JP2004258555A - Device for heating ferroelectric liquid crystal display panel - Google Patents

Device for heating ferroelectric liquid crystal display panel Download PDF

Info

Publication number
JP2004258555A
JP2004258555A JP2003051999A JP2003051999A JP2004258555A JP 2004258555 A JP2004258555 A JP 2004258555A JP 2003051999 A JP2003051999 A JP 2003051999A JP 2003051999 A JP2003051999 A JP 2003051999A JP 2004258555 A JP2004258555 A JP 2004258555A
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
heating
display panel
ferroelectric liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003051999A
Other languages
Japanese (ja)
Other versions
JP4118166B2 (en
Inventor
Yoshiro Tejima
吉朗 手島
Ichiro Kobayashi
市郎 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miyota KK
Original Assignee
Miyota KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miyota KK filed Critical Miyota KK
Priority to JP2003051999A priority Critical patent/JP4118166B2/en
Publication of JP2004258555A publication Critical patent/JP2004258555A/en
Application granted granted Critical
Publication of JP4118166B2 publication Critical patent/JP4118166B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-productivity device for heating a ferroelectric liquid crystal display panel, the device as a whole is downsized and uniform heat propagation is possible irrespective of heating under atmospheric pressure or under vacuum. <P>SOLUTION: A plurality of the ferroelectric liquid crystal display panels are placed and held on a placing and holding pallet. A housing magazine for the placing and holding pallets, a housing vessel for exclusive use thereof, housing a plurality of the pallets in layers is interposed between movable heating plates or between two kinds of, fixed type and a movable, heating plates and is constructed so as to perform a four step contact heat propagation of the heating plate, of the housing magazine for the placing and holding pallets, of the placing and holding pallets and of the ferroelectric liquid crystal display panels in this order. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【0001】
【発明の属する技術分野】
本発明は、強誘電性液晶表示パネルの加熱装置に関する。
【0002】
【従来の技術】
一般的に、液晶表示パネルへの液晶の注入に関しては幾つかの方法が提案されている。例えば、一方の基板の一面に液晶を滴下した後、他方の基板と貼り合わせる方法や、液晶表示パネルに液晶注入口と排気口を設け、パネル内外の圧力差により注入する方法、加熱により液晶の粘度を低下させ、毛細管現象より注入する方法等が挙げられる。
【0003】
中でも、前述の毛細管現象を利用した液晶の注入方法は、液晶表示パネルに特別大きな圧力をかけるという事が無く、液晶の配向の乱れやパネル基板自体の損傷、シール材のずれ等を防止出来る事から多用されている。
【0004】
図1は、前述の毛細管現象を利用した液晶注入工程に係る、従来の液晶表示パネルの加熱装置を示す模式図である。以下、図1を参照し、従来の液晶表示パネルの加熱装置について簡単に説明する。
【0005】
装置内に加熱源である加熱プレートが複数枚設けられており、その上に液晶表示パネルをそれぞれ1つずつ載置し、各加熱プレートからの接触熱伝播により液晶表示パネルを加熱する構成となっている(特許文献1参照)。
【0006】
【特許文献1】
特開平9−269492号公報(第2−3頁、第3図)
【0007】
【発明が解決しようとする課題】
前述のように、従来の液晶表示パネルの加熱装置においては、加熱装置の各載置段毎に1つずつ加熱プレートを用い、その上に液晶表示パネルを単数、若しくは複数載置し、加熱する構成となっている。そのため、一度に大量の液晶表示パネルを加熱処理しようとする場合には、その載置段の数だけ加熱プレートが必要になると共に、装置全体が大型化してしまうという問題があった。また、強誘電性液晶は、その液晶分子の構造上、ジグザグ(ZZ)欠陥等の配向不良が発生しやすいため、各液晶表示パネルを均一に加熱、冷却する必要がある。
【0008】
本発明は、以上の問題に鑑みてなされたものであり、強誘電性液晶表示パネルの大量加熱処理に際し、加熱プレートの数を削減すると共に、加熱装置全体の小型化、及びジグザグ(ZZ)欠陥等の配向不良の発生を抑制可能とする、強誘電性液晶表示パネルの加熱装置を提供する事を目的とする。
【0009】
【課題を解決するための手段】
加熱プレートを有する、強誘電性液晶表示パネルの加熱装置であって、少なくとも前記強誘電性液晶表示パネルを載置する載置パレットと、該載置パレットを複数枚層状に収納する載置パレット収納マガジンとを有し、該載置パレット収納マガジンを可動式の加熱プレートで挟持、若しくは固定式、可動式2種類の加熱プレートで挟持して加熱する強誘電性液晶表示パネルの加熱装置とする。
【0010】
【発明の実施の形態】
以下、請求項1記載の本発明の一実施形態である強誘電性液晶表示パネル加熱装置を図2〜図6を参照し、説明する。
【0011】
