JP4050039B2 - Scanning confocal microscope and its image construction method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a scanning confocal microscope using a confocal effect.And its image construction methodAbout.
[0002]
[Prior art]
In general, two types of scanning confocal microscopes, a disk scanning type and a laser scanning type, are well known. Of these, the disk scanning confocal microscope not only has a higher lateral resolution than a normal microscope, but also has a very high sectioning effect in the direction of the optical axis of the sample (hereinafter referred to as the “Z direction”). It has characteristics. By using this feature and combining with an image processing apparatus, it is possible to construct a sample as a three-dimensional image.
[0003]
FIG. 11 is a diagram showing a configuration of a conventional disk scanning confocal microscope.
[0004]
The illumination light emitted from the light source 1 enters the half mirror 3 through the collimator lens 2, and the light reflected here illuminates the rotating disk 4. As the rotating disk 4, a so-called nippo disk in which a plurality of pinholes are spirally provided, or a slit pattern is used. Here, it is assumed that a Nipkow disk is used, and the rotating disk 4 is attached to the rotating shaft 5a of the motor 5 and rotates at a predetermined rotation speed. For this reason, the illumination light irradiated on the rotating disk 4 passes through a plurality of pinholes formed on the rotating disk 4 and is imaged on the sample 7 by the objective lens 6.
[0005]
The reflected light from the sample 7 passes through the objective lens 6 and the pinhole of the rotating disk 4 again, passes through the half mirror 3, and forms an image on the imaging unit 9 by the condenser lens 8. The imaging unit 9 images the reflected light from the sample 7 and outputs the luminance signal to the computer 10.
[0006]
The computer 10 captures and stores the luminance signal output from the imaging unit 9, performs image processing, obtains desired image data, displays it on the monitor 11, and outputs a drive signal to the Z drive unit 12. A part or the whole of the optical system and the sample are relatively moved in the optical axis direction to change the focal position of the sample. Although only the objective lens 6 is moved here, for example, a stage on which the sample 7 is loaded may be moved in the optical axis direction. The in-focus position, which is position information in the Z direction, is also recorded in the computer 10 in association with the image data.
[0007]
In the disk scanning confocal microscope configured as described above, the amount of light incident on the imaging unit 9 changes as the objective lens 6 moves, and the amount of incident light (luminance) when the surface of the sample is focused is Maximum. Since each pixel of the image sensor provided in the imaging unit 9 outputs a luminance signal corresponding to the amount of light from each position of the sample 7, the third order of the sample 7 is obtained by obtaining a Z-direction position indicating the maximum luminance for each pixel. An original shape can be obtained, and by constructing an image only with the maximum luminance value of each pixel, it is possible to construct an image with a deep focal depth that is in focus on the entire surface of the sample 7.
[0008]
[Problems to be solved by the invention]
In order for the image obtained in this way to be clear with high accuracy, a curve indicating the relationship between the luminance value and the position in the Z direction (hereinafter referred to as “I-Z curve”) has a steep characteristic. Needed.
[0009]
FIG. 12 is a diagram illustrating an IZ curve.
[0010]
(1) in FIG. 12 shows an IZ curve of a green (G) wavelength as a characteristic in a narrow wavelength band. In this figure, the peak of the luminance value indicating the maximum luminance can be clearly discriminated. On the other hand, when the wavelength band of illumination light is not limited in a normal optical system, the obtained IZ curve has a characteristic having a gentle peak mainly due to the influence of chromatic aberration generated in the objective lens 6. End up. (2) in FIG. 12 shows a situation in which the position showing the maximum luminance at each wavelength of red (R), green (G), and blue (B) is different depending on the chromatic aberration of the lens, and as a result, white that combines them. The light IZ curve shows a situation where the peak is gentle.
[0011]
For this reason, a technique has been adopted in which a steep IZ curve is obtained by using a narrow wavelength band by inserting a wavelength filter in a light source or imaging means. In such a case, the constructed three-dimensional image is more accurate, but the color information cannot be reproduced, so it is difficult to identify defects that can be identified by color, such as wrinkles and deposits on the sample surface. Problems arise and cannot be used for visual inspection of samples.
