JP4127498B2 - Electromagnet device and method of manufacturing electromagnet device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electromagnet device used in, for example, a charged particle acceleration device and a manufacturing method thereof.
[0002]
[Prior art]
For example, a deflection electromagnet is used to deflect an electron beam in an electron beam accelerator. A conventional bending electromagnet is configured such that a main coil is wound around both ends of a magnetic pole opened by a C-shaped iron core, and a magnetic field is formed between the magnetic poles of the opening. Such a deflection electromagnet inevitably causes an error in the magnetic field due to manufacturing and installation errors, and the beam trajectory deviates from the ideal value. In order to make the beam trajectory as close to the ideal value as possible, a plurality of correction windings are provided on the magnetic pole of the opening, and the beam position is detected based on the monitor signals of the plurality of beam position monitors and the radiation monitor, Some control the amount of excitation of each correction winding (see, for example, Patent Document 1).
[0003]
[Patent Document 1]
Japanese Patent No. 3133155 (page 3, FIG. 1 and FIG. 3)
[0004]
[Problems to be solved by the invention]
In a conventional deflection electromagnet as an electromagnet device, a plurality of correction windings are provided to correct a magnetic field. However, the correction winding is provided in a form embedded in a magnetic pole core, and the magnetic pole core is a correction winding. Since it is not divided for each, even if it is attempted to control the magnetic field by controlling the excitation amount of the correction winding, there is a limit to the control capability.
An object of the present invention is to solve the above-described problems, to obtain an electromagnet device capable of easily and accurately controlling the magnetic field of a magnetic pole, and to provide a method for manufacturing the electromagnet device.
[0005]
[Means for Solving the Problems]
Electromagnet device according to the invention, which has a yoke portion which connects the pair of magnetic poles and those magnetic poles which face each other is provided a gap, each pole is provided on the side where the magnetic poles are opposed to each other plate-shaped or film Cores laminated in a direction perpendicular to the opposing direction of the magnetic poles and a magnetic core provided around the iron core to excite the iron core, the thickness direction being orthogonal to the opposing direction of the magnetic poles It has a plurality of partial electromagnets having excitation coils formed of plate-like or thin-film conductors arranged in the direction .
[0006]
The method of manufacturing an electromagnet device according to the present invention includes a pair of magnetic poles facing each other with a gap and a yoke portion connecting these magnetic poles, and each magnetic pole is provided on the side where the magnetic poles face each other. An iron core in which a predetermined number of plate-like or thin-film magnetic materials are stacked in a direction perpendicular to the opposing direction of the magnetic poles, and provided around the iron core to excite the iron core, the thickness direction being opposed to the magnetic poles A method of manufacturing an electromagnet device having a plurality of partial electromagnets having an excitation coil formed of a plate-like or thin-film conductor disposed so as to be in a direction orthogonal to the direction , It has the following steps.
A. An annular core manufacturing process for manufacturing an annular core having a straight portion by winding a plate-like or thin-film magnetic material into a square shape or a field track shape a predetermined number of turns.
I. A step of manufacturing the iron core by cutting the linear portion of the annular core into a predetermined length.
C. An excitation coil forming step in which a plate-like or thin-film conductor that circulates around the iron core is provided to form an excitation coil.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 FIG.
1 to 5 show an embodiment of the present invention. FIG. 1A is a configuration diagram of an electromagnet device, FIG. 1B is a detailed configuration diagram of a partial electromagnet device, and FIG. It is a side view of the partial electromagnet apparatus of 1 (b). 3 and 4 are explanatory views for explaining a method of manufacturing the partial electromagnet device, and FIG. 5 is an explanatory view showing an example of correcting the magnetic flux distribution on the magnetic pole surface. In FIG. 1A, an electromagnet device 1 has a yoke portion 3 and a pair of partial electromagnet devices 5 facing each other with a gap provided at an inner end portion of the yoke portion 3 as a whole. Is formed. Although not shown, a vacuum duct through which an electron beam to be accelerated passes is disposed in the facing gap between the pair of partial electromagnet devices 5. The yoke part 3 is formed by laminating silicon steel plates.
[0008]
As shown in FIG. 1B, the partial electromagnet device 5 includes a predetermined number (5 in FIG. 1B) of partial electromagnets 51 arranged in parallel via an insulator 58. In addition, the manufacturing method of the partial electromagnet apparatus 5 is mentioned later. The outer dimensions of the partial electromagnet 51 are a width W and a height H, and the outer dimensions of the core stack 53 described later are a width Wc and a height Hc. The height H of the partial electromagnet 51 and the height Hc of the core stack 53 are Are the same (see FIGS. 1 and 2). The partial electromagnet 51 includes a core stack 53 and an exciting coil 55 that excites the core stack 53. The core stack 53 is configured by laminating a predetermined number of core materials 53a made of a thin rectangular iron-based amorphous material in the left-right direction in FIG.
