JP4095263B2 - High frequency package - Google Patents

High frequency package Download PDF

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Publication number
JP4095263B2
JP4095263B2 JP2001256112A JP2001256112A JP4095263B2 JP 4095263 B2 JP4095263 B2 JP 4095263B2 JP 2001256112 A JP2001256112 A JP 2001256112A JP 2001256112 A JP2001256112 A JP 2001256112A JP 4095263 B2 JP4095263 B2 JP 4095263B2
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JP
Japan
Prior art keywords
dielectric
metal frame
frequency package
base plate
dielectric member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001256112A
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Japanese (ja)
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JP2003069301A (en
Inventor
治夫 小島
智之 木谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
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Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP2001256112A priority Critical patent/JP4095263B2/en
Publication of JP2003069301A publication Critical patent/JP2003069301A/en
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Publication of JP4095263B2 publication Critical patent/JP4095263B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は高周波の回路部品などを収納する高周波パッケージに関する。
【0002】
【従来の技術】
高周波パッケージは、ベースプレート上の回路部品が配置される領域を所定高さをもつ矩形状の枠体で囲み、この枠体部分の外側から内側に線路導体が貫通する構造をしている。そして、枠体の内側に突出した線路導体と枠体内のベースプレート上に配置された回路部品がワイヤボンディングなどで接続される。
【0003】
上記した高周波パッケージの1つとして、ベースプレートおよび枠体部分を金属で形成し、枠体で囲まれた内部空間をシールドする、いわゆるメタルウォールパッケージ型がある。
【0004】
メタルウォールパッケージ型は、金属製枠体の一部が誘電体部材たとえばセラミックで形成され、この誘電体部材の部分を線路導体が貫通している。また、金属製枠体の内側に位置する線路導体部分は誘電体基板上に形成されている。
【0005】
【発明が解決しようとする課題】
従来の高周波パッケージたとえばメタルウォールパッケージ型は、金属製枠体の一部に設けられた誘電体部材の部分を線路導体が貫通し、金属製枠体内に伸びた線路導体部分は誘電体基板上に設けられている。この場合、金属製枠体を貫通する部分では、金属製枠体やベースプレートを外導体とする同軸線路が形成され、金属製枠体の内側では、ベースプレートを接地導体とするマイクロストリップ線路が形成される。
【0006】
上記した構造の高周波パッケージの場合、たとえば金属製枠体の一部に設けられる誘電体部材と金属製枠体の内側に位置する誘電体基板が一体に形成され、同じ誘電体材料が使用されている。そのため、金属製枠体の貫通部分に形成される同軸線路と、金属製枠体の内側に形成されるマイクロストリップ線路との特性インピーダンスが相違し、たとえばマイクロストリップ線路の特性インピーダンスの方が同軸線路よりも高くなり、電圧定在波比など電気的特性を悪化させている。
【0007】
この場合、金属製枠体の内側に位置する線路導体の幅を広くし、マイクロストリップ線路の特性インピーダンスを小さくすることが考えられる。しかし、金属製枠体の誘電体部材に線路導体を貫通させる場合、通常、誘電体部材に線路導体が通る穴をあけ、この穴に線路導体を通した後、誘電体部材を加熱し、線路導体を気密に封着する方法が取られている。したがって、線路導体の先端部分の幅が広いと、これに合わせて誘電体部材にあける穴も大きくなる。その結果、誘電体部材を加熱し線路導体を封着する際に、先端部分に比べて幅が狭くなっている線路導体と誘電体部材との気密性の確保が困難になる。
【0008】
本発明は、上記した欠点を解決し、良好な電圧定在波比および気密性が得られる高周波パッケージを提供することを目的とする。
【0009】
【課題を解決するための手段】
本発明は、回路部品が配置されるベースプレートと、このベースプレートの前記回路部品が配置される領域を所定の高さで囲み、一部が誘電体部材で形成された金属製枠体と、この金属製枠体で囲まれた内側で、前記誘電体部材の部分に隣接して前記ベースプレート上に設けられた誘電体基板と、前記誘電体部材を貫通して前記誘電体基板上まで伸び、前記誘電体部材を貫通する部分で同軸線路を形成し、前記誘電体基板上でマイクロストリップ線路を形成する幅が一様の帯状線路導体とを具備した高周波パッケージにおいて、前記金属製枠体の一部を形成する前記誘電体部材の比誘電率よりも前記誘電体基板の比誘電率を大きくしたことを特徴とする。
【0010】
【発明の実施の形態】
本発明の実施形態について図1を参照して説明する。
【0011】
符号11は金属製ベースプレートで、金属製ベースプレート11上の回路部品が配置される領域を囲んで、たとえば矩形状の金属製枠体12が所定の高さに形成されている。金属製枠体12のたとえば対向する2つの枠体辺121、122の一部に、それぞれ断面が矩形の貫通口12a、12bが設けられている。この貫通口12a、12bの部分は所定の比誘電率をもつ誘電体部材13a、13bたとえばガラスで封止されている。また、金属製枠体12の内側に、金属製枠体12の一部を構成する誘電体部材13a、13bに隣接して、誘電体部材13a、13bよりも大きい比誘電率をもつガラス製の誘電体基板14a、14bがベースプレート11上に設けられている。なお、誘電体基板14aは図面の関係から示されていない。
【0012】
そして、たとえばコバール材の帯状線路導体15a、15bが誘電体部材13a、13bの部分を貫通し、金属製枠体12内側の誘電体基板14a、14b上まで伸びている。線路導体15a、15bは、その幅部分を利用して、金属製枠体12内に配置された回路部品(図示せず)とたとえばワイヤボンディングによって接続される。
【0013】
なお、線路導体15a、15bと回路部品をワイヤボンディングした後、金属製枠体12の上部開口は蓋(図示せず)で封止される。
【0014】
ここで、図1の高周波パッケージを上方から見た構造を図2(a)に示す。また、図2(a)を線分a−aで断面にした断面図を図2(b)に示す。図2では、図1に対応する部分には同じ符号を付し重複する説明を省略する。
【0015】
上記した構成の場合、線路導体15a、15bは、枠体12を貫通する部分では、金属製枠体12およびベースプレート11を外導体とする同軸線路を構成している。金属製枠体12の内側では、ベースプレート11を接地導体とするマイクロストリップ線路を構成している。この場合、金属製枠体12の一部を構成する誘電体部材13a、13bよりも金属製枠体12内側の誘電体基板14a、14bの比誘電率を大きくしている。そのため、金属製枠体12部分の同軸線路と金属製枠体12内側のマイクロストリップ線路の特性インピーダンスの差が小さくなり、電圧定在波比が低減する。
【0016】
たとえば金属製枠体12の一部を構成する誘電体部材13a、13bとして比誘電率が4.1のガラスを用い、また、誘電体基板14a、14bの誘電体として比誘電率が7.0のガラスを用いた場合、この両方に比誘電率が4.1の誘電体材料を用いた場合に比べ、高周波入出力端子の電圧定在波比が2.1から1.3に低減した。
【0017】
上記の実施形態では、金属製枠体部分の誘電体部材および金属製枠体内側の誘電体基板にガラスを使用している。セラミックに比べた場合、ガラスの方が比誘電率の範囲が広く、この発明に適している。
【0018】
また、上記の構成の場合、線路導体の幅が一様であるため、製造時に、金属製枠体部分の誘電体部材に設ける穴を大きくする必要がなく、線路導体と誘電体部材の気密性が確保される。
【0019】
なお、上記の実施形態では、帯状線路導体としてコバールを用いている。この場合、コバールの熱膨張率が誘電体材料のガラスとほぼ同じであるため、帯状線路導体と誘電体部材との気密性が確保される。
【0020】
【発明の効果】
本発明によれば、良好な電圧定在波比および気密性が得られる高周波パッケージが実現される。
【図面の簡単な説明】
【図1】本発明の実施形態を説明するための斜視図である。
【図2】本発明の実施形態を説明するための上面図および断面図である。
【符号の説明】
11…ベースプレート
12…金属製枠体
13a、13b…誘電体部材
14a、14b…誘電体基板
15a、15b…帯状線路導体
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a high-frequency package that accommodates high-frequency circuit components and the like.
