JP4109264B2 - Optical disc manufacturing apparatus and bonding apparatus - Google Patents

Description

The present invention relates to a manufacturing apparatus and a manufacturing method of an optical disc represented by a so-called DVD disc or Blu-ray Disc. More specifically, the present invention relates to an optical disc manufacturing apparatus and a laminating apparatus that are more suitable for manufacturing an optical disc having two recording layers on one side.

  For example, a Blu-ray disc, which is an optical recording medium called an optical disc, is a substrate made of polycarbonate or the like with grooves and pits formed on the surface, a reflective layer formed by sputtering, for example, formed on the upper surface of the groove or the like, recording A sputter layer comprising a layer, etc., a light transmission layer covering the upper surface of the sputter layer, and a protective layer covering the substrate surface. In order to further increase the recording capacity, a disk having a plurality of recording layers has been proposed. In this disk, a spacer layer is formed on the upper surface of the sputtered layer, and grooves and pits are formed on the upper surface of the spacer layer. Has been. A plurality of recording layers are obtained by sequentially forming the above-mentioned sputtered layer and the like on the upper surface of these grooves and the like, thereby further increasing the recording capacity.

  When manufacturing the above-described Blu-ray disc, the light transmission layer and the spacer layer are obtained by sticking an adhesive sheet or curing a layer of resin or the like formed by spin coating. Both methods have various characteristics, but in view of cost and productivity, the spin coating method is considered to be more suitable for practical use. In this case, the groove or the like on the spacer is formed by applying a stamper with a negative pattern formed in advance to the surface of the resin layer holding the viscosity and transferring the pattern, and then removing the stamper from the surface of the resin layer. Has been obtained.

JP 2000-315338 A JP 2000-348389 A JP 2003-045098 A Japanese Patent Application Laid-Open No. 07-093824

  Here, a point to be noted when sticking the stamper to the resin layer surface is to reduce the presence of bubbles or the like in the bonding surface as much as possible. In the manufacturing process of a DVD-type disk, which is a kind of optical disk, there is a process of bonding two disks as a process similar to the stamper bonding process. In the bonding step, the reduction of bubbles is required as in the stamper bonding step, and various methods described below have been proposed as countermeasures.

  For example, Patent Document 1 or 2 discloses a technique for reducing the amount of air bubbles by performing the bonding step in a reduced pressure environment. However, in these techniques, from the viewpoint of securing the time for removing bubbles from the bonding surface, it is necessary to secure a sufficient time for stacking the substrates, which is not practical as a production process. Patent Document 3 discloses a method of obtaining a good bonded surface by suppressing the generation of bubbles by applying a voltage between both substrates. However, the manufacturing equipment is complicated and material restrictions are imposed, and further improvements are required in practice.

  In addition, in the process of obtaining an optical disc by attaching a transparent member having a recording layer or the like to a rigid substrate, it is known that a raised portion on the ring exists in the vicinity of the outer periphery of the transparent member. The presence of the raised portion is a major factor that causes bubbles to remain when the substrate and the transparent member are bonded together or when the transparent member and the adhesive sheet used for bonding are bonded. This phenomenon is considered to occur similarly when a stamper is bonded to the surface of the resin layer.

  Patent Document 4 discloses a method for efficiently eliminating bubbles by using a jig that separately presses only the raised portion when the adhesive sheet and the transparent member are bonded together. However, when the method is carried out, further improvements in practical use are required due to the fact that the configuration as a manufacturing apparatus becomes complicated and that the time for actually performing the process cannot be significantly shortened. . Moreover, when the present applicant actually carried out the process, a significant bubble reduction effect was not obtained.

The present invention has been made in view of the above circumstances, and exists on a bonding surface when a stamper is bonded to a substrate or when another substrate, a transparent member, an adhesive sheet, or the like is bonded to a substrate. It is an object of the present invention to provide an optical disk manufacturing apparatus and manufacturing method capable of significantly reducing bubbles that occur. It is another object of the present invention to provide an optical disc manufacturing apparatus and a bonding apparatus with high production efficiency that can reduce bubbles while reducing the time required for the bonding process.

In order to solve the above-described problems, an optical disk manufacturing apparatus according to the present invention includes a substantially flat substrate formed on one surface so that a layer made of a viscous material forms a flat surface, and a substantially elastic substrate. An optical disk manufacturing apparatus for bonding a flat plate-like member so that a substrate and a predetermined surface of the substantially flat plate-like member face each other through a layer made of the viscous material, and in contact with the back surface of the substrate A substantially flat susceptor having a substrate support for supporting the substrate and a substantially flat member in contact with the substantially flat member at or near the outer periphery of the substantially flat member, and a predetermined distance from the surface of the layer made of a viscous material a substantially ring-shaped outer peripheral ring for holding a substantially flat member while maintaining the substantially rod-shaped ring supporting for supporting the peripheral ring protrudes from the susceptor surface at the periphery of the substrate support portion in the susceptor Holding means having a member, and the O-ring which has the effect of holding the position of the holding means by a frictional force acting between the disposed with ring support member between the susceptor and the ring support member, the flat plate surface of the substrate Can move in a predetermined axial direction perpendicular to the surface, move in the predetermined axial direction, abut the center of the back surface of the predetermined surface of the substantially flat plate member or the periphery of the center of the back surface, and bend the substantially flat plate member. Further, a pusher that is attached around the center or center of the surface of the layer made of a viscous material around the center or center of the predetermined surface of the substantially flat plate member, and a predetermined pusher disposed around the pusher with respect to the holding member. has a pusher pin that can impart a load to susceptor direction, the along the axial direction, the holding means, O-rings when that paste and a layer pusher is made of a material having a substantially flat member and viscosity Holding hand Holding the holding means by frictional force to be applied to the stage, as characterized Rukoto is operated so as to eliminate a predetermined distance with respect to the holding means against the frictional force by the pusher pin to impart load to the holding means Yes.

