JP4129623B2 - Evaluation device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention drives a measurement object or a detector with power generated by a driving source to generate a predetermined relative motion between the measurement object and the detector, and the measurement object based on an output signal of the detector at that time. It is related with the evaluation apparatus which performs evaluation with respect to.
[0002]
[Prior art]
FIG. 4 shows a schematic configuration of a conventional evaluation apparatus.
The evaluation device 41 rotationally drives the measurement object 45 with the rotational force generated by the drive source 43 to generate a predetermined relative motion between the measurement object 45 and the detector 46, and the detector 46 at that time The output signal is collected and analyzed by information processing means (not shown), and the measurement object 45 is evaluated.
[0003]
The drive source 43 is usually an electric motor and is installed on a power source support portion 48 a formed on the gantry 48. The arrow (A) in the figure is the rotation direction of the output shaft of the motor.
The measurement object 45 is, for example, a cylindrical rolling bearing outer ring or inner ring, and is supported by a measurement target support portion 48b formed on the gantry 48 so as to be rotatable about its own rotation axis. The arrow (B) in the figure is the direction of rotation of the measurement object 45 on the measurement object support 48b.
[0004]
The detector 46 has a stylus 46a whose tip abuts on the surface 45a of the measurement object 45. When the measurement object 45 rotates, the stylus 46a is shaken due to irregularities or vibrations of the surface 45a. An electric signal corresponding to the shake of 46a is output. The detector 46 is attached to a detection means support 48c formed on the gantry 48 so that the tip of the stylus 46a contacts the surface 45a.
Rotational transmission from the output shaft of the drive source 43 to the spindle of the measurement target support portion 48b is appropriately performed via the power transmission mechanism 49. The illustrated power transmission mechanism 49 is a so-called belt-type power transmission mechanism.
[0005]
The information processing means for processing the output signal of the detector 46a is a computer that processes input data based on reference data and arithmetic expressions stored in advance as judgment criteria, for example, based on the output signal of the detector 46a. The roundness of the surface of the object is evaluated, or the vibration characteristics of the object to be measured are evaluated.
[0006]
As for the evaluation apparatus having such a configuration, a plurality of manufacturers have developed measurement devices, device dimensions, and the like that are devised according to applications.
For example, for evaluation of the roundness of the inner and outer rings of rolling bearings and the rolling surface of rolling elements, the Talyron type roundness measuring machine of Taylor Hobson (UK) is well known. A webiness measuring instrument is well known for evaluating the surface waviness quality. In addition, the Anderon meter of Ebara Laboratories is famous for evaluating the vibration characteristics of rolling bearings.
[0007]
[Problems to be solved by the invention]
By the way, as an evaluation device that evaluates the roundness and vibration characteristics of rolling members of rolling bearings, improvement in measurement accuracy is required along with higher accuracy and higher performance of bearings to be measured. In addition, it has been proposed to use an air spindle capable of realizing ultra-high accuracy rotation for the spindle provided in the measurement target support portion 48b. However, the conventional evaluation apparatus 41 shown in FIG. 4 has a problem that even if an expensive high-performance component such as an air spindle is adopted, it cannot be fully utilized for improving measurement accuracy.
[0008]
The power source support 48a, the measurement target support 48b, and the detection means support 48c are all formed on a common single frame 48, so that the vibration generated by the drive source 43 is shown in FIG. As indicated by the solid arrows, it propagates on the gantry 48 and is transmitted to the measurement object 45 on the measurement object support portion 48b and the detector 46 on the detection means support portion 48c. That is, the vibration generated by the driving source 43 is added to the original measurement vibration caused by the unevenness of the surface of the measurement object 45 and the vibration characteristics of the measurement object 45 itself, and is detected by the detector 46. This is because the S / N ratio of the vibration to be detected is reduced, leading to a decrease in measurement accuracy and a decrease in reliability of measurement results.
[0009]
The present invention has been made in view of the above circumstances, and vibration generated by the drive source is difficult to be transmitted to the measurement object on the measurement object support part or the detector on the detection means support part, and is thus detected by the detector. An evaluation device that can improve the measurement accuracy and reliability of measurement results by improving the signal-to-noise ratio of the signal and making full use of the high accuracy and high performance of the spindle to improve the measurement accuracy. The purpose is to provide.
