JP4047297B2

JP4047297B2 - Susceptor support structure

Info

Publication number: JP4047297B2
Application number: JP2004078580A
Authority: JP
Inventors: 和明山口; 義信後藤
Original assignee: NGK Insulators Ltd
Current assignee: NGK Insulators Ltd
Priority date: 2001-02-09
Filing date: 2004-03-18
Publication date: 2008-02-13
Anticipated expiration: 2022-02-06
Also published as: JP2004247745A

Description

本発明は、サセプターのチャンバーへの取付構造に関するものである。 The present invention relates to a structure for mounting a susceptor to a chamber.

半導体製造用途等においては、例えば図６に示すように、セラミックヒーター２をチャンバー１０の内側壁面へと取り付ける必要がある。このため、セラミックス板製の筒状の支持部材２１の一端２１ａをセラミックヒーター２の接合面（背面）２ｂへと取り付け、この支持部材２１の他端２１ｃをチャンバー１０の内側壁面１０ｄへと取り付けることが行われている。支持部材２１は、アルミナ、窒化アルミニウム等の耐熱性のセラミックスによって形成されている。支持部材２１の内側空間６とチャンバー１０の開口１０ａとを連通させる。支持部材２１とチャンバー１０との間はＯリング２０によって気密に封止する。これによって、支持部材２１の内側空間６とチャンバー１０の内部空間５との間を気密に封止し、チャンバー１０の内部空間５内のガスがチャンバー１０の外部へと漏れないようにする。セラミックサセプター２内には、例えば抵抗発熱体４が埋設されている。 In a semiconductor manufacturing application or the like, it is necessary to attach the ceramic heater 2 to the inner wall surface of the chamber 10 as shown in FIG. For this reason, one end 21 a of the cylindrical support member 21 made of a ceramic plate is attached to the joining surface (back surface) 2 b of the ceramic heater 2, and the other end 21 c of this support member 21 is attached to the inner wall surface 10 d of the chamber 10. Has been done. The support member 21 is made of a heat-resistant ceramic such as alumina or aluminum nitride. The inner space 6 of the support member 21 and the opening 10a of the chamber 10 are communicated. A space between the support member 21 and the chamber 10 is hermetically sealed by an O-ring 20. As a result, the space between the inner space 6 of the support member 21 and the inner space 5 of the chamber 10 is hermetically sealed so that the gas in the inner space 5 of the chamber 10 does not leak out of the chamber 10. In the ceramic susceptor 2, for example, a resistance heating element 4 is embedded.

セラミックサセプター２の半導体ウエハー１の設置面（加熱面）２ａの温度は、例えば４００℃以上、時には６００℃以上にも達する。一方、Ｏリング等のゴム製の封止部材２０は高熱には耐えられず、その耐熱温度は通常２００℃程度である。このため、チャンバー内に冷却フランジ８を設けることによって、Ｏリングの周辺を冷却し、Ｏリングの周辺の温度が２００℃以下となるように調節することが好ましい。 The temperature of the installation surface (heating surface) 2a of the semiconductor wafer 1 of the ceramic susceptor 2 reaches, for example, 400 ° C. or higher and sometimes 600 ° C. or higher. On the other hand, the rubber sealing member 20 such as an O-ring cannot withstand high heat, and the heat resistant temperature is usually about 200 ° C. For this reason, it is preferable to provide a cooling flange 8 in the chamber to cool the periphery of the O-ring and adjust the temperature around the O-ring to 200 ° C. or lower.

ところが、セラミックサセプター２の温度が上記のように高くなり、支持部材２１の一端２１ａの温度が例えば４００℃を超え、支持部材２１の他端２１ｃの温度を２００℃以下に冷却したものとすると、支持部材の内部における温度勾配は２００℃以上となる。 However, when the temperature of the ceramic susceptor 2 is increased as described above, the temperature of the one end 21a of the support member 21 exceeds 400 ° C., for example, and the temperature of the other end 21c of the support member 21 is cooled to 200 ° C. or less. The temperature gradient inside the support member is 200 ° C. or higher.