[0009]
The exciting coil 55 is extended so as to protrude from the core stack 53 with the same width as the flat plate portion 55a downward from the flat plate portion 55a in FIG. The terminal portion 55b (extending to the left in FIG. 2) is extended from the flat plate portion 55a so as to protrude upward from the core stack 53 in FIG. 1B, and the adjacent ones are electrically connected to each other. It has a transition part 55c and goes around the core stack 53 to form one turn.
[0010]
Here, the manufacturing method of the partial electromagnet apparatus 5 is demonstrated with reference to FIG. First, a flat field track-shaped annular core 101 having a straight portion as shown in FIG. The cross section of the annular core 101 is as shown in FIG. The annular core 101 is manufactured by cutting along a predetermined cutting line c. Hereinafter, the manufacturing method will be described in detail. In FIG. 3A, a thin copper plate 155 (see FIG. 3B) is wound once around a flat field track core (not shown) having a straight portion. On this, an iron-based amorphous magnetic tape 153a roll-formed into a tape having a thickness of about a dozen microns is wound a predetermined number of times to form a first-layer annular partial core 101a. The depth D (see FIG. 3B) of the thin copper plate 155 is wider than the depth Dc of the amorphous magnetic tape 153a, and is the vertical direction in FIG. 3B and the direction perpendicular to the paper surface in FIG. Each has a predetermined dimension.
[0011]
Further, an insulating sheet 158 for electrical insulation is wound once on the first annular partial core 101a, and the next thin copper plate 155 is wound. The amorphous magnetic tape 153a is wound a predetermined number of times thereon, and then a thin copper plate 155 is wound around the outer periphery to form the next annular partial core 101a. By repeating the above operation, the annular partial cores 101a corresponding to the required number of layers are stacked, and the annular core 101 is manufactured. The annular core 101 is cut at a straight line portion along a cutting line c shown in FIG. 3A to produce a partial electromagnet block assembly 105 as shown in FIG. The partial electromagnet block assembly 105 has a cross section similar to that of the annular core 101 shown in FIG.
[0012]
In this embodiment, the partial electromagnet block assembly 105 includes five partial electromagnet blocks 151 arranged in parallel via an insulator 58. Then, the amorphous magnetic material tape 153a is cut to become the core material 53a, and the core stack 53 is configured by the laminated core material 53a. The thin copper plate 155 is cut into a conductor 255 having a flat plate portion 255a and upper and lower protruding portions 255b and 255c. The insulating sheet 158 is cut to become the insulator 58. Then, the lower projecting portion 255b of the conductor 255 is processed to form a terminal portion 55b, the upper projecting portion 255c is bent inward to form a connecting portion 55c, and connected to the adjacent adjacent connecting portion 55c, and the conductor 255a remains as it is. A flat plate portion 55a is formed, and an exciting coil 55 is completed.
[0013]
The flat plate portion 55a functions as a magnetic insulating plate for performing magnetic insulation between the core stack 53 of the adjacent partial electromagnets 51 when used for the purpose of exciting the core at a high frequency. In this case, in order to function as a magnetic insulating plate, the thickness may be set to about several times the current penetration depth δ due to the skin effect according to the frequency of the high frequency. This penetration depth is
δ = √ (2 / ωμσ)
Here, ω: frequency μ: magnetic permeability σ: electrical conductivity, reverse current flows on both surfaces of the thin copper plate, and the partial cores 11 to 15 are separated in a magnetic circuit manner. For example, at a frequency in the vicinity of 10 MHz, a copper plate having a thickness of about one hundred hundred micrometers may be used.
[0014]
The partial electromagnets 51 configured as described above are arranged in a predetermined number (five in the drawing) adjacent to each other via the insulator 58, and the partial electromagnet device 5 (FIG. 1B) is completed. Two sets of the partial electromagnet devices 5 are fixed to the yoke portion 3 shown in FIG. Although not shown, the excitation coils 55 are each connected to an individual power source and excited to generate a magnetic field having a predetermined magnetic flux distribution in the gap between the opposed partial electromagnet devices 5.
