JP3896381B2 - Position alignment system using XYθ stage - Google Patents

Description

The present invention is a camera used in the field of FA and the like, which measures XYθ while measuring a reference mark on an XYθ stage that performs parallel movement and rotational movement or a workpiece (hereinafter also referred to as an object to be imaged) mounted on the XYθ stage. A system that performs position alignment of an object to be imaged mounted on a stage or an XYθ stage, and that performs setup and adjustment of parameters at the time of startup of the position alignment system prior to calibration and original positioning The reference mark candidate graphic pattern is included in the camera field of view when capturing the reference mark in the camera field of view for the position alignment operation of the object to be imaged on the XYθ stage or automatically registering the reference mark. Hands to fully automate the capture of fiducial mark candidate graphic patterns in the camera field of view The present invention relates to a novel alignment system having steps.
Specifically, in the calculation control system in the position alignment system, the setting of the reference mark, which is a basic specification for calibrating the position alignment system by the XYθ stage, the translation axis of the XYθ stage and the positive direction of the rotational movement Adjustment with the predetermined translation axis and the positive direction of rotational movement (adjustment of the degree of freedom of the axis) and whether each of the plurality of cameras is on the front or back side of the XYθ stage is determined for each camera according to the result. Adjustment of the degree of freedom of the axis performed with the calculation control system, and further, not only the automatic search for the reference mark candidate but also the position of the object to be imaged in accordance with the calibration and the sequential supply of the object to be imaged to the XYθ stage For alignment operations, if the fiducial mark cannot be found within the camera field of view, the camera field of view is moved. Search acquisition of the reference mark by, relates to means and a method to realize a novel alignment system and the functions provided with the means for automatically possible without intervention human intervention.

In an XYθ stage that performs parallel movement in the XY direction and rotational movement in the θ direction, or a position alignment system for an object to be imaged that is mounted on the XYθ stage, a plurality of movement amounts in the XYθ direction and a plurality of positions arranged opposite to the XYθ stage The movement of the XYθ stage to cause the XYθ stage to perform a desired movement while measuring the relationship with the movement amount on the captured image of the camera and observing the movement of the object to be imaged mounted on the XYθ stage or the XYθ stage with the camera Previously, it was an item that had to be specified or set in advance prior to calibration to find out the relationship between the direction of movement and the amount of movement on the captured image of the camera relative to the direction and amount of movement, and to adjust various conditions. For the method or means for bringing the following three items and reference marks into the field of view of the camera: Was the situation shown below.

Regarding registration of fiducial marks used as targets for movement measurement, fiducial marks with special shapes are prepared in advance at least two special positions on the object to be imaged that are mounted on the XYθ stage, and two or more prepared The operator decides the arrangement of two or more cameras visually and manually so that each of the fiducial marks can enter the field of view of one camera or each of two or more cameras at the same time. A method of registering the reference mark by causing it to be recognized by the position alignment system of the XYθ stage through an operator is common.
Further, as a slightly advanced method, XYθ can be obtained by a method in which an operator roughly determines a registerable mark candidate visually on the captured images of two or more cameras arranged arbitrarily and points the mark on the screen with a pointer. After manually specifying in the stage position alignment system, the image processing technology is used to check whether or not a predetermined condition as a reference mark is met, and if it matches, it is registered as a reference mark. However, in any of the above methods, the operator prepares a reference mark and visually matches the position of the camera or visually identifies and designates the reference mark even if it is roughly visible. This is troublesome and requires a certain skill.
Further, as a further advanced method, an example in which a mark shape characteristic that meets a predetermined condition is automatically registered as a reference mark by examining the feature of the mark shape without human intervention is disclosed in JP-A-11-307567. Is disclosed. In this example, the reference mark extraction method is such that, for a plurality of small region images in a predetermined region on the surface of the semiconductor chip, the dispersion value of the bimodal histogram included in the density histogram of the small region image is lower than a predetermined threshold value. Extracting a small area that is large and has a normalized correlation with another small area that is a predetermined distance away from the small area and lower than a predetermined threshold, and uses the image pattern of the entire small area as a reference mark (template) It is.

Further, regarding the relative arrangement, direction and sign of the coordinate axes X and Y of the XYθ stage, and the direction and sign of the rotation angle θ (these are referred to as axial degrees of freedom of the XYθ stage), the mechanism of the XYθ stage and the design of the final drive circuit section The actual movement direction of the XYθ stage and the movement direction on the captured image of the camera are set so that the axial freedom degree of the XYθ stage determined in the position alignment system matches the axial freedom freely determined by With regard to adjusting the direction and sign on the control software inside the position alignment system while observing, conventionally, the operator determines the setting contents after checking and sets the determination contents in the position alignment system. The specified input was performed. This is also troublesome for humans and requires a certain level of skill.
The position alignment system manufacturer automatically determines the degree of freedom determined in an undetectable situation and automatically adjusts the direction and sign on the internal control software. I don't see.

In addition, it is confirmed and judged whether the camera is arranged on the front or back side of the XYθ stage so as to face the XYθ stage, and the movement of the XYθ stage on the captured image of the camera regardless of the arrangement. It was necessary to adjust the internal direction and sign of the position alignment system so that the moving directions were the same.
Regarding this adjustment as well, the current situation is performed by a skilled person, and there is no example of automatic adjustment.

Also, a reference mark for searching for and registering a reference mark on the XYθ stage or the object to be imaged on the XYθ stage, which is necessary for the setting of the above three items, the subsequent calibration, and the position alignment operation of the workpiece (imaged object). As a method of searching for an area where a candidate may exist and bringing it into the camera field of view, or a method of bringing a reference mark that has already been registered and exists on the object to be picked up into the camera field of view, an operator uses an XYθ stage. The positions of a plurality of cameras are manually moved and adjusted so that the field of view of the camera captures an area where a reference mark candidate may exist or a reference mark.
This adjustment is also a problem because it requires skill and time, but is not automated.
Therefore, in the conventional position alignment system using the XYθ stage, means for automatically registering reference marks, means for automatically adjusting and adjusting the degree of freedom of axes, means for automatically determining and adjusting the camera arrangement, and reference marks, etc. Combined with means for automatically capturing the search pattern, means for completely automating the capture of the reference mark in the camera field of view for the setup operation when starting up the system and the position alignment operation of the object to be imaged on the XYθ stage What was provided did not exist.
Therefore, when operating the position alignment system with the XYθ stage, it is necessary to set and adjust the specifications and conditions when starting the system, and to change the reference pattern that accompanies switching of the workpiece (object to be imaged) that occurs frequently during actual operation. In the setup work such as setting / adjustment of the corresponding conditions, the skill of the operator was required, errors were likely to occur, and time was required. In addition, during and after the setup work, the camera position adjustment, etc., to fully capture the reference mark on the workpiece supplied on the XYθ stage in the field of view of the camera by manual operation of the operator It was a situation that had to be done.
JP-A-11-307567 At present, this type of content has not been found as prior patent literature.

The problems to be solved by the invention are essentially the calibration of the position alignment system by the XYθ stage and the setting of the specifications at the time of starting the system prior to the operation, as well as the work that frequently occurs during the actual operation (the object to be imaged) An object is to provide a position alignment system using an XYθ stage having means capable of setting various conditions corresponding to a change of a reference pattern accompanying switching of an object without manual intervention.
Specifically, in the position alignment system of the XYθ stage, the relationship between the amount of movement in the XYθ direction and the amount of movement on the captured image of the camera placed opposite to the XYθ stage is measured, and the movement of the XYθ stage is measured by the camera. Prior to performing calibration to find out the relationship between the moving direction and moving amount of the XYθ stage for moving the XYθ stage while looking at the moving direction and moving amount on the captured image of the camera with respect to the moving amount, and to adjust various conditions. In regard to the three items described in the background art that had to be registered / designated or adjusted / set in advance by humans,
A method / means for automatically registering a reference mark candidate as a reference mark for movement measurement without human intervention (hereinafter also referred to as a reference mark automatic registration method or a reference mark automatic registration means),
Regarding the relative arrangement of the coordinate axis XY of the XYθ stage and the direction and sign of the coordinate axis XY and the rotation angle θ (these are referred to as the axial degrees of freedom of the XYθ stage), the XYθ stage is arbitrarily determined by the mechanism of the XYθ stage and the design of the final drive circuit unit The actual movement direction of the XYθ stage on the captured image of the camera so that the axial freedom of the XYθ stage determined for calculation and control within the position alignment system matches the axial freedom of the mechanism. A method / means for automatically adjusting / setting the position alignment system while watching (hereinafter also referred to as an automatic degree of freedom adjustment method or an automatic degree of freedom adjustment means),
The camera automatically determines whether the position of the camera relative to the XYθ stage is on the front or back side of the XYθ stage. Whatever movement of the XYθ stage is on the captured image between multiple cameras, regardless of which side the camera is on The method / means for automatically adjusting the position alignment system so that it can be seen by the internal calculation / control system if the same movement is performed (hereinafter referred to as the camera placement automatic judgment method or the camera placement automatic judgment means). Providing)
Further, a graphic pattern that automatically satisfies a condition to be extracted as a candidate for a reference mark on the XYθ stage or an object to be imaged on the XYθ stage and a reference mark that is automatically registered (hereinafter also referred to as a search pattern) are displayed on the camera. Providing a method / means (hereinafter also referred to as a search pattern automatic capturing method or a search pattern automatic capturing means) that is automatically brought into the visual field.
Of course, even if it is not a position alignment system using an XYθ stage capable of performing all of the above four methods, it needs to be implemented by any one of the above four methods depending on the design of the position alignment system. If there is nothing, the essential problem of the present invention is achieved without means for realizing the method. In other words, there is no need for human intervention, which is an essential problem of the present invention. If a position alignment system using a stage can be achieved, it is also an object of the present invention to realize a position alignment system using an XYθ stage having means for realizing a limited method of the above methods. It is.