図2は、本発明に係る、強誘電性液晶表示パネル(以下液晶表示パネルとする)加熱装置の一実施形態を示す図である。複数の液晶表示パネル5が、液晶表示パネル5全体に接触熱伝播を行うための載置パレット4に載置されており、該載置パレット4は、載置パレット4の収納容器である載置パレット収納マガジン3a、3bに複数枚層状に収納されている。更に、該載置パレット収納マガジン3a、3bは、固定式加熱プレート2と可動式加熱プレート1a、1bとで挟持されており、これら3つの加熱プレート1a、1b、2を加熱源とした接触熱伝播により液晶表示パネル5の加熱を行う構成となっている。また、加熱装置の底部には載置パレット収納マガジン3a、3b支持載置用のパイプ状のレール8が複数設けられている。
【0012】
図3は、本発明において加熱処理を行う液晶表示パネル5を示す斜視図である。また、図4は、載置パレット4を示す斜視図、図5は、液晶表示パネル5が載置パレット4に載置された状態を示す斜視図、図6は、載置パレット4が載置パレット収納マガジン3a、若しくは3bに収納された状態を示す斜視図、である。ここで、載置パレット4の収納に係る構成について、図3〜図6を参照し、作業工程順に説明する。
【0013】
作業工程の流れは、液晶表示パネル5を載置パレット4に載置→液晶塗布→載置パレット4を載置パレット収納マガジン3a、3bに収納→液晶表示パネル5の真空排気→加熱処理(液晶注入)、となり詳細は以下の通りである。
【0014】
まず、図3に示すような、ガラス、シリコン(Si)から成る2つの基板をシール材(図示省略)を介して貼り合わせた液晶表示パネル5を複数個、図4に示すような液晶表示パネル載置用の載置パレット4に載置する。その際、載置パレット4には、液晶表示パネル5を位置決めするための凹部7が形成されており、図5に示すように、そこにはめ込む形でそれぞれ載置する。その後、液晶表示パネル5の基板間ギャップに形成された液晶注入口に、ディスペンサ(図示省略)により強誘電性液晶6を塗布する。
【0015】
載置パレット4の役割としては、凹部7を設け、そこに液晶表示パネル5をはめ込む形で載置する事により、熱媒体である載置パレット4との密着性を高める事、又載置パレット収納容器である載置パレット収納マガジン3a、3bへの収納を効率化する事等が挙げられる。
【0016】
また、前述のディスペンサは、的確な液晶塗布が行えるのであれば、どのようなものを用いても構わず、その詳細については本明細書で触れない事とする。
【0017】
次に、前記載置パレット4を、強誘電性液晶6を塗布した液晶表示パネル5を載置した状態で、図6に示すように、載置パレット収納マガジン3a、3bに複数枚層状に収納する。そして、載置パレット4の収納完了後、前記載置パレット収納マガジン3a、3bを真空チャンバ(図示省略)内に設置された本発明の加熱装置に入れ、液晶表示パネル5の真空排気、及び液晶注入を行う。
【0018】
その際、図2に示したように、載置パレット収納マガジン3a、3bを加熱装置中央部に設けられた固定式加熱プレート2を挟んでそれぞれ配置し、該固定式加熱プレート2と対向するように設けられた可動式加熱プレート1a、1bとで挟持密着させる。そして、真空排気を行った後、加熱プレート1a、1b、2に通電し、発熱させ、その熱により強誘電性液晶6の粘度を低下させ、毛細管現象による液晶注入を行う。
【0019】
熱伝播経路は、加熱プレート1a、1b、2→載置パレット収納マガジン3a、3b→載置パレット4→液晶表示パネル5、というように大きく分けて4段階となっている。
【0020】
加熱プレート1a、1b、2には、発熱抵抗線をシリコンラバー等のフィルム材で挟持したフィルムヒータを用いた構成のものを使用したが、パイプにオイル等の熱媒体を循環させるパイプヒータを用いた構成のもの等を用いても良く、これに限定されるものでは無い。
【0021】
また、固定式だけでなく、可動式加熱プレート1a、1bのような可動式の加熱プレートを用いる理由としては、各加熱プレート1a、1b、2を載置パレット収納マガジン3a、3bの側面に確実に密着させ、該加熱プレート1a、1b、2からの熱伝播効率を高めると共に、載置パレット収納マガジン3a、3bの加熱装置本体への着脱を効率的に行えるようにするためである。
【0022】
しかし、必ずしも固定式、可動式2種類の加熱プレートを用いる必要は無く、載置パレット収納マガジン3a、3bとの確実な密着性が得られるのであれば、可動式のみでも構わない。
【0023】
また、加熱装置の底部にレール8を設ける理由として、冷却は自然冷却により行うが、加熱装置の底部は余熱を持つため、冷却時に載置パレット収納マガジン3a、3bの上下間で温度差が生じる。また、安定した冷却を行うには、載置パレット収納マガジン3a、3bを出来るだけ加熱装置の中央に配置するのが望ましい。このため、レール8を設ける事により、載置パレット収納マガジン3a、3bを加熱装置の略中央に配置されるよう底上げすると共に、加熱装置底部との接触面積を減らし、上下間での温度のばらつきを抑制するのである。従って、レール8の材質としては、熱伝導性の低い材質(実施例においてはSUS)のものを用いる事が望ましい。更に、レール8により、載置パレット収納マガジン3a、3bと加熱装置底部との摩擦が減少するため、載置パレット収納マガジン3a、3bの加熱装置への着脱が容易になる。
【0024】
図7は、従来の加熱装置において、大気圧下で温度測定を行った結果を示すグラフで、時間に対する温度変化を表している。また、図8は、本発明の加熱装置において、大気圧下で温度測定を行った結果を示すグラフで、図7と同様に時間に対する温度変化を表している。尚、温度測定位置は、図5中のA〜D点である。
【0025】
図7と図8を比較すると、図7の従来の加熱装置においては、A〜Dの各点で温度にばらつきが見られるのに対し、図8の本発明の加熱装置においては、温度にばらつきがほとんど見られない事が分かる。即ち、本発明の加熱装置を用いた場合においては、温度にばらつきが無い均一な熱伝播が行われていると言える。
【0026】
また、図9は、本発明における温度測定を大気圧下ではなく、真空圧下において行った結果を示すグラフで、図7、図8と同様に時間に対する温度変化を表している。
【0027】
図8と図9を比較すると、図9の真空圧下のグラフにおいても、図8の大気圧下のグラフと同様に、特に温度のばらつきは見られない。つまり、本発明の加熱装置においては、大気圧/真空圧下を問わず、均一な熱伝播が可能であると言える。
【0028】
その他、載置パレット収納マガジンを初めとする基本的な構成部の材質としては、熱伝導性に優れるアルミニウム(Al)を用いたが、熱伝導性が高ければ高いほど均一な熱伝播に効果があり、それに限定されるものでは無い。
【0029】
また、載置パレット収納マガジンの数を増やし、それに応じて加熱プレートの数や配置を変える等、ある程度設計を自由に変える事も可能である。
【発明の効果】
本発明によれば、液晶表示パネルを限られたスペースで一度に多数個加熱処理する事が出来ると共に、加熱プレート数の削減により加熱装置全体の小型化が可能となるだけでなく、加熱プレート→載置パレット収納マガジン→載置パレット→液晶表示パネル、と順を追った接触熱伝播により、大気圧/真空圧下を問わない均一な加熱、冷却処理が可能となり、強誘電性液晶において発生するジグザグ(ZZ)欠陥等の配向不良を抑制する事が出来る。
【図面の簡単な説明】
【図1】従来の加熱装置を示す模式図
【図2】本発明の一実施形態を示す模式図
【図3】液晶表示パネルを示す斜視図
【図4】載置パレットを示す斜視図
【図5】液晶表示パネルが載置パレットに載置された状態を示す斜視図
【図6】載置パレットが載置パレット収納マガジンに収納された状態を示す斜視図
【図7】従来の加熱装置における温度変化を示すグラフ(大気圧下)
【図8】本発明の加熱装置における温度変化を示すグラフ(大気圧下)
【図9】本発明の加熱装置における温度変化を示すグラフ(真空圧下)
【符号の説明】
1a 可動式加熱プレート
1b 可動式加熱プレート
2 固定式加熱プレート
3a 載置パレット収納マガジン
3b 載置パレット収納マガジン
4 載置パレット
5 液晶表示パネル
6 強誘電性液晶
7 凹部
8 レール
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a heating device for a ferroelectric liquid crystal display panel.
