JP4140557B2 - Laser light emitting device. - Google Patents

Description

  The present invention is arranged so as to face a laser array in which a plurality of semiconductor lasers that emit laser light traveling while diffusing in a slow axis direction and a fast axis direction orthogonal to each other are arranged in parallel, and a light emitting portion of the laser array. The present invention relates to a laser light emitting device including an optical path device that allows laser light emitted from the semiconductor laser to pass therethrough.

  Conventionally, as this type of laser light emitting device, a laser bar is formed by linearly arranging the light emitting part of a semiconductor laser that emits laser light in the slow axis direction, and a laser stack is formed by laminating this laser bar in the first axis direction Then, a laser beam diffused in the slow axis direction and the fast axis direction irradiated from the light emitting portion of each semiconductor laser constituting the laser stack is collimated by arranging a lens in front of the laser stack, and then incident on the optical fiber. Such a device is known.

Examples of the laser light emitting device configured as described above include a device described in Patent Document 1. As shown in FIG. 6, the laser light emitting device described in Patent Document 1 is irradiated from the light emitting portion 14 of each semiconductor laser constituting the laser stack 10, and is in the slow axis (x axis) direction and the fast axis (y axis). ) Laser light traveling in a direction at a predetermined divergence angle is condensed at once for each laser light of the light emitting section 14 arranged in the fast axis direction by the plate lens 11a, and these plate lenses 11a are moved in the slow axis (x-axis) direction. The composite lens 11 formed side by side can efficiently condense the laser beam at a position close to the light emitting portion 14 of the laser stack 10 and can be downsized.
JP 2004-29570 A (paragraph number [0017] to paragraph number [0023], FIGS. 1 and 2)

  By the way, even when the compound lens 11 as described in Patent Document 1 is manufactured, if the laser light emitted from the light emitting portion 14 of the laser stack 10 is not incident on the lens at a predetermined incident angle, it is efficiently collected. I can't shine. Further, the position adjustment of the laser stack 10 and the condenser lens needs to be adjusted in units of several μm. For this reason, conventionally, before the laser stack and the compound lens 11 are actually assembled as a laser light emitting device, the positional relationship between the two is adjusted using an electron microscope or a photometer (power meter), and an adhesive or the like is used. Assembly was performed after fixing the positional relationship in an invariable state.

  However, when fixing using an adhesive in this way, once it is fixed, it cannot be readjusted. For this reason, there is a problem that it cannot be readjusted if an error occurs due to secular change or the like. there were. In addition, the position must be adjusted in advance at a different location before assembly, and there is a problem that complicates the assembly process.

  The present invention has been made to solve the above-described problems, and enables adjustment of the positional relationship between a laser array and an optical path device such as a condenser lens or an optical waveguide that allows laser light to pass therethrough. For the purpose.

In order to solve the above problems, the structural feature of the invention according to claim 1 is that the light emitting portions of a plurality of semiconductor lasers that emit laser light that travels while diffusing in the slow axis direction and the fast axis direction orthogonal to each other A laser light emitting device comprising: a laser array arranged in parallel; and an optical path device arranged to face a light emitting portion of the laser array and allowing laser light emitted from the semiconductor laser to pass therethrough, wherein the laser array or the optical path device A base for fixing any one of the above, a holding member for holding either the laser array or the optical path device, and one side support for supporting the holding member at two positions spaced apart and aligned in the laser traveling direction Means, and other side support means for supporting the holding member at at least one place on the other side spaced apart from the one side in the slow axis direction, and the one side support means Wherein a respective each one laser traveling direction spaced one side two places the stiffness to the force in the first axis direction, a pair of one side lever member which is elastically deformable connecting the laser traveling direction of the force A pair of one side displacement devices for displacing the other end of each one side lever member in the fast axis direction and displacing the one end by a lever action in the first axis direction, and the other side support means One end is rigid to the force in the first axial direction, and the other side lever member connected to be elastically deformable to the force in the laser traveling direction and the other end of the other side lever member are displaced in the first axis direction And the other side displacement device for reducing and displacing the one end in the first axial direction by lever action.

The structural feature of the invention described in claim 2 is that, in claim 1, the one side support means is a one side support member extending in the laser traveling direction, and each end of the one side support member. The other side support means is connected to each end of the pair of one side lever members by an elastic deformation portion that has rigidity in the force in the first axial direction and elastically deforms in the force in the laser traveling direction. Is the other side support member extending in the laser traveling direction, and one end portion of the other side support member is rigid to the first axial force at one end of the other side lever member , and the laser traveling direction This force is elastically connected by an elastically deforming portion that is elastically deformed .

