JP4000349B2 - Glass member forming apparatus and glass member forming method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a molding method for a molding apparatus and glass member of the glass member, and more particularly to a molding method for a molding apparatus and glass member of the glass member that Suitable for method of manufacturing a substrate such as a large-size photomask.
[0002]
[Prior art]
In particular, silica glass is used as various members in the semiconductor industry and the like because of its high purity and excellent heat resistance, light transmittance, chemical stability, and the like. For the production of this silica glass, a method is often used in which silicon tetrachloride is hydrolyzed in a high-temperature oxyhydrogen flame.
[0003]
The silica glass ingot produced in this way is used after being molded into a molded body (molded ingot). The conventionally used molding method is to use the silica glass ingot produced by oxyhydrogen flame melting as described above as carbon. The molded body is put into a mold and made to melt in an electric melting furnace to produce a molded body, and this molded body is used as a liquid crystal substrate or a photomask substrate through a process such as slicing.
[0004]
However, as the size of liquid crystal substrates and photomask substrates increases in size in recent years, it is required to increase the size of the molded body. However, with conventional molding methods, silica glass cannot reach the corners of the mold sufficiently. Therefore, an accurate rectangular flat plate-shaped molded body could not be manufactured. For this reason, when a large-sized liquid crystal substrate or photomask substrate is manufactured by slicing the molded body, the material yield is extremely poor.
[0005]
In addition, as described in JP-A-11-60264, a large-diameter silica glass tube is manufactured in advance, the silica glass tube is opened, and this is heated to form a flat synthetic silica glass plate. There is a way. However, the manufacturing method described in this publication requires a large-sized pipe manufacturing facility for manufacturing a large-diameter silica glass tube once, and the manufacturing cost is high.
[0006]
In addition, a silica glass ingot is manufactured into a cylindrical silica glass block, and a through-hole is formed with a heated metal rod to form a hollow tube base material. Then, there is a method of manufacturing a large synthetic glass flat plate by opening the glass tube in the same manner as described in the above publication, using the glass tube, and heating the glass tube. However, in this production method, the number of times of heating is increased for forming the silica glass tube, the characteristics of the silica glass are deteriorated, and the silica glass is often contaminated.
[0007]
[Problems to be solved by the invention]
Therefore, the material yield is good, low manufacturing cost, the molding method of the molding apparatus and the glass member of the glass member does not deteriorate the characteristics has been needed Nozomu. The present invention has been made in consideration of the above circumstances, aims to material yield is good, low manufacturing costs, provides a molding method for a molding apparatus and glass member of the glass member does not deteriorate the characteristics And
[0008]
[Means for Solving the Problems]
To achieve the above object, according to one aspect of the present invention, the upper-side holding means is lowered by the upper drop means comprising holding the upper end of the vertically disposed plate glass member upper retaining plate, flat glass A lower holding means that holds the lower end of the member and is lowered by a lower lowering means having a lower holding plate, and the entire horizontal direction of the flat glass member that is disposed between the lower holding means and the upper lowering means is simultaneously heated. A heating means and a control means for controlling the operation of the upper lowering means and the lower lowering means, wherein the upper lowering means loosely fits a lower loose fitting hole provided in the lower holding plate. The upper holding means holds the upper end portion of the flat glass member by the upper holding plate and is provided near both ends of the upper holding plate. The upper ball screw is engaged with the upper ball screw through the upper screw hole, and the upper stepping motor is operated to rotate the upper ball screw, so that the upper holding plate can be moved up and down while maintaining the horizontal state. The lowering means comprises a pair of lower ball screws loosely fitting a screw loose hole formed in the upper holding plate, and a lower stepping motor for rotating the lower ball screw, and the lower holding means The lower holding plate holds the lower end portion of the flat glass member, and is screwed with the lower ball screw of the lower lowering means by the lower screw holes provided in the vicinity of both end portions of the lower holding plate. By rotating the lower ball screw by operating the side stepping motor, the lower holding plate can be moved up and down while maintaining a horizontal state, and the heating means is a pair of flames disposed on both sides of the flat glass member. Burner There, by the heating means, while heating the entire horizontal plate glass members simultaneously, the lowering speed of the lower retaining means controls faster than lowering speed of the upper retaining means, the stretching of the plate glass member An apparatus for forming a glass member is provided. Thereby, the material yield is good, the manufacturing cost is low, and the glass is molded without deteriorating the characteristics.
