JP3978839B2 - Dust collector for silicon refining furnace for solar cells - Google Patents

Dust collector for silicon refining furnace for solar cells Download PDF

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Publication number
JP3978839B2
JP3978839B2 JP00885598A JP885598A JP3978839B2 JP 3978839 B2 JP3978839 B2 JP 3978839B2 JP 00885598 A JP00885598 A JP 00885598A JP 885598 A JP885598 A JP 885598A JP 3978839 B2 JP3978839 B2 JP 3978839B2
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Prior art keywords
furnace
refining furnace
dust collector
silicon
refining
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JPH11209118A (en
Inventor
俊二 濱田
秀明 運崎
尚道 中村
明宗 佐藤
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JFE Steel Corp
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JFE Steel Corp
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  • Filtering Of Dispersed Particles In Gases (AREA)
  • Silicon Compounds (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Description

【０００１】
【発明の属する技術分野】
本発明は、太陽電池用シリコン精錬炉の集塵装置に関する。
【０００２】
【従来の技術】
太陽電池用シリコン精錬工程に用いる精錬炉の内、プラズマトーチを用いて、シリコン中の硼素や炭素を除去する精錬炉では、従来は、プラズマトーチ、測温サンプリング装置、のぞき孔などの装置が炉体上部に炉のケーシング天井を貫通して設置されていたため、適当な局所集塵のフードを取りるけることは、困難であると考えられていた。
【０００３】
また、従来、このような精錬炉の集塵装置は、精錬炉のケーシングを貫通して大気中へ開口した排気管を設け、プラズマガスとして吹き込まれるＡｒ、Ｈ2 により炉内を正圧に保ち、上記排気管より噴出するガスに点火してこれを燃焼させた後、その燃焼ガスをフードで覆って集塵し、集塵後の排ガスを大気中へ放出していた。
【０００４】
【発明が解決しようとする課題】
従来の太陽電池用シリコン精製工程のうちプラズマトーチを用いる精錬炉では、上述のように、精錬炉のケーシング内雰囲気から噴出するガスを集塵し、精錬炉の炉体から直接集塵するようにはしていないために、炉体中に収納されているシリコン溶湯から発生するシリコンの酸化によって生じるシリカ粉が炉のケーシング中に飛散、堆積し、炉の休止中にこれを清掃するのに大変な労力を要しており、衛生的にも問題があった。また、シリカ粉がシリコン溶湯中に戻って、シリコンの品質を劣化させる等の問題を引き起こすことがあった。
【０００５】
本発明はこのような問題点を解決し、太陽電池用シリコン精錬炉ケーシング内にシリカが堆積するのを防止し、清掃労力を軽減すると共に精錬炉の正常な操業を行ことができるようにした集塵技術を提供することを目的とする。
【０００６】
【課題を解決するための手段】
本発明はシリコン溶湯を精錬する精錬炉の炉体の径とほぼ等しい内径を有する円筒状局所集塵フードを精錬炉のケーシングの天井から炉体上に垂下したことを特徴とする太陽電池用シリコン精錬炉の集塵装置である。
本発明では、円筒形の局所集塵フードを炉内上部空間に設け、これを精錬炉のケーシングの天井に取付けた。こうすることにより、プラズマトーチ、測温サンプリング装置、のぞき孔などの炉のケーシングの天井を貫通する各装置の動作は、全て上記集塵フード内で行うことができ、これらの作業性を全く損なうことなくシリカ粉の飛散を防止する局所集塵ができるようになった。
【０００７】
本発明の第２の発明はこのような円筒状局所集塵フード内の雰囲気を吸気して集塵機に送るファンと、集塵機と、集塵後のガスを精錬炉のケーシング内に戻す循環経路とから成り、精錬炉内圧力を一定の正圧に保つ圧力制御装置を設けたことを特徴とする太陽電池用シリコン精錬炉の集塵装置である。
シリコン精錬炉の炉体の上方の空間を囲って局所集塵フードを設け、その内部雰囲気をファンで吸引すると、シリコン粉が精錬炉のケーシング内へ飛散するのを防止することができる。しかし、この方式で吸引した吸引ガスをすべて大気中に放出すると、炉内が負圧になり、誤って外気が精錬炉内に侵入すると炉内のＨ2 などと反応し爆発などを起こす危険がある。従って、本発明の装置では、集塵機で集塵した後のガスは一部を精錬炉内に戻し、余剰分のみを大気中へ放出するようにした。このため精錬炉のケーシング内の圧力を検出し、この圧力を大気圧より高く保つように、精錬炉内に戻すガス量を制御する。この制御は、集塵後の循環ガスの圧力が精錬炉のケーシング内の圧力と一定の関係を持ってバランスするように、集塵ガスを大気中に放出するバルブの開度を制御することにより達成される。