[0012]
In addition, when imaging is performed in a selected wavelength band, depending on the sample, the reflectance in the used wavelength band is low, the signal level is lowered, and the S / N ratio is deteriorated. There is a possibility that the original image cannot be constructed.
[0013]
The present invention has been made in view of such circumstances, and even when ordinary illumination is used, a steep I-Z curve can be obtained and the S / N ratio can be prevented from deteriorating with accuracy. Scanning confocal microscope that can obtain a good 3D image and can reproduce color information on the sample surfaceAnd its image construction methodThe purpose is to provide.
[0014]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides:A scanning confocal microscope that obtains an observation image of the sample while changing a focal plane on the sample in an optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth. An imaging unit that photoelectrically converts light and outputs a plurality of luminance signals having different wavelength bands of light, and output from the imaging unitA selection means for selecting a luminance signal having an optimum wavelength band from a plurality of luminance signals having different wavelength bands of light;Selected by the selectorUsing a luminance signal in the optimum wavelength bandOf the sampleIt is a scanning confocal microscope provided with an image construction means for constructing a three-dimensional image or an image with a deep focal depth.
  The present invention also provides a scanning confocal microscope that obtains an observation image of the sample while changing a focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth. A mask pattern member having a predetermined pattern, illumination means for emitting illumination light, an objective lens for imaging the illumination light emitted from the illumination means on the sample via the mask pattern member, and the sample Imaging means for photoelectrically converting reflected light from the light and outputting a plurality of luminance signals having different light wavelength bands; and a plurality of luminance signals having different light wavelength bands that are photoelectrically converted and output by the imaging means, A selection unit that selects a luminance signal in an optimal wavelength band, and a three-dimensional image of the sample or an image with a deep focal depth are constructed using the luminance signal in the optimal wavelength band selected by the selection unit. It is a scanning confocal microscope equipped with an image construction unit.
[0015]
According to the present invention, in the scanning confocal microscope according to the above-described invention, the image construction unit includes the maximum luminance of the luminance signal in the optimum wavelength band for each pixel of the imaging element of the imaging unit and the light that provides the maximum luminance. This is a scanning confocal microscope that obtains a Z-direction position, which is an axial position, and uses this to construct a three-dimensional image or an image with a deep focal depth.
[0016]
According to the present invention, in the scanning confocal microscope according to the above-described invention, the selection unit selects a luminance signal in an optimum wavelength band for each pixel, and the image construction unit displays chromatic aberration information between the respective wavelength bands. This is a scanning confocal microscope that corrects the position in the Z direction, which is the position in the optical axis direction, based on it.
[0017]
Further, the present invention is the scanning confocal microscope according to the above-described scanning confocal microscope, wherein the imaging means includes a color imaging element.
[0018]
Further, the present invention provides a scanning confocal microscope which is the invention described above,Furthermore,With multiple color filters,pluralColor filterBy switchingIt is a scanning confocal microscope that obtains a plurality of luminance signals.
  The mask pattern member of the scanning confocal microscope is a pinhole disk or a slit disk.
  Further, the mask pattern member of the scanning confocal microscope is a member that can control transmission and blocking of light by changing a predetermined pattern.
[0019]
The present invention also provides an image construction method for a scanning confocal microscope that obtains an observation image of a sample while changing the focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth. The light from the sample is photoelectrically converted and output, and the brightness signal in the optimum wavelength band is selected from the plurality of brightness signals in different wavelength bands of light, and the brightness signal in the selected optimum wavelength band is selected. It is an image construction method of a scanning confocal microscope that constructs a three-dimensional image of the sample or an image with a deep focal depth by using the sample.
  The present invention also provides an image of a scanning confocal microscope that obtains an observation image of the sample while changing the focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth. In the construction method, the illumination light emitted from the illumination unit through the predetermined pattern of the mask pattern member is imaged on the sample through the objective lens, and the reflected light from the sample is incident on the imaging unit, A luminance signal in the optimum wavelength band is selected from a plurality of luminance signals that are photoelectrically converted by the imaging unit and output in different wavelength bands of light, and the selected luminance signal in the optimum wavelength band is used. It is an image construction method of a scanning confocal microscope that constructs a three-dimensional image of the sample or an image having a deep focal depth.