支持部材のサセプターに対する接合強度を向上させるためには、およびガス穴や、端子および熱電対を通すための貫通孔を支持部材２１の壁面の内部に設けるためには、支持部材２１を肉厚にし、支持部材のサセプターに対する接合面積を増大させる必要がある。しかし、支持部材を肉厚にすると、前述のように支持部材に温度勾配があることから、支持部材を伝搬する熱伝導量が大きくなる。この結果、支持部材の接合部分２１ａの近辺からの熱伝導の増大によって、加熱面２ａにコールドスポットが生ずる。このため、支持部材の本体部分は肉薄にし、支持部材のサセプター側端部に肉厚の拡張部分（フランジ部分）を設けることが有用である。 In order to improve the bonding strength of the support member to the susceptor, and to provide gas holes and through holes for passing terminals and thermocouples inside the wall surface of the support member 21, the support member 21 is made thick. It is necessary to increase the bonding area of the support member to the susceptor. However, when the support member is made thick, since the support member has a temperature gradient as described above, the amount of heat conduction that propagates through the support member increases. As a result, a cold spot is generated on the heating surface 2a due to an increase in heat conduction from the vicinity of the joint portion 21a of the support member. For this reason, it is useful to make the main body portion of the support member thin and to provide a thick expanded portion (flange portion) at the susceptor side end portion of the support member.

しかし、支持部材の端部に肉厚のフランジ部分を設けると、サセプターを高温に加熱するときに、本体部分とフランジ部分との境界付近に集中する内部応力が過大になる傾向がある。このために、支持部材の破壊を避けるためには、サセプターにおける温度の上限に限界がある。 However, if a thick flange portion is provided at the end of the support member, when the susceptor is heated to a high temperature, the internal stress concentrated near the boundary between the main body portion and the flange portion tends to be excessive. For this reason, in order to avoid destruction of a support member, there exists a limit in the upper limit of the temperature in a susceptor.

本発明の課題は、被処理物を加熱するためのサセプターと、このサセプターに接合されており、内側空間が設けられている支持部材と、支持部材に接合されている開口が設けられたチャンバーとを備えており、チャンバーの開口と支持部材の内側空間とが連通しており、支持部材の内側空間がチャンバーの内部空間に対して気密に封止されている取付構造において、サセプターから支持部材中へと伝達される熱を抑制すると共に、サセプターを高温にしたときに支持部材に集中する応力を緩和することである。 An object of the present invention is to provide a susceptor for heating an object to be processed, a support member that is joined to the susceptor and provided with an inner space, and a chamber that is provided with an opening that is joined to the support member. In the mounting structure in which the opening of the chamber and the inner space of the support member communicate with each other, and the inner space of the support member is hermetically sealed with respect to the inner space of the chamber, In addition to suppressing heat transferred to the susceptor, the stress concentrated on the support member when the susceptor is heated to a high temperature is alleviated.

本発明は、被処理物を加熱するためのサセプター、およびこのサセプターに接合されており、内側空間が設けられている支持部材、開口が設けられたチャンバーであって、該支持部材とこのチャンバーが接合されており、その開口が支持部材の内側空間と連通しているチャンバー、および、チャンバーの内部空間に対して気密に封止されている支持部材の内側空間、を備えている支持構造であって、前記支持部材が、さらに、筒状の本体部分を規定する第１の壁部と、前記支持部材の前記サセプター側の端部に設けられた拡径部を規定する第２の壁部と、前記支持部材の縦断面の外側輪郭において前記本体部分と前記拡径部との間に一つまたは複数の連続したアール部分とを備えており、前記第１の壁部の半径方向の厚みが前記第２の壁部の半径方向の厚みより小さいことを特徴とする。 The present invention relates to a susceptor for heating an object to be processed, a support member joined to the susceptor and provided with an inner space, and a chamber provided with an opening. The support structure includes a chamber that is joined and whose opening communicates with the inner space of the support member, and an inner space of the support member that is hermetically sealed with respect to the inner space of the chamber. The support member further includes a first wall portion that defines a cylindrical main body portion, and a second wall portion that defines an enlarged diameter portion provided at an end portion of the support member on the susceptor side. And the outer contour of the longitudinal section of the support member includes one or a plurality of continuous rounded portions between the main body portion and the enlarged diameter portion, and the radial thickness of the first wall portion is Of the second wall And it is smaller than the radial thickness.

拡径部とは、本体部分に比べて外径が大きくなっている部分を指している。 The enlarged diameter portion refers to a portion having an outer diameter larger than that of the main body portion.

「本体部分と拡径部との間に一つのアール部分が設けられている」とは、本体部分と拡径部との間に、２つ以上のアール部分が設けられている場合を排除することを意図している。アール部の個数は曲率中心の数によって定まる。曲率中心が１つであれば、その曲率中心に対応するアール部も１つである。アール部が２つあれば、各アール部に対応して各曲率中心が存在する。 “One rounded portion is provided between the main body portion and the enlarged diameter portion” excludes the case where two or more rounded portions are provided between the main body portion and the enlarged diameter portion. Is intended. The number of round portions is determined by the number of curvature centers. If there is one center of curvature, there is also one round portion corresponding to the center of curvature. If there are two round portions, each curvature center corresponds to each round portion.