【０００８】
【発明の実施の形態】
以下図面を参照して本発明の実施の形態を説明する。
図１は実施例の精錬炉の縦断面図、図２は従来例の縦断面図である。図２に示すように、従来は精錬炉炉体１は精錬炉のケーシング２内に収納され、炉体１の上面はケーシング２内の雰囲気３中に開放されていた。これは、精錬炉天井４からプラズマを発生し溶融シリコン７に照射するプラズマトーチ５、シリコン溶湯の温度測定やサンプリングを行うための測温サンプリング装置６、溶融シリコンの挙動を観察するのぞき窓８などが精錬炉炉体上方に配置されていたために精錬炉炉体上方を覆う集塵フード等を設けることができないと言う先入観が支配していたからである。このため、炉体周辺に蒸発したシリコンやこれが酸化して生じたシリカ９が精錬炉ケーシング２内に雪のように堆積していた。図１は精錬炉炉体１の上方に円筒形のフード１０を設け、このフード１０を炉天井４から垂下し、このフード１０内に上記プラズマトーチ５、測温サンプリング装置６、のぞき窓８などを収納すると共に、このフード１０内の雰囲気ガスを系外に吸引するようにした。その結果、製錬炉ケーシング内のシリカの堆積が著しく減少し、またプラズマ照射、測温、サンプリング、目視観察等になんら障害が生じないようになった。
【０００９】
次に第２の発明の実施例を説明する。
従来は図４に示すように、プラズマトーチ５を用いて製錬炉炉体１内のシリコン７を精製する装置では、太陽電池用シリコン精錬炉のケーシング２に外気に開放した燃焼口３１を設け、この燃焼口３１に着火源３２、例えばニクロム線等を設け、燃焼口３１から噴出するガスに着火して燃焼炎３３を形成させ、この燃焼炎３３の上方にフード３４を設けて燃焼ガスを集塵機３５に誘導し集塵後の排出ガス３６を煙突３７から大気中に放出していた。
【００１０】
図３は本発明の実施例で、精錬炉の炉体１の上方に設けたフード１０内の雰囲気ガスをファン２１で吸引し、吸引したガス２２を集塵機２３に誘導し、集塵後の集塵機出口ガス２４を循環経路２５を経て精錬炉のケーシング２内に戻すようにした。
このガス循環は、精錬炉内雰囲気ガス圧力計２７の測定値一定の正圧になるように、集塵機２３の出口ガス２４の圧力を圧力指示調節計（ＰＩＣ）２６で調節し、両者の圧力が一定の関係でバランスするように圧力調整弁２８を操作する。圧力調整弁２８は、この信号に基いて煙突２９から放出するガス量を適正化する。すなわち、集塵機２３の出口ガス２４の圧力が精錬炉内圧力（正圧）と好適な平衡を保つように出口ガス２４の一部を煙突２９から外気に放散する。フード１０内の圧力が精錬炉ケーシング内の雰囲気３の圧力より僅か低くなるように、ファン２１の吸入量及びフード１０と炉体１との隙間４１を調整することによって、溶融シリコン７から蒸発又は飛散するシリコンやシリカ粉等は炉体１の周囲や精錬炉ケーシング２内に堆積しないようになった。また、精錬炉のケーシング２内の炉内雰囲気の圧力が正の一定値となり、安全操業が確保される。
【００１１】
【発明の効果】
本発明によれば、局所集塵フードを取り付けることにより、精錬炉ケーシング内のシリカ粉の堆積はなくなり、またシリカ粉の混入によるシリコン溶湯の汚染もなくなり、品質上の問題をクリアできた。
本発明の集塵システムにより、炉内のシリカの堆積が著減し、シリコンの品質劣化もなく、炉内の清掃の労力が減少し、精錬炉の安定操業が確保された。
【図面の簡単な説明】
【図１】実施例の精錬炉の縦断面図である。
【図２】従来の精錬炉の縦断面図である。
【図３】実施例の精錬炉の集塵装置のブロック図である。
【図４】従来の集塵装置の説明図である。
【符号の説明】
１ 精錬炉炉体
２ 精錬炉のケーシング
３ 精錬炉内雰囲気
４ 精錬炉天井
５ プラズマトーチ
６ 測温サンプリング装置
７ 溶融シリコン
８ のぞき窓
９ シリカ
１０ フード
２１ ファン
２２ 吸引したガス
２３ 集塵機
２４ 出口ガス
２５ 循環ガス経路
２６ 圧力指示調節計（ＰＩＣ）
２７ 雰囲気ガス圧力計
２８ 圧力調整弁
２９ 煙突
３１ 燃焼口
３２ 着火源
３３ 燃焼炎
３４ フード
３５ 集塵機
３６ 排出ガス
３７ 煙突
４１ 隙間[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dust collector for a silicon refining furnace for solar cells.
[0002]
[Prior art]
Of the smelting furnaces used in solar cell silicon smelting processes, plasma torches that remove boron and carbon in silicon using plasma torches have conventionally been equipped with devices such as plasma torches, temperature measuring sampling devices, and observation holes. Since it was installed in the upper part of the body through the ceiling of the furnace casing, it was considered difficult to remove a suitable hood with local dust collection.
[0003]