  Here, the “wavelength band of light” refers to the wavelength band that constitutes the main component of the wavelengths that make up the light, and “the wavelength band of light is different” means that the maximum luminance of the light This means that even if there is a portion that overlaps in the wavelength band of the mutual light, the overlapping ratio is small.
[0020]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a diagram showing a configuration of a scanning confocal microscope according to the first embodiment of the present invention.
[0021]
In this figure, portions having the same functions as those in FIG. 11 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0022]
The illumination light emitted from the light source 1 irradiates the rotating disk 4 in which a plurality of pinholes are formed through the collimator lens 2 and the half mirror 3. The rotating disk 4 is attached to the rotating shaft 5a of the motor 5 and is rotated at a predetermined rotation speed. Illumination light that has passed through a plurality of pinholes formed in the rotating disk 4 is sampled by the objective lens 6. 7 is imaged.
[0023]
The reflected light from the sample 7 passes through the objective lens 6 and the pinhole of the rotating disk 4 again, passes through the half mirror 3, and forms an image on the color imaging unit 19 by the condenser lens 8. The computer 20 takes in luminance signals (R, G, B signals) output from a color image sensor provided in the color imaging unit 19, performs image processing, and displays an image or a calculation result on the monitor 11.
[0024]
In response to a command from the computer 20, the Z drive unit 12 moves part or all of the optical system and the sample relative to each other in the optical axis direction to change the focal position of the sample. In the present embodiment, only the objective lens 6 is moved.
[0025]
The computer 20 also receives a signal from the wavelength selection unit 21 and selects a wavelength band to be used when constructing a three-dimensional image from among the RGB luminance signals read from the color imaging device of the color imaging unit 19. It is configured to be able to. In the present embodiment, the wavelength selection unit 21 is configured separately from the computer 20, but is not limited thereto, and may be configured as software that operates on the computer 20.
[0026]
FIG. 2 is a diagram for explaining a method for constructing a three-dimensional image of a sample by the scanning confocal microscope of the present invention.
[0027]
(1) in FIG. 2 is a diagram showing a plan view and a cross-sectional view of the sample 7, and has a three-dimensional (three-dimensional) structure in which the hatched portion shown in the plan view is a convex portion. A case where the height ΔZ between two points (A, A) in this figure is obtained will be described as an example.
[0028]
(2) in FIG. 2 shows the IZ curves of the color luminance signals R, G, and B at the respective pixels corresponding to the two points (a, i) of the color image sensor. If any one of the R, G, and B signals is selected and the difference (ΔZ) in the Z direction between the peak positions is obtained, the accurate ΔZ can be obtained.
[0029]
In the example shown in the figure, the R signal is large and the G and B signals are small. This is due to the influence of the color of the surface of the sample 7, and thus the G and B signals become small when the surface of the sample 7 is reddish. Therefore, when ΔZ is obtained for the sample 7 using the G signal, the S / N ratio is lower and the accuracy of ΔZ is worse than when the R signal is used. This phenomenon occurs not only when the R, G, and B signals are used, but also when, for example, a color filter is inserted into the light source and the illumination is narrowed down and used.
[0030]
Therefore, in the present embodiment, the wavelength selection unit 21 selects any one of the R, G, and B signals, and the computer 20 is configured to construct a three-dimensional image using the selected signals.
[0031]
FIG. 3 is a flowchart showing a schematic operation procedure of the wavelength selector 21.
[0032]
The wavelength selection unit 21 creates an I-Z curve for each of the R, G, and B signals for a predetermined pixel of the color imaging device of the color imaging unit 19 or a pixel in a predetermined region (S1). Then, the peak luminance of these I-Z curves is obtained for each of the R, G, and B signals (S2), and the R, G, and B signals that give the maximum peak luminance are selected (S3). Then, the selected signal is instructed to the computer 20 (S4).
