JP4168154B2 - SiO2 recovery equipment and method of recovering SiO2 - Google Patents

SiO2 recovery equipment and method of recovering SiO2 Download PDF

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JP4168154B2
JP4168154B2 JP05979098A JP5979098A JP4168154B2 JP 4168154 B2 JP4168154 B2 JP 4168154B2 JP 05979098 A JP05979098 A JP 05979098A JP 5979098 A JP5979098 A JP 5979098A JP 4168154 B2 JP4168154 B2 JP 4168154B2
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JPH11253725A (en
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英明 岩崎
和成 檜山
誠 鮫島
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THE FURUKAW ELECTRIC CO., LTD.
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Description

【０００１】
【発明の属する技術分野】
本発明はＳｉＯ2 を含有するガスからＳｉＯ2 を効率的に回収する設備及びそのＳｉＯ2 を効率的に回収する方法に関し、特に、光ファイバー用ガラス合成設備等から排出されるＳｉＯ2 含有ガスから小粒径ＳｉＯ2 を効率的に回収する設備及びそのＳｉＯ2 を効率的に回収する方法に関する。
【０００２】
【従来の技術および発明が解決しようとする課題】
光ファイバー用ガラス合成設備の排ガスには、ＳｉＯ2 の他にＨＣｌやＣｌ2 などの有害物質が含まれているため、光ファイバー用ガラス合成設備には、排ガスから有害物質を取り除く排ガス処理装置が付設されている。
【０００３】
そこで、この有害物質の除去率を高めるために、排ガス処理装置の中に添加剤注入式バグフィルターを組み込んだ設備が提案されている。添加剤注入式バグフィルターとは、通常のバグフィルターに導入される排ガスに添加剤を注入することにより、集塵効率および有害物質除去率を高めると共に、濾布からの集塵灰の払い落とし性を良くしたものである。
【０００４】
ところで、光ファイバー用ガラスを合成する場合、合成過程の初期と終期では原料ガスの成分が異なるため、排ガスに含まれる有害物質の濃度が変化するにもかかわらず、排ガスに常時一定量の添加剤を注入する方式では、以下のような欠点がある。すなわち、排ガス中の有害物質濃度に対して添加剤の注入量が少なすぎると、バグフィルターでの有害物質除去率が低下し、その後工程にある排ガス処理ユニットの負荷が増大したり、排ガス中の有害物質濃度が基準をオーバーしたりする恐れがある。また、排ガス中の有害物質濃度に対して添加剤の注入量が多すぎると、添加剤の使用量および集塵灰の排出量が多くなり、ランニングコストおよび産業廃棄物量の増大を招くことになる。
【０００５】
