JP3980345B2 - Nozzle for generating liquid particles - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
More particularly, the present invention relates to a liquid fine particle generating nozzle that ejects a liquid of fine particles. Specifically, the liquid fine particles prevent spraying of liquid fine particles to a peripheral region in the injection direction and enable spraying of uniform liquid fine particles to a predetermined region. This relates to the generating nozzle.
[0002]
[Prior art]
A conventional nozzle for generating fine liquid particles is disclosed in, for example, Japanese Patent Application Laid-Open No. 4-322931. As shown in FIG. 6, this nozzle is composed of a nozzle base 60 and a swirl flow generator 70. The nozzle base 60 includes a liquid inlet 61 and a pressurized gas inlet 62, and a primary liquid crushing chamber provided at the center of the nozzle base 60 by a corresponding liquid inlet 63 and a gas outlet 64, respectively. 65 is communicated. Further, the nozzle base 60 includes a gas insertion hole 66 in parallel with the primary liquid crushing chamber 65, one end of the gas insertion hole 66 communicates with the pressurized gas suction port 62, and the other end swirls. The generator 70 communicates with an annular gas chamber 71.
[0003]
The swirl flow generating unit 70 refers to the inside of a casing formed by fastening and integrating a cap-shaped casing 73 having a swirl flow jet outlet 72 at the center thereof with the nozzle base 60 with a nut 80. The swirling flow generating unit 70 includes a cylindrical mixed gas passage 74 that is open at both ends and formed at the center of the nozzle base member 60 so as to extend from the primary liquid crushing chamber 65 of the nozzle base 60. A gas mixture outlet 75 is formed at the swirl outlet 72.
[0004]
The cylindrical mixed gas passage 74 is fitted with a substantially cylindrical fixed core 76 having a swelled central portion on the outer peripheral surface thereof, and is further swung to the mixed gas outlet 75 side of the fixed core 76. A guide hole forming member 77 is mounted, and a compression coil spring 78 is mounted on the nozzle base 60 side, and the turning guide hole forming member 77 is urged and pressed against the inner wall of the casing 73 by the compression coil spring 78. In this case, the space formed by the stationary core 76 and the casing 73 becomes the annular gas chamber 71.
[0005]
The swirl guide hole forming member 77 has a substantially frustoconical shape with a central through-hole formed therein, and is provided with a circular recess for forming a swirl flow chamber 79 at the center. Further, the swirl guide hole forming member 77 includes swirl guide holes disposed in a spiral shape (not shown) that allow the annular gas chamber 71 and the swirl flow chamber 79 to communicate with each other.
[0006]
As described above, the conventional nozzle for generating liquid fine particles forms a high-speed air flow by ejecting the high-pressure gas introduced from the pressurized gas suction port 62 of the nozzle base 60 into the primary liquid crushing chamber 65 from the gas ejection port 64. At the same time, a negative pressure is generated at the liquid suction port 63 to suck in the liquid, and the liquid is first crushed to form a mixed gas of mist-like liquid and gas. The formed mixed gas is ejected from the mixed gas outlet 75 through the mixed gas passage 74. At this time, the mixed gas is secondarily crushed by the high-speed swirling gas introduced through the gas insertion hole 66 and the annular gas chamber 71 and generated by the swirl guiding hole provided in the swirl guiding hole forming member 77, and is ultrafine particles. And are ejected radially (see arrows in FIG. 6).
[0007]
[Problems to be solved by the invention]
However, in such a conventional nozzle for generating fine liquid particles, the finely divided liquid is ejected radially, so that fine liquid particles scattered outside a predetermined region may be generated. This tendency is remarkable in the nozzle for generating fine liquid particles, in which the liquid particles are secondarily crushed by the swirling gas to generate an ultrafine liquid. That is, liquid particles having a relatively large particle diameter that have not been sufficiently crushed in the second crushing stage are subjected to centrifugal force by the swirling gas and are scattered far away. Thereafter, the scattered liquid particles aggregate and hang down as large particles, which may make it difficult to form a uniform coating film.
[0008]
Accordingly, in order to cope with such problems, the present invention provides a liquid particle generating nozzle that prevents liquid particles from scattering to the peripheral area in the ejection direction and enables spraying of uniform liquid particles in a predetermined area. The purpose is to provide.
[0009]
[Means for Solving the Problems]
In order to achieve the above object, a nozzle for generating liquid particles according to the present invention introduces a high-pressure gas and a liquid into a nozzle body, and mixes the liquid particles and gas mixture crushed by a high-speed gas. In the nozzle for generating fine liquid particles having a gas outlet at its tip, a cylindrical scattered liquid trapping cover having a double wall structure is formed in the tip of the nozzle body in the direction of the mixed gas jet. provided by protruding, in communication with the hollow portion of the upper Symbol double wall structure the inner peripheral wall surface of that, to form a liquid capturing hole for capturing the liquid particles from scattering outside of the predetermined area, captured by liquid trap aperture The liquid fine particles are stored in the hollow portion .
