JP3929722B2 - Array-type ultrasonic probe - Google Patents

Array-type ultrasonic probe Download PDF

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Publication number
JP3929722B2
JP3929722B2 JP2001159287A JP2001159287A JP3929722B2 JP 3929722 B2 JP3929722 B2 JP 3929722B2 JP 2001159287 A JP2001159287 A JP 2001159287A JP 2001159287 A JP2001159287 A JP 2001159287A JP 3929722 B2 JP3929722 B2 JP 3929722B2
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JP
Japan
Prior art keywords
piezoelectric elements
array
metal foil
conductive adhesive
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001159287A
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Japanese (ja)
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JP2002354591A (en
Inventor
孝 若林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2001159287A priority Critical patent/JP3929722B2/en
Publication of JP2002354591A publication Critical patent/JP2002354591A/en
Application granted granted Critical
Publication of JP3929722B2 publication Critical patent/JP3929722B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は配列型の超音波探触子(配列型探触子とする)を産業上の技術分野とし、特にアース線の導出方法に関する。
【0002】
【従来の技術】
(発明の背景)配列型探触子は、例えば医用の超音波診断装置に超音波の送受波源として使用される。通常では、複数の圧電素子を並べて電子的にセクタやリニア駆動され、断層像を得る。
【0003】
(従来技術の一例)第4図及び第5図は一従来例を説明する配列型探触子の図で、第4図は側断面図、第5図は平面図である。
配列型探触子は、上下面電極1(ab)を有する複数の圧電素子2をバッキング材3上に並べてなる。圧電素子2の中央領域には、生体との音響インピーダンスを整合する音響整合層4が形成される。通常では、バッキング材3上に圧電板を固着して連続した音響整合層を積層した後、個々の圧電素子2及び音響整合層4に切断分割される。
【0004】
そして、両端部の表面にはそれぞれリード線5(ab)を半田によって接続し、上面電極1aを共通接続してアース電位とする。その後、各圧電素子2及び音響整合層4間に図示しない充填材が埋設される。なお、各下面電極1bには電極導出用の金属箔6が両端部に千鳥上に接続し、駆動電圧が印加される。
【0005】
【発明が解決しようとする課題】
(従来技術の問題点)しかしながら、上記構成の配列型探触子では、圧電素子2の上面電極1aにリード線を接続する際、半田の熱によって上面電極1aが剥離する(所謂半田食われ)問題があった。例えば複合圧電材のように電極の付着強度が小さい場合には特に顕著な問題となる。また、半田の熱によって圧電素子2の圧電性が損なわれる熱損傷の問題があった。
【0006】
このため、例えば半田に代えて導電性接着剤7の使用が考えられた。しかし、この場合には、導電性接着剤7が圧電素子2間の溝に侵入して、上下面電極1(ab)間を電気的に接続する問題があった(第6図)。なお、半田の場合は電極のない部分には侵入しない。
【0007】
また、圧電素子2間の溝に充填材を埋設した後にリード線5(ab)を接続することも考えられたが、この場合には、充填材が圧電素子2の両端部表面に付着して電気的導通を損なう問題があった。
【0008】
(発明の目的)本発明は、上面電極及び圧電素子の熱損傷を防止した配列型探触子を提供することを目的とする。
【0009】
【課題を解決するための手段】
本発明は、特許請求の範囲の範囲に示したように、両主面に電極を有する複数の圧電素子をバッキング材上に並べて中央領域に音響整合層を設け、前記圧電素子の端部表面を電気的に共通接続してアース電位面とした配列型の超音波探触子において、前記複数の圧電素子の端部表面には導電性接着剤によって前記複数の圧電素子ごとに独立した金属箔が接合され、前記複数の圧電素子ごとに独立して接合された前記金属箔には半田によってリード線が共通接続された構成とする。
【0010】
【作用】
本発明では、圧電素子の端部表面には導電性接着剤によって金属箔を接合してリード線を共通接続する。したがって、導電性接着剤が半田の熱を遮断して、上面電極及び圧電素子への熱伝達を軽減する。また、圧電素子の電極に直接に半田付けをしないので、半田食われを生じない。以下、本発明の一実施例を説明する。
【0011】
【実施例】
第1図及び第2図は本発明の一実施例を説明する配列型探触子の図で、第1図は側断面図、第2図は一部正断面図である。なお、前従来例と同一部分の説明は簡略又は省略する。
配列型探触子は、前述したように上下面電極1(ab)を有する複数の圧電素子2をバッキング材3上に並ベ、中央領域には音響整合層4を形成し、下面電極1bには電極導出用の金属箔6が両端部に千鳥上に接続する。
【0012】
