JP3921379B2 - Head support mechanism and magnetic disk apparatus - Google Patents

Head support mechanism and magnetic disk apparatus Download PDF

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Publication number
JP3921379B2
JP3921379B2 JP2001344019A JP2001344019A JP3921379B2 JP 3921379 B2 JP3921379 B2 JP 3921379B2 JP 2001344019 A JP2001344019 A JP 2001344019A JP 2001344019 A JP2001344019 A JP 2001344019A JP 3921379 B2 JP3921379 B2 JP 3921379B2
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Prior art keywords
thin film
film wiring
support mechanism
head support
metal body
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JP2003151114A5 (en
JP2003151114A (en
Inventor
耕作 若月
滋男 中村
直起 前田
忍 萩谷
敏明 津吉
延昌 西山
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株式会社日立グローバルストレージテクノロジーズ
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【0001】
【発明の属する技術分野】
本発明はコンピュータの外部記憶装置に用いられるヘッド支持機構体及びこのヘッド支持機構体を用いた磁気ディスク装置に関わる。
【0002】
【従来の技術】
ヘッド支持機構体において、金属体であるロードビームとロードビームと一体となったジンバル上に、フォトリソグラフィ技術により絶縁層を、メッキ等により薄膜配線パターンを形成する方法が特開平6-215513号公報に記載されている。また特開2001-256627号公報には薄膜配線パターンとグランドとの間の寄生容量を低減するために、フレクシャの薄膜配線パターン下方の金属体及びロードビームの一部を除去したヘッド支持機構体が記載されている。
【0003】
【発明が解決しようとする課題】
磁気ディスク装置の大容量高速転送化を実現するためには、ヘッド支持機構体のフレクシャ上に形成された読み書き用の2対の配線薄膜パターン間を十分に分離する必要があるが、それに伴い金属体の幅も広がるため全体的に曲げ剛性が高くなる傾向にある。しかし部分的にフレクシャの曲げ剛性を低く抑えなければ、ヘッド支持機構体本来の機能に支障をきたす場合がある。
【0004】
以下、その例について説明を行う。図5(a)は、中継FPC(Relay Flexible Printed Circuits)を用いてヘッド支持機構体のフレクシャとプリアンプを搭載したメインFPCとを電気的に接続する場合のHSA(Head Stack Assembly)の部分拡大平面図である。図5(b)はフレクシャ12のB−B断面図を、図5(c)はフレクシャ12のC−C断面図を示す。図5(b)及び(c)に示す様に従来例では、金属体11が2対の薄膜配線パターン9の側方に並進して2本形成する様に薄膜配線パターン9下部をエッチングで穴状に除去する。
【0005】
一般的に中継FPCはキャリッジアーム3に沿って取り付けられるため、フレクシャ12を、ヒンジ14またはロードビーム13に形成された荷重曲げ部14aの前、または後からベースプレート8の側方に引き出し、段差加工されたヒンジ14にレーザ溶接等によって固定する。ヒンジ14に段差加工する理由は、フレクシャ12の端子に接合された中継FPC5と磁気記録媒体7が接触しないよう十分な隙間を確保するためである。
【0006】
しかしながらフレクシャ12の引回し部とヒンジ14とをレーザ溶接する工程において、このフレクシャ12の引回し部12aの曲げ剛性が高いと密着力が弱くなって溶接の接合強度が低下したり、薄膜配線パターン9や絶縁層10に大きな応力やひずみが生じて、その結果、クラックの発生により破断する要因となる。また引回し部12aの張力によって、ヘッド支持機構体1に微小なねじれが生じてヘッド支持機構体1の振動特性が悪化し、磁気記録媒体7の所定トラック上に磁気ヘッドスライダ6を高速位置決めする際の障害となる場合がある。
