JP4171691B2 - Heating device and temperature control method thereof - Google Patents

Heating device and temperature control method thereof Download PDF

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JP4171691B2
JP4171691B2 JP2003346735A JP2003346735A JP4171691B2 JP 4171691 B2 JP4171691 B2 JP 4171691B2 JP 2003346735 A JP2003346735 A JP 2003346735A JP 2003346735 A JP2003346735 A JP 2003346735A JP 4171691 B2 JP4171691 B2 JP 4171691B2
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temperature
electric heater
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plate
power
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JP2005116250A (en
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孝幸 井口
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Nihon Dennetsu Co Ltd
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Description

本発明は、被加熱物を所定温度に加熱する加熱装置に属し、特に半導体の製造工程においてウェハのような被加熱物を加熱し、製品を所定温度としてから各種の電気的特性を測定し、被加熱物の品質をチェックするために用いる加熱装置、及びその温度制御方法に属する。   The present invention belongs to a heating device that heats an object to be heated to a predetermined temperature, and in particular, heats an object to be heated such as a wafer in a semiconductor manufacturing process, measures various electrical characteristics after setting the product to a predetermined temperature, The present invention belongs to a heating apparatus used for checking the quality of an object to be heated and a temperature control method thereof.

従来技術では、半導体の製造工程において、ウェハのような被加熱物を一定の温度条件下で耐えられるかを検査するために被加熱物を一定の温度に保温し各種の電気的特性を測定し、被加熱物の品質をチェックする検査が行われている。   In the prior art, in order to inspect whether a heated object such as a wafer can withstand a certain temperature in a semiconductor manufacturing process, the heated object is kept at a certain temperature and various electrical characteristics are measured. An inspection is performed to check the quality of the object to be heated.

加熱装置は、図４に示すように、直流電源が供給される発熱線１１ａを含む直流用電気ヒータ部１１と、直流用電気ヒータ部１１により加熱されるプレート（トッププレートとも呼ばれている）１３と、このプレート１３に設けられている温度検出器１５と、プレート１３の一平面１３ａ上に搭載する被加熱物（図示せず）の温度を設定温度に保つように温度検出器１５により検出したプレート１３の温度を設定温度に制御する温度制御部１７と、直流用電気ヒータ部１１へ温度制御部１７を介して直流電源を供給する直流電源部１９とを有している。 As shown in FIG. 4, the heating device includes a DC electric heater unit 11 including a heating wire 11a to which DC power is supplied, and a plate heated by the DC electric heater unit 11 (also referred to as a top plate). 13 and the temperature detector 15 provided on the plate 13 and the temperature detector 15 detects the temperature of an object to be heated (not shown) mounted on one plane 13a of the plate 13 at a set temperature. The temperature control unit 17 controls the temperature of the plate 13 to the set temperature, and the DC power source unit 19 supplies DC power to the DC electric heater unit 11 via the temperature control unit 17.

温度制御部１７は、直流用電気ヒータ部１１に直流電源を供給し設定温度付近までプレート１３の温度が昇温したことを温度検出器１５により検出し、設定温度付近にてプレート１３の温度を保つスイッチ部１７ａを有している。 The temperature control unit 17 supplies a DC power source to the DC electric heater unit 11 to detect that the temperature of the plate 13 has risen to the vicinity of the set temperature by the temperature detector 15 and to set the temperature of the plate 13 in the vicinity of the set temperature. It has the switch part 17a to keep.

なお、このような加熱装置では、被加熱物を加熱するために直流用電気ヒータ部１１に代えて交流用電気ヒータ部を用いて交流電源を供給して昇温するようにしたものがある（特許文献１を参照）。
特開平５−２１６５４３号公報（第１頁、図１） In addition, in such a heating apparatus, in order to heat a to-be-heated object, it replaces with the direct-current electric heater part 11, and supplies the alternating current power supply using the alternating current electric heater part 11, and raises temperature ( (See Patent Document 1).
JP-A-5-216543 (first page, FIG. 1)

従来技術において、被加熱物をより高温域で検査することが要求される場合には、直流用電気ヒータ部１１の容量を大きくしなければ、容量が放熱量に対し不足してしまうことにより応答性が悪くなり、プレート１３に要求される必要な温度が得られないという問題がある。 In the prior art, when it is required to inspect the object to be heated in a higher temperature range, if the capacity of the DC electric heater unit 11 is not increased, the capacity is insufficient with respect to the heat dissipation amount. There is a problem that the necessary temperature required for the plate 13 cannot be obtained.

