JP4118166B2 - Ferroelectric liquid crystal display panel heating device - Google Patents

Ferroelectric liquid crystal display panel heating device Download PDF

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Publication number
JP4118166B2
JP4118166B2 JP2003051999A JP2003051999A JP4118166B2 JP 4118166 B2 JP4118166 B2 JP 4118166B2 JP 2003051999 A JP2003051999 A JP 2003051999A JP 2003051999 A JP2003051999 A JP 2003051999A JP 4118166 B2 JP4118166 B2 JP 4118166B2
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Prior art keywords
liquid crystal
crystal display
display panel
heating
heating device
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JP2003051999A
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Japanese (ja)
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JP2004258555A (en
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吉朗 手島
市郎 小林
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シチズンミヨタ株式会社
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Description

【0001】
【発明の属する技術分野】
本発明は、強誘電性液晶表示パネルの加熱装置に関する。
【0002】
【従来の技術】
一般的に、液晶表示パネルへの液晶の注入に関しては幾つかの方法が提案されている。例えば、一方の基板の一面に液晶を滴下した後、他方の基板と貼り合わせる方法や、液晶表示パネルに液晶注入口と排気口を設け、パネル内外の圧力差により注入する方法、加熱により液晶の粘度を低下させ、毛細管現象より注入する方法等が挙げられる。
【0003】
中でも、前述の毛細管現象を利用した液晶の注入方法は、液晶表示パネルに特別大きな圧力をかけるという事が無く、液晶の配向の乱れやパネル基板自体の損傷、シール材のずれ等を防止出来る事から多用されている。
【0004】
図1は、前述の毛細管現象を利用した液晶注入工程に係る、従来の液晶表示パネルの加熱装置を示す模式図である。以下、図1を参照し、従来の液晶表示パネルの加熱装置について簡単に説明する。
【0005】
装置内に加熱源である加熱プレートが複数枚設けられており、その上に液晶表示パネルをそれぞれ1つずつ載置し、各加熱プレートからの接触熱伝播により液晶表示パネルを加熱する構成となっている(特許文献1参照)。
【0006】
【特許文献1】
特開平9−269492号公報(第2−3頁、第3図)
【0007】
【発明が解決しようとする課題】
前述のように、従来の液晶表示パネルの加熱装置においては、加熱装置の各載置段毎に1つずつ加熱プレートを用い、その上に液晶表示パネルを単数、若しくは複数載置し、加熱する構成となっている。そのため、一度に大量の液晶表示パネルを加熱処理しようとする場合には、その載置段の数だけ加熱プレートが必要になると共に、装置全体が大型化してしまうという問題があった。また、強誘電性液晶は、その液晶分子の構造上、ジグザグ(ZZ)欠陥等の配向不良が発生しやすいため、各液晶表示パネルを均一に加熱、冷却する必要がある。
【0008】
本発明は、以上の問題に鑑みてなされたものであり、強誘電性液晶表示パネルの大量加熱処理に際し、加熱プレートの数を削減すると共に、加熱装置全体の小型化、及びジグザグ(ZZ)欠陥等の配向不良の発生を抑制可能とする、強誘電性液晶表示パネルの加熱装置を提供する事を目的とする。
【0009】
【課題を解決するための手段】
加熱プレートを有する、強誘電性液晶表示パネルの加熱装置であって、少なくとも前記強誘電性液晶表示パネルを収納する凹部を備えた載置パレットと、該載置パレットを複数枚層状に収納する載置パレット収納マガジンと、該載置パレット収納マガジンの側面を挟持する一対の可動式加熱プレート若しくは固定式加熱プレート及び可動式加熱プレートとを有する強誘電性液晶表示パネルの加熱装置とする。