[0010]
With such a configuration, the inner peripheral wall surface of the cylindrical scattered liquid trapping cover that is provided at the front end portion of the nozzle main body portion so as to protrude in the mixed gas ejection direction and is hollow and has a double wall structure , the liquid acquisition holes provided in communication with the hollow portion of the double wall structure, to capture liquid particles scattered outside a predetermined area, Ru said captured liquid fine particles are retained in the hollow portion. Thereby, spraying of the liquid fine particles outside the predetermined region can be prevented.
[0011]
Further, a discharge port for sucking and discharging the captured liquid is provided on the outer peripheral wall surface of the scattered liquid capturing cover so as to communicate with the hollow portion. Thereby, the liquid stored in the hollow portion is sucked and discharged to the outside.
[0012]
Furthermore, at least one of the scattered liquid catching cover and the nozzle body part is provided with a projecting amount adjusting means for adjusting the projecting amount of the scattered liquid catching cover from the nozzle body part. Thereby, the protrusion amount from the nozzle main-body part of a scattering liquid capture | acquisition cover can be adjusted, and the liquid spray range can be adjusted.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a side sectional view showing an embodiment of a liquid particle generating nozzle according to the present invention. The liquid fine particle generating nozzle 1 includes a nozzle body 2 and a scattered liquid capturing cover 3. The nozzle body 2 includes a nozzle base 4 and a swirl flow generator 5. The nozzle base 4 includes a liquid inlet 41 and a pressurized gas inlet 42, and a primary liquid crushing chamber provided in the center of the nozzle base 4 by a corresponding liquid inlet 43 and a gas outlet 44, respectively. 45. Further, the nozzle base 4 includes a gas insertion hole 46 in parallel with the primary liquid crushing chamber 45, one end of the gas insertion hole 46 is communicated with the pressurized gas suction port 42, and the other end is swirling. The generator 5 communicates with an annular gas chamber 51.
[0014]
The swirl flow generating portion 5 refers to the inside of a casing formed by fastening and integrating a cap-shaped casing 53 having a swirl flow jet port 52 formed in the center with the nozzle base 4 with a nut. In this embodiment, the nut is the nut portion 36 provided in the rear opening portion of the scattered liquid catching cover 3 on the nozzle body portion 2 side, but the scattered liquid supplement cover 3 and the nut may be configured as separate parts. Good. The swirl flow generating unit 5 includes a cylindrical mixed gas passage 54 that is open at both ends and formed at the center of the nozzle base member 4 so as to extend from the primary liquid crushing chamber 45 of the nozzle base 4. A gas mixture outlet 55 is formed at the swirl outlet 53 of the gas outlet 53.
[0015]
The cylindrical mixed gas passage 54 is fitted with a substantially cylindrical fixed core 56 having a swelled central portion on the outer peripheral surface thereof, and is further turned to the mixed gas outlet 55 side of the fixed core 56. A guide hole forming member 57 is mounted, and a compression coil spring 58 is mounted on the nozzle base 4 side, and the turning guide hole forming member 57 is urged and pressed against the inner wall of the casing 53 by the compression coil spring 58. In this case, the space formed by the fixed core 56 and the casing 53 becomes the annular gas chamber 51.
[0016]
As shown in FIG. 2, the turning guide hole forming member 57 has a substantially truncated cone shape having a central through hole 571, and includes a circular concave portion 572 having a shape larger than that of the central through hole 571 at the center thereof. The circular recess 572 forms a swirling flow chamber 59 when it is urged and pressed against the inner wall of the casing 53 described above. Further, a swirl guide hole 573 is formed spirally from the circular recess 572 to the outside, and the annular gas chamber 51 and the swirl flow chamber 59 are communicated with each other.
[0017]
Further, the scattered liquid capturing cover 3 is a substantially cylindrical cover having a double wall structure with a hollow 31 inside, and is provided so as to protrude in the mixed gas ejection direction. Then, in communication with the hollow 31 of the upper Symbol double wall construction on the inner peripheral wall 32 thereof, to form a liquid capturing hole 33 for trapping liquid particles scattered outside a predetermined area. In this embodiment, as shown in FIG. 3, the liquid capture hole 33 is an annular hole formed in the inner peripheral wall surface 32 (see FIG. 1) of the liquid ejection side 3a of the scattered liquid capture cover 3. is there. The liquid catching hole 33 is not limited to the above-mentioned shape, and for example, it may be provided with a plurality of circular holes 33a as shown in FIG. The thing provided with two or more holes 33b may be sufficient. Further, the shape and size of the liquid capturing hole 33 and the position where the liquid capturing hole 33 is formed are appropriately determined from the relationship between the liquid capturing efficiency or the noise during suction.
