JP3979737B2 - 電気的特性測定用装置および電気的特性測定方法 - Google Patents
電気的特性測定用装置および電気的特性測定方法 Download PDFInfo
- Publication number
- JP3979737B2 JP3979737B2 JP33431998A JP33431998A JP3979737B2 JP 3979737 B2 JP3979737 B2 JP 3979737B2 JP 33431998 A JP33431998 A JP 33431998A JP 33431998 A JP33431998 A JP 33431998A JP 3979737 B2 JP3979737 B2 JP 3979737B2
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- Prior art keywords
- gas
- probe
- inert gas
- gas ejection
- electrical characteristics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 5
- 239000007789 gas Substances 0.000 claims description 173
- 239000000523 sample Substances 0.000 claims description 144
- 238000005259 measurement Methods 0.000 claims description 99
- 239000011261 inert gas Substances 0.000 claims description 96
- 239000004065 semiconductor Substances 0.000 claims description 65
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 12
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- 230000003313 weakening effect Effects 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 13
- 230000015556 catabolic process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33431998A JP3979737B2 (ja) | 1998-11-25 | 1998-11-25 | 電気的特性測定用装置および電気的特性測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33431998A JP3979737B2 (ja) | 1998-11-25 | 1998-11-25 | 電気的特性測定用装置および電気的特性測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000164648A JP2000164648A (ja) | 2000-06-16 |
| JP2000164648A5 JP2000164648A5 (enExample) | 2005-12-15 |
| JP3979737B2 true JP3979737B2 (ja) | 2007-09-19 |
Family
ID=18276037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33431998A Expired - Fee Related JP3979737B2 (ja) | 1998-11-25 | 1998-11-25 | 電気的特性測定用装置および電気的特性測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3979737B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3260332B2 (ja) * | 1999-01-22 | 2002-02-25 | 松下電器産業株式会社 | 検査装置及びそれを用いた検査方法 |
| US7063992B2 (en) * | 2003-08-08 | 2006-06-20 | Solid State Measurements, Inc. | Semiconductor substrate surface preparation using high temperature convection heating |
| JP5067280B2 (ja) * | 2008-06-25 | 2012-11-07 | 株式会社デンソー | 半導体ウエハ測定装置 |
| JP5562320B2 (ja) * | 2011-12-08 | 2014-07-30 | 三菱電機株式会社 | 半導体試験装置および半導体試験方法 |
| JP5894854B2 (ja) * | 2012-05-11 | 2016-03-30 | 株式会社日立ハイテクノロジーズ | 検査装置 |
| JP2014139965A (ja) * | 2013-01-21 | 2014-07-31 | Sumitomo Electric Ind Ltd | 耐圧測定装置および耐圧測定方法 |
| JP6084469B2 (ja) | 2013-01-28 | 2017-02-22 | 三菱電機株式会社 | 半導体評価装置および半導体評価方法 |
| JP6504971B2 (ja) * | 2015-08-20 | 2019-04-24 | 三菱電機株式会社 | 半導体チップテスト装置および半導体チップテスト方法 |
-
1998
- 1998-11-25 JP JP33431998A patent/JP3979737B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000164648A (ja) | 2000-06-16 |
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