そして、この実施例では、バッキング材3上に圧電板及び連続した音響整合層4を固着した後、上面電極1aの両端部表面に連続した金属箔を導電性接着剤7によって固着する。次に、圧電板及び連続した音響整合層とともに金属箔及び導電性接着剤7を切断し、個々の圧電素子2、音響整合層4及び導電性接着剤7によって固着された金属箔8を得る。そして、上面電極1aの両端部にリード線5(ab)を図示しない半田によって共通接続し、アース電位とする。そして、各溝間に充填材(未図示)を埋設する。
【0013】
このような構成であれば、圧電素子2の上面電極1aと半田との間には導電性接着剤7及び金属箔8が介在する。したがって、半田は上面電極1aに直接に接触しないとともに半田熱は導電性接着剤7の樹脂成分(熱容量)によって吸収及び遮断される。これにより、半田食われを生ずることなく電極剥離を防止する。そして、圧電素子2への熱伝達を軽減して圧電性を良好に維持する。これらのことから、半田熱による上面電極1a及び圧電素子2の熱損傷を防止する。
【0014】
【第2実施例】
第3図は本発明の他の実施例を説明する配列型探触子の側断面図である。なお、前実施例図と同一部分の説明は省略する。
この実施例では、圧電素子2の両端部から突出して金属箔8を導電性接着剤7によって接続する。金属箔8の突出部の下面に絶縁性接着剤9を設け、突出部を固定する。そして、突出部上にリード線5(ab)を図示しない導電性接着剤によって接続し、各上面電極1aを電気的に共通接続する。
【0015】
このようなものでは、金属箔8の突出部上にリード線5(ab)を接続するので、導電性接着剤は各圧電素子2の溝間には侵入しない。そして、導電性接着剤によって接続するので、半田よりも低温で接合できる。したがって、上面電極1a及び圧電素子2に対する熱損傷をさらに軽減できる。
【0016】
なお、導電性接着剤のみならず半田を用いて接続してもよい。この場合でも、リード線5(ab)が上面電極1aから外れて接続し、さらに絶縁性接着剤9の熱容量も加わって熱伝達を防止するので、熱損傷をさらに軽減できる。
【0017】
【他の事項】
上記各実施例では、圧電素子2の両端部表面にリード線5(ab)を配設したが、一端部表面であったとしてもよい。この場合、音響整合層4は一端部表面を除く全面に形成できる。また、下面電極1bは金属箔6によって両端部から千鳥状に導出したが、一端部からのみ導出したとしてもよい。また、圧電素子2は平面上に並べたが、曲面上に並べたものでも適用できる。
【0018】
【発明の効果】
本発明は、両主面に電極を有する複数の圧電素子をバッキング材上に並べて中央領域に音響整合層を設け、前記圧電素子の端部表面を電気的に共通接続してアース電位面とした配列型の超音波探触子において、前記複数の圧電素子の端部表面には導電性接着剤によって前記複数の圧電素子ごとに独立した金属箔が接合され、前記複数の圧電素子ごとに独立して接合された前記金属箔には半田によってリード線が共通接続されるので、上面電極及び圧電素子の熱損傷を防止した配列型探触子を提供できる。
【図面の簡単な説明】
【図1】本発明の一実施例を説明する配列型探触子の側断面図である。
【図2】本発明の一実施例を説明する配列型探触子の一部正断面図である。
【図3】本発明の他の実施例を説明する配列型探触子の側断面図である。
【図4】従来例を説明する配列型探触子の側断面図である。
【図5】従来例を説明する配列型探触子の平面図である。
【図6】従来例を説明する配列型探触子の一部正断面図である。
【符号の説明】
1 電極、2 圧電素子、3 バッキング材、4 音響整合層、5 リード線、6、8 金属箔、7 導電性接着剤、9 絶縁性接着剤.
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an array-type ultrasonic probe (referred to as an array-type probe) in the industrial technical field, and more particularly to a method for deriving a ground wire.
[0002]
[Prior art]
BACKGROUND OF THE INVENTION An array-type probe is used as an ultrasonic wave transmission / reception source in, for example, a medical ultrasonic diagnostic apparatus. Normally, a plurality of piezoelectric elements are arranged and electronically or sectorally driven to obtain a tomographic image.
[0003]
(Example of Prior Art) FIG. 4 and FIG. 5 are diagrams of an array type probe for explaining one conventional example, FIG. 4 is a side sectional view, and FIG. 5 is a plan view.
The array-type probe is formed by arranging a plurality of piezoelectric elements 2 having upper and lower electrodes 1 (ab) on a backing material 3. An acoustic matching layer 4 that matches the acoustic impedance with the living body is formed in the central region of the piezoelectric element 2. Normally, after a piezoelectric plate is fixed on the backing material 3 and a continuous acoustic matching layer is laminated, the piezoelectric element 2 and the acoustic matching layer 4 are cut and divided.