また、本発明においては、本体部分と拡径部との間に、複数のアール部分が連続的に形成されている場合を含む。ここで、複数のアール部分とは、曲率中心の異なる複数のアール部分を意味する。また、複数のアール部分が連続しているとは、複数のアール部分の間に、直線状部、真直部分や段差などのアール部以外の形態を挟むことなしに、複数のアール部が連続的に形成されていることを意味する。この場合には、複数のアール部分の各曲率半径が異なっていても良いし、各曲率半径が同一であってもよい。 Moreover, in this invention, the case where the some round part is continuously formed between the main-body part and a diameter-expansion part is included. Here, a plurality of round portions means a plurality of round portions having different centers of curvature. In addition, a plurality of rounded portions are continuous, and a plurality of rounded portions are continuous without interposing a form other than the rounded portion such as a straight portion, a straight portion, or a step between the plurality of rounded portions. It means that it is formed. In this case, the respective curvature radii of the plurality of round portions may be different, or the respective curvature radii may be the same.

むろん、拡径部とサセプターとの間に、別途アール部分を設けることは排除されない。 Of course, it is not excluded to separately provide a rounded portion between the enlarged diameter portion and the susceptor.

本発明によれば、サセプターから支持部材中へと伝達される熱を抑制すると共に、サセプターを高温にしたときにも支持部材に集中する応力を緩和できる。 According to the present invention, the heat transmitted from the susceptor into the support member can be suppressed, and the stress concentrated on the support member can be relaxed even when the susceptor is heated to a high temperature.

図１−図３の実施形態を参照しつつ、本発明を更に説明する。 The present invention will be further described with reference to the embodiment of FIGS.

筒状の支持部材７の一端には拡径部７ａが設けられており、他端にも拡径部７ｃが設けられている。拡径部７ａの接合面（端面）７ｅがサセプター２の接合面（背面）２ｂへと接合されている。支持部材７の他端の拡径部７ｃの端面７ｇがチャンバー１０の内側壁面１０ｄへと接合されている。支持部材７の内側空間６とチャンバー１０の開口１０ａとが連通している。支持部材７とチャンバー１０との間はＯリング２０によって気密に封止する。７ｄは支持部材７の縦断面の内側輪郭であり、７ｆは外側輪郭である。 One end of the cylindrical support member 7 is provided with an enlarged diameter portion 7a, and the other end is provided with an enlarged diameter portion 7c. The joint surface (end surface) 7e of the enlarged diameter portion 7a is joined to the joint surface (back surface) 2b of the susceptor 2. An end surface 7 g of the enlarged diameter portion 7 c at the other end of the support member 7 is joined to the inner wall surface 10 d of the chamber 10. The inner space 6 of the support member 7 and the opening 10a of the chamber 10 communicate with each other. A space between the support member 7 and the chamber 10 is hermetically sealed by an O-ring 20. 7d is an inner contour of the longitudinal section of the support member 7, and 7f is an outer contour.

支持部材とサセプターとの接合方法は特に限定されず、例えばろう材によって接合でき、あるいは特開平８−７３２８０号公報に記載のようにして固相接合または固液接合できる。サセプター２の加熱面２ａの最高温度は、例えば４００℃以上、時には６００℃以上、１２００℃以下に達する。 The method for joining the support member and the susceptor is not particularly limited. For example, the support member and the susceptor can be joined by a brazing material, or solid phase joining or solid-liquid joining can be performed as described in JP-A-8-73280. The maximum temperature of the heating surface 2a of the susceptor 2 reaches, for example, 400 ° C or higher, sometimes 600 ° C or higher and 1200 ° C or lower.

チャンバー１０の外側空間１１、チャンバー１０の開口１０ａおよび支持部材７の内側空間６が連通しており、チャンバー１０の内部空間５とは隔離されている。チャンバー１０内に冷却フランジ８を設けることによって、封止部材２０の周辺を冷却し、封止部材２０の周辺の温度が２３０℃以下となるように調節している。 The outer space 11 of the chamber 10, the opening 10 a of the chamber 10 and the inner space 6 of the support member 7 communicate with each other and are isolated from the inner space 5 of the chamber 10. By providing the cooling flange 8 in the chamber 10, the periphery of the sealing member 20 is cooled, and the temperature around the sealing member 20 is adjusted to be 230 ° C. or lower.

支持部材７は、筒状の本体部分７ｂと、サセプター側の拡径部７ａと、チャンバー側の拡径部７ｃとを備えている。本発明は、本体部分７ｂから拡径部７ａへと至る、支持部材７の縦断面の外側輪郭７ｆに関するものである。 The support member 7 includes a cylindrical main body portion 7b, a susceptor-side enlarged diameter portion 7a, and a chamber-side enlarged diameter portion 7c. The present invention relates to the outer contour 7f of the longitudinal section of the support member 7 extending from the main body portion 7b to the enlarged diameter portion 7a.