[0009]
In a preferred example, the heating means is surrounded by a heat retaining frame and is reciprocated by a horizontal reciprocating device.
[0010]
In order to achieve the above object, according to another aspect of the present invention, using a molding apparatus for a glass member according to claim 1 or 2, glass member characterized by stretching a flat glass member A forming method is provided. Thereby, a material yield is good, a manufacturing cost is cheap, and a flat glass member can be shape | molded, without deteriorating the characteristic of a flat glass member.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of a glass member forming apparatus according to the present invention will be described below with reference to the accompanying drawings.
[0012]
FIG. 1 is a conceptual view showing a part of a heat retaining member of a glass member forming apparatus according to the present invention.
[0013]
As shown in FIG. 1, a glass member forming apparatus 1 according to the present invention holds an upper end Gu of a flat glass member, for example, a silica glass flat plate G, which is vertically arranged, and is lowered by an upper descent means 2. The holding means 3 and the lower holding means 5 that holds the lower end Gb of the silica glass member G and is lowered by the lower lowering means 4 are further provided between the lower holding means 5 and the upper lowering means 2. The heating means 6 that uniformly heats the horizontal direction of the silica glass flat plate G, the thickness measuring means 7 that measures the thickness of the silica glass flat plate G, and the upper descent means 2 and the lower descent means 4 are controlled. And a control device 8.
[0014]
The upper lowering means 2 is a normal rotational movement mechanism comprising a pair of upper ball screws 2a, 2a that loosely fit the lower loose fitting holes 5e, and upper stepping motors 2b, 2b that rotate the upper ball screws 2a, 2a. Is formed. As shown in FIG. 2, the upper stepping motors 2b and 2b are connected to the control device 8 via the upper stepping motor controller 2bc, and the rotation thereof is controlled.
[0015]
Upper side holding means 3, the upper holding plate 3b of the upper storage recess 3a is provided in the vicinity the central portion, screw detachably upper retaining screw 3c opposite to the upper retaining recess 3a, and 3c in the upper holding plate 3b The upper holding member 3b1 is attached, and is sandwiched between the upper holding member 3b1 and the upper holding concave portion 3a by the upper end portion Gu of the silica glass flat plate G. Further, both end portions of the upper holding plate 3b The upper screw holes 3d and 3d provided in the vicinity are screwed into the upper ball screws 2a and 2a of the upper lowering means 2, and the upper stepping motors 2b and 2b are operated to rotate the upper ball screws 2a and 2a. Thus, the upper holding plate 3b can be moved up and down while maintaining a horizontal state.
[0016]
Similarly to the upper lowering means 2, the lower lowering means 4 also includes a pair of lower ball screws 4a and 4a that loosely fit into the screw loose holes 3e and 3e formed in the upper holding plate 3b, and the lower ball. The lower stepping motors 4b and 4b rotate the screws 4a and 4a. As shown in FIG. 2, the lower stepping motors 4b and 4b are connected to the controller 8 via the lower stepping motor controller 4bc. The rotation is controlled.
[0017]
Similarly to the upper holding means 3, the lower holding means 5 also has a lower holding plate 5b provided with a lower holding recess 5a in the vicinity of the center, and a lower holding screw facing the lower holding recess 5a. The lower holding member 5b1 is detachably screwed to the lower holding plate 5b by 5c and 5c, and the lower end Gb of the silica glass flat plate G is interposed between the lower holding member 5b1 and the lower holding recess 5a. Furthermore, it is screwed with the lower ball screws 4a and 4a of the lower lowering means 4 by lower screw holes 5d and 5d provided in the vicinity of both ends of the lower holding plate 5b. When the lower stepping motors 4b and 4b are operated to rotate the lower ball screws 4a and 4a, the lower holding plate 5b can be moved up and down while maintaining a horizontal state. The upper and lower holding means 3 and the lower holding means 5 are moved up and down continuously, but depending on conditions such as the original thickness of the silica glass flat plate G or the thickness after being stretched, the heating means You may make intermittent feed which makes 6 heating parts the feed pitch.
[0018]
The heating means 6 is formed in the vicinity of the center of the height of the silica glass member molding apparatus 1, for example, in a state where the silica glass flat plate G is held between the upper holding means 3 and the lower holding means 5. The flame burners 6a and 6a are disposed between the glass plates G and 3 so as to be heated from both sides of the silica glass flat plate G. Further, the flame burners 6a and 6a are surrounded by a hollow, rectangular heat retaining frame 6b. In other words, the silica glass flat plate G is heated more uniformly.