[0002]
[Prior art]
In general, several methods have been proposed for injecting liquid crystal into a liquid crystal display panel. For example, a method in which liquid crystal is dropped on one surface of one substrate and then bonded to the other substrate, a method in which a liquid crystal display panel is provided with a liquid crystal injection port and an exhaust port, and a liquid crystal is injected by a pressure difference between the inside and outside of the panel, A method of lowering the viscosity and injecting by capillary action is exemplified.
[0003]
Above all, the method of injecting liquid crystal utilizing the above-mentioned capillary phenomenon does not apply extra large pressure to the liquid crystal display panel, and can prevent disturbance of liquid crystal alignment, damage to the panel substrate itself, displacement of the sealing material, and the like. It is frequently used from.
[0004]
FIG. 1 is a schematic view showing a conventional heating device for a liquid crystal display panel in a liquid crystal injection step utilizing the above-mentioned capillary phenomenon. Hereinafter, a conventional liquid crystal display panel heating device will be briefly described with reference to FIG.
[0005]
A plurality of heating plates as heating sources are provided in the apparatus, and one liquid crystal display panel is placed on each of them, and the liquid crystal display panel is heated by contact heat propagation from each heating plate. (See Patent Document 1).
[0006]
[Patent Document 1]
JP-A-9-269492 (page 2-3, FIG. 3)
[0007]
[Problems to be solved by the invention]
As described above, in the conventional heating device for a liquid crystal display panel, one heating plate is used for each mounting stage of the heating device, and one or more liquid crystal display panels are mounted thereon and heated. It has a configuration. Therefore, when a large number of liquid crystal display panels are to be subjected to heat treatment at one time, there are problems that heating plates are required by the number of mounting stages, and that the entire apparatus becomes large. Further, in the ferroelectric liquid crystal, alignment defects such as zigzag (ZZ) defects are likely to occur due to the structure of the liquid crystal molecules. Therefore, it is necessary to uniformly heat and cool each liquid crystal display panel.
[0008]
SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has been made to reduce the number of heating plates, reduce the size of the entire heating device, and reduce zigzag (ZZ) defects during large-scale heating of ferroelectric liquid crystal display panels. It is an object of the present invention to provide a heating device for a ferroelectric liquid crystal display panel, which can suppress the occurrence of poor alignment such as the above.
[0009]
[Means for Solving the Problems]
What is claimed is: 1. A heating device for a ferroelectric liquid crystal display panel having a heating plate, comprising: a mounting pallet on which at least the ferroelectric liquid crystal display panel is mounted; and a mounting pallet housing for storing a plurality of the mounting pallets in layers. And a heating device for a ferroelectric liquid crystal display panel having a magazine, wherein the mounting pallet storage magazine is sandwiched between movable heating plates or between a fixed type and a movable type of heating plate and heated.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a ferroelectric liquid crystal display panel heating apparatus according to an embodiment of the present invention will be described with reference to FIGS.