The structural feature of the invention described in claim 3 is that, in claim 2, the pair of one side lever members are aligned with the one side support member and extend in the laser traveling direction. One side lever member and one end of each reinforcing member extending in parallel with the one side lever member are rigid to the force in the first axial direction and elastic to the force in the laser traveling direction. deformably connected, said has a second end portion and the stiffness to the force of the respective fast axis direction at both end portions of the other end of the connecting member of each one side lever member of the reinforcing member, the laser traveling direction force Are connected in an elastically deformable manner to form a pair of one side parallel link mechanisms, and the other side lever member extends in the laser traveling direction in alignment with the other side support member. the one end of the side lever member and said other side lever member and extending parallel to reinforcing member to the base Rigid to Asuto axial force, the force of the laser traveling direction is connected to be elastically deformable, at both ends of the other end of the connecting member of the other end portion and the other side lever member of said reinforcing member Each of the forces in the first axial direction has rigidity, and the force in the laser traveling direction is connected to be elastically deformable to form the other side parallel link mechanism.

  According to a fourth aspect of the present invention, there is provided a structural feature of the third aspect, comprising: one side and another side plate disposed on both sides of the laser array and the optical path device and fixed to the base; The side plate is cut out to integrally form the one side support member, the pair of one side lever members, the pair of one side reinforcing members, and the elastic deformation portions, and the other side plate is cut out. The other side support member, the other side lever member, the other side reinforcement member, and each elastic deformation portion are integrally formed.

  According to a fifth aspect of the present invention, there is provided a structural feature of any one of the first to fourth aspects, wherein one end of the pair of one side lever members is pressed against the pair of one side displacement devices. Side pressing force applying means is provided, and other side pressing force applying means for pressing one end of the other side lever member against the other side displacement device is provided.

  According to a sixth aspect of the present invention, in any one of the first to fourth aspects, the one side of the holding member is supported by the one side supporting member via a ball, and the holding member is The other side is supported by the other side support member via a ball so as to be floatable.

  In the invention according to claim 1 configured as described above, the displacement amount in the one side displacement device and the other side displacement device is reduced and supported by the lever action of the one side lever member and the other side lever member. Since the laser array or the optical path device is moved in the first direction by transmitting to the member, the position can be precisely adjusted after the laser array or the optical path device is assembled, and readjustment can also be performed.

Further, the following adjustments (1) to (3) can be realized by combining and operating the three displacement devices of the pair of one side displacement device and the other side displacement device.
(1) The holding member can be translated in the fast axis direction.
(2) The pitching angle of the holding member can be adjusted.
(3) The rolling angle of the holding member can be adjusted.

  In the invention according to claim 2 configured as described above, the elastic deformation portion maintains rigidity in the fast axis direction and elastically deforms in the other laser traveling direction and slow axis direction. Deviations other than in the first axis direction due to the above are absorbed by the elastically deforming portion, and the operation of each portion can be made smooth.

  In the invention according to claim 3 configured as described above, the rigidity of each lever member is improved by the parallel link mechanism, the transmission of the displacement amount to each lever member by each displacement device becomes strict, and the accuracy of position adjustment Can be improved.

  In the invention according to claim 4 configured as described above, each member is integrally formed by cutting out one side plate and the other side plate, so that the rigidity of the entire apparatus is improved, Since it is assembled integrally, the assemblability is improved.

  In the invention according to claim 5 configured as described above, the one side pressing force applying means presses one end of the one side lever member against the one side displacement device, whereby the movement amount of the one side displacement device is increased. It is transmitted to the one side lever member without error. Similarly, when the other side pressing force applying means presses one end of the other side lever member against the other side displacement device, the movement amount of the other side displacement device is transmitted to the other side lever member without error. The As a result, the movement amounts of the one side displacement device and the other side displacement device are transmitted to the holding member without error, and the position adjustment of the laser array and the optical path device can be performed more strictly.

  In the invention according to claim 6 configured as described above, the ball rolls and allows sliding between the holding member and the one side support member and sliding between the holding member and the other side support member. Therefore, the movement of the holding member becomes smooth, and the accuracy of position adjustment can be improved.

  Embodiments of a semiconductor laser light emitting device according to the present invention will be described below with reference to the drawings. 1 is a plan view showing the light emitting device, FIG. 2 is a sectional view taken along line AA in FIG. 1, FIG. 3 is a sectional view taken along line BB in FIG. 1, and FIG. FIG. 5 and FIG. 5 are sectional views taken along the line DD of FIG. The semiconductor laser light emitting device includes a laser stack 10, a compound lens 11 that is an optical path device, and an optical fiber 12. In FIG. 1, the right direction and the upward direction toward the front surface (light emitting portion) where the compound lens 11 faces the laser stack 10 are a slow axis direction (x axis direction) and a fast axis direction (y axis direction), respectively. The laser traveling direction on the front side surface of the laser stack 10 is defined as the z-axis direction.