そこで、かかる欠点を除去するために、特開平７−２３６８０４号公報には、図２に示すように、「プリコート式バグフィルター１３と排ガス処理ユニット１４から構成される光ファイバ用ガラス合成設備１５の排ガス処理装置であって、プリコート式バグフィルター１３の入口で濃度検出器１６により排ガス中の有害物質濃度を検出し、検出濃度に応じたプリコート剤添加量を変換器１７で定め、速度制御装置１８でプリコート剤供給装置１９のモータ２０の回転速度を制御することによって排ガスへの消石灰等のプリコート剤添加量を調整し、バグフィルター２１によりプリコート剤を添加された排ガスからプリコート剤とともにＳｉＯ2 を含む有害物質を濾過して分離し、さらに、プリコート式バグフィルター１３を通過した排ガスを排ガス処理ユニット１４で処理する光ファイバ用ガラス合成設備の排ガス処理装置」が開示されている。しかし、同公報に記載されたようにプリコート剤の添加量を調整しても、プリコート剤を使用することに変わりなく、ランニングコストの増大を招く。また、バグフィルターによってガスから分離された物質からＳｉＯ2 のみを分離して回収するのは極めて困難である。
【０００６】
また、一般にバグフィルターで粒径の小さいダストを濾過する場合、濾布に目詰まりを生じないように、特殊なコーティングを施した濾布を用いたり、濾布の交換を頻繁に行ったり、濾過速度を下げたりしなければならないという不都合な点がある。ところが、濾過速度を低下すれば、設備の大型化を招くことになる。さらに、排ガスを処理する設備として乾式電気集塵機を用いた場合、ＳｉＯ2 は見掛け電気固有抵抗値が高く、電気集塵機による回収が困難であるから、ＳｉＯ2 およびＨＣｌ、Ｃｌ2 などを含むガスはＮａＯＨで中和され、ＳｉＯ2 は塩化物とともに産業廃棄物として処理されている。
【０００７】
ところで、小粒径ＳｉＯ2 は塗料用増粘剤、接着剤用改質剤、つや消剤など、増粘性やつや消性などの優れた機能を利用して産業上の各分野において種々の用途に使用されており、経済上の価値は極めて高いにもかかわらず、上記したようにＳｉＯ2 を含有するガスから小粒径ＳｉＯ2 を効率的に回収するためのバグフィルターを用いた濾過設備は提供されていない。
【０００８】
本発明は従来の技術の有するこのような問題点に鑑みてなされたものであって、その目的は、ＳｉＯ2 を含有するガスから小粒径ＳｉＯ2 を効率的に回収することができるＳｉＯ2 回収設備及びそのＳｉＯ2 の回収方法を提供することにある。
【０００９】
【課題を解決するための手段】
上記目的を達成するために本発明は、ＳｉＯ2 含有ガスに大粒径のＳｉＯ2 を添加してバグフィルターに導入することにより、大粒径ＳｉＯ2 で阻止されて小粒径ＳｉＯ2 によるバグフィルターの濾布の目詰まりは防止され、ＳｉＯ2 含有ガスからＳｉＯ2 は効率的に濾過分離される。そして、そのＳｉＯ2 を粒径により分級して小粒径ＳｉＯ2 を回収し、分級後の大粒径ＳｉＯ2 をバグフィルター導入前のガスに添加することにより、小粒径ＳｉＯ2 を有価物として回収し、また、大粒径ＳｉＯ2 は再利用して何度でも使用しうるという極めて効率的なＳｉＯ2 回収設備及びそのＳｉＯ2 の回収方法を提供しうるのである。
【００１０】
【発明の実施の形態】
すなわち、本発明は、ＳｉＯ2含有ガスをバグフィルターで濾過してＳｉＯ2を回収する設備であって、ＳｉＯ2含有ガスをバグフィルターに導入するガス導入管路に大粒径ＳｉＯ2を貯留するＳｉＯ2貯槽を接続し、上記バグフィルターから分級機を経てＳｉＯ2貯槽に至る返送経路を設け、上記ＳｉＯ2貯槽からガス導入管路内のＳｉＯ2含有ガスに大粒径ＳｉＯ2を添加し、バグフィルターで濾過分離されたＳｉＯ2を分級機で分級して小粒径ＳｉＯ2を回収することを特徴とするＳｉＯ2回収設備を第一の発明とし、
上記第一の発明において、分級機で分級後の大粒径ＳｉＯ2を返送経路を経てＳｉＯ2貯槽に戻すことを特徴とするＳｉＯ2回収設備を第二の発明とし、
上記第一または第二の発明において、大粒径ＳｉＯ2の平均粒径が約５〜５０μｍであって、小粒径ＳｉＯ2の粒径範囲が０．１〜５μｍであって、大粒径ＳｉＯ2の添加量が処理ガスのＳｉＯ2持ち込み量の５〜２０倍であるＳｉＯ2回収設備を第三の発明とし、
ＳｉＯ 2 含有ガスに大粒径ＳｉＯ 2 を添加してバグフィルターで濾過分離し、濾過分離後のＳｉＯ 2 を分級機で分級して小粒径ＳｉＯ 2 を回収する方法において、分級機で分級後の大粒径ＳｉＯ 2 を繰り返し使用することを特徴とするＳｉＯ 2 回収方法を第四の発明とし、