  Alternatively, in the above-described apparatus, each of the substrate and the substantially flat plate member has a through hole in the center portion, and the susceptor has a protrusion that passes through each of the through holes and positions the substrate and the substantially flat plate member. The pusher preferably abuts on the substantially flat plate member around the through hole in the substantially flat plate member. Furthermore, it is preferable that the above-described pusher is made of a material having elasticity in a region in contact with the substantially flat plate-like member.

The manufacturing method described above can also be applied as a bonding apparatus for a plurality of members, and the apparatus has a substantially flat plate shape formed on one surface so that a layer made of a viscous material forms a flat surface. Affixing the first member and the substantially flat second member having elasticity so that the first member and a predetermined surface of the second member face each other through a layer made of a viscous material A susceptor having a member support surface that contacts the back surface of the first member and supports the first member, and the second member in contact with the second member at or near the outer periphery of the second member. An outer ring that holds the second member while maintaining a predetermined distance from the surface of the layer made of a viscous material, and a substantially rod-shaped ring support member that protrudes from the susceptor surface around the substrate support portion and supports the outer ring. The suscept O-ring and a first vertical predetermined axis on the flat surface of the member having the function of holding the position of the outer peripheral ring by a frictional force acting between the disposed with ring support member between the over and the ring support member Is movable in the direction, moved in a predetermined axial direction, abutted with the center of the rear surface of the second member or the center of the rear surface of the second member, bent the second member, and predetermined of the second member A pusher that is attached to the center or center of the surface of the layer made of a viscous material at the center or around the center of the surface, and a pusher disposed around the pusher in the susceptor direction along a predetermined axial direction with respect to the outer ring. anda pusher pin that can impart a load, the outer ring, when the pusher is that adhered and a layer made of a material having a second member and viscosity by the frictional force which the O-ring is allowed to act on the ring support member Outside Holding the circumferential ring, it is characterized by causing operation to eliminate a predetermined distance with respect to the peripheral ring against the frictional force by the pusher pin to impart a load to the peripheral ring.

In order to solve the above-described problems, an optical disk manufacturing apparatus according to the present invention has a substantially flat substrate formed on one surface so that a layer made of a viscous material forms a flat surface, and an elastic property. An apparatus for manufacturing an optical disc, wherein a substantially flat plate-like member is bonded so that a layer surface made of a viscous material and a predetermined surface of the substantially flat plate-like member face each other through a layer made of a viscous material A disc-shaped index table that rotates by a predetermined angle about the axis center, and a plurality of susceptor units arranged on the index table so that each center has a predetermined angle interval around the axis, A susceptor having a substrate support part to be supported, and a predetermined surface from the surface of the viscous layer on the substrate provided around the substrate support part and supported by the substrate support part. Peripheral ring, arranged in a ring between the ring support member for holding the outer peripheral ring capable of maintaining a position a predetermined distance and protruding from a susceptor, a ring support member and susceptor for supporting a substantially flat member while maintaining a distance An O-ring in the susceptor that seals between the ring indicating member and the susceptor by exhibiting frictional force on each of the member and the susceptor, and a seal member that is disposed around the substrate support member on the surface of the susceptor. A susceptor unit having a flat plate member conveying device for supplying a substantially flat plate member to the outer ring when the susceptor stops at a first predetermined position on the index table, and a susceptor on the index table. When it stops at a predetermined position, it moves in a predetermined axial direction perpendicular to the rotation surface of the index table, A pusher pasting the substantially flat member to the substrate in contact with the back surface of a predetermined surface, with the pusher shaft and the pusher pins to drive the pusher bears a through hole, an opening in the arrangement direction of the substrate in a predetermined axis direction And a pusher support frame that can accommodate a part of the pusher and the pusher pin inside, a pusher shaft and the pusher support frame, and a pusher pin and the pusher support frame, respectively. includes a seal member, and a sealing member, by which the surfaces forming the periphery of the opening abuts, as characterized Rukoto evacuable substantially closed space for housing the substrate and substantially flat member is formed Yes.

  In the above-described manufacturing apparatus, the pusher abuts the center or central periphery of the back surface of the predetermined surface of the substantially flat plate member and bends the substantially flat plate member so that the central portion or the periphery of the predetermined surface of the substantially flat plate member is bent. Is preferably attached to the center of the surface of the layer made of a viscous material or around the center.

  For example, when a stamper kept in parallel with a spacer layer of a Blu-ray disc is bonded as it is, there is microscopic or macroscopic unevenness on the surface of the spacer layer in a temporarily cured state. When present, the concavity and convexity easily form a closed space between the spacer layer surface and the stamper surface. When an attempt is made to extract the gas confined in the space by the decompressed space present in the surroundings, much time is required even when the spacer layer surface has sufficient fluidity.