  Here, the configuration of the laser stack 10, the compound lens 11 which is an optical path device, and the optical fiber 12 will be described. As shown in FIG. 6, the laser stack 10 has a plurality of light emitting units 14, two-dimensionally arraying semiconductor lasers having a single light emitting unit 14, or a bar type having a plurality of light emitting units in a row. The semiconductor laser is composed of stacked semiconductor lasers stacked or arrayed or arranged two-dimensionally.

  A bar type semiconductor laser having a plurality of light emitting portions in a row in the slow axis direction or the fast axis direction and a stack type semiconductor laser in which bar type semiconductor lasers are stacked or arranged, or two-dimensionally arranged, are referred to as a laser array.

  In the present embodiment, a laser stack 10 is constructed by laminating twelve laser bars 10a having a plurality of light emitting portions (emitters) 14 arranged in parallel in the slow axis (x axis) direction in the first axis (y axis) direction. ing. The laser bar 10a has a plate shape with an outer dimension of 10 mm × 0.2 mm × 1 mm (x-axis direction × y-axis direction × z-axis direction), and 150 μm × 1 μm (x-axis) on the front surface facing the compound lens 11. A plurality of light emitting portions 14 formed in the direction x y-axis direction are provided in the x-axis direction at a pitch of 500 μm. The light emitting units 14 irradiate laser beams that diffuse with a predetermined divergence angle in the slow axis (x-axis) direction and the fast axis direction (y-axis direction), respectively.

  A compound lens 11 is disposed in front of the laser stack 10 so as to face the front surface of the light emitting unit 14. The compound lens 11 is configured by arranging a plurality of plate-like plate lenses 11a in parallel in the slow axis (x-axis) direction. In the present embodiment, a plate lens 11a having a thickness of 350 μm (x-axis direction) is arranged for each column in the first axis (y-axis) direction of the light emitting section 14 of the stacked laser bar 10a. The compound lens 11 converges the plurality of laser beams emitted from the light emitting units 14 in the first axis (y-axis) direction and enters the plurality of optical fibers 12 bonded to the plate lenses 11a. As shown in FIG. 3, each plate lens 11a is formed by forming a plurality of cylindrical lenses 15 on one side of a rectangle (shown by a triangle in FIG. 6).

Each plate lens 11a converges the laser light in the fast axis (y-axis) direction irradiated from the light emitting portion 14 of each laser array 10a and allows the laser light in the slow axis (x-axis) direction to pass through without leaking outside. To be incident on a plurality of optical fibers 12. That is, the laser light emitted from the light emitting portion 14 of the stacked laser bar 10a is converged only in the first axis (Y axis) direction, and is applied to each optical fiber 12 as laser light arranged in a line in the slow axis (x axis) direction. Incident.

  In order for laser light to be incident on the optical fiber 12 arranged in the slow axis (X-axis) direction without loss, it is necessary to cause the laser light irradiated from the light emitting unit 14 to be incident on the cylindrical lens 15. For this purpose, it is necessary to adjust the positional relationship between the laser stack 10 and the compound lens 11. Hereinafter, a mechanism for adjusting the positional relationship between the laminated laser array 10 and the compound lens 11 will be described.

  A known power meter is used to measure whether the laser light emitted from the light emitting unit 14 is incident on the optical fiber 12 without loss.

  In FIG. 1 to FIG. 5, reference numeral 20 denotes a base. The base 20 is formed from a rectangular bottom plate 21, and one long side plate 22 and another lateral side plate 23 are formed on both long sides of the bottom plate 21. Are standing upright.

  On the upper surface of the bottom plate 21, the laser stack 10 restrained by the housing 24 is disposed. The housing 24 is fixed to the bottom plate 21. The laser stack 10 is constrained with the light emitting portion 14 facing the longitudinal direction of the bottom plate 21, and the longitudinal direction of the bottom plate 21 is set as the traveling direction of the laser light (Z-axis direction).

  A compound lens 11 is disposed in the traveling direction (Z-axis direction) of the light emitting unit 14 of the laser stack 10. The compound lens 11 is formed by adhering the plate lens 11a described above, and a cylindrical lens 15 of the plate lens 11a is disposed to face the laser stack 10 as shown in FIG. The compound lens 11 is held by the holding member 25. The holding member 25 has a recess 25a for holding the compound lens 11 at the center, and flanges 25b and 25c at both ends in the slow axis direction. The compound lens 11 is bonded and fixed to the bottom surface of the recess 25a and the side surface on the other side plate 23 side. The optical fiber 12 is supported on the holding member 25 together with the composite lens 11.