【0010】
【発明の実施の形態】
以下、請求項1記載の本発明の一実施形態である強誘電性液晶表示パネル加熱装置を図2〜図6を参照し、説明する。
【0011】
図2は、本発明に係る、強誘電性液晶表示パネル(以下液晶表示パネルとする)加熱装置の一実施形態を示す図である。複数の液晶表示パネル5が、液晶表示パネル5全体に接触熱伝播を行うための載置パレット4に載置されており、該載置パレット4は、載置パレット4の収納容器である載置パレット収納マガジン3a、3bに複数枚層状に収納されている。更に、該載置パレット収納マガジン3a、3bは、固定式加熱プレート2と可動式加熱プレート1a、1bとで挟持されており、これら3つの加熱プレート1a、1b、2を加熱源とした接触熱伝播により液晶表示パネル5の加熱を行う構成となっている。また、加熱装置の底部には載置パレット収納マガジン3a、3b支持載置用のパイプ状のレール8が複数設けられている。
【0012】
図3は、本発明において加熱処理を行う液晶表示パネル5を示す斜視図である。また、図4は、載置パレット4を示す斜視図、図5は、液晶表示パネル5が載置パレット4に載置された状態を示す斜視図、図6は、載置パレット4が載置パレット収納マガジン3a、若しくは3bに収納された状態を示す斜視図、である。ここで、載置パレット4の収納に係る構成について、図3〜図6を参照し、作業工程順に説明する。
【0013】
作業工程の流れは、液晶表示パネル5を載置パレット4に載置→液晶塗布→載置パレット4を載置パレット収納マガジン3a、3bに収納→液晶表示パネル5の真空排気→加熱処理(液晶注入)、となり詳細は以下の通りである。
【0014】
まず、図3に示すような、ガラス、シリコン(Si)から成る2つの基板をシール材(図示省略)を介して貼り合わせた液晶表示パネル5を複数個、図4に示すような液晶表示パネル載置用の載置パレット4に載置する。その際、載置パレット4には、液晶表示パネル5を位置決めするための凹部7が形成されており、図5に示すように、そこにはめ込む形でそれぞれ載置する。その後、液晶表示パネル5の基板間ギャップに形成された液晶注入口に、ディスペンサ(図示省略)により強誘電性液晶6を塗布する。
【0015】
載置パレット4の役割としては、凹部7を設け、そこに液晶表示パネル5をはめ込む形で載置する事により、熱媒体である載置パレット4との密着性を高める事、又載置パレット収納容器である載置パレット収納マガジン3a、3bへの収納を効率化する事等が挙げられる。
【0016】
また、前述のディスペンサは、的確な液晶塗布が行えるのであれば、どのようなものを用いても構わず、その詳細については本明細書で触れない事とする。
【0017】
次に、前記載置パレット4を、強誘電性液晶6を塗布した液晶表示パネル5を載置した状態で、図6に示すように、載置パレット収納マガジン3a、3bに複数枚層状に収納する。そして、載置パレット4の収納完了後、前記載置パレット収納マガジン3a、3bを真空チャンバ(図示省略)内に設置された本発明の加熱装置に入れ、液晶表示パネル5の真空排気、及び液晶注入を行う。
【0018】
その際、図2に示したように、載置パレット収納マガジン3a、3bを加熱装置中央部に設けられた固定式加熱プレート2を挟んでそれぞれ配置し、該固定式加熱プレート2と対向するように設けられた可動式加熱プレート1a、1bとで挟持密着させる。そして、真空排気を行った後、加熱プレート1a、1b、2に通電し、発熱させ、その熱により強誘電性液晶6の粘度を低下させ、毛細管現象による液晶注入を行う。
【0019】
熱伝播経路は、加熱プレート1a、1b、2→載置パレット収納マガジン3a、3b→載置パレット4→液晶表示パネル5、というように大きく分けて4段階となっている。
【0020】
加熱プレート1a、1b、2には、発熱抵抗線をシリコンラバー等のフィルム材で挟持したフィルムヒータを用いた構成のものを使用したが、パイプにオイル等の熱媒体を循環させるパイプヒータを用いた構成のもの等を用いても良く、これに限定されるものでは無い。
【0021】
また、固定式だけでなく、可動式加熱プレート1a、1bのような可動式の加熱プレートを用いる理由としては、各加熱プレート1a、1b、2を載置パレット収納マガジン3a、3bの側面に確実に密着させ、該加熱プレート1a、1b、2からの熱伝播効率を高めると共に、載置パレット収納マガジン3a、3bの加熱装置本体への着脱を効率的に行えるようにするためである。
【0022】
しかし、必ずしも固定式、可動式2種類の加熱プレートを用いる必要は無く、載置パレット収納マガジン3a、3bとの確実な密着性が得られるのであれば、可動式のみでも構わない。
【0023】
