す概略断面図、図5は本発明のヒータ保持構造を示す分解斜視図である。
【0014】
図4または図5に示すように本発明のヒータ保持構造1は、ヒータ3と、ヒータ保持ピン5と、ヒータ保持管7、ピン脱落防止具11とから構成されている。
【0015】
上記ヒータ3は、棒状ヒータやスパイラルヒータ等からなり、略垂直に保持されている。また、ヒータ3の上端部近傍には、ヒータ保持ピン5を挿入する貫通孔3aが長手方向と直交するように形成されている。また、ヒータ3の材質は、炭化ケイ素、ジルコニア等が挙げられるが特に限定しない。
【0016】
上記ヒータ保持ピン5は、上記ヒータ3の貫通孔3aに挿入され、ヒータ3を懸架するためのものである。また、ヒータ保持ピン5のサイズは、ヒータ3の貫通孔3aに挿入できるもので、ヒータ3の外径より大きい長さを有するものであればよい。また、ヒータ保持ピン5の形状は、円柱状であっても、角柱状であってもよいが、ヒータを確実に固定するために、その断面形状をヒータ3の貫通孔3aに合わせることが好ましい。また、ヒータ保持ピン5の材質は、耐熱性、機械的強度、絶縁性に優れたものを使用するのが好ましい。具体的には、アルミナ、窒化アルミニウム、窒化ケイ素が挙げられる。
【0017】
上記ヒータ保持管7は、熱処理炉の炉天井13に設けられたヒータ挿入口13aを覆うように設けられ、上記ヒータ保持ピン5をその上面に掛止することによって、上記ヒータ3を懸架するためのものである。ヒータ保持管7は、内側にヒータ3を挿入できる程度の内径を有しており、その外側面の一部を外側に突出させることによって、ヒータ保持管7を炉天井13に固定する固定部7aとしている。また、ヒータ保持管7の材質は、耐熱性、機械的強度に優れたものが好ましい。具体的には、ヒータ保持ピン5と同じく、アルミナ、窒化アルミニウム、窒化ケイ素が挙げられる。
【0018】
ここで、図4または図5のように、ヒータ保持管7の上面にヒータ保持ピン5を直接掛止し、その後、ヒータ保持ピン5が脱落しないように、ヒータ保持管7の外側からピン脱落防止具11を装着し、ヒータ保持ピン5を長手方向から抑えることによって、ヒータ保持ピン5をより強固に固定することができる。なお、ピン脱落防止具11は円筒状であり、その内径はヒータ保持管7の外径に即している。
【0019】
次に、熱処理炉について説明する。図6は本発明の熱処理炉を示す概略断面図である。図6に示すように、本発明の熱処理炉12は、炉天井13と、炉壁14と、炉床15とで構成された熱処理空間と、ワーク(図示しない)を加熱するヒータ3と、このヒータ3を保持するヒータ保持構造1とからなる。また、熱処理空間に雰囲気ガスを供給するガス供給管17と、熱処理空間から排気ガスを排出するガス排出管18とを備えている。
【0020】
熱処理炉本体12aは、炉天井13、炉壁14と、これらの熱処理空間側に設けられた断熱材16とからなる。炉天井13にはヒータ3を挿入するヒータ挿入口13aが形成されている。また、必要に応じてガス供給管17の挿入口やガス排出管18の挿入口を設けてもよい。
【0021】
炉床15は、断熱材16からなり、駆動手段(図示しない)によって、回転、上下駆動か可能である。
【0022】
ガス供給管17は、ヒータ3と平行に炉天井13から略垂直に設けられている。また、材質はアルミナ等のセラミックからなり、ワークに向かって側面に複数の雰囲気ガスの供給孔(図示しない)が形成されている。
【0023】
ガス排出管18は、熱処理空間において燃焼した排気ガスを熱処理空間外に排出するためのものであり、炉天井13略中央に設けられている。
【0024】
また、ヒータ保持構造1については、上記のものと同様であるため、説明を省略する。
【0025】
なお、ここではバッチ式熱処理炉を実施の形態としたが、これを連続式熱処理炉としてもよい。
【0026】
【発明の効果】
本発明のヒータ保持構造は、一方の端部近傍に貫通孔が形成された棒状のヒータと、ヒータの貫通孔に挿入され、ヒータの外径より大きい長さを有するヒータ保持ピンと、炉天井に設けられたヒータ挿入口を覆うように設置され、内部に前記ヒータを挿入してヒータ保持ピンを掛止するヒータ保持管と、ピン脱落防止具とからなり、ヒータをヒータ保持管に挿入するとともに、ヒータの貫通孔に挿入されたヒータ保持ピンをヒータ保持管の上面に掛止して、ヒータを炉天井から懸架し、かつヒータ保持ピンおよびヒータ保持管の外側にピン脱落防止具を被せて、熱処理炉の炉天井から略鉛直下方向にヒータを保持している。
【0027】
このような構成にすることによって、ヒータ保持ピンのヒータからの脱落を防止できるため、ヒータ保持ピン自体を折り曲げてヒータ保持管に固定する必要がなく、ヒータ保持ピンに耐熱性、絶縁性に優れたセラミック等を使用することができる。さらに、ヒータ保持ピンを変形させる必要がないため、繰り返し使用することができる。
【0028】
また、本発明の熱処理炉は、炉天井と、炉壁と、炉床とで構成された熱処理空間を有し、上記ヒータ保持構造を用いてヒータを前記熱処理空間内に挿入、保持しているので、ヒータ保持構造の寿命が長く、ショートや漏電の危険性のない熱処理炉とすることができる。