  As shown in FIG. 2, a frame 26 is formed on the outer periphery of the one side plate 22, and the one side support member 29 is positioned in the laser traveling direction (z It extends in the axial direction) and is formed in a beam shape with a square cross section. The one side support member 29 corresponds to one side support means of the present invention, and a pair of one side lever members 27 and 28 are disposed at both ends of the one side support member 29. The pair of one side insulator members 27, 28 are formed in a cross-sectional square shape extending in the laser traveling direction (z-axis direction) similarly to the one side support member 29. The end portions are connected to the one ends 27a and 28a of the pair of one side lever members 27 and 28 by elastic deformation portions 30 and 31, respectively. The elastic deformation portions 30 and 31 are leaf springs having a predetermined width in the thickness direction of the frame body 26, that is, in the slow axis (x-axis) direction and thin in the laser traveling direction (z-axis direction). The force in the slow axis (x-axis) direction and the fast axis (y-axis) direction is rigid, and the force in the laser traveling direction (z-axis direction) is elastically deformed.

  The lower surfaces of the other ends 27 b and 28 b of the one side lever members 27 and 28 are elastically supported by a coil spring 32 which is one side pressing force applying means attached to the frame body 26. The fulcrum portions 27c and 28c near the one ends 27a and 28a on the upper surfaces of the one side lever members 27 and 28 are connected to the connecting rods 26a and 26b formed by hanging from the frame body 26 through the elastic deformation portions 33 and 34. And supported by the frame body 26. The elastic deformation portions 33 and 34 are leaf springs having a predetermined width in the thickness direction of the frame body 26, that is, the slow axis (x-axis) direction, and being thin in the laser traveling direction (z-axis direction). The force in the slow axis (x-axis) direction and the fast axis (y-axis) direction is rigid, and the force in the laser traveling direction (z-axis direction) is elastically deformed. For this reason, the one side lever member 27 swings in the first axis (y-axis) direction at one end 27a and the other end 27b with the fulcrum portion 27c as a fulcrum. Similarly, the one side lever member 28 swings in the first axis (y-axis) direction at one end 28a and the other end 28b with the fulcrum portion 28c as a fulcrum.

  At this time, the pair of one-sided lever members 27 and 28 perform the lever action of reducing the amount of movement of the other ends 27b and 28b in the fast axis (y-axis) direction and transmitting them to the one ends 27a and 28a.

  Reinforcing members 35 and 36 are provided above the pair of one side lever members 27 and 28. These reinforcing members 35 and 36 extend in parallel with the one side lever members 27 and 28. One end of the reinforcing member 35 is connected to the other end 27b of the one side lever member 27 via the connecting member 37, and the other end of the reinforcing member 35 is connected to the connecting rod 26a via the elastic deformation portion 35a. The connecting member 37 is connected to one end of the reinforcing member 35 and the other end 27b of the one side lever member 27 by elastic deformation portions 37a and 37b. The elastic deformation portions 37a and 37b and the elastic deformation portion 35a are connected to the slow shaft (x (Axis) direction and first axis (y-axis) direction have rigidity, and elastic deformation occurs in the laser traveling direction (z-axis direction) force. The one side parallel link mechanism is formed by the reinforcing member 35, the one side lever member 27, the connecting member 37 that connects these members, and the connecting rod 26a.

  Similarly, one end of the reinforcing member 36 is connected to the other end 28b of the one side lever member 28 via the connecting member 38, and the other end of the reinforcing member 36 is connected to the connecting rod 26b via the elastic deformation portion 36a. Yes. The connecting member 38 is connected to one end of the reinforcing member 36 and the other end 28b of the one side lever member 28 by elastic deformation portions 38a and 38b. The elastic deformation portions 38a and 38b and the elastic deformation portion 36a are connected to the slow shaft (x (Axis) direction and first axis (y-axis) direction have rigidity, and elastic deformation occurs in the laser traveling direction (z-axis direction) force. The one side parallel link mechanism is formed by the reinforcing member 36, the one side lever member 28, the connecting member 38 connecting these members, and the connecting rod 26b.

  Dial adjusting mechanisms 39a and 39b, which are one-side displacement devices, are provided on the upper surface of one end of the reinforcing members 35 and 36 and the frame body 26, respectively. The dial adjusting mechanisms 39 a and 39 b include a nut member 40 fixed to the frame body 26 and a dial screw member 41 that is screwed into the nut member 40. The dial screw member 41 has a cylindrical shape, and a screw groove (not shown) that is screwed with the nut member 40 is formed on the outer periphery. A hemispherical contact portion 41 a that abuts the upper surfaces of the reinforcing members 35 and 36 is formed at the tip of the dial screw member 41, and a dial head 41 b is provided at the rear end. A scale is engraved on the outer periphery of the dial head 41b. By rotating the dial head 41b, the contact portion 41a advances and retreats in the fast axis (y-axis) direction. For example, when the dial head 41b is rotated in the clockwise direction, the contact portion 41a moves in a direction in which the reinforcing members 35 and 36 are pressed. Further, when the dial head 41 b is rotated counterclockwise, the contact portion 41 a moves in a direction away from the reinforcing members 35 and 36.

