JP3870847B2 - ポンプ - Google Patents
ポンプ Download PDFInfo
- Publication number
- JP3870847B2 JP3870847B2 JP2002166249A JP2002166249A JP3870847B2 JP 3870847 B2 JP3870847 B2 JP 3870847B2 JP 2002166249 A JP2002166249 A JP 2002166249A JP 2002166249 A JP2002166249 A JP 2002166249A JP 3870847 B2 JP3870847 B2 JP 3870847B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- flow path
- chamber
- outlet channel
- pump chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 claims description 59
- 230000007423 decrease Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Landscapes
- Reciprocating Pumps (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002166249A JP3870847B2 (ja) | 2002-06-06 | 2002-06-06 | ポンプ |
US10/430,314 US7011507B2 (en) | 2002-06-04 | 2003-05-07 | Positive displacement pump with a combined inertance value of the inlet flow path smaller than that of the outlet flow path |
EP03010687A EP1369584A3 (en) | 2002-06-04 | 2003-05-13 | Diaphragm pump |
CNB031363938A CN1307367C (zh) | 2002-06-04 | 2003-06-04 | 泵 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002166249A JP3870847B2 (ja) | 2002-06-06 | 2002-06-06 | ポンプ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004011535A JP2004011535A (ja) | 2004-01-15 |
JP2004011535A5 JP2004011535A5 (enrdf_load_stackoverflow) | 2005-04-21 |
JP3870847B2 true JP3870847B2 (ja) | 2007-01-24 |
Family
ID=30433881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002166249A Expired - Fee Related JP3870847B2 (ja) | 2002-06-04 | 2002-06-06 | ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3870847B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5828372B2 (ja) | 2010-09-21 | 2015-12-02 | セイコーエプソン株式会社 | 冷却装置及びプロジェクター |
JP5776447B2 (ja) | 2011-08-30 | 2015-09-09 | セイコーエプソン株式会社 | 噴射した流体によって生体組織を切除するための流体噴射装置に接続して用いられる制御装置および切除装置 |
US9243619B2 (en) | 2011-09-13 | 2016-01-26 | Seiko Epson Corporation | Liquid feed pump and circulation pump with detection units to detect operating states of the pumps |
CN110541807B (zh) * | 2018-05-29 | 2025-02-11 | 哈尔滨工业大学 | 一种单阀双腔压电泵及其工作方法 |
-
2002
- 2002-06-06 JP JP2002166249A patent/JP3870847B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2004011535A (ja) | 2004-01-15 |
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