Conventionally, such a dust collector of a smelting furnace is provided with an exhaust pipe that penetrates through the casing of the smelting furnace and opens into the atmosphere, and keeps the inside of the furnace at a positive pressure by Ar and H 2 blown as plasma gas. After igniting and burning the gas ejected from the exhaust pipe, the combustion gas was covered with a hood and collected, and the exhaust gas after dust collection was released into the atmosphere.
[0004]
[Problems to be solved by the invention]
In a refining furnace using a plasma torch among conventional silicon refining processes for solar cells, as described above, the gas ejected from the atmosphere inside the casing of the refining furnace is collected and collected directly from the furnace body of the refining furnace. The silica powder generated by the oxidation of silicon generated from the molten silicon contained in the furnace body is scattered and accumulated in the furnace casing, and it is very difficult to clean it during the furnace shutdown. It took a lot of effort and there was a problem with hygiene. In addition, the silica powder may return to the molten silicon and cause problems such as deterioration of silicon quality.
[0005]
The present invention solves such problems, prevents silica from accumulating in the solar cell silicon refining furnace casing, reduces the cleaning effort, and allows the refining furnace to operate normally. The purpose is to provide dust collection technology.
[0006]
[Means for Solving the Problems]
The present invention relates to a silicon for solar cells, characterized in that a cylindrical local dust collection hood having an inner diameter substantially equal to the diameter of a furnace body of a refining furnace for refining molten silicon is suspended from the ceiling of the casing of the refining furnace onto the furnace body. It is a dust collector for a smelting furnace.
In the present invention, a cylindrical local dust collection hood is provided in the upper space in the furnace, and this is attached to the ceiling of the casing of the refining furnace. By doing so, the operation of each device penetrating the ceiling of the furnace casing such as the plasma torch, the temperature measuring sampling device, and the observation hole can be performed in the dust collection hood, and the workability is completely impaired. The local dust collection which prevents the scattering of the silica powder can be performed.
