JP4020066B2 - Single crystal pulling device - Google Patents

Description

  The present invention relates to a method for assembling a crucible to a holding stand of a single crystal pulling apparatus and a holding stand used in the method, which can easily and quickly perform a crucible assembling work to a holding stand of a single crystal pulling apparatus. The present invention relates to an assembly apparatus and a holding table.

  The single crystal pulling apparatus uses a crucible as a semiconductor raw material such as silicon, and grows the semiconductor single crystal while pulling up the semiconductor single crystal from the semiconductor melt. The crucible is, for example, a silicon single crystal (that is, a silicon single crystal). In order to grow a crystal), it is necessary to use a quartz crystal which is a compound of silicon and oxygen. Since this quartz crucible does not necessarily have sufficient rigidity in the process of growing while pulling up the silicon single crystal, the single crystal pulling apparatus includes a holding base (so-called susceptor) for holding the crucible.

  By the way, after manufacturing a semiconductor single crystal with a single crystal pulling apparatus, in order to manufacture the next semiconductor single crystal, first, the crucible of the single crystal pulling apparatus is taken out from an airtight container containing a holding base and the like. At the same time, the holding table is taken out and the residue of the semiconductor material in the crucible is removed in the clean room. Then, a new crucible is assembled to the holding table, a new semiconductor raw material is put into the crucible, the lid is covered, and it is carried into an airtight container of the single crystal pulling apparatus, and the holding table and the crucible are assembled.

  In this series of operations, the operation of assembling the crucible on the holding table is conventionally performed in such a manner that an operator holds the upper end of the crucible and lowers the crucible into the holding table.

  However, in the operation of assembling the crucible to the holding base in such a manner, the weight of the crucible must be supported by holding the upper end portion, and particularly when a large crucible is used for manufacturing a large-diameter semiconductor single crystal, The work was harsh and there was a problem with safety.

  In view of the above circumstances, the present invention provides a method for assembling a crucible to a holding base of a single crystal pulling apparatus capable of safely, easily and quickly assembling a crucible to a holding base of a single crystal pulling apparatus; It is an object of the present invention to provide a holding table assembling apparatus and a holding table used in the method.

A single crystal pulling apparatus according to the present invention includes a cylindrical body that opens upward, and a bottom that closes a lower end of the body, and stores a semiconductor raw material, and a holding base that holds the crucible. In a single crystal pulling apparatus comprising a holding base assembling apparatus used for assembling the crucible to the holding base,
The holding base has a disc-shaped bottom portion that supports the central portion of the bottom portion of the crucible and a fitting hole portion into which the bottom portion is fitted, and assembles the divided pieces that are connected and joined in the horizontal circumferential direction into a cylindrical shape. A crucible bottom peripheral portion and a body portion for supporting the crucible body portion;
The fitting surface of the outer periphery of the bottom portion and the fitting surface of the fitting hole portion of the trunk portion have an inclined surface that tapers downward,
The holding table assembling apparatus, a bottom mounting table on which a bottom of the holding table is mounted;
A body part mounting table on which a hole part through which the bottom part mounting table can penetrate is formed in a central part and a body part of the holding table is mounted;
The body portion mounting table is moved upward to bring the bottom portion mounting table and the body portion mounting table closer to each other, and the center line of the holding table is aligned with the center line of the crucible and the fitting hole portion of the body portion An approach drive mechanism for assembling the bottom part of the holding table and the trunk part of the holding table so that the center line of the holding unit is aligned with the center line of the hole of the trunk unit mounting table,
On the bottom surface of the split piece in the body portion, the annular recess for positioning that assembles the split piece into a cylindrical shape by aligning the center line of the body portion of the holding base with the center line of the fitting hole portion is the fit. Provided in line with the center line of the hole,
The bottom mounting table has a positioning convex portion to be mounted so that the center coincides with the center of the bottom mounting table,
On the upper surface of the body mounting table, there are positioning engaging projections for assembling the divided pieces into a cylindrical shape with the center line of the body of the holding table aligned with the center line of the hole. Is arranged around to match,
The positioning fitting recess and the engaging protrusion are engaged, and a center line on the bottom surface of the split piece is made to coincide with a center line of the fitting hole, and a center line of the holding base is aligned with the center line of the crucible. The above problem was solved by being able to assemble with the center line aligned.
In the present invention, the holding base assembling apparatus includes a movable bottom carriage provided with wheels, and the bottom mounting base that is erected on the bottom carriage and has a horizontal disk shape having a smaller diameter than the bottom of the holding base. Is provided with a support post fixed to the upper end, and the trunk mounting table,
The trunk unit mounting table includes a frame having an open space in the center, and a disk-shaped mounting table body provided horizontally on the frame. A hole that allows the column and the bottom mounting table to pass therethrough is formed,
On the upper surface of the mounting table main body, the trunk portion of the holding table is placed with the center line of the fitting hole portion aligned with the center line of the hole portion of the trunk portion mounting table,
More preferably, the engaging projection that engages with the positioning annular recess on the bottom surface of the body portion of the holding table is provided on the upper surface of the mounting table main body.
The method for assembling the crucible to the holding stand of the single crystal pulling apparatus of the present invention is a method for assembling the crucible to the holding stand for assembling the crucible to the holding stand in the single crystal pulling apparatus,
Place the crucible on the bottom with the center line aligned,
The positioning fitting recess and the engaging protrusion are engaged, and a center line on the bottom surface of the split piece is made to coincide with a center line of the fitting hole, and a center line of the holding base is aligned with the center line of the crucible. Align the center line,
After that, the body part, in which the divided pieces are assembled into a cylindrical shape, is raised on the bottom part on which the crucible is placed so as to cover the periphery of the crucible, and the center line of the holding base is aligned with the center line of the crucible. By assembling, it is possible to assemble the holding table by fitting the bottom portion into the fitting hole portion.

