JP4047362B1 - Light source device - Google Patents

Abstract

In a light source device that reads lamp data and manages the usage state and usage history of the lamp, the reading device that reads the lamp data is protected from heat and voltage.
Lamp data is displayed on a lamp cap. A lamp data reading means is provided in the base holder for holding the base. In a state where the lamp is held by the base holder and not lit, the reading means is moved to a position for reading the lamp data. Before the lamp is turned on, the reading means is moved to a retracted position provided with a shielding portion that shields heat or the like caused by the lamp lighting. The lamp data includes lamp attributes such as date of manufacture, manufacturer name, manufacturing location, manufacturing line, lamp model, model number, lot number, identification number, rated current, rated voltage, cooling conditions, and installation to the equipment. It is a setting specification such as direction and use limit time. The display format of the lamp data includes an optically readable bar code, a two-dimensional code, characters, symbols, codes, figures, patterns, and the like.
[Selection] Figure 1

Description

  The present invention relates to a light source device, and more particularly to a light source device that protects a lamp data reading unit that reads lamp data displayed on a lamp.

  2. Description of the Related Art Conventionally, an exposure apparatus using a discharge lamp as a light source exposes a mask pattern for LSI manufacturing or the like onto a substrate. Prior to exposure, the mask and substrate must be in the correct positional relationship. Therefore, in the method disclosed in Patent Document 1, the mask and substrate alignment marks are imaged by the imaging device. The relative positions of the mask and the substrate are aligned so that both marks coincide. After the alignment is completed, the imaging device is retracted.

Furthermore, the substrate cannot be accurately exposed unless the discharge lamp satisfies the specified specifications such as wavelength and light quantity. When installing a new lamp, it is necessary to confirm that the discharge lamp meets the specified specifications. Since there is a characteristic deterioration due to long-term use of the lamp, it is necessary to replace the lamp when the specification is not met. When replacing the lamp, it is necessary to confirm that the discharge lamp meets the specified specifications. Therefore, the present applicant has proposed a light source device capable of confirming that the discharge lamp is suitable in Japanese Patent Application No. 2006-100000. This light source device reads and confirms lamp data displayed on the base. A reading device for reading the lamp data is provided in the base holder. It is automatically determined whether or not the attached discharge lamp is a suitable discharge lamp. If it is an appropriate discharge lamp, the discharge lamp is driven and the use state and use history of the discharge lamp are managed.
Japanese Unexamined Patent Publication No. 07-013340 Japanese Patent Application No. 2006-100000 Specification

  However, the conventional lamp data reading method has the following problems. Since the discharge lamp is turned on by applying a pulsed high voltage that causes dielectric breakdown between the lamp electrodes from the base holder, there is a risk that the components of the reading device may be broken down due to the high voltage. In addition, in an electrodeless discharge lamp that is lit by microwaves or a discharge lamp that is lit by high-frequency current, the constituent members of the reading device are significantly deteriorated by electromagnetic waves, or a normal reading operation cannot be performed. Further, when the discharge lamp is turned on, the periphery of the base holder is in a high temperature state of about 200 ° C. to 300 ° C., so that the constituent members of the reading device are deteriorated by heat. When the reading device deteriorates, it becomes impossible to accurately manage the lamp usage state, usage history, and the like. In order to avoid this, if the reading apparatus is provided with a cooling structure or an insulating structure that protects the reading apparatus from heat and high voltage, the structure of the light source device becomes complicated and the cost increases. In addition, it is difficult to apply the method of inserting / removing the imaging device into / from the optical path disclosed in Patent Document 1 as it is to the management of the discharge lamp in the light source device because the conditions for the cause of deterioration are significantly different.

  An object of the present invention is to solve the above-described conventional problems and to protect a reading device that reads lamp data displayed on a lamp cap in a light source device from causes of deterioration such as heat and high voltage of the lamp. .

  In order to solve the above-described problems, in the present invention, the light source device includes a lamp having a base that displays lamp data, a base holder that holds the base, a reading unit that reads the lamp data, and a reading position where the lamp data can be read. Moving means for moving the reading means between the position and the safe retreat position, and moving the reading means to the reading position when the base is held by the base holder and moving the reading means to the retreat position before the lamp is lit. And a control means for controlling the moving means.