[0033]
Here, the signal is selected based on the peak luminance. However, the present invention is not limited to this example, and the signal may be selected from a predetermined algorithm based on the peak degree index such as the peak luminance, the S / N ratio, and the full width at half maximum. Alternatively, the operator may determine the color of the sample 7, select a signal, and specify and input the signal to the wavelength selection unit 21.
[0034]
FIG. 4 is a flowchart showing a schematic operation procedure of the computer 20.
[0035]
The computer 20 uses the signal selected by the wavelength selection unit 21 to obtain a Z-direction position that gives the maximum luminance for each pixel (S11), and constructs a three-dimensional image based on this position information (S12). Further, based on this information, the distance between the designated two points (a, i) is calculated (S13).
[0036]
(3) of FIG. 2 shows a state in which ΔZ is calculated based on the R signal that gives the selected best S / N ratio.
[0037]
Next, the computer 20 starts creating a color image. First, for each pixel, the maximum luminance that is the peak luminance of the R, G, and B signals is obtained (S14). Then, the data is configured so that the other signals (G and B signals) also have the maximum luminance at the position in the Z direction that gives the maximum luminance of the selected signal (R signal in this embodiment) (S15). Color information is created using the maximum luminance of the G and B signals and reflected in the three-dimensional image (S16).
[0038]
As described above, according to the scanning confocal microscope according to the present embodiment, since an appropriate wavelength band can be selected corresponding to the sample 7, a signal having a good S / N ratio is used. A three-dimensional image can be constructed with high accuracy, and the three-dimensional image can be displayed in color. As a result, a three-dimensional measurement of the sample 7 and an appearance inspection such as defect detection can be performed simultaneously.
[0039]
In the present embodiment, the color information is reflected in the three-dimensional image by the processing of the computer 20, but the non-confocal image is reflected as a configuration capable of switching to the non-confocal observation optical path in the optical system. Thus, it can be configured to reproduce a color close to the actual color.
[0040]
For example, a color image (non-confocal image) in a state where the rotating disk 4 is not interposed is used in parallel with or at a timing different from the operation of constructing the three-dimensional image using the luminance signal of the selected wavelength band. A color image can be reflected on the three-dimensional image by collecting the image information in correspondence with the Z-direction position and combining the image information.
[0041]
Further, in the present embodiment, the color image pickup device of the color image pickup unit 19 is described as an example that outputs RGB signals, but is not limited to this example, and RGB signals can be extracted from the output signals of the color image pickup devices. The present invention can be applied as long as it is one. Therefore, a color image sensor of YUV output or NTSC output may be used, and RGB signals may be extracted and used using those outputs.
[0042]
FIG. 5 is a diagram showing a configuration of a scanning confocal microscope according to the second embodiment of the present invention. In this figure, parts having the same functions as those in FIGS. 1 and 11 are denoted by the same reference numerals, and detailed description thereof is omitted.
[0043]
The scanning confocal microscope of the present embodiment has a configuration in which a monochrome imaging device is used for the imaging unit 9 and a color filter unit 24 is inserted in the optical path downstream of the light source 1. The color filter unit 24 is attached to the rotating shaft 23a of the motor 23 and is configured to rotate according to a command from the computer 20.
[0044]
FIG. 6 is a diagram illustrating the configuration of the color filter unit 24.
[0045]
The color filter unit 24 is provided with three filters of red, green, and blue wavelength bands, and is configured such that any one of the filters is inserted into the optical path by being rotated to a predetermined position.
[0046]
FIG. 7 is a flowchart showing a schematic operation procedure of the computer 20.
[0047]
The computer 20 rotates the color filter unit 24 to switch the color filter (S21). Then, the luminance signal of the sample 7 is read out from the imaging device of the imaging unit 9 and stored under illumination of the selected narrow wavelength band (S22). This process is repeated for a predetermined color filter, and the luminance signal is read out from the image sensor of the imaging unit 9, and when the processing is completed for all the luminance signals of the predetermined color filter (S23), the Z driving unit 12 is operated. The objective lens 6 is moved by a predetermined distance (S24), and this process is repeated until the objective lens 6 completes the movement of the predetermined range (S25).
