JP4168834B2 - Clamping device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clamping device capable of gripping a pipe that circulates a relatively high temperature gas, such as a pipe used in a vapor phase growth apparatus or the like.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, semiconductor wafers that have been processed into a flat plate from a silicon single crystal rod grown by the Czochralski method have been widely used as semiconductor wafers that are materials for making substrates for integrated circuits. Then, an integrated circuit substrate is manufactured by forming a single crystal silicon layer having an arbitrary film thickness and resistivity on the wafer by a method such as epitaxial growth. As a vapor phase growth apparatus for growing an epitaxial film, apparatuses having various structures have been proposed depending on the heating method and the difference in the shape of the susceptor. Specifically, there are known a vertical vapor phase growth apparatus that heats a susceptor on a circular flat plate from below, and a barrel type vapor phase growth apparatus that heats a barrel type susceptor with a side lamp. A leaf-type vapor phase growth apparatus has been developed. In the reaction chamber of these vapor phase growth apparatuses, a susceptor having a SiC film coated on the surface of graphite is disposed, and a circular recess capable of accommodating a wafer on which an epitaxial film is grown is formed on the susceptor.
[0003]
In these apparatuses, the pressure in the reaction chamber is reduced while the wafer for growing an epitaxial film is accommodated in the recess of the susceptor, and the wafer is directly or indirectly heated in the reaction chamber by heating means such as a high-frequency coil. Gas or source gas is supplied from the supply pipe to the inside of the reaction chamber, and a single crystal, polycrystalline or non-quality solid on the wafer surface, such as a semiconductor such as silicon, oxide, nitride, metal, alloy, or other compound Is deposited to grow an epitaxial film. On the other hand, the reactive gas or raw material gas on which the epitaxial film has been grown is then discharged outside the apparatus through the exhaust pipe. The supply pipe and the exhaust pipe are connected with a plurality of pipes via so-called O-rings in order to prevent leakage of reactive gas or raw material gas.
[0004]
However, since this reactive gas or raw material gas is relatively high temperature, when the pipe constituting the supply pipe or the exhaust pipe is connected via a so-called O-ring, the temperature rises in that portion. There was a problem that the O-ring deteriorated relatively early and the O-ring had to be replaced relatively frequently. Here, an O-ring is fitted on the outer periphery of the cylinder, a jacket is fitted on the cylinder, and the inner peripheral surface thereof is brought into close contact with the O-ring, whereby the O-ring is interposed between the outer periphery of the cylinder and the inner peripheral surface of the jacket. There has been proposed a technique for securing a space for cooling water that is hermetically sealed by (see, for example, Patent Document 1). For this reason, it is also conceivable to suppress the temperature rise of the O-ring used for connecting the pipes constituting the supply pipe or the exhaust pipe by flowing cooling water into the space sealed by the O-ring.
[0005]
[Patent Document 1]
JP-A-9-306370 [0006]
[Problems to be solved by the invention]
However, the O-ring that connects the pipes constituting the supply pipe or the exhaust pipe is positioned between the end face of the pipe and the end face of the pipe adjacent thereto, and is sandwiched between the end faces. Therefore, there has been a problem that the above-described technique based on the assumption that an O-ring is inserted into the pipe cannot be used as it is. Further, in such a supply pipe or exhaust pipe through which a relatively high temperature gas is circulated, it is conceivable that the pipe is welded without using an O-ring, and the supply pipe and the exhaust pipe are connected by the pipe. However, when piping is made by welding, it becomes difficult to move and the like, and there is a problem that maintenance becomes relatively difficult when a problem such as corrosion occurs.
The objective of this invention is providing the clamp apparatus which can prevent the remarkable temperature rise in the attached part.
[0007]
[Means for Solving the Problems]
In the invention according to claim 1, as shown in FIG. 1, a first clamp piece 11 having a base end of a male screw 13 pivotally supported at one end, and a seat plate 12a of a nut 14 screwed to the male screw 13 are integrally formed at one end. And a second clamp piece 12 having the other end pivotally supported at the other end of the first clamp piece 11, and the first and second clamp pieces 11, 12 are arranged on the outside so as to draw a circle in an overlapping state. It is an improvement of the clamping device formed in a semicircular shape. The characteristic configuration includes a first cooling water jacket 21 provided on the first clamp piece 11 so as to cover the outer surface of the first clamp piece 11 and forming a first cooling water space 21c between the first clamp piece 11 and A second cooling water jacket 22 provided on the second clamp piece 12 so as to cover the outer surface of the second clamp piece 12 and forming a second cooling water space 22c between the second clamp piece 12 and the first cooling water. A flexible communication tube 28 that allows the space 21c and the second cooling water space 22c to communicate with each other, and the cooling water supplied to the first or second cooling water space 21c, 22c passes through the communication tube 28 to the second or It exists in the place which moved to the 1st cooling water space 22c, 21c and was able to discharge | emit outside.
