JP4130492B2 - Method for producing heterogeneous polymer array plate - Google Patents

Method for producing heterogeneous polymer array plate Download PDF

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Publication number
JP4130492B2
JP4130492B2 JP04438698A JP4438698A JP4130492B2 JP 4130492 B2 JP4130492 B2 JP 4130492B2 JP 04438698 A JP04438698 A JP 04438698A JP 4438698 A JP4438698 A JP 4438698A JP 4130492 B2 JP4130492 B2 JP 4130492B2
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Prior art keywords
polymer
film
layer
array plate
layers
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JP04438698A
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JPH11231137A (en
Inventor
和孝 原
裕之 吉見
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Nitto Denko Corp
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Nitto Denko Corp
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Description

【0001】
【発明の技術分野】
本発明は、導波路型拡散板などとして有用な異種ポリマー配列板製造方法に関する。
【0002】
【発明の背景】
従来、導波路型拡散板としては、フォトリソグラフィー方式によるものが知られていた。しかしながら、量産性に乏しく、製造に特殊配合の樹脂組成物を要してその調製に多時間、多労力を要する問題点があった。
【0003】
【発明の技術的課題】
本発明は、汎用なポリマーを用いることができて屈折率差等の光学特性を幅広く設定でき、量産が容易な異種ポリマー配列板製造方法の開発を課題とする。
【0004】
【課題の解決手段】
本発明は、ポリマー層としてのポリマーフィルムの両面に、そのポリマーフィルムを形成するポリマー層とは屈折率の異なるポリマー層を設けてなり、そのフィルム両面に設けたポリマー層が同じポリマーからなるフィルムFを積層密着してなる積層体を、その積層方向が幅方向となるように薄層切断して、積層したポリマー層が平面方向に配列してなる薄層体を形成することを特徴とする異種ポリマー配列板の製造方法を提供するものである。
【0005】
【発明の効果】
本発明によれば、屈折率の異なるポリマー層の積層体を切断する方式にて形成できて量産性に優れると共に、フォトリソグラフィー装置の如き特殊装置の必要なく製造でき、また積層方式であることより積層するポリマー層を汎用なポリマーなどより幅広く選択できて屈折率差等の光学特性を幅広く設定でき、積層の際にフィルムを表裏の区別なく用いることができて積層効率に優れている。
【0006】
【発明の実施形態】
本発明による異種ポリマー配列板は、屈折率の異なるポリマー層が所定の繰返し単位にて平面方向に密着状態で配列したものからなる。その例を図1、図2、図3に示した。1,2、3,4が屈折率の異なるポリマー層である。なお図は、異種ポリマー配列板の概略を示したものである。
【0007】
かかる異種ポリマー配列板の製造は、ポリマー層としてのポリマーフィルムの両面に、そのポリマーフィルムを形成するポリマー層とは屈折率の異なるポリマー層を設けてなり、そのフィルム両面に設けたポリマー層が同じポリマーからなるフィルムFを積層密着してなる積層体を、その積層方向が幅方向となるように薄層切断して、積層したポリマー層が平面方向に配列してなる薄層体を形成する方法にて行うことができる。
【0008】
前記積層体の形成は、適宜な方式にて行うことができる。ちなみにその例としては、図5に例示した如くポリマーフィルム14の両面に、そのポリマーフィルムを形成するポリマーとは屈折率の異なるポリマー層13を塗工付設し、そのフィルム両面のポリマー層13を同じポリマーからなるものとしたフィルムFを形成してそれを積層する方式があげられる。なお図4は、参考例を示したものであり、屈折率の異なるポリマーフィルム11,12,・・・を所定の繰返し順序で積層したものである。
【0009】