[0011]
FIG. 2 is a diagram showing an embodiment of a heating device for a ferroelectric liquid crystal display panel (hereinafter, referred to as a liquid crystal display panel) according to the present invention. A plurality of liquid crystal display panels 5 are mounted on a mounting pallet 4 for performing contact heat propagation on the entire liquid crystal display panel 5, and the mounting pallet 4 is a mounting container for the mounting pallet 4. A plurality of pallets are stored in the pallet storage magazines 3a and 3b. Further, the loading pallet storage magazines 3a and 3b are sandwiched between the fixed heating plate 2 and the movable heating plates 1a and 1b, and the contact heat using these three heating plates 1a, 1b and 2 as a heat source. The liquid crystal display panel 5 is heated by propagation. A plurality of pipe-shaped rails 8 for supporting and mounting the mounting pallet storage magazines 3a and 3b are provided at the bottom of the heating device.
[0012]
FIG. 3 is a perspective view showing the liquid crystal display panel 5 that performs a heat treatment in the present invention. 4 is a perspective view showing the placing pallet 4, FIG. 5 is a perspective view showing a state where the liquid crystal display panel 5 is placed on the placing pallet 4, and FIG. It is a perspective view showing the state stored in pallet storage magazine 3a or 3b. Here, a configuration related to storage of the mounting pallet 4 will be described in the order of working steps with reference to FIGS.
[0013]
The flow of the work process is as follows: the liquid crystal display panel 5 is placed on the placing pallet 4 → the liquid crystal application → the placing pallet 4 is placed in the placing pallet storage magazines 3a and 3b → the vacuum exhaust of the liquid crystal display panel 5 → the heating process (liquid crystal Injection), and the details are as follows.
[0014]
First, as shown in FIG. 3, a plurality of liquid crystal display panels 5 in which two substrates made of glass and silicon (Si) are bonded together via a sealing material (not shown) are provided. It is mounted on a mounting pallet 4 for mounting. At this time, a concave portion 7 for positioning the liquid crystal display panel 5 is formed in the mounting pallet 4, and as shown in FIG. Thereafter, a ferroelectric liquid crystal 6 is applied to a liquid crystal injection port formed in the gap between the substrates of the liquid crystal display panel 5 by a dispenser (not shown).
[0015]
The role of the mounting pallet 4 is to improve the adhesion with the mounting pallet 4 which is a heat medium by providing a concave portion 7 and mounting the liquid crystal display panel 5 in the recess 7. Increasing the efficiency of storage in the storage pallet storage magazines 3a and 3b, which are storage containers, may be mentioned.
[0016]
Further, as the above-mentioned dispenser, any liquid dispenser may be used as long as accurate liquid crystal application can be performed, and details thereof will not be described in this specification.
[0017]
Next, as shown in FIG. 6, the mounting pallet 4 is stored in a plurality of layers in the mounting pallet storage magazines 3a and 3b with the liquid crystal display panel 5 coated with the ferroelectric liquid crystal 6 mounted thereon. I do. After the storage of the mounting pallet 4 is completed, the mounting pallet storage magazines 3a and 3b described above are put into the heating device of the present invention installed in a vacuum chamber (not shown), and the liquid crystal display panel 5 is evacuated and the liquid crystal is Perform injection.