[0048]
Since the necessary luminance signal is read into the computer by the above processing, a three-dimensional image can be constructed by the same processing (S1 to S16) as described above (S26).
[0049]
In the present embodiment, since the wavelength band of the illumination light is selected using the color filter, various wavelength bands can be freely selected as compared with the first embodiment. Therefore, the number of wavelength bands that can be selected is not limited to three. For example, in order to make the IZ curve steep, many narrow wavelength band filters are prepared, and the wavelength bands are finer than the R, G, and B wavelength bands. It is also possible to configure so as to increase the accuracy. When a large number of wavelength bands are selected, color filters are arranged in the color filter unit 24 by the number of the wavelength bands.
[0050]
As described above, according to the scanning confocal microscope according to the second embodiment, since the wavelength band corresponding to the sample 7 can be selected as in the first embodiment, the S / N ratio can be selected. It is possible to construct a three-dimensional image with good accuracy using a good signal, and the processing time is longer than in the first embodiment, but the color of the sample 7 can be reflected in the three-dimensional image. As a result, the appearance inspection such as three-dimensional measurement and defect detection of the sample 7 can be performed simultaneously.
[0051]
In particular, in the present embodiment, the width and number of wavelength bands can be freely set and selected, so that measurement can be performed using a wavelength band more suitable for the sample, and the measurement accuracy can be further improved. It becomes possible.
[0052]
FIG. 8 is a diagram showing a scanning confocal microscope according to the third embodiment. In this figure, parts having the same functions as those in FIG. 1, FIG. 5, and FIG.
[0053]
In the present embodiment, the color imaging unit 19 is used as an imaging unit, and the computer 30 is configured to input color luminance signals (R, G, B signals) from a color imaging device provided in the color imaging unit 19. In addition, the computer 30 includes a wavelength selection unit 31 and a chromatic aberration storage unit 32.
[0054]
The wavelength selection unit 31 selects the signal having the maximum luminance value by comparing the R signal, the G signal, and the B signal for each pixel or for each designated area from the color luminance signal captured by the computer 30. Thus, an optimum wavelength band is selected for each corresponding portion of the sample 7 for each pixel.
[0055]
In order to correct the chromatic aberration, the chromatic aberration storage unit 32 stores a position correction value that is chromatic aberration information between the respective wavelength bands, and the wavelength selection unit 31 corrects a positional shift caused by the chromatic aberration using the position correction value. It also has a function.
[0056]
In the present embodiment, the wavelength selection unit 31 is realized by software operating in the computer 30, and the chromatic aberration storage unit 32 is realized by memory in the computer 30, but these functions are configured by hardware. It is also possible.
[0057]
FIG. 9 is a diagram for explaining a method for constructing a three-dimensional image of a sample according to the third embodiment.
[0058]
(1) in FIG. 9 is a diagram showing a plan view and a cross-sectional view of the sample 7, and has a three-dimensional (three-dimensional) structure in which the hatched portion shown in the plan view is a convex portion. An example of obtaining the height ΔZ between two points (A, C) in this figure will be described.
[0059]
(2) of FIG. 9 shows the IZ curves of the color luminance signals R, G, and B at the respective pixels corresponding to the two points (a, c) of the color image sensor. If any one of the R, G, and B signals is selected and the difference (ΔZ) in the Z direction between the peak positions is obtained, the accurate ΔZ can be obtained.
[0060]
In the example shown in the figure, the R signal is large and the G and B signals are small at the point a. This is due to the influence of the color of the surface of the sample 7, and thus the G and B signals become small when the surface of the sample 7 is reddish. On the other hand, at the point C, the G signal is large and the R and B signals are small. When the surface of the sample 7 is greenish, the R and B signals are thus reduced.
[0061]
Therefore, if the wavelength band to be used for this sample 7 is selected in advance as green and the same green wavelength band is applied to the entire screen, it is an optimal choice for point c. For point A, the peak position of the luminance value is obtained using a signal with a poor S / N ratio, resulting in a decrease in accuracy.
[0062]
Therefore, in this embodiment, the wavelength selection unit 31 is configured to select one of R, G, and B signals for each pixel.
[0063]
FIG. 10 is a flowchart showing a schematic operation procedure of the wavelength selector 31.