上記第四の発明において、大粒径ＳｉＯ2の平均粒径が約５〜５０μｍであって、小粒径ＳｉＯ2の粒径範囲が０．１〜５μｍであって、大粒径ＳｉＯ2の添加量が処理ガスのＳｉＯ2持ち込み量の５〜２０倍であるＳｉＯ2回収方法を第五の発明とする。
【００１１】
以上のように構成される本発明によれば、大粒径ＳｉＯ2 を貯留するＳｉＯ2 貯槽からＳｉＯ2 含有ガスの導入管路内のガスに大粒径ＳｉＯ2 を添加し、このガスをバグフィルターに導入することにより、バグフィルターの濾布は大粒径ＳｉＯ2 で阻止されて小粒径ＳｉＯ2 によって目詰まりすることはなく、大粒径ＳｉＯ2 と小粒径ＳｉＯ2 はともに濾過分離され、ＳｉＯ2 を分離された後の高濃度のＨＣｌは物理吸収塔で塩酸として回収し、その後ＨＣｌやＣｌ2 などの有害物質を含むガスは吸収塔などの排ガス処理装置において適切な中和剤を用いて中和処理される。そして、ガスから分離したＳｉＯ2 を粒径により分級して小粒径ＳｉＯ2 を回収し、各種産業上の用途に利用することができる。また、分級後の大粒径ＳｉＯ2 はＳｉＯ2 貯槽に戻すことにより、再利用することができる。このように、本発明によれば小粒径ＳｉＯ2 を有価物として回収し、大粒径ＳｉＯ2 を再利用するという極めて効率的なＳｉＯ2 回収設備及びそのＳｉＯ2 の回収方法を提供することができる。
【００１２】
有価物として回収する小粒径ＳｉＯ2 の粒径は０．１〜５μｍの範囲であり、この小粒径ＳｉＯ2 による濾布の目詰まりを防ぐために大粒径ＳｉＯ2 の粒径は大きい方が好ましい。しかし、あまり大きい粒径のＳｉＯ2 は濾布に付着しにくくなる。さらに入手が容易な粒径であることが好ましい。このような理由で大粒径ＳｉＯ2 の平均粒径としては約５〜５０μｍであるのが好ましい。
【００１３】
また、大粒径ＳｉＯ2 の添加量は処理ガスのＳｉＯ2 持ち込み量の５〜２０倍であるのが好ましい。というのは、小粒径ＳｉＯ2 の５倍未満では目詰まり抑制効果が期待できず、一方、小粒径ＳｉＯ2 の２０倍超添加しても目詰まり抑制効果が大きくならないばかりか、集塵負荷が上昇するため、濾過速度を低下しなければ濾過できなくなるからである。
【００１４】
【実施例】
以下、図面を参照しながら本発明の実施例を説明する。図１において、１はバグフィルター、２は大粒径ＳｉＯ2 の貯槽であり、ＳｉＯ2 貯槽２はバグフィルター１にＳｉＯ2 含有ガスを導入するガス導入管路３に対して経路４で接続されている。バグフィルター１で濾過分離されたＳｉＯ2 は分級機５において、０．１〜５μｍの小粒径ＳｉＯ2 と５〜５０μｍの大粒径ＳｉＯ2 に分級され、小粒径ＳｉＯ2 は有価物として回収され、大粒径ＳｉＯ2 は返送経路６を経てＳｉＯ2 貯槽２に戻される。ＳｉＯ2 を分離された後のガスは径路７を経てＨＣｌ回収塔８に送られ、ＨＣｌ回収塔８の下部水槽９内の水を循環ポンプ１０により循環させ、ＨＣｌ回収塔８頂部のファン１１で吸引されて塔内を上昇するガスと循環水を接触させることによりガス中の塩化水素ガスを塩酸（ＨＣｌ）として回収する。塩化水素分を除去されたガスはＨＣｌ回収塔８の頂部から排出され、必要に応じて排ガス中のＣｌ2 分はＮａＯＨにより中和処理される。
【００１５】
以上のように構成されるＳｉＯ2 回収設備を用いて、ダスト分としてＳｉＯ2 を含み、有害物質としてＨＣｌとＣｌ2 を含むガスの処理を行ったので、次に説明する。
【００１６】
処理ガスの温度は約７０℃で、処理ガス量は１０ｍ3/min.であり、ＳｉＯ2 濃度は５００〜５２０ｍｇ／Ｎｍ3 で、ＨＣｌ濃度は１８００〜２２００ｍｇ／Ｎｍ3 で、Ｃｌ2 濃度は３８〜３９ｍｇ／Ｎｍ3 であった。この組成のガスに、粒径分布５〜５０μｍのＳｉＯ2 を３ｋｇ／ｈｒ添加して図１に示すバグフィルター１に０．５〜１．２ｍ/min. の濾過速度で通入することにより、以下のような結果を得た。処理ガスのＳｉＯ2 持ち込み量は約０．３ｋｇ／ｈｒであるから、この場合、処理ガスのＳｉＯ2 持ち込み量に対する大粒径ＳｉＯ2 の添加量は１０倍である。
