JP4055341B2

JP4055341B2 - Object levitation device

Info

Publication number: JP4055341B2
Application number: JP2000283367A
Authority: JP
Inventors: 正己高三
Original assignee: Toyota Industries Corp
Current assignee: Toyota Industries Corp
Priority date: 2000-09-19
Filing date: 2000-09-19
Publication date: 2008-03-05
Anticipated expiration: 2020-09-19
Also published as: JP2002087574A

Description

【０００１】
【発明の属する技術分野】
本発明は、例えば音波等の放射圧を用いて物体を浮揚させる物体浮揚装置に関するものである。
【０００２】
【従来の技術】
物体を空中に浮揚させる物体浮揚装置として、振動手段により振動される振動体の音波の放射圧により、振動体の表面上において物体を浮揚させる物体浮揚装置が特開平７−２４４１５号公報、特開平７−１３７８２４号公報等に開示されている。この装置では平板状の振動体を使用し、浮揚させるべき物体の前記平板状の振動体の表面と対向する面を平面とし、振動体の振動による音波の放射圧により物体が浮揚する。また、浮揚した物体に空気を噴射したり、前記振動体で進行波を発生させて浮揚した物体を移動させる物体搬送装置も提案されている。
【０００３】
また、物体を浮揚状態で搬送する方法として、台車に前記浮揚装置を装備して浮揚装置を移動させる方法がある。
【０００４】
【発明が解決しようとする課題】
浮揚させる物体が板状で面積が広い場合、物体を安定した状態で浮揚させるには、複数の振動板で物体に放射圧を作用させるのが好ましい。しかし、単純に複数の振動板に縦振動を発生させた場合、物体を所定の位置に保持する作用が不十分で、横方向から僅かな力が作用するだけで物体の位置ずれが発生するという問題がある。
【０００５】
本発明は前記の問題点に鑑みてなされたものであって、その目的は複数の振動体を使用して物体を浮揚させる場合、物体を所定位置に保持する保持力を向上させることができる物体浮揚装置を提供することにある。
【０００６】
【課題を解決するための手段】
前記の目的を達成するため請求項１に記載の発明では、複数の振動体を励振手段で励振させて、振動体からの音波の放射圧により振動体の表面上において物体を所定位置に浮揚保持する物体浮揚装置であって、前記複数の振動体の少なくとも一部の振動体を、該振動体に縦振動の他に振動面を揺動させる振動を加える振動子に連結し、前記縦振動の他に振動面を揺動させる振動が加えられる振動体は矩形状に形成され、矩形状をなす前記物体を所定位置に浮揚保持すべく、該矩形状に形成された振動体は、保持すべき物体の四隅と対応する位置であって保持すべき物体の中心に対して対称に配置されるとともに振動体の外側の２つのエッジそれぞれが前記物体の隅部における異なるエッジの近傍で該物体のエッジに沿って延びるように配置され、前記物体の四隅と対応する位置の振動体は、物体の各エッジにおけるその両端と対応する位置の振動体同士が反対方向に向かって円を描く進行波を形成するように振動子によって振動が加えられる。
前記の目的を達成するため請求項２に記載の発明では、複数の振動体を励振手段で励振させて、振動体からの音波の放射圧により振動体の表面上において物体を所定位置に浮揚保持する物体浮揚装置であって、前記複数の振動体の少なくとも一部の振動体を、該振動体に縦振動の他に振動面を揺動させる振動を加える振動子に連結し、前記縦振動の他に振動面を揺動させる振動が加えられる振動体は矩形状に形成され、矩形状をなす前記物体を所定位置に浮揚保持すべく、該矩形状に形成された振動体は、保持すべき物体の四隅と対応する位置であって保持すべき物体の中心に対して対称に配置されるとともに振動体の外側の２つのエッジそれぞれが前記物体の隅部における異なるエッジの近傍で該物体のエッジに沿って延びるように配置され、前記物体の四隅と対応する位置の振動体は、それら全てが振動体と物体との間に物体の中心と対応する位置に向かって直線状に移動する気流を発生させるように振動子によって振動が加えられる。
前記の目的を達成するため請求項３に記載の発明では、複数の振動体を励振手段で励振させて、振動体からの音波の放射圧により振動体の表面上において物体を所定位置に浮揚保持する物体浮揚装置であって、前記複数の振動体の少なくとも一部の振動体を、該振動体に縦振動の他に振動面を揺動させる振動を加える振動子に連結し、前記縦振動の他に振動面を揺動させる振動が加えられる振動体は矩形状に形成され、矩形状をなす前記物体を所定位置に浮揚保持すべく、該矩形状に形成された振動体は、保持すべき物体の四隅と対応する位置であって保持すべき物体の中心に対して対称に配置されるとともに振動体の外側の２つのエッジそれぞれが前記物体の隅部における異なるエッジの近傍で該物体のエッジに沿って延びるように配置され、前記物体の四隅と対応する位置の振動体は、それら全てが振動体と物体との間に物体の中心と対応する位置から振動体と対応する位置に向かって直線状に移動する気流を発生させるように振動子によって振動が加えられる。
【０００７】
従って、請求項１〜３に記載の発明では、励振手段で励振される複数の振動体からの音波の放射圧により、振動体の表面上において物体が所定位置に浮揚保持される。そして、少なくとも一部の振動体は、振動子から縦振動の他に振動面を揺動させる振動が加えられる。振動板は振動子の軸方向に対して直交する状態で単純に往復動するのではなく、振動面が揺動するように振動される。従って、浮揚物体と振動板との間に空気の流が発生し、物体を横方向に移動させるには空気の流れによる力に抗して物体を移動させる必要があり、従来の単純な縦振動のみで物体を浮揚保持する構成に比較して、物体を所定位置に保持する保持力が向上する。また、物体は浮揚状態においてそのエッジが振動体のエッジと対向する位置より外側へ移動し難くなるため、物体は各振動体の外側のエッジと対応する位置で、より安定した状態で保持される。また、浮揚物体は保持力の向上した複数の振動体から対称位置において保持力が作用するため、物体に小さな水平方向の外力が作用した程度では物体は所定位置により安定した状態でとどまる。
【０００９】
請求項４に記載の発明では、請求項１〜請求項３のいずれか一項に記載の発明において、前記物体の四隅と対応する位置の振動体は、内側に向いて傾斜するように配置されている。この発明では、前記振動体と物体との間に発生する空気流の作用により、物体には互いに向かい合う水平方向の力が存在する状態となり、物体に小さな水平方向の外力が作用した程度では物体は所定位置により安定した状態でとどまる。