  On the upper surface of the one side support member 29, conical depressions are formed at two positions spaced apart and aligned in the laser traveling direction (z-axis direction), and the balls 29a and 29b are rotatably held in the depressions. . The balls 29a and 29b are held in a recess formed in the lower surface of the flange portion 25b of the holding member 25, and the flange portion 25b of the holding member 25 is positioned and supported by the one side support member 29 via the balls 29a and 29b. ing. In addition, coil springs 42 a and 42 b are interposed between the upper surface of the flange portion 25 b of the holding member 25 supported by the balls 29 a and 29 b and the frame body 26. The coil springs 42 a and 42 b press the flange portion 25 b of the holding member 25 toward the one side support member 29. For this reason, the flange portion 25 b of the holding member 25 supports the lower surface side by the one side support member 29 via the pair of one side lever members 27 and 28 with respect to the frame body 22 forming a part of the base 20. At the same time, the upper surface side is supported by the coil springs 42a and 42b.

  As shown mainly in FIG. 4, a frame 50 is formed on the outer periphery of the other side plate 23, and the other side support member 51 is positioned in the laser traveling direction (z) at a substantially central position in the frame 50. It extends in the axial direction) and is formed in a beam shape with a square cross section. The other side support member 51 corresponds to the other side support means of the present invention, and the other side lever member 52 is disposed at the end of the other side support member 51 on the laser stack 10 side. A rocking support member 53 is disposed at the end of each of the two. Similar to the other side support member 51, the other side lever member 52 is formed in a cross-sectional square shape extending in the laser traveling direction (z-axis direction), and the end of the other side support member 51 on the laser stack 10 side. This portion is connected to one end 52 a of the other side lever member 52 by an elastic deformation portion 54. The elastic deformation portion 54 is a leaf spring having a predetermined width in the thickness direction of the frame 50, that is, the slow axis (x-axis) direction, and having a thin wall in the laser traveling direction (z-axis direction). The force in the axial (x-axis) direction and the fast axis (y-axis) direction has rigidity, and the force in the laser traveling direction (z-axis direction) is elastically deformed.

  The lower side of the other end 52b of the other side lever member 52 is elastically supported by a coil spring 55 which is an other side pressing force applying means attached to the frame 50. A fulcrum portion 52 c near the one end 52 a on the upper surface of the other side lever member 52 is connected to a connecting rod 50 a formed by hanging from the frame body 50 via an elastic deformation portion 56 and supported by the frame body 50. . The elastic deformation portion 56 is a leaf spring having a predetermined width in the thickness direction of the frame body 50, that is, the slow axis (x-axis) direction and having a thin wall in the laser traveling direction (z-axis direction). The force in the axial (x-axis) direction and the fast axis (y-axis) direction has rigidity, and the force in the laser traveling direction (z-axis direction) is elastically deformed. For this reason, as for the other side lever member 52, one end 52a and the other end 52b are rock | fluctuated to a fast axis (y-axis) direction by using the fulcrum part 52c as a fulcrum.

  The swing support member 53 is formed in a square cross section extending in the laser traveling direction (z-axis direction), and one end 53 a is connected to the other end of the other side support member 51 by an elastic deformation portion 57. The elastic deformation portion 57 is a leaf spring having a predetermined width in the thickness direction of the frame body 50, that is, in the slow axis (x-axis) direction and having a thin wall in the laser traveling direction (z-axis direction). The force in the axial (x-axis) direction and the fast axis (y-axis) direction has rigidity, and the force in the laser traveling direction (z-axis direction) is elastically deformed.

  The lower end of the other end 53 b of the swing support member 53 is elastically supported by a coil spring 58 attached to the frame body 50. A fulcrum portion 53 c near the one end 53 a on the upper surface of the swing support member 53 is connected to a connection rod 50 b formed by hanging from the frame body 50 via an elastic deformation portion 59 and supported by the frame body 50. The elastic deformation portion 59 is a leaf spring having a predetermined width in the thickness direction of the frame 50, that is, the slow axis (x-axis) direction, and having a thin wall in the laser traveling direction (z-axis direction). The force in the axial (x-axis) direction and the fast axis (y-axis) direction has rigidity, and the force in the laser traveling direction (z-axis direction) is elastically deformed. Therefore, the swing support member 53 swings in the first axis (y-axis) direction at one end 53a and the other end 53b with the fulcrum portion 53c as a fulcrum.