【図面の簡単な説明】
【図1】 本発明の参考となるヒータ保持構造を示す概略断面図。
【図2】 本発明の参考となるヒータ保持構造を示す分解斜視図。
【図3】 本発明の参考となるヒータ保持管の掛止部を示す斜視図。
【図4】 本発明のヒータ保持構造を示す概略断面図。
【図5】 本発明のヒータ保持構造を示す分解斜視図。
【図6】 本発明の熱処理炉を示す概略断面図。
【図7】 従来のヒータ保持構造を示す概略断面図。
【符号の説明】
1 ヒータ保持構造
3 ヒータ
3a 貫通孔
5 ヒータ保持ピン
7 ヒータ保持管
7a 固定部
7b 掛止部
9 ピン固定具
11 ピン脱落防止具
12 熱処理炉
13 炉天井
13a ヒータ挿入口
14 炉壁
15 炉床
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat treatment furnace, and more particularly to a heater holding structure for a high-temperature heater used in a ceramic firing furnace or the like.
[0002]
[Prior art]
Conventionally, a rod-shaped ceramic heater has been used as a heat source in a ceramic batch firing furnace. When this rod-shaped ceramic heater is installed vertically, the ceramic heater is suspended from a heater insertion port provided on the furnace ceiling of the firing furnace.
[0003]
As shown in FIG. 7, the conventional heater holding structure 20 is provided with a heater holding pipe 23 having an inner diameter larger than the outer diameter of the ceramic heater 21 at the heater insertion port 24 a of the furnace ceiling 24. On the other hand, a through hole 21a is formed near the end of the ceramic heater 21, and a metal split pin 22 is passed through the through hole 21a. Regarding the suspension of the ceramic heater 21, the ceramic heater 21 is inserted into the furnace from the heater insertion port 24a via the heater holding tube 23, and at that time, the split pin 22 inserted into the through hole 21a of the ceramic heater 21 is held by the heater. The ceramic heater 21 is suspended from the upper surface of the pipe 23. Moreover, the front-end | tip part of the split pin 22 which protrudes so that the split pin 22 inserted in the through-hole 21a of the ceramic heater 21 may not come off is bent and fixed.
[0004]
[Problems to be solved by the invention]
However, the conventional heater holding structure has the following problems.
1. Since the split pin inserted into the heater is made of metal, a spiral heater in which both the positive pole and the negative pole are located at the end of the heater holding side is short-circuited via the split pin.