[0018]
At that time, as shown in FIG. 2, the loading pallet storage magazines 3 a and 3 b are arranged with the fixed heating plate 2 provided in the center of the heating device interposed therebetween, and are opposed to the fixed heating plate 2. And the movable heating plates 1a and 1b provided in the above. After the evacuation, the heating plates 1a, 1b, and 2 are energized to generate heat, and the heat reduces the viscosity of the ferroelectric liquid crystal 6 to perform liquid crystal injection by capillary action.
[0019]
The heat propagation path is roughly divided into four stages such as the heating plates 1a, 1b, 2 → the loading pallet storage magazines 3a, 3b → the loading pallet 4 → the liquid crystal display panel 5.
[0020]
For the heating plates 1a, 1b, and 2, a configuration using a film heater in which a heating resistance wire is sandwiched between film materials such as silicon rubber was used, but a pipe heater for circulating a heat medium such as oil through a pipe was used. A configuration having a different configuration may be used, and the present invention is not limited to this.
[0021]
The reason for using movable heating plates such as movable heating plates 1a and 1b as well as fixed heating plates is that the heating plates 1a, 1b and 2 are securely mounted on the side surfaces of the loading pallet storage magazines 3a and 3b. In order to increase the heat transfer efficiency from the heating plates 1a, 1b, and 2 and to allow the mounting pallet storage magazines 3a and 3b to be efficiently attached to and detached from the heating device body.
[0022]
However, it is not always necessary to use two types of heating plates, a fixed type and a movable type, and only a movable type may be used as long as reliable adhesion to the loading pallet storage magazines 3a and 3b can be obtained.
[0023]
Also, the reason why the rail 8 is provided at the bottom of the heating device is that cooling is performed by natural cooling, but the bottom of the heating device has residual heat, so that a temperature difference occurs between the upper and lower portions of the loading pallet storage magazines 3a and 3b during cooling. . In addition, in order to perform stable cooling, it is desirable to arrange the loading pallet storage magazines 3a and 3b as close to the center of the heating device as possible. For this reason, by providing the rail 8, the loading pallet storage magazines 3a and 3b are raised so as to be disposed substantially at the center of the heating device, the contact area with the bottom of the heating device is reduced, and the temperature variation between the top and bottom is reduced. It suppresses. Therefore, as the material of the rail 8, it is desirable to use a material having low thermal conductivity (SUS in the embodiment). Further, the rail 8 reduces friction between the loading pallet storage magazines 3a and 3b and the bottom of the heating device, thereby facilitating attachment and detachment of the loading pallet storage magazines 3a and 3b to and from the heating device.
[0024]