また図6に例示した如く、多層押出し方式やポリマー液の重ね塗り方式などで屈折率の異なるポリマー15,16,17からなるラミネートフィルム18を形成し、それを積層する方式などにても前記した積層体を形成することができる。なおポリマー15,17は、同じものである。ポリマーフィルムの両面に設けるポリマー層は、前記した塗工付設方式等のキャスト方式にて形成することが好ましい。
【0010】
フィルムFの全積層数は、目的とする異種ポリマー配列板の幅長さなどに応じて適宜に決定することができる。
【0011】
積層する屈折率相違のポリマー層の組合せは、使用目的になどに応じて適宜に決定しうるが、導波路型拡散板などを得る点よりは隣接するポリマー層の屈折率差が0.001〜0.5、就中0.003〜0.4、特に0.005〜0.2であることが好ましい。
【0012】
積層体における各ポリマー層の厚さは、使用目的などに応じて適宜に決定しうるが、一般には0.1〜200μm、就中0.5〜100μm、特に1〜50μmとされる。積層効率などの点よりは、フィルムなどとしたものを積層する方式が好ましい。ポリマーフィルムの両面に屈折率相違のポリマー層を設け、そのポリマー層をフィルムの両側で同じものとしたフィルムFは、それを積層する際に表裏の区別なく用いることができて積層効率などの点より有利である。
【0013】
なおフィルム等を用いて積層したことにより、ポリマー層間の密着処理を要する場合には、例えば積層界面を形成するポリマー層が溶融する温度に積層体を加熱してプレス処理する方式などにより密着処理することができる。またポリマー系接着剤を介して密着処理する方式なども採ることができる。その接着剤には、ホットメルト型や感圧接着型などの適宜なものを用いうる。
【0014】
積層体を形成する屈折率相違のポリマー種については特に限定はなく、適宜な種類のものであってよい。また一般には透明性に優れるポリマーが好ましく用いうるが、これに限定されない。ちなみに前記ポリマーの例としては、アクリル系ポリマーやシリコーン系ポリマー、ポリエステルやポリウレタン、ポリエーテルスルホンやポリカーボネート、ポリアミドやポリイミド、ポリオレフィンやアセテート系ポリマー、ポリビニルアルコールやポリスチレン、酢酸ビニル系ポリマーやポリ塩化ビニル、ポリエーテルや各種ゴム系ポリマー、各種液晶ポリマー、あるいはフェノール系やメラミン系、アクリル系やウレタン系、アクリルウレタン系やエポキシ系やシリコーン系等の熱硬化型、ないし紫外線硬化型の樹脂などがあげられる。
【0015】
本発明による異種ポリマー配列板における屈折率相違のポリマー層の界面における屈折率特性は、ステップインデックス型やグレーデッドインデックス型などの適宜なものであってよい。ちなみにグレーデッドインデックス型の屈折率特性は、例えば屈折率相違のポリマー層の界面にそれらの層を形成するポリマー同士が相互に混合融合するように融着処理して明確な界面を消失させる方式などにより付与することができる。
【0016】
また異種ポリマー配列板における屈折率相違のポリマー層の界面は、図1,2に例示の如く平滑面からなっていてもよいが、拡散効果の向上などの点よりは図3に例示した如く凹凸構造に形成されていることが好ましい。かかる凹凸構造は、例えば表面を粗面化処理したフィルムを感圧接着層等を介して積層する方式などにより得ることができる。
【0017】
また前記した拡散効果の向上をはかる点などよりは、繰返し単位を形成する屈折率相違のポリマー層の少なくとも一層に、屈折率が相違する微粒子を分散含有させる方式も有効である。その含有微粒子に基づいてポリマー層の界面に前記した凹凸構造を付与することもできる。
【0018】
前記した屈折率相違の微粒子としては、有機系や無機系の適宜なものを用いうる。ちなみにその例としては、例えばシリカやアルミナ、チタニアやジルコニア、酸化錫や酸化インジウム、酸化カドミウムや酸化アンチモン等からなる金属酸化物系粒子や金属粒子やその他の無機系微粒子、架橋又は未架橋のポリマー等からなる有機系微粒子などがあげられる。目立ちにくさの点等よりは透明微粒子が好ましく用いうる。
【0019】
本発明による異種ポリマー配列板の製造は、上記したフィルムFを積層密着してなる積層体をその積層方向が幅方向となるように薄層切断して、積層したポリマー層が平面方向に配列してなる薄層体を形成する方法にて行うことができる。
【0020】
図7に例示した如く、切断にはカッター等の適宜な切断手段6を用いうるが、その切断処理は積層体5の積層構造が現れた面51に対して施すことが、切断対象面の同質化による切断処理の安定性、ひいては均厚切断性などの点より好ましい。積層方向の切断処理では切断対象のポリマー層11,12が順次交代して物性の相違による切断特性の変化で不安定な切断となりやすい。
【0021】
また前記の切断に際しては図8に例示した如く、積層体5に変形処理を加えることもできる。すなわち切断処理は、積層体5に変形処理を加えることなく行って、図1に例示した如きポリマー層1,2が板平面に垂直な方向に配列した異種ポリマー配列板を得ることもできるが、積層体の変形処理下に切断処理して図2に例示した如く、ポリマー層1,2が板平面に対して、従って厚さ方向に傾斜配列した異種ポリマー配列板を得ることもできる。