  With the above-described configuration, the lamp data reader can be protected from lamp heat and high voltage to prevent deterioration, and the use state and use history of the discharge lamp can be accurately managed.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to FIGS.

  The embodiment of the present invention is a light source device that causes the lamp data reading unit to enter the notch portion of the base holder when reading the lamp data, and retracts the lamp data reading unit when the discharge lamp is turned on.

  FIG. 1 is an external view showing a state in which a lamp data reading unit of a light source device according to an embodiment of the present invention is arranged so as to face a lamp data display unit. In FIG. 1, an anode 1 is a positive electrode. The cathode 2 is a negative electrode. The internal lead bar 3 is a member that supplies power while supporting an electrode. The metal foil 4 is a member that electrically connects the internal lead bar and the external lead bar. The sealing tube portion 5 is a portion that hermetically seals the valve. The external lead bar 7 is a member that feeds power from the base through the metal foil to the electrode. The light emitting unit 9 is a part that emits light by discharge between the electrodes. The bulb portion 10 is a glass member that seals an electrode to form a discharge space. The base 20 is a member for mechanically holding the lamp and supplying power. The cylindrical portion 21 is a large diameter portion of the base. The protruding portion 23 is a small diameter portion of the base. The base holder 30 is a member that holds the base. The lamp data reading device 40 is a device that optically reads lamp data, and a lamp data reading unit including a sensor is provided at the tip. The arm portion 41 is means for retracting the lamp data reading device. The shielding unit 50 is a member that shields the heat of the lamp and the like.

  As shown in FIG. 1, the discharge lamp includes a bulb portion 10 composed of a light emitting portion 9 and two sealing tube portions 5, an anode 1 and a cathode 2 disposed opposite to each other in the light emitting portion 9, and these anode 1 and Sealing that supports the cathode 2 and energizes the inner lead rod 3, the outer lead rod 7, and connects the inner lead rod 3 and the outer lead rod 7 with the conductive metal foil 4 to hermetically seal. Further, the base 20 is fixed to the sealing pipe part 5, and the base 20 is fixed to the other sealing pipe part 5. The base 20 includes a cylindrical portion 21 that holds the sealing tube, an end surface 22 of the cylindrical portion that is connected to the cylindrical portion, and a protruding portion 23 that is implanted on the end surface of the cylindrical portion. The base holder is fixed to the light source device. The base holder is provided with a notch (FIG. 2), and one end of the ramp data reading device 40 enters the notch of the base holder. The other end side of the ramp data reading device 40 enters the blocking unit 51 and is connected to a linear moving device (FIG. 2) such as a linear motor. The moving device may be driven by an air cylinder, a motor, or the like. A manual lever / crank mechanism may also be used.

  FIG. 2 is a diagram illustrating a state in which the lamp data reading unit of the light source device is arranged to face the lamp data display unit. FIG. 2A is a longitudinal sectional view. FIG. 2B is a cross-sectional view taken along the line BB in FIG. In FIG. 2, an adhesive 6 is an adhesive that fixes the base to the sealing tube portion. The silver solder 8 is a member that connects the external lead bar to the base. The end surface 22 is an end surface of the cylindrical portion of the base. The lamp data display unit 25 is a part displaying lamp data. The notch 31 is a gap portion of the base holder. The end surface 32 is an end surface of the base holder. The hole 33 is a hole of the base holder. The window 34 is a window opened in the base holder. The concave portion 44 is a concave portion provided in the arm portion. The lamp data reading unit 45 is a sensor part that reads lamp data. The blocking part 51 is an area where heat or the like is blocked. The light shielding space 54 is a space where the light from the lamp is shielded. The moving device 60 is a driving device that moves the arm.