また、直流用電気ヒータ部１１の容量を大きくすれば、直流電源部や温度制御部１７がその負荷により変更となってしまうので、大幅に見直さなければならないという問題がある。   In addition, if the capacity of the DC electric heater unit 11 is increased, the DC power supply unit and the temperature control unit 17 are changed due to the load, so that there is a problem that it must be reexamined drastically.

さらに、被加熱物を加熱するために直流用電気ヒータ部１１に代えて交流用電気ヒータ部を用いて交流電源を供給して昇温するようにした加熱装置では、その電気的特性から誘導ノイズが発生するので正確な検査ができないという問題がある。 Further, in a heating apparatus that uses an AC electric heater unit instead of the DC electric heater unit 11 to heat the object to be heated and raises the temperature , induction noise is induced due to its electrical characteristics. This causes a problem that accurate inspection cannot be performed.

本発明によれば、直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置において、前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、前記温度制御部は、前記初期昇温時に前記直流電源部から前記直流用電気ヒータ部へ前記直流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部により前記設定温度付近に前記プレートの前記温度を保つよう動作する直流用スイッチ部と、前記初期昇温時に前記交流電源部から前記交流用電気ヒータ部へ前記交流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記設定温度付近にて前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるよう動作するとともに前記設定温度を前記温度制御部によりさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記交流用電気ヒータ部へ前記交流電源を供給し前記プレートの前記温度を前記高温設定温度に昇温させるよう動作する交流用スイッチ部とを有することを特徴とする加熱装置が得られる。 According to the present invention, a DC electric heater unit to which a DC power is supplied, the plate is heated by the straight diverting electric heater unit, to the DC electric heater unit to the AC power supply during the initial heating is supplied In a heating device including an AC electric heater section provided adjacent to the temperature detector, the temperature detector is provided on the plate, and the temperature detection is performed so that the temperature of an object to be heated mounted on one plane of the plate is maintained at a set temperature. A temperature control unit that controls the temperature of the plate detected by a vessel to the set temperature, a DC power supply unit that supplies the DC power to the DC electric heater unit via the temperature control unit, and the AC electric heater An AC power supply unit that supplies AC power to the unit via the temperature control unit, and the temperature control unit supplies the DC power supply from the DC power supply unit to the DC electric heater unit during the initial temperature rise. When the temperature detector detects that the temperature of the plate has risen to near the set temperature, the DC electric heater unit operates to maintain the temperature of the plate near the set temperature. The temperature detector detects that the temperature of the plate has risen to near the set temperature by supplying the AC power source from the AC power source unit to the AC electric heater unit during the initial temperature rise. Sometimes, the AC power supply operates to temporarily stop the supply of the AC power to the AC electric heater near the set temperature, and the AC is set when the set temperature is set to a higher high temperature set temperature by the temperature control unit. The AC power is supplied to the AC electric heater section from the state where the supply of power is temporarily stopped, and the temperature of the plate is set to the high temperature setting. Heating device is obtained which is characterized by having an AC switch section operates to raising the temperature.

また、本発明によれば、直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置の温度制御方法において、前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、前記温度制御部は、直流用スイッチ部と、交流用スイッチ部とを有し、前記初期昇温時には、前記温度制御部により前記直流用スイッチ部及び前記交流用スイッチ部を動作させることによって、前記直流用電気ヒータ部へ前記直流電源が供給され、前記交流用電気ヒータ部へ前記交流電源が供給され、前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部によって前記設定温度付近に前記プレートの前記温度を保ち、かつ前記設定温度付近まで前記プレートの前記温度が昇温したときに前記温度制御部により前記交流用スイッチ部を動作させ前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるとともに、前記温度制御部により前記設定温度をさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記温度制御部により前記交流用スイッチ部が動作されることにより前記交流用電気ヒータ部へ前記交流電源が供給され、前記プレートの前記温度を前記高温設定温度に昇温させることを特徴とする加熱装置の温度制御方法が得られる。 In addition, according to the present invention, the DC electric heater unit to which DC power is supplied, the plate heated by the DC electric heater unit, and the DC electric heater to be supplied with AC power at the time of initial temperature rise. In a temperature control method for a heating apparatus including an AC electric heater provided adjacent to the plate, a temperature detector provided on the plate and a temperature of an object to be heated mounted on one plane of the plate are set temperatures. A temperature control unit that controls the temperature of the plate detected by the temperature detector to the set temperature so as to maintain the DC power source unit that supplies the DC power source to the DC electric heater unit via the temperature control unit; An AC power supply unit that supplies AC power to the AC electric heater unit via the temperature control unit, and the temperature control unit includes a DC switch unit and an AC switch unit, initial When the temperature is warm, the DC control unit and the AC switch unit are operated by the temperature control unit, whereby the DC power source is supplied to the DC electrical heater unit, and the AC power source is supplied to the AC electrical heater unit. And when the temperature detector detects that the temperature of the plate has risen to near the set temperature, the DC electric heater unit maintains the temperature of the plate near the set temperature, and When the temperature of the plate rises to near the preset temperature, the temperature control unit operates the AC switch unit to temporarily stop the supply of AC power to the AC electric heater unit, and the temperature control From the state where the supply of the AC power supply is temporarily stopped when the set temperature is set to a higher high temperature set temperature by the unit. The heating is characterized in that the AC power is supplied to the AC electric heater unit by operating the AC switch unit by the temperature control unit, and the temperature of the plate is raised to the high temperature setting temperature. An apparatus temperature control method is obtained.