  A first invention of the present invention is a method for assembling a crucible to a holding base in which a crucible is stored in a single crystal pulling apparatus including a crucible for storing semiconductor raw materials and a holding base for holding the crucible. The holding table is divided into a bottom part and a body part assembled to the bottom part, a crucible is placed on the bottom part, and then the body part is assembled to the bottom part to assemble the holding table. That is, when placing the crucible on the bottom of the holding base, it is possible to hold and hold the middle part or the lower part of the body part of the crucible.

  A second invention of the present invention is a holding table assembling apparatus used in the method for assembling the crucible to the holding table of the single crystal pulling apparatus according to the first invention, wherein the bottom of the holding table is mounted. An approach drive mechanism for assembling the bottom of the holding table and the body of the holding table by bringing the mounting table, the body mounting table on which the torso of the holding table is mounted, and the bottom mounting table and the torso mounting table close to each other; It is characterized by providing. That is, it is possible to easily and quickly perform the operation of assembling the holding base by assembling the body portion to the bottom portion.

  A third invention of the present invention is a holding table used in the method of assembling the crucible to the holding table of the single crystal pulling apparatus according to the first invention, and has a bottom and a fitting hole portion into which the bottom fits. The fitting surface of the outer periphery of the bottom portion and the fitting surface of the fitting hole portion of the trunk portion have an inclined surface that tapers downward. That is, when assembling the bottom part and the body part by fitting the fitting hole part of the body part to the bottom part, the body part is guided to the bottom part by the inclined surface, so that the fitting is easy and smooth. Is possible. In addition, after the fitting, the inclined surface prevents the bottom portion from dropping off from the trunk portion, so that it is possible to hold the trunk portion and carry the holding table.

  According to the method for assembling the crucible to the holding base of the single crystal pulling apparatus according to the first aspect of the present invention, the crucible is gripped by holding the middle part or the lower part of the crucible body until the crucible is placed on the holding base. The crucible can be easily supported. Therefore, the operation of assembling the crucible to the holding table can be performed safely, easily and quickly.

  According to the holding base assembling apparatus of the second invention of the present invention, the operation of assembling the holding base by assembling the body part at the bottom of the holding base can be easily and quickly performed, so that the crucible is attached to the holding base. The safety can be further improved, simplified and speeded up.