[0007]
The second invention of the present invention comprises a fan that sucks the atmosphere in the cylindrical local dust collection hood and sends it to the dust collector, a dust collector, and a circulation path that returns the dust-collected gas into the casing of the refining furnace. A dust collector for a silicon smelting furnace for solar cells, which is provided with a pressure control device that maintains the pressure in the smelting furnace at a constant positive pressure.
If a local dust collection hood is provided surrounding the space above the furnace body of the silicon refining furnace and the internal atmosphere is sucked with a fan, it is possible to prevent the silicon powder from scattering into the casing of the refining furnace. However, if all of the suction gas sucked by this method is released into the atmosphere, the pressure inside the furnace becomes negative, and if the outside air accidentally enters the refining furnace, it may react with H 2 in the furnace and cause an explosion. is there. Therefore, in the apparatus of the present invention, a part of the gas after being collected by the dust collector is returned to the smelting furnace, and only the surplus is discharged into the atmosphere. For this reason, the pressure in the casing of the refining furnace is detected, and the amount of gas returned to the refining furnace is controlled so as to keep this pressure higher than the atmospheric pressure. This control is achieved by controlling the opening of the valve that discharges the dust collection gas to the atmosphere so that the pressure of the circulating gas after dust collection is balanced with the pressure in the refining furnace casing. Achieved.
[0008]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a longitudinal sectional view of a refining furnace of an embodiment, and FIG. 2 is a longitudinal sectional view of a conventional example. As shown in FIG. 2, conventionally, the smelting furnace body 1 is housed in a casing 2 of the smelting furnace, and the upper surface of the furnace body 1 is open to the atmosphere 3 in the casing 2. This includes a plasma torch 5 that generates plasma from the refining furnace ceiling 4 and irradiates the molten silicon 7, a temperature measuring sampling device 6 for measuring and sampling the temperature of the molten silicon, and a viewing window 8 for observing the behavior of the molten silicon. This is because the preconception that a dust collecting hood or the like that covers the upper part of the refining furnace body cannot be provided because it is disposed above the refining furnace body. For this reason, silicon evaporated in the periphery of the furnace body and silica 9 generated by oxidation of the silicon were deposited in the smelting furnace casing 2 like snow. In FIG. 1, a cylindrical hood 10 is provided above the smelting furnace body 1 and the hood 10 is suspended from the furnace ceiling 4. The plasma torch 5, the temperature measuring sampling device 6, the observation window 8, etc. The atmospheric gas in the hood 10 was sucked out of the system. As a result, silica deposition in the smelting furnace casing was remarkably reduced, and no obstacles were caused to plasma irradiation, temperature measurement, sampling, visual observation and the like.
[0009]
Next, an embodiment of the second invention will be described.
Conventionally, as shown in FIG. 4, in an apparatus for purifying silicon 7 in a smelting furnace body 1 using a plasma torch 5, a combustion port 31 opened to the outside air is provided in a casing 2 of a silicon smelting furnace for solar cells. An ignition source 32 such as a nichrome wire is provided at the combustion port 31 to ignite the gas ejected from the combustion port 31 to form a combustion flame 33, and a hood 34 is provided above the combustion flame 33 to provide combustion gas. Was discharged to the atmosphere from the chimney 37.
[0010]
FIG. 3 shows an embodiment of the present invention. Atmospheric gas in a hood 10 provided above a furnace body 1 of a refining furnace is sucked by a fan 21 and the sucked gas 22 is guided to a dust collector 23 to collect the dust collector after dust collection. The outlet gas 24 was returned into the casing 2 of the refining furnace via the circulation path 25.