【0007】
逆に曲げ剛性低すぎると、磁気記録媒体7の回転よって生ずる空気流によって引回し部12aが加振されて振動の要因となる。
【0008】
また、磁気ヘッドスライダ6に所定荷重を負加するヒンジ荷重曲げ部14a間のフレクシャ12の剛性が高いと荷重ばらつきの要因となり、その結果、磁気記録媒体7上に微小隙間を保って浮上する磁気ヘッドスライダ6の読み書き特性に支障を来たす場合がある。
【0009】
【課題を解決するための手段】
本発明はこの問題点を解決するために、ヘッドスライダの端子部に電気的に信号を接続して読み書きを行うための2対の薄膜配線パターンと、その薄膜配線パターンの下部に絶縁層を介して金属体がある構造のフレクシャを備えたヘッド支持機構体において、前記フレクシャの少なくとも一ヶ所に、前記金属体を前記2対の薄膜配線パターン間に並進して設けたものである。
【0010】
これにより、薄膜配線パターン間に設けた金属体の幅を所望の曲げ剛性になるように設定することにより、柔軟性を持たせることで組立性向上を図ると共に耐振動性との両立を図ることができる。
【0011】
また2対の薄膜配線パターン間に並進する金属体と、更に前記2対の薄膜配線パターン間に並進する金属体と交差し、かつ2対の薄膜配線パターン下を通る金属体で構成することにより、ヘッド支持構造体の超音波洗浄工程でキャビテーションによって生ずる可能性の有る薄膜配線パターンや絶縁層のクラックを防止することができる。
【0012】
【発明の実施の形態】
本発明の実施例を図面を用いて説明する。
【0013】
図1は本発明のヘッド支持機構体1を搭載した磁気ディスク装置の斜視図を示す。ヘッド支持機構体1の根元は、ヘッド支持機構体1を位置決め駆動するモータ2にキャリッジ3を介して固定されている。そしてヘッド支持機構体1の端子部(図示せず)には、ヘッド支持機構体1とプリアンプ(図示せず)を搭載したメインFPC4とを電気的に接続する中継FPC5が半田等で接合されている。一方、ヘッド支持機構体1の先端側には磁気情報を記録・再生する磁気ヘッドスライダ6が設けられており、回転する磁気記録媒体7上に微小隙間を保って浮上する。ここで、このヘッド支持機構体1と磁気ヘッドスライダ6を総称してヘッド組立体といい、またヘッド組立体、キャリッジ3、メインFPC4、中継FPC5を総称してHSA(Head Stack Assembly)という。
【0014】
図2は本発明の一実施例を示すHSAの部分拡大平面図及びフレクシャ12のB−B断面図である。図は、図1に示すヘッド支持機構体1の磁気記録媒体面対向側を示す。
【0015】
ヘッド支持機構体1は、ヘッド支持機構体1をキャリッジに勘合するベースプレート8と磁気ヘッドスライダ6を把持し、磁気ヘッドスライダ6の端子部(図示せず)に電気的に信号を接続するための2対の薄膜配線パターン9、絶縁層10、金属体11が一体になったフレクシャ12、そのフレクシャ12をレーザスポット溶接等で接合して支えるロードビーム13、磁気ヘッドスライダ6に荷重を負荷する荷重曲げ部14aとフレクシャ12の引回し部12aを保持する保持部14bが一体となったヒンジ14を有している。
【0016】
フレクシャ引回し部12aの金属体11は、図2(b)に示すように絶縁層10を介して薄膜配線パターン9間下面に設けられている。この金属体11は、金属体11上にフォトリソグラフィ技術やメッキで絶縁層10、薄膜配線パターン9を形成した後、エッチングにより所望の形状に除去して形成される。
【0017】
本発明の実施例では、2対の薄膜配線パターン9の側方に並進して形成される金属体11が1本であるため、従来例より曲げ剛性を低くすることができ、またその幅を所望の幅に設定することによってヒンジ保持部14bの段差量が高い場合でも対応することができる。
【0018】
図3の、図1の2対の薄膜配線パターン間に並進する金属体11と十字状に交差し、薄膜配線パターン9下を通る第2の金属体11aで構成されている。
【0019】
図4は図3の他の実施例で、図2の2対の薄膜配線パターン9と並進する金属体11と、薄膜配線パターン9間の金属体11と互い違いになるようT字状に交差し、かつそれぞれの薄膜配線パターン9下を通る第2の金属体11bで構成されている。
【0020】
これにより、ヘッド支持構造体1の超音波洗浄工程でキャビテーションによって生ずる可能性の有る薄膜配線パターン9や絶縁層10のクラックを防止することができる。
【0021】
ここで本実施例では、2対の薄膜配線パターン9と並進する金属体11と交差する第2の金属体11aの端面が開放された形状となっているが、部分的に隣の第2の金属体11aと繋がった形状でもよい。