  Reinforcing members 60 and 70 are provided above the other side lever member 52 and the swing support member 53. The reinforcing member 60 extends in parallel with the other side lever member 52. One end of the reinforcing member 60 is connected to the other end 52b of the one side lever member 52 via the connecting member 61, and the other end of the reinforcing member 60 is connected to the connecting rod 50a via the elastic deformation portion 60a. The connecting member 61 is connected to one end of the reinforcing member 60 and the other end 52b of the other side lever member 52 by elastic deformation portions 61a and 61b. The elastic deformation portions 61a and 61b and the elastic deformation portion 60a are connected to the slow shaft (x (Axis) direction and first axis (y-axis) direction have rigidity, and elastic deformation occurs in the laser traveling direction (z-axis direction) force. The other side parallel link mechanism is formed by the reinforcing member 60, the other side lever member 52, the connecting member 61 that connects them, and the connecting rod 50a. Similarly, one end of the reinforcing member 70 is connected to the other end 53b of the swing support member 53 via the connecting member 71, and the other end of the reinforcing member 70 is connected to the connecting rod 50b via the elastic deformation portion 70a. . The connecting member 71 is connected to one end of the reinforcing member 70 and the other end 53b of the swing support member 53 by elastic deformation portions 71a and 71b. The elastic deformation portions 71a and 71b and the elastic deformation portion 70a are connected to the slow shaft (x (Axis) direction and first axis (y-axis) direction have rigidity, and elastic deformation occurs in the laser traveling direction (z-axis direction) force. A parallel link mechanism is formed by the reinforcing member 70, the swing support member 53, the connecting member 71 that connects these members, and the connecting rod 50a.

  The upper surface of one end of the reinforcing member 60 and the frame body 50 are provided with a dial adjusting mechanism 61 that is a one-way displacement device. The dial adjusting mechanism 61 includes a nut member 62 fixed to the frame body 50 and a dial screw member 63 screwed into the nut member 62. The dial screw member 63 has a cylindrical shape, and a screw groove (not shown) that is screwed with the nut member 62 is formed on the outer periphery. A hemispherical contact portion 63a that contacts the upper surface of the reinforcing member 60 is formed at the tip of the dial screw member 63, and a dial head 63b is provided at the rear end. A scale is engraved on the outer periphery of the dial head 63b. By rotating the dial head 63b, the contact portion 63a advances and retreats in the fast axis (y-axis) direction. For example, when the dial head 63b is rotated clockwise, the contact portion 63a moves in a direction in which the reinforcing member 60 is pressed. Further, when the dial head 63 b is rotated counterclockwise, the contact portion 63 a moves in a direction away from the reinforcing member 60. The upper end of the reinforcing member 70 is elastically supported by a coil spring 73 attached to the frame body 50.

  A conical depression is formed on the upper surface of the other side support member 51, and the ball 51a is rotatably held in the depression. The ball 51a contacts the lower surface of the flange portion 25c of the holding member 25, and the flange portion 25c of the holding member 25 is slidably supported by the other side support member 36 via the ball 51a. A coil spring 72a is interposed between the upper surface of the flange portion 25c of the holding member 25 supported by the balls 51a and 51b and the frame body 50. The coil spring 72 a presses the flange portion 25 c of the holding member 25 toward the other side support member 51. For this reason, the flange portion 25c of the holding member 25 is lower than the frame 50 forming a part of the base 20 by the one side support member 29 via the other side lever member 52 and the swing support member 53. And the upper surface side is supported by the coil spring 72a. Therefore, the holding member 25 elastically holds the flange portions 25b and 25c on the frame body 26 and the frame body 50 described above, respectively.