[0018]
Further, a discharge port 35 for sucking and discharging the captured liquid is provided on the outer peripheral wall surface 34 of the scattered liquid capturing cover 3 so as to communicate with the hollow 31. The scattered liquid capturing cover 3 is configured such that the nut portion 36 described above is formed at the rear open end of the nozzle body portion 2 and can be fastened and integrated with the bolt portion 47 provided in the nozzle base 4. At the same time, the casing 53 is also fastened and integrated with the nozzle base 4 at the same time.
[0019]
The nut portion 36 of the scattered liquid catching cover 3 and the bolt portion 47 of the nozzle base 4 adjust the depth of fastening, thereby adjusting the amount of projection of the scattered liquid catching cover 3 from the nozzle body 2. It also serves as a
[0020]
Next, the operation of the thus configured liquid particle generating nozzle will be described. In FIG. 1, a high-pressure gas such as air, argon, or nitrogen is introduced into a pressurized gas inlet 42 provided in the nozzle base 4, and at the same time, a predetermined liquid is supplied to a liquid inlet 41. The liquid is an agent appropriately selected according to the use such as a surface treatment agent or a thin film forming agent for treating the surface of a semiconductor substrate, a display substrate, a glass substrate, or an industrial thin film forming object similar thereto.
[0021]
The high-pressure gas is ejected from the gas ejection port 44 to the primary liquid crushing chamber 45. Since the gas flows out from the primary liquid crushing chamber 45 at a high speed, a negative pressure is generated at the liquid suction port 43, and the liquid is sucked into the primary liquid crushing chamber 45 from the liquid suction port 43. At this time, the sucked liquid is primarily crushed and finely divided by a high-speed air stream and mixed with the gas to form a mixed gas. Then, the mixed gas is ejected forward from the mixed gas outlet 55 through the mixed gas passage 54.
[0022]
On the other hand, part of the high-pressure gas introduced into the pressurized gas suction port 42 flows into the annular gas chamber 51 of the swirl flow generating unit 5 through the gas insertion hole 46, and further, the swirl guide hole 573 of the swirl guide hole forming member 57. It flows into the swirl flow chamber 59 from (see FIG. 2). Then, high-speed swirling gas is generated in the swirling flow chamber 59, and swirling flow is generated in the mixed gas ejected from the mixed gas outlet 55. At this time, the liquid of fine particles in the mixed gas is further secondarily crushed into ultrafine particles and discharged radially (see arrows in FIG. 1).
[0023]
Here, since the secondary crushing is insufficient and the liquid particles that could not be made into ultrafine particles are heavy, the liquid particles receive a centrifugal force by a high-speed swirling gas and are released at a large radiation angle (see broken line arrows in FIG. 1). Such liquid fine particles are captured by the liquid capturing hole 33 formed in the inner peripheral wall surface 32 of the scattered liquid capturing cover 3 and temporarily stored in the hollow 31 or by a pump provided outside the figure through the discharge port 35. Suctioned out.
[0024]
In this way, only the liquid fine particles emitted at a predetermined radiation angle are emitted from the liquid fine particle generating nozzle 1 (see the solid line arrow in FIG. 1), and uniform liquid fine particles are sprayed on a predetermined region. Note that when the nut main body 2 is fastened and integrated by the nut portion 36 provided in the scattered liquid capturing cover 3, the amount of protrusion of the scattered liquid capturing cover 3 from the nozzle main body 2 is adjusted by adjusting the fastening depth. Thus, the emission angle of the liquid fine particles can be limited. In this case, it is possible to adjust the spray range of the liquid fine particles by adjusting the protruding amount of the scattered liquid capturing cover 3 without adjusting the distance between the liquid fine particle generating nozzle 1 and the liquid fine particle spray target. Become. In addition, you may provide a separate protrusion amount adjustment means in at least one of the scattering liquid capture | acquisition cover 3 or the nozzle main-body part 2. FIG.
[0025]
Through the operation as described above, the liquid fine particles radiated at a large angle are captured by the scattered liquid capturing cover 3, sucked by the liquid capturing holes 33 formed in the inner peripheral wall surface 32 of the scattered liquid capturing cover 3, and externally. Therefore, the liquid fine particles emitted from the liquid fine particle generating nozzle 1 are only those having a predetermined radiation angle, and uniform liquid spraying is possible only on a predetermined region of the liquid fine particle spray target.