[0019]
The thickness measuring means 7 is normally used, and two laser displacement meters 7a and 7a arranged on both sides of a silica glass flat plate G which is an object to be measured are used. 3, light emitting elements 7b and 7b that are controlled by the light emitting element drivers 7bc and 7bc to oscillate laser light, and light projecting lenses 7c and 7c provided on the optical axes of the light emitting elements 7b and 7b, The imaging lenses 7d and 7d provided on the reflection optical axis of the optical axis with respect to the silica glass flat plate G, position sensors 7e and 7e on the reflection optical axis, and position information from the position sensors 7e and 7e are processed. The signal processing devices 7f and 7f are provided, and the signal processing devices 7f and 7f are connected to the control device 8 as shown in FIG. The light emitting elements 7b and 7b, the light projecting lenses 7c and 7c, the imaging lenses 7d and 7d, and the position sensors 7e and 7e are integrally housed in a casing to form detection heads 7g and 7g.
[0020]
Based on the thickness information of the measurement part of the silica glass flat plate G, the control unit 8 calculates the thickness of the measurement part, and the calculation result lowers the upper descent means 2 via the upper stepping motor controller 2bc. The lowering speed of the upper holding means 3 is controlled by controlling the speed. Further, the lowering speed of the lower lowering means 4 is controlled via the lower stepping motor controller 4bc to control the lowering speed of the lower holding means 5.
[0021]
As the control device 8, a normal personal computer is used, and during the silica glass flat plate G stretching process by the glass member forming device 1, the upper stepping motor controller 2bc, the lower stepping motor controller 4bc, and the signal processing device 7f by the control device 8 are used. 7f is performed in accordance with a control procedure programmed in advance in the control device 8, and is also performed by input from an input means (not shown) provided in the control device 8 as necessary.
[0022]
Next, a glass forming method using the glass member forming apparatus according to the present invention will be described with reference to a forming process diagram shown in FIG.
[0023]
First, a silica glass ingot G produced by ordinary oxyhydrogen flame melting is put into a mold housed in an electric melting furnace and heated to form a rectangular block (S1).
[0024]
An electric melting furnace 11 used in this molding process has a structure as shown in FIG. 5, a furnace main body 12 formed so that stored items can be taken in and out, and a heater 13 for heating the furnace main body 12. And a mounting table 14. A molding die 15 is placed on a mounting table 14 in the furnace body 12, and the molding die 15 is composed of a molding die body 16 and a lining 17. The mold body 16 is formed by assembling an artificial graphite member having a large number of through holes 16a. The lining 17 has a density of, for example, 0.1 to 0.5 g / cm ² and is formed of an air-permeable carbon molded heat insulating material. The gas passes through the lining 17 and passes through the through-hole 16a without any problem. Discharged. Therefore, the silica glass ingot G is accommodated in the electric melting furnace 11, and then the heater 13 is energized and heated to a predetermined furnace temperature. Keep at a predetermined temperature for a predetermined time, and after the keep, it cools down naturally. By keeping the furnace temperature at a temperature equal to or higher than the softening point of the silica glass, the silica glass ingot is formed into a rectangular block G according to a mold.
[0025]
This rectangular block G is sliced with a cutting device to produce a silica glass flat plate G (S2).
[0026]
In the slicing step, when the rectangular block G is formed to be thicker than the thickness of the liquid crystal substrate or photomask substrate, which is the final product, it is sliced to a thickness required for the liquid crystal substrate or photomask substrate. Is done. When the rectangular block G has a thickness necessary for the liquid crystal substrate or the photomask substrate, this slicing step is omitted.
[0027]
The sliced silica glass flat plate G is stretched by using the glass member forming apparatus 1 according to the present invention described above (S3).
[0028]
The method for stretching the silica glass flat plate G using the glass member forming apparatus 1 as shown in FIG. 1 is performed as follows.
[0029]
The upper holding member 3b1 is removed from the upper holding plate 3b by removing the holding screws 3c and 3c of the upper holding means 3 in the uppermost position, which is in the standby state, and the upper end portion Gu of the silica glass flat plate G is stored in the holding recess 3a. After that, the holding screws 3c and 3c are screwed together, and the upper holding member 3b1 is attached again, and the upper holding portion 3 is firmly held and held between the upper holding concave portion 3a and the upper holding member 3b1. To hold firmly.