[0064]
The wavelength selection unit 31 obtains the maximum luminance for each R, G, and B signal for each pixel of the color image sensor, and selects a signal used for 3D image construction (S31). Then, a Z-direction position that gives the maximum luminance of the selected signal is obtained (S32).
[0065]
In this way, the peak of the luminance value can be obtained using a signal having the best S / N ratio at all locations in the screen. However, as described above, since chromatic aberration occurs in a normal optical system, an error occurs when the Z direction distance between peaks in different wavelength bands is obtained.
[0066]
(3) of FIG. 9 is a figure explaining the influence of chromatic aberration.
[0067]
In this figure, since the distance is calculated using the R signal and the G signal, the value is ΔZ1, which is Z compared with ΔZ which is a true value._RGOnly errors that are affected by chromatic aberration are produced.
[0068]
Therefore, the wavelength selection unit 31 extracts a position correction value that is chromatic aberration information between the respective wavelength bands from the chromatic aberration storage unit 32 (S33). This position correction value corrects the Z direction positions of the R signal and the B signal with reference to the Z position of the G signal. Therefore, if the selected signal is an R signal, the position correction value Z_RGIs added to the position in the Z direction, and if the selected signal is a B signal, the position correction value Z_GBCan be converted into the Z position of the G signal by subtracting.
[0069]
The position correction value has a specific value corresponding to the objective lens 6 to be used. In this embodiment, this value is not limited to one type, but may be determined and stored for each pixel. The value may be determined and stored for each predetermined area.
[0070]
Thus, after correcting the position in the Z direction obtained from each selected signal with the position correction value (S34), the above-described 3D image construction processing is executed using the position in the Z direction (S35).
[0071]
As described above, according to the embodiment of the present invention, since the wavelength band to be used can be selected for each pixel or for each designated region, a signal having a good S / N ratio can always be adopted. Thus, an accurate three-dimensional image can be constructed, and three-dimensional measurement can be performed with high accuracy. Further, as in the first embodiment, since the color of the sample can be reproduced, an appearance inspection such as defect detection can be performed at the same time.
[0072]
In this embodiment, a color imaging device is used as the imaging means, and the wavelength band to be used is configured to use three wavelength bands determined by the R signal, G signal, and B signal of the luminance signal. For example, as in the case of the second embodiment, a plurality of color filters may be arranged in the optical path so as to use a wavelength band determined by the arranged color filters. Since an image has to be captured every time, processing time is required, but a three-dimensional shape can be measured with higher accuracy.
[0073]
In the present embodiment, for example, the rotating disk 4 having pinholes arranged spirally is used, but a rotating disk having slits may be used. In addition, the present invention does not require rotation, and can be configured using a mask pattern member that can control transmission and blocking of light by changing a predetermined pattern. Such a case corresponds to, for example, a case where a liquid crystal is used instead of the rotating disk 4.
[0074]
【The invention's effect】
As described above, the scanning confocal microscope of the present inventionAnd its image construction methodTherefore, it is possible to obtain a highly accurate three-dimensional image and to reproduce color information on the sample surface.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a scanning confocal microscope according to a first embodiment of the present invention.
FIG. 2 is a view for explaining a method for constructing a three-dimensional image of a sample by the scanning confocal microscope of the present invention.
FIG. 3 is a flowchart showing a schematic operation procedure of a wavelength selection unit.
FIG. 4 is a flowchart showing a schematic operation procedure of the computer.
FIG. 5 is a diagram showing a configuration of a scanning confocal microscope according to a second embodiment of the present invention.
FIG. 6 is a diagram illustrating a configuration of a color filter unit.
FIG. 7 is a flowchart showing a general operation procedure of the computer.
FIG. 8 shows a scanning confocal microscope according to a third embodiment.
FIG. 9 is a view for explaining a method of constructing a three-dimensional image of a sample according to the third embodiment.
FIG. 10 is a flowchart showing a schematic operation procedure of a wavelength selection unit.
FIG. 11 is a diagram showing a configuration of a conventional disk scanning confocal microscope.
FIG. 12 is a diagram showing an IZ curve.