本発明に係る加熱装置、及びその温度制御方法によれば、初期昇温時において温度が十分に昇温するまでは、直流用電気ヒータ部、及び交流用電気ヒータ部に直流電源、及び交流電源が供給されることにより、ヒータ容量が大きくなり応答性の維持が可能となる。 According to the heating device and the temperature control method thereof according to the present invention, the direct current power source and the alternating current power source are connected to the direct current electric heater unit and the alternating current electric heater unit until the temperature sufficiently rises at the time of initial temperature rise. There by supplying, it is possible to maintain the responsiveness heating capacity increases.

また、本発明に係る加熱装置によれば、被加熱物の高温域での使用に際し、直流電源部や温度制御部の見直しを最小限に抑えると共に応答性を維持することを可能とする加熱装置及びその温度制御方法を提供することができる。   In addition, according to the heating device according to the present invention, when the object to be heated is used in a high temperature range, the heating device capable of minimizing the review of the DC power supply unit and the temperature control unit and maintaining the responsiveness. And a temperature control method thereof.

また、温度が十分に昇温した後は、交流用電気ヒータ部への交流電源の供給を一時停止させることで、直流電源のみの供給にて直流用電気ヒータ部を制御することが可能であるため、交流による誘導ノイズの発生がなく、誘導ノイズの影響を回避することができ、電力消費エネルギーの損失を低減できるので、被加熱物を一定の温度に保温し各種の電気的特性を測定し、被加熱物の品質をチェックする検査においても正確な検査を遂行することが可能となる。 In addition, after the temperature has risen sufficiently, it is possible to control the DC electric heater unit by supplying only the DC power source by temporarily stopping the supply of the AC power source to the AC electric heater unit. Therefore, there is no generation of induction noise due to alternating current, the influence of induction noise can be avoided, and the loss of power consumption energy can be reduced, so that the object to be heated is kept at a constant temperature and various electrical characteristics are measured. In the inspection for checking the quality of the object to be heated, an accurate inspection can be performed.

さらに、本発明に係る加熱装置によれば、交流電源を追加するといった容易な変更で応答性の維持と共に、高温域での使用が可能である。 Furthermore, the heating device according to the present invention can be used in a high temperature range while maintaining the responsiveness by an easy change such as adding an AC power supply.

本発明の加熱装置は、直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置において、前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、前記温度制御部は、前記初期昇温時に前記直流電源部から前記直流用電気ヒータ部へ前記直流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部により前記設定温度付近に前記プレートの前記温度を保つよう動作する直流用スイッチ部と、前記初期昇温時に前記交流電源部から前記交流用電気ヒータ部へ前記交流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記設定温度付近にて前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるよう動作するとともに前記設定温度を前記温度制御部によりさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記交流用電気ヒータ部へ前記交流電源を供給し前記プレートの前記温度を前記高温設定温度に昇温させるよう動作する交流用スイッチ部とを有することにより実現した。 Heating apparatus of the present invention includes a DC electric heater unit to which a DC power is supplied, the plate is heated by the straight diverting electric heater unit, the DC electric heater unit so that the AC power is supplied during the initial temperature increase In the heating apparatus including an AC electric heater section provided adjacent to the temperature detector, the temperature detector provided in the plate and the temperature to keep the temperature of the object to be heated mounted on one plane of the plate at a set temperature. A temperature control unit that controls the temperature of the plate detected by the detector to the set temperature; a DC power supply unit that supplies the DC power to the DC electric heater unit via the temperature control unit; An AC power supply unit that supplies an AC power supply to the heater unit via the temperature control unit, and the temperature control unit transfers the DC power supply from the DC power supply unit to the DC electric heater unit during the initial temperature rise. A direct current that operates to maintain the temperature of the plate in the vicinity of the set temperature by the DC electric heater unit when the temperature detector detects that the temperature of the plate has risen to near the set temperature. The temperature detector detects that the temperature of the plate has risen to near the set temperature by supplying the AC power source from the AC power source unit to the AC electric heater unit during the initial temperature rise. When the set temperature is set to a higher high temperature set temperature by the temperature control unit while operating to temporarily stop the supply of the AC power supply to the AC electric heater unit near the set temperature The AC power is supplied to the AC electric heater from the state where the supply of AC power is temporarily stopped, and the temperature of the plate is increased. It was achieved by having an AC switch section operable to raise the temperature to the set temperature.