[0030]
Also, the lower holding screws 5c and 5c are removed from the lower holding means 5 to remove the lower holding member 5b1 from the lower holding plate 5b, and the lower ball is passed through the control device 8 and the lower stepping motor controller 4bc. The lower holding plate 4b is raised by rotating the screws 4a and 4a, the lower end Gb of the silica glass flat plate G is accommodated in the lower holding concave portion 5a, the lower holding member 5b1 is pressed, the lower screw hole 5d, Using the lower holding screws 5c and 5c penetrating 5d, the lower end Gb is firmly sandwiched between the lower holding recess 5a and the lower holding member 5b1.
[0031]
Thereafter, the pair of flame burners 6a and 6a are ignited and simultaneously heated from both sides of the silica glass flat plate G, and the silica glass flat plate G is uniformly heated in the horizontal direction. At this time, since the flame burners 6a and 6a are surrounded by the hollow and rectangular heat retaining frame 6b, the silica glass flat plate G is heated more uniformly. While continuing this heating, the lower stepping motors 4b and 4b are operated by the control device 8 via the lower stepping motor controller 4bc to rotate the lower ball screws 4a and 4a, and the lower holding means 5 is moved. Lower. At this time, the upper holding means 3 is in a stopped state and maintains the initial position, so that the difference (ΔV) between the lowering speed (Vb1) of the lower holding means 5 and the lowering speed (Vu1 = 0) of the upper holding means 3 A tensile stress acts on the silica glass flat plate G, and the heated silica glass flat plate G is stretched to reduce the plate thickness. Further, the stretching process continues, and the upper stepping motors 5b and 5b are operated by the control device 8 via the upper stepping motor controller 2bc to rotate the upper ball screws 2a and 2a, and the upper holding means 3 is lowered. When the upper holding means 3 is lowered at the lowering speed (Vu2), the entire silica glass flat plate G is lowered, and the relative heating position of the heating means 6 with respect to the silica glass flat plate G is raised. The lower holding means 5 continues to descend, but the controller 8 increases the number of rotations of the lower stepping motors 4b and 4b via the lower stepping motor controller 4bc, and the lower ball screw 4a, The rotation of 4a is also increased, and the lowering speed (Vb2) of the lower holding means 5 is also increased. In this case, both the descent speeds Vb2 and Vu2 are adjusted so that the speed difference (ΔV) is kept constant. Thus, the silica glass flat plate G is stretched, but is stretched by the thickness measuring means 7 provided below the heating means 6 to measure the thickness of the silica glass flat plate G.
[0032]
The thickness of the silica glass flat plate G is measured as follows.
[0033]
As shown in FIG. 3, the light emitted from the light emitting elements 7b and 7b is irradiated onto the silica glass flat plate G through the light projecting lenses 7c and 7c, and the light reflected from the silica glass flat plate G is irradiated with the imaging lens 7d. , 7d, and detected by the position sensors 7e, 7e, and the control unit 8 performs arithmetic processing for each of the detection heads 7g, 7g to measure the thickness of the measurement portion of the silica glass flat plate G. Since the difference (ΔV) between the lowering speed (Vb) of the lower holding means 5 and the lowering speed (Vu1) of the upper holding means 3 is controlled to be constant, a constant stress is always applied to the silica glass plate G. It acts and the silica glass flat plate G becomes constant. However, when the thickness measuring means 7 detects a difference with respect to the predetermined thickness due to an error in the thickness of the original silica glass flat plate G, for example, when it is thicker than the predetermined thickness, the lower holding means 5 Is increased, the difference in speed (ΔV) is kept constant, the stress acting on the silica glass plate G is increased, the amount of tension is increased, and the thickness of the silica glass plate G is increased. The thickness is reduced to a predetermined thickness. When the thickness is smaller than the predetermined thickness, the lowering speed (Vb) of the lower holding means 5 is reduced, the speed difference (ΔV) kept constant is reduced, and the stress acting on the silica glass flat plate G is reduced. The tensile amount is decreased, and the thickness of the silica glass flat plate G is increased to a predetermined thickness. In this way, the thickness of the silica glass flat plate G is measured, and the stress acting on the silica glass flat plate G is controlled based on this, so that the thickness is controlled. Therefore, the silica glass flat plate G is stretched to a predetermined thickness. Can do.