即ち、本例では、図２、３に示すように、本体部分の外側輪郭は略真直であり、拡径部７ａの外側面１６も略真直であり、支持部材７の中心軸Ａに対して略平行である。支持部材７の外側輪郭を見ると、本体部分７ｂからサセプター２へと向かって、アール部分１３（１３Ａ、１３Ｂ）、真直部１４、角１５、拡径部７ａの外側面１６、アール部分１７、サセプターの背面１８が順に形成されている。なお、Ｒはアール部分１３（１３Ａ、１３Ｂ）の曲率半径であり、ＲＥはアール部分１７の曲率半径である。 That is, in this example, as shown in FIGS. 2 and 3, the outer contour of the main body portion is substantially straight, the outer surface 16 of the enlarged diameter portion 7 a is also substantially straight, and the center axis A of the support member 7 is It is almost parallel. Looking at the outer contour of the support member 7, from the main body portion 7b toward the susceptor 2, the rounded portion 13 (13A, 13B), the straight portion 14, the corner 15, the outer side surface 16 of the enlarged diameter portion 7a, the rounded portion 17, The back surface 18 of the susceptor is formed in order. R is the radius of curvature of the rounded portion 13 (13A, 13B), and RE is the radius of curvature of the rounded portion 17.

本発明者は、前述した拡径部近辺における応力集中を緩和する構造を検討していく過程で、例えは図１−図３に示したような特定形態が特に有効であることを発見した。即ち、本体部分７ｂと拡径部７ａとの間に一つのアール部分１３（１３Ａ、１３Ｂ）を設けた場合に、特に支持部材の内部応力が減少し、かつ支持部材７のチャンバー１０側の端部７ｃの温度を最も低く抑制できることを見出した。 In the course of studying the structure that relieves stress concentration in the vicinity of the above-mentioned enlarged diameter portion, the present inventor has found that the specific form as shown in FIGS. That is, when one rounded portion 13 (13A, 13B) is provided between the main body portion 7b and the enlarged diameter portion 7a, particularly the internal stress of the support member is reduced, and the end of the support member 7 on the chamber 10 side is reduced. It has been found that the temperature of the part 7c can be minimized.

本発明者は、他の複数の形態についても詳細に検討を加え、支持部材の内部応力のシミュレーションを行った。例えば、図５に示すような形態の支持部材７Ａを検討した。この例では、本体部分７ｆと拡径部７ａの外側面１６との間に、第一のアール部分２１、真直部２２、角２３、真直部２４、第二のアール部分２５、真直部２６、角１５が設けられている。Ｒ１、Ｒ２は、それぞれアール部分２１、２５の各曲率半径である。本発明者は、このように本体部分７ｆと拡径部７ａとの間に複数のアール部分を設け、各アール部分の曲率半径を種々変更することで、支持部材の内部応力の低減を図った。しかし、実際のシミュレーション結果によると、本体部分７ｆと拡径部７ａとの間に単一のアール部分を設けることによって、多数のアール部分を設けて応力を分散させた場合に比べて、支持部材における内部応力の最大値が著しく低下することを発見し、本発明に到達した。 The present inventor has also studied the other plural forms in detail and performed a simulation of the internal stress of the support member. For example, a support member 7A having a form as shown in FIG. 5 was examined. In this example, the first rounded portion 21, straight portion 22, corner 23, straight portion 24, second rounded portion 25, straight portion 26, between the main body portion 7f and the outer surface 16 of the enlarged diameter portion 7a, A corner 15 is provided. R1 and R2 are the radii of curvature of the round portions 21 and 25, respectively. The inventor thus provided a plurality of rounded portions between the main body portion 7f and the enlarged diameter portion 7a, and variously changed the radius of curvature of each rounded portion, thereby reducing the internal stress of the support member. . However, according to an actual simulation result, the support member is provided by providing a single rounded portion between the main body portion 7f and the enlarged diameter portion 7a, as compared with a case where a number of rounded portions are provided and stress is dispersed. It was discovered that the maximum value of the internal stress in the film significantly decreases, and the present invention has been reached.

アール部分１３の曲率半径は限定されないが、支持部材における内部応力を低減するという観点から、３ｍｍ以上とすることが好ましく、５ｍｍ以上とすることが更に好ましく、１０ｍｍ以上とすることが一層好ましい。 The radius of curvature of the rounded portion 13 is not limited, but is preferably 3 mm or more, more preferably 5 mm or more, and still more preferably 10 mm or more from the viewpoint of reducing internal stress in the support member.