【００１７】
以上の組成のガスをバグフィルター１で濾過分離して得たＳｉＯ2 を分級機５で分級して、粒径分布０．１〜５μｍの小粒径ＳｉＯ2 を約０．３ｋｇ／ｈｒ回収し、粒径分布５〜５０μｍの大粒径ＳｉＯ2 を約３ｋｇ／ｈｒ得、この大粒径ＳｉＯ2 をＳｉＯ2 貯槽２に戻して再利用した。その結果、バグフィルター１から排出されるガス中のＳｉＯ2 濃度は０．３〜０．６ｍｇ／Ｎｍ3 となった。また、ＳｉＯ2 を分離された後のガスはＨＣｌ回収塔８に送られて、濃度１０％のＨＣｌを回収した。ＨＣｌ回収塔８から排出されるガス中のＨＣｌ濃度は１５０〜２２０ｍｇ／ｍ3 であったので、ＨＣｌ除去率は９０％以上であった。また、ＨＣｌ回収塔８から排出されるガス中のＣｌ2 濃度は３４〜３９ｍｇ／ｍ3 であり、このＣｌ2 はＮａＯＨにより中和処理した。以上の排ガス処理後にバグフィルター１を点検したが、濾布１２に目詰まりは見られなかった。
【００１８】
【発明の効果】
本発明は上記のように構成されているので、以下の効果を奏する。
【００１９】
（１）請求項１記載の発明によれば、濾布に特殊なコーティングを施すことなく、濾布を頻繁に交換することなく、濾過速度を低下させることもなく、ＳｉＯ2含有ガスから小粒径のＳｉＯ2を高効率で回収することができる。
【００２０】
（２）請求項２または４記載の発明によれば、従来技術の添加剤に相当する大粒径ＳｉＯ2を繰り返し使用することができるので、ランニングコストの大幅な低減ならびに設備の低コスト化とコンパクトが可能になる。
【００２１】
（３）請求項３または５記載の発明によれば、より経済的で効率的なＳｉＯ2回収設備及びそのＳｉＯ2の回収方法を提供することができる。
【図面の簡単な説明】
【図１】本発明のＳｉＯ2 回収設備の概略構成を示す図である。
【図２】光ファイバ用ガラス合成設備の従来の排ガス処理装置の概略構成を示す図である。
【符号の説明】
１…バグフィルター
２…ＳｉＯ2 貯槽
３…ガス導入管路
５…分級機
６…返送経路
８…ＨＣｌ回収塔[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a process for the recovery of equipment and its SiO 2 recovering SiO 2 efficiently from the gas containing SiO 2 efficiently, in particular, the small of SiO 2 containing gas discharged from the optical fiber glass synthesis facilities The present invention relates to a facility for efficiently recovering the particle size SiO 2 and a method for efficiently recovering the SiO 2 .
[0002]
[Background Art and Problems to be Solved by the Invention]
Since the exhaust gas from the fiber optic glass synthesis equipment contains toxic substances such as HCl and Cl 2 in addition to SiO 2 , the fiber optic glass synthesis equipment is equipped with an exhaust gas treatment device that removes toxic substances from the exhaust gas. ing.