Position alignment system using an XYθ stage that performs position alignment of an object to be imaged while measuring a reference mark on a workpiece (hereinafter also referred to as an object to be imaged) mounted on an XYθ stage that performs parallel movement and rotation In
Select a figure pattern with the possibility of a reference mark from the captured image of the camera, and look at the degree of coincidence between the selected figure pattern and the figure pattern after a predetermined movement to this figure pattern. A reference mark automatic registration means for automatically finding a graphic pattern that satisfies the reference mark condition from the object and registering it in the storage unit of the position alignment system;
For a certain movement of the XYθ stage, it is assumed that the movement direction is a control unit that calculates the movement coordinates inside the position alignment system by looking at the movement direction measured by the captured image of the reference camera. An axis degree-of-freedom automatic adjustment unit that automatically adjusts the code for the direction of the coordinate by an adjustment unit provided in the control unit corresponding to the reference camera so that the coordinate calculation is recognized as the movement direction of the movement. ,
With respect to an assumed movement of the XYθ stage, the movement direction (hereinafter also referred to as the reference movement direction) measured by the image captured by the reference camera and the image captured by a camera other than the reference (hereinafter also referred to as a non-reference camera) By comparing the measured movement directions (hereinafter also referred to as non-reference movement directions), even if the reference camera and the non-reference camera are arranged on different sides with respect to the XYθ stage, the reference movement direction and the non-reference movement The coordinate is calculated by the adjusting means provided in the control unit corresponding to each non-reference camera so that the direction is recognized as the same movement direction in the control unit that calculates the movement coordinate inside the position alignment system. Camera placement automatic determination / adjustment means that automatically adjusts the sign for the direction of
When searching for a graphic pattern on the work that satisfies the conditions of the reference mark in the automatic reference mark registration stage or when searching for a reference mark registered in the storage unit of the position alignment system, If this is not possible within the field of view, the camera's field of view is automatically shifted to an area adjacent to the current field of view to meet the fiducial mark condition or a registered fiducial mark (hereinafter these are combined, It is equipped with all four means of search pattern automatic capture means that repeats searching for a search pattern and captures the search pattern in the camera's field of view. Automate the setup work to make adjustments.
Alternatively, a part of the four means and an alternative means for the remaining means can be provided to automate the setup work for setting and adjusting the specifications at the start-up prior to calibration. As for the alternative means, the automatic means corresponding to any of the above four means is made from the beginning so that it is not necessary to set or adjust the specifications at the time of start-up by another automatic means. There are means that are originally unnecessary and omitted, such as when using a system that is specially designed so that it does not need to be specifically adjusted during assembly and commissioning of the position alignment system. That is, a non-existing means (zero) can be provided.
By using the position alignment system using the XYθ stage having the above-described configuration, the manual operation of the operator is not required at the time of setting up the system or in the position alignment operation of the work for aligning the work with reference to the reference mark. Automation of the position alignment system using the XYθ stage, which is the main object of the invention, can be achieved. Each of the above means is an important technique having a common significance for the automation.

The following method is taken as a more specific method used for the reference mark automatic registration means.
From the image patterns in the image captured by the camera, a single figure pattern having a predetermined size or less or a combination figure pattern by geometrical arrangement of a plurality of single figure patterns (hereinafter, these patterns are first selected. One or more sets are selected, and the original pattern from the first selected pattern (hereinafter also referred to as the original graphic pattern) and the graphic pattern after the predetermined movement (hereinafter referred to as the pattern) Select one or more graphic patterns (hereinafter also referred to as second selection patterns) that can be regarded as geometrically congruent with each other, and select geometric patterns from the second selection patterns. The standard figure is the single figure pattern with the highest degree of scientific congruence or a combination figure pattern of multiple individual figure patterns selected by a predetermined method. It is to take the reference mark automatic registration method for registering in the storage unit of the position alignment system as click.

In the fiducial mark automatic registration method, the predetermined method may be geometrically performed between each single graphic pattern selected and combined and each single graphic pattern not selected and removed from the object of combination. A method of selecting a plurality of single figure patterns from the second selection pattern so as to satisfy the condition that there is no state where the difference in the degree of congruence is smaller than a predetermined degree.

  Further, in the reference mark automatic registration method, the predetermined movement can be a rotation of a predetermined angle with respect to the first selected pattern, or an inversion with reference to a straight line passing through the center of gravity of the figure.

A more specific first method used for the axis movement direction code automatic adjustment means (axial degree of freedom automatic adjustment means) is:
Axis degrees of freedom automatic adjustment means,
The drive (hereinafter also referred to as drive 1) in the control unit of the position alignment system for causing the XYθ stage to perform a certain assumed movement (hereinafter also referred to as movement 1) related to the direction of the XY coordinates and the rotational direction. With respect to the drive (hereinafter also referred to as drive 2) in the control unit of the position alignment system for performing a certain assumed movement (hereinafter also referred to as movement 2), the movement of the XYθ stage is determined by the captured image of the reference camera. By measuring, whether or not the change in the direction of movement of the XYθ stage with respect to drive 1 matches the change in the direction of movement 1 and the direction of movement of the XYθ stage with respect to drive 2 is the direction of movement 2 Determine whether they match,
If the method of changing the direction of movement of the XYθ stage relative to drive 1 is different from that of movement 1, the control unit recognizes that this is the same in the control unit and performs coordinate calculation so that the control unit corresponds to the reference camera. By automatically adjusting the sign for the direction of the coordinate axis used for the movement coordinate calculation of the XYθ stage by the X code adjustment parameter or the Y code adjustment parameter for adjusting the sign of the direction of the provided coordinate axis,
If the direction of movement of the XYθ stage with respect to drive 2 is different from the direction of movement 2, the control unit recognizes this as the same and the coordinate calculation is performed so that the control unit corresponds to the reference camera. It is a means for automatically adjusting the sign for the direction of rotation used for the calculation of the movement coordinates of the XYθ stage by the θ sign adjustment parameter for adjusting the sign of the rotation direction provided.

A more specific second method used for the axial movement direction code automatic adjustment means (axial freedom degree automatic adjustment means) may be the following method.
Axis degrees of freedom automatic adjustment means,
The reference measurement point on the captured image of the reference camera when the alignment control unit of the position alignment system drives the X-axis drive device of the XYθ stage in the positive direction while the reference measurement point of the XYθ stage is at the shift reference position. Movement direction (hereinafter also referred to as X shift direction) and the movement direction of the reference measurement point on the captured image of the camera when the Y-axis drive device of the XYθ stage is driven in the positive direction (hereinafter also referred to as Y shift direction). When the relative relationship is a predetermined relationship in the calculation / control system inside the position alignment system, the degree of freedom of the translation axis of the XYθ stage matches the degree of freedom of the translation axis inside the position alignment system. (Hereinafter also referred to as a parallel movement axis degree-of-freedom coincidence relationship). If not, adjust the X sign adjustment parameter for adjusting the positive direction of the X axis, or Y for adjusting the positive direction of the Y axis, installed in the storage unit inside the position alignment system. By adjusting the sign adjustment parameter, make sure that the translational axis freedom degree coincides,
In a state where the reference measurement point of the XYθ stage is at the θ reference position, the position of the reference measurement point on the captured image of the reference camera when the XYθ stage is rotated by a predetermined amount in the positive direction (hereinafter also referred to as + θ position). And the position of the reference measurement point on the captured image (hereinafter also referred to as -θ position) when the XYθ stage is rotated by a predetermined amount in the negative direction, respectively, and a straight line that passes from the θ reference position and passes through the + θ position and the θ reference position To a straight line (hereinafter also referred to as a reference line) having a direction toward a θ reference position passing through a position (hereinafter also referred to as a predetermined position) obtained by a predetermined method in an area between the straight line passing through the -θ position. On the other hand, when it is on the side determined in advance in the position alignment system when viewed in the direction of the reference line, the degree of freedom of rotational movement of the XYθ stage and the degree of freedom of rotational movement inside the position alignment system. When it is determined that it is in agreement (hereinafter also referred to as a rotational movement degree-of-freedom coincidence relationship) and that state is maintained, and exists on the side opposite to the side determined in advance within the position alignment system, It is a means for adjusting the θ sign adjustment parameter for adjusting the positive direction of rotational movement so that the rotational movement degrees of freedom coincide with each other.

  In a more specific method used for the above-described axis movement direction code automatic adjusting means (axial degree of freedom automatic adjusting means), the predetermined position can be placed on a straight line connecting the + θ position and the −θ position.

  Further, the predetermined position may be the center of a circle passing through the reference θ position, the + θ position, and the −θ position.

The following method is taken as a specific method used for the camera arrangement automatic determination / adjustment means.
Camera placement automatic judgment / adjustment means
An image captured by the reference camera with respect to a certain movement (hereinafter also referred to as movement 3) related to the XY coordinate direction of the XYθ stage or a certain assumed movement (hereinafter also referred to as movement 4) related to the rotation direction. 3 by comparing the movement (hereinafter, also referred to as non-reference movement) measured by the captured image of a camera other than the reference (hereinafter also referred to as non-reference camera) with the movement measured by the above (hereinafter also referred to as reference movement). The direction of the reference movement corresponding to the movement 3 is different from the direction of the non-reference movement corresponding to the movement 3 or the direction of the reference movement corresponding to the movement 4 and the non-reference movement corresponding to the movement 4 If the directions are different, the control unit recognizes that the method of changing the direction of the reference movement corresponding to the movement 3 is the same as the method of changing the direction of the non-standard movement corresponding to the movement 3 ( In other words, even if the non-reference camera is arranged on the same side as the reference camera and the XYθ stage, it is recognized that the non-reference camera is arranged on the same side), so that the coordinate calculation is performed. In other words, it is a means for automatically adjusting the code for the direction of the coordinate axis used for the movement coordinate calculation in the control unit by the X code adjustment parameter or the Y code adjustment parameter provided in the control unit.