【0022】
前記したポリマー層の傾斜配列化は、透過光が屈折率相違のポリマー層界面を経由することで拡散効果が発生し、従って拡散効果の向上などに有効である。なおポリマー層の傾斜配列における傾斜角は、全反射の防止などの点より臨界角以下であることが好ましく、従ってかかる傾斜角は0度から臨界角の範囲で適宜に決定することができる。
【0023】
前記した積層体の変形処理は、適宜な方式で行うことができる。図8の例では、積層体をプレス軸71に巻き付けて円筒体52とし、それをプレス軸71と共に雌型72に装着してプレス処理し、円筒体に積層方向のズラシ力を負荷することにより積層体を形成するポリマー層が傾斜配列してその状態が固定化されるようになっている。
【0024】
そして図9に例示した如く、形成されたポリマー層が傾斜配列した円筒体52を切断手段6を介し切断して薄層体を得ることにより、図2に例示の如きポリマー層が傾斜配列した異種ポリマー配列板を得ることができる。なお切断処理して得た異種ポリマー配列板は、必要に応じ表面仕上げや厚さ調節などを目的に研削処理等の適宜な処理を施すことができる。
【0025】
本発明による異種ポリマー配列板の厚さは、使用目的などにより適宜に決定することができ、1mm以上の厚さとすることもできる。一般には軽量性や柔軟性等の取扱性などの点より、1μm〜1mm、就中5〜500μm、特に10〜200μmとされる。
【0026】
本発明による異種ポリマー配列板は、屈折率の異なるポリマー層が平面方向に配列した構造に基づいて、光の透過性や拡散性等の各種の光学特性を示し、導波路や拡散板などの各種の光学素子として好ましく用いることができる。
【0027】
【実施例】
実施例1
厚さ6μmのポリカーボネートキャストフィルムの両面にキャスト方式で厚さ2μmのポリメタクリル酸メチル層を形成し、その1万枚を積層して熱プレスし、積層界面を密着処理して厚さ10cmの積層体を得、それを上記図8に準じた方式で変形処理してポリマー層を20度傾斜させた。
【0028】
前記傾斜処理の円筒体をカッターを介し積層方向が幅方向となるように薄層切断処理して、積層したフィルム層が平面方向に配列してなる厚さ50μm、長さ30cm(幅10cm)の図2の如き傾斜配列型の異種ポリマー配列板を得た。その異種ポリマー配列板に垂直平行光を入射させたところ、拡散光からなる透過光を光透過率よく得ることができた。
【図面の簡単な説明】
【図1】 異種ポリマー配列板例の概略を示した断面図
【図2】 他の異種ポリマー配列板例の概略を示した断面図
【図3】 さらに他の異種ポリマー配列板例の概略を示した断面図
【図4】 積層体の参考例を示した説明図
【図5】 層体形成例の説明図
【図6】 の積層体形成例の説明図
【図7】 積層体切断例の説明図
【図8】 積層体変形処理例の説明図
【図9】 他の積層体切断例の説明図
【符号の説明】
1,2,3,4:ポリマー層
11,12,14:ポリマーフィルム
13:ポリマー塗工層
18:ラミネートフィルム
5,52:積層体
6:切断手段
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a process for the production of useful heterologous polymer sequences plate as such waveguide type diffuser.
[0002]
BACKGROUND OF THE INVENTION
Conventionally, as a waveguide type diffusion plate, a photolithography method has been known. However, there is a problem in that it is poor in mass productivity and requires a specially formulated resin composition for production and requires a lot of time and labor for its preparation.
[0003]
[Technical Problem of the Invention]
The present invention may be a general purpose polymers can widely set the optical characteristics such as refractive index difference that can be with the use of mass production is an object of development of a method for manufacturing easy heterologous polymer sequences plate.