【0022】
また本実施例では中継FPC5にてフレクシャ12とメインFPC4とを電気的に接続する方法を示したが、本発明はフレクシャ12とメインFPC4とを直接接続する方式、いわゆるロングテイル方式においても有効である。特に大容量高速転送化に対応するためにロングテイル方式で、かつフレクシャ12のヒンジ保持部14b付近にプリアンプを搭載する、いわゆるチップオンベース方式において有効である。
【発明の効果】
薄膜配線パターンの下の金属体を薄膜配線パターンの間に設け、その幅を所望の曲げ剛性になるように設定することにより、柔軟性を持たせることで組立性向上を図ると共に耐振動性との両立を図ることができる。
また、ヘッド支持構造体の超音波洗浄工程でキャビテーションによって生ずる可能性の有る薄膜配線パターンや絶縁層のクラックを防止することもできる。
【図面の簡単な説明】
【図1】ヘッド支持機構体を搭載した磁気ディスク装置の斜視図である。
【図2】第1の実施例のHSA部分拡大平面図及びフレクシャ断面図である。
【図3】他の実施例のHSA部分拡大平面図及びフレクシャ断面図である。
【図4】他の実施例の部分拡大HSA平面図及びフレクシャ断面図である。
【図5】従来のHSA部分拡大平面図及びフレクシャ断面図である。
【符号の説明】
1…ヘッド支持機構体、2…モータ、3…キャリッジ、4…メインFPC、5…中継FPC、6…磁気ヘッドスライダ、7…磁気記録媒体、8…ベースプレート、9…薄膜配線パターン、10…絶縁層、11…金属体、11a…第2の金属体、12…フレクシャ、12a…引回し部、13…ロードビーム、14…ヒンジ、14a…荷重曲げ部、14b…保持部。
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a head support mechanism used in an external storage device of a computer and a magnetic disk device using the head support mechanism.
[0002]
[Prior art]
Japanese Patent Laid-Open No. 6155513/1990 discloses a method of forming an insulating layer by a photolithography technique and a thin film wiring pattern by plating or the like on a metal beam load beam and a gimbal integrated with the load beam in a head support mechanism. It is described in. Japanese Patent Laid-Open No. 2001-256627 discloses a head support mechanism body in which a metal body under a thin film wiring pattern of a flexure and a part of a load beam are removed in order to reduce a parasitic capacitance between the thin film wiring pattern and a ground. Are listed.
[0003]
[Problems to be solved by the invention]
In order to realize large capacity and high speed transfer of the magnetic disk device, it is necessary to sufficiently separate the two pairs of wiring thin film patterns for reading and writing formed on the flexure of the head support mechanism body. Since the width of the body also widens, the bending rigidity tends to increase as a whole. However, unless the flexural rigidity of the flexure is partially suppressed, the original function of the head support mechanism may be hindered.