[0010]
[Means for Solving the Problems]
Evaluation apparatus according to the present invention for achieving the above object, and rotating the workpiece by the power generated by the drive Dogen, to generate a predetermined relative movement between the workpiece and the detector, wherein In an evaluation apparatus that collects and analyzes an output signal of a certain physical quantity detected by a detector by an information processing means and evaluates the measurement object,
A power source that supports rotation of the object to be measured by the measurement object support unit that transmits rotation from the spindle to the object to be measured via a rotation mechanism including a spring, a spacer, a centering ball, and a driving arm. The support portion is provided on a second stand independent from the first stand having the detection means support portion for supporting the measurement target support portion and the detector.
[0011]
Then, according to the above Ki構 formed, since the first frame supporting the workpiece and the detector, and the second frame supporting the drive source is a separate structure independent of each other, a workpiece Compared with a conventional evaluation device in which the detector and the drive source are mounted on the same frame, the vibration generated by the drive source propagates through the frame and directly measures the object on the measurement target support unit or the detection means support unit. It is hard to be transmitted to the upper detector. Therefore, the vibration generated by the drive source is excluded from the factors that decrease the SN ratio of the vibration detected by the detector.
Then, by the air spindle rotating mechanism of the measuring object supporting section is used, it is possible to achieve the realization of ultra-precision rotation, the improvement of the combined measurement accuracy and separate structure of the stand.
[0012]
Note that it preferably, in the evaluation device, when configuration using belts made of elastic material in order to transmit the output of the driving source to the measured object.
In this way, when the vibration generated by the drive source propagates through the belt used in the power transmission mechanism, it is reduced by the vibration suppression function based on the elastic characteristics of the belt, and the drive source is generated via the power transmission mechanism. It is also possible to suppress the vibration from being transmitted to the measurement object.
[0013]
Preferably, in the evaluation apparatus, when the roundness of the rolling surface of the bearing component or the unevenness of the surface of the rolling surface is evaluated, the measurement target support unit rotatably supports the measurement object. The detector is configured to output an electrical signal in accordance with the displacement of the stylus brought into contact with the surface of the measurement object, and the surface shape of the measurement object is determined from the output signal of the detector during the rotational movement of the measurement object. It is preferable that the evaluation be performed.
[0014]
Further, in the evaluation apparatus, when the vibration characteristics at the time of rotation of the bearing are evaluated, the measurement object support portion rotatably supports the bearing as the measurement object, and the detector is brought into contact with the surface of the measurement object. The information processing means may be configured to evaluate the vibration characteristics of the bearing from the output signal of the detector during rotation of the bearing as the measurement object. .
Further, in the evaluation device, when evaluating the characteristics of the rolling elements of the rolling bearing, the measurement object may be a rolling element of the rolling bearing.
[0015]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an evaluation apparatus according to the invention will be described in detail with reference to the accompanying drawings.
1 and 2 show a reference example of an evaluation apparatus according to the present invention, FIG. 1 is a schematic configuration diagram of the evaluation apparatus, and FIG. 2 is an actual measurement time of the evaluation apparatus shown in FIG. 1 and a conventional apparatus. It is explanatory drawing which shows the comparison of SN ratio.
[0016]
The evaluation apparatus 51 of the reference example includes a measurement object support unit 62 that supports the measurement object 53, a detector 55 for detecting a certain physical quantity with respect to the measurement object 53, and a detection that supports the detector 55. Means support 64, a drive source 57 that generates power necessary for relative movement for measurement between the detector 55 and the measurement object 53, a power source support 73 that supports the drive source 57, and a drive source 57 Is transmitted to the measurement object 53 to generate a relative movement for measurement between the detector 55 and the measurement object 53, and the relative movement between the detector 55 and the measurement object 53. And an information processing means (not shown) for collecting and analyzing the output signal of the detector 55 and evaluating the measurement object 53.
[0017]
Further, the measurement object support unit 62 and the detection means support unit 64 are provided on the first frame 61, and the power source support unit 73 is provided on a second frame 71 independent from the first frame 61.
[0018]
The drive source 57 is an electric motor that outputs a rotational force, and an arrow (C) in the figure indicates the rotation direction of the output shaft of the motor.
The measurement object 53 is, for example, a cylindrical rolling bearing outer ring or inner ring, and is supported by the measurement target support portion 62 on the first pedestal 61 so as to be rotatable about its own rotation axis. The arrow (d) in the figure is the rotation direction of the measurement object 53 on the measurement target support portion 62.