[0003]
Therefore, in order to increase the removal rate of this harmful substance, a facility in which an additive-injection type bag filter is incorporated in an exhaust gas treatment apparatus has been proposed. Additive-injection-type bag filter improves the dust collection efficiency and harmful substance removal rate by injecting the additive into the exhaust gas introduced into a normal bag filter, and removes dust collection ash from the filter cloth. It is what improved.
[0004]
By the way, when synthesizing glass for optical fibers, the composition of the raw material gas is different between the initial and final stages of the synthesis process, so a constant amount of additive is always added to the exhaust gas even though the concentration of harmful substances contained in the exhaust gas changes. The injection method has the following drawbacks. That is, if the amount of additive injected is too small relative to the concentration of harmful substances in the exhaust gas, the harmful substance removal rate in the bag filter will decrease, the load on the exhaust gas treatment unit in the subsequent process will increase, Hazardous substance concentrations may exceed standards. In addition, if the amount of additive injected is too large relative to the concentration of harmful substances in the exhaust gas, the amount of additive used and the amount of dust ash discharged will increase, leading to an increase in running costs and industrial waste. .
[0005]
Therefore, in order to eliminate such drawbacks, as disclosed in Japanese Patent Laid-Open No. 7-236804, as shown in FIG. 2, “the optical fiber glass synthesis facility 15 composed of the precoat bag filter 13 and the exhaust gas treatment unit 14 is provided. It is an exhaust gas treatment device, wherein the concentration detector 16 detects the concentration of harmful substances in the exhaust gas at the entrance of the precoat bag filter 13, the precoat agent addition amount corresponding to the detected concentration is determined by the converter 17, and the speed control device 18. The amount of precoat agent such as slaked lime added to the exhaust gas is adjusted by controlling the rotation speed of the motor 20 of the precoat agent supply device 19, and SiO 2 is contained together with the precoat agent from the exhaust gas to which the precoat agent is added by the bag filter 21. The harmful substances are filtered and separated, and further, the exhaust gas that has passed through the pre-coated bag filter 13 is removed. Exhaust gas treatment apparatus for a glass synthesis equipment for optical fiber to be processed by the gas treatment unit 14 'is disclosed. However, even if the addition amount of the precoat agent is adjusted as described in the publication, the use of the precoat agent is still used, and the running cost is increased. Further, it is extremely difficult to separate and recover only SiO 2 from the substance separated from the gas by the bag filter.
[0006]
In general, when dust with a small particle size is filtered with a bag filter, a filter cloth with a special coating is used so that the filter cloth is not clogged. There is an inconvenience that the speed must be reduced. However, if the filtration rate is reduced, the equipment is increased in size. Further, when a dry electrostatic precipitator is used as an equipment for treating exhaust gas, SiO 2 has a high apparent electric resistivity and is difficult to recover by the electric precipitator. Therefore, gas containing SiO 2, HCl, Cl 2, etc. is NaOH. The SiO 2 is treated as industrial waste together with chloride.
[0007]
By the way, small particle size SiO 2 uses various functions in various industrial fields by utilizing excellent functions such as thickening and delustering properties such as thickeners for coatings, modifiers for adhesives, and delustering agents. Although the economic value is extremely high, the filtration equipment using the bag filter for efficiently recovering the small particle size SiO 2 from the gas containing SiO 2 is used as described above. Not provided.
[0008]
The present invention was made in view of such problems of the prior art, and an object, SiO 2, which can be recovered from gas containing SiO 2 small particle diameter SiO 2 efficiently An object of the present invention is to provide a recovery facility and a method for recovering the SiO 2 .