[0034]
In this stretching step, while heating the sliced silica glass flat plate G, the silica glass flat plate G is stretched by the stress generated by the difference in the descent speed between the upper holding means 3 and the lower holding means 5 to have a predetermined thickness and size. Therefore, it does not require large-sized pipe making equipment, can be manufactured at a low cost, and there is no need to use a silica glass tube, the number of heating times of the silica glass is reduced, and the characteristics of the silica glass are not deteriorated. Furthermore, the silica glass is not contaminated. In addition, since it can be stretched from a relatively small rectangular block or a silica glass plate to a large silica glass plate, it is not necessary to use a large rectangular block as in the past, so it is possible to use a rectangular block in which the silica glass reaches the corners. Thus, the material yield is improved.
[0035]
In the stretching process, intermittent feeding may be performed with the heating portion of the heating means as the feeding pitch depending on conditions such as the original thickness of the silica glass flat plate G or the thickness after the stretching.
[0036]
The silica glass flat plate G stretched to the predetermined thickness is annealed (S4).
[0037]
The silica glass flat plate G stretched to a predetermined thickness is shaped by cutting off the upper end Gu and the lower end Gb, and then annealed using an annealing furnace to remove strain.
[0038]
Since annealing takes a relatively long time, when a large amount of annealing is performed, it is preferable to anneal many silica glass flat plates G simultaneously using an annealing furnace. When the number of silica glass flat plates G to be annealed is small, the silica glass flat plate G that has been stretched in the previous step S3 is not removed from the upper holding means 3 and the lower holding means 5 and is attached to the heating means 6 while remaining attached. Then, the upper holding means 3 and the lower holding means 5 may be raised at the same ascending rate so that no stress is applied to the silica glass flat plate G, and annealing may be performed. The operation of the annealing furnace can be omitted.
[0039]
The annealed silica glass flat plate G is polished (S5).
[0040]
A normal polishing apparatus is used for this polishing, and polishing is performed so as to have a predetermined flatness.
[0041]
Next, another embodiment of the glass member forming apparatus according to the present invention will be described.
[0042]
In the present embodiment, a means for controlling the calorific value is added to the heating means of the above embodiment.
[0043]
For example, as shown in FIGS. 6 and 7, the heating means 6A is connected to a flame burner 6Aa surrounded by a heat retaining frame 6Ab, and connected to the flame burner 6Aa via a gas pipe 6Ad. The heating means controller 6Aac is connected to the control device 8A. Thereby, based on the measurement result by the thickness measuring means, the control device 8A controls the heating means 6A via the heating means controller 6Aac. As the heating means 6A, it is preferable to use a carbon heater with good response. Since the other configuration is not different from the molding apparatus shown in FIGS. 1 and 2, the same reference numerals are given and description thereof is omitted.
[0044]
Therefore, when the thickness measuring unit detects a difference with respect to the predetermined thickness due to an error in the thickness of the original silica glass flat plate G, for example, when the thickness is larger than the predetermined thickness, the heating unit is controlled by the control device 8A. Control is performed to increase the amount of heat generated by the heating means 6A via the controller 6Aac, the amount of stretching is increased, and the thickness of the silica glass plate G is reduced to a predetermined thickness. When the thickness is smaller than the predetermined thickness, the stretching amount for reducing the heat generation amount of the heating means 6A is decreased, and the thickness of the silica glass flat plate G is reduced to a predetermined thickness. The control of the thickness of the silica glass flat plate G by the control of the heating means 6A may be performed independently, but as shown in the above embodiment, the lowering speed of the upper holding means and the lowering speed and speed of the lower holding means. By using in combination with a plate thickness control method utilizing the difference, it is possible to achieve fine plate thickness control.
[0045]
Moreover, the modification of the heating means used for the shaping | molding apparatus of the glass member concerning this invention is demonstrated.
[0046]
In this modification, a reciprocating device is added to the heating means of the above embodiment.
[0047]
For example, as shown in FIG. 8, a flame burner 6B as a heating means is provided with a reciprocating device 6Bd, and this reciprocating device 6Bd is a flame burner provided in a heat retaining frame 6Bb so as to be reciprocally movable in the horizontal direction. A connecting rod 6Bd1 connected to 6B, a crank web 6Bd2, and a motor 6Bd4 that rotates the crank web 6Bd2 to reciprocate via a crank pin 6Bd3 and a connecting rod 6Bd1. In addition, a flexible gas pipe 6Be for supplying fuel gas is connected to the flame burner 6B.