[0019]
The detector 55 has a stylus 55a whose tip abuts on the surface 53a of the measurement object 53. When the measurement object 53 rotates, if the stylus 55a shakes due to unevenness or vibration of the surface 53a, the stylus An electric signal corresponding to the fluctuation of 55a is output. The detector 5 5, so that the tip of the stylus 55a abuts against the surface 53a, is attached to the detecting unit support portion 64 formed on the first frame 61.
[0020]
In the case of this reference example , the power transmission mechanism 59 for rotating the measurement object 53 by transmitting the rotation from the output shaft of the drive source 57 to the air spindle of the measurement object support unit 62 includes a belt 81 made of an elastic material, This is a belt-type power transmission mechanism combined with a pulley (not shown) around which the belt is wound.
[0021]
The information processing means (not shown) that processes the output signal of the detector 55 is a computer that processes input data based on reference data or arithmetic expressions stored in advance as a determination reference. In the case of this embodiment, For example, based on the output signal of the detector 55, the surface shape of the rolling component such as the roundness of the surface of the bearing component as the measurement object is evaluated.
[0022]
In the evaluation apparatus 51 described above, the first gantry 61 that supports the measurement object 53 and the detector 55 and the second gantry 71 that supports the drive source 57 have separate structures. Compared with the conventional evaluation apparatus in which the measurement object 53, the detector 55, and the drive source 57 are mounted on the same frame, the vibration generated by the drive source 57 propagates through the frame and directly on the measurement target support unit 62. Therefore, the vibration generated by the drive source 57 is excluded from the cause of the decrease in the S / N ratio of the vibration detected by the detector 55.
Therefore, the signal-to-noise ratio of the signal detected by the detector 55 can be improved. For example, improving the accuracy and performance of components such as the spindle of the rotating mechanism mounted on the evaluation device 51 can be improved. Taking full advantage, it is possible to improve the measurement accuracy and the reliability of measurement results.
[0023]
In this reference example , the power transmission mechanism 59 that transmits the output of the drive source 57 to the measurement object 53 is a belt-type power transmission mechanism that uses a belt made of an elastic material. When propagating through the belt 81 used in the transmission mechanism 59, the vibration is reduced by the vibration suppression function based on the elastic characteristics of the belt, and the vibration generated by the drive source 57 is transmitted to the measurement object 53 and the like via the power transmission mechanism 59. This can be suppressed, and the SN ratio of the signal detected by the detector 55 can be further improved.
[0024]
Therefore, for example, when evaluating the roundness of the surface of a sphere as a rolling element to be installed between the inner and outer rings used in the bearing or the unevenness of the surface of the rolling surface, the reliability of the evaluation result is improved. be able to.
[0025]
In order to verify the effectiveness of the configuration of the reference example , the SN ratio of the vibration signal detected by the detector when the evaluation test of the surface shape of the cylindrical measuring unit is performed is the same as the evaluation device 51 of the reference example. The measurement was made with the conventional evaluation apparatus 41 shown in FIG. The measurement results are as shown in FIG. 2, and it was confirmed that the SN ratio was remarkably improved in the apparatus of this reference example .
[0026]
In the evaluation apparatus of the present invention, the specific configuration of the power transmission mechanism for rotating the measurement object and the measurement target support portion is not limited to the configuration of the reference example described above, and various known structures are employed. It is possible.
FIG. 3 shows an embodiment of the evaluation apparatus according to the present invention.
The evaluation device 91 shown here evaluates the undulation of the surface of the ball 6 used as a rolling element in a ball bearing.
[0027]
Specifically, the evaluation device 91 supports the ball 6 by the rotation guide 7 such that the ball 6 can freely rotate about the vertical axis. Further, the ball 6 is rotated about the vertical axis by the rotational force transmitted from the spindle 22 rotated by the drive source through the compression coil spring 26, the spacer 27, the aligning ball 28, and the drive arm 8. Let A flat front end surface 11 of the stylus 10 of the detector is abutted against the equator portion of the ball 6, and the undulation of the surface of the equator portion is detected as vibration during rotation around the vertical axis.
Also in this evaluation apparatus 91, the first guide 20 is equipped with the rotation guide 7 that supports the ball 6 that is a measurement object, and a second stand that is independent from the first stand 20 is prepared. By mounting the drive source for driving the spindle 22 on the second frame, the vibration generated by the drive source is transmitted to the ball 6 and the detector as in the case of the above-described reference example , and the SN It is possible to prevent the ratio from being lowered.