[0008]
In the clamp device according to the first aspect, even if the pipe 17 gripped by the first and second clamp pieces 11 and 12 is heated, the heat is applied to the first and second clamp pieces 11 and 12 gripping the pipe. It is transmitted and taken away by the cooling water flowing through the first and second cooling water spaces 21c and 22c, and discharged to the outside together with the cooling water. Accordingly, a significant temperature increase in the portion where the clamping device of the present invention is attached is avoided. Therefore, even if a pipe that circulates a relatively high temperature gas is connected via an O-ring, if the clamp device is attached to a portion where the O-ring is used, the O-ring will deteriorate due to heat. It is avoided and the frequency of work for exchanging the O-ring can be reduced.
[0009]
The invention according to claim 2 is the invention according to claim 1, wherein the first coolant pipe 21 is provided in the first cooling water jacket 21 near one end of the first clamp piece 11, and the first clamp piece 11 A first communication pipe 24 is provided in the first cooling water jacket 21 in the vicinity of the other end, a second communication pipe 27 is provided in the second cooling water jacket 22 in the vicinity of the other end of the second clamp piece 12, and the second clamp piece. A second supply and discharge pipe 26 is provided in the second cooling water jacket 22 near one end of the twelve end, one end of the communication tube 28 is connected to the first communication pipe 24, and the other end of the communication tube 28 is connected to the second communication pipe 27. It is a connected clamping device.
According to this second aspect, the first and second communication pipes 24, 27 to which the end of the communication tube 28 is connected are connected to the first and second ends in the vicinity of the other ends of the first and second clamp pieces 11, 12. Since the cooling water jackets 21 and 22 are provided, the first and second clamp pieces 11 and 12 can be freely rotated around the other end without removing the communication tube 28.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1-3, the clamp apparatus 10 of this invention is equipped with the plate-shaped 1st and 2nd clamp pieces 11 and 12 each curved by semicircle shape. A base end of a male screw 13 is pivotally supported at one end of the first clamp piece 11, and a nut 14 is screwed onto the male screw 13 from the tip. That is, the central portion of the first support shaft 13a orthogonal to the male screw 13 is welded to the base end of the male screw 13, and the plate-like end of the first clamp piece 11 surrounds both sides of the first support shaft 13a. The base end of the male screw 13 is pivotally supported at one end of the first clamp piece 11. On the other hand, a seat plate 12 a of the nut 14 is integrally formed at one end of the second clamp piece 12. The other end of the first clamp piece 11 is folded so as to surround both sides of the second support shaft 16, and the other end of the second clamp piece 12 is folded so as to surround the center of the second support shaft 16. Thus, the other end of the second clamp piece 12 is pivotally supported on the other end of the first clamp piece 11 via the second support shaft 16.
[0011]
The first and second clamp pieces 11 and 12 are formed to be curved outward from each other so as to draw a circle in an overlapping state. The seat plate 12a at one end of the second clamp piece 12 is formed with a notch 12b that opens at an outer edge corresponding to the rotation locus of the male screw 13 along the rotation locus (FIG. 2). The first and second clamp pieces 11 and 12 are overlapped, and the male screw 13 is rotated around the first support shaft 13a from the state shown by the one-dot chain line in FIG. The first and second clamp pieces 11 and 12 can be maintained in an overlapped state by tightening the nut 14 with the seat plate 12a facing each other and inserted between the first and second clamp pieces 11 and 12. It is comprised so that the pipe 17 may be clamped.