また、加熱装置の底部にレール8を設ける理由として、冷却は自然冷却により行うが、加熱装置の底部は余熱を持つため、冷却時に載置パレット収納マガジン3a、3bの上下間で温度差が生じる。また、安定した冷却を行うには、載置パレット収納マガジン3a、3bを出来るだけ加熱装置の中央に配置するのが望ましい。このため、レール8を設ける事により、載置パレット収納マガジン3a、3bを加熱装置の略中央に配置されるよう底上げすると共に、加熱装置底部との接触面積を減らし、上下間での温度のばらつきを抑制するのである。従って、レール8の材質としては、熱伝導性の低い材質(実施例においてはSUS)のものを用いる事が望ましい。更に、レール8により、載置パレット収納マガジン3a、3bと加熱装置底部との摩擦が減少するため、載置パレット収納マガジン3a、3bの加熱装置への着脱が容易になる。
【0024】
図7は、従来の加熱装置において、大気圧下で温度測定を行った結果を示すグラフで、時間に対する温度変化を表している。また、図8は、本発明の加熱装置において、大気圧下で温度測定を行った結果を示すグラフで、図7と同様に時間に対する温度変化を表している。尚、温度測定位置は、図5中のA〜D点である。
【0025】
図7と図8を比較すると、図7の従来の加熱装置においては、A〜Dの各点で温度にばらつきが見られるのに対し、図8の本発明の加熱装置においては、温度にばらつきがほとんど見られない事が分かる。即ち、本発明の加熱装置を用いた場合においては、温度にばらつきが無い均一な熱伝播が行われていると言える。
【0026】
また、図9は、本発明における温度測定を大気圧下ではなく、真空圧下において行った結果を示すグラフで、図7、図8と同様に時間に対する温度変化を表している。
【0027】
図8と図9を比較すると、図9の真空圧下のグラフにおいても、図8の大気圧下のグラフと同様に、特に温度のばらつきは見られない。つまり、本発明の加熱装置においては、大気圧/真空圧下を問わず、均一な熱伝播が可能であると言える。
【0028】
その他、載置パレット収納マガジンを初めとする基本的な構成部の材質としては、熱伝導性に優れるアルミニウム(Al)を用いたが、熱伝導性が高ければ高いほど均一な熱伝播に効果があり、それに限定されるものでは無い。
【0029】
また、載置パレット収納マガジンの数を増やし、それに応じて加熱プレートの数や配置を変える等、ある程度設計を自由に変える事も可能である。
【発明の効果】
本発明によれば、液晶表示パネルを限られたスペースで一度に多数個加熱処理する事が出来ると共に、加熱プレート数の削減により加熱装置全体の小型化が可能となるだけでなく、加熱プレート→載置パレット収納マガジン→載置パレット→液晶表示パネル、と順を追った接触熱伝播により、大気圧/真空圧下を問わない均一な加熱、冷却処理が可能となり、強誘電性液晶において発生するジグザグ(ZZ)欠陥等の配向不良を抑制する事が出来る。
【図面の簡単な説明】
【図1】従来の加熱装置を示す模式図
【図2】本発明の一実施形態を示す模式図
【図3】液晶表示パネルを示す斜視図
【図4】載置パレットを示す斜視図
【図5】液晶表示パネルが載置パレットに載置された状態を示す斜視図
【図6】載置パレットが載置パレット収納マガジンに収納された状態を示す斜視図
【図7】従来の加熱装置における温度変化を示すグラフ(大気圧下)
【図8】本発明の加熱装置における温度変化を示すグラフ(大気圧下)
【図9】本発明の加熱装置における温度変化を示すグラフ(真空圧下)
【符号の説明】
1a 可動式加熱プレート
1b 可動式加熱プレート
2 固定式加熱プレート
3a 載置パレット収納マガジン
3b 載置パレット収納マガジン
4 載置パレット
5 液晶表示パネル
6 強誘電性液晶
7 凹部
8 レール
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heating device for a ferroelectric liquid crystal display panel.
[0002]
[Prior art]
In general, several methods have been proposed for injecting liquid crystal into a liquid crystal display panel. For example, a method of dropping liquid crystal on one surface of one substrate and then bonding it to the other substrate, a method of providing a liquid crystal injection port and an exhaust port in a liquid crystal display panel, and injecting the liquid crystal by a pressure difference between the inside and outside of the panel, For example, a method of reducing the viscosity and injecting by capillary action may be used.