  As shown in FIG. 2, an electrode (FIG. 1) is connected to the metal foil 4 via an internal lead bar (FIG. 1). The metal foil 4 is sealed by a glass sealing tube portion 5 to obtain airtightness between the inside and the outside of the light emitting portion. A base 20 is fixed to the sealing tube portion 5 with an adhesive 6. The base 20 is electrically connected to the external lead rod 7 by the silver solder 8, and electric power is supplied to the electrodes via the base 20. On the end face 22 of the cylindrical portion of the base, a lamp data display unit 25 that displays data related to the lamp is provided. The base holder 30 fixed to the light source device includes a base 33 for holding the base, a notch 31 for allowing the lamp data reading device 40 to enter, and a window 34 communicating with the lamp data display unit 25. The discharge lamp is held by the light source device by fitting the protrusion 23 of the base into the hole 33 for holding the base and bringing the end face 22 of the base into contact with the end face 32 of the base holder. Besides this, the base structure may be fixed to the base holder with screws or the like.

  The ramp data reading device 40 includes a moving device 60 such as an air cylinder and a linear motor, an arm portion 41 that is linearly driven by the driving force of the moving device 60, a concave portion 44 provided in the arm portion 41, and a bottom surface of the concave portion 44. A lamp data reading unit 45 provided. The lamp data reading unit 45 includes a light source such as an LED and image reading means such as a CCD. Between the lamp data display unit and the lamp data reading unit 45, the concave portion 44 and the lamp data reading unit 45 of the lamp data reading device 40, the window part 34 of the base holder, the end surface 32 of the cylindrical part of the base and the lamp data The display unit 25 provides a light shielding space 54 that is shielded from outside light. A shielding unit 50 that shields the lamp data reading unit 45 is provided at a position where the lamp data reading unit 45 is retracted from the lamp data display unit 25. The shielding part 50 has a heat insulating property, an insulating property, and a light shielding property. A blocking unit 51 is formed between the lamp data reading unit 45 and the blocking unit 50. The blocking unit 51 is a space isolated from the heat and light of the lamp (including ultraviolet rays and infrared rays; the same applies hereinafter) and the voltage applied to the lamp.

  FIG. 3 is a longitudinal sectional view showing a state in which the lamp data reading unit of the light source device is retracted to the blocking unit. FIG. 4 is a longitudinal sectional view showing a state in which the lamp data reading unit of the modification of the light source device is retracted.

  The function and operation of the light source device in the embodiment of the present invention configured as described above will be described. First, an outline of functions of the light source device will be described with reference to FIG. The lamp cap 20 is held by the cap holder 30 of the light source device. Lamp data is displayed on the lamp cap 20. The lamp data is lamp attribute information and lamp setting specification information. The lamp data display format is optically readable. When the base 20 is held by the base holder 30, the lamp data reading device 40 reads the lamp data. The reading position is a position where external light is shielded by the base 20, the base holder 30, and the lamp data reading unit. Before the lamp is turned on, the lamp data reading unit is moved to the retracted position. At the retracted position, there is a shielding portion 50 that shields heat, light, electromagnetic waves, and high voltage associated with lamp lighting. The lamp data is read to control the driving of the lamp and manage the usage state and usage history.

  Next, a method for reading lamp data will be described with reference to FIG. The lamp data display part 25, the window part 34, the concave part 44, and the lamp data reading part 45 form a light shielding space 54 in which outside light is blocked. By preventing light noise entering the lamp data reading unit 45, the lamp data can be accurately recognized. The display content of the lamp data display unit 25 is optically read and stored in the lamp data storage device of the light source device.

  A window part 34 is provided in the base holder 30 so that the base 20 and the arm part 41 of the lamp data reading device 40 do not come into contact with each other. It is also possible to read the lamp data of the lamp data display unit 25 by the lamp data reading unit 45 by penetrating the notch portion without providing the window portion 34 in the base holder 30. However, the arm portion 41 of the lamp data reading device 40 may collide with the base and damage the lamp. Furthermore, there is a possibility that the lamp data reading unit 45 may be contaminated by foreign matter adhering to the lamp data display unit 25. In order to avoid this, reading is performed through the window 34.

  The lamp data related to the discharge lamp can be classified into the attribute for each discharge lamp and the setting specification of the discharge lamp. The attributes for each discharge lamp include the date of manufacture, the manufacturer name of the discharge lamp, the manufacturing location, the manufacturing line, the model of the discharge lamp, the type number, the lot number, the identification number, etc., and one or more combinations thereof Consists of. The setting specification of the discharge lamp is a condition for using the discharge lamp in the light source device, such as a rated lamp current, a rated lamp voltage, a cooling condition, and an installation direction to the apparatus, and is composed of one or a plurality of combinations thereof. The display format of the lamp data display unit 25 of the discharge lamp is characters, symbols, symbols, figures, patterns, and the like. You may display by those combination. Bar codes and two-dimensional codes are suitable. A manufacturer's mark or the like may be displayed.