[0012]
The first clamp piece 11 is provided with a first cooling water jacket 21 so as to cover the outer surface of the first clamp piece 11, and the second clamp piece 12 is provided so as to cover the outer surface of the second clamp piece 12. A second cooling water jacket 22 is provided. The first cooling water jacket 21 is formed by being raised around the first bottom plate 21a so as to surround the first bottom plate 21a curved in the same manner as the first clamp piece 11 and the first bottom plate 21a. The first circumferential flange 21b is welded in a state where the first circumferential flange 21b is in contact with the outer surface of the first clamp piece 11. By being welded in this manner, the first cooling water jacket 21 is configured to form a first cooling water space 21 c between the first clamp piece 11. On the other hand, the second cooling water jacket 22 is formed by being raised around the second bottom plate 22a so as to surround the second bottom plate 22a curved in the same manner as the second clamp piece 12 and the second bottom plate 22a. The second peripheral flange 22b is welded in a state where the tip edge of the second peripheral flange 22b is in contact with the outer surface of the second clamp piece 12. By welding in this way, the second cooling water jacket 22 forms a second cooling water space 22 c between the second clamp piece 12.
[0013]
A first supply / discharge pipe 23 is provided in the first cooling water jacket 21 near one end of the first clamp piece 11, and a first communication pipe 24 is provided in the first cooling water jacket 21 near the other end of the first clamp piece 11. Is provided. Each of the first supply / discharge pipe 23 and the first communication pipe 24 is provided so as to penetrate the first bottom plate 21a of the first cooling water jacket 21, and each end thereof is opened to the first cooling water space 21c. The On the other hand, the second cooling water jacket 22 near one end of the second clamp piece 12 is provided with a second supply / discharge pipe 26, and the second cooling water jacket 22 near the other end of the second clamp piece 12 is connected to the second cooling water jacket 22. A pipe 27 is provided. Each of the second supply / discharge pipe 26 and the second communication pipe 27 is provided so as to penetrate the second bottom plate 22a of the second cooling water jacket 22, and each end thereof is configured to open to the second cooling water space 22c. The One end of the communication tube 28 is connected to the other end of the first communication pipe 24, and the other end of the communication tube 28 is connected to the other end of the second communication pipe 27. The communication tube 28 in this embodiment is a flexible tube made of SUS304, and communicates the first cooling water space 21c and the second cooling water space 22c via the first and second communication pipes 24 and 27. Configured as follows.
[0014]
The operation of the clamping device configured as described above will be described.
In order to grip the pipe by the clamping device 10 of the present invention, as shown by a two-dot chain line in FIG. 1, the first or second clamping pieces 11 and 12 are rotated around the second support shaft 16 and one end of each is rotated. Leave open. In this case, in the clamping device of the present invention, the first and second communication pipes 24 and 27 to which the end of the communication tube 28 is connected are connected to the first and second clamp pieces 11 and 12 in the vicinity of the other ends. Since the second cooling water jackets 21 and 22 are provided, the first and second clamp pieces 11 and 12 can be rotated around the other ends without removing the communication tube 28.
[0015]
Then, the pipe 17 to be grasped from the opened one end is inserted between the first and second clamp pieces 11 and 12, and the first or second clamp pieces 11 and 12 are indicated by two-dot chain arrows in FIG. Thus, the first and second clamp pieces 11 and 12 are overlapped. 1, the male screw 13 is rotated around the first support shaft 13a and inserted into the notch 12b in the seat plate 12a, and the nut 14 is placed with the seat plate 12a facing the nut 14. tighten. Accordingly, the first and second clamp pieces 11 and 12 are maintained in an overlapping state, and the pipe 17 inserted between the first and second clamp pieces 11 and 12 is connected to the first and second clamp pieces 11 and 12. Hold with.
[0016]
As shown in FIG. 3, the portion to be gripped is a butt portion of one pipe 17a and the other pipe 17b having the same diameter as the one pipe 17a, and an O-ring 29 is interposed in the butt portion. In the case where the airtightness in the portion is secured, when a relatively high temperature gas is circulated through the pipes 17a and 17b, the O-ring 29 is deteriorated relatively early due to the temperature. In this case, a cooling water supply device (not shown) is connected to the other end of the first supply / discharge pipe 23, and the first cooling water space 21c is cooled via the first supply / discharge pipe 23 as shown by the broken line arrows in FIG. Supply water. The cooling water supplied to the first cooling water space 21c then flows into the communication tube 28 from the first communication pipe 24, and moves from the second communication pipe 27 to the second cooling water space 22c via the communication tube 28. To do. The cooling water thus moved is discharged from the second supply / discharge pipe 26 to the outside.