[0003]
Above all, the liquid crystal injection method using the above-mentioned capillary phenomenon does not apply a particularly large pressure to the liquid crystal display panel, and can prevent disorder of liquid crystal alignment, damage to the panel substrate itself, displacement of the sealing material, and the like. Has been used a lot.
[0004]
FIG. 1 is a schematic view showing a conventional liquid crystal display panel heating device according to a liquid crystal injection process using the capillary phenomenon described above. Hereinafter, a conventional heating apparatus for a liquid crystal display panel will be briefly described with reference to FIG.
[0005]
A plurality of heating plates, which are heating sources, are provided in the apparatus, and one liquid crystal display panel is mounted on each of them, and the liquid crystal display panel is heated by contact heat propagation from each heating plate. (See Patent Document 1).
[0006]
[Patent Document 1]
Japanese Patent Laid-Open No. 9-269492 (page 2-3, FIG. 3)
[0007]
[Problems to be solved by the invention]
As described above, in a conventional liquid crystal display panel heating apparatus, one heating plate is used for each mounting stage of the heating apparatus, and one or more liquid crystal display panels are mounted thereon and heated. It has a configuration. For this reason, when a large number of liquid crystal display panels are to be heat-treated at the same time, there are problems in that the heating plate is required for the number of mounting stages and the entire apparatus is enlarged. In addition, since the ferroelectric liquid crystal tends to cause alignment defects such as zigzag (ZZ) defects due to the structure of the liquid crystal molecules, it is necessary to uniformly heat and cool each liquid crystal display panel.
[0008]
The present invention has been made in view of the above problems, and reduces the number of heating plates, reduces the size of the entire heating device, and zigzag (ZZ) defects during mass heating processing of a ferroelectric liquid crystal display panel. An object of the present invention is to provide a heating device for a ferroelectric liquid crystal display panel that can suppress the occurrence of alignment defects such as the above.
[0009]
[Means for Solving the Problems]
A heating apparatus for a ferroelectric liquid crystal display panel having a heating plate , comprising at least a mounting pallet having a recess for storing the ferroelectric liquid crystal display panel, and storing the mounting pallet in a plurality of layers. A ferroelectric liquid crystal display panel heating device having a mounting pallet storage magazine and a pair of movable heating plates or a fixed heating plate and a movable heating plate that sandwich the side surface of the mounting pallet storage magazine.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a ferroelectric liquid crystal display panel heating apparatus according to an embodiment of the present invention will be described with reference to FIGS.
[0011]
FIG. 2 is a diagram showing an embodiment of a ferroelectric liquid crystal display panel (hereinafter referred to as liquid crystal display panel) heating apparatus according to the present invention. A plurality of liquid crystal display panels 5 are mounted on a mounting pallet 4 for transmitting contact heat to the entire liquid crystal display panel 5, and the mounting pallet 4 is a mounting container that is a storage container for the mounting pallet 4. A plurality of sheets are stored in the pallet storage magazines 3a and 3b. Furthermore, the mounting pallet storage magazines 3a and 3b are sandwiched between a fixed heating plate 2 and movable heating plates 1a and 1b, and contact heat using these three heating plates 1a, 1b and 2 as a heating source. The liquid crystal display panel 5 is heated by propagation. Also, a plurality of pipe-like rails 8 for supporting and placing the mounting pallet storage magazines 3a and 3b are provided at the bottom of the heating device.
[0012]
FIG. 3 is a perspective view showing the liquid crystal display panel 5 that performs the heat treatment in the present invention. 4 is a perspective view showing the placement pallet 4, FIG. 5 is a perspective view showing a state in which the liquid crystal display panel 5 is placed on the placement pallet 4, and FIG. It is a perspective view which shows the state accommodated in the pallet storage magazine 3a or 3b. Here, the structure which concerns on accommodation of the mounting pallet 4 is demonstrated in order of a work process with reference to FIGS.
[0013]
The flow of the work process is as follows: placing the liquid crystal display panel 5 on the placement pallet 4 → liquid crystal application → housing the placement pallet 4 in the placement pallet storage magazines 3a and 3b → evacuating the liquid crystal display panel 5 → heating treatment (liquid crystal The details are as follows.