  The operation of adjusting the position of the laser stack 10 and the compound lens 11 with the above configuration will be described. The position adjustment in the present embodiment is executed by lever action of the pair of one side lever members 27 and 28 and the other side lever member 52. Since the operation of the lever action of the pair of one side lever member and the other side lever member is the same, the lever action of the one side lever member 27 will be described here with reference to FIG. The one side lever member forms a lever having the fulcrum portion 27c as a fulcrum, the other end 27b serving as a power point, and the one end 27a serving as an action point. Further, the reinforcing member 35, the one side lever member 27, the connecting member 37 for connecting them, and the connecting rod 26a form a one side parallel link mechanism, and this one side parallel link mechanism is the one side lever member 27. Is reinforced so as not to bend in the first axial direction. The other end 27b of the one side lever member 27 is given a rotational force around the fulcrum portion 27c by the pressing force of the coil spring 32, and is pressed against the dial adjustment mechanism 39a contact portion 41a via the reinforcing member 35. Yes. Further, the one end 27a of the one side lever member 27 is given a rotational force around the fulcrum portion 27c by the pressing force of the coil spring 42a that pushes down the flange portion 25b. A force for pressing the dial screw member 41 is applied. In this state, when the dial head 41b of the dial adjustment mechanism 39 is rotated by a predetermined angle based on the scale, the contact portion 41a pushes down one end of the reinforcing member 35 against the pressing force of the coil spring 32 and the coil spring 42a. When one end of the reinforcing member 35 is pushed down, the other end 27b of the one side lever member 27 connected via the connecting member 37 is pushed down, and the one side lever member 27 turns around the fulcrum 27c. At this time, as described above, the ratio of the distance from the fulcrum portion 27c to the other end 27b as the force point and the distance from the fulcrum portion 27c to the one end 27a as the action point is 5: 1. The movement amount of 1/5 of the movement amount of the contact portion 41a of 41 is transmitted to the one end 27a of the one side lever member 27, and the one end 27a of the one side lever member 27 is pushed up. By pushing up one end 27a of the one side lever member 27, the one side support member 29 is pushed up, and as a result, the flange portion 25b of the holding member 25 is pushed up against the pressing force of the coil spring 42a. On the contrary, when the dial screw member 41 is rotated in the direction away from the frame body 26 and the contact portion 41 a is returned in the direction approaching the frame body 26, the reinforcing member 35 constituting the parallel link mechanism is contacted by the action of the coil spring 32. Following up with the portion 41a, the other end 27b of the one side lever member 27 is raised and the one end 27a is lowered. When the one end 27a is lowered, the one-side support member 29 connected via the elastic deformation portion 30 is lowered, and the flange portion 25b of the holding member 25 is lowered following the flange 25b by the coil spring 42a. Thus, the amount of movement due to the rotation of the dial adjusting mechanism 39a can be reduced in the fast axis direction by the lever action of the one side lever member 27 and transmitted to the flange portion 25b of the holding member 25 for movement. Similarly, by operating the dial adjustment mechanism 39b, the flange portion 25b of the holding member 25 can be moved by being contracted by the lever action of the one side lever member 28 to move the flange portion 25b of the holding member 25, and the dial adjustment mechanism 61 is operated. Thus, the flange portion 25c of the holding member 25 can be moved while being reduced in the first axial direction by the lever action of the other side lever member 52. Then, the dial adjusting mechanisms 39a and 39b and the dial adjusting mechanism 61 are adjusted, and the tilt angle of the holding member 25 is adjusted by moving the position of the holding member 25 in the fast axis direction. The positional relationship can be adjusted. For example, if the dial adjusting mechanisms 39a and 39b and the dial adjusting mechanism 61 are operated to move up and down in the fast axis direction of the holding member 25 at the same time, the compound lens 11 is translated in the fast axis direction. Further, when the dial adjusting mechanisms 39a and 39b are operated so that the holding member 25 is lowered and the dial adjusting mechanism 61 is operated so that the holding member 25 is raised, the compound lens 11 is rotated around the axis (Z axis) along which the laser light travels. Thus, the rotation, that is, the rolling angle can be adjusted. By operating the dial adjustment mechanism 39a and the dial adjustment mechanism 61, the first direction position of the compound lens 11 on the laser stack 10 side, that is, the slow axis (Y The rotation (pitching) angle around the axis) can be adjusted.

  The flange portion 25a is positioned on the one side support member 29 by balls 29a and 29b held in the recesses, and the flange portion 25c is slidable via the ball 51a, that is, supported on the other side so as to be floatable. It is supported by the member 51. For this reason, when the holding member 25 is inclined, the movement of the contact position of the holding member 25 with the one side support member 29 and the other side support member 51 becomes smooth.

  As described above, the dial adjustment mechanisms 39a, 39b, and 61 are operated so that the laser light emitted from the laser stack 10 can be efficiently focused on the compound lens 11, and the movement amount by this operation is set to one side of the pair. Since the position of the compound lens 11 is adjusted by reducing the lever action of the lever members 27 and 28 and the other side lever member 52, the position of the laser stack 10 and the compound lens 11 can be precisely adjusted after assembling. Readjustment can also be performed.

  In the above-described embodiment, the pair of one side lever members 27 and 28 are connected to the one side holding member 29, and the other side lever member 52 and the swing support member 53 are one other. The rigidity is improved by being connected to the side holding member 51. However, if the rigid rigidity is not particularly required, the one side holding member 29 and the other side holding member 51 that are independent of the one side lever members 27 and 28 and the other side lever member 52 are provided. May be formed.

  In the above embodiment, the compound lens 11 is exemplified as the light collecting device. However, the light collecting device may be configured by a combination of a plurality of lenses, and a waveguide may be used instead of the lens. The laser bar 10a alone may be used instead of the laser stack 10. Furthermore, the compound lens 11 that is a light condensing device may be fixed so that the position of the laser stack 10 can be adjusted.