[0004]
The example will be described below. FIG. 5A shows a partially enlarged plane of HSA (Head Stack Assembly) when the flexure of the head support mechanism is electrically connected to the main FPC equipped with the preamplifier using relay FPC (Relay Flexible Printed Circuits). FIG. 5B is a cross-sectional view of the flexure 12 taken along the line BB, and FIG. 5C is a cross-sectional view of the flexure 12 taken along the line CC. As shown in FIGS. 5B and 5C, in the conventional example, the lower part of the thin film wiring pattern 9 is perforated by etching so that two metal bodies 11 are translated and formed sideways of the two pairs of thin film wiring patterns 9. Remove in the shape of
[0005]
Since the relay FPC is generally attached along the carriage arm 3, the flexure 12 is pulled out to the side of the base plate 8 before or after the load bending portion 14a formed on the hinge 14 or the load beam 13 to form a step. The hinge 14 is fixed by laser welding or the like. The reason why the hinge 14 is stepped is to ensure a sufficient gap so that the relay FPC 5 joined to the terminal of the flexure 12 and the magnetic recording medium 7 do not come into contact with each other.
[0006]
However, in the process of laser welding the routing portion of the flexure 12 and the hinge 14, if the bending rigidity of the routing portion 12a of the flexure 12 is high, the adhesion strength becomes weak and the welding joint strength decreases, or the thin film wiring pattern 9 and the insulating layer 10 are subjected to large stresses and strains. Further, the tension of the lead portion 12 a causes a slight twist in the head support mechanism 1 to deteriorate the vibration characteristics of the head support mechanism 1, thereby positioning the magnetic head slider 6 on a predetermined track of the magnetic recording medium 7 at a high speed. May be an obstacle.
[0007]
On the other hand, if the bending rigidity is too low, the routing portion 12a is vibrated by the air flow generated by the rotation of the magnetic recording medium 7 and causes vibration.
[0008]
In addition, if the flexure 12 between the hinge load bending portions 14a that applies a predetermined load to the magnetic head slider 6 has a high rigidity, it causes a load variation. There are cases where the read / write characteristics of the head slider 6 are hindered.
[0009]
[Means for Solving the Problems]
In order to solve this problem, the present invention provides two pairs of thin film wiring patterns for electrically reading and writing by electrically connecting signals to the terminal portion of the head slider, and an insulating layer below the thin film wiring pattern. In the head support mechanism having a flexure having a structure with a metal body, the metal body is provided in translation between the two pairs of thin film wiring patterns in at least one of the flexures.
[0010]
As a result, by setting the width of the metal body provided between the thin-film wiring patterns so as to have a desired bending rigidity, it is possible to improve the assemblability by providing flexibility and to achieve both vibration resistance. Can do.
[0011]
In addition, a metal body that translates between the two pairs of thin film wiring patterns, and a metal body that intersects the two pairs of thin film wiring patterns and passes under the two pairs of thin film wiring patterns. Further, it is possible to prevent cracks in the thin film wiring pattern and the insulating layer that may be generated by cavitation in the ultrasonic cleaning process of the head support structure.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Embodiments of the present invention will be described with reference to the drawings.
[0013]
FIG. 1 is a perspective view of a magnetic disk drive equipped with a head support mechanism 1 of the present invention. The base of the head support mechanism 1 is fixed to a motor 2 for positioning and driving the head support mechanism 1 via a carriage 3. A relay FPC 5 that electrically connects the head support mechanism 1 and the main FPC 4 on which a preamplifier (not shown) is mounted is joined to a terminal portion (not shown) of the head support mechanism 1 with solder or the like. Yes. On the other hand, a magnetic head slider 6 for recording / reproducing magnetic information is provided on the front end side of the head support mechanism 1 and floats on the rotating magnetic recording medium 7 with a small gap. Here, the head support mechanism 1 and the magnetic head slider 6 are collectively referred to as a head assembly, and the head assembly, the carriage 3, the main FPC 4, and the relay FPC 5 are collectively referred to as HSA (Head Stack Assembly).
[0014]
FIG. 2 is a partially enlarged plan view of the HSA and a sectional view taken along the line BB of the flexure 12 showing an embodiment of the present invention. The figure shows the magnetic recording medium surface facing side of the head support mechanism 1 shown in FIG.
