JP4109262B2 - 光音響センサー用測定チャンバー - Google Patents
光音響センサー用測定チャンバー Download PDFInfo
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- JP4109262B2 JP4109262B2 JP2005017085A JP2005017085A JP4109262B2 JP 4109262 B2 JP4109262 B2 JP 4109262B2 JP 2005017085 A JP2005017085 A JP 2005017085A JP 2005017085 A JP2005017085 A JP 2005017085A JP 4109262 B2 JP4109262 B2 JP 4109262B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
- G01N29/046—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks using the echo of particles imparting on a surface; using acoustic emission of particles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
- G01N29/2425—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
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- G01N2291/00—Indexing codes associated with group G01N29/00
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- G01N2291/02809—Concentration of a compound, e.g. measured by a surface mass change
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02836—Flow rate, liquid level
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02854—Length, thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
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Description
ガス状試料の状態で光を吸収する物質を連続的に測定するための光音響センサー用の測定チャンバーに関する。
前記開示された測定セルの短所は、窓が汚化し易いことであり、この窓を通ってレーザー光線Lは断続的に入射および射出する。特にエアロゾル、例えば内燃機関から出るかあるいは一般的に環境内に存在するすす粒子を測定するために光音響セルを使用する場合、この窓が汚化し易いことは重大な問題である。流れ計算により、例えば共鳴するセルの左側に入射する気体がすでに左側の“ノッチ”フィルター容積内に、窓に向かって流れを生じさせる渦を形成することがわかった。それにより測定エアロゾルの粒子はそこで若干堆積し、かつ同様に外乱効果を引起す。共鳴するセルを測定ガスが貫流した後、測定ガスは相対する窓に向かって直接流れ、それにより同様に測定エアロゾルの粒子は若干堆積し、同様に外乱効果が生じる。窓における堆積が同様に光を吸収し、かつ妨害するようにして重なり合う音波を発生させることにより外乱効果は引起される。それにより特に測定エアロゾルの濃度が低い場合の正確な測定は妨げられる。このセル内の流れの有限要素計算結果を図3に示す。この場合流れの方向と速度は、図においてベクトルの方向と長さにより特徴付けられている。
部分セルの実際の長さとλ/4(1/4波長)の間における単純な整数関係との差は、“ノッチ”フィルターANの位相変位効果により、あるいは、場合によっては連続的に形成される、一方の直径からもう一方の直径までの移行部において与えられる反射条件と伝達条件により生じ、かつ−経験に基づいてかあるいはシミュレーション計算により−適切に対応して考慮せねばならない。
3 流入口
4 流出口
5 流出口
11 環状管路
12 環状管路
13 環状管路
21 環状間隙
22 環状間隙
23 環状間隙
31 管部分
32 チャンバー
33 チャンバー
34 管部分
35 チャンバー
Claims (7)
- 試料のための少なくとも一つの流入口と少なくとも一つの流出口と、試料が縦方向に貫流可能な、マイクロフォンを備えた管部分、ならびに管部分と面一で並んでいるレーザー光線のための少なくとも一つの入射位置と射出位置とを備え、この入射位置と射出位置が、管部分に比べて拡張された断面積を有する各々少なくとも一つのチャンバーにより測定管から間隔をおいて配置されている様式の、
ガス状試料の状態で光を吸収する物質を連続的に測定するための光音響センサー用の測定チャンバーにおいて、
二つの流入口(2,3)が互いに相対する管部分(31)の端部に設けられており、少なくとも一つの流出口(4)が流入口(2,3)間の中央の位置に設けられていることを特徴とする測定チャンバー。 - 流入口(2,3)および/または少なくとも一つの流出口(4)が
、管部分31を同軸に取囲む環状管路(11,12あるいは13)に変わり、環状管路から半径方向の流入管路あるいは流出管路が管部分(31)まで延びていることを特徴とする請求項1記載の測定チャンバー。 - 流入口(2,3)および/または少なくとも一つの流出口(4)が、管部分(31)を同軸に取囲む環状管路(11,12あるいは13)に変わり、環状管路から、幅の狭い環状スロット(21,22あるいは23)が管部分(31)まで延びていることを特徴とする請求項1記載の測定チャンバー。