FIG. 7 is a graph showing a result of performing temperature measurement under atmospheric pressure in a conventional heating device, and shows a temperature change with respect to time. FIG. 8 is a graph showing a result of temperature measurement performed under the atmospheric pressure in the heating device of the present invention, and shows a temperature change with respect to time as in FIG. The temperature measurement positions are points A to D in FIG.
[0025]
7 and FIG. 8, in the conventional heating device of FIG. 7, the temperature varies at each of the points A to D, whereas in the heating device of the present invention in FIG. It can be seen that is hardly seen. That is, when the heating device of the present invention is used, it can be said that uniform heat propagation with no variation in temperature is performed.
[0026]
FIG. 9 is a graph showing the result of performing the temperature measurement in the present invention not under the atmospheric pressure but under a vacuum pressure, and shows a temperature change with respect to time as in FIGS. 7 and 8.
[0027]
Comparing FIG. 8 with FIG. 9, there is no particular temperature variation in the graph under the vacuum pressure in FIG. 9 as in the graph under the atmospheric pressure in FIG. That is, in the heating device of the present invention, it can be said that uniform heat propagation is possible regardless of the atmospheric pressure / vacuum pressure.
[0028]
In addition, aluminum (Al), which has excellent thermal conductivity, was used as the material of the basic components including the loading pallet storage magazine, but the higher the thermal conductivity, the more effective the uniform heat propagation. Yes, but not limited to it.
[0029]
It is also possible to freely change the design to some extent, for example, by increasing the number of magazines for placing pallets and changing the number and arrangement of the heating plates accordingly.
【The invention's effect】
According to the present invention, a large number of liquid crystal display panels can be heat-treated at a time in a limited space, and the reduction in the number of heating plates enables not only the miniaturization of the entire heating device, but also the heating plate → Contact heat propagation in the order of placement pallet storage magazine → placement pallet → liquid crystal display panel enables uniform heating and cooling treatment regardless of atmospheric pressure / vacuum pressure, and zigzag generated in ferroelectric liquid crystal (ZZ) Poor alignment such as defects can be suppressed.
[Brief description of the drawings]
FIG. 1 is a schematic view showing a conventional heating device. FIG. 2 is a schematic view showing an embodiment of the present invention. FIG. 3 is a perspective view showing a liquid crystal display panel. FIG. 4 is a perspective view showing a mounting pallet. 5 is a perspective view showing a state in which the liquid crystal display panel is mounted on a mounting pallet. FIG. 6 is a perspective view showing a state in which the mounting pallet is stored in a mounting pallet storage magazine. Graph showing temperature change (under atmospheric pressure)
FIG. 8 is a graph showing a temperature change in the heating device of the present invention (under atmospheric pressure).
FIG. 9 is a graph showing a temperature change in the heating device of the present invention (under vacuum pressure).
[Explanation of symbols]
1a Movable heating plate 1b Movable heating plate 2 Fixed heating plate 3a Mounting pallet storage magazine 3b Mounting pallet storage magazine 4 Mounting pallet 5 Liquid crystal display panel 6 Ferroelectric liquid crystal 7 Recess 8 Rail