[0017]
When a relatively high temperature gas is circulated through the pipes 17a and 17b, the O-ring 29 is heated by the temperature of the gas, but the heat is directly or via the one or the other pipes 17a and 17b. 2 is transmitted to the clamp pieces 11 and 12. The heat transmitted to the first and second clamp pieces 11 and 12 is taken away by the cooling water flowing through the first and second cooling water spaces 21c and 22c, and is discharged to the outside together with the cooling water. Therefore, a significant temperature rise of the O-ring 29 is avoided, the O-ring 29 is prevented from being deteriorated by heat, and the work frequency for replacing the O-ring 29 can be reduced.
In the above-described embodiment, the cooling water supply device (not shown) is connected to the other end of the first supply / discharge pipe 23 to supply the cooling water, but the cooling water supply device is connected to the other end of the second supply / discharge pipe 26. The cooling water may be supplied from the second supply / exhaust pipe 26 to the second cooling water space 22c, and the cooling water may be moved to the first cooling water space 21c via the communication tube 28.
[0018]
【The invention's effect】
As described above, according to the present invention, the second cooling water space is formed between the first cooling water jacket that forms the first cooling water space between the first clamp piece and the second clamp piece. Since the second cooling water jacket and the flexible communication tube that communicates the first cooling water space and the second cooling water space are provided, the pipe gripped by the first and second clamp pieces can be heated. The heat is taken away by the cooling water flowing through the first and second cooling water spaces and discharged to the outside. Accordingly, it is possible to avoid a significant temperature increase in the portion where the clamp device is attached. Therefore, even if a pipe that circulates a relatively high temperature gas is connected via an O-ring, if the clamp device is attached to a portion where the O-ring is used, the O-ring will deteriorate due to heat. It is avoided and the frequency of work for exchanging the O-ring can be reduced. Here, if the first and second communication pipes to which the ends of the communication tube are connected are provided in the first and second cooling water jackets in the vicinity of the other ends of the first and second clamp pieces, the communication tube is removed. The first and second clamp pieces can be rotated relatively freely without any problem.
[Brief description of the drawings]
1 is a cross-sectional view taken along line AA of FIG. 2 showing a clamping device of the present invention.
FIG. 2 is a perspective view of the apparatus.
3 is a cross-sectional view taken along line BB in FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Clamp apparatus 11 1st clamp piece 12 2nd clamp piece 12a Seat plate 13 Male screw 14 Nut 21 1st cooling water jacket 21c 1st cooling water space 22 2nd cooling water jacket 22c 2nd cooling water space 23 1st supply / exhaust pipe 24 1st communication pipe 26 2nd supply / exhaust pipe 27 2nd communication pipe 28 Communication tube

Claims (2)

A first clamp piece (11) whose base end of the male screw (13) is pivotally supported at one end and a seat plate (12a) of a nut (14) screwed to the male screw (13) are integrally formed at one end. A second clamp piece (12) having the other end pivotally supported at the other end of the first clamp piece (11), and the first and second clamp pieces (11, 12) are drawn in a circular shape in an overlapping state; In the clamping device formed to be curved semicircularly outward from each other,
A first cooling water space (21c) is formed between the first clamp piece (11) and the first clamp piece (11) so as to cover an outer surface of the first clamp piece (11). Cooling water jacket (21),
A second cooling water space (22c) is formed between the second clamp piece (12) and the second clamp piece (12) so as to cover the outer surface of the second clamp piece (12). Cooling water jacket (22),
A flexible communication tube (28) for communicating the first cooling water space (21c) and the second cooling water space (22c);
The cooling water supplied to the first or second cooling water space (21c, 22c) moves to the second or first cooling water space (22c, 21c) via the communication tube (28), and goes outside. A clamping device characterized in that it can be discharged. The first cooling water jacket (21) in the vicinity of one end of the first clamp piece (11) is provided with a first supply / discharge pipe (23), and the first cooling water jacket (in the vicinity of the other end of the first clamp piece (11) ( 21) is provided with the first communication pipe (24), the second cooling water jacket (22) near the other end of the second clamp piece (12) is provided with the second communication pipe (27), and the second clamp piece The second cooling water jacket (22) near one end of (12) is provided with a second supply / discharge pipe (26), and one end of the communication tube (28) is connected to the first communication pipe (24). The clamping device according to claim 1, wherein the other end of (28) is connected to the second communication pipe (27).

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