[0004]
Then, the lead wires 5 (ab) are connected to the surfaces of both ends by soldering, and the upper surface electrode 1a is commonly connected to be ground potential. Thereafter, a filler (not shown) is embedded between each piezoelectric element 2 and the acoustic matching layer 4. Each bottom electrode 1b is connected to a staggered metal foil 6 at both ends for application of a driving voltage.
[0005]
[Problems to be solved by the invention]
(Problem of the prior art) However, in the array type probe having the above configuration, when connecting the lead wire to the upper surface electrode 1a of the piezoelectric element 2, the upper surface electrode 1a is peeled off by the heat of the solder (so-called solder erosion). There was a problem. For example, when the adhesion strength of the electrode is small like a composite piezoelectric material, it becomes a particularly significant problem. There is also a problem of thermal damage in which the piezoelectricity of the piezoelectric element 2 is impaired by the heat of the solder.
[0006]
For this reason, for example, the use of the conductive adhesive 7 instead of solder has been considered. However, in this case, there is a problem that the conductive adhesive 7 enters the grooves between the piezoelectric elements 2 and electrically connects the upper and lower electrodes 1 (ab) (FIG. 6). In the case of solder, it does not enter a portion where there is no electrode.
[0007]
In addition, it has been considered that the lead wire 5 (ab) is connected after the filler is embedded in the groove between the piezoelectric elements 2, but in this case, the filler adheres to the surfaces of both ends of the piezoelectric element 2. There was a problem of impairing electrical continuity.
[0008]
(Object of the Invention) An object of the present invention is to provide an array type probe which prevents thermal damage to the upper surface electrode and the piezoelectric element.
[0009]
[Means for Solving the Problems]
According to the present invention, as shown in the scope of the claims, a plurality of piezoelectric elements having electrodes on both main surfaces are arranged on a backing material, an acoustic matching layer is provided in the central region, and the end surface of the piezoelectric element is provided. In the array-type ultrasonic probe that is electrically connected in common and has a ground potential surface, a metal foil that is independent for each of the plurality of piezoelectric elements is formed on the end surface of the plurality of piezoelectric elements by a conductive adhesive. The metal foil that is bonded and bonded independently for each of the plurality of piezoelectric elements has a configuration in which lead wires are commonly connected by solder .
[0010]
[Action]
In the present invention, a metal foil is bonded to the end surface of the piezoelectric element by a conductive adhesive to connect the lead wires in common. Therefore, the conductive adhesive blocks the heat of the solder and reduces heat transfer to the upper surface electrode and the piezoelectric element. Further, since soldering is not performed directly on the electrodes of the piezoelectric element, no solder erosion occurs. An embodiment of the present invention will be described below.
[0011]
【Example】
FIGS. 1 and 2 are views of an array type probe for explaining an embodiment of the present invention. FIG. 1 is a side sectional view and FIG. 2 is a partial front sectional view. In addition, description of the same part as a prior art example is simplified or abbreviate | omitted.
As described above, the array type probe has a plurality of piezoelectric elements 2 having the upper and lower electrodes 1 (ab) arranged on the backing material 3, an acoustic matching layer 4 is formed in the central region, and the lower electrode 1 b The electrode-leading metal foil 6 is connected to both ends in a staggered manner.
[0012]
In this embodiment, the piezoelectric plate and the continuous acoustic matching layer 4 are fixed on the backing material 3, and then the continuous metal foil is fixed to the both end surfaces of the upper surface electrode 1 a with the conductive adhesive 7. Next, the metal foil and the conductive adhesive 7 are cut together with the piezoelectric plate and the continuous acoustic matching layer to obtain the metal foil 8 fixed by the individual piezoelectric elements 2, the acoustic matching layer 4 and the conductive adhesive 7. Then, the lead wire 5 (ab) is commonly connected to both ends of the upper surface electrode 1a by solder (not shown) to obtain a ground potential. Then, a filler (not shown) is buried between the grooves.
[0013]
With such a configuration, the conductive adhesive 7 and the metal foil 8 are interposed between the upper surface electrode 1a of the piezoelectric element 2 and the solder. Therefore, the solder does not directly contact the upper surface electrode 1 a and the solder heat is absorbed and blocked by the resin component (heat capacity) of the conductive adhesive 7. This prevents electrode peeling without causing solder erosion. Then, heat transfer to the piezoelectric element 2 is reduced to maintain good piezoelectricity. For these reasons, the upper surface electrode 1a and the piezoelectric element 2 are prevented from being thermally damaged by the solder heat.
[0014]
[Second embodiment]
FIG. 3 is a side sectional view of an array type probe for explaining another embodiment of the present invention. The description of the same parts as those in the previous embodiment is omitted.