また、アール部分の曲率半径が大きくなると、支持部材を伝達される熱が多くなる傾向がある。例えは、図３においては、実線で示すアール部分１３Ａの曲率半径Ｒは相対的に小さく、点線で示すアール部分１３Ｂの曲率半径Ｒは相対的に大きい。支持部材７における内部応力を低減するという観点からは、曲率半径が大きいアール部分１３Ｂの方が好適である。しかし、アール部分の曲率半径が大きいと、それだけ支持部材の横断面の面積が大きくなり、支持部材の他端の拡径部７ｃ（図１参照）近辺の温度が上昇する傾向がある。こうした支持部材のチャンバー側端部における温度を低減するという観点からは、アール部分１３の曲率半径３０ｍｍ以下が好ましく、２５ｍｍ以下が更に好ましく、２０ｍｍ以下が最も好ましい。アール部分１３の曲率半径の最も好適な範囲は１４−１６ｍｍである。 Further, when the radius of curvature of the rounded portion increases, the heat transmitted through the support member tends to increase. For example, in FIG. 3, the radius of curvature R of the rounded portion 13A indicated by the solid line is relatively small, and the radius of curvature R of the rounded portion 13B indicated by the dotted line is relatively large. From the viewpoint of reducing the internal stress in the support member 7, the rounded portion 13 </ b> B having a large curvature radius is preferable. However, if the radius of curvature of the rounded portion is large, the area of the cross section of the support member increases accordingly, and the temperature near the enlarged diameter portion 7c (see FIG. 1) at the other end of the support member tends to increase. From the viewpoint of reducing the temperature at the end of the support member on the chamber side, the radius of curvature of the round portion 13 is preferably 30 mm or less, more preferably 25 mm or less, and most preferably 20 mm or less. The most preferable range of the radius of curvature of the rounded portion 13 is 14-16 mm.

本発明の好適な実施形態においては、例えば図３に示すように、支持部材７の縦断面の外側輪郭７ｆにおいて、拡径部７ａと湾曲部分１３Ａ（１３Ｂ）との間に、支持部材７の中心軸Ａに対して交差する方向に延びる真直部１４を設ける。この真直部１４を設けることによって、拡径部７ａの厚さを十分に大きくでき、あるいは、本体部分７ｂの厚さを十分に小さくできる。例えば図３において直線状部を設けないと、拡径部７ａの厚さは著しく小さい設計になる。 In a preferred embodiment of the present invention, for example, as shown in FIG. 3, in the outer contour 7 f of the longitudinal section of the support member 7, the support member 7 is interposed between the enlarged diameter portion 7 a and the curved portion 13 </ b> A (13 </ b> B). A straight portion 14 extending in a direction intersecting with the central axis A is provided. By providing this straight portion 14, the thickness of the enlarged diameter portion 7a can be made sufficiently large, or the thickness of the main body portion 7b can be made sufficiently small. For example, if the straight portion is not provided in FIG. 3, the thickness of the enlarged diameter portion 7a is designed to be extremely small.

真直部１４のＡに対する傾斜角度θは限定されないが、上記の観点から、４５−９０度とすることが好ましい。 Although the inclination angle θ with respect to A of the straight portion 14 is not limited, it is preferably 45 to 90 degrees from the above viewpoint.

また、好適な実施形態においては、支持部材７の縦断面の外側輪郭７ｆにおいて、拡径部７ａとサセプター２の表面１８との間に他のアール部分１７が設けられている。 In the preferred embodiment, another rounded portion 17 is provided between the enlarged diameter portion 7 a and the surface 18 of the susceptor 2 in the outer contour 7 f of the longitudinal section of the support member 7.

この際、図２、３に示すように、他のアール部分１７の少なくとも一部がサセプターに形成されていることが好ましい。言い換えると、サセプター２の表面１８と接合面７ｅとの間に段差ａが生じていることが好ましい。これによって、接合部分における応力集中を最大限緩和できる。 At this time, as shown in FIGS. 2 and 3, it is preferable that at least a part of the other rounded portion 17 is formed on the susceptor. In other words, it is preferable that a step a is formed between the surface 18 of the susceptor 2 and the bonding surface 7e. As a result, the stress concentration at the joint can be reduced to the maximum.