[0004]
[Means for solving problems]
The present invention is a film F in which a polymer layer having a refractive index different from that of the polymer layer forming the polymer film is provided on both sides of the polymer film as the polymer layer, and the polymer layers provided on both sides of the film are made of the same polymer. The laminated body formed by laminating and adhering to each other is cut into thin layers so that the laminating direction is the width direction, and a thin layer body is formed in which the laminated polymer layers are arranged in a plane direction. A method for producing a polymer array plate is provided.
[0005]
【The invention's effect】
According to the present invention, it can be formed by a method of cutting polymer layers having different refractive indexes and is excellent in mass productivity, and can be manufactured without the need for a special apparatus such as a photolithography apparatus. the optical properties of the refractive index difference between such a polymer layer made widely selected from general-purpose polymers for laminating can widely set, that has excellent lamination efficiency may be used a film without distinguishing between the front and back during lamination.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
The heterogeneous polymer array plate according to the present invention is composed of polymer layers having different refractive indexes arranged in a close contact state in a plane direction with a predetermined repeating unit. Examples thereof are shown in FIGS. 1, 2, and 3. 1, 2, 3 and 4 are polymer layers having different refractive indexes. The figure shows an outline of the heterogeneous polymer array plate.
[0007]
Such a heterogeneous polymer array plate is produced by providing a polymer layer having a refractive index different from that of the polymer layer forming the polymer film on both sides of the polymer film as the polymer layer, and the polymer layers provided on both sides of the film are the same. A method of forming a thin layer body in which a laminated body formed by laminating and adhering a film F made of a polymer is thinly cut so that the laminating direction is a width direction, and the laminated polymer layers are arranged in a plane direction Can be done.
[0008]
The laminate can be formed by an appropriate method. As an example, as shown in FIG. 5, a polymer layer 13 having a refractive index different from that of the polymer forming the polymer film is applied on both sides of the polymer film 14, and the polymer layers 13 on both sides of the film are the same. There is a method in which a film F made of a polymer is formed and laminated. 4 shows a reference example, in which polymer films 11, 12,... Having different refractive indexes are laminated in a predetermined repetition order.
[0009]
Further, as illustrated in FIG. 6, to form a different refractive index, etc. recoating method of a multilayer extrusion method or the polymer solution polymer 15,16,17 Tona Lula Mi titanate film 18, it in such manner that the product layer Also, the above-described laminate can be formed. The polymers 15 and 17 are the same. The polymer layers provided on both sides of the polymer film are preferably formed by a casting method such as the above-described coating method.
[0010]
The total number of laminated films F can be appropriately determined according to the width and the like of the target heterogeneous polymer array plate.
[0011]
The combination of polymer layers having different refractive indexes to be laminated can be appropriately determined according to the purpose of use, etc., but the refractive index difference between adjacent polymer layers is 0.001 to 0.001 from the point of obtaining a waveguide type diffusion plate or the like. 0.5, especially 0.003 to 0.4, especially 0.005 to 0.2 is preferable.
[0012]
The thickness of each polymer layer in the laminate can be appropriately determined according to the purpose of use and the like, but is generally 0.1 to 200 μm, especially 0.5 to 100 μm, particularly 1 to 50 μm. From the viewpoint of lamination efficiency, a method of laminating a film or the like is preferable. A polymer layer having a refractive index difference on both sides of the polymer film is provided, the film F was the same as on both sides of the polymer layer films, terms such as laminated efficiency can be used interchangeably on the front and back when stacking it More advantageous.
[0013]
In the case where adhesion between polymer layers is required due to lamination using a film or the like, the adhesion treatment is performed by, for example, a method in which the laminate is heated to a temperature at which the polymer layer forming the lamination interface melts and pressed. be able to. Moreover, the system etc. which carry out the adhesion | attachment process through a polymer-type adhesive agent can also be taken. As the adhesive, an appropriate one such as a hot melt type or a pressure sensitive adhesive type can be used.
[0014]
There are no particular limitations on the polymer species with different refractive indexes that form the laminate, and any suitable type may be used. In general, a polymer excellent in transparency can be preferably used, but is not limited thereto. Incidentally, examples of the polymer include acrylic polymers and silicone polymers, polyesters and polyurethanes, polyether sulfones and polycarbonates, polyamides and polyimides, polyolefins and acetate polymers, polyvinyl alcohol and polystyrene, vinyl acetate polymers and polyvinyl chloride, Examples include polyethers, various rubber polymers, various liquid crystal polymers, thermosetting resins such as phenolic resins, melamine resins, acrylic resins, urethane resins, acrylic urethane resins, epoxy resins, and silicone resins, and ultraviolet curable resins. .