In addition, camera placement automatic judgment / adjustment means,
When a plurality of cameras are arranged opposite to the XYθ stage from different sides, the translational axis freedom degree on the captured image of each camera corresponding to each camera inside the position alignment system and A code adjustment parameter set that makes it possible to adjust the rotational movement degree of freedom, and for each camera, the parallel movement in the axial movement direction code automatic adjustment method described in the method of realizing the axial freedom degree automatic adjustment means The translational axis of the XYθ stage and the rotational freedom of the XYθ stage and the translational axis of the position alignment system, either by the method of making the axial degree of freedom coincident or the method of making the rotational movement degree of freedom coincident And whether or not the degrees of freedom of rotational movement match, and if the degrees of freedom do not match, the code adjustment parameters It is also possible to adjust the parameter set so as to make the degree of freedom of the position alignment system and the degree of freedom of the XYθ stage coincide with each other for the captured images of all cameras.

In addition, camera placement automatic judgment / adjustment means,
A reference camera for a certain assumed movement (hereinafter also referred to as movement 3) related to the direction of the XY coordinates of the XYθ stage or a certain assumed movement (hereinafter also referred to as movement 4) related to the rotation direction. By comparing the movement measured by the captured image (hereinafter also referred to as reference movement) and the movement measured by the captured image of a camera other than the reference (hereinafter also referred to as non-reference camera) (hereinafter also referred to as non-reference movement) The method of changing the direction of the reference movement corresponding to the movement 3 is different from the way of changing the direction of the non-reference movement corresponding to the movement 3, or the direction of the reference movement corresponding to the movement 4 and the non-corresponding to the movement 4 When the direction of the reference movement is different, the control unit thereafter assumes that the way of changing the direction of the reference movement corresponding to the movement 3 and the way of changing the direction of the non-standard movement corresponding to the movement 3 are the same. The non-reference camera is set on the same side as the reference camera or on a different side with respect to the XYθ stage so that the coordinates can be calculated. Adjust the camera adjustment parameter provided in the control unit in the position alignment system, and then use the sign adjustment parameter and the camera adjustment parameter provided in the alignment control unit that substantially correspond to the reference camera to determine the direction of movement. The XYθ stage can be recognized by the alignment control unit inside the position alignment system even if the camera is observed to move in different directions for each camera. it can.

The following method is taken as a specific method used for the search pattern automatic capturing means.
The alignment control unit of the position alignment system searches for a graphic pattern that satisfies the reference mark condition or a reference mark registered in the position alignment system (hereinafter, also referred to as a search pattern) using a captured image of the camera. When the search pattern cannot be found in the current camera field of view and the search is not possible within the current field of view of the camera, the camera field of view is automatically moved out of the current field of view in a predetermined manner. The search pattern is automatically searched for by repeatedly shifting the search pattern and capturing the search pattern within the field of view of the camera.

  Here, a predetermined method is a method of moving the field of view in a spiral manner to a region adjacent to the current field of view within a predetermined region around the current field of view by moving the XYθ stage (FIG. 11) or a method of moving to a region adjacent to the current field of view in a raster scan (not shown).

Further, when it is desired to capture a search pattern in each of the fields of view of the two cameras, the above-described predetermined method can be used for the first camera, when a search pattern cannot be found in the field of view of the current camera. The search pattern is captured in the field of view of the first camera by the above method. For the second camera, if the search pattern cannot be found in the current field of view of the second camera, the search pattern is captured. The XYθ stage is rotated around a predetermined position in the field of view of the first camera, and the field of view of the second camera is moved to an area adjacent to the field of view before the rotational movement, and the search pattern is searched. Thus, a search pattern automatic capturing method for capturing the search pattern within the field of view of the second camera is taken.

In the description of the means for solving the above-mentioned problems, “a certain assumed movement” means a predetermined movement (combination of combinations) that can determine the relative arrangement (axis freedom) of the coordinate axes including the direction and the sign. (Including movement) or a predetermined movement that can be determined in the direction of rotation, and the “measured movement direction” is a state of a predetermined movement (including a combination), a change in direction, or a combination of directions. Is the meaning of the pattern. As a specific example, as described in the embodiment, a combination of two movements in the XY coordinate axis directions in the coordinate calculation system of the control unit of the position alignment system is set as a predetermined movement capable of determining the axis freedom. It is preferable that the rotational movement in a predetermined direction in the coordinate calculation system of the control unit of the position alignment system is a predetermined movement that can determine the rotational direction.
As a matter of course, although not described in the embodiment, as the predetermined movement capable of determining the relative arrangement (degree of freedom of axis) of the coordinate axes including the direction and the sign, the above two are used. The movement is not limited to a combination, and a curved movement having a predetermined curve is also possible.
In this way, movement of an arbitrary pattern is considered as a predetermined movement. In this case, the “measured movement direction” means how to change the direction vector of movement if the direction of the predetermined movement is expressed by a vector. (Pattern of change).

  According to the present invention, in a conventional position alignment system for an XYθ stage, the relationship between the amount of movement in the XYθ direction and the amount of movement on a captured image of a camera placed opposite to the XYθ stage is measured, and the movement of the XYθ stage is performed by the camera. Before calibrating to find out the relationship between the moving direction and moving amount of the XYθ stage for moving the XYθ stage while moving the XYθ stage on the captured image of the camera with respect to the moving direction and moving amount, and to adjust various conditions, Designated with skilled human intervention in tasks such as setting various conditions that correspond to changes in the reference pattern that accompany switching of workpieces (objects) that occur frequently during system startup and actual operation Or, it is necessary to make settings and errors are likely to occur. Point has been eliminated. In addition, the position alignment system using the XYθ stage can be made very easy to use and does not require a hand, which can greatly contribute to the FA industry.

The best mode for carrying out the invention is a position alignment system of an XYθ stage that performs movement in the XY direction and rotational movement in the θ direction, and the amount of movement in the XYθ direction and the camera arranged opposite to the XYθ stage. The movement direction on the captured image of the camera with respect to the movement direction of the XYθ stage and the movement amount for causing the XYθ stage to perform a desired movement while measuring the relationship with the movement amount on the captured image and observing the movement of the XYθ stage with the camera The computer has a function and means for achieving the four problems listed as problems to be solved by the invention prior to the calibration and actual operation to find the relationship between the movement amount and the various conditions. An example of a position alignment system for an XYθ stage comprising an alignment control unit incorporating a storage unit It is shown in 1. The contents will be described below.
Reference numeral 10 denotes an XYθ stage that can normally be moved in the XYθ direction by three or more actuators, as shown in the plan view of an example of the XYθ stage 10 of three actuators (12a, 12b, and 12c) in FIG. Further, for example, an object to be imaged 20 by a camera to be inspected is mounted thereon and moves in the same manner as the XYθ stage moves. Reference numeral 30 denotes a camera set composed of a first camera 31 and a second camera 32 arranged to face the object to be imaged 20. As shown in FIG. 2B as a side view of FIG. It arrange | positions so that the upper surface of the to-be-photographed object 20 may be opposed, or it arrange | positions so that only the camera 32 may oppose the lower surface of the to-be-imaged object 20 (it shows with a broken line). 101 is a field of view of the first camera 31, and 102 is a field of view of the second camera 32. An opening surrounded by four cross-sectional walls 11a is formed in the table portion 11 of the XYθ stage 10 so that the lower surface can be imaged by the camera 32 facing the lower surface of the imaging target 20.
On the other hand, the alignment control unit 40 of the alignment system is a means for realizing a reference mark automatic registration function 41 for realizing a reference mark automatic registration method as an automatic setup and automatic calibration function at the time of starting the position alignment system. Means for realizing the axis movement direction code automatic adjustment function 42 for realizing the adjustment method, means for realizing the camera placement automatic judgment function 43 for realizing the camera placement automatic judgment method, and reference mark automatic catching function for realizing the reference mark automatic catch method 44, an automatic calibration function 45, and an automatic alignment function 46. As means for realizing these functions, a computer, a storage unit, an interface means for input / output control for the camera, an XYθ stage Driving for driving Comprising a control and interface means or the like.
In order to achieve the object of the present invention, an image captured by the camera set 30 is sent as a measurement image to the alignment control unit 40, where it is used for processing for realizing the above functions and for necessary automatic calibration. . At that time, if necessary, the automatic alignment function 45 sends an XYθ movement instruction to the final drive circuit unit 47 which is a motor driver of the XYθ stage, and the XYθ stage 10 is controlled to be in a new position and posture.
Hereinafter, a reference mark automatic registration function 41, an axis movement direction code automatic adjustment function 42, a camera placement automatic determination function, which are functions for solving the problems of the present invention (which may be interpreted as means for realizing the function) (Camera placement automatic determination / adjustment function) 43 and reference mark automatic capture function (hereinafter also referred to as search pattern automatic capture means) 44 will be described together with embodiments relating to the implementation of each function.
The means for solving the problems of the present invention is not limited to the application, and is widely used for the calibration and position alignment of the position alignment system of the XYθ stage. In the circuit board, this circuit board flows on the mass production line one after another, and is placed on the XYθ stage 10 to automatically mount the components at the necessary locations on the circuit board, and the necessary positioning (alignment) is made. The embodiment will be described in relation to the calibration procedure of the alignment system of the XYθ stage 10 performed at the time of setting up the related apparatus prior to this series of business operations for the business in which the parts are automatically assembled by the robot.