また、本発明の加熱装置の制御方法は、直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置の温度制御方法において、前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、前記温度制御部は、直流用スイッチ部と、交流用スイッチ部とを有し、前記初期昇温時には、前記温度制御部により前記直流用スイッチ部及び前記交流用スイッチ部を動作させることによって、前記直流用電気ヒータ部へ前記直流電源が供給され、前記交流用電気ヒータ部へ前記交流電源が供給され、前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部によって前記設定温度付近に前記プレートの前記温度を保ち、かつ前記設定温度付近まで前記プレートの前記温度が昇温したときに前記温度制御部により前記交流用スイッチ部を動作させ前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるとともに、前記温度制御部により前記設定温度をさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記温度制御部により前記交流用スイッチ部が動作されることにより前記交流用電気ヒータ部へ前記交流電源が供給され、前記プレートの前記温度を前記高温設定温度に昇温させることにより実現した。 The method for controlling a heating device according to the present invention includes a DC electric heater unit to which DC power is supplied, a plate heated by the DC electric heater unit, and an AC power source that is supplied with an initial temperature rise. In a temperature control method for a heating device including an AC electric heater provided adjacent to a DC electric heater, a temperature detector provided on the plate and an object to be heated mounted on one plane of the plate A temperature control unit that controls the temperature of the plate detected by the temperature detector to the set temperature so as to keep the temperature at a set temperature, and the DC power supply is supplied to the DC electric heater unit via the temperature control unit. A DC power supply unit; and an AC power supply unit that supplies AC power to the AC electric heater unit via the temperature control unit. The temperature control unit includes a DC switch unit and an AC switch unit. In the initial temperature increase, the DC power source is supplied to the DC electric heater unit by operating the DC switch unit and the AC switch unit by the temperature control unit, and the AC electric heater unit The AC power is supplied to the plate, and when the temperature detector detects that the temperature of the plate has risen to near the set temperature, the temperature of the plate is set near the set temperature by the DC electric heater unit. And when the temperature of the plate rises to near the set temperature, the temperature control unit operates the AC switch unit to temporarily stop the supply of AC power to the AC electric heater unit. In addition, when the temperature control unit sets the set temperature to a higher high temperature set temperature, the supply of the AC power supply is temporarily stopped. Is the AC power supply to the AC electric heater unit from the state by the AC switch section by the temperature control unit is operated supply, realized by raising the temperature of the temperature of the plate to the hot setting temperature did.

以下に、本発明に係る加熱装置の実施例１について、図面を参照して説明する。図１は、実施例１における加熱装置を示している。なお、図４によって説明した加熱装置と同じ部分には同じ符号を付して説明する。   Below, Example 1 of the heating device concerning the present invention is described with reference to drawings. FIG. 1 shows a heating apparatus according to the first embodiment. In addition, the same code | symbol is attached | subjected and demonstrated to the same part as the heating apparatus demonstrated by FIG.

図１を参照して、加熱装置は直流電源が供給される直流用電気ヒータ部１１と、直流用電気ヒータ部１１により加熱されるプレート１３と、このプレート１３に設けられている温度検出器１５と、プレート１３の一平面１３ａ上に搭載する被加熱物（図示せず）の温度を設定温度に保つように温度検出器１５により検出したプレート１３の温度を設定温度に制御する温度制御部１７と、直流用電気ヒータ部１１へ温度制御部１７を介して直流電源を供給する直流電源部１９とを有している。 Referring to FIG. 1, the heating device includes a DC electric heater unit 11 to which DC power is supplied, a plate 13 heated by the DC electric heater unit 11, and a temperature detector 15 provided on the plate 13. And a temperature control unit 17 that controls the temperature of the plate 13 detected by the temperature detector 15 so as to keep the temperature of an object to be heated (not shown) mounted on the one plane 13a of the plate 13 at the set temperature. And a DC power supply unit 19 for supplying DC power to the DC electric heater unit 11 via the temperature control unit 17.