  According to the holding base of the third invention of the present invention, when the bottom and the body are assembled by fitting the fitting hole of the body to the bottom, the fitting is easy due to the inclined surface serving as the guide surface. Can be smooth. In addition, after the fitting, the inclined surface becomes a support surface, and the bottom portion is prevented from dropping off from the body portion, so that a joining operation other than the fitting is not required. Therefore, the assembling work of the holding table can be performed easily and quickly, and the safety of the assembling work of the crucible to the holding table can be further improved, simplified and speeded up.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
First, as shown in FIG. 1, the crucible 1 of the single crystal pulling apparatus according to the present embodiment has a cylindrical body portion 2 that opens upward, and a spherical surface that protrudes downward. It is comprised from the bottom part 3 which obstruct | occludes a lower end.

  Next, the holding base 10 has a disc-shaped bottom portion 11 on which the center portion of the bottom portion 3 of the crucible 1 is supported, and a fitting hole portion 13 into which the bottom portion 11 is fitted. 2, and a fitting surface 11 a on the outer periphery of the bottom portion 11 and a fitting surface 13 a of the fitting hole portion 13 of the trunk portion 12, as shown in FIG. It has the inclined surfaces 11b and 13b which taper toward. In addition, a positioning annular recess 14 is formed on the bottom surface of the body portion 12 so as to surround the fitting hole portion 13, and the body portion 12 is continuous in a horizontal circumferential direction as shown in FIG. 3. It consists of three divided pieces 15, 15, 15 which are installed and connected. Further, the bottom surface of the bottom 11 in FIG. 2 has a positioning recess 11c.

  Next, as shown in FIG. 1, a holding stand assembling apparatus 200 is provided on the floor of the clean room R. The holding base assembling apparatus 200 includes a movable bottom carriage 210, a column 225 erected on the bottom carriage 210, and a bottom mounting table that is fixed to the upper end of the column 225 and on which the bottom 11 of the holding table 10 is placed. 230, the body part mounting table 240 on which the body part 12 of the holding table 10 is mounted, and the body part mounting table 240 are moved upward (in the direction of the arrow M in the drawing), so that the bottom part 11 of the holding table 10 and the holding table And an approach drive mechanism 250 for assembling the ten body parts 12.

  The bottom carriage 210 includes a main frame 211 and a plurality of wheels 213, 213,... Provided on the main frame 211. The main frame 211 includes two parallel bar portions 212, 212 and two parallel bar portions. 212 and an installation frame 215 provided between 212 and 212. The bottom mounting table 230 has a horizontal disk shape with a smaller diameter than the bottom 11 of the holding table 10 of FIG.

  The trunk unit mounting table 240 includes a U-shaped frame 241 having an open space in the center, and a disk-shaped mounting table main body 242 provided horizontally on the frame 241. A hole 243 is formed through the center. The column 225 and the bottom mounting table 230 are provided so as to be able to pass through the hole 243. Further, on the upper surface of the mounting table body 242 of the trunk unit mounting table 240, the trunk unit 12 of the holding table 10 matches the center line of the fitting hole 13 with the center line of the hole unit 243 of the trunk unit mounting table 240. An engagement protrusion 245 that engages with the positioning annular recess 14 on the bottom surface of the body 12 of the holding table 10 is provided around the upper surface of the mounting table main body 242 of the body mounting table 240. ing. The inner surface of the engaging protrusion 245 is a guide surface 245a that gradually expands upward. The bottom mounting table 230 includes a positioning convex portion 231 that fits into the concave portion 11 c of the bottom portion 11 of the holding base 10.

  The approach drive mechanism 250 shown in FIG. 1 includes a mounting table hydraulic jack 251 that is provided between the main frame 211 of the bottom carriage 210 and the frame 241 of the trunk unit mounting table 240 and can be extended and contracted vertically.

  Below, the assembly method of the crucible 1 to the holding stand 10 using the holding stand assembling apparatus 200 is demonstrated.

  First, the mounting table main body 242 is raised, and the holding table 10 is installed in the holding table assembling apparatus 200 in a state where the bottom 11 and the body 12 are combined.

  In the installation of the holding table 10 to the holding table assembling apparatus 200, the bottom 11 of the holding table 10 is placed with its center aligned with the center CP 1 of the bottom mounting table 230 of the holding table assembling apparatus 200. The unit 12 is placed on the trunk unit mounting table 240 of the holding table assembling apparatus 200 so as to surround the bottom mounting table 230. Next, the body part 12 of the holding base 10 is lowered together with the body part mounting table 240 so that the upper space around the bottom part 11 is opened.