[0002]
[Prior art]
The high-frequency package has a structure in which a region on which a circuit component is arranged on a base plate is surrounded by a rectangular frame having a predetermined height, and a line conductor penetrates from the outside to the inside of the frame. Then, the line conductor projecting inside the frame and the circuit component arranged on the base plate in the frame are connected by wire bonding or the like.
[0003]
As one of the high-frequency packages described above, there is a so-called metal wall package type in which a base plate and a frame part are formed of metal and an internal space surrounded by the frame is shielded.
[0004]
In the metal wall package type, a part of a metal frame is formed of a dielectric member such as ceramic, and a line conductor penetrates the part of the dielectric member. The line conductor portion located inside the metal frame is formed on the dielectric substrate.
[0005]
[Problems to be solved by the invention]
In a conventional high-frequency package, for example, a metal wall package type, a line conductor penetrates a part of a dielectric member provided in a part of a metal frame, and a line conductor part extending into the metal frame is on a dielectric substrate. Is provided. In this case, a coaxial line having a metal frame or a base plate as an outer conductor is formed in a portion penetrating the metal frame, and a microstrip line having a base plate as a ground conductor is formed inside the metal frame. The
[0006]
In the case of the high-frequency package having the above structure, for example, a dielectric member provided in a part of a metal frame and a dielectric substrate positioned inside the metal frame are integrally formed, and the same dielectric material is used. Yes. Therefore, the characteristic impedance of the coaxial line formed in the penetrating portion of the metal frame and the microstrip line formed inside the metal frame are different. For example, the characteristic impedance of the microstrip line is the coaxial line. And the electrical characteristics such as the voltage standing wave ratio are deteriorated.
[0007]
In this case, it is conceivable to increase the width of the line conductor located inside the metal frame and reduce the characteristic impedance of the microstrip line. However, when the line conductor is made to penetrate the dielectric member of the metal frame body, usually, a hole through which the line conductor passes is made in the dielectric member, and after passing the line conductor through this hole, the dielectric member is heated to A method of hermetically sealing the conductor is taken. Therefore, when the width of the tip end portion of the line conductor is wide, the hole formed in the dielectric member is also increased accordingly. As a result, when the dielectric member is heated and the line conductor is sealed, it is difficult to ensure airtightness between the line conductor and the dielectric member, which is narrower than the tip portion.
[0008]
An object of the present invention is to provide a high-frequency package that solves the above-described drawbacks and that provides a good voltage standing wave ratio and airtightness.
[0009]
[Means for Solving the Problems]
The present invention provides a base plate on which circuit components are arranged, a metal frame that surrounds a region of the base plate on which the circuit components are arranged at a predetermined height, and a part of which is formed of a dielectric member, and the metal A dielectric substrate provided on the base plate adjacent to the portion of the dielectric member on the inner side surrounded by the frame body, and extending through the dielectric member to the dielectric substrate; A high-frequency package comprising a strip-shaped line conductor having a uniform width that forms a coaxial line at a portion penetrating a body member and forms a microstrip line on the dielectric substrate, wherein a part of the metal frame is formed The relative dielectric constant of the dielectric substrate is made larger than that of the dielectric member to be formed.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
An embodiment of the present invention will be described with reference to FIG.
[0011]