[0026]
Further, since the liquid fine particles adhering to the inner peripheral wall surface 32 of the scattered liquid catching cover 3 are sucked and discharged through the liquid catching hole 33, the liquid fine particles aggregate and sag to cause unevenness in the coating film thickness. There is no fear.
[0027]
The present invention is provided with a mixed gas outlet 55 for introducing a mixed gas of liquid fine particles and gas crushed by a high-speed gas into which a high-pressure gas and a liquid are introduced, and further, the mixed gas jet A circular concave swirl flow chamber 59 having an outlet 55 disposed in the center thereof, and a swirl guide hole 573 formed in a spiral shape from the swirl flow chamber 59 to the outside, the branched high pressure gas introduced It is more effective when applied to the liquid fine particle generating nozzle 1 which is introduced into the swirl flow chamber 59 from the swirl guide hole 573 to generate a high-speed swirl air flow and to eject the liquid of ultra fine particles. . However, the present invention is not limited to this, and it goes without saying that the present invention can also be applied to a normal linear flow type liquid particle generating nozzle.
[0028]
【The invention's effect】
Since the present invention is configured as described above, according to the first aspect of the present invention, a double wall structure is provided in which the tip end portion of the nozzle body portion is provided so as to protrude in the mixed gas ejection direction, and the inside is hollow. a cylindrical scattering inner peripheral wall surface of the liquid catcher cover without the by liquid trapping hole provided in communication with the hollow portion of the double wall structure, to capture liquid particles scattered outside a predetermined area, the The captured liquid fine particles can be stored in the hollow portion. Therefore, the spraying of the liquid fine particles outside the predetermined area can be prevented.
[0029]
Moreover, according to the invention which concerns on Claim 2, the liquid stored hollowly can be attracted | sucked and discharged | emitted outside by the discharge port formed in the inner peripheral wall surface of a scattering liquid capture cover. Therefore, unnecessary liquid fine particles can be captured and discharged more effectively.
[0030]
Furthermore, according to the invention which concerns on Claim 3, the protrusion amount from the nozzle main-body part of a scattering liquid capture | acquisition cover can be adjusted with a protrusion amount adjustment means. Therefore, it is possible to adjust the liquid spray range by limiting the emission angle of the liquid fine particles.
[Brief description of the drawings]
FIG. 1 is a side sectional view showing an embodiment of a nozzle for generating liquid particles according to the present invention.
FIG. 2 is a perspective view showing a configuration of a turning guide hole forming member.
FIG. 3 is a perspective view showing an external appearance of a nozzle for generating liquid fine particles according to the present invention.
FIG. 4 is a plan view showing another example of a liquid catching hole formed in the scattered liquid catching cover.
FIG. 5 is a plan view showing still another example of the liquid catching hole formed in the scattered liquid catching cover.
FIG. 6 is a side sectional view showing a conventional nozzle for generating liquid particles.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Liquid particle generation nozzle 2 ... Nozzle main-body part 3 ... Spattering liquid capture | acquisition cover 31 ... Hollow 32 ... Inner peripheral wall surface 33, 33a, 33b ... Liquid capture hole 34 ... Outer peripheral wall surface 35 ... Discharge port 36 ... Nut part (projection amount) Adjustment means)
47. Bolt part (projection amount adjusting means)
55 ... Mixed gas outlet

Claims (3)

In the nozzle for generating liquid fine particles, the high-pressure gas and the liquid are introduced into the nozzle body, and the liquid fine particle generating nozzle is provided with a mixed gas ejection port at the tip portion for ejecting a mixed gas of liquid fine particles and gas crushed by a high-speed flow gas.
Provided to protrude the tubular scattering liquid catcher cover forms a double wall structure inside is hollow in the mixed gas ejection direction to the tip portion of the nozzle body, the upper Symbol double wall on the inner peripheral wall of its A liquid trapping hole is formed which communicates with a hollow portion of the structure and traps liquid fine particles scattered outside a predetermined region, and the liquid fine particles trapped in the liquid trapping hole are stored in the hollow portion. Nozzle for generating liquid particles.   2. The nozzle for generating liquid fine particles according to claim 1, wherein a discharge port for sucking and discharging the captured liquid is provided on the outer peripheral wall surface of the scattered liquid capturing cover so as to communicate with the hollow portion.   The protrusion amount adjustment means for adjusting the protrusion amount of the splash liquid capture cover from the nozzle body portion is provided in at least one of the splash liquid capture cover or the nozzle body portion. The nozzle for generating liquid fine particles as described.

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