[0015]
In each excitation coil 55, a desired magnetic field distribution can be obtained by controlling the excitation current from the power source. For example, when a uniform magnetic field is required, a magnetic field measurement device measures the magnetic flux distribution on the magnetic pole surface, converts the magnetic flux density error ΔB into a current value ΔJ, and feeds it back to the power supply. Can be obtained. In addition, when it is desired to add a multipolar component, for example, the magnetic field can be changed by adding an excitation amount corresponding to a magnetic field distribution considering the hexapolar component to each coil.
[0016]
FIG. 5 shows an example of correcting the magnetic flux distribution on the magnetic pole surface, that is, the end surface of the partial electromagnet device 5. The size and number of the partial electromagnets 51 are set according to the object to be corrected, and the current for exciting the partial electromagnets 51 is controlled, so that the magnetic flux distribution such as the curve F in FIG. Can be corrected. In addition, the magnetic flux distribution as shown by the curve P in FIG. Since the partial electromagnet 51 has the independent core stack 53 and the exciting coil 55 that can be individually excited, the required magnetic field can be set freely by exciting and controlling the partial electromagnet 51 individually. Furthermore, even when there is an excitation pattern that changes over time, the magnetic flux distribution that changes over time can be obtained by changing the additional magnetic field over time to change the magnetic convergence force during pattern excitation. I can.
[0017]
Further, the terminal portion 55b and the transition portion 55c of the exciting coil 55 are protruded from the core stack 53 to have a cooling function, so that the change in the magnetic permeability of the core stack 53 due to temperature rise is reduced, and the core material 53a is laminated. The mechanical distortion due to the temperature distribution in the direction and the temperature difference can be reduced, and the characteristics can be improved.
[0018]
Embodiment 2. FIG.
6 to 8 show another embodiment of the present invention. FIG. 6 is a configuration diagram of the electromagnet device, FIG. 7A is a plan view of the partial electromagnet device, and FIG. FIG. 7C is a distribution diagram of magnetic permeability of the amorphous material of the core stack. FIG. 8 is a configuration diagram of an annular core for manufacturing a core stack. In FIG. 6, the magnetic field generator 6 has a C-shaped yoke portion 7 having a main iron core portion 7a at an opening, and a main coil 8 wound around the main iron core portion 7a. The yoke portion 7 is formed by laminating silicon steel plates. A pair of partial electromagnet devices 9 facing each other with a gap are fixed to the main core portion 7a. Although not shown, a vacuum duct through which an electron beam to be accelerated passes is disposed in the facing gap between the pair of partial electromagnet devices 9.
[0019]
In FIG. 7A, the partial electromagnet device 9 has a predetermined number of partial electromagnets 91 arranged in parallel via the partial electromagnet device 98. The external dimensions of the partial electromagnet 91 are the width W2 and the height H2, and the external dimensions of the core stack 93 to be described later are the width Wc2 and the height Hc2 (see FIGS. 6 and 7). Only three partial electromagnets 91 are shown in FIG. The partial electromagnet 91 includes a core stack 93 and an exciting coil 95 that excites the core stack 93.
[0020]
The core stack 93 is configured by laminating a predetermined number of core materials 93a made of a thin rectangular amorphous material in the left-right direction in FIG. 7B. As the core material 93a constituting the core stack 93, a material having different magnetic permeability depending on the arrangement position is used. For example, in this embodiment, as shown in FIG. 7 (c), a core material 93a having a high magnetic permeability is used from the center to the end in the left-right direction in FIG. 7 (c). A method for manufacturing the core stack 93 will be described later.
[0021]
The exciting coil 95 is made of a strip-shaped thin copper plate, has an exciting coil 95b, and circulates around the core stack 93 to form one turn. In this embodiment, the exciting coil 95 is wider than the core stack 93 (H2> Hc2 in FIG. 7B), and one side (the upper side in FIG. 7B) is more than the core stack 93. Also protrudes by a predetermined dimension, and the other side is flush with the core stack 93. And the partial electromagnet apparatus 9 is attached so that the one surface side of this exciting coil 95 may contact | connect the main iron core part 7a (FIG. 6).
[0022]
Here, a method of manufacturing the core stack 93 will be described with reference to FIG. It is known that the magnetic permeability of an iron-based amorphous material changes by changing the tension applied when it is wound in an annular shape. Using this phenomenon, the core stack 93 is manufactured by gradually changing the magnetic permeability of the core. First, a flat field track-shaped annular core 193 having a straight portion as shown in FIG. 8A is wound. The cross section of the annular core 193 is as shown in FIG. The annular core 193 is cut along the cutting line c to manufacture the core stack 93.