[0009]
[Means for Solving the Problems]
To accomplish the above object, by introducing the bag filter by the addition of SiO 2 having a large particle size in the SiO 2 containing gas, bugs by small particle size SiO 2 is blocked by the large grain SiO 2 Clogging of the filter cloth of the filter is prevented, and SiO 2 is efficiently filtered and separated from the SiO 2 -containing gas. Then, the SiO 2 is classified by the particle size to collect the small particle size SiO 2, and the large particle size SiO 2 after the classification is added to the gas before the introduction of the bag filter, whereby the small particle size SiO 2 is converted into a valuable material. In addition, it is possible to provide an extremely efficient SiO 2 recovery facility and a method for recovering the SiO 2 in which the large particle diameter SiO 2 can be reused and reused any number of times.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
That is, the present invention provides a facility for recovering SiO 2 was filtered SiO 2 containing gas in a bag filter, for storing the large grain SiO 2 to the gas inlet pipe for introducing the SiO 2 containing gas in a bag filter connect the SiO 2 storage tank, the return path to the SiO 2 reservoir is provided through the classifier from the bag filter, the addition of large particle size SiO 2 in SiO 2 containing gas in the gas inlet conduit from the SiO 2 storage tank, the SiO 2 recovery facility the SiO 2 which is filtered off in the bag filter and classified by a classifier, and recovering the small particle size SiO 2 as the first invention,
In the first invention, the SiO 2 recovery equipment characterized by returning the large particle size SiO 2 after classification by the classifier to the SiO 2 storage tank through the return path is the second invention,
In the first or second invention, the average particle size of the large particle size SiO 2 is about 5 to 50 μm, the particle size range of the small particle size SiO 2 is 0.1 to 5 μm, and the large particle size the SiO 2 recovery facility amount of SiO 2 is from 5 to 20 times the SiO 2 amount carried process gas and the third invention,
In a method in which SiO 2 containing gas is added to a large particle size SiO 2 and filtered and separated with a bag filter, and the SiO 2 after filtration and separation is classified with a classifier to recover small particle size SiO 2 , after classification with a classifier The SiO 2 recovery method characterized by repeatedly using the large particle size SiO 2 is a fourth invention,
In the fourth invention, the average particle size of the large particle size SiO 2 is about 5 to 50 μm, the particle size range of the small particle size SiO 2 is 0.1 to 5 μm, and the large particle size SiO 2 A fifth aspect of the present invention is a SiO 2 recovery method in which the amount added is 5 to 20 times the amount of SiO 2 brought into the processing gas.
[0011]
According to the present invention constructed as described above, was added a large particle size SiO 2 of SiO 2 tank for storing a large grain SiO 2 in the gas inlet conduit of SiO 2 containing gas, bugs this gas by introducing the filter, filter cloth bag filter is not able to clogging by small diameter SiO 2 is blocked by the large diameter SiO 2, large size SiO 2 and small diameter SiO 2 are both filtered off The high-concentration HCl after the separation of SiO 2 is recovered as hydrochloric acid in a physical absorption tower, and then a gas containing harmful substances such as HCl and Cl 2 is used in an exhaust gas treatment apparatus such as an absorption tower. Is used for neutralization treatment. Then, the SiO 2 separated from the gas is classified by the particle size to recover the small particle size SiO 2 and can be used for various industrial applications. Moreover, the large particle size SiO 2 after classification can be reused by returning it to the SiO 2 storage tank. Thus, the small particle diameter SiO 2 according to the present invention is recovered as a valuable resource, it provides a very efficient SiO 2 recovery facility and recovery method of the SiO 2 that reuse the large grain SiO 2 Can do.
[0012]
The particle size of the small particle size SiO 2 recovered as a valuable material is in the range of 0.1 to 5 μm, and the larger particle size of the large particle size SiO 2 is to prevent clogging of the filter cloth by the small particle size SiO 2. Is preferred. However, SiO 2 having a very large particle size is difficult to adhere to the filter cloth. Furthermore, it is preferable that the particle diameter is easily available. For this reason, the average particle size of the large particle size SiO 2 is preferably about 5 to 50 μm.
[0013]
Also, preferably the addition amount of the large diameter SiO 2 is from 5 to 20 times the SiO 2 amount carried process gas. Since, can not be expected clogging suppression effect is less than five times the particle diameter SiO 2, whereas, not only does not increase the clogging suppression effect even when 20 times super addition having a small particle diameter SiO 2, the dust collecting This is because the load increases, and filtration cannot be performed unless the filtration rate is reduced.