Reference numeral 11 denotes a metal base plate, and a rectangular metal frame 12, for example, is formed at a predetermined height so as to surround an area where circuit components are arranged on the metal base plate 11. For example, through holes 12a and 12b having a rectangular cross section are provided in a part of two opposite frame body sides 121 and 122 of the metal frame body 12, for example. The portions of the through holes 12a and 12b are sealed with dielectric members 13a and 13b having a predetermined relative dielectric constant, for example, glass. Further, inside the metal frame 12, adjacent to the dielectric members 13 a and 13 b constituting a part of the metal frame 12, the glass frame 12 is made of glass having a relative dielectric constant larger than that of the dielectric members 13 a and 13 b. Dielectric substrates 14 a and 14 b are provided on the base plate 11. The dielectric substrate 14a is not shown because of the drawing.
[0012]
For example, strip-like line conductors 15 a and 15 b made of Kovar material extend through the dielectric members 13 a and 13 b to the dielectric substrates 14 a and 14 b inside the metal frame 12. The line conductors 15a and 15b are connected to circuit components (not shown) arranged in the metal frame 12 by wire bonding, for example, using the width portions.
[0013]
In addition, after the wire conductors 15a and 15b and circuit components are wire-bonded, the upper opening of the metal frame 12 is sealed with a lid (not shown).
[0014]
Here, FIG. 2A shows a structure of the high-frequency package of FIG. 1 viewed from above. FIG. 2B shows a cross-sectional view of FIG. 2A taken along line aa. 2, parts corresponding to those in FIG. 1 are denoted by the same reference numerals, and redundant description is omitted.
[0015]
In the case of the configuration described above, the line conductors 15 a and 15 b constitute a coaxial line having the metal frame body 12 and the base plate 11 as outer conductors in a portion penetrating the frame body 12. Inside the metal frame 12, a microstrip line having the base plate 11 as a ground conductor is formed. In this case, the relative dielectric constants of the dielectric substrates 14a and 14b inside the metal frame 12 are made larger than the dielectric members 13a and 13b constituting a part of the metal frame 12. Therefore, the difference in characteristic impedance between the coaxial line in the metal frame 12 portion and the microstrip line inside the metal frame 12 is reduced, and the voltage standing wave ratio is reduced.
[0016]
For example, glass having a relative permittivity of 4.1 is used as the dielectric members 13a and 13b constituting a part of the metal frame 12, and the relative permittivity is 7.0 as the dielectric of the dielectric substrates 14a and 14b. In the case of using the above glass, the voltage standing wave ratio of the high frequency input / output terminal was reduced from 2.1 to 1.3 as compared with the case where a dielectric material having a relative dielectric constant of 4.1 was used for both.
[0017]
In the above embodiment, glass is used for the dielectric member in the metal frame portion and the dielectric substrate inside the metal frame. Compared to ceramic, glass has a wider range of relative permittivity and is suitable for the present invention.
[0018]
In addition, in the case of the above configuration, since the width of the line conductor is uniform, it is not necessary to enlarge the hole provided in the dielectric member of the metal frame portion during manufacturing, and the airtightness of the line conductor and the dielectric member is not required. Is secured.
[0019]
In the above embodiment, Kovar is used as the strip-shaped line conductor. In this case, since the coefficient of thermal expansion of Kovar is substantially the same as that of the glass of the dielectric material, airtightness between the strip-shaped line conductor and the dielectric member is ensured.
[0020]
【The invention's effect】
According to the present invention, a high frequency package capable of obtaining a good voltage standing wave ratio and airtightness is realized.
[Brief description of the drawings]
FIG. 1 is a perspective view for explaining an embodiment of the present invention.
2A and 2B are a top view and a cross-sectional view for explaining an embodiment of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 11 ... Base plate 12 ... Metal frame 13a, 13b ... Dielectric member 14a, 14b ... Dielectric board | substrate 15a, 15b ... Strip-shaped line conductor