温度制御部１７は、直流電源部から直流用電気ヒータ部１１へ直流電源を供給し設定温度付近までプレート１３の温度が昇温したことを温度検出器１５により検出し、設定温度付近にてプレート１３の温度を保つスイッチ部（直流用スイッチ部）１７ａを有している。 The temperature control unit 17 supplies a DC power source from the DC power source unit to the DC electric heater unit 11 and detects that the temperature of the plate 13 has risen to the vicinity of the set temperature by the temperature detector 15. 13 has a switch part (DC switch part) 17a for maintaining the temperature.

さらに、加熱装置は、交流電源が供給されるように直流用電気ヒータ部１１に隣接して設けられている交流用電気ヒータ部２１と、交流用電気ヒータ部２１へ温度制御部１７を介して交流電源を供給する交流電源部２３とを有している。 Furthermore, the heating device via an AC electric heater unit 21 where the AC power source is provided adjacent to the DC electric heater 11 so as to supply, the temperature control unit 17 to the AC electric heater unit 21 And an AC power supply unit 23 for supplying AC power.

したがって、加熱装置は、発熱線１１ａを含む直流用電気ヒータ部１１と発熱線２１ａを含む交流用電気ヒータ部２１との２系統の電気ヒータを有している。また、温度制御部１７は、交流電源部から交流用電気ヒータ部２１へ交流電源の供給を一時停止させるスイッチ部（交流用スイッチ部）１７ｂを有している。 Accordingly, the heating device has two systems of electric heaters, that is, the DC electric heater unit 11 including the heating wire 11a and the AC electric heater unit 21 including the heating wire 21a. Further, the temperature control unit 17 includes a switch unit (AC switch unit) 17 b that temporarily stops the supply of AC power from the AC power supply unit to the AC electric heater unit 21.

加熱装置では、被加熱物を搭載するプレート１３の一平面１３ａとは反対側のもう一方の面に直流用電気ヒータ部１１を介して交流用電気ヒータ部２１が設けられている。直流用電気ヒータ部１１と交流用電気ヒータ部２１との間には、マイカ板のような絶縁体４１が設けられている。   In the heating device, an AC electric heater 21 is provided on the other surface opposite to the one plane 13a of the plate 13 on which the object to be heated is mounted via the DC electric heater 11. An insulator 41 such as a mica plate is provided between the DC electric heater unit 11 and the AC electric heater unit 21.

直流用電気ヒータ部１１と交流用電気ヒータ部２１は、シーズヒータをプレート１３にカシメ接合したもの、シーズヒータをプレート１３に鋳込み接合したもの、発熱線をマイカ板に巻着したものをプレート１３に設けたもの、シーズヒータをＨＩＰ（熱間静水圧）により結合したもの、発熱線を耐熱ゴム材に貼り付けたものをプレート１３に設けたものなどの一種によって作られている。なお、直流用電気ヒータ部１１は、プレート１３を鋳込みにより作る際に、シーズヒータを同時に鋳込み結合して一体のものとしてもよい。 The DC electric heater unit 11 and the AC electric heater unit 21 are a plate 13 in which a sheathed heater is caulked and joined to a plate 13, a sheathed heater is cast and joined to the plate 13, and a heating wire is wound around a mica plate. 1, a sheathed heater bonded by HIP (hot isostatic pressure), a heating wire attached to a heat-resistant rubber material, and a plate 13. Note that the DC electric heater unit 11 may be integrally formed by simultaneously casting and coupling a sheathed heater when the plate 13 is made by casting .

プレート１３としては、アルミニウム板、鋼板、セラミックス板などから選ばれた一種を採用する。   As the plate 13, one selected from an aluminum plate, a steel plate, a ceramic plate and the like is employed.

温度検出器１５は、白金測温抵抗体、若しくは熱電対などを採用しており、温度検出器１５の検出端がプレート１３の温度を感知するようにプレート１３の所望個所に取り付けられている。   The temperature detector 15 employs a platinum resistance thermometer or a thermocouple, and is attached to a desired portion of the plate 13 so that the detection end of the temperature detector 15 senses the temperature of the plate 13.

以下、図２をも参照して、実施例１の加熱装置における温度制御方法を説明する。   Hereinafter, the temperature control method in the heating apparatus of Example 1 will be described with reference to FIG.