  As in the present invention, the possibility of forming the above-described closed space is greatly reduced by gradually advancing the bonding from the central portion of the disk toward the outer circumferential direction. Furthermore, by optimizing the pre-cured state, it is possible to suppress the occurrence of macroscopic unevenness on the spacer surface due to the surface tension of the resin, and the possibility of generating a closed space is further reduced. Moreover, even if the gas is trapped by microscopic unevenness by making the surrounding space a reduced pressure environment, it can be quickly extracted.

  Further, in the present invention, before the bonding process, the disk and the stamper are preliminarily aligned and maintained at predetermined intervals, and the bonding process is performed while maintaining this state. Therefore, the position accuracy between the disk and the stamper in the bonding process is high, and a higher quality optical disk can be obtained.

  Due to the above effects, by implementing the present invention, for example, a spacer layer free of bubbles can be obtained in a Blu-ray disc. In addition to the low possibility of forming a closed space, even if a closed space is created, the stamper bends to create a path for discharging trapped gas between the space and the surrounding decompression space. It is possible to ensure a large amount compared to the conventional case. Further, since the positioning between the disk and the stamper is performed in advance, the time required for the positioning is not required. Therefore, the time required for bubble removal is greatly shortened, and the bonding time can be greatly shortened.

  Also, in the present invention, unlike the case of the cited document 3 or 4, since a complicated mechanism for reducing bubbles is not required, the apparatus configuration can be simplified and downsized. Further, a complicated mechanism as in the case of performing bonding and positioning at the same time is not required. Therefore, an optical disc production line can be constructed at a low cost and with a small installation area.

Before describing the embodiment of the present invention, the main configuration and operation of the present invention will be described. This will be described below with reference to the drawings. In this embodiment, a Blu-ray disc manufacturing apparatus is used as an example. Therefore, the apparatus described below describes a stamper bonding apparatus that forms a UV resin layer on the upper surface of a resin substrate and presses the stamper on the upper surface.

1A to 1D are each an optical disk manufacturing apparatus as a premise of the present invention, more specifically, an axial section of the apparatus, the substrate, and the stamper in the main part of the stamper bonding apparatus to the substrate surface. The figure is shown. The axial direction described here refers to a direction that passes through the center of the disk-shaped resin substrate and is perpendicular to the substrate surface. In addition, a UV resin layer (a layer made of a resin having a property of being cured by irradiation of ultraviolet rays called UV light) 3 is formed on the surface of the disk-shaped resin substrate 2 in advance through another process. Yes. Further, the substrate 2 used in the following embodiments is formed by forming a through hole 2a extending from the back surface to the front surface at the center. Further, the stamper 4 having a larger outer diameter than the substrate 2 is used.

  The apparatus 1 includes a susceptor 11, an outer peripheral ring 21, and a pusher 31 as main components. The susceptor 11 has a substrate support portion 11a as a convex portion having a substantially disk shape. The support portion 11 a is in close contact with the back surface of the substrate 2 on the upper surface of the disk-shaped plane and supports the substrate 2. In addition, the center part of the board | substrate support part 11a is provided with the projection part 11b corresponding to the through hole 2a provided in the center part of the base | substrate 2. As shown in FIG. The protrusion 11b is inserted into the through hole 2a, whereby the substrate 2 is positioned with respect to the susceptor 11.

  The outer ring 21 is a ring-shaped member having an annular shape, and has an inner diameter that is concentric with the substrate support portion 11a and larger than the diameter of the substrate support portion 11a. In addition, one corner on the inner diameter side of the outer peripheral ring 21 (upper corner toward the above-described axis) is shaved to a predetermined depth from the upper surface of the ring, and a step portion 21a is provided. The step portion 21 a forms a stamper housing portion having an inner diameter slightly larger than the outer diameter of the stamper 4. The outer peripheral ring 21 holds the stamper 4 by accommodating the outer peripheral portion of the stamper in the accommodating portion formed by the annular step portion. Further, the outer ring 21 is supported by a ring support member 23 so as to be able to move close to and away from the susceptor 11. Here, the outer peripheral ring 21 has a predetermined distance from the surface of the UV resin layer 3 to the stamper 4 (strictly, the surface facing the stamper 4) in the stamper holding state (stop position at the upper end).

In this configuration , the pusher 31 has an elastic body made of hard rubber, resin or the like as the pusher body 33. The pusher body 33 is concentric with the axes of the substrate 2, the substrate support portion 11 a, and the like, and is disposed to face the substrate support portion 11 a via the stamper 4 and the substrate 2. The pusher body 33 has a substantially conical shape having an axial center coinciding with the axial center, and has a hole 33a for accommodating the protruding portion 11b of the susceptor 11 at the top of the substantially conical shape. In addition, the top portion of the substantially conical shape is arranged in a direction facing the substrate support portion 11a. The pusher main body 33 has a substantially conical bottom surface supported by a pusher support 35, and the pusher support 35 is connected to a pusher cylinder 39 via a pusher cylinder shaft 37. By the pusher cylinder 39, the pusher main body 33 is approached and separated from the substrate support portion 11a along the above-mentioned axis. Here, the pusher cylinder 39 drives the pusher cylinder shaft 39 in the above-described axial direction by supplying and discharging pressurized air supplied from a so-called compressed air line (not shown).