[0005]
2. The tip of the bent cotter pin may come into contact with the surrounding area, possibly leading to electric leakage.
[0006]
3. Since the end of the heater becomes high in temperature, the material deterioration is particularly short with a metal split pin.
[0007]
4). Since the tip portion of the split pin is bent, the bent portion is liable to cause brittle fracture.
[0008]
SUMMARY OF THE INVENTION An object of the present invention is to provide a heater holding structure that has no risk of electric leakage or short-circuiting and that has little material deterioration even when exposed to high temperatures and has a long life.
[0009]
[Means for Solving the Problems]
The present invention has been made in view of the above object. A heater holding structure according to a first aspect of the present invention is a heater holding structure that holds a heater in a substantially vertical downward direction from a furnace ceiling of a heat treatment furnace, the rod-shaped heater having a through-hole formed in the vicinity of one end thereof, A heater holding pin inserted into a through hole of the heater and having a length larger than the outer diameter of the heater and a heater insertion port provided in the furnace ceiling are installed, and the heater is inserted into the heater. A heater holding tube for holding the holding pin and a pin drop-off prevention tool. The heater is inserted into the heater holding tube, and the heater holding pin inserted into the through hole of the heater is connected to the upper surface of the heater holding tube . The heater is suspended from the furnace ceiling, and a pin drop prevention tool is put on the outside of the heater holding pin and the heater holding tube.
[0010]
By adopting such a configuration, ceramics having excellent heat resistance and insulation can be used for the heater holding pins. In other words, the heater holding pin is latched on the upper surface of the heater holding tube, and a pin drop prevention device is put on the outside of the heater holding tube, so that the heater holding pin can be removed from the heater without providing a latching portion on the heater protection tube. Can be prevented. Therefore, materials other than metal that cannot be bent can be used. Furthermore, since it is not necessary to deform the heater holding pin, it can be used repeatedly.
[0011]
Furthermore, the heat treatment furnace of the second invention has a heat treatment space composed of a furnace ceiling, a furnace wall, and a hearth, and uses the heater holding structure according to any one of claims 1 to 3. The heater is inserted and held in the heat treatment space.
[0012]
By adopting such a configuration, it is possible to provide a heat treatment furnace that has a long heater holding structure and has no risk of short circuit or electric leakage.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below.
FIG. 1 is a schematic sectional view showing a heater holding structure which is a reference of the present invention, FIG. 2 is an exploded perspective view showing a heater holding structure which is a reference of the present invention, and FIG. 3 is a hook of a heater holding pipe which is a reference of the present invention. FIG. 4 is a schematic sectional view showing the heater holding structure of the present invention, and FIG. 5 is an exploded perspective view showing the heater holding structure of the present invention.
[0014]
As shown in FIG. 4 or FIG. 5, the heater holding structure 1 of the present invention includes a heater 3, a heater holding pin 5, a heater holding tube 7, and a pin dropout prevention tool 11.
[0015]
The heater 3 is composed of a rod heater, a spiral heater or the like, and is held substantially vertically. Further, a through hole 3a for inserting the heater holding pin 5 is formed in the vicinity of the upper end portion of the heater 3 so as to be orthogonal to the longitudinal direction. In addition, examples of the material of the heater 3 include silicon carbide and zirconia, but are not particularly limited.
[0016]
The heater holding pin 5 is inserted into the through hole 3 a of the heater 3 to suspend the heater 3. The heater holding pin 5 may be inserted into the through hole 3a of the heater 3 and may have a length larger than the outer diameter of the heater 3. Moreover, the shape of the heater holding pin 5 may be a columnar shape or a prismatic shape, but it is preferable to match the cross-sectional shape with the through hole 3a of the heater 3 in order to securely fix the heater. . Moreover, it is preferable to use the material of the heater holding pin 5 that is excellent in heat resistance, mechanical strength, and insulation. Specific examples include alumina, aluminum nitride, and silicon nitride.