[0048]
The reciprocating stroke is ½ of the nozzle pitch of the flame burner 6B. Accordingly, the silica glass flat plate G is heated uniformly by the reciprocating motion parallel to the silica glass flat plate G of the flame burner 6B even in the portion between both nozzles 6Bf .
[0049]
【The invention's effect】
According to the method for molding a glass member according to the present invention, it is possible to provide a method for molding a glass member that has a good material yield, is low in manufacturing cost, and does not deteriorate characteristics.
[0050]
Further, according to the glass member molding apparatus of the present invention, it is possible to provide a glass member molding apparatus that has a good material yield, is low in manufacturing cost, and can mold the glass member without deteriorating the characteristics.
[Brief description of the drawings]
FIG. 1 is a conceptual view showing a part of a heat retaining member of a glass member forming apparatus according to the present invention.
FIG. 2 is a control circuit diagram of a glass member forming apparatus according to the present invention.
FIG. 3 is a conceptual diagram of thickness measuring means used in a glass member forming apparatus according to the present invention.
FIG. 4 is a molding process diagram of a glass molding method using a glass member molding apparatus according to the present invention.
FIG. 5 is a conceptual diagram of an electric melting furnace used in a glass forming method using a glass member forming apparatus according to the present invention.
FIG. 6 is a conceptual diagram of another embodiment of a glass member forming apparatus according to the present invention.
FIG. 7 is a control circuit diagram of another embodiment of the glass member forming apparatus according to the present invention.
FIG. 8 is a conceptual diagram showing a modification of the heating means of the embodiment of the glass member forming apparatus according to the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Glass member shaping | molding apparatus 2 Upper descending means 2a Upper ball screw 2b Upper stepping motor 2bc Upper stepping motor controller 3 Upper holding means 3a Upper holding recessed part 3b Upper holding plate 3b1 Upper holding member 3c Upper holding screw 3d Upper screw hole 3e Upper loose fitting hole 4 Lower descent means 4a Lower ball screw 4b Lower stepping motor 4bc Lower stepping motor controller 5 Lower holding means 5a Lower holding recess 5b Lower holding plate 5b1 Lower holding member 5c Lower Holding screw 5d Lower screw hole 5e Lower loose fitting hole 6 Heating means 6a Flame burner 6b Heat retaining frame 7 Thickness measuring means 7a Laser displacement meter 7b Light emitting element 7bc Light emitting element driver 7c Projecting lens 7d Imaging lens 7e Position sensor 7f Signal Processing device 7g Detection head 8 Control device G Glass flat plate Gu Upper end Gb Lower end

Claims (3)

The upper side holding means is lowered by the upper drop means comprising holding the upper end of the vertically disposed plate glass member upper retaining plate,
A lower holding means which holds the lower end of the flat glass member and is lowered by a lower lowering means provided with a lower holding plate ;
A heating means disposed between the lower holding means and the upper lowering means to simultaneously heat the entire horizontal direction of the flat glass member;
Control means for controlling the operation of the upper lowering means and the lower lowering means,
The upper descent means comprises a pair of upper ball screws loosely fitting a lower loose fitting hole provided in the lower holding plate, and an upper stepping motor for rotating the upper ball screw,
The upper holding means holds the upper end portion of the flat glass member by the upper holding plate and is screwed with the upper ball screw by upper screw holes provided in the vicinity of both end portions of the upper holding plate. Is operated and the upper ball screw is rotated, the upper holding plate can be moved up and down while maintaining the horizontal state,
The lower descent means comprises a pair of lower ball screws loosely fitting a screw loose hole formed in the upper holding plate, and a lower stepping motor for rotating the lower ball screw,
The lower holding means holds the lower end portion of the flat glass member by the lower holding plate, and a lower ball screw of the lower lowering means by lower screw holes provided in the vicinity of both end portions of the lower holding plate. And the lower stepping motor operates to rotate the lower ball screw, so that the lower holding plate can be moved up and down while maintaining the horizontal state.
The heating means is a pair of flame burners arranged on both sides of the flat glass member. The lowering means holds the lowering speed of the lower holding means while simultaneously heating the entire horizontal direction of the flat glass member by the heating means. An apparatus for forming a glass member , wherein the flat glass member is stretched by controlling it faster than the descending speed of the means . The glass member forming apparatus according to claim 1, wherein the heating means is surrounded by a heat retaining frame and reciprocated by a horizontal reciprocating device. A flat glass member is stretched using the glass member molding apparatus according to claim 1 or 2, and a glass member molding method is provided .

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