  With reference to the drawings, an actual stamper bonding operation with these configurations will be described below. First, the substrate 2 supported on the susceptor 11 and the stamper 4 supported on the outer peripheral ring 21 are transported to just below the pusher 31 while maintaining a predetermined interval. A UV resin layer 3 is formed on the surface of the substrate 2, and the stamper 4 is supported by the outer ring 21 so that the groove forming surface 4 a faces the UV resin layer 3. This state is shown in FIG. 1A. Note that the stamper 4 having a disk shape is also formed with a through hole 4b corresponding to the protrusion 11b at the center.

  Subsequently, the pusher body 33 in the pusher 31 is moved by the pusher cylinder 39 so as to approach the susceptor 11. Here, in the present embodiment, a cylindrical collar portion 33b is disposed around a hole portion 33a provided at the top of the pusher body 33 having a substantially conical shape. As the pusher body 33 moves, the top of the collar portion 33 b first comes into contact with the non-groove forming surface of the stamper 4. Since the pusher body 33 is composed of an elastic body, the collar portion 33b is deformed so as to contract in the axial direction. The protrusion 11b is fitted into the hole 33a and the collar 33b is deformed, whereby the pusher body 33, the stamper 4, the substrate 2 and the protrusion 11b are positioned.

  Further, when the pusher body 33 approaches the substrate support portion 11a, the stamper 4 is elastically deformed and comes into contact with the surface of the UV resin layer 3 from the periphery of the through hole 4b. As the pusher body 33 further moves, the stamper 4 and the substantially conical surface are elastically deformed to follow each other, and the contact area between the groove forming surface 4a and the surface of the UV resin layer 3 is changed from the periphery of the through hole 4b to the outer periphery. It increases toward the direction. This state is shown in FIG. 1B.

  The movement of the pusher body 33 stops in a state where the periphery of the through hole 4b is pushed into the surface of the UV resin layer 3 by a predetermined amount (or a state where the pusher body 33 is completely in contact). Subsequently, as shown in FIG. 1C, the outer peripheral ring 21 moves so as to approach the susceptor 11 (so that the stepped portion 21a approaches the substrate 2). That is, it moves so as to eliminate the above-mentioned predetermined distance. Due to the movement of the outer peripheral ring 21, the outer peripheral portion of the stamper 4 that is forcibly separated from the surface of the UV resin layer 3 is deformed into a flat shape that follows the periphery of the through hole 4b due to its elasticity. Thereafter, as shown in FIG. 1D, the pusher 31 is removed from directly above the susceptor 11, and conveyance to the position where the substrate 2 after the stamper 4 is attached is conveyed to the next process is started. Through the above steps, the stamper 4 is attached to the surface of the UV resin layer 3.

  By performing the above steps, the stamper 4 is gradually attached to the surface of the UV resin layer 3 from the region existing at the most central portion toward the outer peripheral portion of the disk. Note that the ambient environment when performing the above steps is not particularly described for the sake of simplification, but in actuality, these components are arranged in a vacuum (decompression) environment, and the above-described steps are performed. It has been broken. Therefore, in combination with the effect of the reduced pressure environment, the attachment is performed while always excluding air bubbles from between the stamper 4 and the UV resin layer 3, and a good bonding surface with reduced air bubbles is obtained.

In the configuration described above, an elastic body having a substantially conical shape is used as the pusher structure. However, for example, only the outer peripheral portion of the through hole 4b may be elastically pressed. In this case, it is preferable that the pusher body is a ring-shaped member, which is elastically indicated by a leaf spring or the like from the pusher support. In other words, if the depressible constituting the through holes around the stamper by an elastically deformable member, various forms may be included as variations thereof.

In the configuration as a premise of the present invention described above, the outer ring, if the outer peripheral edge of the stamper 4 is supportable shape, not limited to the shape shown example, taken in a greater concept as holding means It is preferable. That is, the stamper 4 can be supported by keeping a predetermined distance between the stamper 4 and the substrate 3, and the distance between the stamper and the substrate is maintained after the stamper is pressed and deformed by the pusher. It is sufficient that a series of operations to be eliminated can be performed. The holding means does not need to have a ring shape, and may have a mechanism for sucking and holding the vicinity of the outer peripheral end portion of the stamper. That is, what is necessary is just to hold | maintain this in the stamper outer periphery or its vicinity.

  It is also possible to adopt a configuration in which the outer ring is arranged on the pusher side. However, in this configuration, it is necessary to supply the stamper at the bonding position, and the mechanism may be complicated. In this case, the positioning between the substrate and the stamper and the bonding thereof are performed at the same time. However, it is difficult to secure the time that can be allocated to the positioning, and the positioning accuracy is compared with the present embodiment. May decrease. Moreover, when it is going to perform this bonding in a vacuum space, it is necessary to arrange | position all the structures mentioned above in this space. However, if the outer peripheral ring is disposed on the pusher side, it is difficult to construct a stamper supply means, which may increase the size of the apparatus.

In the configuration described above, the substrate acts as a substantially flat substrate or first member, the UV resin layer acts as a layer made of a viscous material, and the stamper has a substantially flat member or second member having elasticity. Acts as a second member. These configurations are not limited to the modes described here as long as they satisfy the functions. Further, in this configuration , the susceptor has a protrusion for alignment. However, in this configuration , for example, a protrusion is provided on the outer periphery of the substrate support portion on the susceptor and this is used for alignment. It is possible to do. The pusher, particularly the portion in contact with the stamper, preferably has elasticity in order to avoid an excessive load on the stamper and the substrate. However, it is also possible to configure this with a material having no elasticity. Further, the pusher, as a driving device such as a susceptor, although in the arrangement uses a pneumatic cylinder with two easy-called pressure control of the driving speed has a stop position, the structure is limited to devices Instead, various known drive devices can be used.