本発明においては、図４に示すように、接合面７ｅとサセプター２の表面（露出面）１８との間に段差が生じないようにすることもできる。ただし、この場合には、アール部分１７Ａを形成すると、アール部分１７Ａにおける支持部材の厚さが非常に小さくなり、かつ異形となる。このため、アール部分１７Ａの近辺に応力が集中し易くなり、あるいは剥離の起点となり易い。 In the present invention, as shown in FIG. 4, it is possible to prevent a step from being generated between the joint surface 7 e and the surface (exposed surface) 18 of the susceptor 2. However, in this case, when the rounded portion 17A is formed, the thickness of the support member in the rounded portion 17A becomes very small and has an irregular shape. For this reason, the stress tends to concentrate in the vicinity of the rounded portion 17A, or it tends to be a starting point of peeling.

他のアール部分１７、１７Ａの曲率半径ＲＥは、接合部分における応力を最小限とするという観点からは１ｍｍ以上が好ましく、２ｍｍ以上が更に好ましい。 The radius of curvature RE of the other rounded portions 17 and 17A is preferably 1 mm or more, and more preferably 2 mm or more from the viewpoint of minimizing the stress at the joint portion.

段差ａは限定されないが、接合部分における応力を低減するという観点からは１ｍｍ以上が好ましい。 The step a is not limited, but is preferably 1 mm or more from the viewpoint of reducing the stress at the joint.

好適な実施形態においては、拡径部７ａの外側輪郭１６が支持部材７の中心軸Ａと略平行に延びる。外側輪郭または外側面１６の長さｂを大きくすることは、つまり拡径部７ａの厚さを大きくすることを意味している。そして、ｂを大きくすることによって、拡径部の近辺における応力が一層減少することを発見した。この観点からは、ｂを２ｍｍ以上とすることが好ましく、５ｍｍ以上とすることが一層好ましい。 In a preferred embodiment, the outer contour 16 of the enlarged diameter portion 7 a extends substantially parallel to the central axis A of the support member 7. Increasing the length b of the outer contour or outer surface 16 means increasing the thickness of the enlarged diameter portion 7a. And it discovered that the stress in the vicinity of an enlarged diameter part decreased further by enlarging b. From this viewpoint, b is preferably 2 mm or more, and more preferably 5 mm or more.

しかし、ｂを大きくすると、今度は支持部材７を伝達してチャンバーの方へと逃げる熱が多くなり、支持部材のチャンバー側端部の温度が上昇し、規定温度（例えば２００℃）を超える傾向がある。このため、ｂは１０ｍｍ以下が特に好ましい。 However, if b is increased, the heat that is transmitted to the support member 7 and escapes toward the chamber increases, and the temperature of the end of the support member on the chamber side rises and tends to exceed a specified temperature (for example, 200 ° C.). There is. For this reason, b is particularly preferably 10 mm or less.

サセプター、支持部材の材質は限定されないが，好ましくはセラミックスである。ハロゲン系腐食性ガスに対して耐蝕性を有するセラミックスが好ましく、特に窒化アルミニウムまたは緻密質アルミナが好ましく、９５％以上の相対密度を有する窒化アルミニウム質セラミックス、アルミナが一層好ましい。 The material of the susceptor and the support member is not limited, but is preferably ceramic. Ceramics having corrosion resistance to halogen-based corrosive gases are preferable, aluminum nitride or dense alumina is particularly preferable, and aluminum nitride ceramics and alumina having a relative density of 95% or more are more preferable.

セラミックサセプターは何らかの加熱源によって加熱されるが、その加熱源は限定されず、外部の熱源（例えば赤外線ランプ）によって加熱されるサセプターと、内部の熱源（例えばサセプター内に埋設されたヒーター）によって加熱されるサセプターとの双方を含む。サセプター中には、抵抗発熱体、静電チャック用電極、プラズマ発生用電極などの機能性部品を埋設することができる。 The ceramic susceptor is heated by some heating source, but the heating source is not limited. The ceramic susceptor is heated by an external heat source (for example, an infrared lamp) and an internal heat source (for example, a heater embedded in the susceptor). Including both susceptors. Functional components such as a resistance heating element, an electrostatic chuck electrode, and a plasma generating electrode can be embedded in the susceptor.

封止部材の材質は限定されないが、Ｏリングシールやメタルリングシールを例示できる。 Although the material of the sealing member is not limited, an O-ring seal or a metal ring seal can be exemplified.