【００１２】
【発明の実施の形態】
（第１の実施の形態）
以下、本発明を矩形状の平板を浮揚保持するのに適した物体浮揚装置に具体化した第１の実施の形態を図１〜図３に従って説明する。図１（ａ）は物体浮揚装置の模式平面図である。
【００１３】
図１（ａ）に示すように、物体浮揚装置１は矩形板状に形成された複数（この実施の形態では５個）の振動体２ａ〜２ｄ，３を備えている。各振動体２ａ〜２ｄ，３は同じ大きさに形成されている。４個の振動体２ａ〜２ｄは矩形板状の物体４（鎖線で図示）の四隅と対応する位置に配設され、１個の振動体３は４個の振動体２ａ〜２ｄから等距離の位置に配設されている。各振動体２ａ〜２ｄ，３には励振手段を構成するホーン５が、それぞれその先端において図示しないネジにより締結されている。図１（ｂ）に示すように、ホーン５は円錐台の上部に円柱部が連続する形状に形成され、各振動体２ａ〜２ｄ，３の中央において各振動体２ａ〜２ｄ，３と直交する状態で取付けられている。
【００１４】
図１（ｂ）に示すように、振動体３はその表面が水平に配置されている。物体４の長手方向に沿って配設された各一対の振動体２ａ，２ｃ、２ｂ，２ｄは、その表面が物体４の底面に対して逆方向に内側に向かって傾斜した状態に、かつ物体４に作用する放射圧が釣り合うように配置されている。各振動体２ａ，２ｂ，２ｃ，２ｄの水平面と成す角度θは、物体４の質量、振動体２ａ，２ｂ，２ｃ，２ｄの面積などによって適正値は変化するが、例えば、ほぼ１°前後であり、通常３°以下である。
【００１５】
図１（ｂ）に示すように、各ホーン５は振動体２ａ〜２ｄ，３が締結される面の反対側の面において振動子６ａ，６ｂに固定されている。ホーン５の先端面は振動子６ａ，６ｂの軸方向と直交する平面に形成され、ホーン５及び振動子６ａ，６ｂの中心軸が鉛直方向に対して、水平面と振動体２ａ〜２ｄ，３との成す角度θと同じ角度傾斜した状態で配置されている。
【００１６】
振動体３を駆動する振動子６ｂには所謂ランジュバン形振動子が使用され、一対のリング状のピエゾ素子７ａ，７ｂと、ピエゾ素子７ａ，７ｂ間に配置されたリング状の電極板８と、ピエゾ素子７ａ，７ｂの外側面と当接する位置に配置された金属ブロック９ａ，９ｂとを、図示しないボルトによって締め付け固定することにより構成されている。ボルトは金属ブロック９ａに形成された図示しないねじ穴に、金属ブロック９ｂ側から螺合されている。両金属ブロック９ａ，９ｂはボルトを介して互いに導通された状態となっている。
【００１７】
図２（ａ）に示すように、振動体２ａ〜２ｄを駆動する振動子６ａには単純なランジュバン形振動子ではなく、複合振動子が使用されている。振動子６ａは縦振動を励起させるための一対のリング状のピエゾ素子７ａ，７ｂと、起振部が円周上を移動する作用を為す４対一組のピエゾ素子１０ａ，１０ｂとを備えている。図２（ｃ）に示すようにピエゾ素子７ａ，７ｂが円環状であるのに対して、図２（ｂ）に示すように、ピエゾ素子１０ａ，１０ｂはそれぞれ四半円弧状に形成されている。ピエゾ素子１０ａ，１０ｂはそれぞれ四半円弧状に形成された電極板１１ａ〜１１ｄ（図３に図示）を挟持するように電極板１１ａ〜１１ｄに固定されている。
【００１８】
そして、図２（ａ）に示すように、共通の円環状の接地用電極板１２を挟んで上側にピエゾ素子７ａ，７ｂが配置され、下側に４対のピエゾ素子１０ａ，１０ｂが配置された状態で、金属ブロック９ａ，９ｂにより各ピエゾ素子７ａ，７ｂ、電極板８、接地用電極板１２、ピエゾ素子１０ａ，１０ｂ及び電極板１１ａ〜１１ｄが締め付け固定されている。なお、各ピエゾ素子１０ａ，１０ｂ及び各ピエゾ素子１０ａ，１０ｂ間に配置された各電極板１１ａ〜１１ｄは互いに干渉しないように、それぞれ同一平面上で９０°ずつ位置的に位相をずらした状態で間隔をあけて配置されている。両金属ブロック９ａ，９ｂはボルトを介して互いに導通された状態となっている。
【００１９】
図１（ｂ）に示すように、物体浮揚装置１は台車としての搬送車１３上に支持ブラケット１４を介して取り付けられている。各振動子６ａ，６ｂは各振動体２ａ〜２ｄ，３が所定の角度θ又は水平となるように支持ブラケット１４に固定されている。
【００２０】
図１（ａ）に示すように、振動子６ａ，６ｂは発振器１５，１６に接続されている。ホーン５、振動子６ｂ、発振器１５により振動体３を励振させる励振手段が構成され、ホーン５、振動子６ａ、発振器１５，１６により振動体２ａ〜２ｄを励振させる励振手段が構成されている。
【００２１】
図１（ｂ）に示すように、電極板８は配線１７ｂを介して発振器１５と接続され、発振器１５の接地端子が配線１７ａを介して金属ブロック９ａに接続されている。４対のピエゾ素子１０ａ，１０ｂに挟持された各電極板１１ａ〜１１ｄは、図３に示すように、発振器１６にそれぞれ配線１８及び切換スイッチ１９を介して接続されている。切換スイッチ１９は所定周期（例えば、５０ミリ秒間隔）で順次各電極板１１ａ〜１１ｄと発振器１６とを接続させるように構成されている。なお、図１（ｂ）では発振器１６、配線１８及び切換スイッチ１９等の図示を省略している。
【００２２】
次に前記のように構成された装置の作用を説明する。
物体浮揚装置１は、搬送すべき板状の物体４を浮揚状態に保持しつつ搬送車１３の移動により目的位置まで搬送される。
【００２３】
図１（ａ），（ｂ）に示すように、物体４は各エッジ４ａが各振動体２ａ〜２ｄの外側のエッジ２０に揃うように各振動体２ａ〜２ｄ，３上に載置される。その状態で発振器１５，１６の駆動により、振動子６ａ，６ｂが所定の共振周波数（例えば、２０ｋＨｚ前後）で励振され、ホーン５を介して振動体２ａ〜２ｄ，３が励振される。振動体２ａ〜２ｄ，３が励振されると、振動体２ａ〜２ｄ，３から音波が放射され、その音波の放射圧によって物体４は振動体２ａ〜２ｄ，３の表面から浮揚する。浮揚距離は数１０〜数１００μｍである。
【００２４】
発振器１５に接続されたピエゾ素子７ａ，７ｂにのみ電圧が印加されて振動子６ａ，６ｂが励振されると、ホーン５は縦振動のみを行う。従って、振動体３が接続された振動子６ｂは縦振動のみを行う。
【００２５】
一方、振動子６ａに装備された４対の四半円弧状のピエゾ素子１０ａ，１０ｂには、発振器１６により切換スイッチ１９、電極板１１ａ〜１１ｄ等を介して所定周期で所定時間ずつ順次電圧が印加され、各ピエゾ素子１０ａ，１０ｂが順次縦振動を行う。４対のピエゾ素子１０ａ，１０ｂは９０°ずつ位相がずれた状態にあるため、各ピエゾ素子１０ａ，１０ｂが順次縦振動することにより、振動体２ａ〜２ｄには図１（ａ）に矢印で示すように、一方向へ回転する進行波が発生するような振動が励起される。その結果、振動子６ａの振動に伴って振動体２ａ〜２ｄが単純な縦振動ではなく一方向へ旋回するような揺動運動を行い、物体４と振動体２ａ〜２ｄとの間に、物体４を所定位置に保持する保持力を増す旋回空気流が発生する。そのため、物体４は振動体２ａ〜２ｄの表面から安定に浮揚する。
【００２６】
振動体２ａ〜２ｄのエッジ２０と物体４のエッジ４ａとが揃った状態に配置された状態では、振動体２ａ〜２ｄのエッジ２０からはみ出そうとした物体４が、振動体２ａ〜２ｄが放射する音波の作用によって内側に引き戻される作用があるため、物体４が所定の位置に安定した状態で保持される。
【００２７】
この実施の形態では以下の効果を有する。
（１）複数の振動体２ａ〜２ｄ，３の一部の振動体２ａ〜２ｄを、該振動体２ａ〜２ｄに縦振動の他に振動面を揺動させる振動を加える振動子６ａに連結した。そのため、振動体２ａ〜２ｄの振動時に、物体４と各振動体２ａ〜２ｄとの間に物体４の保持力を増す空気流が発生し、簡単な構成で物体浮揚装置１の保持力が向上する。
【００２８】
（２）振動子６ａは四半円弧状の４対のピエゾ素子１０ａ，１０ｂを備え、４対のピエゾ素子１０ａ，１０ｂが順次振動されて振動体２ａ〜２ｄに一方向に回転する進行波が発生するため、物体４と振動体２ａ〜２ｄとの間に渦状の空気流が発生して保持力が大きくなる。
【００２９】
（３）矩形板状の物体４の四隅と対応する位置に配置された状態で物体４を浮揚保持するため、物体４に対して水平方向においていずれの側から外力が作用した場合でも、その力に抗する放射圧により物体４の移動が抑制され、物体４を所定位置に保持する保持力がより向上する。
【００３０】
（４）各振動体２ａ〜２ｄからほぼ等距離の位置に、縦振動される振動体３が配設されているため、物体４の面積が大きな場合でも振動体３からの放射圧によりその撓みが抑制されて、物体４が安定した状態で浮揚する。
【００３１】
（５）浮揚すべき物体４は底面がフラットで、直線状のエッジ４ａを有し、振動体２ａ〜２ｄは物体４を浮揚状態で保持する際、その外側のエッジ２０が物体４の直線状のエッジ４ａの近傍で該エッジ４ａに沿って延びるように配置されている。従って、物体４を所定位置により安定した状態で保持できる。
【００３２】
（６）物体４の四隅と対応する位置に配置される振動体２ａ〜２ｄを水平面に対して所定角度θ傾斜した状態に配設しているため、各振動体２ａ〜２ｄを水平に配置した場合より、物体４を所定位置に保持する効果が向上する。
【００３３】
（７）物体浮揚装置１は搬送車１３上に装備されている。従って、搬送車１３の移動により物体４を浮揚状態で所定の位置まで確実に搬送することができる。
【００３４】
（８）物体４に音波を放射する振動体として物体４の底面積全体と対応する大きさの振動体を使用せずに、複数の振動体２ａ〜２ｄ，３を使用するとともに、その面積の合計が物体４の底面積より小さいため、振動体２ａ〜２ｄ，３を軽量化でき、ひいては物体浮揚装置１全体の軽量化を図ることができる。
【００３５】
（第２の実施の形態）
次に第２の実施の形態を図４に従って説明する。この実施の形態では２個の振動体２１ａ，２１ｂで物体４を浮揚保持する点と、振動体２１ａ，２１ｂの振動面を揺動させる振動子６ａの構成と、ホーン５の形状とが前記実施の形態と大きく異なっている。前記実施の形態と同一部分は同一符号を付して詳しい説明を省略する。なお、搬送車１３、支持ブラケット１４、発振器１６等は図示を省略した。
【００３６】
一対の振動体２１ａ，２１ｂの外側同士の距離は物体４の幅と同じに形成されている。振動子６ａを構成する金属ブロック９ａがホーン５を兼用している。振動子６ａは図４（ｂ），（ｃ）に示すような半円弧状の２対のピエゾ素子２２ａ，２２ｂと、それに対応する２個の半円弧状の電極板２３ａ，２３ｂとを備えている。電極板２３ａ，２３ｂは切換スイッチ（図示せず）を介して発振器１６に接続されている。
【００３７】
この実施の形態では振動体２１ａ，２１ｂには、ピエゾ素子７ａ，７ｂを介して縦振動が加えられ、ピエゾ素子２２ａ，２２ｂを介して振動体２１ａ，２１ｂの中央をそれぞれ挟んで図４の左右両側が交互に昇降する揺動運動が励起される。そして、振動体２１ａ，２１ｂの表面（上面）と物体４の底面との間に図４の左右方向へ往復移動する空気流が発生する。その結果、ピエゾ素子７ａ，７ｂを介して縦振動が加えられるだけの構成に比較して、物体４の保持力が向上する。
【００３８】
この実施の形態では前記実施の形態の（１），（５），（７）及び（８）と同様な効果の他に次の効果を有する。
（９）振動体２１ａ，２１ｂに縦振動の他に振動面を揺動させる振動を加えるための振動子６ａの構成が簡単になる。
【００３９】
実施の形態は前記に限定されるものではなく、例えば次のように構成してもよい。
○ 第１の実施の形態のように物体４の四隅と対応する位置に、振動面が揺動される振動体２ａ〜２ｄを配置する構成において、振動体２ａ〜２ｄの振動時に振動体２ａ〜２ｄの表面と物体４の底面との間に、図５（ｂ）に示す矢印方向の気流が発生する構成としてもよい。例えば、振動子６ａとして第２の実施の形態の振動子６ａと同じもの、即ち、円環状のピエゾ素子７ａ，７ｂと、一対の半円弧状のピエゾ素子２２ａ，２２ｂとを備えた構成とする。そして、例えば図５（ａ）に示すように、ピエゾ素子２２ａ，２２ｂの直線部が振動体２ａ〜２ｄの対角線とほぼ直交する状態に振動子６ａを配置する。この場合、各振動子６ａの駆動により物体４の底面と振動体２ａ〜２ｄの表面との間に物体４の対角線に沿った気流が発生するため、縦振動が加えられるだけの構成に比較して、物体４に対する保持力が向上する。
【００４０】
○ 円環状のピエゾ素子７ａ，７ｂと，半円弧状のピエゾ素子２２ａ，２２ｂとを備えた振動子６ａを、振動体２ａ〜２ｄの振動時に振動体２ａ〜２ｄの表面と物体４の底面との間に、図６（ｂ）に示す矢印方向の気流が発生するように配置してもよい。各振動子６ａのピエゾ素子２２ａ，２２ｂが図６（ａ）に示すように、直線部が物体４の長手方向（図６（ｂ）の左右方向）と直交するように、振動子６ａが配置される。
【００４１】
○ 各振動子６ａ毎に発振器１５，１６を設ける代わりに、各１個の発振器１５，１６及び切換スイッチ１９を各振動子６ａで共用してもよい。この場合、構成が簡単になるとともに製造コストを低減できる。
【００４２】
○ 矩形状の物体４を所定位置に浮揚保持する物体浮揚装置において、各振動体２ａ〜２ｄの配設位置は、物体４の四隅と対応する位置に限らず、各辺の中央と対応する位置に配置してもよい。また、振動体２ａ〜２ｄ，３の数は５個に限らず、中央に配置される振動体３を省略して４個としたり、物体４の大きさにより適宜変更してもよい。
【００４３】
○ 全ての振動体２ａ〜２ｄ，３を水平に配置してもよい。
○ 物体浮揚装置１は搬送車１３のような移動体に装備されて使用されるとは限らず、所定位置に配設されて物体４を一時浮揚状態で保持する用途に使用してもよい。
【００４４】
○ 浮揚保持する物体４の形状は矩形等の四角形に限らず、三角形や他の多角形あるいは円形等任意の形状としてよい。
○ ホーン５の形状は円柱状、円錐台状、両者を組み合わせた形状に限らず、例えば扁平な直方体状としてもよい。
【００４５】
○ 各振動体２ａ〜２ｄ等のエッジ２０の一部が物体４のエッジ４ａと対応せず、物体４がエッジ２０からはみ出す大きさのものに適用してもよい。
○ 底面がフラットな物体を浮揚保持する装置に限らず、特開平７−１３７８２４号公報に開示された装置のように、物体の底面がＶ字状の物体を浮揚させる装置に適用してもよい。
【００４６】
○ 振動体２ａ〜２ｄ，３，２１ａ，２１ｂのホーン５への固定はネジによる締結に限らず、接着剤を使用したり、ロウ付けや溶接で固着してもよい。
○ 振動子６ａ，６ｂはランジュバン形振動子に限らず他の振動子を使用してもよい。
【００４７】
前記実施の形態から把握される発明（技術思想）について、以下に記載する。
（１）前記物体は矩形又は正方形の板状であり、少なくとも前記物体の四隅と対応する位置に、縦振動の他に振動面を揺動させる振動を加える振動子に連結された前記振動体が配置されている。
【００４８】
（２）前記振動子は前記振動体が所定方向に向かって円を描く進行波を形成するように、該振動体を振動させる。
【００４９】
（３）前記振動子は前記振動体と物体の底面との間に直線状に移動するとともにその移動方向が逆転する気流を発生させるように、該振動体を振動させる。
【００５０】
【発明の効果】
以上詳述したように、各請求項１〜４に記載の発明によれば、複数の振動体を使用した複合振動により物体を浮揚させる場合、物体を所定位置に保持する保持力を向上させることができる。
【図面の簡単な説明】
【図１】（ａ）は第１の実施の形態の物体浮揚装置の模式平面図、（ｂ）は物体浮揚装置を装備した搬送車の模式側面図。
【図２】（ａ）は同じく振動体と励振手段を示す模式斜視図、（ｂ），（ｃ）はピエゾ素子の模式平面図。
【図３】電極板の発振器への接続状態を示す模式図。
【図４】（ａ）は第２の実施の形態の物体浮揚装置の模式平面図、（ｂ）は模式側面図、（ｃ）はピエゾ素子及び電極板の形状を示す模式平面図。
【図５】（ａ）は別の実施の形態のピエゾ素子及び電極板の形状を示す模式平面図、（ｂ）は物体浮揚装置の振動体と物体との関係を示す模式平面図。
【図６】（ａ）は別の実施の形態のピエゾ素子及び電極板の形状を示す模式平面図、（ｂ）は物体浮揚装置の振動体と物体との関係を示す模式平面図。
【符号の説明】
１…物体浮揚装置、２ａ〜２ｄ，３，２１ａ，２１ｂ…振動体、４…物体、４ａ，２０…エッジ、５…励振手段を構成するホーン、６ａ，６ｂ…同じく振動子、１５，１６…励振手段を構成する発振器。[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an object levitating apparatus that levitates an object using a radiation pressure such as a sound wave.
[0002]
[Prior art]
As an object levitating apparatus for levitating an object in the air, an object levitating apparatus for levitating an object on the surface of the vibrating body by the radiation pressure of the sound wave of the vibrating body vibrated by the vibrating means is disclosed in Japanese Patent Laid-Open Nos. 7-24415 and 7-137824, etc. In this apparatus, a flat vibrating body is used, the surface of the object to be levitated facing the surface of the flat vibrating body is a flat surface, and the object is levitated by the radiation pressure of sound waves generated by the vibration of the vibrating body. There has also been proposed an object conveying apparatus that moves air that has been levitated by jetting air to the levitated object or by generating a traveling wave with the vibrator.
[0003]
Further, as a method of transporting an object in a levitated state, there is a method in which a trolley is equipped with the levitation device and the levitation device is moved.
[0004]
[Problems to be solved by the invention]
When the object to be levitated is plate-shaped and has a large area, it is preferable to apply a radiation pressure to the object with a plurality of diaphragms in order to levitate the object in a stable state. However, when longitudinal vibration is simply generated in a plurality of diaphragms, the action of holding the object in a predetermined position is insufficient, and the object is displaced only by a slight force acting from the lateral direction. There's a problem.
[0005]
The present invention has been made in view of the above problems, and an object thereof is to improve the holding force for holding an object in a predetermined position when the object is levitated using a plurality of vibrating bodies. The object is to provide a levitation device.
[0006]
[Means for Solving the Problems]
In order to achieve the above object, according to the first aspect of the present invention, a plurality of vibrators are excited by the excitation means, and the object is levitated and held on the surface of the vibrator by the radiation pressure of the sound waves from the vibrator. An object levitation device, wherein at least some of the plurality of vibrating bodies are coupled to a vibrator that applies vibrations that cause the vibrating surface to oscillate in addition to longitudinal vibrations. In addition, the vibrating body to which the vibration for oscillating the vibration surface is applied is formed in a rectangular shape . In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape should be held. said object edges in the vicinity of different edge of the corner of two respective edges the object outside of the vibrating body while being arranged symmetrically with respect to the position in a body of be held centered and the corresponding four corners of the object Arranged to extend along , Vibration of positions corresponding to four corners of the object, the vibration by the vibrator so as to form a traveling wave vibration bodies of positions corresponding to both ends of each edge of the object a circle toward the opposite direction added Ru.
In order to achieve the above object, according to the second aspect of the present invention, a plurality of vibrators are excited by the excitation means, and the object is levitated and held on the surface of the vibrator by the radiation pressure of sound waves from the vibrator. An object levitation device, wherein at least some of the plurality of vibrating bodies are coupled to a vibrator that applies vibrations that cause the vibrating surface to oscillate in addition to longitudinal vibrations. In addition, the vibrating body to which the vibration for oscillating the vibration surface is applied is formed in a rectangular shape. In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape should be held. The positions of the object corresponding to the four corners of the object are arranged symmetrically with respect to the center of the object to be held, and the two outer edges of the vibrating body are adjacent to different edges at the corners of the object. Arranged to extend along The vibrating bodies at positions corresponding to the four corners of the object are vibrated by the vibrator so that all of them generate an airflow moving linearly toward the position corresponding to the center of the object between the vibrating body and the object. Is added.
In order to achieve the above object, according to the third aspect of the present invention, a plurality of vibrators are excited by the excitation means, and the object is levitated and held on the surface of the vibrator by the radiation pressure of the sound waves from the vibrator. An object levitation device, wherein at least some of the plurality of vibrating bodies are coupled to a vibrator that applies vibrations that cause the vibrating surface to oscillate in addition to longitudinal vibrations. In addition, the vibrating body to which the vibration for oscillating the vibration surface is applied is formed in a rectangular shape. In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape should be held. The positions of the object corresponding to the four corners of the object are arranged symmetrically with respect to the center of the object to be held, and the two outer edges of the vibrating body are adjacent to different edges at the corners of the object. Arranged to extend along The vibrating bodies at positions corresponding to the four corners of the object all generate an airflow that moves linearly from the position corresponding to the center of the object to the position corresponding to the vibrating body between the vibrating body and the object. Vibration is applied by the vibrator so that
[0007]
Accordingly, in the first to third aspects of the invention, the object is levitated and held at a predetermined position on the surface of the vibrating body by the radiation pressure of sound waves from the plurality of vibrating bodies excited by the excitation means. At least some of the vibrators are subjected to vibrations that cause the vibration surface to oscillate in addition to longitudinal vibrations from the vibrators. The diaphragm is not simply reciprocated in a state orthogonal to the axial direction of the vibrator, but is vibrated so that the vibration surface swings. Therefore, an air flow is generated between the floating object and the diaphragm, and it is necessary to move the object against the force of the air flow in order to move the object laterally. The holding force for holding the object in a predetermined position is improved as compared with the configuration in which the object is floated and held alone. In addition, since the object is less likely to move outward from the position facing the edge of the vibrating body in the levitated state, the object is held in a more stable state at a position corresponding to the outer edge of each vibrating body. . In addition, since the floating force acts on the object in a symmetrical position from a plurality of vibrating bodies having improved holding force, the object remains in a stable state at a predetermined position as long as a small horizontal external force acts on the object.
[0009]
According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, the vibrating bodies at positions corresponding to the four corners of the object are arranged so as to be inclined inward. ing. In this invention, due to the action of the air flow generated between the vibrating body and the object, the object has a horizontal force that faces each other, and the object is to the extent that a small horizontal external force is applied to the object. Stays in a stable state by a predetermined position.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
(First embodiment)
A first embodiment in which the present invention is embodied in an object levitating apparatus suitable for levitating and holding a rectangular flat plate will be described below with reference to FIGS. FIG. 1A is a schematic plan view of the object levitation apparatus.
[0013]
As shown in FIG. 1A, the object levitation apparatus 1 includes a plurality (five in this embodiment) of vibrating bodies 2a to 2d, 3 formed in a rectangular plate shape. Each vibrating body 2a-2d, 3 is formed in the same magnitude | size. The four vibrating bodies 2a to 2d are disposed at positions corresponding to the four corners of the rectangular plate-like object 4 (illustrated by chain lines), and one vibrating body 3 is equidistant from the four vibrating bodies 2a to 2d. Arranged in position. A horn 5 that constitutes an excitation means is fastened to each of the vibrators 2a to 2d, 3 by a screw (not shown) at the tip thereof. As shown in FIG. 1B, the horn 5 is formed in a shape in which a cylindrical portion is continuous at the top of the truncated cone, and is orthogonal to the vibrating bodies 2a to 2d and 3 at the center of the vibrating bodies 2a to 2d and 3. Installed in condition.
[0014]
As shown in FIG.1 (b), the surface of the vibrating body 3 is arrange | positioned horizontally. Each pair of vibrators 2 a, 2 c, 2 b, 2 d arranged along the longitudinal direction of the object 4 has its surface inclined inward in the opposite direction with respect to the bottom surface of the object 4, and the object 4 is arranged so that the radiation pressure acting on 4 is balanced. The angle θ formed with the horizontal plane of each vibrating body 2a, 2b, 2c, 2d varies depending on the mass of the object 4, the area of the vibrating bodies 2a, 2b, 2c, 2d, etc. Yes, usually 3 ° or less.
[0015]
As shown in FIG. 1B, each horn 5 is fixed to the vibrators 6a and 6b on the surface opposite to the surface to which the vibrating bodies 2a to 2d and 3 are fastened. The front end surface of the horn 5 is formed in a plane orthogonal to the axial direction of the vibrators 6a and 6b, and the central axis of the horn 5 and the vibrators 6a and 6b is the horizontal plane and the vibrating bodies 2a to 2d and 3 with respect to the vertical direction. It is arranged in a state where it is inclined at the same angle as the angle θ formed by.
[0016]
A so-called Langevin type vibrator is used as the vibrator 6b for driving the vibrating body 3, and a pair of ring-shaped piezoelectric elements 7a and 7b, a ring-shaped electrode plate 8 disposed between the piezoelectric elements 7a and 7b, The metal blocks 9a and 9b arranged at positions where they contact the outer surfaces of the piezo elements 7a and 7b are fastened and fixed with bolts (not shown). The bolt is screwed into a screw hole (not shown) formed in the metal block 9a from the metal block 9b side. Both metal blocks 9a and 9b are in a state of being electrically connected to each other via bolts.
[0017]
As shown in FIG. 2A, the vibrator 6a for driving the vibrators 2a to 2d is not a simple Langevin vibrator but a composite vibrator. The vibrator 6a includes a pair of ring-shaped piezo elements 7a and 7b for exciting longitudinal vibration, and a four-to-one set of piezo elements 10a and 10b in which the vibration generating unit moves on the circumference. Yes. As shown in FIG. 2C, the piezo elements 7a and 7b are annular, whereas as shown in FIG. 2B, the piezo elements 10a and 10b are each formed in a quadrant shape. The piezoelectric elements 10a and 10b are fixed to the electrode plates 11a to 11d so as to sandwich the electrode plates 11a to 11d (shown in FIG. 3) formed in a quadrant shape.
[0018]
As shown in FIG. 2A, the piezoelectric elements 7a and 7b are arranged on the upper side with the common annular grounding electrode plate 12 interposed therebetween, and the four pairs of piezoelectric elements 10a and 10b are arranged on the lower side. In this state, the piezo elements 7a and 7b, the electrode plate 8, the ground electrode plate 12, the piezo elements 10a and 10b, and the electrode plates 11a to 11d are fastened and fixed by the metal blocks 9a and 9b. The piezoelectric elements 10a and 10b and the electrode plates 11a to 11d arranged between the piezoelectric elements 10a and 10b are shifted in phase by 90 ° on the same plane so as not to interfere with each other. They are arranged at intervals. Both metal blocks 9a and 9b are in a state of being electrically connected to each other via bolts.
[0019]
As shown in FIG.1 (b), the object levitation apparatus 1 is attached via the support bracket 14 on the conveyance vehicle 13 as a trolley | bogie. The vibrators 6a and 6b are fixed to the support bracket 14 so that the vibrators 2a to 2d and 3 are at a predetermined angle θ or horizontal.
[0020]
As shown in FIG. 1A, the vibrators 6a and 6b are connected to oscillators 15 and 16, respectively. The horn 5, the vibrator 6b, and the oscillator 15 constitute excitation means for exciting the vibrating body 3, and the horn 5, the vibrator 6a, and the oscillators 15 and 16 constitute excitation means for exciting the vibrators 2a to 2d.
[0021]
As shown in FIG. 1B, the electrode plate 8 is connected to the oscillator 15 via the wiring 17b, and the ground terminal of the oscillator 15 is connected to the metal block 9a via the wiring 17a. As shown in FIG. 3, the electrode plates 11a to 11d sandwiched between the four pairs of piezoelectric elements 10a and 10b are connected to the oscillator 16 via wiring 18 and a changeover switch 19, respectively. The changeover switch 19 is configured to sequentially connect the electrode plates 11a to 11d and the oscillator 16 at a predetermined cycle (for example, at intervals of 50 milliseconds). In addition, illustration of the oscillator 16, the wiring 18, the changeover switch 19, etc. is abbreviate | omitted in FIG.1 (b).
[0022]
Next, the operation of the apparatus configured as described above will be described.
The object levitation apparatus 1 is conveyed to a target position by the movement of the conveyance vehicle 13 while holding the plate-like object 4 to be conveyed in a levitated state.
[0023]
As shown in FIGS. 1A and 1B, the object 4 is placed on the vibrating bodies 2a to 2d and 3 so that the edges 4a are aligned with the outer edges 20 of the vibrating bodies 2a to 2d. . In this state, by driving the oscillators 15 and 16, the vibrators 6 a and 6 b are excited at a predetermined resonance frequency (for example, around 20 kHz), and the vibrators 2 a to 2 d and 3 are excited via the horn 5. When the vibrating bodies 2a to 2d and 3 are excited, sound waves are emitted from the vibrating bodies 2a to 2d and 3, and the object 4 is levitated from the surfaces of the vibrating bodies 2a to 2d and 3 by the radiation pressure of the sound waves. The levitation distance is several tens to several hundreds μm.
[0024]
When voltage is applied only to the piezoelectric elements 7a and 7b connected to the oscillator 15 to excite the vibrators 6a and 6b, the horn 5 performs only longitudinal vibration. Accordingly, the vibrator 6b to which the vibrating body 3 is connected performs only longitudinal vibration.
[0025]
On the other hand, voltages are sequentially applied to the four pairs of quarter-arc piezo elements 10a and 10b mounted on the vibrator 6a by a oscillator 16 via the changeover switch 19 and the electrode plates 11a to 11d at predetermined intervals for a predetermined period. Then, the piezoelectric elements 10a and 10b sequentially perform longitudinal vibration. Since the four pairs of piezo elements 10a and 10b are out of phase by 90 °, the piezo elements 10a and 10b sequentially vibrate in the vertical direction, so that the vibrating bodies 2a to 2d are indicated by arrows in FIG. As shown, a vibration that generates a traveling wave rotating in one direction is excited. As a result, the vibrating bodies 2a to 2d perform a swinging motion such that the vibrating bodies 2a to 2d rotate in one direction with the vibration of the vibrator 6a, and the object 4 and the vibrating bodies 2a to 2d A swirling air flow is generated that increases the holding force to hold 4 in place. Therefore, the object 4 is stably levitated from the surfaces of the vibrating bodies 2a to 2d.
[0026]
In the state where the edges 20 of the vibrating bodies 2a to 2d and the edge 4a of the object 4 are aligned, the object 4 that is about to protrude from the edges 20 of the vibrating bodies 2a to 2d is radiated by the vibrating bodies 2a to 2d. The object 4 is pulled back inward by the action of the sound wave, so that the object 4 is held in a stable state at a predetermined position.
[0027]
This embodiment has the following effects.
(1) A part of the plurality of vibrating bodies 2a to 2d, 3 is connected to a vibrator 6a that applies vibrations that cause the vibrating surface to swing in addition to longitudinal vibrations to the vibrating bodies 2a to 2d. . Therefore, when the vibrating bodies 2a to 2d vibrate, an air flow that increases the holding force of the object 4 is generated between the object 4 and the vibrating bodies 2a to 2d, and the holding force of the object levitation apparatus 1 is improved with a simple configuration. To do.