[0015]
The head support mechanism 1 grips a base plate 8 and a magnetic head slider 6 that engage the head support mechanism 1 with a carriage, and electrically connects a signal to a terminal portion (not shown) of the magnetic head slider 6. A flexure 12 in which two pairs of thin-film wiring patterns 9, an insulating layer 10, and a metal body 11 are integrated, a load beam 13 that supports the flexure 12 by joining it by laser spot welding, and a load that applies a load to the magnetic head slider 6. The bending part 14a and the holding part 14b which hold | maintains the routing part 12a of the flexure 12 have the hinge 14 integrated.
[0016]
The metal body 11 of the flexure routing portion 12a is provided on the lower surface between the thin film wiring patterns 9 via the insulating layer 10 as shown in FIG. The metal body 11 is formed by forming the insulating layer 10 and the thin film wiring pattern 9 on the metal body 11 by photolithography technique or plating, and then removing it into a desired shape by etching.
[0017]
In the embodiment of the present invention, the number of the metal bodies 11 formed by translation to the side of the two pairs of thin film wiring patterns 9 is one, so that the bending rigidity can be made lower than that of the conventional example, and the width thereof can be reduced. By setting the desired width, it is possible to cope with a case where the level difference of the hinge holding portion 14b is high.
[0018]
3 includes a second metal body 11a that crosses the metal body 11 that translates between the two pairs of thin film wiring patterns in FIG.
[0019]
FIG. 4 shows another embodiment of FIG. 3, which crosses in a T shape so as to alternate with the metal body 11 that translates with the two pairs of thin film wiring patterns 9 of FIG. The second metal body 11b passes under each thin film wiring pattern 9.
[0020]
As a result, cracks in the thin film wiring pattern 9 and the insulating layer 10 that may occur due to cavitation in the ultrasonic cleaning process of the head support structure 1 can be prevented.
[0021]
Here, in this embodiment, the end face of the second metal body 11a intersecting with the metal body 11 that translates with the two pairs of thin film wiring patterns 9 has a shape that is open. The shape connected with the metal body 11a may be sufficient.
[0022]
In the present embodiment, the method of electrically connecting the flexure 12 and the main FPC 4 by the relay FPC 5 is shown. However, the present invention is also effective in a system in which the flexure 12 and the main FPC 4 are directly connected, so-called long tail system. is there. In particular, it is effective in a so-called chip-on-base system in which a long tail system and a preamplifier are mounted in the vicinity of the hinge holding portion 14b of the flexure 12 in order to cope with large capacity and high speed transfer.
【The invention's effect】
By providing the metal body under the thin film wiring pattern between the thin film wiring patterns and setting the width so as to have the desired bending rigidity, it is possible to improve the assembling property and improve the vibration resistance. Can be achieved.
It is also possible to prevent cracks in the thin film wiring pattern and the insulating layer that may be generated by cavitation in the ultrasonic cleaning process of the head support structure.
[Brief description of the drawings]
FIG. 1 is a perspective view of a magnetic disk device on which a head support mechanism is mounted.
FIG. 2 is an HSA partial enlarged plan view and a flexure sectional view of the first embodiment.
FIGS. 3A and 3B are an HSA partial enlarged plan view and a flexure sectional view of another embodiment. FIGS.
FIG. 4 is a partially enlarged HSA plan view and a flexure cross-sectional view of another embodiment.
FIG. 5 is a conventional HSA partial enlarged plan view and flexure cross-sectional view.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Head support mechanism body, 2 ... Motor, 3 ... Carriage, 4 ... Main FPC, 5 ... Relay FPC, 6 ... Magnetic head slider, 7 ... Magnetic recording medium, 8 ... Base plate, 9 ... Thin film wiring pattern, 10 ... Insulation Layer 11, metal body, 11 a, second metal body, 12, flexure, 12 a, routing portion, 13, load beam, 14, hinge, 14 a, load bending portion, 14 b, holding portion.