Claims (4)

回路部品が配置されるベースプレートと、このベースプレートの前記回路部品が配置される領域を所定の高さで囲み、一部が誘電体部材で形成された金属製枠体と、この金属製枠体で囲まれた内側で、前記誘電体部材の部分に隣接して前記ベースプレート上に設けられた誘電体基板と、前記誘電体部材を貫通して前記誘電体基板上まで伸び、前記誘電体部材を貫通する部分で同軸線路を形成し、前記誘電体基板上でマイクロストリップ線路を形成する幅が一様の帯状線路導体とを具備した高周波パッケージにおいて、前記金属製枠体の一部を形成する前記誘電体部材の比誘電率よりも前記誘電体基板の比誘電率を大きくしたことを特徴とする高周波パッケージ。A base plate on which circuit components are arranged, a metal frame that surrounds a region in which the circuit components are arranged on the base plate at a predetermined height, and a part thereof is formed of a dielectric member; and the metal frame Inside the enclosed area, adjacent to the dielectric member portion, a dielectric substrate provided on the base plate, and extends through the dielectric member to the dielectric substrate and penetrates the dielectric member A dielectric line forming a part of the metal frame in a high-frequency package comprising a strip-shaped line conductor having a uniform width that forms a coaxial line on the dielectric substrate and forms a microstrip line on the dielectric substrate. A high frequency package characterized in that a relative permittivity of the dielectric substrate is made larger than a relative permittivity of a body member. 金属製枠体の一部を形成する誘電体部材は、帯状線路導体の延長方向に垂直な面での断面が矩形状である請求項1記載の高周波パッケージ。  The high frequency package according to claim 1, wherein the dielectric member forming a part of the metal frame has a rectangular cross section in a plane perpendicular to the extending direction of the strip-shaped line conductor. 金属製枠体の一部を形成する誘電体部材および誘電体基板がガラス材料である請求項1記載の高周波パッケージ。  2. The high frequency package according to claim 1, wherein the dielectric member and the dielectric substrate forming part of the metal frame are made of a glass material. 帯状線路導体を形成する材料がコバールである請求項1ないし請求項3のいずれか1つに記載の高周波パッケージ。  The high-frequency package according to any one of claims 1 to 3, wherein a material forming the strip-shaped line conductor is Kovar.
JP2001256112A 2001-08-27 2001-08-27 High frequency package Expired - Fee Related JP4095263B2 (en)

Priority Applications (1)

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Application Number Priority Date Filing Date Title
JP2001256112A JP4095263B2 (en) 2001-08-27 2001-08-27 High frequency package

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JP2003069301A JP2003069301A (en) 2003-03-07
JP4095263B2 true JP4095263B2 (en) 2008-06-04

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Family Applications (1)

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Country Status (1)

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