  In mounting the body 12 of the holding table 10 on the body mounting table 240, the body 12 is divided into three divided pieces 15, 15, 15 shown in FIG. When it is mounted on one barrel mounting table 240 and assembled into a cylindrical shape, the work can be reduced as compared with a case where the heavy barrel 12 is lifted and placed at a time. Further, as shown in FIG. 2, an engagement protrusion 245 that engages with the positioning annular recess 14 on the bottom surface of the body portion 12 of the holding base 10 is provided on the upper surface of the body portion mounting table 240. The inner surface of the engaging protrusion 245 is a guide surface 245a that gradually expands upward. Therefore, by installing the positioning annular recess 14 on the bottom surface of each divided piece 15, 15, 15 while engaging the guide surface 245a of the engaging projection 245, each divided piece 15, 15, 15 of FIG. 2 can be placed at a fixed position as shown in FIG. That is, it is possible to easily match the center line of the fitting hole portion 13 of the assembled body portion 12 with the center line of the hole portion 243 of the body portion mounting table 240. Thereby, the trunk | drum 12 of the holding stand 10 can be mounted in the trunk | drum mounting base 240 easily. Further, since the bottom 11 and the bottom mounting table 230 of the holding table 10 have a positioning recess 11c and a convex 231 that are fitted to each other, the bottom 11 of the holding table 10 is centered on the bottom mounting table 230. It is also possible to easily carry out the placement so as to coincide with the center of the plate with high accuracy.

  The crucible 1 shown in FIG. 1 is placed on the bottom 11 of the holding table 10 with the center line aligned. Therefore, the mounting table hydraulic jack 251 of the holding table assembling apparatus 200 is driven to raise the trunk mounting table 240 in the direction of arrow M in the figure. Then, the body 12 of the holding table 10 mounted on the body mounting table 240 is gradually raised so as to cover the periphery of the crucible 1, and the inner surface of the body 12 is in close contact with the outer surface of the crucible 1. At the same time, the bottom 11 on the bottom mounting table 230 is fitted into the fitting hole 13 of the body 12. As shown in FIG. 2, the fitting surface 11a on the outer periphery of the bottom portion 11 and the fitting surface 13a of the fitting hole 13 of the trunk portion 12 have inclined surfaces 11b and 13b that taper downward. Therefore, the trunk | drum 12 is guided with respect to the bottom part 11 by the inclined surfaces 11b and 13b. Therefore, fitting can be performed easily and smoothly. Further, in transporting the holding base 10 after assembly, the inclined surfaces 11b and 13b prevent the bottom portion 11 from dropping off from the trunk portion 12, so that no joining work other than fitting is required. Thereby, the assembly of the holding stand 10 can be performed easily and quickly.

  Further, in the method as described above, the holding base 10 is divided into the bottom part 11 and the body part 12, and after placing the crucible 1 on the bottom part 11, the body part 12 is assembled to the bottom part 11 of the holding base 10. Therefore, as shown in FIG. 1, the crucible 1 can be placed on the bottom 11 of the holding table 10 by grasping the middle part or the lower part of the body 2 of the crucible 1. Therefore, the crucible 1 can be easily supported.

  In this embodiment, since the above effects are exhibited, the assembling work of the crucible 1 to the holding table 10 can be performed safely, easily and quickly.

  The present invention includes a case where the holding base assembling apparatus 200 is a fixed base instead of the bottom carriage 210.

  Instead of the approach drive mechanism 250, an approach drive mechanism for assembling the bottom part 11 of the holding base 10 and the body part 12 of the holding base 10 by moving the bottom part mounting base 230 toward the body part mounting base 240 may be adopted.

As shown in FIG. 3, the body 12 does not necessarily have to be composed of three divided pieces 15, 15, 15, and may be composed of two divided pieces or four or more divided pieces. May be. Furthermore, this invention includes the case where the trunk | drum 12 is comprised with the integral thing which cannot be divided | segmented.