The first embodiment is an example of a method for realizing the reference mark automatic registration function 41 in the calibration of the XYθ stage 10, and the flow of the processing is shown in FIG.
In the component automatic assembly work described above, the circuit board is placed in the XYθ stage so that the relationship between the circuit board automatically mounted one after another on the XYθ stage 10 and the camera 31 and the camera 32 is always in a predetermined state. The position of the XYθ stage 10 in the XY direction and the rotation angle in the θ direction are adjusted while looking at the images of the first camera 31 and the second camera 32 each time it is automatically mounted on the camera 10, and the subsequent automatic component assembly is performed. In order to determine the initial position and orientation for the positioning (alignment) operation, the camera 31 and the reference mark for measuring the positional relationship between the camera 32 and the circuit board are preliminarily set in the first camera 31. At least one (minimum, two in total) in each of the visual field 101 and the visual field 102 of the second camera 32 is measured and stored in the storage unit of the computer. It must be recorded. Of course, this registered reference mark is also used for setting various conditions at the time of starting the position alignment system using the XYθ stage, calibration, and alignment of workpieces mounted on the XYθ stage in order, for example, on the production line. Is done.

また、上記所定角度回転ではなく、仮登録パターンの重心を通る直線を複数本求め、その各々を基準として仮登録パターンを反転させたパターン（以降、反転パターンともいう）を作り、仮登録パターンと反転パターンとの幾何学的合同をチェックする方法も可能である。即ち、この場合は、対称軸があるようなパターンが仮登録（記録）されることになり、その例は図５（ｄ）に示すようなパターンである。このステップで記録される仮登録パターンを第２選定パターンともいう。
（ステップＳ３０６）
記録された仮登録パターンの最大スコアと既に記録されている仮登録パターンの最大スコアを比較し、上位の２者の仮登録を残す。前者の最大スコアが後者の最上位以上の場合は当該仮登録パターンとその位置情報と最大スコアを記録し且つ後者の第２位以下の仮登録を削除する。前者の最大スコアが後者の第２位未満のときは前者の仮登録を削除する。
（ステップＳ３０７）
ステップＳ３０5からＳ３０６までの一連の処理過程が全ての仮登録パターンに対して行なわれたかどうかを判断し、Ｎｏの場合はステップＳ３０５へ移行し、Ｙｅｓの場合はステップＳ３０８へ移行する。
（ステップＳ３０８）
以上の処理過程で、基準マークになりうる仮登録パターンが存在したかどうか、ステップＳ３０６におけるスコアの記録の有無によりチェックし、Ｎｏ（記録なし）の場合はステップＳ３０９に移行し、Ｙｅｓ（記録あり）の場合はステップＳ３１１へ移行する。
（ステップＳ３０９）
２値化閾値が変更可能か否かをチェックし、変更可能ならばステップＳ３１０へ移行し、変更不可能であれば異常警告を出して終了する。
変更可能か否かの判断方法の例としては、２値化閾値を初期の値から機械的にある濃度幅ごとに変更しながら２値化処理を行なってみて、クリアな２値画像が得られれば変更可能と判断する方法、あるいは一般に判別分析法によって判断する方法等がある。
（ステップＳ３１０）
２値化閾値を変更し、ステップＳ３０３へ移行する。
（ステップＳ３１１）
記録されている基準マーク候補の仮登録パターン（第２選定パターン）と位置とスコアのリストから最も好ましい仮登録パターンを基準マークとして選択し登録し、終了する。 Hereinafter, FIG. 3 will be described.
(Step S301)
This is a step for pre-processing the captured image. Here, in the pre-processing for the processing after step S302, for example, conversion processing for widening the dynamic range of density is performed by a density range conversion filter in order to facilitate binarization. In the following description of the flow flow, an image for which this preprocessing has been completed is referred to as an original image.
(Step S302)
In order to binarize the original image, automatic binarization threshold determination is performed by a discriminant analysis method.
(Step S303)
The original image is binarized using the binarization threshold value set in step S302, and binarization is performed only on a figure pattern block on the binarized image that satisfies a predetermined condition (first selection pattern). The position information in the digitized image is recorded.
Further, after binarization, isolated point removal filter processing is performed on the binary image to remove noise.
As the predetermined condition, the most convenient condition is that the size of the block of the graphic pattern (reference mark size) is within a predetermined range, and the predetermined range is 1/4 of the entire area of the image (half the length and width). 1) is an upper limit, and even if the lower limit is too small, it is not suitable because of the stability of automatic extraction. In addition, it is effective to select a block having an aspect ratio of the pattern pattern block (reference mark) close to 1: 1, which is actually implemented.
(Step S304)
Corresponding to each recorded position information, a gray image obtained by cutting out an area of the original image surrounding the block of the figure pattern at the position corresponding to the position information is obtained, and the graphic pattern that is uniquely included in each gray image is obtained. The block is recorded as a temporary registration pattern (also referred to as a first selection pattern) in association with the position information already recorded.
(Step S305)
A gray image including a temporary registration pattern is selected, and a pattern obtained by rotating the temporary registration pattern by a predetermined angle (hereinafter also referred to as a rotation pattern) matches the temporary registration pattern while maintaining the mutual angle (geometry The temporary registration pattern and the score including the maximum score when the score above the predetermined level is obtained are recorded, and the maximum score is predetermined. If it is less than the level, the process of deleting the temporary registration pattern and the accompanying position information is performed for all the predetermined rotation angles.
At this time, the shape of the temporarily registered (recorded) pattern varies depending on the predetermined rotation angle. For example, as shown in Table 1.

Further, instead of the predetermined angle rotation, a plurality of straight lines passing through the center of gravity of the temporary registration pattern are obtained, and a pattern (hereinafter also referred to as a reverse pattern) obtained by inverting the temporary registration pattern based on each of the straight registration patterns It is also possible to check the geometric congruence with the reverse pattern. That is, in this case, a pattern having a symmetry axis is provisionally registered (recorded), and an example thereof is a pattern as shown in FIG. The temporary registration pattern recorded in this step is also referred to as a second selection pattern.
(Step S306)
The maximum score of the recorded temporary registration pattern is compared with the maximum score of the already registered temporary registration pattern, and the temporary registration of the upper two parties is left. When the former maximum score is equal to or higher than the highest of the latter, the temporary registration pattern, its position information, and the maximum score are recorded, and the latter second and lower temporary registration is deleted. If the former maximum score is less than the second highest, the former provisional registration is deleted.
(Step S307)
It is determined whether or not a series of processing steps from step S305 to S306 has been performed for all temporary registration patterns. If No, the process proceeds to step S305, and if Yes, the process proceeds to step S308.
(Step S308)
In the above process, whether or not there is a provisional registration pattern that can be a reference mark is checked based on whether or not the score is recorded in step S306. If No (no recording), the process proceeds to step S309, and Yes (recorded) ), The process proceeds to step S311.
(Step S309)
It is checked whether or not the binarization threshold can be changed. If it can be changed, the process proceeds to step S310. If it cannot be changed, an abnormality warning is issued and the process ends.
As an example of a method for determining whether or not the change can be made, by performing the binarization process while mechanically changing the binarization threshold value for each density range from the initial value, a clear binary image can be obtained. For example, there are a method for determining that the change is possible, and a method for determining generally by a discriminant analysis method.
(Step S310)
The binarization threshold is changed, and the process proceeds to step S303.
(Step S311)
The most preferred temporary registration pattern is selected as a reference mark from the recorded reference mark candidate temporary registration pattern (second selection pattern), position and score list, and the process ends.

The contents of a specific detailed example of step S311 will be described below in conjunction with FIG.
(Step S401) Among the maximum scores of the temporary registration patterns recorded in the process up to Step S308 and determined to be reference marks, it is checked whether there is a score that is at a maximum level. When Yes, the process proceeds to step S402, and when No, the process proceeds to step S404.
(Step S402) It is checked whether the score at the maximum level is singular. When the number is single, the process proceeds to step S403. When the number is single, the process proceeds to step S404.
(Step S403) The temporary registration pattern is registered as a reference mark and moved to the exit.
(Step S404) The combination of the two temporary registration patterns is used as a reference mark, and it moves to the exit.

  In this embodiment, the figure search is performed by the normalized correlation in step S305. However, the present invention is not necessarily limited to this method. Whether the rotation pattern and the temporarily registered pattern are maintained at the same angle or not is matched. Any method can be used as long as it can be checked. In that case, the way of thinking about the score may be different, but in that case, a measure of the degree of coincidence of the pattern according to the purpose is brought in instead of the score.

In step S306 in FIG. 3, the maximum score of the recorded temporary registration pattern is compared with the maximum score of the already recorded temporary registration pattern, and the upper two temporary registrations are left. This is because the number of single patterns (temporary registration patterns) to be combined when registering to the reference mark is intended to be 2, so it is not necessarily limited to 2 and may be 3 or more. In that case, the criteria for selecting the temporary registration pattern constituting the combination pattern are the difference in the shape score and the size between each of the temporary registration patterns to be combined and each of the temporary registration patterns removed from the combination target. The condition that both of the differences in the scores of both are smaller than the predetermined value (the difference in the degree of geometric congruence is smaller than the predetermined degree) does not exist.
In addition, in steps S305 and S306, the top multiple persons with the highest score are provisionally registered for one registration pattern, and the records that have been omitted from the provisional registration have been deleted. Until the maximum score of the temporary registration pattern is obtained, the records may be stored without being deleted, and finally, the top multiple members having the maximum score may be selected.

In step S305 in FIG. 3, a series of operations have not yet been completed for all temporary registration patterns. However, when the conditions given in advance are cleared, the temporary registration pattern is registered as a reference mark. The registration process can be canceled, which has the advantage of reducing the reference mark registration time.
As conditions given in advance, there are conditions as shown below.
(1) When a temporary registration pattern with a predetermined correlation score is found, it is determined that there is no temporary registration pattern having the same shape and size as the temporary registration pattern in the screen at that time. To be done.
(2) A graphic pattern having a special shape prepared on a work (object to be imaged) for the purpose of making a reference mark in advance becomes a temporarily registered pattern. Naturally, when a figure pattern with a special shape is prepared on the work (object to be imaged), only a specific predetermined movement for extracting only the pattern is performed in step S305, and the movement By taking a normalized correlation between the previous and subsequent images and evaluating the score, the reference mark will be found at the fastest speed and registered along with its position information.