Claims (4)

磁気ヘッドスライダの端子部に電気的に信号を接続する2対の薄膜配線パターンと、この薄膜配線パターンに設けた絶縁層と、この絶縁層を介し前記2対の薄膜配線パターン間にこの薄膜配線パターンと並進する金属体とを有する構造のフレクシャを備えたヘッド支持機構体。A thin film wiring pattern of the two pairs of connecting electrically the signal to the terminal portion of the magnetic head slider, an insulating layer formed on the thin film wiring patterns, the thin-film wiring between thin film wiring pattern of the two pairs via the insulating layer head support mechanism having a Furekushi multichemistry structure having a metal body to translate the pattern. 前記薄膜配線パターン下を通り、前記金属体と十字状に交差する第2の金属体を更に備えた請求項1記載のヘッド支持機構体。2. The head support mechanism according to claim 1, further comprising a second metal body that passes under the thin film wiring pattern and intersects the metal body in a cross shape. 前記薄膜配線パターン下を通り、前記金属体とT字状に交差する第2の金属体を更に備えた請求項1記載のヘッド支持機構体。The head support mechanism according to claim 1, further comprising a second metal body that passes under the thin film wiring pattern and intersects the metal body in a T-shape. 記録媒体に磁気情報を記録・再生する磁気ヘッドスライダと、この磁気ヘッドスライダを支持するヘッド支持機構体と、キャリッジを介してこのヘッド支持機構体を位置決め駆動するモータとを備えた磁気ディスク装置であって、
前記ヘッド支持機構体は磁気ヘッドスライダの端子部に電気的に信号を接続する2対の薄膜配線パターンと、この薄膜配線パターンに設けた絶縁層と、この絶縁層を介し前記2対の薄膜配線パターン間でこの薄膜配線パターンと並進する金属体と、この薄膜配線パターン下を通り前記金属体と十字状に交差する第2の金属体とがある構造のフレクシャとを備えた磁気ディスク装置。
A magnetic disk device comprising a magnetic head slider for recording / reproducing magnetic information on a recording medium, a head support mechanism for supporting the magnetic head slider, and a motor for positioning and driving the head support mechanism via a carriage. There,
The head support mechanism body and the thin film wiring pattern of two pairs of connecting electrically the signal to the terminal portion of the magnetic head slider, an insulating layer formed on the thin film wiring patterns, the thin film wiring of the two pairs via the insulating layer A magnetic disk drive comprising: a metal body that translates between the thin film wiring patterns between the patterns ; and a flexure having a structure in which a second metal body that passes under the thin film wiring pattern and intersects the metal body in a cross shape is provided.
JP2001344019A 2001-11-09 2001-11-09 Head support mechanism and magnetic disk apparatus Expired - Fee Related JP3921379B2 (en)

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JP3946167B2 (en) 2003-06-02 2007-07-18 日本発条株式会社 Disk drive suspension
JP4031401B2 (en) 2003-08-05 2008-01-09 日本発条株式会社 Disk drive suspension
JP4363658B2 (en) 2005-05-27 2009-11-11 日本発條株式会社 Head suspension
JP4640802B2 (en) 2005-07-07 2011-03-02 日東電工株式会社 Suspension board with circuit
JP2007272984A (en) 2006-03-31 2007-10-18 Hitachi Global Storage Technologies Netherlands Bv Disk drive device, and head assembly used for the device
JP4865453B2 (en) 2006-08-30 2012-02-01 日東電工株式会社 Wiring circuit board and manufacturing method thereof
JP2008282995A (en) 2007-05-10 2008-11-20 Nitto Denko Corp Wiring circuit board
JP4640852B2 (en) * 2007-11-12 2011-03-02 日東電工株式会社 Method for manufacturing printed circuit board
JP4640853B2 (en) * 2007-11-12 2011-03-02 日東電工株式会社 Printed circuit board
US8758910B2 (en) 2010-06-29 2014-06-24 Dai Nippon Printing Co., Ltd. Substrate for suspension, and production process thereof
JP2014229324A (en) 2013-05-20 2014-12-08 Tdk株式会社 Microwave assisted magnetic recording/reproducing apparatus

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