A bonding apparatus according to an embodiment of the present invention will be described below with reference to the drawings. It should be noted that the same reference numerals are used for the components that exhibit the same effects as the members described in the configuration that is the premise of the present invention described above, and detailed description thereof is omitted. Figure 2A~2D is a fragmentary cross-sectional view of the apparatus according to the present embodiment as viewed from the same perspective and FIG. 1A or the like, Figure 3 shows a partial plan view of the index table, in each view 3 Figures 4A and 4B It is a figure which shows the state which looked at the cross section in line 4A-4A and 4B-4B from the side.

In the apparatus according to this embodiment, the susceptor 11, various configurations associated with the peripheral ring 21 and they are more arranged on the index table 25 having a rotatable disk-shaped as one susceptor unit. These susceptor units are configured such that the center of the susceptor is arranged at a predetermined angle with the rotation center of the index table 25 as the center. The index table 25 rotates intermittently so as to stop the susceptor 11 at a predetermined position for a predetermined time. Further, an O-ring 27 on the table is disposed on the susceptor 11 and around the outer ring 21. Further, the ring support member 23 is configured by a substantially rod-like member that is arranged so as to be evenly distributed with respect to the center of the susceptor 11 and having an upper end connected to the lower surface of the outer peripheral ring 21.

  A driving device (not shown) is disposed at the lower end of the substantially rod-shaped member, and the driving device drives the member in the extending direction of the rod-shaped member. The driving device is included in the above-described unit together with the susceptor 11, and moves with the rotation of the index table 25 together with the susceptor 11. The substantially rod-shaped member is disposed through a through-hole 11 c that penetrates the susceptor 11 from the back surface to the front surface, and an in-susceptor O-ring 13 is attached inside the susceptor 11. The through-hole 11c in the susceptor 11 through which the member passes is sealed between the space between the front surface and the back surface of the susceptor by the O-ring 13 in the susceptor.

  The index table 25 has a susceptor through-hole 25a and a support member through-hole that penetrate from the front surface to the back surface in a region corresponding to the position where the ring support member 23 is disposed, and in a region where the index table 25 contacts the back surface 25b. A plurality of susceptor through holes 25 a are provided, and support angles 15 penetrating the holes are connected to the back surface of the susceptor 11, and each angle 15 is connected to the back surface of the index table 25 by a connecting bar 17.

  The pusher 31 is held so as to be drivable in the axial direction in a space inside 41 a provided on the pusher support frame 41 and having a substantially axially open opening in the axial direction. The pusher support frame 41 is fixed to a base 62, and a susceptor push-up cylinder 64 is further fixed to the base 62. The susceptor push-up cylinder 64 pushes the connecting bar 17 upward in the axial direction by the push-up cylinder shaft 66.

  The space holds the pusher body 33, the pusher support 35, the stamper 4 and the substrate 2 in a state in which the O-ring 27 on the susceptor 11 is pressed against the lower end surface constituting the opening of the space. The outer peripheral ring 21 and the susceptor 11 have an axial length that can be accommodated. The pusher cylinder shaft 37 extends to the outside of the space through a cylinder shaft through hole 41b that penetrates the wall defining the upper end surface of the cylindrical space 41a from the inside of the space to the outside. A cylinder shaft O-ring 43 is disposed inside the cylinder shaft through hole 41b so as to wind the cylinder shaft 37.

  Further, outer ring pusher pins 45 corresponding to a plurality of points on the outer ring 21 are arranged in parallel with the pusher cylinder shaft 37. The outer ring pusher pin 45 is introduced into the space from the outside of the cylindrical space 41a through the pusher pin through hole 41c, and a pusher pin O-ring 47 is inserted into the pusher pin inside the through hole 41c. Is arranged to wind. The cylinder space 41a and the external space are sealed by the cylinder shaft O-ring 43 and the pusher pin O-ring 47.

The outer peripheral ring pusher pins 45 are all coupled together by a coupling angle 49 outside the cylindrical space 41a. The coupling angle 49 is connected to the outer ring pusher cylinder 53 via the outer ring pusher cylinder shaft 51. By the cylinder 53, the cylinder shaft 51 can be expanded and contracted in the axial direction, and the outer ring pusher pin is driven along the above-described axial direction in accordance with the operation of the cylinder shaft. In the present embodiment , the air cylinder 53 is used as a driving device, but it can be replaced with various known driving devices according to control characteristics required for the cylinder.

  The cylindrical space 41a further includes an auxiliary space 41d for connecting the exhaust port 51 and the space. The exhaust port 51 is connected to an exhaust device (not shown). When the lower end surface around the opening constituting the opening of the cylindrical space 41 a and the O-ring 27 on the susceptor are pressed against each other, the lower opening of the space 41 a is closed by the susceptor 11. Further, this closed space is sealed from the external space by the O-ring 27 on the susceptor, the O-ring 13 in the susceptor, the O-ring 43 for the cylinder shaft, and the O-ring 47 for the pusher pin. Therefore, by exhausting the sealed space through the auxiliary space 41d and the exhaust port 51, the sealed space can be reduced (vacuum) space.