Claims (1)

加熱プレートを有する、強誘電性液晶表示パネルの加熱装置であって、少なくとも前記強誘電性液晶表示パネルを載置する載置パレットと、該載置パレットを複数枚層状に収納する載置パレット収納マガジンとを有し、該載置パレット収納マガジンを可動式の加熱プレートで挟持、若しくは固定式、可動式2種類の加熱プレートで挟持して加熱する事を特徴とする強誘電性液晶表示パネルの加熱装置。What is claimed is: 1. A heating device for a ferroelectric liquid crystal display panel having a heating plate, comprising: a mounting pallet on which at least the ferroelectric liquid crystal display panel is mounted; A ferroelectric liquid crystal display panel having a magazine, wherein the mounting pallet storage magazine is sandwiched between movable heating plates or fixed and movable and heated by being sandwiched between two types of heating plates. Heating equipment.
JP2003051999A 2003-02-27 2003-02-27 Ferroelectric liquid crystal display panel heating device Expired - Fee Related JP4118166B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003051999A JP4118166B2 (en) 2003-02-27 2003-02-27 Ferroelectric liquid crystal display panel heating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003051999A JP4118166B2 (en) 2003-02-27 2003-02-27 Ferroelectric liquid crystal display panel heating device

Publications (2)

Publication Number Publication Date
JP2004258555A true JP2004258555A (en) 2004-09-16
JP4118166B2 JP4118166B2 (en) 2008-07-16

Family

ID=33116973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003051999A Expired - Fee Related JP4118166B2 (en) 2003-02-27 2003-02-27 Ferroelectric liquid crystal display panel heating device

Country Status (1)

Country Link
JP (1) JP4118166B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103268030A (en) * 2013-05-28 2013-08-28 苏州优备精密电子有限公司 Liquid crystal panel aging trolley

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019216373A1 (en) 2018-05-10 2019-11-14 本田技研工業株式会社 Coating nozzle and coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103268030A (en) * 2013-05-28 2013-08-28 苏州优备精密电子有限公司 Liquid crystal panel aging trolley

Also Published As

Publication number Publication date
JP4118166B2 (en) 2008-07-16

Similar Documents

Publication Publication Date Title
US5588827A (en) Passive gas substrate thermal conditioning apparatus and method
KR101312676B1 (en) Active cooling substrate support
JP4850811B2 (en) Mounting table, processing apparatus and processing system
KR101060774B1 (en) Temperature control method of an electrode unit, a substrate processing apparatus, and an electrode unit
TW200901296A (en) Substrate processing apparatus, substrate processing method and recording medium
US11906246B2 (en) Organic film forming apparatus
JPH1195230A (en) Production of liquid crystal panel and apparatus for production
JP2015530477A (en) Substrate heating apparatus and process chamber
KR101227809B1 (en) Method for reducing temperature of substrate placing table, computer-readable storage medium, and substrate processing system
JP2010010628A (en) Bonding apparatus and bonding method
KR20120127463A (en) Transfer robot with substrate cooling
TWI362070B (en)
JP3971824B2 (en) Oven for baking a substrate and method for baking a coating material on a substrate
JP2004258555A (en) Device for heating ferroelectric liquid crystal display panel
TW201941274A (en) Substrate heating apparatus and substrate processing apparatus using the same
JP2000142876A (en) Base storage cassette
KR101035828B1 (en) Chamber for uniform substrate heating
JP2006085132A (en) Method of manufacturing liquid crystal display device and apparatus for manufacturing same
JP2009149964A (en) Mounting stage configuration and heat treatment apparatus
JPH0718323A (en) Heat treatment device
TW201633426A (en) Chamber for degassing substrates
JP2008089677A (en) Method and device for sealing liquid crystal panel
JP2021529438A (en) Substrate processing equipment and substrate processing method
JP4104902B2 (en) Substrate processing equipment
CN104167377B (en) Pallet cooling device, method, loading chamber and semiconductor equipment

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051104

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20071227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080108

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080304

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080408

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080422

R150 Certificate of patent or registration of utility model

Ref document number: 4118166

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110502

Year of fee payment: 3

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110502

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130502

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130502

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140502

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees