JP4051565B2 - Optical waveguide module of optical waveguide type optical recording apparatus - Google Patents

Optical waveguide module of optical waveguide type optical recording apparatus Download PDF

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JP4051565B2
JP4051565B2 JP2003298529A JP2003298529A JP4051565B2 JP 4051565 B2 JP4051565 B2 JP 4051565B2 JP 2003298529 A JP2003298529 A JP 2003298529A JP 2003298529 A JP2003298529 A JP 2003298529A JP 4051565 B2 JP4051565 B2 JP 4051565B2
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recording apparatus
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道雄 横須賀
慶二 片岡
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リコープリンティングシステムズ株式会社
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Description

本発明は、複数の半導体レーザから出射する多数のビームを走査し印刷する、レーザプリンタにおける光導波路型光記録装置の光導波路モジュールに関するものである。   The present invention relates to an optical waveguide module of an optical waveguide type optical recording apparatus in a laser printer that scans and prints a large number of beams emitted from a plurality of semiconductor lasers.

近年、プリンタ市場にては、高速かつ高精細なレーザプリンタの要求が高い、そのため、レーザプリンタの光学系では、感光体上でのレーザビームの光走査速度の高速化が図られている。しかし、高速化により感光体ドラム上の1ドット当たりの光エネルギーは小さくなり、十分な潜像を形成することができず、高精細画像印刷ができない。光源に半導体レーザを使用した半導体レーザプリンタの場合、レーザ光の光エネルギーが小さいためより顕著である。そのため、複数の半導体レーザを用いて形成される複数のレーザ光(以下、マルチビームという。)によって、複数の並列なる光走査線を感光体ドラム上に形成するマルチビーム光記録が行われている。   In recent years, there is a high demand for a high-speed and high-definition laser printer in the printer market. Therefore, in the optical system of the laser printer, the optical scanning speed of the laser beam on the photosensitive member has been increased. However, as the speed increases, the light energy per dot on the photosensitive drum decreases, so that a sufficient latent image cannot be formed and high-definition image printing cannot be performed. In the case of a semiconductor laser printer using a semiconductor laser as the light source, the light energy of the laser light is small, so that it is more remarkable. Therefore, multi-beam optical recording is performed in which a plurality of parallel optical scanning lines are formed on the photosensitive drum by a plurality of laser beams (hereinafter referred to as multi-beams) formed using a plurality of semiconductor lasers. .

マルチビーム光記録を行うマルチビーム光記録装置の1例を図5で説明する。複数の半導体モジュール31の半導体レーザを、光ファイバ6をアレイ状に配列した光ファイバアレイ配列部15と光導波路1を接続した光導波路モジュール30に導いている。この光導波路モジュール30から出射するアレイ状の複数ビーム、いわゆるマルチビームは、レンズ26、27、28、29を通過して回転多面鏡25に入射し、回転多面鏡25により感光体ドラム23上に並列な光走査線32を同時に走査する。走査レンズ24は、回転多面鏡25によって偏向されたビームを感光体ドラム23上で微小なスポットとして絞り込む。   An example of a multi-beam optical recording apparatus that performs multi-beam optical recording will be described with reference to FIG. The semiconductor lasers of the plurality of semiconductor modules 31 are guided to the optical waveguide module 30 in which the optical fiber array 1 is connected to the optical fiber array array portion 15 in which the optical fibers 6 are arrayed. A plurality of array-shaped beams emitted from the optical waveguide module 30, so-called multi-beams, pass through lenses 26, 27, 28, and 29 and enter the rotary polygon mirror 25, and are incident on the photosensitive drum 23 by the rotary polygon mirror 25. The parallel optical scanning lines 32 are scanned simultaneously. The scanning lens 24 narrows the beam deflected by the rotary polygon mirror 25 as a minute spot on the photosensitive drum 23.

図3、4により光導波路モジュール30の構造を説明する。光導波路モジュール30は、光導波路1と光ファイバアレイ配列部15を接合し、光ファイバ6のコア部10を伝わるレーザ光を導波路1の入射コア部4に伝え、更に、コア部2に伝え、出射コア部3より出射するものである。   The structure of the optical waveguide module 30 will be described with reference to FIGS. The optical waveguide module 30 joins the optical waveguide 1 and the optical fiber array array portion 15, transmits the laser light transmitted through the core portion 10 of the optical fiber 6 to the incident core portion 4 of the waveguide 1, and further transmits it to the core portion 2. The light is emitted from the emission core portion 3.

光ファイバアレイ配列部15は、クラッド部14とコア部10からなる光ファイバ6を、高精度アレイ配列するため、シリコン結晶の異方性エッチングによって複数のV溝7が形成された配列部材5に接着剤8によって接着されている。そして、配列部材5の底部には補強のため補強部材13が接着されている。   The optical fiber array array section 15 is formed on the array member 5 in which a plurality of V grooves 7 are formed by anisotropic etching of silicon crystals in order to array the optical fibers 6 including the clad section 14 and the core section 10 with high precision. Bonded by an adhesive 8. A reinforcing member 13 is bonded to the bottom of the array member 5 for reinforcement.

光導波路1は、光ファイバ6の配列間隔と等間隔に形成された入射コア部4と、レーザ光を導くコア部2と、入射コア部4より間隔が小さい出射コア部3と、クラッド部11とからなる。   The optical waveguide 1 includes an incident core portion 4 formed at equal intervals with the arrangement interval of the optical fibers 6, a core portion 2 for guiding laser light, an output core portion 3 having a smaller interval than the incident core portion 4, and a cladding portion 11. It consists of.

光ファイバアレイ配列部15と光導波路1は、光ファイバ6と光導波路1の入射コア部4を、また、補強部材13と光導波路1を光透過性の接着剤12で接着している。
尚、光導波路1と光ファイバアレイ配列部15の接続面は、接続部での戻り光をなくすため、斜め研磨する場合があり、本例では8度に研磨してある。
The optical fiber array array portion 15 and the optical waveguide 1 are bonded to each other with the optical fiber 6 and the incident core portion 4 of the optical waveguide 1 and the reinforcing member 13 and the optical waveguide 1 with a light-transmitting adhesive 12.
Incidentally, the connection surface between the optical waveguide 1 and the optical fiber array array part 15 may be obliquely polished to eliminate the return light at the connection part, and in this example, it is polished 8 degrees.

従来の光導波路モジュール30は、従来、半導体レーザに赤色レーザ光を使用している。しかし、高速、高精細印刷を可能にするため、感光体ドラムに高感度を有する青色半導体レーザが使用されるようになった。しかし、青色半導体レーザからの青色レーザ光を光導波路モジュール30の光ファイバ6から接着面を透過し、そして、光導波路1へと伝える時、光ファイバ6と光導波路1の接着に使用した接着剤12は、青色レーザ光の波長(405nm付近)が紫外光に近いため、青色レーザ光を吸収して変質する。そのため、光透過効率が悪くなり、その光導波路モジュール30は使用不可となる。   The conventional optical waveguide module 30 conventionally uses red laser light as a semiconductor laser. However, in order to enable high-speed and high-definition printing, a blue semiconductor laser having high sensitivity has been used for the photosensitive drum. However, the adhesive used to bond the optical fiber 6 and the optical waveguide 1 when transmitting the blue laser light from the blue semiconductor laser through the optical fiber 6 of the optical waveguide module 30 through the adhesive surface and to the optical waveguide 1. No. 12 has a wavelength of blue laser light (near 405 nm) close to ultraviolet light, and therefore absorbs blue laser light and changes its quality. Therefore, the light transmission efficiency is deteriorated, and the optical waveguide module 30 becomes unusable.

本発明の目的は、光導波路型光記録装置に於いて、光導波路と光ファイバの接続部における光伝達の安定化を図った光導波路モジュールを提供し、高品質印刷を可能とし、レーザビームプリンタの光学系の信頼性を高めることにある。   SUMMARY OF THE INVENTION An object of the present invention is to provide an optical waveguide module that stabilizes light transmission at the connection between an optical waveguide and an optical fiber in an optical waveguide type optical recording apparatus, enabling high-quality printing, and a laser beam printer. This is to improve the reliability of the optical system.

上記目的は、光ファイバアレイ配列部と導波路とを、それぞれ対をなす光ファイバと前記光導波路のコア部の光軸が一致し、前記コア部の接続部が面接触または一定の間隙を有する位置に接続し、前記補強部材と前記光導波路を、前記光ファイバと前記光導波路の接続部から離れた位置でCOレーザによって融着接続することによって達成される。 The above-described object is that the optical axes of the optical fiber and the optical waveguide that make a pair of the optical fiber array array portion and the waveguide coincide with each other, and the connecting portion of the core portion has surface contact or a certain gap. The reinforcing member and the optical waveguide are fused and connected by a CO 2 laser at a position away from the connection portion of the optical fiber and the optical waveguide.

本発明によれば、光ファイバアレイ配列部と光導波路とを、光ファイバと入射コア部の接続部を避けたCOレーザ融着をした青色レーザ用の光導波路モジュールを提供し、高品質印刷を可能としたことにより、レーザビームプリンタの光学系の信頼性を高めることができる。 According to the present invention, there is provided an optical waveguide module for blue laser in which an optical fiber array array part and an optical waveguide are fused with a CO 2 laser avoiding a connection part between the optical fiber and the incident core part, and high quality printing is provided. Therefore, the reliability of the optical system of the laser beam printer can be improved.

以下本発明を、図1、2、及び図5により説明する。図5は前述した通りの構成であるので、具体的な説明を省略するが、本発明では、半導体に青色レーザ光を使用する点で前述と異なる。以下の実施例では、光導波路モジュールを主体に説明する。   The present invention will be described below with reference to FIGS. Since FIG. 5 has the configuration as described above, a detailed description thereof is omitted, but the present invention is different from the above in that blue laser light is used for the semiconductor. In the following embodiments, description will be made mainly on the optical waveguide module.

図1、2は光導波路モジュール33の構造を示す。光導波路モジュール33は、光導波路1と光ファイバアレイ配列部15を接続し、青色レーザ光(波長:405nm付近)を光ファイバ6のコア部10から導き、導波路1の入射コア部4に伝え、更に、コア部2に伝え、出射コア部3より出射するものである。   1 and 2 show the structure of the optical waveguide module 33. The optical waveguide module 33 connects the optical waveguide 1 and the optical fiber array array part 15, guides blue laser light (wavelength: around 405 nm) from the core part 10 of the optical fiber 6, and transmits it to the incident core part 4 of the waveguide 1. Further, it is transmitted to the core portion 2 and emitted from the emission core portion 3.

光ファイバアレイ配列部15は、クラッド部14とコア部10からなる青色レーザ用光ファイバ6を使用し、複数の光ファイバ6を、高精度にアレイ配列するため、シリコン結晶の異方性エッチングによって複数のV溝7が形成された配列部材5に接着剤8によって接着されている。そして、配列部材5の底部には、補強のため補強部材13が接着されている。補強部材13には石英ガラス板を使用している。   The optical fiber array array section 15 uses the blue laser optical fiber 6 composed of the clad section 14 and the core section 10, and in order to array the plurality of optical fibers 6 with high accuracy, the silicon crystal is anisotropically etched. An adhesive 8 is bonded to the array member 5 in which a plurality of V grooves 7 are formed. A reinforcing member 13 is bonded to the bottom of the array member 5 for reinforcement. A quartz glass plate is used for the reinforcing member 13.

光導波路1は、光ファイバ6の配列間隔と等間隔に形成された入射コア部4と、青色レーザ光を導くコア部2と、入射コア部4より配列間隔が小さい出射コア部3と、クラッド部11からなる。これらはほとんどが石英ガラスからなる。   The optical waveguide 1 includes an incident core portion 4 formed at equal intervals with the arrangement interval of the optical fibers 6, a core portion 2 that guides blue laser light, an output core portion 3 that has an arrangement interval smaller than the incident core portion 4, and a cladding. Part 11. These are mostly made of quartz glass.

光ファイバアレイ配列部15と光導波路1とを、光ファイバ6のコア部10と光導波路1の入射コア部4の光軸が一致する位置に接続している。コア部の光軸のずれが1μmより大きくなると、光の伝達率が悪くなるため、それ以下とすることが好ましい。その位置で補強部材13と光導波路1をCOレーザによって複数箇所を融着接続している。この時、光ファイバ6と入射コア部4の接続部は密着している。接続部に間隙を設ける場合は、間隔を光伝達の損失が10%以下となる10μm以下が好ましい。 The optical fiber array array 15 and the optical waveguide 1 are connected to a position where the optical axes of the core 10 of the optical fiber 6 and the incident core 4 of the optical waveguide 1 coincide. When the deviation of the optical axis of the core portion is larger than 1 μm, the light transmission rate is deteriorated. At that position, the reinforcing member 13 and the optical waveguide 1 are fusion-connected at a plurality of locations by a CO 2 laser. At this time, the connection portion between the optical fiber 6 and the incident core portion 4 is in close contact. In the case where a gap is provided in the connecting portion, the interval is preferably 10 μm or less so that the light transmission loss is 10% or less.

また、本実施例では、補強部材13と光導波路1の融着部9を融着した時に生じた熱やガスが、光ファイバ6と入射コア部4の接続部に悪影響を及ぼすことのない補強部材13と光導波路1の側面と底部の接続部としている。融着時は、発生ガスが光ファイバ6と入射コア部4に触れないように、不活性ガスを吹きかけても良い。   Further, in this embodiment, the heat and gas generated when the reinforcing member 13 and the fused portion 9 of the optical waveguide 1 are fused do not adversely affect the connection portion between the optical fiber 6 and the incident core portion 4. The connecting portion between the side surface and the bottom of the member 13 and the optical waveguide 1 is used. At the time of fusion, an inert gas may be blown so that the generated gas does not touch the optical fiber 6 and the incident core portion 4.

尚、光導波路1と光ファイバアレイ配列部15の接続面は、接続部での戻り光をなくすため、8度に斜め研磨している。   The connection surface between the optical waveguide 1 and the optical fiber array array portion 15 is obliquely polished at 8 degrees in order to eliminate return light at the connection portion.

以上の構成により、光ファイバ6と入射コア部4の接続部にて、青色レーザ光の伝達損失が小さい光導波路モジュール33とすることができる。本発明の光導波路モジュールをプリンタに搭載することにより、高速、高精細印刷を可能となる。   With the above configuration, the optical waveguide module 33 having a small transmission loss of blue laser light can be obtained at the connection portion between the optical fiber 6 and the incident core portion 4. By mounting the optical waveguide module of the present invention on a printer, high-speed and high-definition printing is possible.

本発明にかかる光導波路モジュールの実施例を示す平面図。The top view which shows the Example of the optical waveguide module concerning this invention. 本発明にかかる光導波路モジュールの実施例を示す断面図。Sectional drawing which shows the Example of the optical waveguide module concerning this invention. 従来の光導波路モジュールの平面図。The top view of the conventional optical waveguide module. 従来の光導波路モジュールの断面図。Sectional drawing of the conventional optical waveguide module. 光導波路モジュールによるマルチビームを用いた光記録装置を示す図。The figure which shows the optical recording device using the multi-beam by an optical waveguide module.

符号の説明Explanation of symbols

1は光導波路、2はコア部、3は出射コア部、4は入射コア部、5は配列部材、6は光ファイバ、7はV溝、8は接着剤、9は融着部、10はコア部、11はクラッド、12は接着剤、13は補強部材、14はクラッド部、15は光ファイバアレイ配列部、23は感光体ドラム、24は走査レンズ、25は回転多面鏡、26はレンズ、27はレンズ、28はレンズ、29はレンズ、30は光導波路モジュール、31は半導体モジュール、32は光走査線、33は光導波路モジュール
1 is an optical waveguide, 2 is a core part, 3 is an output core part, 4 is an incident core part, 5 is an array member, 6 is an optical fiber, 7 is a V-groove, 8 is an adhesive, 9 is a fusion part, Core part, 11 is clad, 12 is an adhesive, 13 is a reinforcing member, 14 is a clad part, 15 is an optical fiber array array part, 23 is a photosensitive drum, 24 is a scanning lens, 25 is a polygon mirror, and 26 is a lens. , 27 is a lens, 28 is a lens, 29 is a lens, 30 is an optical waveguide module, 31 is a semiconductor module, 32 is an optical scanning line, and 33 is an optical waveguide module.

Claims (4)

光ファイバ位置決め溝を複数有し、光ファイバをアレイ状に配列した配列部材とその底部に接着された補強部材からなる光ファイバアレイ配列部と光導波路を接続し、青色半導体レーザからの青色レーザ光を光ファイバから光導波路に導き、光導波路の端面から複数のアレイ状の青色レーザ光を出射し、それを感光材料上に導く光学系を用いた光導波路型光記録装置において、前記光ファイバアレイ配列部と前記導波路とを、それぞれ対をなす前記光ファイバと前記光導波路のコア部の光軸が一致し、前記コア部の接続部が面接触または一定の間隙を有する位置に接続し、前記補強部材と前記光導波路を、前記光ファイバと前記光導波路の接続部から離れた位置でCOレーザによって融着接続したことを特徴とする光導波路型光記録装置の光導波路モジュール。 A blue laser beam from a blue semiconductor laser by connecting an optical waveguide with an optical fiber array array section composed of an array member having a plurality of optical fiber positioning grooves and an optical fiber array array and a reinforcing member bonded to the bottom thereof. In an optical waveguide type optical recording apparatus using an optical system that guides an optical fiber from an optical fiber to an optical waveguide, emits a plurality of arrayed blue laser beams from the end face of the optical waveguide, and guides them onto a photosensitive material. An optical axis of the core portion of the optical fiber and the optical waveguide that make a pair with the array portion and the waveguide respectively match, and a connection portion of the core portion is connected to a position having surface contact or a certain gap, An optical waveguide type optical recording apparatus, wherein the reinforcing member and the optical waveguide are fusion-bonded by a CO 2 laser at a position away from a connection portion between the optical fiber and the optical waveguide. Optical waveguide module. 前記光ファイバと前記光導波路のコア間の光軸ずれが1μm以下であり、前記接続部の間隙は10μm以下であることを特徴とする請求項1記載の光導波路型光記録装置の光導波路モジュール。 2. The optical waveguide module of an optical waveguide type optical recording apparatus according to claim 1, wherein an optical axis deviation between the optical fiber and the core of the optical waveguide is 1 [mu] m or less, and a gap between the connecting portions is 10 [mu] m or less. . 前記補強部材と光導波路の融着部分が、それらの側面または底部の接続部に位置することを特徴とする請求項1記載の光導波路型光記録装置の光導波路モジュール。 2. The optical waveguide module of an optical waveguide type optical recording apparatus according to claim 1, wherein a fusion-bonding portion between the reinforcing member and the optical waveguide is located at a connection portion between a side surface or a bottom portion thereof. 前記補強部材と前記光導波路がともに石英ガラスで構成したことを特徴とする請求項1記載の光導波路型光記録装置の光導波路モジュール。
2. The optical waveguide module of an optical waveguide type optical recording apparatus according to claim 1, wherein both the reinforcing member and the optical waveguide are made of quartz glass.
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KR102066971B1 (en) * 2019-10-08 2020-01-16 주식회사 한화 Fiber array structure for fiber lase with improving chnnel and fiber array method for fiber lase

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JP6706859B2 (en) * 2016-04-13 2020-06-10 古河電気工業株式会社 Optical module

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KR102066971B1 (en) * 2019-10-08 2020-01-16 주식회사 한화 Fiber array structure for fiber lase with improving chnnel and fiber array method for fiber lase

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