[0014]
First, as shown in FIG. 3, a plurality of liquid crystal display panels 5 in which two substrates made of glass and silicon (Si) are bonded together with a sealant (not shown), as shown in FIG. It mounts on the mounting pallet 4 for mounting. At this time, the mounting pallet 4 is formed with a recess 7 for positioning the liquid crystal display panel 5 and is placed in a manner of being fitted therein as shown in FIG. Thereafter, the ferroelectric liquid crystal 6 is applied to the liquid crystal inlet formed in the inter-substrate gap of the liquid crystal display panel 5 by a dispenser (not shown).
[0015]
As the role of the mounting pallet 4, the concave portion 7 is provided, and the liquid crystal display panel 5 is mounted in the concave portion 7, thereby improving the adhesion with the mounting pallet 4 as a heat medium, and the mounting pallet. For example, it is possible to improve the efficiency of storage in the mounting pallet storage magazines 3a and 3b, which are storage containers.
[0016]
The above-mentioned dispenser may be any one as long as it can perform accurate liquid crystal application, and details thereof will not be described in this specification.
[0017]
Next, the mounting pallet 4 is stored in a plurality of layers in the mounting pallet storage magazines 3a and 3b with the liquid crystal display panel 5 coated with the ferroelectric liquid crystal 6 mounted thereon as shown in FIG. To do. Then, after the storage of the mounting pallet 4 is completed, the above-described mounting pallet storage magazines 3a and 3b are put into the heating device of the present invention installed in a vacuum chamber (not shown), the liquid crystal display panel 5 is evacuated, and the liquid crystal Make an injection.
[0018]
At that time, as shown in FIG. 2, the placement pallet storage magazines 3 a and 3 b are respectively arranged with the fixed heating plate 2 provided in the center of the heating device sandwiched therebetween, so as to face the fixed heating plate 2. And are held in close contact with the movable heating plates 1a and 1b. Then, after evacuation, the heating plates 1a, 1b, and 2 are energized to generate heat, the viscosity of the ferroelectric liquid crystal 6 is lowered by the heat, and liquid crystal is injected by capillary action.
[0019]
The heat propagation path is roughly divided into four stages such as heating plates 1a, 1b, 2 → mounting pallet storage magazines 3a, 3b → mounting pallet 4 → liquid crystal display panel 5.
[0020]
For the heating plates 1a, 1b, and 2, a structure using a film heater in which a heating resistance wire is sandwiched between film materials such as silicon rubber is used, but a pipe heater that circulates a heat medium such as oil is used for the pipe. However, the present invention is not limited to this.
[0021]
The reason for using not only the fixed type but also the movable type heating plates such as the movable type heating plates 1a and 1b is that the heating plates 1a, 1b and 2 are securely attached to the side surfaces of the mounting pallet storage magazines 3a and 3b. In order to increase the heat propagation efficiency from the heating plates 1a, 1b, and 2, and to efficiently attach and detach the mounting pallet storage magazines 3a and 3b to the heating device body.
[0022]
However, it is not always necessary to use two types of fixed and movable heating plates, and only a movable type may be used as long as reliable adhesion to the mounting pallet storage magazines 3a and 3b can be obtained.
[0023]
In addition, although the rail 8 is provided at the bottom of the heating device, the cooling is performed by natural cooling. However, since the bottom of the heating device has residual heat, a temperature difference occurs between the upper and lower sides of the mounting pallet storage magazines 3a and 3b during cooling. . In order to perform stable cooling, it is desirable to place the mounting pallet storage magazines 3a and 3b as centrally as possible in the heating device. For this reason, by providing the rail 8, the mounting pallet storage magazines 3a and 3b are raised so as to be arranged at the approximate center of the heating device, the contact area with the bottom of the heating device is reduced, and temperature variation between the upper and lower sides Is suppressed. Therefore, as the material of the rail 8, it is desirable to use a material having low thermal conductivity (SUS in the embodiment). Furthermore, since the friction between the mounting pallet storage magazines 3a, 3b and the heating device bottom is reduced by the rail 8, the mounting pallet storage magazines 3a, 3b can be easily attached to and detached from the heating device.
[0024]
FIG. 7 is a graph showing a result of temperature measurement under atmospheric pressure in a conventional heating apparatus, and shows a temperature change with respect to time. FIG. 8 is a graph showing the results of temperature measurement under atmospheric pressure in the heating apparatus of the present invention, and represents the temperature change with time as in FIG. The temperature measurement positions are points A to D in FIG.