（本発明例１−５）
図１−図３を参照しつつ説明した本発明の取付構造を作製した。サセプター２としては、直径３３０ｍｍ、厚さ１５ｍｍの窒化アルミニウム焼結体製の円盤を使用した。支持部材７は、緻密質の窒化アルミニウム焼結体によって成形した。支持部材７とサセプター２とを、特開平８−７３２８０号公報に記載のようにして固相接合した。支持部材７とチャンバー１０との間は、ネジによって締めつけ固定した。Ｏリング１２はフッ素ゴムからなる。 (Invention Example 1-5)
The mounting structure of the present invention described with reference to FIGS. 1 to 3 was produced. As the susceptor 2, a disc made of aluminum nitride sintered body having a diameter of 330 mm and a thickness of 15 mm was used. The support member 7 was formed of a dense aluminum nitride sintered body. The support member 7 and the susceptor 2 were solid-phase bonded as described in JP-A-8-73280. The support member 7 and the chamber 10 were fixed by tightening with screws. The O-ring 12 is made of fluoro rubber.

支持部材７の全長は１８０ｍｍとした。支持部材７の内径は３８ｍｍとし、本体部分７ｂの厚さは８ｍｍとし、拡径部７ａの厚さは８ｍｍとした。アール部分１７の曲率半径ＲＥは３ｍｍとし、段差ａは２ｍｍとし、真直部分１６の長さｂは５ｍｍとした。アール部分１３の曲率半径Ｒは表１に示す。 The total length of the support member 7 was 180 mm. The inner diameter of the support member 7 was 38 mm, the thickness of the main body portion 7 b was 8 mm, and the thickness of the enlarged diameter portion 7 a was 8 mm. The radius of curvature RE of the rounded portion 17 is 3 mm, the step a is 2 mm, and the length b of the straight portion 16 is 5 mm. The radius of curvature R of the rounded portion 13 is shown in Table 1.

この状態で、サセプター２の設置面２ａの温度を約６００°に加熱したものという設定で、シミュレーションを行った。この状態で、支持部材７の内部応力をその全体にわたって計算し、最大応力を求めた。また、支持部材７のチャンバー側の端部７ｃの温度を求めた。 In this state, the simulation was performed with the setting that the temperature of the installation surface 2a of the susceptor 2 was heated to about 600 °. In this state, the internal stress of the support member 7 was calculated over the whole to obtain the maximum stress. Further, the temperature of the end 7c on the chamber side of the support member 7 was determined.

（比較例１）
図５に示した比較例の構造を作製した。基本的には本発明例１と同様にしたが、ただしアール部分２１、２５、真直部分２２、２４、２６、角２３、１５を設けた。アール部分２１の曲率半径Ｒ１は５ｍｍとし、Ｒ２を３ｍｍとした。実験１と同様にして最大応力と支持部材７のチャンバー側の端部７ｃの温度を求めた。この結果、最大応力は３．２ｋｇｆ／ｍｍ²であり、７ｃの温度は１８０℃であった。 (Comparative Example 1)
The structure of the comparative example shown in FIG. 5 was produced. Basically the same as Example 1 of the present invention, except that round portions 21, 25, straight portions 22, 24, 26 and corners 23, 15 were provided. The radius of curvature R1 of the rounded portion 21 was 5 mm, and R2 was 3 mm. Similarly to Experiment 1, the maximum stress and the temperature of the end 7c on the chamber side of the support member 7 were determined. As a result, the maximum stress was 3.2 kgf / mm ² , and the temperature of 7c was 180 ° C.

（本発明例６、７）
本発明例６においては、本発明例１と同様の構造を作製した。ただし、アール部分１７の曲率半径ＲＥは３ｍｍとし、段差ａは２ｍｍとし、真直部分１６の長さｂは５ｍｍとし、アール部分１３の曲率半径Ｒは１５ｍｍとした。この結果、最大応力２．６ｋｇｆ／ｍｍ²であった。 (Invention Examples 6 and 7)
In Invention Example 6, the same structure as in Invention Example 1 was produced. However, the radius of curvature RE of the rounded portion 17 was 3 mm, the step a was 2 mm, the length b of the straight portion 16 was 5 mm, and the radius of curvature R of the rounded portion 13 was 15 mm. As a result, the maximum stress was 2.6 kgf / mm ² .

本発明例７においては、本発明例６において真直部分１６を除いた。この結果、最大応力は２．７ｋｇｆ／ｍｍ²であった。 In the present invention example 7, the straight portion 16 is removed from the present invention example 6. As a result, the maximum stress was 2.7 kgf / mm ² .

（本発明例８、９）
本発明例１と同様の構造を作製した。ただし、真直部分１６の高さｂを表２のように変更した。各構造について、最大応力と端部７ｃの温度とを算出した。 (Invention Examples 8 and 9)
A structure similar to that of Invention Example 1 was produced. However, the height b of the straight portion 16 was changed as shown in Table 2. For each structure, the maximum stress and the temperature of the end 7c were calculated.