[0028]
The application of the evaluation apparatus according to the present invention is not limited to the evaluation of the surface shape of the measurement object. For example, the measurement target support unit is configured to rotatably support a bearing as a measurement object, and the detector is configured to output an electrical signal in accordance with the displacement of a stylus brought into contact with the surface of the measurement object. The processing means is configured to evaluate the vibration characteristics of the bearing from the output signal of the detector at the time of rotation of the bearing as the measurement object, thereby evaluating the vibration characteristics such as the natural frequency and resonance frequency of the bearing. It can also be diverted to.
[0029]
【The invention's effect】
According to the evaluation device of the present invention, since a first frame that supports the workpiece and the detector, and the second frame supporting the drive source is a separate structure independent of each other, a workpiece Compared with a conventional evaluation device in which the detector and the drive source are mounted on the same frame, the vibration generated by the drive source propagates through the frame and directly measures the object on the measurement target support unit or the detection means support unit. It is hard to be transmitted to the upper detector. Therefore, the vibration generated by the drive source is excluded from the factors that decrease the SN ratio of the vibration detected by the detector. Therefore, by improving the signal-to-noise ratio of the signal detected by the detector, for example, the high precision and high performance of components such as the spindle of the rotating mechanism mounted on the evaluation apparatus can be fully utilized to improve the actual measurement precision. It is possible to improve measurement accuracy and reliability of measurement results.
[0030]
According to the second aspect of the present invention, when the vibration generated by the drive source propagates through the belt used in the power transmission mechanism, the vibration transmission function is reduced by the elastic characteristic of the belt, and the power transmission mechanism is Therefore, it is possible to prevent the vibration generated by the drive source from being transmitted to the measurement object or the like, and to further improve the SN ratio of the signal detected by the detector.
[0031]
Moreover, if it is set as the structure of Claim 3 , it is useful as an evaluation apparatus which evaluates the surface shape of a measurement object, such as evaluation of the roundness of the rolling surface of a bearing component, the unevenness | corrugation of the surface of a rolling surface, etc. . The present invention can also be applied to an apparatus described in Japanese Patent Application Laid-Open No. 2001-91241 (invention name: surface shape evaluation method and evaluation apparatus for spherical body).
[0032]
Furthermore, if it is set as the structure of Claim 4 , it is useful as an evaluation apparatus which evaluates the vibration characteristic of a measured object, such as evaluation of the vibration characteristic at the time of rotation of a bearing.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram of a first embodiment of an evaluation apparatus according to the present invention.
FIG. 2 is an explanatory diagram showing a comparison of SN ratios during measurement between the evaluation apparatus shown in FIG. 1 and a conventional apparatus.
FIG. 3 is a longitudinal sectional view of an essential part of a second embodiment of an evaluation apparatus to which the present invention is applied.
FIG. 4 is a schematic configuration diagram of a conventional evaluation apparatus.
[Explanation of symbols]
51 Evaluation Device 53 Measurement Object 53a Surface 55 Detector 55a Stylus 57 Drive Source (Motor)
59 Power transmission mechanism 61 First mount 62 Measuring object support 64 Detection means support 71 Second mount 73 Power source support 81 Belt

Claims (4)

The measurement object is rotationally driven by the power generated by the drive source to generate a predetermined relative motion between the measurement object and the detector, and an output signal of a certain physical quantity detected by the detector is processed by the information processing means. In an evaluation device that collects and analyzes and evaluates the measurement object,
A power source that supports rotation of the object to be measured by the measurement object support unit that transmits rotation from the spindle to the object to be measured via a rotation mechanism including a spring, a spacer, a centering ball, and a driving arm. An evaluation apparatus, wherein the support portion is provided on a second stand independent from the first stand having a detection means support portion for supporting the measurement target support portion and the detector. The evaluation apparatus according to claim 1, wherein a belt made of an elastic material is used to transmit the output of the driving source to the measurement object. The measurement object support unit rotatably supports the measurement object, and the detector outputs an electrical signal according to the displacement of the stylus in contact with the surface of the measurement object. The evaluation apparatus according to claim 1, wherein the surface shape of the measurement object is evaluated from an output signal of the detector. The evaluation apparatus according to claim 1, wherein the measurement object is a rolling element of a rolling bearing, and the measured characteristics of the rolling element of the rolling bearing are evaluated.

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