[0017]
The heater holding tube 7 is provided so as to cover the heater insertion port 13a provided in the furnace ceiling 13 of the heat treatment furnace, and the heater holding pin 5 is hooked on the upper surface thereof to suspend the heater 3. belongs to. The heater holding tube 7 has an inner diameter that allows the heater 3 to be inserted inside, and a fixing portion 7a for fixing the heater holding tube 7 to the furnace ceiling 13 by projecting a part of the outer surface to the outside. It is said. The material of the heater holding tube 7 is preferably excellent in heat resistance and mechanical strength. Specifically, as with the heater holding pin 5, alumina, aluminum nitride, and silicon nitride can be used.
[0018]
Here, as shown in FIG. 4 or 5, the heater holding pin 5 is directly hooked on the upper surface of the heater holding tube 7, and then the pin is dropped from the outside of the heater holding tube 7 so that the heater holding pin 5 does not fall off. The heater holding pin 5 can be more firmly fixed by mounting the preventer 11 and holding the heater holding pin 5 from the longitudinal direction. The pin drop-off prevention tool 11 has a cylindrical shape, and its inner diameter matches the outer diameter of the heater holding tube 7.
[0019]
Next, the heat treatment furnace will be described. FIG. 6 is a schematic sectional view showing a heat treatment furnace of the present invention. As shown in FIG. 6, the heat treatment furnace 12 of the present invention includes a heat treatment space composed of a furnace ceiling 13, a furnace wall 14, and a hearth 15, a heater 3 for heating a workpiece (not shown), The heater holding structure 1 holds the heater 3. Moreover, the gas supply pipe | tube 17 which supplies atmospheric gas to heat processing space, and the gas exhaust pipe 18 which exhausts exhaust gas from heat processing space are provided.
[0020]
The heat treatment furnace main body 12a includes a furnace ceiling 13, a furnace wall 14, and a heat insulating material 16 provided on the heat treatment space side. A heater insertion port 13 a for inserting the heater 3 is formed in the furnace ceiling 13. Moreover, you may provide the insertion port of the gas supply pipe | tube 17, and the insertion port of the gas exhaust pipe | tube 18 as needed.
[0021]
The hearth 15 is made of a heat insulating material 16 and can be rotated and driven up and down by a driving means (not shown).
[0022]
The gas supply pipe 17 is provided substantially vertically from the furnace ceiling 13 in parallel with the heater 3. The material is made of ceramic such as alumina, and a plurality of atmosphere gas supply holes (not shown) are formed on the side surface of the workpiece.
[0023]
The gas exhaust pipe 18 is for exhausting the exhaust gas burned in the heat treatment space to the outside of the heat treatment space, and is provided at the approximate center of the furnace ceiling 13.
[0024]
Further, the heater holding structure 1 is the same as that described above, and a description thereof will be omitted.
[0025]
Although the batch type heat treatment furnace is described here as an embodiment, it may be a continuous heat treatment furnace.
[0026]
【The invention's effect】
The heater holding structure of the present invention includes a rod-shaped heater having a through hole formed in the vicinity of one end thereof, a heater holding pin inserted into the through hole of the heater and having a length larger than the outer diameter of the heater, and a furnace ceiling. A heater holding tube that is installed so as to cover the provided heater insertion opening and inserts the heater inside to hold the heater holding pin, and a pin fall-off prevention tool, and the heater is inserted into the heater holding tube. The heater holding pin inserted in the through hole of the heater is hooked on the upper surface of the heater holding pipe, the heater is suspended from the furnace ceiling, and a pin drop prevention tool is put on the outside of the heater holding pin and the heater holding pipe. The heater is held substantially vertically downward from the furnace ceiling of the heat treatment furnace.
[0027]
By adopting such a configuration, it is possible to prevent the heater holding pin from falling off the heater, so there is no need to bend the heater holding pin itself and fix it to the heater holding tube, and the heater holding pin has excellent heat resistance and insulation. Ceramic or the like can be used. Furthermore, since it is not necessary to deform the heater holding pin, it can be used repeatedly.
