JP4122905B2 - Base plate for high-rigidity surface plate installation, high-rigidity surface plate installation method using base plate, floor structure with high-rigidity surface plate installed, and clean room equipped with this floor structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a base plate for installing a high-rigidity surface plate, a high-rigidity surface plate installation method using the base plate, a floor structure in which the high-rigidity surface plate is installed, and a clean room equipped with this floor structure.
[0002]
[Prior art]
In a precision factory represented by a semiconductor factory, a surface plate having high rigidity is used for installation of a precision machine that does not like vibration. This surface plate is made of stainless steel plate, precast concrete plate or aluminum die cast plate, etc., and its vertical level (for example, 1 to 4 × 10 ⁸ N / m = 100) is adjusted while adjusting the overall level. Various ideas are required to obtain (~ 400tonf / cm) on a surface plate.
[0003]
The value of the vertical rigidity finally required on the surface plate is determined by the serial connection of the out-of-plane rigidity of the surface plate, the rigidity of the structure on which the surface plate is installed, and the connection portion rigidity connecting them. If even one of these three stiffnesses is insufficient, it will be extremely difficult to finally secure an appropriate stiffness on the surface plate.
[0004]
Based on this point of view, the methods that have been generally adopted when installing the surface plate on the cabinet are as follows: (1) Insert a suitable number of thin plates in the gap between the surface plate and the frame on which the surface plate is installed. After adjusting the level of the surface plate with the method of tightening the surface plate with bolts or the like to the case, or (2) adjusting the level of the surface plate with bolts supported at three points, and the gap between the case and the surface plate There was a method of filling with an adhesive or the like.
[0005]
[Patent Document 1]
Japanese Patent Laid-Open No. 11-324294
[Problems to be solved by the invention]
However, in the conventional method (1), it is difficult to completely fill the gap between the surface plate and the casing with a plate, and a slight gap (for example, 0.1 mm or less) is inevitably left. This slight but fairly accurate gap is a fatal defect in achieving high vertical rigidity on the surface plate. That is, the required vertical rigidity is required to suppress micro vibrations of 1 μm or less, and a gap of more than this amplitude (1 μm) leads to a decrease in rigidity on the surface plate.
[0007]
Also, since the rigidity of the surface plate itself is usually high, even if the bolts that fasten the surface plate to the housing are tightened firmly, it is a reality that the gap is forcibly eliminated and the surface plate and the housing are completely adhered. Is difficult. That is, it is difficult to achieve high rigidity on the surface plate by this conventional method.
[0008]
On the other hand, in the conventional method of (2), it is possible to integrate each other without causing a gap as in (1) between the surface plate and the casing. However, it can be disadvantageous that the rigidity of the adhesive itself is extremely low compared to the rigidity finally required on the surface plate (for example, the Young's modulus of a commonly used epoxy adhesive is 2 to 5 × 10 ⁴ while it is kgf / cm ² or so, the Young's modulus of the concrete is ^{2 × 10 5 kgf / cm 2} , the Young's modulus of the iron becomes ^{2.1 × 10 6 kgf / cm 2} ).
[0009]
In particular, when the casing is concrete or the like and the finished surface is not sufficiently smoothed, a gap of 10 mm to 15 mm at the maximum may occur between the bottom of the surface plate and the casing. If all of this space is filled with adhesive, the rigidity of the adhesive is too low due to the large thickness of the adhesive. It can no longer be gained. On the other hand, even if the thickness of the adhesive filled between the surface plate and the housing is suppressed to about 1 to 2 mm to ensure the required rigidity, extremely high construction accuracy is required at the time of construction of the housing, which is not practical.
[0010]
In addition, in the conventional method (1), concrete dust is generated when a bolt for fastening the surface plate to the casing is fed into the casing or when the bolt hole is formed, and this concrete dust is generated in the clean room atmosphere. There is also a problem of being mixed in. Furthermore, in the conventional method (2), a large amount of adhesive is used in order to fill the space between the platen and the casing and integrate them together, but volatile components derived from this large amount of adhesive, etc. In view of the characteristics of a clean room that avoids the problem, it is not possible to cope with the fundamental problem that the function and purpose that the construction target should fulfill rather than the quality of the construction method such as whether the rigidity can be secured or not. .
[0011]
The present invention has been made in view of the problems as described above, and is capable of securing necessary rigidity and capable of exhibiting good workability while suppressing generation of unnecessary materials, and installing a highly rigid surface plate. It is an object of the present invention to provide a base plate for use with a high rigidity platen using the base plate, a floor structure on which the high rigidity platen is installed, and a clean room equipped with the floor structure.
[0012]
[Means for Solving the Problems]
The base plate for installing the high-rigidity surface plate of the present invention that achieves the above object has a distance between a plurality of tightening bolt holes for screwing a surface-plate tightening bolt used for tightening a bolt with the high-rigidity surface plate and the housing. There are at least three level adjustment bolt holes for screwing the level adjustment bolts to be adjusted, and a plurality of threaded through holes provided around the tightening bolt holes and serving as bolt holes for all screw bolts and adhesive injection holes. And having substantially the same size as the high-rigidity surface plate.