[0014]
【Example】
Embodiments of the present invention will be described below with reference to the drawings. In FIG. 1, 1 is a bag filter, 2 is a storage tank of large particle size SiO 2 , and the SiO 2 storage tank 2 is connected by a path 4 to a gas introduction line 3 for introducing a SiO 2 -containing gas into the bag filter 1. ing. In SiO 2 is classifier 5 with a bag filter 1 is filtered off, the small particle size SiO 2 and 5~50μm large grain SiO 2 binary class 0.1 to 5 [mu] m, small particle size SiO 2 as valuables The large particle size SiO 2 is collected and returned to the SiO 2 storage tank 2 through the return path 6. The gas after the separation of SiO 2 is sent to the HCl recovery tower 8 via the path 7, and the water in the lower water tank 9 of the HCl recovery tower 8 is circulated by the circulation pump 10, and the fan 11 at the top of the HCl recovery tower 8 is used. By bringing the gas that is sucked up into the tower into contact with the circulating water, the hydrogen chloride gas in the gas is recovered as hydrochloric acid (HCl). The gas from which the hydrogen chloride content has been removed is discharged from the top of the HCl recovery tower 8, and the Cl 2 content in the exhaust gas is neutralized with NaOH as necessary.
[0015]
The SiO 2 recovery equipment configured as described above was used to treat a gas containing SiO 2 as a dust component and HCl and Cl 2 as harmful substances.
[0016]
The temperature of the processing gas is about 70 ° C., the processing gas amount is 10 m 3 / min., The SiO 2 concentration is 500 to 520 mg / Nm 3 , the HCl concentration is 1800 to 2200 mg / Nm 3 , and the Cl 2 concentration is 38. was ~39mg / Nm 3. By adding 3 kg / hr of SiO 2 having a particle size distribution of 5 to 50 μm to the gas having this composition and passing it through the bag filter 1 shown in FIG. 1 at a filtration rate of 0.5 to 1.2 m / min. The following results were obtained. Since the amount of SiO 2 brought into the processing gas is about 0.3 kg / hr, in this case, the addition amount of the large particle size SiO 2 is 10 times the amount of SiO 2 brought into the processing gas.
[0017]
The SiO 2 obtained by filtering and separating the gas having the above composition with the bag filter 1 is classified with the classifier 5, and a small particle size SiO 2 having a particle size distribution of 0.1 to 5 μm is recovered at about 0.3 kg / hr. , about 3 kg / hr to obtain a large grain size of SiO 2 particle size distribution 5 to 50 [mu] m, was recycled back to the large grain size SiO 2 in SiO 2 tank 2. As a result, the SiO 2 concentration in the gas discharged from the bag filter 1 was 0.3 to 0.6 mg / Nm 3 . Further, the gas after separating SiO 2 was sent to the HCl recovery tower 8 to recover HCl with a concentration of 10%. Since the HCl concentration in the gas discharged from the HCl recovery tower 8 was 150 to 220 mg / m 3 , the HCl removal rate was 90% or more. The Cl 2 concentration in the gas discharged from the HCl recovery tower 8 was 34 to 39 mg / m 3 , and this Cl 2 was neutralized with NaOH. The bag filter 1 was inspected after the above exhaust gas treatment, but the filter cloth 12 was not clogged.
[0018]
【The invention's effect】
Since this invention is comprised as mentioned above, there exist the following effects.
[0019]
(1) According to the invention described in claim 1 , the filter cloth is not coated with a special coating, the filter cloth is not changed frequently, the filtration speed is not lowered, and the small particles from the SiO 2 -containing gas are obtained. The diameter SiO 2 can be recovered with high efficiency.
[0020]
(2) According to the invention described in claim 2 or 4, since the large particle size SiO 2 corresponding to the additive of the prior art can be used repeatedly, the running cost can be greatly reduced and the equipment cost can be reduced. Compactness is possible.
[0021]
(3) According to the invention described in claim 3 or 5 , a more economical and efficient SiO 2 recovery facility and a method of recovering the SiO 2 can be provided.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a SiO 2 recovery facility of the present invention.