As described above, regarding the automatic registration of the reference mark described in the first embodiment, there is a recommended range of extraction of the reference mark candidate (the temporary registration pattern) in the visual field of the camera in actual use.
For example, in a state where the arrangement position is fixed in advance with respect to the XYθ stage 10, one reference mark is automatically registered for one camera by the method of the first embodiment, and the position alignment system is calibrated. In addition, the object to be imaged 20 (work) having a fixed shape as a mass product is supplied to the table unit 11 of the XYθ stage one after another, and the object to be imaged is aligned at a predetermined position / rotation posture by the position alignment system. Assume a case.
Since the position of the reference mark seen on the captured image of the camera 31 and the camera 32 when the object to be imaged 20 is supplied on the table unit 11 varies within the range of supply accuracy, the camera happens to be in the process of automatically registering the reference mark. When a graphic pattern in the vicinity of the boundary of the field of view (captured image) is registered, there is a possibility that a case where the reference mark does not exist in the field of view (captured image) of the camera frequently occurs. In order to avoid this phenomenon, a reference is made with respect to an image range narrowed inward from the boundary of the field of view (captured image) by a distance range corresponding to the maximum value of the positional displacement assumed to be supplied to the table unit 11 of the object to be imaged 20. It is desirable to apply automatic mark extraction from the viewpoint of avoiding the above problems and shortening the processing time.

The second embodiment is an example of a method (or means) for realizing the axis movement direction code automatic adjustment function 42 which is the second function among the four functions for solving the problems of the present invention. The main point of the method is that the reference mark is automatically registered and is captured by the camera selected for execution of the axis movement direction code automatic adjustment function (hereinafter also referred to as a reference camera). In accordance with the coordinate calculation system in the control unit,
With regard to the relative arrangement of the coordinate axis XY of the XYθ stage 10 and the direction and sign of the coordinate axis XY and the rotation angle θ (axial freedom of the XYθ stage 10), the mechanism of the XYθ stage 10 and the design of the final drive circuit section (user) The actual movement direction of the XYθ stage 10 and the captured image of the camera so that the axial freedom of the XYθ stage 10 determined in the position alignment system matches the determined axial freedom. The direction and sign are automatically adjusted on the control software inside the position alignment system while observing the moving direction above (specifically, the sign adjustment parameter in the storage unit corresponding to the reference camera is adjusted). This method will be described in detail with reference to the drawings.

FIG. 6 shows axial degrees of freedom determined in advance by the calculation / control system inside the position alignment system in this embodiment, that is, the relative arrangement of the coordinate axes X and Y of the XYθ stage, and the positive direction of the coordinate axes XY and the rotation angle θ. FIG.
The angle α is an angle around the origin O when the positive sign range of the coordinate axis Y is viewed with respect to the positive sign range of the coordinate axis X, with the clockwise direction being the positive direction, and the XY coordinate system of FIG. In the Cartesian coordinate system, the degree of freedom of the axis is the range of the positive sign of the X axis (hereinafter referred to as the definition of the angle α), with the positive direction of the X axis pointing to the right, the positive direction of the Y pointing downward, , + X) to the range of the positive sign of the Y axis (hereinafter referred to as + Y), the direction of the arrow is clockwise when viewed around the origin O.
The example of FIG. 6 can be expressed more accurately. As is apparent from the above description and FIG. 6 seen from various directions, the + Y axis satisfies 0 <α <+180 degrees regardless of which + X is facing. This is an example of α = 90 degrees (rectangular coordinate system) in a general XY coordinate system including an oblique coordinate system having a relationship that exists in a range.
Also, the camera direction is determined in a direction (downward) to look down on the paper surface of FIG.
This degree of axial freedom is the same as the degree of axial freedom on the image memory in the position alignment system having a one-to-one relationship with the image captured by the camera.
Hereinafter, on the premise of the above conditions, a method for automatically adjusting the degree of freedom will be described.

FIG. 7 is a diagram for explaining a method of automatically adjusting the degree of freedom of the coordinate axes X and Y.
(1) Now, as shown in FIG. 7A, when the circular reference mark in the shift reference is moved with the XYθ stage 10 assumed to be in the positive X-axis direction by the position alignment system, the position alignment system is It is assumed that the movement direction of the reference mark measured on the picked-up image picked up in is the X shift direction. Next, the XYθ stage is returned to its original position, and the reference mark is measured on the captured image captured by the position alignment system when the XYθ stage 10 is moved with the position alignment system assuming the positive direction of the Y axis. If the movement direction of the mark is the Y shift direction, the angle α1 around the shift reference measured on the captured image with the clockwise direction from the X shift direction to the Y shift direction being positive is +90 degrees in this case. The positive direction of the XY coordinate of the XYθ stage 10 coincides with the positive direction of the coordinate axes X and Y determined in advance in the position alignment system, that is, it can be recognized that the axial degrees of freedom are in a coincidence relationship. Therefore, the contents of the X code adjustment parameter and the Y code adjustment parameter corresponding to the reference camera provided in the storage unit for adjusting the degrees of freedom of the X axis and the Y axis in the position alignment system may be maintained as they are. .
(2) On the other hand, as shown in FIG. 7B, when the XYθ stage 10 is moved in the same manner as described above, the X-axis direction is moved in the same manner as in FIG. 7a, the angle α1 is −90 degrees, and the positive direction of the XY coordinates of the XYθ stage 10 is the coordinate axes X and Y determined in advance in the position alignment system. If the view is different from the normal direction, the relative arrangement of the X coordinate axis and the Y coordinate axis is different because the angle α1 from X (+) to Y (+) is the opposite direction. It must be recognized that the degrees were not consistent. Therefore, in this case, the content of the Y code adjustment parameter, which is a code adjustment parameter for adjusting the degree of freedom of the Y axis provided in the storage unit inside the position alignment system corresponding to the reference camera, is changed. Therefore, it is necessary to change the sign of the movement amount calculation of the position alignment system so that the coordinate system of the position alignment system substantially matches the coordinate system of the XYθ stage 10. In other words, the intention of moving the XYθ stage 10 assuming the direction of the coordinate axis Y (+) is moved in the Y (−) direction on the captured image, so that the control unit of the position alignment system controls the XYθ stage as Y. The Y code adjustment parameter for causing the Y (+) direction to be recognized so that it is erroneously determined that the movement has been made in the (−) direction and the sign of the Y axis movement direction in the subsequent movement coordinate calculation is not mistaken. The content of is changed.
(3) Also, as shown in FIG. 7 (c), when the XYθ stage 10 is moved in the same manner as in FIG. 7 (b), the Y-axis direction moves in the same way as in FIG. 7 (a). If the X-axis direction moves in the direction opposite to the direction of FIG. 7A, it can be recognized that there is also a mismatch in axial freedom between the XYθ stage 10 and the position alignment system. Therefore, in this case, the content of the X code adjustment parameter, which is a code adjustment parameter for adjusting the degree of freedom of the X axis provided in the storage unit in the position alignment system corresponding to the reference camera, is changed. Therefore, it is necessary to change the sign of the position alignment system movement amount calculation so that the coordinate system of the position alignment system substantially matches the coordinate system of the XYθ stage 10. That is, it is necessary to match both axial degrees of freedom.
(4) From another viewpoint, it may be considered that the movement of the position alignment system is reversed only in the X shift direction with respect to the case of FIG. It can also be considered that 7 (b) is merely 180 degrees rotated about the shift reference center.
In other words, FIG. 7B and FIG. 7C have the same degree of axial freedom because the relative arrangement of the X coordinate axis and the Y coordinate axis is the same.
That is, when the angle α1 is −90 degrees, the degree of freedom of the X-axis of the storage unit is adjusted to change the content of the storage unit to adjust the degree of freedom of the axis in the position alignment system. There are two methods, a method of changing the content of the X code adjustment parameter for adjusting and a method of changing the content of the Y code adjustment parameter for adjusting the degree of freedom of the Y axis, which means that either can be selected. To do.
Although described in order to prevent misunderstanding of the above description, the X shift direction and the Y shift direction do not necessarily coincide with the X direction and the Y direction of the coordinates on the captured image of the camera. Only when the direction of the coordinate axis of the camera matches the direction of the coordinate axis of the XYθ stage. As a matter of course, the above-described automatic adjustment method of the degree of freedom may be in any state in the directional relationship between the coordinate axis of the XYθ stage and the coordinate axis of the camera (captured image).
The above explanation is for the case where the angle α1 is +90 degrees and −90 degrees. However, strictly speaking, in the case where the oblique angle α of the coordinate axis of the XY coordinate system is arbitrary, the above (4) By simply applying the methods (1), (2), and (3), it is possible to adjust the degree of axial freedom.
In addition, it is not a method of basically measuring the angle α1 as described above, but if a condition that allows α1 to be within a certain angle range (for example, within a range of plus or minus 30 degrees) is given. All the above methods can be applied up to an oblique angle in which half is plus or minus 90 degrees.

Further, referring additionally to the meaning of measuring α1 on the captured image, for example, the description will be made only when the right-angle XY coordinate is used. However, the coordinate axis of the XYθ stage and the coordinate axis of the camera (captured image) are described. Even if the operator makes a visual check (plus or minus 45), it is not limited to matching both X-axis or Y-axis, but also includes matching one X-axis and the other Y-axis. When there is a guarantee that the angle can be set within a certain angle range of less than 30 degrees (for example, plus or minus 30 degrees in consideration of safety), imaging is performed when the reference mark is moved in the X-axis (+) direction of the XYθ stage. The movement of the reference mark on the image should move in a direction within a certain angle range (for example, plus or minus 30 degrees) less than plus or minus 45 degrees with respect to the X axis or the Y axis on the captured image. In this case, instead of measuring α1, the movement of the reference mark movement vector on the coordinates of the captured image moves in the direction of the longest axis (including positive and negative) of the projection vector to each coordinate axis. You can judge. The same determination can be made when the reference mark is moved in the Y-axis (+) direction of the XYθ stage of the XYθ stage. At first glance, this method seems to be different from the above automatic adjustment method of the degree of freedom, but it is interpreted that the determination of the moving direction as described above is equivalent to measuring α1. it can.