[0028]
The heat treatment furnace of the present invention has a heat treatment space composed of a furnace ceiling, a furnace wall, and a hearth, and the heater is inserted and held in the heat treatment space using the heater holding structure. Therefore, it is possible to provide a heat treatment furnace having a long heater holding structure and no risk of short circuit or electric leakage.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view showing a heater holding structure which is a reference of the present invention.
FIG. 2 is an exploded perspective view showing a heater holding structure which is a reference of the present invention.
FIG. 3 is a perspective view showing a latching portion of a heater holding pipe which is a reference of the present invention.
FIG. 4 is a schematic sectional view showing a heater holding structure of the present invention.
FIG. 5 is an exploded perspective view showing a heater holding structure of the present invention.
FIG. 6 is a schematic sectional view showing a heat treatment furnace of the present invention.
FIG. 7 is a schematic sectional view showing a conventional heater holding structure.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Heater holding structure 3 Heater 3a Through-hole 5 Heater holding pin 7 Heater holding pipe 7a Fixing part 7b Latching part 9 Pin fixing tool 11 Pin drop prevention tool 12 Heat treatment furnace 13 Furnace ceiling 13a Heater insertion port 14 Furnace wall 15 Furnace

Claims (2)

熱処理炉の炉天井から略鉛直下方向にヒータを保持するヒータ保持構造であって、
一方の端部近傍に貫通孔が形成された棒状のヒータと、前記ヒータの貫通孔に挿入され、前記ヒータの外径より大きい長さを有するヒータ保持ピンと、前記炉天井に設けられたヒータ挿入口を覆うように設置され、内部に前記ヒータを挿入して前記ヒータ保持ピンを掛止するヒータ保持管と、ピン脱落防止具とからなり、
前記ヒータを前記ヒータ保持管に挿入するとともに、ヒータの貫通孔に挿入された前記ヒータ保持ピンを前記ヒータ保持管の上面に掛止して、前記ヒータを前記炉天井から懸架し、かつ前記ヒータ保持ピンおよびヒータ保持管の外側にピン脱落防止具を被せることを特徴とするヒータ保持構造。
A heater holding structure that holds the heater in a substantially vertical downward direction from the furnace ceiling of the heat treatment furnace,
A rod-shaped heater having a through hole formed in the vicinity of one end thereof, a heater holding pin inserted into the through hole of the heater and having a length larger than the outer diameter of the heater, and a heater inserted in the furnace ceiling It is installed so as to cover the mouth, and includes a heater holding tube that inserts the heater inside and hooks the heater holding pin, and a pin drop prevention tool,
The heater is inserted into the heater holding tube, the heater holding pin inserted into the through hole of the heater is hooked on the upper surface of the heater holding tube, the heater is suspended from the furnace ceiling, and the heater A heater holding structure characterized in that a pin drop prevention tool is put on the outside of a holding pin and a heater holding tube.
炉天井と、炉壁と、炉床とで構成された熱処理空間を有し、
請求項1に記載のヒータ保持構造を用いてヒータを前記熱処理空間内に挿入、保持していることを特徴とする熱処理炉。
It has a heat treatment space composed of a furnace ceiling, a furnace wall, and a hearth,
A heat treatment furnace, wherein the heater is inserted and held in the heat treatment space using the heater holding structure according to claim 1.
JP03433999A 1999-02-12 1999-02-12 Heater holding structure and heat treatment furnace using the same Expired - Fee Related JP4178304B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03433999A JP4178304B2 (en) 1999-02-12 1999-02-12 Heater holding structure and heat treatment furnace using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03433999A JP4178304B2 (en) 1999-02-12 1999-02-12 Heater holding structure and heat treatment furnace using the same

Publications (2)

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JP2000234873A JP2000234873A (en) 2000-08-29
JP4178304B2 true JP4178304B2 (en) 2008-11-12

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101776090B1 (en) * 2016-05-16 2017-09-08 대한열기 주식회사 Furnace for heat treatment and spacer therefor

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