  The lamp data is displayed by the difference in the reflectance of light and the combination of the regular reflection part and the irregular reflection part. The ramp data display unit 25 can be formed by laser beam irradiation or the like in addition to cutting, engraving, marking, and etching. A concave portion may be formed in advance on the end surface of the cylindrical portion of the base structure, and a plate on which lamp data is displayed may be fitted and attached to the concave portion. Since the lamp data display unit 25 can be visually confirmed, if the lamp data display unit 25 is displayed with characters and figures that can be seen by the user of the discharge lamp, it can be confirmed that the discharge lamp is a discharge lamp suitable for the light source device.

  Next, a method for retracting the lamp data reading unit will be described with reference to FIGS. Before the lamp is turned on, as shown in FIG. 2, the lamp data reading unit 45 is opposed to the lamp data display unit 25 through the arm unit 41 and the window unit 34 by the moving device 60. As shown by the arrow in FIG. 2 (A), it is inserted into the notch 31 of the base holder 30. This position is a lamp data reading position. At this position, the lamp data reading unit 45 reads the lamp data display unit 25. Since there is no optical noise in the light shielding space 54 where the outside light is blocked, the lamp data reading unit 45 can accurately read the lamp data. The image signal of the read lamp data is subjected to image processing for pattern recognition and character recognition. Data such as the attributes for each lamp and the setting specifications of the discharge lamp are retrieved as necessary. Based on this data, it is automatically determined whether or not the discharge lamp is a discharge lamp suitable for the light source device.

  If the discharge lamp is correct, the arm unit 41 is moved by the moving device 60 as shown by the arrow in FIG. 3, and the lamp data reading unit 45 is retracted to the blocking unit 51. After retracting the lamp data reading unit 45 to the blocking unit 51, power is supplied to the lamp and the lamp is turned on. At the retracted position, the lamp data reading unit 45 is isolated from the heat, light, and electromagnetic waves of the lamp when the lamp is turned on, and the high voltage applied to the lamp. Therefore, by moving the lamp data reading unit 45 to the retracted position when the lamp is lit, the lamp data reading unit 45 is prevented from deteriorating due to the heat of the lamp, light, electromagnetic waves, and high voltage applied to the lamp. It is possible to accurately manage the discharge lamp usage status and usage history over a long period of time. On the other hand, if the discharge lamp is not suitable, the lighting is stopped and a warning is given that the lamp is not suitable.

  Next, a modification will be described with reference to FIG. FIG. 4A is a first modification, and is a cross-sectional view showing a state in which the lamp data reading unit is retracted by movement and rotation. The columnar arm 41 having the lamp data reading unit 45 is moved by the moving device 60, and the lamp data reading unit 45 is retracted to a predetermined position. Thereafter, the arm portion 41 is rotated around the axis so that the ramp data reading portion 45 is directed in the direction opposite to the lamp. The arm unit 41 is rotated around the axis by the moving device 60 so that light emitted from the discharge lamp does not enter the lamp data reading unit 45. Only by changing the direction of the lamp data reading unit 45, the light emitted from the discharge lamp can be prevented from entering the lamp data reading unit 45 without providing the shielding unit 50. You may evacuate only by rotation without moving. Further, as long as it can be evacuated to a safe position only by movement, it may be evacuated only by movement. FIG. 4B shows a second modification. It is sectional drawing which shows the state which moved the arm part 41 which attached the ramp data reading part 45 to circular arc shape like a crane, and was evacuated. The arm portion 41 to which the lamp data reading unit 45 is attached is moved in an arc shape to be retracted to a position where light emitted from the discharge lamp is avoided. A combination of linear movement and arcuate movement may be used to move the arm portion 41 linearly and then move it in an arcuate manner.