本発明によれば、サセプターにおいて、サセプターから支持部材中へと伝達される熱を抑制すると共に、サセプターを高温にしたときにも支持部材に集中する応力を緩和する必要のある用途に適用できる。 ADVANTAGE OF THE INVENTION According to this invention, while suppressing the heat transmitted from a susceptor into a support member in a susceptor, it can apply to the use which needs to relieve | moderate the stress concentrated on a support member when a susceptor is made high temperature.

本発明の一実施形態に係る取付構造の全体を概略的に示す断面図である。It is a sectional view showing roughly the whole attachment structure concerning one embodiment of the present invention. 図１の構造において、支持部材７とサセプター２との接合部分の拡大図である。FIG. 2 is an enlarged view of a joint portion between a support member 7 and a susceptor 2 in the structure of FIG. 図２の一部を更に拡大して示す図である。It is a figure which expands and shows a part of FIG. 本発明の他の実施形態に係る取付構造を示す断面図である。It is sectional drawing which shows the attachment structure which concerns on other embodiment of this invention. 本発明外の取付構造を示す断面図である。It is sectional drawing which shows the attachment structure outside this invention. 本発明外の取付構造を示す断面図である。It is sectional drawing which shows the attachment structure outside this invention.

Explanation of symbols

２サセプター２ａ設置面２ｂ、１８背面５チャンバーの内部空間６支持部材の内側空間７、７Ａ支持部材７ａ拡径部７ｂ本体部分７ｃ拡径部（チャンバー側の端部）７ｄ支持部材の内側輪郭（内側面）７ｅ、７ｇ接合面７ｆ支持部材の外側輪郭（外側面）８冷却機構１０チャンバー１０ａ開口１０ｄチャンバーの内側面１３本体部分７ｂと拡径部７ａとの間のアール部分１４アール部分１３と拡径部との間の真直部分１６拡径部の外側面（外側輪郭）１７他のアール部分２０封止部材Ａ支持部材の中心軸Ｒアール部分１３の曲率半径ＲＥアール部分１７、１７Ａの曲率半径Ｏ曲率中心 2 Susceptor 2a Installation surface 2b, 18 Back surface 5 Chamber internal space 6 Support member inner space 7, 7A Support member 7a Expanded portion 7b Main body portion 7c Expanded portion (chamber side end) 7d Inside contour of support member ( Inner side surface) 7e, 7g Joining surface 7f Outer contour (outer side surface) of support member 8 Cooling mechanism 10 Chamber 10a Opening 10d Inner side surface of chamber 13 R portion between main body portion 7b and enlarged diameter portion 7a 14 R portion 13 and Straight portion between the enlarged diameter portion 16 Outer surface (outer contour) of the enlarged diameter portion 17 Other rounded portion 20 Sealing member A Center axis of the support member R Radius of curvature of the rounded portion RE Curvature of the rounded portions 17 and 17A Half Diameter O Center of curvature

Claims

A susceptor for heating an object to be processed, and a support member that is joined to the susceptor and provided with an inner space, and a chamber provided with an opening, the support member and the chamber being joined A support structure comprising: a chamber whose opening communicates with an inner space of the support member; and an inner space of the support member hermetically sealed with respect to the inner space of the chamber. The member further includes a first wall portion that defines a cylindrical main body portion, a second wall portion that defines an enlarged diameter portion provided at an end portion of the support member on the susceptor side, and the support member One or more continuous rounded portions are provided between the main body portion and the enlarged-diameter portion in the outer contour of the longitudinal section of the first wall portion, and the radial thickness of the first wall portion is the second Radial of wall Relatives and wherein the small, the support structure of the susceptor.

The outer contour of the enlarged diameter portion is parallel to the central axis of the support member, and the length of the parallel portion of the outer contour of the enlarged diameter portion is 2 mm or more and 10 mm or less. Construction.

The structure according to claim 1, wherein a radius of curvature of the rounded portion is 3 mm or more and 30 mm or less.

In the outer contour of the longitudinal section of the support member, a straight portion extending in a direction intersecting the central axis of the support member is provided between the enlarged diameter portion and the rounded portion. A structure according to any one of claims 1-3.

The other round part is provided between the said enlarged diameter part and the surface of the said susceptor in the outer side outline of the longitudinal cross-section of the said supporting member, The claim any one of Claims 1-4 characterized by the above-mentioned. The structure described in the paragraph.

The structure according to claim 5, wherein at least a part of the other rounded portion is formed on the susceptor.

The outer surface of the said enlarged diameter part is extended in the outer side outline of the longitudinal cross-section of the said supporting member substantially in parallel with the center axis | shaft of the said supporting member, The claim 1 characterized by the above-mentioned. Structure.

The structure according to claim 1, wherein a material of the susceptor or the support member is ceramics.