[0023]
As the annular core 193, a flat field track-shaped core (not shown) having a straight portion is prepared, and an iron-based amorphous magnetic tape 193a roll-formed into a tape having a thickness of about a few tens of micrometers is formed. Wind it up. From the start of winding until the winding thickness becomes (Wc2) / 2 (FIG. 7B), the winding is performed while gradually increasing the tension. From the time when the winding thickness exceeds (Wc2) / 2 until the winding thickness reaches Wc2, winding is performed while gradually decreasing the tension, and at the end of winding, the initial tension is restored.
[0024]
As a result, the annular core 193 in FIG. 8 is completed, and the core stack 93 is manufactured by cutting along the cutting line c in FIG. A thin copper plate serving as the exciting coil 95 is wound around the core stack 93 so as to make one turn, and the partial electromagnet 91 shown in FIG. 7 is completed. A predetermined number of the partial electromagnets 91 are arranged in parallel via an insulator 98 to form a partial electromagnet device 9.
[0025]
For example, when the strength of a magnetic field applied when an amorphous material is annealed is changed, the magnetic permeability becomes different. Using this phenomenon, an amorphous material having a different magnetic permeability is manufactured, and an amorphous magnetic material tape 193a having a different magnetic permeability is used depending on the position of use, that is, when the annular core 193 is manufactured, according to the progress of winding. By winding the core material 93a, the core material 93a having different magnetic permeability can be disposed between the central portion and both end portions of the core stack 93. In this way, core materials having different magnetic permeability can be manufactured using the same magnetic material, and the core material 93a can be made inexpensive. In addition, a tape-shaped iron-based amorphous magnetic material tape is wound around the winding start portion and winding end portion of the annular core, and the central portion of the winding thickness is formed of a material having high magnetic permeability such as a nanocrystal material. You may make it wind a magnetic material.
[0026]
According to this embodiment, by changing the magnetic permeability of the core material 93a little by little from the end of the core stack 93 toward the center, the magnetic permeability is arranged as shown in FIG. A magnetic field distribution containing multipolar components such as poles can be created. Conversely, it is also possible to create a uniform magnetic field distribution that cancels the multipole components at the end of the main iron core. Of course, by providing a power source for exciting each of the exciting coils for exciting the core stack 93 and controlling the exciting current, it is possible to create a desired magnetic flux distribution magnetization.
[0027]
Further, the height H2 of the exciting coil 95 is made higher than the height Hc2 of the core stack 93, and the exciting coil 95 is protruded from the core stack 93 so as to have a cooling function, so that the change in permeability due to temperature rise is reduced. In addition, the temperature distribution in the stacking direction can be reduced, the mechanical strain due to the temperature difference can be reduced, and the characteristics can be improved.
[0028]
In each of the above embodiments, the core material of the core stack 53 is shown using an amorphous material or a nanocrystal material. However, the present invention is not limited to this, and other materials such as a silicon steel plate and an electromagnetic steel plate are used. Even when using, the same effect is obtained.
[0029]
【The invention's effect】
As described above, the electromagnet device according to the present invention has a pair of magnetic poles facing each other with a gap and a yoke portion connecting these magnetic poles, and each magnetic pole is on the side where the magnetic poles face each other. provided plate-like or film-like magnetic material is a predetermined number pole thickness direction poles be for the opposing direction and are iron core laminated in a direction orthogonal to excite the iron core provided around the this core of Since the partial electromagnet has a plurality of partial electromagnets having excitation coils formed of plate-like or thin-film conductors arranged so as to be in a direction orthogonal to the opposing direction of the Since the iron core and the exciting coil that can individually excite the iron core are provided, the required magnetic field can be freely set by individually exciting and controlling the partial electromagnets.
[0030]
The method of manufacturing an electromagnet device according to the present invention includes a pair of magnetic poles facing each other with a gap and a yoke portion connecting these magnetic poles, and each magnetic pole is provided on the side where the magnetic poles face each other. An iron core in which a predetermined number of plate-like or thin-film magnetic materials are stacked in a direction perpendicular to the opposing direction of the magnetic poles, and provided around the iron core to excite the iron core, the thickness direction being opposed to the magnetic poles A method of manufacturing an electromagnet device having a plurality of partial electromagnets having an excitation coil formed of a plate-like or thin-film conductor disposed so as to be in a direction orthogonal to the direction , It has the following steps.
A. An annular core manufacturing process for manufacturing an annular core having a straight portion by winding a plate-like or thin-film magnetic material into a square shape or a field track shape a predetermined number of turns.
I. A step of manufacturing the iron core by cutting the linear portion of the annular core into a predetermined length.
C. An excitation coil forming step in which a plate-like or thin-film conductor that circulates around the iron core is provided to form an excitation coil.