  The operation of the apparatus when the bonding process is actually performed using the above apparatus will be described below. As shown in FIGS. 3 and 4A, the substrate 4 on which the UV resin layer 3 has been formed is disposed on the susceptor 11 in the previous stage, and the substrate is transported together with the susceptor 11 as the index table 25 rotates. A stamper transfer device 60 (a flat plate member transfer device) is disposed at a position (first predetermined position) corresponding to the A stage shown in FIG. The stamper conveying device 60 holds one stamper 4 that is disposed in the standby position in advance so that the groove forming surface 4a faces the UV resin layer 3, and this is held at the stamper receiving position on the index table 25. Transport to a certain A stage.

  In the A stage, the stamper conveying device 60 places the stamper 4 on the outer ring 21. At this stage, the protrusion 11b passes through the through hole 2a of the substrate and the through hole 4b of the stamper, and as a result, the substrate and the stamper are positioned so as to be concentric. At this stage, the outer peripheral ring 21 is positioned at the upper end in the axial direction in the drive region, and the groove forming surface 4a and the surface of the UV resin layer 3 are parallel to each other with a predetermined interval T in the state where the stamper 4 is mounted. Held in a state. The interval T is set to a minute interval that can prevent contact between the index table and the like due to vibration or the like when the index table is driven or when the closed space is depressurized. For reference, FIG. 2A shows a state where the susceptor 11 does not exist below the pusher, that is, a state where the index table 25 is rotating.

  After the stamper 4 is placed, the index table 25 further rotates, and the susceptor 11 in this state stops when it is located immediately below the pusher 31, that is, at the second predetermined position. This state is shown in FIG. 2B. From here, the susceptor push-up cylinder 64 operates, and pushes the connecting bar 17 upward in the axial direction via the push-up cylinder shaft 66. At this stage, a drive device (not shown) that drives the outer ring 21 is not operating. By the operation of the susceptor push-up cylinder 64, the susceptor 11 and the outer ring 21 move upward in the axial direction while maintaining the positional relationship between the substrate 2 and the stamper 4. The movement of the susceptor 11 is stopped in a state where the O-ring 27 on the table is in contact with the pusher support frame 41 and the space for holding the pusher body 33, the substrate 2, the stamper 4 and the like is closed as shown in FIG. The

In this state, the closed space is exhausted through the exhaust port 51. The pusher 31 starts to be driven after the space reaches a certain pressure or after a predetermined time has elapsed after the start of exhaust. The operation of the pusher 31 and the operations of the related components are not particularly different from the operations of the above-described configuration that is a premise of the present invention, and thus description thereof is omitted here. In the configuration described above, the driving device for the outer peripheral ring 21 is not described in detail. And that for the mechanism for holding the outer peripheral ring to a predetermined height to place the susceptor side for this embodiment, it is done this by lowering the peripheral ring pusher pin 45 is for the case of reducing the outer peripheral ring.

  Specifically, in a state where the drive of the pusher body 33 in the pusher 31 is stopped, the outer peripheral ring pusher cylinder 53 starts driving, and the outer peripheral ring pusher pin 45 is extended through the pusher cylinder shaft 51 and the coupling angle 49. Move downward in the current direction. This movement continues even after the lower end portion of the pusher pin 45 comes into contact with the upper surface of the outer peripheral ring 21, and the movement is stopped when the stamper 4 is attached to the front surface of the UV resin layer 3. Thereafter, the exhaust is stopped and the atmospheric pressure in the sealed space is released, the susceptor 11 is lowered to the surface of the index table 25, and the index table 25 is rotated. By this rotation, the substrate after bonding is transferred to the next step, and the substrate and stamper before bonding are transferred directly below the pusher 31. By repeating the above steps, the substrate and the stamper are sequentially bonded to each other. In this embodiment, a pneumatic operation type air cylinder is used as the pusher drive device, but various known drive devices can be used instead of the air cylinder.

It will now be described another embodiment of the present invention. Figure 5 is a diagram showing still another embodiment of the present invention shows a construction of the apparatus in the same manner as FIG. 2C. In the present embodiment , the pusher body 34 made of a plate-like spring is used instead of the substantially conical pusher body made of the elastic body. The pusher body 34 includes a cylindrical member 34a and a spring member 34b. The spring member 34b has a substantially plate shape, and its end is fixed in the vicinity of the outer periphery of the contact surface of the pusher support 35 with the pusher body. Further, the spring member 34 b holds the cylindrical member 34 a at a portion corresponding to the protruding portion 11.

  During actual operation, the projection 11b is accommodated in the through hole in the cylindrical member 34a, so that the cylindrical member 34a presses around the through hole 4b in the stamper 4. In this case, the pressing point against the stamper 4 is basically only the region where the cylindrical member 34 a is in contact with the stamper 4. However, due to the elasticity of the stamper 4 itself and the elasticity of the spring member 34b, as the pusher 31 is lowered, the bonding region between the stamper 4 and the UV resin layer 3 is sequentially expanded from the periphery of the through hole 4b.

According to the present embodiment , it is expected that the action of sequentially expanding the bonding area between the stamper 4 and the UV resin layer 3 is inferior to the above-described pusher body. However, the pusher body of the present embodiment is easy to make, and the contact with the stamper 4 can be controlled more reliably.

In the above-described embodiments and the like , a substrate having a disk shape in which a simple through hole is provided in a central portion that is usually used is used. However, the application target of the present invention is not limited to the substrate having the shape. For example, it is good also as using the board | substrate which has a cylindrical protrusion in the center part which the present applicant proposes. FIG. 6 shows the substrate and the susceptor targeted therefor in the same manner as in FIG. 3A. Substrate 2 to which the present embodiment is directed has a recess 2b of the bottom circular formed on the back surface of the substrate, and a cylindrical portion 2c protruding substrate surface at the substrate center.