図２において横軸は、直流用電気ヒータ部１１及び交流用電気ヒータ部２１の加熱、保温時間ｈを示しており、縦軸は、常温（大気温）Ｔ0から設定温度Ｔ1までの温度を示している。なお、図２において、符号２１ｃにより示した部分は、交流用電気ヒータ部２１による加熱時間と温度との関係を示しており、符号２１ｄにより示した部分は交流用電気ヒータ部２１の交流電源の供給を一時停止させた後の残存温度を示している。 In FIG. 2, the horizontal axis indicates the heating and heat retention time h of the DC electric heater unit 11 and the AC electric heater unit 21, and the vertical axis indicates the temperature from normal temperature (atmospheric temperature) T 0 to the set temperature T 1. Is shown. In FIG. 2, the part indicated by reference numeral 21 c indicates the relationship between the heating time and temperature by the AC electric heater unit 21, and the part indicated by reference numeral 21 d indicates the AC power source of the AC electric heater part 21. It shows the residual temperature after temporarily stopped the supply.

図１の加熱装置によって示したように初期昇温時には、直流用電気ヒータ部１１及び交流用電気ヒータ部２１のそれぞれへ直流電源及び交流電源が供給される。そして、図２に示したように常温Ｔ0から設定温度Ｔ1付近までプレート１３の温度が昇温したことを温度検出器１５により検出した後、設定温度Ｔ1付近にて交流用電気ヒータ部２１への交流電源の供給を、スイッチ部１７ｂを動作させることによって一時停止させる。交流用電気ヒータ部２１への交流電源の供給が停止された後は、直流用電気ヒータ部１１は、温度検出器１５、スイッチ部１７ａ及び温度制御部１７によってプレート１３の温度を設定温度Ｔ 1 付近の温度に保つ。 During the initial heating, as shown by the heating device of FIG. 1, a DC power supply and AC power is supplied to the respective DC electric heater 11 and the AC electric heater unit 21. Then, as shown in FIG. 2, the temperature detector 15 detects that the temperature of the plate 13 has risen from the normal temperature T 0 to the vicinity of the set temperature T 1 , and then the AC electric heater section near the set temperature T 1. The supply of AC power to 21 is temporarily stopped by operating the switch unit 17b . After the supply of AC power to the AC electric heater unit 21 is stopped, the DC electric heater unit 11 sets the temperature of the plate 13 to the set temperature T 1 by the temperature detector 15, the switch unit 17a, and the temperature control unit 17. Keep near temperature .

さらに具体的には、温度制御部１７にて設定された設定温度Ｔ1を１５０℃とすると、常温Ｔ0から設定温度Ｔ1の間近の温度まで接近した経過時間Ａ点付近において交流用電気ヒータ部２１への交流電源の供給が一時停止され、以降は直流用電気ヒータ部１１のみによる設定温度での保温とする。なお、保温の際には、制御出力も大きな電力を必要としないため、これに適した電力回路を作成すればよいので変換の損失が小さくなる。 More specifically, assuming that the set temperature T 1 set by the temperature control unit 17 is 150 ° C., the AC electric heater near the elapsed time point A approaching from room temperature T 0 to a temperature close to the set temperature T 1. The supply of AC power to the unit 21 is temporarily stopped, and thereafter the temperature is kept at the set temperature only by the DC electric heater unit 11. It should be noted that since the control output does not require a large amount of power during the heat retention, a power circuit suitable for this need only be created, and conversion loss is reduced.

また、設定温度Ｔ1をさらに高い高温設定温度、例えば２００℃へ変更した場合には、温度制御部１７によってスイッチ部（交流用スイッチ部）１７ｂを動作させることにより、交流用電気ヒータ部２１へ交流電源が供給されるようにして高温設定温度に昇温するようにすればよい。このように直流のみにて温度制御を行うよりも使用エネルギー量を削減できることとなる。 Further, when the set temperature T 1 is changed to a higher high temperature set temperature, for example, 200 ° C. , the temperature control unit 17 operates the switch unit (AC switch unit) 17 b to the AC electric heater unit 21 . it may be to warm to hot setting temperature as AC power is supplied. Thus, the amount of energy used can be reduced as compared with the case where the temperature control is performed only by the direct current.

また、交流用電気ヒータ部２１に交流電源が供給される初期昇温時には、プレート１３を介して誘導ノイズが発生し測定に影響を及ぼすため、交流用電気ヒータ部２１の交流電源の供給を一時停止させた後に、被加熱物の測定を行う。なお、直流にて直流用電気ヒータ部１１に直流電源を供給した場合には、交流の時のような誘導ノイズによる測定への影響はない。 Further, at the time of initial temperature rise when AC power is supplied to the AC electric heater unit 21, induction noise is generated through the plate 13 and affects measurement, so the AC electric heater unit 21 temporarily supplies AC power. after stopping, the measurement of the object to be heated. In addition, when direct-current power is supplied to the direct current electric heater unit 11 by direct current, there is no influence on measurement due to induction noise as in the case of alternating current.