[0013]
The second invention is a method of installing a high-rigidity surface plate using the base plate, the step of arranging the base plate on the housing according to the installation position of the high-rigidity surface plate, and the level in the bolt hole for level adjustment Adjusting the level of the base plate by adjusting the degree of screwing of the adjusting bolt, injecting an adhesive between the base plate and the housing from the threaded through hole, adjusting the degree of screwing of all the screw bolts in the threaded through hole, A step of positioning the lower end of all the screw bolts in close proximity to the surface of the housing through the injected adhesive, a high-rigidity surface plate installed on the base plate before the adhesive is cured, A method of installing a high-rigidity surface plate using a base plate, the method comprising: a step of screwing into the tightening bolt hole and tightening and fixing
[0014]
According to a third aspect of the present invention, in the second aspect, in the step of positioning the lower end of all the screw bolts in close proximity to the housing surface via the injected adhesive, the proximity distance between the lower ends of the entire screw bolts and the housing surface is set to 0. About 5 mm.
[0015]
The fourth invention relates to a floor structure in which a high-rigidity surface plate is installed by the installation method described in the second or third invention.
[0016]
According to a fifth aspect of the present invention, there is provided a clean room comprising the floor structure according to the fourth aspect of the present invention.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a diagram showing a construction status of the high-rigidity surface plate installation method in the present embodiment. The base plate 10 in the present embodiment is a metal plate having a thickness of about 15 to 20 mm, for example, and is formed to have substantially the same size and shape as the surface plate 20. As shown in FIG. 1, the structure includes a plurality of fastening bolt holes 35 into which a platen fastening bolt 30 used for bolting to the high-rigidity platen 20 is screwed, a structural housing (hereinafter referred to as a housing) 5, and Level adjustment bolts 40 for adjusting the distance of the bolts are screwed into at least three (only two are shown for convenience in the drawing) level adjustment bolt holes 45, and all screw bolts provided around the fastening bolt holes 35. 50 bolt holes and a plurality of threaded through holes 55 that also serve as adhesive injection holes.
[0018]
As the material of the base plate 10, any material having appropriate rigidity according to the final rigidity required for the surface plate and resistance to the adhesive 60 can be used. Moreover, the installation location of the level adjustment bolt 40 and the level adjustment bolt hole 45 can be set according to the shape of the surface plate and the base plate and the installation status with the housing, and the installation location may be 3 or more. Furthermore, the installation location and the number of installation of all the screw bolts 50 and the threaded through holes 55 can be set as appropriate according to the shape and area of the base plate and the installation status with the housing.
[0019]
An actual procedure in the present embodiment in which the surface plate 20 is installed on the housing 5 using the base plate as described above will be described below. First, the base plate 10 is disposed on the housing 5 in accordance with the installation position of the high-rigidity surface plate 20 (hereinafter simply referred to as “surface plate”). Since the base plate 10 is lighter in weight than the surface plate 20, the placement work on the housing 5 can be easily performed. In the present embodiment, a clean room in a semiconductor factory or the like is assumed as a structure in which the casing 5 including the floor structure on which the surface plate 20 is installed constitutes a structure, but is not limited thereto. The present invention is applicable to all floor structures and structures that require installation of a highly rigid surface plate.
[0020]
Following the above procedure, the level adjustment bolt 40 is screwed into the level adjustment bolt hole 45 with respect to the base plate 10 disposed on the housing 5 (including the situation where it is screwed from the beginning). In order to adjust the level of the surface, the degree of screwing is adjusted so as to see the coincidence of at least three levels. For example, this operation is performed by slightly raising and lowering each other while monitoring the levels of the three level adjusting bolts 40. As a result, the level of the base plate is adjusted to ensure a horizontal level.
[0021]
If the level adjustment of the surface plate 20 is executed, the adhesive 60 is then injected into the gap 70 between the base plate 10 and the casing 5 from the threaded through hole 55. The injection of the adhesive is only required for the area around the surface plate binding bolt 30 and all screw bolts. Therefore, it is not necessary to inject the adhesive over the entire region of the gap 70 between the housing 5 and the surface plate 20. The adhesive 60 used here is not particularly limited, but is more suitable if it has excellent properties such as workability, curing characteristics, and rigidity after curing.
[0022]
If the adhesive 60 is injected into the gap 70 through the threaded through hole 55, a process of adjusting the degree of screwing of all the screw bolts 50 in the threaded through hole 55 is subsequently performed. In this process, the lower end of all the screw bolts 50 is positioned so as to be very close to the surface of the housing 5 through the injected adhesive 60. As an example, it is preferable that the proximity distance between the lower end of all the screw bolts 50 and the surface of the housing 5 is about 0.5 mm or less.
