JP3950129B2 - Laser heating device - Google Patents

Description

  The present invention relates to a laser heating device, and more particularly to a laser heating device capable of heating a large area to a desired temperature distribution at a time.

Conventionally, a YAG laser or a carbon dioxide laser heating device is used to heat a semiconductor substrate or the like using a spot moving method, a linear beam irradiation method, a scanning method, or a high-power semiconductor laser heating device with a wide stripe width. It was heated (Patent Document 1).
JP-A-10-94892

  However, since both the spot moving method and the scanning method are methods in which the position to be heated is scanned with the laser beam, the entire portion to be heated cannot be irradiated with the laser beam at one time, and the processing efficiency decreases. In addition, the linear beam irradiation method and the high-power semiconductor laser heating apparatus with a wide stripe width have the disadvantage that they can only be heated linearly and a large area cannot be heated at a desired temperature distribution at a time. It was.

  The present invention eliminates the above-mentioned drawbacks.

The laser heating apparatus of the present invention includes a first laser light source at a central position, a first optical waveguide member that guides the first laser light emitted from the first laser light source, and the first laser light source. A plurality of second laser light sources spaced apart from each other in the circumferential direction around the center, and a second optical waveguide member for guiding a plurality of second laser lights emitted from the plurality of second laser light sources, one end face of said first optical waveguide member allowed to incident the first laser beam, allowed to emit the first laser beam, possess the other end face having a larger area than the end surface, the second A plurality of end faces spaced apart from each other in a circumferential direction around the first laser light source, the optical waveguide member allowing the plurality of second laser lights from the plurality of second laser light sources to enter, respectively; The second light beam that emits a second laser beam. An outer periphery of the other end surface of the first optical waveguide member formed by combining the other end surfaces of the second optical waveguide member. A tubular surface disposed concentrically is formed .

Further, the laser heating apparatus of the present invention is characterized in that the said other end surface of the first optical waveguide member is a tubular surface.

Further, the laser heating apparatus of the present invention is characterized in that the output of the laser light sources are different from each other.

  In the present invention, there is a great advantage that an object to be heated such as a substrate can be heated in a wide range.

  Further, by increasing the number of laser light sources, the object to be heated can be heated over a wide range, and by changing the output of each laser light source, the surface to be heated can be heated with a desired temperature distribution. .

  Embodiments of the present invention will be described below with reference to the drawings.

1 to 3, the first semiconductor laser 1 of the high output, the laser heating apparatus more ing the first optical waveguide member 2 made of quartz rod or the like for guiding the laser beam emitted from the semiconductor laser 1 Show. The optical waveguide member 2 has a rod-shaped portion 3 into which the laser beam from the high-power semiconductor laser 1 is incident on one end surface thereof, and one end connected to the other end of the rod-shaped portion 3 and has an outer diameter other than that. It consists of a tubular portion 4 having a constant thickness, which becomes constant after gradually expanding in the trumpet shape from the same outer diameter as the other end outer diameter of the rod-shaped portion 3 toward the end side.

Laser beam incident on one end face of the rod portion 3 from the high output semiconductor laser 1 is spread by the optical waveguide member 2, Ru can extensively heated object to be heated, such as a substrate (not shown).

  In order to improve the transmission of the laser beam, one end surface of the rod-like portion 3 on which the laser beam is incident is polished to provide an antireflection film.

Further, the other end surface of the circular tubular portion 4, various lenses such as a collimator lens and a cylindrical lens (not shown) is provided, Ru allowed irradiating the object to be heated, such as a substrate to radiation into parallel light.

  Further, the optical waveguide member 2 is preferably made of quartz, which has less reflection and transmission loss of laser light and good heat resistance.

  It is also desirable to provide a grading on the quartz rod to prevent loss of light from the quartz.

  Further, the circular tubular portion 4 of the optical waveguide member 2 may be a polygonal tubular shape such as a triangular tubular shape or a quadrangular tubular shape.

  Instead of the circular tubular portion 4 of the optical waveguide member, a rod-like portion (not shown) that becomes constant after gradually expanding in a trumpet shape from the same outer diameter as the other end outer diameter of the rod-like portion 3 may be used. Good.