- 流入口(2)と中央の流出口(4)が、管部分(31)の端部に設けられており、この管部分が管部分(31)と比べて拡張された断面積を有するチャンバー(32,33)の各々により区画されており、それにより共鳴する部分セルを定義され、この場合流出口(4)に隣接したチャンバー(33)には、管部分(31)の断面積と同じ広さの断面積を有する他の管部分(34)、ならびに管部分(34)に比べて拡張された断面積を有する他のチャンバー(35)が接続しており、さらにこの場合第二流入口(3)が流出口(4)に相対している他の管部分(34)の端部に設けられていることを特徴とする請求項1〜3のいずれか一つに記載の測定チャンバー。
- 中央チャンバー(33)と他の管部分(34)の長さが、各々共鳴する部分セルの管部分(31)の長さのほぼ半分であることを特徴とする請求項4記載の測定チャンバー。
- 流入口(2)と二つの中央の流出口(4,5)の第一流出口(4)が管部分(31)の端部に設けられており、この管部分が管部分(31)に比べて拡張された断面積を有するチャンバー(32,33)の各々により区画されており、それにより共鳴する部分セルを定義され、この場合第一流出口(4)に隣接したチャンバー(33)には、管部分(31)の断面積と同じ広さの断面積と同じ長さを有する他の管部分(34)、ならびに管部分(34)に比べて拡張された断面積を有する他のチャンバー(35)が接続しており、さらにこの場合中央チャンバー(33)に接続している他の管部分(34)の端部には第二中央流出口(5)が、ならびに第二中央流出口(5)に相対している他の管部分(34)の端部には第二流入口(3)が設けられていることを特徴とする請求項1〜3のいずれか一つに記載の測定チャンバー。
- 中央チャンバー(33)と他の管部分(34)の長さが、各々共鳴する管部分(31)の長さとほぼ同じであることを特徴とする請求項6記載の測定チャンバー。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT0005204U AT6894U3 (de) | 2004-01-28 | 2004-01-28 | Messkammer für photoakustische sensoren |
Publications (2)
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JP2005214973A JP2005214973A (ja) | 2005-08-11 |
JP4109262B2 true JP4109262B2 (ja) | 2008-07-02 |
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JP2005017085A Active JP4109262B2 (ja) | 2004-01-28 | 2005-01-25 | 光音響センサー用測定チャンバー |
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Country | Link |
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US (1) | US7345766B2 (ja) |
EP (1) | EP1564543B1 (ja) |
JP (1) | JP4109262B2 (ja) |
CN (1) | CN100350234C (ja) |
AT (1) | AT6894U3 (ja) |
DE (1) | DE502004004284D1 (ja) |
DK (1) | DK1564543T3 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
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EP1883803B1 (en) * | 2005-04-26 | 2012-06-13 | Koninklijke Philips Electronics N.V. | Low cost apparatus for detection of nitrogen-containing gas compounds |
DE102005030151B3 (de) * | 2005-06-28 | 2006-11-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Photoakustischer Freifelddetektor |
DE102006048839B4 (de) * | 2006-10-16 | 2010-01-07 | Eads Deutschland Gmbh | Photoakustische Gassensor-Vorrichtung mit mehreren Messzellen |
EP1962077A1 (en) * | 2007-02-21 | 2008-08-27 | IR Microsystems S.A. | Gas sensor |
DE102007043951B4 (de) * | 2007-09-14 | 2009-07-30 | Protronic Innovative Steuerungselektronik Gmbh | Vorrichtung zur Detektion von Molekülen in Gasen |
EP2386733A1 (de) * | 2010-05-14 | 2011-11-16 | Schaller Automation Industrielle Automationstechnik GmbH & Co. KG | Anlage und Verfahren zum Ermitteln von Messwerten von Gasen und/oder eines Aerosols für eine Arbeitsmaschine |
US20120118042A1 (en) * | 2010-06-10 | 2012-05-17 | Gillis Keith A | Photoacoustic Spectrometer with Calculable Cell Constant for Quantitative Absorption Measurements of Pure Gases, Gaseous Mixtures, and Aerosols |