  The axial centers of the recess 2b and the cylindrical portion 2c coincide with an axis that passes through the center of the substrate and is perpendicular to the substrate. Further, the through hole 2a penetrating the cylindrical portion communicates with the recess 2b. The substrate support 11a of the susceptor 11 is formed with a first protrusion 11d and a second protrusion 11e having shapes that can be inserted into the recess 2b and the through hole 2a. When these protrusions are fitted in the corresponding holes, the positional relationship between the substrate 2 and the susceptor 11 is controlled.

  In addition, when using the said board | substrate, the through-hole 4b in the stamper 4 has a hole diameter which can penetrate the cylindrical part 2c. Further, the inner diameter of the hole 33a provided in the pusher main body so as to correspond to the protrusion 11b described in the above-described embodiments and the like is set so that the cylindrical part 2c can be inserted therethrough. Is done.

In the present embodiment , for the purpose of performing the bonding step under a reduced pressure environment, the susceptor unit has both a driving mechanism for the outer ring to facilitate the formation of the closed space. However, as long as the distance between the substrate and the stamper can be held in parallel and at a predetermined value, the outer ring may protrude from the surface of the susceptor with a predetermined height by a spring or the like. Further, the ring support member does not change its position unless it receives a certain load due to the frictional force received from the O-ring in the susceptor. By utilizing this, the ring support member may be basically supported only by the O-ring in the susceptor, and the driving may be performed by the outer ring pusher pin and other external mechanisms provided as others. In the above-described embodiment, the substrate and the like are supported horizontally, but the support direction is not limited to the horizontal, and can be supported in various directions such as the vertical direction.

  In the above embodiment, the spacer layer in the Blu-ray disc is exemplified as an object of the present invention, and the apparatus and method mainly used in the bonding process when forming the layer have been described. However, the application target of the present invention is not limited to these, and is a process of bonding two plate-like members having elasticity, and it is preferable to avoid the inclusion of bubbles or the like in the bonding region as much as possible, for example, a book As a field of application closest to the invention, a substrate bonding process in DVD can be considered.

It is a figure which shows the state which looked at the apparatus main part which bonds a board | substrate and a stamper from the axial cross section regarding the structure used as the premise of this invention. It is a figure which shows the state which looked at the apparatus main part which bonds a board | substrate and a stamper from the axial cross section regarding the structure used as the premise of this invention. It is a figure which shows the state which looked at the apparatus main part which bonds a board | substrate and a stamper from the axial cross section regarding the structure used as the premise of this invention. It is a figure which shows the state which looked at the apparatus main part which bonds a board | substrate and a stamper from the axial cross section regarding the structure used as the premise of this invention. It relates to an embodiment of the present invention, showing a state viewed apparatus main unit for performing the bonding between the substrate and the stamper from axial section. It relates to an embodiment of the present invention, showing a state viewed apparatus main unit for performing the bonding between the substrate and the stamper from axial section. It relates to an embodiment of the present invention, showing a state viewed apparatus main unit for performing the bonding between the substrate and the stamper from axial section. It relates to an embodiment of the present invention, showing a state viewed apparatus main unit for performing the bonding between the substrate and the stamper from axial section. An apparatus according to one embodiment of the present invention, is a plan view of the structure of the stamper mounting position on the index table. It is a figure which shows the state which looked at the cross section in line 4A-4A in FIG. It is a figure which shows the state which looked at the cross section in line 4A-4A in FIG. Respect another embodiment of the present invention, showing a state viewed apparatus main unit for performing the bonding between the substrate and the stamper from axial section. It is a figure which shows the other board | substrate form which can be used as the object of this invention.

Explanation of symbols

2: substrate, 3: UV resin layer, 4: stamper, 11: susceptor, 13: O-ring in susceptor, 15: support angle, 17: connecting bar, 21: outer ring, 23: ring support member, 25: index table 27: O-ring on the table, 31: Pusher, 33, 34: Pusher body, 35: Pusher support, 37: Pusher cylinder shaft, 39: Pusher cylinder, 41: Pusher support frame, 43: O-ring for cylinder shaft, 45: outer ring pusher pin, 47: O-ring for pusher pin, 49: coupling angle, 51: exhaust port

Claims (6)