図３は、加熱装置の実施例２を示している。なお、実施例１において説明した構成で同じ要素の部分については同じ符号を付して説明を省略する。   FIG. 3 shows a second embodiment of the heating device. In addition, the same code | symbol is attached | subjected about the part of the same element by the structure demonstrated in Example 1, and description is abbreviate | omitted.

図３に示す加熱装置の実施例２では、被加熱物を搭載するプレート１３の一平面１３ａとは反対側のもう一方の面に発熱線１１ａ、及び発熱線２１ａを含む直流交流共用電気ヒータ部３１が同一平面上に設けられている。このような発熱線１１ａ及び発熱線２１ａを含む直流・交流共用の電気ヒータ部３１とすると、実施例１に示した絶縁体４１が除かれている構成となるので、更に応答性がよく電力消費エネルギーの損失を低減することができる。   In Example 2 of the heating apparatus shown in FIG. 3, the DC / AC common electric heater unit including the heating wire 11a and the heating wire 21a on the other surface opposite to the one surface 13a of the plate 13 on which the object to be heated is mounted. 31 are provided on the same plane. When the electric heater unit 31 including both the heating wire 11a and the heating wire 21a is used for both DC and AC, the insulator 41 shown in the first embodiment is removed. Energy loss can be reduced.

本発明に係る加熱装置の実施例１を概略構成により示した側面図である。It is the side view which showed Example 1 of the heating apparatus which concerns on this invention by schematic structure. 図１に示した加熱装置の温度制御方法を説明するためのグラフである。It is a graph for demonstrating the temperature control method of the heating apparatus shown in FIG. 本発明に係る加熱装置の実施例２を概略構成により示した側面図である。It is the side view which showed Example 2 of the heating apparatus which concerns on this invention by schematic structure. 従来技術における加熱装置の概略構成を示す側面図である。It is a side view which shows schematic structure of the heating apparatus in a prior art.

符号の説明Explanation of symbols

１１ 直流用電気ヒータ部
１３ プレート
１５ 温度検出器
１７ 温度制御部
１７ａ スイッチ部（直流用スイッチ部）
１７ｂ スイッチ部（交流用スイッチ部）
１９ 直流電源部
２１ 交流用電気ヒータ部
２３ 交流電源部
３１ 直流交流共用電気ヒータ部
４１ 絶縁板
Ｔ1 設定温度
Ｔ0 常温 11 Electric heater for DC 13 Plate 15 Temperature detector 17 Temperature controller
17a switch (DC switch)
17b switch part (AC switch part)
19 DC power supply unit 21 AC electric heater unit 23 AC power supply unit 31 DC / AC common electric heater unit 41 Insulating plate T 1 set temperature T 0 normal temperature

Claims (4)