In this gas circulation, the pressure of the outlet gas 24 of the dust collector 23 is adjusted by a pressure indicating controller (PIC) 26 so that the measured value of the atmospheric gas pressure gauge 27 in the smelting furnace becomes a constant positive pressure. The pressure regulating valve 28 is operated so as to balance in a certain relationship. The pressure regulating valve 28 optimizes the amount of gas released from the chimney 29 based on this signal. That is, a part of the outlet gas 24 is diffused from the chimney 29 to the outside air so that the pressure of the outlet gas 24 of the dust collector 23 maintains a suitable equilibrium with the pressure in the refining furnace (positive pressure). By adjusting the suction amount of the fan 21 and the gap 41 between the hood 10 and the furnace body 1 so that the pressure in the hood 10 is slightly lower than the pressure of the atmosphere 3 in the smelting furnace casing, Scattered silicon, silica powder, and the like do not accumulate around the furnace body 1 or in the refining furnace casing 2. Further, the pressure in the furnace atmosphere in the refining furnace casing 2 becomes a positive constant value, and safe operation is ensured.
[0011]
【The invention's effect】
According to the present invention, by attaching a local dust collection hood, silica powder does not accumulate in the smelting furnace casing, and contamination of the silicon melt due to mixing of the silica powder is eliminated, thereby eliminating the quality problem.
With the dust collection system of the present invention, the deposition of silica in the furnace is remarkably reduced, the quality of silicon is not deteriorated, the labor for cleaning the furnace is reduced, and the stable operation of the refining furnace is ensured.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view of a refining furnace of an embodiment.
FIG. 2 is a longitudinal sectional view of a conventional smelting furnace.
FIG. 3 is a block diagram of the dust collector of the refining furnace of the embodiment.
FIG. 4 is an explanatory diagram of a conventional dust collector.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Refining furnace body 2 Refining furnace casing 3 Refining furnace atmosphere 4 Refining furnace ceiling 5 Plasma torch 6 Temperature measuring sampling device 7 Molten silicon 8 Peep window 9 Silica 10 Hood 21 Fan 22 Suction gas 23 Dust collector 24 Outlet gas 25 Circulation Gas path 26 Pressure indicating controller (PIC)
27 Atmospheric gas pressure gauge 28 Pressure adjustment valve 29 Chimney 31 Combustion port 32 Ignition source 33 Combustion flame 34 Hood 35 Dust collector 36 Exhaust gas 37 Chimney 41 Crevice

Claims (2)

シリコン溶湯を精錬する精錬炉の炉体の径とほぼ等しい内径を有する円筒状局所集塵フードを精錬炉のケーシングの天井から炉体上に垂下したことを特徴とする太陽電池用シリコン精錬炉の集塵装置。A silicon refining furnace for solar cells, characterized in that a cylindrical local dust collection hood having an inner diameter substantially equal to the diameter of the furnace body of the refining furnace for refining silicon melt is suspended from the ceiling of the refining furnace casing onto the furnace body. Dust collector. 請求項１記載の円筒状局所集塵フード内の雰囲気を吸気して集塵機に送るファンと、集塵機と、集塵後のガスを精錬炉のケーシング内に戻す循環経路とから成り、精錬炉内圧力を一定の正圧に保つ圧力制御装置を設けたことを特徴とする太陽電池用シリコン精錬炉の集塵装置。A refining furnace pressure comprising a fan that sucks the atmosphere in the cylindrical local dust collecting hood according to claim 1 and sends it to the dust collector, a dust collector, and a circulation path for returning the dust-collected gas into the casing of the refining furnace. A dust collector for a silicon smelting furnace for solar cells, characterized in that a pressure control device for maintaining a constant positive pressure is provided.
JP00885598A 1998-01-20 1998-01-20 Dust collector for silicon refining furnace for solar cells Expired - Lifetime JP3978839B2 (en)

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JP3978839B2 true JP3978839B2 (en) 2007-09-19

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CN101936666B (en) * 2010-09-17 2012-06-27 集美大学 Process and device for recovering complementary energy of silicon smelting furnace
CN103449443B (en) * 2013-09-06 2016-01-20 上海森松流体技术有限公司 A kind of polycrystalline silicon reducing furnace water system heat reclaiming system and technique
CN110787573A (en) * 2019-10-24 2020-02-14 上海黔宝环保新材料有限公司 Production method of active silicon powder

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