[0015]
The refractive index characteristics at the interface of the polymer layers having different refractive indexes in the different polymer array plate according to the present invention may be appropriate such as a step index type or a graded index type. By the way, graded index type refractive index characteristics are, for example, a method in which a clear interface is lost by fusing treatment so that the polymers forming those layers are mixed and fused together at the interface of polymer layers with different refractive indexes. It can be given by.
[0016]
In addition, the interface of the polymer layers having different refractive indexes in the different polymer array plates may be a smooth surface as illustrated in FIGS. 1 and 2, but the unevenness as illustrated in FIG. It is preferably formed in a structure. Such a concavo-convex structure can be obtained by, for example, a method of laminating a film having a roughened surface through a pressure-sensitive adhesive layer or the like.
[0017]
From the viewpoint of improving the diffusion effect as described above, it is also effective to disperse and contain fine particles having different refractive indexes in at least one polymer layer having different refractive indexes forming a repeating unit. The uneven structure described above can be imparted to the interface of the polymer layer based on the contained fine particles.
[0018]
As the fine particles having different refractive indexes, appropriate organic or inorganic particles can be used. Examples include metal oxide particles such as silica, alumina, titania and zirconia, tin oxide and indium oxide, cadmium oxide and antimony oxide, metal particles and other inorganic fine particles, and crosslinked or uncrosslinked polymers. Organic fine particles made up of and the like. Transparent fine particles can be preferably used from the standpoint of inconspicuousness.
[0019]
In the production of the heterogeneous polymer array plate according to the present invention , the laminate formed by laminating and sticking the above-mentioned film F is cut into thin layers so that the stacking direction is the width direction, and the stacked polymer layers are aligned in the plane direction. comprising Te thin layer body can be performed by a method of forming a.
[0020]
As illustrated in FIG. 7, an appropriate cutting means 6 such as a cutter can be used for cutting, but the cutting process may be performed on the surface 51 on which the stacked structure of the stacked body 5 appears. It is preferable from the viewpoint of the stability of the cutting treatment due to the crystallization, and in turn, the uniform cutting ability. In the cutting process in the stacking direction, the polymer layers 11 and 12 to be cut are sequentially changed, and unstable cutting is likely to occur due to changes in cutting characteristics due to differences in physical properties.
[0021]
Further, at the time of the cutting, as shown in FIG. 8, the laminate 5 can be subjected to a deformation process. That is, the cutting process can be performed without applying a deformation process to the laminate 5 to obtain a heterogeneous polymer array plate in which the polymer layers 1 and 2 as illustrated in FIG. 1 are arranged in a direction perpendicular to the plate plane. It is possible to obtain a heterogeneous polymer array plate in which the polymer layers 1 and 2 are inclinedly arranged in the thickness direction with respect to the plate plane as illustrated in FIG.
[0022]
The above-described slant arrangement of the polymer layers is effective in improving the diffusion effect because the transmitted light passes through the polymer layer interface having a different refractive index. The tilt angle in the tilted arrangement of the polymer layer is preferably less than the critical angle from the viewpoint of preventing total reflection, and therefore the tilt angle can be appropriately determined in the range of 0 degree to the critical angle.
[0023]
The deformation process of the laminated body described above can be performed by an appropriate method. In the example of FIG. 8, the laminated body is wound around the press shaft 71 to form a cylindrical body 52, which is attached to the female die 72 together with the press shaft 71, and subjected to a pressing process, and the cylindrical body is loaded with a shifting force in the stacking direction. The polymer layers forming the laminate are arranged in an inclined manner so that the state is fixed.
[0024]
Then, as illustrated in FIG. 9, a cylindrical body 52 in which the formed polymer layers are arranged in an inclined manner is cut through the cutting means 6 to obtain a thin layer body, so that different types of polymer layers as shown in FIG. A polymer array plate can be obtained. In addition, the dissimilar polymer arrangement | sequence board obtained by the cutting process can perform appropriate processes, such as a grinding process, for the purpose of surface finishing, thickness adjustment, etc. as needed.