直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置において、
前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、
前記温度制御部は、前記初期昇温時に前記直流電源部から前記直流用電気ヒータ部へ前記直流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部により前記設定温度付近に前記プレートの前記温度を保つよう動作する直流用スイッチ部と、前記初期昇温時に前記交流電源部から前記交流用電気ヒータ部へ前記交流電源を供給し前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記設定温度付近にて前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるよう動作するとともに前記設定温度を前記温度制御部によりさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記交流用電気ヒータ部へ前記交流電源を供給し前記プレートの前記温度を前記高温設定温度に昇温させるよう動作する交流用スイッチ部とを有することを特徴とする加熱装置。 A DC electric heater section to which DC power is supplied, a plate heated by the DC electric heater section, and an AC provided adjacent to the DC electric heater section so that AC power is supplied at the time of initial temperature rise in the heating apparatus including a use electric heater unit,
A temperature control for controlling the temperature of the plate detected by the temperature detector to the set temperature so as to keep the temperature of the object to be heated mounted on one plane of the plate at a set temperature. A DC power supply unit that supplies the DC power supply to the DC electric heater unit via the temperature control unit, and an AC power supply unit that supplies AC power to the AC electric heater unit via the temperature control unit And
The temperature control unit supplies the DC power source from the DC power source unit to the DC electric heater unit at the time of the initial temperature rise, and the temperature detector detects that the temperature of the plate has increased to near the set temperature. When detected, the DC electric heater unit operates to maintain the temperature of the plate near the set temperature, and the AC power source unit to the AC electric heater unit during the initial temperature rise Supplying the AC power to the AC electric heater near the set temperature when the temperature detector detects that the temperature of the plate has risen to near the set temperature by supplying an AC power The AC power supply is temporarily stopped when the set temperature is set to a higher high temperature set temperature by the temperature control unit. Heating device, characterized in that from the state having an AC switch section operable to raise the temperature of the temperature of the plate supplying the AC power to the AC electric heater unit to the hot setting temperature. 請求項１記載の加熱装置において、前記被加熱物を搭載する前記プレートの前記一平面とは反対側のもう一方の面に前記直流用電気ヒータ部を介して前記交流用電気ヒータ部が設けられていることを特徴とする加熱装置。 2. The heating device according to claim 1, wherein the AC electric heater section is provided on the other surface opposite to the one plane of the plate on which the object to be heated is mounted via the DC electric heater section. heating and wherein the are. 請求項１記載の加熱装置において、前記被加熱物を搭載する前記プレートの前記一平面とは反対側のもう一方の面に前記直流用電気ヒータ部及び前記交流用電気ヒータ部が一平面上に設けられていることを特徴とする加熱装置。 In the heating apparatus according to claim 1, wherein the said direct current electric heater unit and the AC electric heater unit to the other surface opposite to the one plane of the plate for mounting an object to be heated is one plane A heating device is provided. 直流電源が供給される直流用電気ヒータ部と、該直流用電気ヒータ部により加熱されるプレートと、初期昇温時に交流電源が供給されるよう前記直流用電気ヒータ部に隣接して設けた交流用電気ヒータ部とを含む加熱装置の温度制御方法において、
前記プレートに設けた温度検出器と、前記プレートの一平面上に搭載する前記被加熱物の温度を設定温度に保つよう前記温度検出器により検出した前記プレートの温度を前記設定温度に制御する温度制御部と、
前記直流用電気ヒータ部へ前記温度制御部を介して前記直流電源を供給する直流電源部と、前記交流用電気ヒータ部へ前記温度制御部を介して交流電源を供給する交流電源部とを有し、
前記温度制御部は、直流用スイッチ部と、交流用スイッチ部とを有し、
前記初期昇温時には、前記温度制御部により前記直流用スイッチ部及び前記交流用スイッチ部を動作させることによって、前記直流用電気ヒータ部へ前記直流電源が供給され、前記交流用電気ヒータ部へ前記交流電源が供給され、前記設定温度付近まで前記プレートの前記温度が昇温したことを前記温度検出器により検出したときに前記直流用電気ヒータ部によって前記設定温度付近に前記プレートの前記温度を保ち、かつ前記設定温度付近まで前記プレートの前記温度が昇温したときに前記温度制御部により前記交流用スイッチ部を動作させ前記交流用電気ヒータ部への前記交流電源の供給を一時停止させるとともに、前記温度制御部により前記設定温度をさらに高い高温設定温度に設定したときに前記交流電源の供給を前記一時停止した状態から前記温度制御部により前記交流用スイッチ部が動作されることにより前記交流用電気ヒータ部へ前記交流電源が供給され、前記プレートの前記温度を前記高温設定温度に昇温させることを特徴とする加熱装置の温度制御方法。 A DC electric heater section to which DC power is supplied, a plate heated by the DC electric heater section, and an AC provided adjacent to the DC electric heater section so that AC power is supplied at the time of initial temperature rise In the temperature control method of the heating device including the electric heater part for
A temperature detector provided on the plate and a temperature at which the temperature of the plate detected by the temperature detector is controlled to the set temperature so as to keep the temperature of the heated object mounted on one plane of the plate at a set temperature. A control unit;
A DC power supply unit that supplies the DC power supply to the DC electric heater unit via the temperature control unit; and an AC power supply unit that supplies AC power to the AC electric heater unit via the temperature control unit. And
The temperature control unit includes a DC switch unit and an AC switch unit,
At the time of the initial temperature increase, the DC power source is supplied to the DC electric heater unit by operating the DC switch unit and the AC switch unit by the temperature control unit, and the AC electric heater unit is supplied with the DC power source. When the AC power is supplied and the temperature detector detects that the temperature of the plate has risen to near the set temperature, the temperature of the plate is maintained near the set temperature by the DC electric heater section. And when the temperature of the plate rises to near the set temperature, the temperature control unit operates the AC switch unit to temporarily stop the supply of the AC power to the AC electric heater unit, When the set temperature is set to a higher set temperature by the temperature control unit, the supply of the AC power supply is temporarily stopped. When the AC switch unit is operated by the temperature control unit from the state, the AC power is supplied to the AC electric heater unit, and the temperature of the plate is raised to the high temperature setting temperature. Temperature control method for the heating device .
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