[0028]
(2) The vibrator 6a includes four pairs of piezo elements 10a and 10b having a quadrangular arc shape, and the four pairs of piezo elements 10a and 10b are sequentially vibrated to generate traveling waves that rotate in one direction on the vibrators 2a to 2d. Therefore, a vortex air flow is generated between the object 4 and the vibrating bodies 2a to 2d, and the holding force is increased.
[0029]
(3) Since the object 4 is levitated and held in a state of being arranged at positions corresponding to the four corners of the rectangular plate-like object 4, even if an external force is applied to the object 4 from any side in the horizontal direction, the force The movement of the object 4 is suppressed by the radiation pressure against the resistance, and the holding force for holding the object 4 in a predetermined position is further improved.
[0030]
(4) Since the vibrating body 3 that is longitudinally vibrated is disposed at a position substantially equidistant from each of the vibrating bodies 2a to 2d, even when the area of the object 4 is large, the bending is caused by the radiation pressure from the vibrating body 3. Is suppressed, and the object 4 floats in a stable state.
[0031]
(5) The object 4 to be levitated has a flat bottom surface and has a straight edge 4a. When the vibrating bodies 2a to 2d hold the object 4 in a levitated state, the outer edge 20 thereof is a straight line of the object 4. It is arranged so as to extend along the edge 4a in the vicinity of the edge 4a. Therefore, the object 4 can be held in a stable state at a predetermined position.
[0032]
(6) Since the vibrators 2a to 2d arranged at positions corresponding to the four corners of the object 4 are arranged in a state inclined at a predetermined angle θ with respect to the horizontal plane, the vibrators 2a to 2d are arranged horizontally. As a result, the effect of holding the object 4 in a predetermined position is improved.
[0033]
(7) The object levitation device 1 is mounted on the transport vehicle 13. Therefore, the object 4 can be reliably conveyed to a predetermined position in the floating state by the movement of the conveyance vehicle 13.
[0034]
(8) Without using a vibrating body having a size corresponding to the entire bottom area of the object 4 as a vibrating body that radiates sound waves to the object 4, a plurality of vibrating bodies 2a to 2d, 3 are used, Since the total is smaller than the bottom area of the object 4, the vibrating bodies 2 a to 2 d and 3 can be reduced in weight, and as a result, the entire object levitation device 1 can be reduced in weight.
[0035]
(Second Embodiment)
Next, a second embodiment will be described with reference to FIG. In this embodiment, the point that the object 4 is levitated and held by the two vibrating bodies 21a and 21b, the configuration of the vibrator 6a that swings the vibrating surface of the vibrating bodies 21a and 21b, and the shape of the horn 5 are the same as those described above. The form is very different. The same parts as those of the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. In addition, illustration of the transport vehicle 13, the support bracket 14, the oscillator 16, and the like is omitted.
[0036]
The distance between the outsides of the pair of vibrating bodies 21 a and 21 b is formed to be the same as the width of the object 4. The metal block 9 a constituting the vibrator 6 a also serves as the horn 5. The vibrator 6a includes two semicircular arc-shaped piezoelectric elements 22a and 22b as shown in FIGS. 4B and 4C and two corresponding semicircular arc electrode plates 23a and 23b. Yes. The electrode plates 23a and 23b are connected to the oscillator 16 via a changeover switch (not shown).
[0037]
In this embodiment, longitudinal vibrations are applied to the vibrating bodies 21a and 21b via the piezoelectric elements 7a and 7b, and the left and right sides of FIG. 4 are sandwiched between the centers of the vibrating bodies 21a and 21b via the piezoelectric elements 22a and 22b. A swinging motion in which both sides rise and fall alternately is excited. Then, an air flow that reciprocates in the left-right direction in FIG. 4 is generated between the surfaces (upper surfaces) of the vibrating bodies 21 a and 21 b and the bottom surface of the object 4. As a result, the holding force of the object 4 is improved as compared with a configuration in which longitudinal vibration is only applied via the piezoelectric elements 7a and 7b.
[0038]
This embodiment has the following effects in addition to the same effects as (1), (5), (7) and (8) of the above embodiment.
(9) The configuration of the vibrator 6a for applying vibrations that swing the vibration surface to the vibrating bodies 21a and 21b in addition to the longitudinal vibration is simplified.
[0039]
The embodiment is not limited to the above, and may be configured as follows, for example.
In the configuration in which the vibrating bodies 2a to 2d whose vibrating surfaces are swung are arranged at positions corresponding to the four corners of the object 4 as in the first embodiment, the vibrating bodies 2a to 2d are vibrated when the vibrating bodies 2a to 2d vibrate. A configuration may be adopted in which an airflow in the direction of the arrow shown in FIG. 5B is generated between the surface of 2d and the bottom surface of the object 4. For example, the vibrator 6a includes the same vibrator 6a as that of the second embodiment, that is, a configuration including annular piezo elements 7a and 7b and a pair of semicircular piezo elements 22a and 22b. . For example, as shown in FIG. 5A, the vibrator 6a is arranged in a state where the linear portions of the piezoelectric elements 22a and 22b are substantially orthogonal to the diagonal lines of the vibrating bodies 2a to 2d. In this case, an air flow along the diagonal line of the object 4 is generated between the bottom surface of the object 4 and the surfaces of the vibrating bodies 2a to 2d by driving the vibrators 6a. Thus, the holding force for the object 4 is improved.
[0040]
A vibrator 6a including annular piezo elements 7a and 7b and semicircular arc piezo elements 22a and 22b is formed on the surfaces of the vibrators 2a to 2d and the bottom surface of the object 4 when the vibrators 2a to 2d vibrate. Between these, you may arrange | position so that the airflow of the arrow direction shown in FIG.6 (b) may generate | occur | produce. As shown in FIG. 6A, the vibrator 6a is arranged so that the linear portion is orthogonal to the longitudinal direction of the object 4 (left-right direction in FIG. 6B). Is done.
[0041]
O Instead of providing the oscillators 15 and 16 for each vibrator 6a, each of the oscillators 15 and 16 and the changeover switch 19 may be shared by the vibrators 6a. In this case, the configuration is simplified and the manufacturing cost can be reduced.
[0042]
In the object levitating apparatus that levitates and holds the rectangular object 4 at a predetermined position, the arrangement positions of the vibrators 2a to 2d are not limited to positions corresponding to the four corners of the object 4, but positions corresponding to the center of each side. You may arrange in. Further, the number of the vibrating bodies 2 a to 2 d and 3 is not limited to five, and the number of vibrating bodies 3 arranged in the center may be omitted to be four, or may be appropriately changed depending on the size of the object 4.