GB2484673A (en) * | 2010-10-18 | 2012-04-25 | Univ Dublin City | A photoacoustic inspection device |
US8848191B2 (en) | 2012-03-14 | 2014-09-30 | Honeywell International Inc. | Photoacoustic sensor with mirror |
US20140026639A1 (en) * | 2012-07-30 | 2014-01-30 | General Electric Company | System and method for photoacoustic gas analysis |
AT511934B1 (de) | 2012-12-14 | 2014-06-15 | Avl List Gmbh | Fotoakustische Messzelle |
CN103266883A (zh) * | 2013-05-13 | 2013-08-28 | 中国石油天然气股份有限公司 | 一种油井中利用相对密度找水的方法及装置 |
CN103983544B (zh) * | 2014-05-28 | 2015-12-30 | 南京大学 | 多通道气溶胶散射吸收测量仪 |
DE102015117405A1 (de) * | 2015-10-13 | 2017-04-13 | Rbr Messtechnik Gmbh | Vorrichtung und Verfahren zur Messung der Feinstaubemissionen aus Feuerungen |
WO2019014697A1 (de) | 2017-07-20 | 2019-01-24 | Avl List Gmbh | Photoakustische messvorrichtung mit resonatorelementen |
EP3724633A1 (en) * | 2017-12-15 | 2020-10-21 | Ams Ag | Integrated thermophoretic particulate matter sensors |
AT520793B1 (de) * | 2017-12-28 | 2021-02-15 | Avl List Gmbh | Messvorrichtung zur Ermittlung einer Messgröße eines Messgases |
WO2020033046A1 (en) * | 2018-08-08 | 2020-02-13 | Applied Materials, Inc. | Method of gas composition determination, adjustment, and usage |
CN109374529B (zh) * | 2018-09-13 | 2020-04-28 | 大连理工大学 | 一种半开腔共振式光声池 |
EP3693725B1 (en) * | 2019-02-11 | 2021-04-07 | Infineon Technologies AG | Photoacoustic sensor |
US11788965B2 (en) * | 2019-02-21 | 2023-10-17 | Arizona Board Of Regents On Behalf Of Arizona State University | Folic acid functionalized copper sulfide nanoparticles for the detection of ovarian cancer cells in flow |
CN116930091B (zh) * | 2023-09-14 | 2023-12-12 | 武汉理通微芬科技有限公司 | 基于非共振光声池的气体分析装置 |
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- 2004-01-28 AT AT0005204U patent/AT6894U3/de not_active IP Right Cessation
- 2004-12-01 DE DE502004004284T patent/DE502004004284D1/de active Active
- 2004-12-01 EP EP04450223A patent/EP1564543B1/de active Active
- 2004-12-01 DK DK04450223T patent/DK1564543T3/da active
- 2004-12-22 US US11/018,241 patent/US7345766B2/en active Active
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2005
- 2005-01-20 CN CNB2005100043879A patent/CN100350234C/zh active Active
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DK1564543T3 (da) | 2007-08-06 |
US20050160800A1 (en) | 2005-07-28 |
CN1654945A (zh) | 2005-08-17 |
JP2005214973A (ja) | 2005-08-11 |
AT6894U3 (de) | 2005-01-25 |
AT6894U2 (de) | 2004-05-25 |
DE502004004284D1 (de) | 2007-08-23 |
EP1564543B1 (de) | 2007-07-11 |
CN100350234C (zh) | 2007-11-21 |
US7345766B2 (en) | 2008-03-18 |
EP1564543A2 (de) | 2005-08-17 |
EP1564543A3 (de) | 2005-08-24 |
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