[0023]
If all the screw bolts 50 can be positioned very close to the housing 5, the surface plate 20 is installed on the base plate 10 before the adhesive 60 is cured. Then, the base plate 10 and the surface plate 20 are fixed to each other by screwing the surface plate tightening bolts 30 into the tightening bolt holes 35 and appropriately tightening them. Thereby, the surface plate 20 is reliably fixed to the housing 5 through the base plate 10 and the adhesive 60.
[0024]
【The invention's effect】
According to the present invention, it is possible to sufficiently reduce the influence of the rigidity of the adhesive on the overall rigidity by making all the screw bolts provided around the surface plate tightening bolt contact the casing through an extremely thin adhesive. It becomes possible. This makes it possible to achieve high vertical rigidity around the bolts of all metal screw bolts, which are sufficiently rigid compared to adhesives, that is, it is possible to ensure high rigidity on the surface plate that is tightened at this position. It becomes. In addition, since the threaded through hole is also used as an adhesive injection hole and all screw bolts are screwed in after adhesive injection, the lower end of all screw bolts is always filled with adhesive, resulting in insufficient adhesive injection. It is also less likely to cause a reduction in rigidity. Furthermore, by using all screw bolts, it becomes possible to make the surface of the base plate a smooth surface without protrusions, and there is an effect that processing for avoiding protrusions is not required on the bottom surface of the opposite base.
[0025]
In addition, since the level adjustment bolt and the surface plate tightening bolt are completely independent, it is possible to select the place where the level adjustment work is most easily performed as the position of the level adjustment bolt without being bound by the surface plate tightening bolt. Improvements can be made.
[0026]
Furthermore, by setting the position of the surface plate tightening bolt near the position where rigidity is required on the surface plate, it is possible to ensure only the rigidity at the required location, and at other positions, the adhesive under the base plate Therefore, the overall cost can be reduced. Alternatively, by increasing the number of bottom plate tightening bolts, the bottom plate and the base plate can be integrated, and as a result, the rigidity of the bottom plate can be increased. In addition, since the surface plate is installed in the chassis via the base plate, even if the position that requires high rigidity on the surface plate is changed after the surface plate is installed, or even when replacing the bottom plate with a different size By simply removing the surface plate and adding all screw bolt holes to the base plate, the required rigidity can be ensured (it is usually difficult to process the surface plate locally).
[0027]
In addition, it eliminates the generation of concrete dust that occurred in (1) of the conventional method, and appropriately suppresses the generation of a large amount of volatile components derived from the adhesive that occurred in (2) of the conventional method, For example, construction suitable for the function and purpose to be performed by a surface plate construction target such as a clean room is made possible. In addition, these effects contribute to improving workability in that anchor bolt drilling in the frame is not required, and it is possible to improve the work flexibility by easily obtaining the required high rigidity at any place. It also leads to an effect.
[0028]
In addition, it is easy to remove the surface plate when changing the layout in the future, and the base plate left after this surface plate removal is thin, so that it is possible to effectively use the underfloor space without removing the base plate. Also play.
[Brief description of the drawings]
FIG. 1 is a diagram showing a construction status of a high-rigidity surface plate installation method in the present embodiment.
[Explanation of symbols]
5 Housing and structural housing 10 Base plate 20 Surface plate 30 Surface plate tightening bolt 35 Tightening bolt hole 40 Level adjusting bolt 45 Level adjusting bolt hole 50 Full thread bolt 55 Threaded through hole 60 Adhesive

Claims (5)

At least three level adjustment bolt holes for screwing a plurality of tightening bolt holes for screwing the surface plate tightening bolts used for tightening the bolts to the high-rigidity surface plate, and a level adjusting bolt for adjusting the distance from the housing And a plurality of threaded through holes which are provided around the tightening bolt holes and serve as bolt holes for all screw bolts and adhesive injection holes, and have approximately the same size as a high-rigidity surface plate. Base plate for high rigidity surface plate installation. A method of installing a highly rigid surface plate using the base plate,
Arranging the base plate on the housing according to the installation position of the high-rigidity surface plate;
A step of adjusting the level of the base plate by adjusting the degree of screwing of the level adjustment bolt in the level adjustment bolt hole;
Injecting an adhesive between the base plate and the housing from the threaded through hole;
Adjusting the degree of screwing of all the screw bolts in the threaded through hole, and positioning the lower end of all the screw bolts in close proximity to the housing surface via the injected adhesive; and
Installing a high-rigidity surface plate on the base plate before the adhesive is hardened, and screwing a surface plate tightening bolt into the tightening bolt hole,
The installation method of the high-rigidity surface plate using the base plate characterized by including. The proximity distance between the lower end of all screw bolts and the surface of the housing is set to about 0.5 mm in the step of positioning the lower ends of all the screw bolts very close to the surface of the housing via the injected adhesive. A method for installing a high-rigidity surface plate using the base plate according to 2. A floor structure in which a highly rigid surface plate is installed by the installation method according to claim 2. A clean room comprising the floor structure according to claim 4.

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