[Explanation of symbols]
1 ... Light source
2 ... Rotating disk 4
6 ... Objective lens
7 ... Sample
9 ... Imaging unit
10 ... Computer
11 ... Monitor
12 ... Z drive unit
20 ... Computer
21 ... Wavelength selector
24 ... Color filter unit
30 ... Computer
31 ... Wavelength selector
32. Chromatic aberration storage unit

Claims (10)

A scanning confocal microscope that obtains an observation image of the sample while changing a focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth,
  Imaging means for photoelectrically converting light from the sample and outputting a plurality of luminance signals having different wavelength bands of light;
  A selection unit that selects a luminance signal having an optimum wavelength band from a plurality of luminance signals having different wavelength bands of light output from the imaging unit;
  An image construction means for constructing a three-dimensional image of the sample or an image with a deep focal depth using the luminance signal of the optimum wavelength band selected by the selection section. Focus microscope. A scanning confocal microscope that obtains an observation image of the sample while changing a focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth,
  A mask pattern member having a predetermined pattern;
  Illumination means for emitting illumination light;
  An objective lens for imaging the illumination light emitted from the illumination means on the sample through the mask pattern member;
  Imaging means for photoelectrically converting reflected light from the sample and outputting a plurality of luminance signals having different wavelength bands of light;
  Selection means for selecting a luminance signal in an optimum wavelength band from a plurality of luminance signals having different wavelength bands of light, which are photoelectrically converted by the imaging means and output;
  And an image construction means for constructing a three-dimensional image of the sample or an image with a deep focal depth using the luminance signal of the optimum wavelength band selected by the selection means. Focus microscope. The image construction means obtains, for each pixel of the imaging pixels of the imaging means, a maximum luminance of the luminance signal in the optimum wavelength band, and a Z direction position that is the optical axis direction position that gives the maximum luminance, and The scanning confocal microscope according to claim 1, wherein a three-dimensional image of the sample or an image with a deep focal depth is constructed using the maximum brightness and the position in the Z direction. The selection unit selects a luminance signal of the optimum wavelength band for each pixel of the image sensor of the imaging unit,
  3. The scanning according to claim 1, wherein the image construction unit corrects a position in the Z direction which is a position in the optical axis direction based on chromatic aberration information between wavelength bands of the plurality of luminance signals. Type confocal microscope. The scanning confocal microscope according to claim 1, wherein the image pickup unit is a color image pickup device. The scanning confocal microscope according to claim 1, further comprising a plurality of color filters, wherein the plurality of luminance signals are obtained by switching the plurality of color filters. 3. The scanning confocal microscope according to claim 2, wherein the mask pattern member is a pinhole disk or a slit disk. The scanning confocal microscope according to claim 2, wherein the mask pattern member is a member capable of controlling transmission and blocking of light by changing a predetermined pattern. An image construction method of a scanning confocal microscope that obtains an observation image of the sample while changing a focal plane on the sample in the optical axis direction, and constructs a three-dimensional image of the sample or an image with a deep focal depth,
  The light from the sample is photoelectrically converted and output from a plurality of luminance signals having different wavelength bands of light, and the luminance signal of the optimal wavelength band is selected, and the selected luminance signal of the optimal wavelength band is used. Then, an image construction method for a scanning confocal microscope, characterized in that a three-dimensional image of the sample or an image having a deep focal depth is constructed. Image construction of a scanning confocal microscope that obtains an observation image of the sample while changing the focal plane on the sample in the optical axis direction and constructs a three-dimensional image of the sample or an image with a deep focal depth. A method,
  Illumination light emitted from the illumination means through a predetermined pattern of the mask pattern member is imaged on the sample through the objective lens, and reflected light from the sample is incident on the imaging unit, and photoelectric conversion is performed by the imaging unit. A luminance signal having an optimum wavelength band is selected from a plurality of luminance signals having different wavelength bands of light, and the three-dimensional image of the sample is selected using the selected luminance signal having the optimum wavelength band. Alternatively, an image construction method for a scanning confocal microscope, comprising constructing an image having a deep focal depth.

Images