Next, a method for adjusting the sign of the rotation angle θ of the XYθ stage 10, that is, the sign of the rotation direction will be described.
FIGS. 8A and 8B are diagrams for explaining a method of adjusting the sign of the rotation angle θ (rotation direction) of the XYθ stage 10.
Now, it is assumed that the reference mark on the XYθ stage 10 is at this position as the reference θ in FIGS. 8A and 8B on the captured image of the position alignment system. (On the image memory that stores the captured image, the reference mark is naturally recorded in a storage area that is one-to-one with this position.) In this state, the XYθ stage 10 is set so that θ is in the positive direction (clockwise). It is assumed that the reference mark on the captured image has moved from the position of the reference θ to the position of + θ when rotated by an arbitrary angle β1. Further, when the position of the reference mark is returned to the original position and the XYθ stage 10 is rotated by an arbitrary angle β2 so that θ is in the negative direction (counterclockwise direction), the reference mark on the captured image is at the position of the reference θ. It is assumed that the position has moved to the position of -θ. Assuming a circle that passes through the reference θ, + θ, and -θ, the center of the circle is called the "center of the circle". Is referred to as a reference vector, and a vector that is on a straight line passing through -θ and + θ and is directed from the -θ position to the + θ position is referred to as a determination vector.
The sign adjustment method of the rotation angle θ (rotation direction) of the XYθ stage 10 is as follows.
When the angle from an arbitrary reference indicating the direction of each of the determination vector and the reference vector is a positive direction that is the same clockwise direction as the rotation angle θ, the angle γ obtained by subtracting the angle of the reference vector from the angle of the determination vector is positive (FIG. 8 (a)), the direction of the actual rotation angle θ of the XYθ stage 10 and the direction of the rotation angle θ of the XYθ stage 10 on the captured image (or in the position alignment system), that is, the degree of freedom of both. Are matched, the content of the θ code adjustment parameter for adjusting the sign of the rotational movement direction of the XYθ stage 10 of the storage unit in the position alignment system is maintained as it is.
When the angle γ obtained by subtracting the angle of the reference vector from the angle of the determination vector is negative (in the case of FIG. 8B), the direction of the actual rotation angle θ of the XYθ stage 10 and the captured image (or Assuming that the degree of freedom of the rotation angle θ of the XYθ stage 10 in the position alignment system is different, the content of the θ code adjustment parameter provided in the storage unit in the position alignment system is changed to adjust the difference. The position alignment system assumes that the movement of the reference θ is in the same direction as the movement of FIG.

In the above description, the angles β1 and β2 for detecting the rotation direction have been set to arbitrary angles, but the positional relationship between the reference θ and + θ and the positional relationship between the reference θ and −θ are the same as the reference θ and the circle. It is desirable that the angle be small enough to clearly determine which side is on the straight line passing through the center from the viewpoint of shortening the adjustment time, making unnecessary determination unnecessary, and simplifying the determination logic.

  Further, as shown in FIGS. 9A and 9B, instead of the center of the circle, an arbitrary point A on the straight line connecting + θ and −θ is selected, and the “circle” in the description of the adjustment method is selected. "Point A" is replaced with "center of", and the reference vector is a vector having a direction from point A to reference θ on a straight line passing through point A and reference θ, and an adjustment method for determining whether the angle of the determination vector is positive or negative You may take Incidentally, the case where the point A is selected so that the “straight line passing through the point A and the reference θ” in this case passes through the center of the circle is the adjustment method in the main description of the embodiment.

In addition to the point A, the point that is used instead of the center of the circle in the description of the above embodiment is a point in a region sandwiched between a straight line from the reference θ to + θ and a straight line from the reference θ to −θ. It is possible to select arbitrarily. However, it is preferable to substitute a point that can be mechanically selected by an easy system as much as possible. In that sense, it is desirable to select the center or point A of the circle.

  In the above description, the method of rotating the XYθ stage 10 is not specifically described, but the method varies depending on the mechanism configuration of the XYθ stage 10. For example, in the XYθ stage 10 having the structure shown in FIG. 2, the rotation amount and the rotation direction are determined depending on the linear movement amounts of the actuators 12a, 12b, and 12c. As another example, in an XYθ stage 10 in which a rotary stage is placed on an XY stage that only translates, the rotation can be performed only by the movement of the rotary stage.

In the above description, either the X code adjustment parameter or the Y code adjustment parameter corresponding to the reference camera is changed as necessary, and the axial freedom of the XYθ stage 10 and the axial freedom of the coordinate calculation system inside the position alignment system are changed. I ’ve explained that it ’s time to match. This means that the value of each axis code adjustment parameter is linked to the logic that determines the driving direction of the actuator. In this case, if the installation conditions of the hardware are matched such that the direction of the coordinate axis of the reference camera and the direction of the coordinate axis of the XYθ stage 10 are matched, the degree of axial freedom on the captured image of the reference camera is naturally The degree of axial freedom inside the position alignment system will match. In a sense, this is a user-friendly feature.
On the other hand, there is another way of matching the axial degrees of freedom. The method is not a method of linking the value of each sign adjustment parameter to the logic that determines the driving direction of the actuator as described above, but is a method of linking only to the logic of coordinate calculation without linking. This is because the movement of the XYθ stage 10 assumes that the negative direction is the positive direction even if it moves in the negative direction on the captured image when the actuator is driven assuming that the reference mark is moved in the positive direction. The coordinates are calculated by changing only the value of the sign adjustment parameter by the above method. This method expands the degree of freedom in usage in a sense, and is a superordinate concept of the above method.
In any of the methods for adjusting the degree of axial freedom, as a matter of course, the coordinate calculation mechanism is unified, and there is no problem as the operation of the position alignment system.

  The above standard camera may be arbitrarily selected. Regarding the designation of the reference camera, in practice, for example, a camera connected to a specific connector in the camera connection connector group provided in the alignment control unit 40 is regarded as a reference camera. There is a method of designing an alignment control unit.

The third embodiment is an example of a method for realizing the camera placement automatic determination function 43, which is the third function among the four functions (or means) for solving the problems of the present invention. It explains together.
FIGS. 10A, 10 </ b> B, and 10 </ b> C are diagrams for explaining a method of realizing the camera arrangement position automatic determination function 43.
FIG. 10A shows the reference mark on the XYθ stage moved from the shift reference position to the X shift position in the positive direction of the X axis, and the reference mark moved from the shift reference position to the Y shift position in the positive direction. The position of the reference camera in the second embodiment (assuming that the camera is arranged on the front side of the XYθ stage 10) when the lens is moved to the X-shift and Y-shift relative to the shift reference is shown. FIG.
Now, the movement of the reference mark when the same movement as above (in the positive direction of the coordinate axes X and Y determined in advance as in the second embodiment) is performed by a camera other than the reference camera (temporarily) When the movement when observed with the reference camera) is the same as that in FIG. 10 (a), on the captured image of the non-reference camera with respect to the positive directions of the coordinate axes X and Y observed on the captured image of the reference camera. It means that the positive direction of the observed coordinate axis is consistent. Naturally, the positive direction of the rotation angle θ is clockwise.
In contrast, FIG. 10B or FIG. 10C shows an example in which the movement of the reference mark with respect to the same movement is observed on a captured image of a non-reference camera installed on the back side of the XYθ stage 10. .
In the case of FIG. 10B, the movement direction of the reference mark on the captured image with respect to the positive movement of the X axis is leftward, and the degree of freedom of the X axis seems to be different from that initially determined. . The same is true for the rotation angle θ. This means that the calculation system inside the position alignment system considers that the moving system in the positive direction is moving in the negative direction, and is a non-reference camera on the back side of the XYθ stage 10. When an attempt is made to drive the XYθ stage 10 using the captured image, the X direction and the θ direction move in opposite directions, and the X direction when the XYθ stage 10 is driven using an image captured by a reference camera on the front side. Since the θ direction is different, the position alignment system cannot be controlled and calculated. In order to solve this problem, if the state of FIG. 10A is determined as a reference, in the case of FIG. 10B, the position in the position alignment system corresponds to the non-reference camera on the back side. The content of the X code adjustment parameter, which is the code adjustment parameter in the X-axis direction provided in the storage unit, is changed (the image of the change method is to change the software X code adjustment switch from “+1” to [−1]. That is, the control unit that calculates the movement coordinates of the position alignment system is assumed to regard the direction of FIG. 10B as the positive direction. Naturally, by changing the X sign adjustment parameter, the control unit can observe the subsequent rotation angle θ to be in the positive direction.
In the case of FIG. 10C, the content of the Y code adjustment parameter that is a code adjustment parameter in the Y-axis direction provided in the storage unit in the position alignment system is changed corresponding to the non-reference camera. For the reason described in connection with FIG. 7C in the second embodiment, the content of the X code adjustment parameter may be changed instead of changing the content of the Y code adjustment parameter.
Naturally, in any of the cases of FIGS. 10A, 10B, and 10C, the relationship of the coordinate axes is appropriate with the shift reference O as the center from the relationship of the camera installation angle. The essence is unchanged even if it is observed in a state rotated by an angle. This can be said in any of the cases shown in FIGS. 7A, 7B, and 7C. The reason for this is also the same as that described in connection with FIG. 7C in the second embodiment. Actually, FIG. 10C is equivalent to a state where FIG. 10B is rotated by 180 degrees.