  Although the example in which the shielding unit 50 is fixed to the light source device has been described, the lamp data reading unit 45 is fixed, and the shielding unit 50 is moved by the moving device 60 so that the lamp data reading unit 45 is accommodated in the blocking unit 51. It may be. In this case, the light from the lamp may be blocked by a shutter or the like. In addition, for positioning, a convex portion is provided on the end surface 22 of the cylindrical portion of the base so as to enter the window portion 34, and a ramp data display portion 45 is provided on the end surface of the convex portion, so that the circumferential direction is uniquely defined. Can be determined. Since the direction in the circumferential direction is uniquely determined, the lamp data display unit and the lamp data reading unit 45 can be easily faced when the lamp is mounted. The configuration of the high-pressure gas serving as the drive source for the air cylinder is simplified when compressed air that cools the lamp is used. Although an example of a discharge lamp having electrodes has been described so far, it can be applied to other lamps such as a low-pressure mercury lamp, a halogen lamp, a heater lamp, and an excimer lamp.

  As described above, in the embodiment of the present invention, when the lamp data is read, the lamp data reading unit is inserted into the notch provided in the base holder, and when the discharge lamp is turned on, the lamp data reading unit is Since it is configured to retract to the shielding portion, the reading device can be protected from causes of deterioration such as heat and voltage.

  The light source device of the present invention is optimal as a light source device for protecting a lamp data reading unit that reads lamp data provided in a lamp.

It is an external view which shows the state which has arrange | positioned the lamp data reading part of the light source device in the Example of this invention so that it may face a lamp data display part. It is sectional drawing which shows the state which has arrange | positioned the lamp data reading part of the light source device in the Example of this invention so that it may face a lamp data display part. It is a longitudinal cross-sectional view which shows the state which retracted the lamp data reading part of the light source device in the Example of this invention to the interruption | blocking part. It is a longitudinal cross-sectional view which shows the state which retracted the lamp data reading part of the modification of the light source device in the Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Anode 2 Cathode 3 Internal lead bar 4 Metal foil 5 Sealing tube part 6 Adhesive 7 External lead bar 8 Silver solder 9 Light emitting part
10 Valve section
20 base
21 Cylindrical part
22 End face of cylindrical part
23 Protrusion
25 Lamp data display
30 Cap holder
31 Notch
32 End face of base holder
33 holes
34 Window
40 Lamp data reader
41 arms
44 recess
45 Lamp data reader
50 Shield
51 Blocking part
54 Shading space
60 Mobile equipment

Claims (5)

A large-diameter cylindrical portion whose one end surface is sealed with a disk- shaped contact surface, a small-diameter protruding portion coaxially implanted through the center of the disk- shaped contact surface, and the disk- shaped contact surface A lamp having a base composed of the lamp data displayed above, a hole for holding the protruding portion, a holder end surface for supporting the disk- like contact surface, a side surface perpendicular to the holder end surface, and the holder end surface are left. A base holder comprising a notch part formed by cutting out a part of the side surface and a window part formed on the end face of the holder so as to have a closed circumference and communicating the disk-like contact surface and the notch part. When a reading means for reading said ramp data, moving means for moving said reading means between said enters the notch on the reading reads the lamp data via the window portion position and secure the retracted position, The reading is performed when the base is held by the base holder. Light source device characterized by comprising a control means for controlling said moving means to move the reading means before the lamp lighting the retracted position moves the stage to the reading position. 2. The light source device according to claim 1, wherein the retreat position includes a shielding unit that shields at least one of heat, light, electromagnetic waves, and high voltage associated with lamp lighting. The lamp data includes lamp attribute information and lamp setting specification information. The lamp attribute information includes a manufacturing date, a manufacturer name, a manufacturing place, a manufacturing line, a lamp model, a model number, a lot number, and an identification number. The lamp setting specification information includes one of a rated current, a rated voltage, a cooling condition, an installation direction to the apparatus, and a use limit time. Light source device. The light source device according to claim 3, further comprising a unit that reads the lamp data, controls driving of the lamp, and manages a use state and a use history. The display format of the lamp data is optically readable, and is a combination of one or more of a bar code, a two-dimensional code, characters, symbols, codes, figures, and patterns. Item 5. The light source device according to Item 3 or 4.

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