Thus, a plate-shaped or thin-film magnetic material is wound into a square shape or a field track shape a predetermined number of turns to produce an annular core having a straight portion, and the straight portion of the annular core is cut into a predetermined length, Since an iron core is manufactured, a partial electromagnet apparatus having an independent iron core and a partial electromagnet having an exciting coil that can individually excite the iron core and capable of freely setting a required magnetic field by individually exciting and controlling the iron core. It can be manufactured easily.
[Brief description of the drawings]
FIG. 1 shows an embodiment of the present invention, FIG. 1 (a) is a configuration diagram of an electromagnet device, and FIG. 1 (b) is a detailed configuration diagram of a partial electromagnet device.
FIG. 2 is a side view of the partial electromagnet device of FIG.
FIG. 3 is an explanatory diagram for explaining a method of manufacturing a partial electromagnet device.
FIG. 4 is an explanatory diagram for explaining a method of manufacturing the partial electromagnet device.
FIG. 5 is an explanatory diagram showing an example of correcting the magnetic flux distribution on the magnetic pole surface.
FIG. 6 is a configuration diagram of an electromagnet device showing another embodiment of the present invention.
7 (a) is a plan view of the partial electromagnet device of FIG. 6, FIG. 7 (b) is a cross-sectional view, and FIG. 7 (c) is a magnetic distribution distribution of the amorphous material of the core stack.
FIG. 8 is a configuration diagram of an annular core for manufacturing a core stack.
[Explanation of symbols]
1,6 electromagnet device, 3,7 yoke part, 5,9 partial electromagnet device,
51,91 Partial electromagnet, 53,93 Core stack,
53a, 93a Core material, 55, 95 exciting coil, 101 annular core.

Claims (8)

It has a pair of magnetic poles facing each other with a gap and a yoke portion connecting these magnetic poles, and each magnetic pole is provided on the side where the magnetic poles face each other, and a plate-like or thin-film magnetic material is a predetermined material. A number of cores stacked in a direction orthogonal to the opposing direction of the magnetic poles and provided around the iron core to excite the iron core, the thickness direction being a direction orthogonal to the opposing direction of the magnetic poles An electromagnet device having a plurality of partial electromagnets having excitation coils formed of plate-like or thin-film conductors arranged as described above . The magnetic pole has a main magnetic core on which a main iron core and a main coil for exciting the main iron core are wound, and the plurality of partial electromagnets are fixed to the main iron core and the yoke is connected via the main iron core. The electromagnet device according to claim 1, wherein the electromagnet device is coupled to each other and arranged to face each other with a gap . 3. The electromagnet device according to claim 1, wherein the magnetic material is an iron-based amorphous material, and the conductor is a thin copper plate . 3. The electromagnet device according to claim 1, wherein the iron core has a magnetic permeability different from that of the magnetic material at a central portion and a magnetic permeability of the magnetic material at an end portion . 3. The electromagnet according to claim 1, wherein the partial electromagnet generates a predetermined magnetic field between the pair of magnetic poles by individually controlling a current flowing through the excitation coil. 4. apparatus. In the partial electromagnet, the excitation coil is excited by an AC power source, and the conductor forming the excitation coil acts as a magnetic insulation member that performs magnetic insulation between the partial electromagnets. The electromagnet device according to claim 1, wherein the electromagnet device is provided. It has a pair of magnetic poles facing each other with a gap and a yoke portion connecting these magnetic poles, and each magnetic pole is provided on the side where the magnetic poles face each other, and a plate-like or thin-film magnetic material is a predetermined material. A number of cores stacked in a direction perpendicular to the opposing direction of the magnetic poles, and provided around the iron core to excite the iron core, the thickness direction being a direction orthogonal to the opposing direction of the magnetic poles A method of manufacturing an electromagnet device having a plurality of partial electromagnets having excitation coils formed of plate-like or thin-film conductors arranged in this manner, and having the following steps Manufacturing method.
A. An annular core manufacturing process for manufacturing an annular core having a straight portion by winding a magnetic material in the form of a plate or thin film into a square shape or a field track shape a predetermined number of turns.
I. The step of manufacturing the iron core by cutting the linear portion of the annular core into a predetermined length.
C. An excitation coil forming step in which a plate-like or thin-film conductor that circulates around the iron core is provided to form the excitation coil. The annular core manufacturing step is characterized in that the annular core is manufactured by winding a tape-shaped amorphous material whose magnetic permeability changes depending on the applied tension, a predetermined number of turns while changing the applied tension. A method for manufacturing the electromagnet device according to claim 7 .

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