4 to 6, and the second semiconductor laser 5 for two high output apart from each other in the circumferential direction, the more the second optical waveguide member 8 of the constant thickness of the circular tube made of quartz or the like 1 shows a laser heating device. The optical waveguide member 8 has a larger area than the one end surface in the circumferential direction by an inclined notch 11 formed from one end surface 9 to the other end surface 10 on which the laser light emitted from the semiconductor laser 5 is incident. is divided into two semicylindrical portions 12, 12 as the end face, the two divided other end surface that form a tubular surface to coalesce.

Laser light incident on one end surface 9 of each semicircular tubular portion 12 from each semiconductor laser 5 spreads in each semicircular tubular portion 12 and is tubular from the other end surface 10 of each semicircular tubular portion 12. the emitted, Ru can heat the object to be heated, such as a substrate (not shown) over a wide range.

Increasing the number of laser light sources by dividing the optical waveguide member in the circumferential direction, by outputting the respective control of the laser light sources, you are possible to heat the heated surface at a desired temperature distribution.

Can increase or Succoth a laser light source is divided into three or more divisions in the circumferential direction by the optical waveguide member 8 notches 11 of the circular tube.

The optical waveguide member 8 may be triangular tubular, polygonal tubular such as square tubular to.

In laser heating apparatus of the first embodiment of the present invention, as shown in FIGS. 7 to 9, a laser heating shown in FIGS. 1 to 3 in the center of the laser heating apparatus shown in FIG. 4 to FIG. 6 Incorporate the device. In this embodiment, the optical waveguide member is composed of the optical waveguide member 2 in the central portion and an optical waveguide member having an inner diameter larger than the outer diameter of the optical waveguide member 2 arranged concentrically on the outer periphery of the optical waveguide member 2. 8 and so on.

Since the laser heating apparatus according to the first embodiment of the present invention is configured as described above, the laser light incident on the rod-shaped portion 3 and the one end surface 9 from the semiconductor lasers 1 and 5 is the optical waveguide member. spread within 2,8, are respectively emitted from the other end face of the respective tubular portions 4 and 12, it becomes so that can heat the object to be heated, such as a substrate (not shown) over a wide range.

In the laser heating apparatus of the present invention, since the number of laser light sources can be further increased, the object to be heated can be heated over a wide range, and the surface to be heated can be heated to a desired temperature distribution by making the output of each semiconductor laser different. There is a big benefit that you can do.

  Further, a plurality of optical waveguide members having different diameters can be arranged concentrically, and the number of laser light sources can be further increased.

It is a front view of the laser heating apparatus which can be integrated in the laser heating apparatus of this invention. It is a right view of the laser heating apparatus shown in FIG. It is a left view of the laser heating apparatus shown in FIG. It is a front view of the other laser heating apparatus which can be integrated in the laser heating apparatus of this invention. It is a right side view of the laser heating apparatus shown in FIG. It is a left side view of the laser heating apparatus shown in FIG. It is a front view of the 1st Example of the laser heating apparatus of this invention. It is a right side view of the laser heating apparatus shown in FIG. It is a left side view of the laser heating apparatus shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 High power semiconductor laser 2 Optical waveguide member 3 Rod-shaped part 4 Circular tubular part 5 Optical waveguide member 6 Rod-shaped part 7 Rod-shaped part 8 Optical waveguide member 9 One end surface 10 Other end surface 11 Notch 12 Semicircular tubular part

Claims (3)

A first laser light source at a central position, a first optical waveguide member that guides the first laser light emitted from the first laser light source, and a circumferential direction centering on the first laser light source. a plurality of second laser light sources spaced, become more and second waveguide member guiding the second laser beam of the plurality emitted from the plurality of second laser light source, the first optical waveguide member allowed to emit one end face allowed to incident the first laser beam, the first laser light, possess the other end face having a larger area than the end surface, the above second optical waveguide member of the plurality A plurality of second laser beams from two laser light sources respectively incident on a plurality of end faces spaced apart from each other in a circumferential direction around the first laser light source, and the second laser light emitted. The plurality of one end faces of the second optical waveguide member. A tubular structure comprising a plurality of other end faces having a large area, and the plurality of other end faces of the second optical waveguide member are combined and arranged concentrically on the outer periphery of the other end face of the first optical waveguide member. A laser heating apparatus characterized by forming a surface . Laser heating apparatus according to claim 1, wherein said the other end face of the first optical waveguide member is a tubular surface. Laser heating apparatus according to claim 1 or 2, wherein the said output of the laser light sources are different from each other.

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