[0043]
(Circle) you may arrange | position all the vibrating bodies 2a-2d and 3 horizontally.
The object levitation apparatus 1 is not necessarily used by being mounted on a moving body such as the transport vehicle 13, but may be used for a purpose of being placed at a predetermined position and holding the object 4 in a temporarily levitated state.
[0044]
The shape of the object 4 to be levitated and held is not limited to a rectangle such as a rectangle, but may be an arbitrary shape such as a triangle, another polygon, or a circle.
The shape of the horn 5 is not limited to a columnar shape, a truncated cone shape, or a combination of both, and may be, for example, a flat rectangular parallelepiped shape.
[0045]
A part of the edge 20 such as each of the vibrating bodies 2 a to 2 d may not correspond to the edge 4 a of the object 4, and the object 4 may be applied to a size that protrudes from the edge 20.
The present invention is not limited to a device that floats and holds an object having a flat bottom surface, but may be applied to a device that floats an object having a V-shaped bottom surface, such as the device disclosed in Japanese Patent Laid-Open No. 7-137824. .
[0046]
O Fixation of the vibrating bodies 2a to 2d, 3, 21a and 21b to the horn 5 is not limited to fastening with screws, and an adhesive may be used, or may be fixed by brazing or welding.
The vibrators 6a and 6b are not limited to Langevin vibrators, and other vibrators may be used.
[0047]
For the inventions that will be understood from the embodiments (technical idea) are described below.
(1) pre-Symbol object is a rectangular or square plate shape, the four corners and the corresponding positions of at least the object, the vertical addition to being connected to the vibrator to vibrate oscillating the vibrating surface the said vibration member of the vibration Is arranged.
[0048]
(2) pre-Symbol oscillator so as to form a traveling wave in which the vibrating body is a circle toward a predetermined direction to vibrate the vibrating body.
[0049]
(3) pre-Symbol oscillator to generate an air flow to reverse its direction of movement as well as movement in a straight line between the bottom of the vibrating member and the object to vibrate the vibrating body.
[0050]
【The invention's effect】
As described above in detail, according to the inventions of the first to fourth aspects, when an object is levitated by complex vibration using a plurality of vibrators, the holding force for holding the object in a predetermined position is improved. Can do.
[Brief description of the drawings]
FIG. 1A is a schematic plan view of an object levitation apparatus according to a first embodiment, and FIG. 1B is a schematic side view of a transport vehicle equipped with the object levitation apparatus.
2A is a schematic perspective view showing a vibrating body and excitation means, and FIG. 2B and FIG. 2C are schematic plan views of piezoelectric elements.
FIG. 3 is a schematic diagram showing a connection state of an electrode plate to an oscillator.
4A is a schematic plan view of an object levitation apparatus according to a second embodiment, FIG. 4B is a schematic side view, and FIG. 4C is a schematic plan view showing shapes of a piezoelectric element and an electrode plate.
5A is a schematic plan view showing the shapes of a piezoelectric element and an electrode plate according to another embodiment, and FIG. 5B is a schematic plan view showing a relationship between a vibrating body and an object of the object levitation apparatus.
6A is a schematic plan view showing shapes of a piezoelectric element and an electrode plate according to another embodiment, and FIG. 6B is a schematic plan view showing a relationship between a vibrating body and an object of the object levitation apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Object levitation apparatus, 2a-2d, 3, 21a, 21b ... Vibrating body, 4 ... Object, 4a, 20 ... Edge, 5 ... Horn which comprises excitation means, 6a, 6b ... Similarly vibrator, 15, 16 ... An oscillator constituting excitation means.

Claims

An object levitation device that excites a plurality of vibration bodies by an excitation means and floats and holds an object at a predetermined position on the surface of the vibration body by radiation pressure of sound waves from the vibration body,
At least a part of the plurality of vibrating bodies is connected to a vibrator that applies vibrations that cause the vibrating surface to swing in addition to longitudinal vibrations, and the vibrating surfaces are swung in addition to the longitudinal vibrations. The vibrating body to which vibration is applied is formed in a rectangular shape . In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape is at a position corresponding to the four corners of the object to be held. are arranged such that each two edges of the outer vibrator while being arranged symmetrically with respect to the center of the object to be held there extends along the edge of the object in the vicinity of different edges in the corners of the object The vibrating bodies at positions corresponding to the four corners of the object are vibrated by the vibrator so that the vibrating bodies at positions corresponding to both ends of each edge of the object form a traveling wave that draws a circle in the opposite direction. It added that object levitated Location.

An object levitation device that excites a plurality of vibration bodies by an excitation means and floats and holds an object at a predetermined position on the surface of the vibration body by radiation pressure of sound waves from the vibration body,
At least a part of the plurality of vibrating bodies is connected to a vibrator that applies vibrations that cause the vibrating surface to swing in addition to longitudinal vibrations, and the vibrating surfaces are swung in addition to the longitudinal vibrations. The vibrating body to which vibration is applied is formed in a rectangular shape. In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape is at a position corresponding to the four corners of the object to be held. Arranged symmetrically with respect to the center of the object to be held and arranged so that each of the two outer edges of the vibrating body extends along the edge of the object in the vicinity of a different edge at the corner of the object The vibrating bodies at positions corresponding to the four corners of the object are vibrated by the vibrator so that all of them generate an airflow moving linearly toward the position corresponding to the center of the object between the vibrating body and the object. object levitating instrumentation which is added .

An object levitation device that excites a plurality of vibration bodies by an excitation means and floats and holds an object at a predetermined position on the surface of the vibration body by radiation pressure of sound waves from the vibration body,
At least a part of the plurality of vibrating bodies is connected to a vibrator that applies vibrations that cause the vibrating surface to swing in addition to longitudinal vibrations, and the vibrating surfaces are swung in addition to the longitudinal vibrations. The vibrating body to which vibration is applied is formed in a rectangular shape. In order to float and hold the rectangular object in a predetermined position, the vibrating body formed in the rectangular shape is at a position corresponding to the four corners of the object to be held. Arranged symmetrically with respect to the center of the object to be held and arranged so that each of the two outer edges of the vibrating body extends along the edge of the object in the vicinity of a different edge at the corner of the object The vibrating bodies at positions corresponding to the four corners of the object all generate an airflow that moves linearly from the position corresponding to the center of the object to the position corresponding to the vibrating body between the vibrating body and the object. Vibrate by vibrator Object flotation devices that are added.

Vibrator positions corresponding to four corners of the object, the object flotation device according to any one of claims 1 to 3 which is arranged so as to be inclined inwardly.