  Further, although the coil springs 32 and 55 are given as an example as the one side pressing force applying means and the other side pressing force applying means, an elastic body such as a rubber material may be used instead of the coil springs 32 and 55. Good.

The top view which shows the light-emitting device which concerns on this invention. AA sectional view taken on the line AA of FIG. FIG. 3 is a sectional view taken along line BB in FIG. 1. The CC sectional view taken on the line of FIG. The DD sectional view taken on the line of FIG. The figure which showed schematic structure of a laser stack, a compound lens, and an optical fiber.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Laser stack, 11 ... Compound lens, 12 ... Optical fiber, 14 ... Light emission part, 15 ... Cylindrical lens, 20 ... Base, 21 ... Bottom plate, 22 ... One side side plate, 23 ... Other side side plate, 25 ... Holding member, 25a, 25b ... Flange, 26, 50 ... Frame, 27, 28 ... One side insulator member, 29 ... One side support member, 35, 36 ... Reinforcing member, 39a, 39b, 51 ... Other side support member, 52... Other side lever member, 61.

Claims (6)

A laser array in which light emitting portions of a plurality of semiconductor lasers that emit laser light that travels while diffusing in a slow axis direction and a fast axis direction orthogonal to each other are arranged in parallel, and the light emitting portion of the laser array is disposed to face the laser array. In a laser light emitting device comprising an optical path device for passing a laser beam emitted from a semiconductor laser, a base for fixing either the laser array or the optical path device, and either the laser array or the optical path device A holding member for holding, one side support means for supporting the holding member at two positions separated and aligned in the laser traveling direction, and the other side of the holding member spaced from the one side in the slow axis direction. the other side support means, said respective first ends at one side two places spaced in the laser moving direction on one side support means Firth for supporting at least one place Rigid in the axial direction of the force, and a pair of one side lever member in the laser moving direction of the force which is elastically deformable coupling, displacement and the other end of the respective one side lever member in fast axis direction A pair of one-side displacement devices for reducing and displacing the one end in the first axial direction by lever action, and one end of the other side support means having rigidity in the first axial force, and in the laser traveling direction. The other side lever member that is elastically deformed to the force and the other side that displaces the other end of the other side lever member in the fast axis direction and contracts the one end in a fast axis direction by a lever action. And a laser displacement device. In claim 1,
The one side support means is a one side support member extending in the laser traveling direction, and each end portion of the one side support member is connected to each end of the pair of one side lever members in the first axial direction. The force has rigidity, and the force in the laser traveling direction is connected by an elastically deforming portion that elastically deforms,
The other side support means is an other side support member extending in the laser traveling direction, and one end portion of the other side support member is rigid with respect to a first axial force at one end of the other side lever member. And a laser light emitting device characterized in that the laser light emitting device is elastically connected to a force in a laser traveling direction by an elastic deformation portion that elastically deforms. In claim 2,
The pair of one side lever members are aligned with the one side support member and extend in the laser traveling direction, and each one side lever member and each one side lever member extending in parallel with the one side lever member. One end of a reinforcing member is rigidly connected to the base in a force in the first axial direction and elastically deformed to a force in the laser traveling direction, and the other end of each reinforcing member and each one side A pair of one side parallel link mechanism is constructed by connecting the other end of the insulator member to both ends of the connecting member so that the force in the first axial direction is rigid and elastically deformable to the force in the laser traveling direction. And
The other side lever member is aligned with the other side support member and extends in the laser traveling direction, and is one end of the other side lever member and a reinforcing member extending in parallel with the other side lever member. The base is rigid to the force in the first axial direction and is elastically deformed to the force in the laser traveling direction, and the other end of the reinforcing member and the other end of the other side lever member are connected to each other. A laser light emitting device characterized in that the other side parallel link mechanism is constructed by connecting the both ends of the connecting member with rigidity in the force in the first axial direction and elastically deforming the force in the laser traveling direction. . In claim 3,
One side plate and the other side plate fixed to the base and disposed on both side surfaces of the laser array and the optical path device,
The one side support member, the pair of one side lever members, the pair of one side reinforcement members, and the elastic deformation portions are integrally formed by cutting out the one side plate,
2. The laser light emitting device according to claim 1, wherein the other side plate is cut out to integrally form the other side support member, the other side lever member, the other side reinforcing member, and each elastic deformation portion. In any one of Claims 1 thru | or 4,
A pair of one side pressing force applying means for pressing each one end of the pair of one side lever members against the pair of one side displacement devices;
2. A laser emitting apparatus according to claim 1, further comprising an other side pressing force applying means for pressing one end of the other side lever member against the other side displacement device. In any one of Claims 1 thru | or 5,
One side of the holding member is supported on the one side support member via a ball, and the other side of the holding member is supported on the other side support member via a ball so as to be floatable. A laser emitting device.

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