FIG. 2 is a diagram showing a schematic configuration of a conventional exhaust gas treatment apparatus of an optical fiber glass synthesis facility.
[Explanation of symbols]
1 ... baghouse 2 ... SiO 2 storage tank 3 ... gas inlet pipe 5 ... classifier 6 ... return path 8 ... HCl recovery column

Claims (5)

ＳｉＯ2含有ガスをバグフィルターで濾過してＳｉＯ2を回収する設備であって、ＳｉＯ2含有ガスをバグフィルターに導入するガス導入管路に大粒径ＳｉＯ2を貯留するＳｉＯ2貯槽を接続し、上記バグフィルターから分級機を経てＳｉＯ2貯槽に至る返送経路を設け、上記ＳｉＯ2貯槽からガス導入管路内のＳｉＯ2含有ガスに大粒径ＳｉＯ2を添加し、バグフィルターで濾過分離されたＳｉＯ2を分級機で分級して小粒径ＳｉＯ2を回収することを特徴とするＳｉＯ2回収設備。A facility for recovering SiO 2 was filtered SiO 2 containing gas in a bag filter, connecting the SiO 2 tank for storing a large grain SiO 2 to the gas inlet pipe for introducing the SiO 2 containing gas in a bag filter A return path is provided from the bag filter to the SiO 2 storage tank through the classifier, and large particle size SiO 2 is added from the SiO 2 storage tank to the SiO 2 -containing gas in the gas introduction pipe and filtered and separated by the bag filter. the SiO 2 was classified with a classifier SiO 2 recovery facility and recovering the small particle size SiO 2 was. 分級機で分級後の大粒径ＳｉＯ2を返送経路を経てＳｉＯ2貯槽に戻すことを特徴とする請求項１記載のＳｉＯ2回収設備。 2. The SiO 2 recovery facility according to claim 1, wherein the large particle size SiO 2 after classification by the classifier is returned to the SiO 2 storage tank through a return path. 大粒径ＳｉＯ2の平均粒径が約５〜５０μｍであって、小粒径ＳｉＯ2の粒径範囲が０．１〜５μｍであって、大粒径ＳｉＯ2の添加量が処理ガスのＳｉＯ2持ち込み量の５〜２０倍である請求項１または２記載のＳｉＯ2回収設備。The average particle size of the large particle size SiO 2 is about 5 to 50 μm, the particle size range of the small particle size SiO 2 is 0.1 to 5 μm, and the addition amount of the large particle size SiO 2 is SiO 2 as the processing gas. 5-20 times the 2 amount carried claim 1 or 2 SiO 2 recovery facility according. ＳｉＯ 2 含有ガスに大粒径ＳｉＯ 2 を添加してバグフィルターで濾過分離し、濾過分離後のＳｉＯ 2 を分級機で分級して小粒径ＳｉＯ 2 を回収する方法において、分級機で分級後の大粒径ＳｉＯ 2 を繰り返し使用することを特徴とするＳｉＯ 2 回収方法。 In a method in which SiO 2 containing large particle size SiO 2 is added to a SiO 2 -containing gas , filtered and separated with a bag filter, and SiO 2 after filtration and separation is classified with a classifier to recover small particle size SiO 2 , after classification with a classifier A method for recovering SiO 2 characterized by repeatedly using a large particle size SiO 2 . 大粒径ＳｉＯ2の平均粒径が約５〜５０μｍであって、小粒径ＳｉＯ2の粒径範囲が０．１〜５μｍであって、大粒径ＳｉＯ2の添加量が処理ガスのＳｉＯ2持ち込み量の５〜２０倍である請求項４記載のＳｉＯ2回収方法。The average particle size of the large particle size SiO 2 is about 5 to 50 μm, the particle size range of the small particle size SiO 2 is 0.1 to 5 μm, and the addition amount of the large particle size SiO 2 is SiO 2 as the processing gas. 5-20 times the 2 amount carried claim 4 SiO 2 recovery method according.
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