[0025]
The thickness of the dissimilar polymer array plate according to the present invention can be appropriately determined according to the purpose of use and the like, and can be 1 mm or more. In general, from the viewpoint of handling properties such as lightness and flexibility, the thickness is 1 μm to 1 mm, especially 5 to 500 μm, particularly 10 to 200 μm.
[0026]
The heterogeneous polymer array plate according to the present invention exhibits various optical characteristics such as light transmittance and diffusivity based on a structure in which polymer layers having different refractive indexes are arrayed in a plane direction. It can be preferably used as an optical element.
[0027]
【Example】
Example 1
A poly (methyl methacrylate) layer with a thickness of 2 μm is formed on both sides of a polycarbonate cast film with a thickness of 6 μm. Ten thousand layers of the polymethyl methacrylate layer are laminated and heat-pressed, and the lamination interface is adhered to the laminated layer to a thickness of 10 cm. A body was obtained, and it was deformed by the method according to FIG. 8 to tilt the polymer layer by 20 degrees.
[0028]
The inclined cylindrical body is cut into thin layers through a cutter so that the laminating direction is the width direction, and the laminated film layers are arranged in the plane direction and have a thickness of 50 μm and a length of 30 cm (width 10 cm). An inclined array type heterogeneous polymer array plate as shown in FIG. 2 was obtained. When perpendicular parallel light was incident on the different polymer array plate, transmitted light composed of diffused light could be obtained with high light transmittance.
[Brief description of the drawings]
FIG. 1 is a cross-sectional showing an outline of a heterologous polymer sequences plate Examples Figure 2 is a cross-sectional view showing a schematic of another heterologous polymer sequences plate Example 3] further shows a schematic of another heterologous polymer sequences plate Example cross-sectional view and FIG. 4 is an explanatory view illustration 6 another stack forming example of illustration Figure 5 product layer formation examples shown a reference example of the laminated body 7 laminates cut examples Explanatory drawing of FIG. 8 Explanatory drawing of a laminated body modification processing example FIG. 9 Explanatory drawing of another laminated body cutting example [Explanation of symbols]
1, 2, 3, 4: Polymer layer
11, 12, 14: Polymer film
13: Polymer coating layer
18: Laminated film 5, 52: Laminate 6: Cutting means

Claims (3)

ポリマー層としてのポリマーフィルムの両面に、そのポリマーフィルムを形成するポリマー層とは屈折率の異なるポリマー層を設けてなり、そのフィルム両面に設けたポリマー層が同じポリマーからなるフィルムFを積層密着してなる積層体を、その積層方向が幅方向となるように薄層切断して、積層したポリマー層が平面方向に配列してなる薄層体を形成することを特徴とする異種ポリマー配列板の製造方法。A polymer layer having a refractive index different from that of the polymer layer forming the polymer film is provided on both sides of the polymer film as the polymer layer, and the film F made of the same polymer is laminated and adhered to both sides of the film. The laminated body is cut into thin layers such that the laminating direction is the width direction, and a thin layer body is formed by arranging the laminated polymer layers in a plane direction. Production method. 請求項1に記載の異種ポリマー配列板の製造方法において、ポリマーフィルムの両面に設けたポリマー層がキャスト方式で形成したものである異種ポリマー配列板の製造方法。The method for producing a heterogeneous polymer array plate according to claim 1 , wherein the polymer layers provided on both sides of the polymer film are formed by a cast method. 請求項1又は2に記載の異種ポリマー配列板の製造方法において、各ポリマー層の厚さが200μm以下のフィルムFを用いた積層体をそれに積層方向のズラシ力を負荷して各ポリマー層が厚さ方向に傾斜配列した変形処理下に薄層切断する異種ポリマー配列板の製造方法。3. The method for producing a heterogeneous polymer array plate according to claim 1, wherein each polymer layer has a thickness obtained by applying a laminating force in a laminating direction to a laminate using a film F having a thickness of each polymer layer of 200 μm or less. A method for producing a heterogeneous polymer array plate in which a thin layer is cut under a deformation process inclined in the vertical direction.
JP04438698A 1998-02-09 1998-02-09 Method for producing heterogeneous polymer array plate Expired - Lifetime JP4130492B2 (en)

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