It is a side view of one Embodiment of the holding stand assembly apparatus used for the assembling method of the crucible to the holding stand of the single crystal pulling apparatus of this invention. It is an enlarged view of the holding stand provided in the holding stand assembling apparatus of FIG. It is a top view of the holding stand of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Crucible 10 Holding base 11 Bottom part 11a Fitting surface 11b Inclined surface 12 Trunk part 13 Fitting hole part 13a Fitting surface 13b Inclined surface 200 Holding base assembly apparatus 230 Bottom mounting base 240 Trunk mounting base 250 Access drive mechanism

Claims (3)

Used for assembling a crucible comprising a cylindrical body opened upward and a bottom part closing the lower end of the body part to store semiconductor raw materials, a holding base for holding the crucible, and a crucible to the holding base In a single crystal pulling apparatus comprising a holding stand assembly apparatus,
The holding base has a disc-shaped bottom portion that supports the central portion of the bottom portion of the crucible and a fitting hole portion into which the bottom portion is fitted, and assembles the divided pieces that are connected and joined in the horizontal circumferential direction into a cylindrical shape. A crucible bottom peripheral portion and a body portion for supporting the crucible body portion;
The fitting surface of the outer periphery of the bottom portion and the fitting surface of the fitting hole portion of the trunk portion have an inclined surface that tapers downward,
The holding table assembling apparatus, a bottom mounting table on which a bottom of the holding table is mounted;
A body part mounting table on which a hole part through which the bottom part mounting table can penetrate is formed in a central part and a body part of the holding table is mounted;
The body portion mounting table is moved upward to bring the bottom portion mounting table and the body portion mounting table closer to each other, and the center line of the holding table is aligned with the center line of the crucible and the fitting hole portion of the body portion An approach drive mechanism for assembling the bottom part of the holding table and the trunk part of the holding table so that the center line of the holding unit is aligned with the center line of the hole of the trunk unit mounting table,
On the bottom surface of the split piece in the body portion, the annular recess for positioning that assembles the split piece into a cylindrical shape by aligning the center line of the body portion of the holding base with the center line of the fitting hole portion is the fit. Provided in line with the center line of the hole,
The bottom mounting table has a positioning convex portion to be mounted so that the center coincides with the center of the bottom mounting table,
On the upper surface of the body mounting table, there are positioning engaging projections for assembling the divided pieces into a cylindrical shape with the center line of the body of the holding table aligned with the center line of the hole. Is arranged around to match,
The positioning fitting recess and the engaging protrusion are engaged, and a center line on the bottom surface of the split piece is made to coincide with a center line of the fitting hole, and a center line of the holding base is aligned with the center line of the crucible. A single crystal pulling apparatus characterized in that the center line can be assembled and assembled. The holding base assembling apparatus includes a movable bottom carriage provided with wheels, and a bottom mounting base that is erected on the bottom carriage and has a horizontal disk shape having a smaller diameter than the bottom of the holding base. Provided with a support post and the trunk mounting table,
The trunk unit mounting table includes a frame having an open space in the center, and a disk-shaped mounting table body provided horizontally on the frame. A hole that allows the column and the bottom mounting table to pass therethrough is formed,
On the upper surface of the mounting table main body, the trunk portion of the holding table is placed with the center line of the fitting hole portion aligned with the center line of the hole portion of the trunk portion mounting table,
2. The single crystal pulling according to claim 1, wherein the engaging projection that engages with the positioning annular recess on the bottom surface of the body portion of the holding table is provided on the upper surface of the mounting table main body. 3. Upper device. A method for assembling a crucible to a holding table for assembling the crucible to the holding table in the single crystal pulling apparatus according to claim 1 or 2,
Place the crucible on the bottom with the center line aligned,
The positioning fitting recess and the engaging protrusion are engaged, and a center line on the bottom surface of the split piece is made to coincide with a center line of the fitting hole, and a center line of the holding base is aligned with the center line of the crucible. Align the center line,
After that, the body part, in which the divided pieces are assembled into a cylindrical shape, is raised on the bottom part on which the crucible is placed so as to cover the periphery of the crucible, and the center line of the holding base is aligned with the center line of the crucible. A method of assembling the crucible to the holding base of the single crystal pulling apparatus, wherein the holding base is assembled by fitting the bottom portion into the fitting hole.

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