In this embodiment, the metal foil 8 is connected by the conductive adhesive 7 so as to protrude from both ends of the piezoelectric element 2. An insulating adhesive 9 is provided on the lower surface of the protruding portion of the metal foil 8 to fix the protruding portion. Then, the lead wire 5 (ab) is connected to the protruding portion by a conductive adhesive (not shown), and the upper surface electrodes 1a are electrically connected in common.
[0015]
In such a case, since the lead wire 5 (ab) is connected on the protruding portion of the metal foil 8, the conductive adhesive does not enter between the grooves of each piezoelectric element 2. And since it connects by a conductive adhesive, it can join at low temperature rather than solder. Therefore, thermal damage to the upper surface electrode 1a and the piezoelectric element 2 can be further reduced.
[0016]
In addition, you may connect using not only a conductive adhesive but solder. Even in this case, since the lead wire 5 (ab) is disconnected from the upper surface electrode 1a and connected, and the heat capacity of the insulating adhesive 9 is added to prevent heat transfer, thermal damage can be further reduced.
[0017]
[Other matters]
In each of the above embodiments, the lead wires 5 (ab) are disposed on the surfaces of both ends of the piezoelectric element 2, but may be the surfaces of one end. In this case, the acoustic matching layer 4 can be formed on the entire surface excluding the surface of one end. Moreover, although the lower surface electrode 1b was derived | led-out from the both ends by the metal foil 6, it is good also as derived | led-out only from the one end part. Further, although the piezoelectric elements 2 are arranged on a plane, those arranged on a curved surface can also be applied.
[0018]
【The invention's effect】
In the present invention, a plurality of piezoelectric elements having electrodes on both main surfaces are arranged on a backing material, an acoustic matching layer is provided in the central region, and the end surfaces of the piezoelectric elements are electrically connected in common to form a ground potential surface. In the array-type ultrasonic probe, a metal foil independent for each of the plurality of piezoelectric elements is bonded to an end surface of each of the plurality of piezoelectric elements by a conductive adhesive, and each of the plurality of piezoelectric elements is independent. Since the lead wires are commonly connected to the metal foils joined together by soldering, it is possible to provide an array-type probe that prevents thermal damage to the top electrode and the piezoelectric element.
[Brief description of the drawings]
FIG. 1 is a side sectional view of an array type probe for explaining an embodiment of the present invention.
FIG. 2 is a partial front sectional view of an array type probe for explaining an embodiment of the present invention.
FIG. 3 is a side sectional view of an array type probe for explaining another embodiment of the present invention.
FIG. 4 is a side sectional view of an array type probe for explaining a conventional example.
FIG. 5 is a plan view of an array type probe for explaining a conventional example.
FIG. 6 is a partial front sectional view of an array-type probe for explaining a conventional example.
[Explanation of symbols]
1 electrode, 2 piezoelectric element, 3 backing material, 4 acoustic matching layer, 5 lead wire, 6, 8 metal foil, 7 conductive adhesive, 9 insulating adhesive.

Claims (1)

両主面に電極を有する複数の圧電素子をバッキング材上に並べて中央領域に音響整合層を設け、前記圧電素子の端部表面を電気的に共通接続してアース電位面とした配列型の超音波探触子において、前記複数の圧電素子の端部表面には導電性接着剤によって前記複数の圧電素子ごとに独立した金属箔が接合され、前記複数の圧電素子ごとに独立して接合された前記金属箔には半田によってリード線が共通接続されたことを特徴とする超音波探触子。A plurality of piezoelectric elements having electrodes on both main surfaces are arranged on a backing material, an acoustic matching layer is provided in the central region, and the end surfaces of the piezoelectric elements are electrically connected in common to form a ground potential surface. In the acoustic probe, an independent metal foil for each of the plurality of piezoelectric elements is bonded to the end surface of each of the plurality of piezoelectric elements by a conductive adhesive, and each of the plurality of piezoelectric elements is bonded independently. An ultrasonic probe characterized in that lead wires are commonly connected to the metal foil by solder .
JP2001159287A 2001-05-28 2001-05-28 Array-type ultrasonic probe Expired - Fee Related JP3929722B2 (en)

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JP4624659B2 (en) * 2003-09-30 2011-02-02 パナソニック株式会社 Ultrasonic probe
JP4520247B2 (en) * 2004-08-27 2010-08-04 パナソニック株式会社 Ultrasonic probe
JP4301298B2 (en) 2007-01-29 2009-07-22 株式会社デンソー Ultrasonic sensor and method for manufacturing ultrasonic sensor
JP5417633B2 (en) * 2009-12-01 2014-02-19 本多電子株式会社 Ultrasonic sensor

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