[0025]
7 is compared with FIG. 8, the conventional heating device of FIG. 7 has a variation in temperature at each point A to D, whereas the heating device of the present invention of FIG. 8 has a variation in temperature. It is understood that is hardly seen. That is, in the case of using the heating device of the present invention, it can be said that uniform heat propagation with no variation in temperature is performed.
[0026]
FIG. 9 is a graph showing the results of the temperature measurement in the present invention performed under vacuum pressure instead of atmospheric pressure, and represents the temperature change with time as in FIGS.
[0027]
Comparing FIG. 8 and FIG. 9, there is no particular variation in temperature in the graph under vacuum pressure in FIG. 9 as in the graph under atmospheric pressure in FIG. That is, in the heating apparatus of the present invention, it can be said that uniform heat propagation is possible regardless of atmospheric pressure / vacuum pressure.
[0028]
In addition, aluminum (Al), which has excellent thermal conductivity, was used as the material for basic components such as the loading pallet storage magazine. However, the higher the thermal conductivity, the more effective the uniform heat transfer. Yes, it is not limited to that.
[0029]
It is also possible to freely change the design to some extent by increasing the number of mounting pallet storage magazines and changing the number and arrangement of heating plates accordingly.
【The invention's effect】
According to the present invention, a large number of liquid crystal display panels can be heat-treated at a time in a limited space, and not only the whole heating apparatus can be reduced by reducing the number of heating plates, but also the heating plate → Zigzag generated in ferroelectric liquid crystal due to contact heat propagation in the order of mounting pallet storage magazine → mounting pallet → liquid crystal display panel, enabling uniform heating and cooling treatment regardless of atmospheric pressure / vacuum pressure. (ZZ) Orientation defects such as defects can be suppressed.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a conventional heating apparatus. FIG. 2 is a schematic view showing an embodiment of the present invention. FIG. 3 is a perspective view showing a liquid crystal display panel. 5 is a perspective view showing a state in which the liquid crystal display panel is placed on a placement pallet. FIG. 6 is a perspective view showing a state in which the placement pallet is stored in a placement pallet storage magazine. Graph showing temperature change (under atmospheric pressure)
FIG. 8 is a graph showing the temperature change in the heating device of the present invention (under atmospheric pressure).
FIG. 9 is a graph showing changes in temperature in the heating device of the present invention (under vacuum pressure).
[Explanation of symbols]
1a Movable heating plate 1b Movable heating plate 2 Fixed heating plate 3a Mounting pallet storage magazine 3b Mounting pallet storage magazine 4 Mounting pallet 5 Liquid crystal display panel 6 Ferroelectric liquid crystal 7 Recess 8 Rail

Claims (1)

加熱プレートを有する、強誘電性液晶表示パネルの加熱装置であって、少なくとも前記強誘電性液晶表示パネルを収納する凹部を備えた載置パレットと、該載置パレットを複数枚層状に収納する載置パレット収納マガジンと、該載置パレット収納マガジンの側面を挟持する一対の可動式加熱プレート若しくは固定式加熱プレート及び可動式加熱プレートとを有する事を特徴とする強誘電性液晶表示パネルの加熱装置。A heating apparatus for a ferroelectric liquid crystal display panel having a heating plate , comprising at least a mounting pallet having a recess for storing the ferroelectric liquid crystal display panel, and storing the mounting pallet in a plurality of layers. Heating a ferroelectric liquid crystal display panel characterized by having a mounting pallet storage magazine and a pair of movable heating plates or a fixed heating plate and a movable heating plate that sandwich the side surface of the mounting pallet storage magazine apparatus.
JP2003051999A 2003-02-27 2003-02-27 Ferroelectric liquid crystal display panel heating device Expired - Fee Related JP4118166B2 (en)

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Publication number Priority date Publication date Assignee Title
JP7002646B2 (en) 2018-05-10 2022-01-20 本田技研工業株式会社 Coating nozzle and coating device

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CN103268030B (en) * 2013-05-28 2015-06-17 苏州优备精密电子有限公司 Liquid crystal panel aging trolley

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7002646B2 (en) 2018-05-10 2022-01-20 本田技研工業株式会社 Coating nozzle and coating device

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