  In the above description of the third embodiment, although omitted for convenience of explanation, the code adjustment parameter set (the set of the X code adjustment parameter and the Y code adjustment parameter) is one position alignment system for each camera. Are provided in the storage section.

As another embodiment of the method for realizing the camera arrangement automatic determination function 43, the following method can be adopted.
That is, the storage unit of the position alignment system includes only one set of code adjustment parameter sets including an X code adjustment parameter, a Y code adjustment parameter, and a θ code adjustment parameter, so that each camera has a reference camera and an XYθ stage 10. Each camera has a camera placement adjustment parameter for setting and adjusting whether it is on the same side or the opposite side with respect to the table section 11 of the table unit 11, and for axis movement direction code automatic adjustment (axial freedom degree automatic adjustment) This is done with a reference camera and a sign adjustment parameter set. For automatic camera placement determination, observation is performed with a single non-reference camera, assuming that the sign adjustment parameter is used for moving coordinate calculation and control based on subsequent observation results. When the moving coordinate direction of the XYθ stage 10 is different from the moving coordinate direction observed by the reference camera The control unit of the position alignment system determines that the non-reference camera is installed on the side opposite to the reference camera with respect to the table unit 11 of the XYθ stage 10, and the camera placement adjustment parameter corresponding to the non-standard camera Is adjusted for all non-reference cameras, and the contents of the camera placement adjustment parameters are linked to the code adjustment parameters so that each camera has an equivalently different code adjustment parameter. By this, even if the control unit subsequently observes the different movement coordinate direction, it can automatically determine that this is the movement coordinate direction observed by the reference camera, and the correct movement coordinate calculation can be performed. It is.
The camera arrangement adjustment parameter has been described as a parameter for adjusting whether each non-reference camera is on the same side or the opposite side with respect to the reference camera and the table unit 11 of the XYθ stage 10. If the cameras are always arranged on one side (for example, the front side), the camera arrangement adjustment parameter is that all the cameras are on one side with respect to the table unit 11 of the XYθ stage 10 or the other side. Based on the observation results, the observation result on the other side is replaced with the observation result of the camera on one side. The camera placement adjustment parameter corresponding to the camera has the meaning of “invariant” (for example, if the content of the camera placement adjustment parameter that needs to be changed is [−1], [+1]).
Still other methods are conceivable. For example, when a plurality of cameras are used, if these are distributed and arranged on the upper surface side and the lower surface side so as to face the table unit 11 of the XYθ stage 10, the sign adjustment parameter set is obtained from the upper surface side camera. 2 sets for the camera and the camera on the lower side, and whether each camera is on the upper side or the lower side is observed with the above-mentioned reference camera arrangement, the moving coordinate direction observed with the reference camera, and the non-reference camera It may be determined by comparing the moving coordinate direction.
If it is clear that all the cameras are arranged only on one side, only one set of sign adjustment parameter sets can be used, but the automatic determination of which side is arranged similarly. May be performed by the above method.
The above-described method is considered to fall within the same technical scope as having a code adjustment parameter set for each camera.

In addition, if a supplementary description is given, the axis movement direction code automatic adjustment function is based on the XYθ stage axis freedom and the position alignment system controller freedom for a reference camera selected from a plurality of cameras. Is a function that automatically adjusts the sign of the axis movement direction in order to match the coordinate axis to the coordinate axes X and Y and the rotation angle θ. Using the sign relationship of the axis movement direction determined between the control units of the system as a reference, the control unit of the position alignment system with respect to the movement on the captured image of all other cameras tries to match the reference. .

  In the third embodiment, the camera is described as being distributed and arranged on the upper surface side and the lower surface side so as to face the table portion 11 of the XYθ stage 10, but the camera simply faces the table portion 11 on the lower surface side, for example. The method of the third embodiment is also effective when it is arranged at an arbitrary position so that an image can be captured by reflecting an image using a prism, a mirror, or the like.

The description so far has described the case where the camera is fixed and the XYθ stage 10 performs parallel movement and rotational movement. However, there are cases where the XYθ table 10 is fixed and the camera performs parallel movement and rotational movement. In that case, since the moving direction of the image in the field of view with respect to the field of view of the camera is exactly opposite in the case of moving the XYθ stage 10 and the case of moving the camera in that direction, the positive direction of the X axis, Y By reversing the positive direction of the axis and the positive direction of the rotation angle θ and adopting the methods of the second and third embodiments, automatic adjustment of the degree of freedom of the axis of the XYθ stage 10 and automatic determination of the camera arrangement position are possible Become.
Further, in the position alignment system in which the XYθ stage 10 and the camera share the X-axis movement, the Y-axis movement, and the rotational movement, the forward direction is reversed only with respect to the movement shared by the camera. It is possible to automatically adjust the degree of freedom of the axis of the XYθ stage 10 and to automatically determine the position of the camera.
In a position alignment system in which the XYθ stage 10 and the camera perform both or all of the X-axis movement, Y-axis movement, and rotational movement in parallel, the XYθ stage 10 and the XYθ stage 10 move in parallel. The movement of the camera is individually moved, and the automatic adjustment of the degree of axial freedom of the XYθ stage 10 and the automatic determination of the arrangement position of the camera are performed by the method described above.

In the description of the second embodiment and the third embodiment, the X code adjustment parameter, the Y code adjustment parameter, and the θ code adjustment parameter have been described. The specific way of handling these in the position alignment system is described. And the description will be described with an example.
These parameters are used for variables and constants (used with signs) that are used depending on the degrees of freedom in relation to the X, Y and Y rotation axes in the position alignment system. According to the automatic adjustment method of the degree of freedom as shown in the second embodiment and the automatic camera arrangement determination method as shown in the third embodiment so that it is finally used in the position alignment system with consistency, It is a means for adjusting these codes.
Therefore, the first example of how these code adjustment parameters should be used assumes that only one value of “+1” or “−1” is set for these code adjustment parameters, and depends on the degree of freedom. Each variable (measured value) measured in this manner is multiplied by a corresponding code adjustment parameter and used in the position alignment system. In this example, when the sign adjustment parameter is “−1”, the sign of the variable value automatically multiplied by the sign adjustment parameter is inverted, and when the sign adjustment parameter is “+1”, the sign is maintained.
In the second example, “Y (meaning Yes)” for “+1” and “N (meaning No)” for “−1” are set as parameter contents, and the position alignment system There is a method of judging the contents of the sign adjustment parameter and multiplying the value of the variable by “−1” if “N”, and by “+1” if “Y”.
In any of the above cases, it can be said that the sign adjustment parameter plays the role of a switch.

  Also, instead of adjusting the sign adjustment parameter, the captured image itself is processed such as inversion, and the positive direction of each axis on the processed image is determined by the position alignment system. It is possible to take an automatic adjustment method of the degree of freedom to match the direction.

The fourth embodiment is an example of a method for realizing the search pattern automatic capturing function 44, which is the fourth function among the four functions (or means) for solving the problems of the present invention, and automatic registration of reference marks. Start position, automatic adjustment of degree of freedom of axis, start of automatic determination of camera placement, and start of calibration operation, position alignment operation of the object to be imaged in accordance with the sequential supply of the object to be imaged to the XYθ stage Even at the start, if the reference mark candidate graphic pattern or the registered reference mark (search pattern) cannot be found within the camera's field of view, it is possible to manually detect and capture the reference mark by moving the camera's field of view. It is possible automatically without going through.
In the first embodiment, an example of a method for automatically registering a reference mark has been described. At this time, if a graphic pattern that satisfies the condition as a reference mark is not found in the captured image of the camera, the process ends. However, in order to achieve full automation of the original calibration, if a figure pattern that satisfies the criteria as a reference mark is not found, the search pattern is automatically shifted within a predetermined range according to a predetermined method. Automatic registration of fiducial marks by going to the search and capturing this is essential. Also, the reference mark must be captured in the field of view of the camera for the position alignment operation.
An example of a method for shifting the camera field of view will be described below.
The first method example is an example of a method of capturing the first search pattern in the field of view of one selected camera (hereinafter also referred to as the first camera), and in the current field of view of the first camera 31. On the other hand, the XYθ stage 10 is moved to move the field of view to an area adjacent to the field of view, and the procedure for searching for the search pattern is repeated there. The XYθ stage 10 is moved so as to bring the position to the center of the camera field of view. At this stage, the pattern is automatically captured as a search pattern for the first camera (hereinafter also referred to as a first search pattern).
Specifically, a predetermined area range is limited around the current visual field, and the visual field Vi (i = 1, 2, 3,...) A method of moving in the order of V1, V2, V3... (The method shown in FIG. 11), and limiting the predetermined rectangular area, changing the scan column in a raster scan, and changing the current column This is a method (not shown) of moving to a visual field adjacent to the current visual field in a straight line.
The second method example is an example in which the second search pattern is captured in the field of view of the second camera 32 after the first search pattern is captured by the first camera 31, and is shown in FIG. The center of the first search pattern is placed in the field of view of the first camera 31, and the XYθ stage 10 is rotated around a predetermined angle range with this as the center of rotation, so that the field of view of the second camera 32 is set to the preceding field of view. The first field of view is moved to the adjacent position (the order of the position of the moving field of view is, for example, V1, V2, V3, V4... The optimal order is set from the vicinity of the first field of view in consideration of the field of view movement and search time.) Repeat the procedure for searching for a pattern that matches the fiducial mark condition in the field of view. Automatic capture as 2 search patterns.
Here, when the center of the first search pattern is placed in the field of view of the first camera 31 and the registered reference pattern is searched, the first reference mark and the second reference mark are registered when the reference pattern is registered. Since the positions in the field of view of the respective first cameras and in the field of view of the second camera are known, the first camera and the second camera can be used under the condition that the first camera and the second camera remain fixed. The center of the first fiducial mark is preferably placed at a known position.