A substantially flat substrate formed on one surface so that a layer made of a viscous material forms a flat surface, and a substantially flat member having elasticity, a predetermined in the substrate and the substantially flat member An optical disk manufacturing apparatus that is bonded so that a surface faces each other through a layer made of the viscous material,
A substantially flat susceptor having a substrate support portion that contacts the back surface of the substrate and supports the substrate ;
The substantially flat plate-like member is held in contact with the substantially flat plate-like member at an outer peripheral portion or in the vicinity of the outer peripheral portion of the substantially flat plate-like member, and holds the substantially flat plate-like member at a predetermined distance from the surface of the layer made of the viscous material. A holding means having a ring-shaped outer ring and a substantially rod-shaped ring support member that protrudes from the susceptor surface around the substrate support portion of the susceptor and supports the outer ring ;
An O-ring arranged between the susceptor and the ring support member and having an action of holding the position of the holding means by a frictional force acting between the ring support member;
The substrate is movable in a predetermined axial direction perpendicular to the flat plate surface of the substrate, moves in the predetermined axial direction, and comes into contact with the center of the back surface of the predetermined surface of the substantially flat plate member or the periphery of the back surface center. A pusher that bends the substantially flat member and attaches the center or the center periphery of the substantially flat member to the center or the center of the layer surface made of the material having viscosity ,
A pusher pin disposed around the pusher and capable of applying a load in the susceptor direction along the predetermined axial direction with respect to the holding member ;
The holding means, when said pusher is that adhered and a layer made of a material having the viscosity and the substantially plate-shaped member holds the holding means by a friction force which the O-ring is caused to act on the holding means apparatus for producing an optical disc, characterized by causing operation to eliminate the predetermined distance with respect to the holding means against the frictional force by the pusher pin to impart the load to the holding means.   The substrate and the substantially flat plate-like member each have a through hole in a central portion, and the susceptor has a protrusion that passes through each of the through holes and positions the substrate and the substantially flat plate member, 2. The optical disc manufacturing apparatus according to claim 1, wherein the pusher abuts on the substantially flat plate member around the through hole in the substantially flat plate member. The pusher, the substantially plate-like member and the optical disk manufacturing apparatus according to any one of claims 1 to 2 in contact area, characterized in that it is made of a material having elasticity. A substantially flat plate-like first member formed on one surface so that a layer made of a viscous material forms a flat surface, and a substantially flat plate-like second member having elasticity, the first member And a predetermined surface of the second member are bonded so as to face each other through a layer made of the viscous material,
A susceptor having a member support surface that contacts the back surface of the first member and supports the first member;
An outer ring that contacts the second member at or near the outer periphery of the second member and holds the second member at a predetermined distance from the surface of the layer made of the viscous material;
A substantially rod-shaped ring support member that protrudes from the surface of the susceptor and supports the outer ring around the substrate support;
An O-ring that is disposed between the susceptor and the ring support member and has an action of maintaining the position of the outer ring by a frictional force acting between the ring support member;
The first member is movable in a predetermined axial direction perpendicular to the flat surface of the first member, moved in the predetermined axial direction, and the back surface center of the predetermined surface of the second member or the periphery of the back surface center A pusher that abuts, deflects the second member, and pastes the center or center of the predetermined surface of the second member around the center or the center of the layer surface made of the viscous material ;
A pusher pin disposed around the pusher and capable of applying a load in the susceptor direction along the predetermined axial direction with respect to the outer peripheral ring ;
The outer peripheral ring, when the pusher is that adhered and a layer made of a material having the viscosity and the second member holds the outer peripheral ring by a frictional force said O-ring is caused to act on the ring support member , stuck the pusher pin is characterized in that cause operation to eliminate the predetermined distance relative to said outer peripheral ring against the frictional force by applying the load to the peripheral ring device. A substantially flat substrate formed on one surface so that a layer made of a viscous material forms a flat surface, and a substantially flat plate member having elasticity, a layer surface made of the viscous material, and the An apparatus for manufacturing an optical disc, wherein a predetermined surface of a substantially flat plate-like member is bonded so as to face each other through a layer made of the viscous material,
A disk-shaped index table that rotates by a predetermined angle about the axis center;
A plurality of susceptor units disposed on the index table so that each center has the predetermined angle interval with the axis as a center, the susceptor having a substrate support part for supporting the substrate, and the substrate support An outer ring that supports the substantially flat member at a predetermined distance from the surface of the viscous layer on the substrate supported by the substrate support and is supported by the substrate support , and protrudes from the susceptor. A ring support member that holds the outer peripheral ring at a position where the predetermined distance can be maintained; and a frictional force that is disposed between the ring support member and the susceptor and that is disposed between the ring support member and the susceptor. An O-ring in the susceptor that seals between the ring support member and the susceptor, and a surface of the susceptor that is the substrate support portion. A susceptor unit having a sealing member disposed around
When the susceptor stops at a first predetermined position on the index table, a flat plate member conveying device that supplies the substantially flat plate member to the outer peripheral ring;
When the susceptor stops at a second predetermined position on the index table, the susceptor moves in a predetermined axial direction perpendicular to the rotation surface of the index table and contacts the back surface of the predetermined surface of the substantially flat plate member. A pusher that contacts and affixes the substantially flat member to the substrate ;
A pusher pin that extends around the pusher in the predetermined direction and can be driven, and can apply a load in the susceptor direction to the outer peripheral ring in the predetermined direction;
The pusher shaft for driving the pusher and the pusher pin have a hole through which the pusher pin can pass, and have a cylindrical shape having an opening in the arrangement direction of the substrate in the predetermined axial direction, and a part of the pusher and the pusher pin A pusher support frame that can be housed inside,
A seal member disposed between the pusher shaft and the pusher support frame and between the pusher focus and the pusher support frame,
It said sealing member, by a surface forming the periphery of the opening abuts the production of an optical disc, wherein Rukoto evacuable substantially closed space is formed for accommodating the substrate and the substantially flat member apparatus. The pusher is in contact with the center or central periphery of the back surface of the predetermined surface of the substantially flat plate member, and bends the substantially flat plate member so that the center or central periphery of the predetermined flat plate member is around the predetermined surface. 6. The optical disk manufacturing apparatus according to claim 5 , wherein the optical disk manufacturing apparatus is attached to a central portion of the layer surface made of a viscous material or around the central portion.

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