  In the second and third embodiments, when the XYθ stage 10 is moved to observe the movement of the XYθ stage 10 in the camera field of view and the necessary automatic setting is performed, a reference mark as a reference for viewing the motion is displayed in the field of view. However, it is desirable to take measures to avoid the automation that is the main purpose of the present invention. One of them is to move the XYθ stage 10 little by little and make necessary movement while confirming that the reference mark is observed in the field of view. As another method, it is also possible to set in advance a moving amount such that the reference mark does not come out of the field of view assuming that the field of view of the camera used in advance is the smallest. Of course, the movement amount in this case must be a movement amount that can definitely confirm the movement direction even if an error is taken into consideration.

In the automation of the position alignment system using the XYθ stage, it is an object of the present invention to make the position alignment system have all the four functions described above. To achieve the object, of course, However, even if the position alignment system does not have means for realizing all four methods for the above four functions, for example, the design of the components of the position alignment system is originally based on the present invention. If any of the above functions is specially made unnecessary, it is not necessary to use the method according to the present invention to realize the function, and means for realizing only the function that is insufficient for automation. As a result, the object of the present invention is achieved. In other words, the manpower that is the essential object of the present invention is reduced. If it is possible to achieve a position alignment system with an XYθ stage that does not need to be performed, an XYθ stage having a limited means among the four functions (means) embodied by each of the above four methods 1 Realizing a position alignment system is sufficient.
For example, an XYθ stage mechanism in which the actuator arrangement of the XYθ stage mechanism, which is a component of the XYθ stage position alignment system, and the sign relationship between the actuator operation direction and the operation are specially designed in advance together with the actuator driver design. And the actuator driver as a set as a component of the position alignment system, and the camera is arranged with the direction of the coordinate axis XY on one side with respect to the object to be imaged, the second method of the four methods The method for automatically adjusting the axis movement direction code as described above and the method for automatically determining the camera arrangement position as the third method will be unnecessary.
In addition, when other alternative means other than the above are implemented to realize some of the methods of the present invention, and it is not necessary to apply the means of the present invention, necessary functions of the functions of the present invention are provided. It would be sufficient if the position alignment system was provided.
As can be easily estimated from the above, standard products designed by each manufacturer as they are are used as they are as the components of the XYθ stage position alignment system, and these are freely arranged on site to construct the position alignment system. In such a case, it is necessary to provide the alignment control unit of the position alignment system with means for realizing a function corresponding to each method using all the four methods described above. As a practical problem, since it is considered that this is the case in many cases in the field of system construction, it is significant to combine all the above four means.

It is a figure which shows an example of the position alignment system of the XY (theta) stage which is the best form for solving this invention. FIG. 2 is a plan view and a side view of the XYθ stage shown in FIG. 1. 6 is a flowchart illustrating a processing flow in an example of a method for realizing the reference mark automatic registration function 41 according to the first embodiment. It is a flowchart which shows the specific detailed example of step S311 of FIG. It is a figure which shows the example of a registration pattern. It is a figure which shows the relative arrangement | positioning of the coordinate axes X and Y of the XY (theta) stage previously determined as a reference | standard by the calculation and control system inside the position alignment system in Example 2, and the positive direction of the coordinate axis XY and rotation angle (theta). In Example 2, it is a figure for demonstrating the method to adjust the axial freedom degree of the coordinate axes X and Y automatically. In Example 2, it is a figure for demonstrating the adjustment method of the rotation direction of rotation angle (theta) of an XY (theta) stage. In Example 2, it is a figure for demonstrating the other adjustment method of the rotation direction of rotation angle (theta) of an XY (theta) stage. In Example 3, it is a figure for demonstrating the realization method of the camera arrangement position automatic determination function 43. FIG. In Example 4, it is a figure for demonstrating the example of the method of capturing a search pattern in the visual field of a camera. In Example 4, it is a figure for demonstrating the example of the method of capturing a search pattern in the visual field of both the 1st camera and the 2nd camera.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 XY (theta) stage 11 Table part 11a Cross section wall 12 Actuator 12a Actuator 12b Actuator 12c Actuator 20 Object 30 Camera set 31 1st camera 32 2nd camera 33 3rd camera 40 Alignment control part 41 Reference mark automatic registration function 42 Axis movement direction code automatic setting function 43 Camera arrangement position automatic determination function 44 Search pattern automatic capture function 45 Automatic calibration function 46 Automatic alignment function 47 Final drive circuit section 101 First camera field of view 102 Second camera field of view

Claims (4)

Position alignment system using an XYθ stage that performs position alignment of an object to be imaged while measuring a reference mark on a workpiece (hereinafter also referred to as an object to be imaged) mounted on an XYθ stage that performs parallel movement and rotation In
With respect to an assumed movement of the XYθ stage, a captured image of a moving direction (hereinafter also referred to as a reference moving direction) measured by a captured image of a reference camera and a camera other than the reference (hereinafter also referred to as a non-reference camera). By comparing the movement direction measured by (hereinafter also referred to as non-reference movement direction), even if the reference camera and the non-reference camera are arranged on different sides with respect to the XYθ stage, the reference movement direction and the non-reference direction Adjustment means provided in the control section corresponding to each non-reference camera so that the movement direction is recognized as the same movement direction in the control section that calculates the movement coordinates inside the position alignment system. Equipped with a camera placement automatic judgment / adjustment means that automatically adjusts the sign for the direction of the coordinates, A position alignment system using an XYθ stage, characterized by automating setup and adjustment. The camera placement automatic determination / adjustment means is
A reference camera for a certain assumed movement (hereinafter also referred to as movement 3) related to the direction of the XY coordinates of the XYθ stage or a certain assumed movement (hereinafter also referred to as movement 4) related to the rotation direction. By comparing the movement measured by the captured image (hereinafter also referred to as reference movement) and the movement measured by the captured image of a camera other than the reference (hereinafter also referred to as non-reference camera) (hereinafter also referred to as non-reference movement) The way of changing the direction of the reference movement corresponding to the movement 3 is different from the way of changing the direction of the non-reference movement corresponding to the movement 3, or the direction of the reference movement corresponding to the movement 4 and the movement 4 When the direction of the non-reference movement corresponding to the movement 3 is different, the control unit thereafter changes the direction of the reference movement direction corresponding to the movement 3 and the non-standard movement corresponding to the movement 3. Used for moving coordinate calculation in the control unit by the X code adjustment parameter or Y code adjustment parameter provided in the control unit corresponding to each non-reference camera so that the coordinate change is recognized and the direction change is recognized. The position alignment system using an XYθ stage according to claim 1, wherein the sign for the direction of the coordinate axis to be adjusted is automatically adjusted. The camera placement automatic determination / adjustment means is
When a plurality of cameras are arranged opposite to the XYθ stage from different sides, the translation axis on the captured image of each camera can be freely set in the position alignment system corresponding to each camera. A sign adjustment parameter set that makes it possible to adjust the degree of freedom and rotational movement freedom, and the alignment control unit of the position alignment system drives the X-axis drive device of the XYθ stage in the positive direction for each camera. Movement direction of the reference measurement point on the captured image of the reference camera (hereinafter also referred to as X shift direction) and movement of the reference measurement point on the captured image of the camera when the Y-axis drive device of the XYθ stage is driven in the positive direction The relative relationship of the direction (hereinafter also referred to as the Y shift direction) is determined in advance in the calculation / control system inside the position alignment system. The method of making the relationship or the position of the reference measurement point on the captured image of the reference camera (hereinafter also referred to as + θ position) when the XYθ stage is rotated by a predetermined amount in the positive direction and the XYθ stage in the negative direction The position of the reference measurement point on the captured image (hereinafter also referred to as the -θ position) when the image is rotated by a predetermined amount to the position is emitted from the θ reference position and the line passing through the + θ position and the θ reference position. With respect to a straight line (hereinafter also referred to as a reference line) having a direction toward a θ reference position passing through a position (hereinafter also referred to as a predetermined position) obtained by a predetermined method within a region sandwiched by the passing straight line, The XYθ stage parallel movement axis and the degree of freedom of rotational movement and the position alignment can be determined by any of the methods of viewing in the direction and existing on the side determined in advance in the position alignment system. It is determined whether or not the parallel movement axis of the system and the degree of freedom of rotational movement match, and if the degrees of freedom do not match, the sign adjustment parameter set is adjusted so as to match, 2. The position alignment system using an XYθ stage according to claim 1, wherein the position alignment system is configured to match a degree of freedom of the position alignment system and a degree of freedom of the XYθ stage with respect to an image captured by a camera. The camera placement automatic determination / adjustment means is
A reference camera for a certain assumed movement (hereinafter also referred to as movement 3) related to the direction of the XY coordinates of the XYθ stage or a certain assumed movement (hereinafter also referred to as movement 4) related to the rotation direction. By comparing the movement measured by the captured image (hereinafter also referred to as reference movement) and the movement measured by the captured image of a camera other than the reference (hereinafter also referred to as non-reference camera) (hereinafter also referred to as non-reference movement) The method of changing the direction of the reference movement corresponding to the movement 3 is different from the way of changing the direction of the non-reference movement corresponding to the movement 3, or the direction of the reference movement corresponding to the movement 4 and the non-corresponding to the movement 4 When the direction of the reference movement is different, the control unit thereafter assumes that the way of changing the direction of the reference movement corresponding to the movement 3 and the way of changing the direction of the non-standard movement corresponding to the movement 3 are the same. The non-reference camera is set on the same side as the reference camera or on a different side with respect to the XYθ stage so that the coordinates can be calculated. Adjust the camera adjustment parameter provided in the control unit in the position alignment system, and then use the sign adjustment parameter and the camera adjustment parameter provided in the alignment control unit that substantially correspond to the reference camera to determine the direction of movement. This means that the XYθ stage can be recognized by the alignment control unit inside the position alignment system even if it is observed to move in different directions for each camera. The position alignment system using an XYθ stage according to claim 1 .

Images